CN108627234A - Speed estimates vibration measurement with laser phase demodulating method - Google Patents
Speed estimates vibration measurement with laser phase demodulating method Download PDFInfo
- Publication number
- CN108627234A CN108627234A CN201810208083.1A CN201810208083A CN108627234A CN 108627234 A CN108627234 A CN 108627234A CN 201810208083 A CN201810208083 A CN 201810208083A CN 108627234 A CN108627234 A CN 108627234A
- Authority
- CN
- China
- Prior art keywords
- phase
- speed
- displacement
- laser
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Speed estimates vibration measurement with laser phase demodulating method and belongs to vibration measurement with laser technical field；The phase demodulating method includes the following steps：Gain and bias correction are carried out to original interference orthogonal signalling, calculate phase sequence, calculate initial displacement, it is small several to estimate speed, displacement, phase integer item and phase, according to actual phase it is small several and estimate phase it is small it is several between difference determine actual phase integral ring and actual displacement, realize phase demodulating；The present invention can solve the problems, such as that conventional phase demodulation method existing sample frequency when vibration at high speed measures is excessively high in homodyne Vibration measuring technique using laser interferometer and data volume is excessive, vibration measurement speed can be effectively improved, hardware cost and expansion of laser light vialog application range are reduced.
Description
Technical field
The invention belongs to vibration measurement with laser technical field, relates generally to a kind of speed and estimate vibration measurement with laser phase demodulating method.
Background technology
Homodyne vibration measurement with laser technology have simple in structure, high certainty of measurement, wide dynamic range and it is non-linear be easy to compensation etc.
Advantage, be widely used in displacement dynamic measure, vibration measurement and monitoring, ultraprecise equipment and the system integration, scientific research with
The fields such as experiment.It is high-end to mostly use four-way homodyne orthogonal laser interference vibration measuring side with homodyne laser vibration measurer in leading-edge field
Case obtains the orthogonal photosignal of two-way using Polarized light phase-shift interference technique, by signal processings such as phase demodulatings, realizes position
Move the high-acruracy survey with vibration.However, the application of some such as superlow frequency vibrating calibrations, semiconductor lithography needs high speed measurement
Scene proposes new challenge to homodyne vibration measurement with laser technology.
Phase demodulating is one of the key technique that homodyne vibration measurement with laser technology realizes vibration at high speed signal measurement, is limit
The principal element that measuring speed processed improves.Traditional phase demodulation algorithm can carry out phase exhibition to arctangent computation result
It opens, determines phase integer item, continuous vibration signal is obtained, according to nyquist sampling theorem, it is desirable that sample rate is more than twice
Interference fringe change maximum frequency, with prevent phase integer item erroneous calculations (1.Greco V, Molesini G,
Quercioli F.Accurate polarization interferometer.Review of Scientific
Instruments, 1995,66 (7)：3729-3734；2.Pengcheng Hu, et.al.DC-offset homodyne
Interferometer and its nonlinearity compensation.Optics Express, 2015,23 (7)：
8399-8408).However, this method in face of measure big stroke long period vibration at high speed signal when, to data acquisition processing system
Propose rigors.Such as when it is 314mm/s to vibrate maximum speed, interference fringe change frequency is 1MHz, it is desirable that mostly logical
Road simultaneous data-acquisition sample rate is at least 2MS/s；Secondly, the sampling number of interference signal will be up to hundreds of million, such as 0.1
In~0.01Hz vibration frequency ranges, vibration amplitude peak-to-peak value is 1m, single vibration period simultaneous data-acquisition acquisition points
At least 20M, at the same it is practical generally require when measuring to acquire multiple vibration period signals take its average value, there are hundreds of million numbers
According to amount.Therefore conventional phase demodulating algorithm is applied to more demanding to hardware condition when super low-frequency vibration measurement, and high-speed data is adopted
Collection, mass data transfers, storage and processing will lead to problems such as computer Insufficient memory, program operation crash occur.
To sum up, two main problems that phase demodulating method faces limit homodyne orthogonal laser interference vibration measuring technology and measure
Vibration at high speed：
(1) when measuring vibration at high speed signal, since nyquist sampling theorem is limited, adopting needed for high-speed data acquisition
Sample frequency is excessively high；The sampling number of interference signal is correspondingly excessive, and data volume is excessive, needs transmission and processing mass data；
(2) measure vibration at high speed data signal acquisition it is higher with process part hardware performance requirements, high-performance hardware at
This is higher.
China and foreign countries researcher, which has carried out Kalman estimating thought, to be applied to the research in phase demodulating field and proposes each
Kind scheme (1.Tao L, Liu Z, Zhang W, et al.Frequency-scanning interferometry for
dynamic absolute distance measurement using Kalman filter.Optics Letters,
2014,39(24):6997-7000；2.Kulkarni R,Rastogi P.Phase derivative estimation from
a single interferogram using a Kalman smoothing algorithm.Optics Letters,
2015,40(16):3794-3797.).However, such scheme is on the one hand without being directed to homodyne orthogonal laser interference vibration meter in height
Phase demodulating problem when fast vibration measurement proposes solution, on the other hand can not also solve conventional phase solution during high speed measures
Required sample frequency that tune method is brought is excessively high and the excessive problem of data volume.
To sum up, how for phase demodulating method problem in homodyne orthogonal laser vialog, a kind of can solve at a high speed is provided
The excessively high Phase Demodulation Method of Optic scheme with data volume problems of too of required sample frequency in measurement, to effectively improving vibration measurement speed
Degree, reduction hardware cost and expansion vialog application range are all of great significance.
Invention content
The purpose of the present invention is be directed to conventional phase demodulating algorithm limitation homodyne orthogonal laser interference vibration measuring technology to measure speed
The problem of spending provides a kind of new phase demodulating method, and required sample frequency is excessively high in being measured for high speed and data volume is excessive
The problem of carry out phase demodulating method innovation, so that requirement of the high speed to sample rate and memory when measuring is reduced, improving vialog can
The maximum speed of measurement meets the needs of vibration at high speed measurement.
Technical solution of the invention is：
A kind of speed estimates vibration measurement with laser phase demodulating method, and this approach includes the following steps：
(1) to collected original interference orthogonal signalling IxAnd IyCarry out gain and bias correction；
(2) according to IxAnd IyPhase sequence is calculated as follows
Arctan () is arctan function in formula；
(3) phase at initial two momentWithIn a striped, it is calculated as follows corresponding initial two
The displacement d at moment1And d2：
λ is optical maser wavelength in formula；
(4) for later at the time of i=3,4 ..., estimate the speed at corresponding moment, displacement, phase integer as follows
Item and phase are small several：
In formulaIt is speed, displacement, phase integer item and the small several estimation results of phase, △ T respectively
It is sampling time interval, round () is to seek the bracket function for being rounded up to nearest integer, and rem () is to ask remaining after being divided by
Several remainder functions；Remainder function rem (x, the y)=x-ny, x and y is parameter, n=round (x/y) in formula；
(5) small several according to actual phaseIt is small several with phase is estimatedBetween difference, repaiied according to following formula
Just obtain the actual phase integral ring k at corresponding momentiWith actual displacement di：
Initial two displacement d1And d2Meet | d1-d2|<λ/4。
The technological innovation of the present invention and the good result of generation are：
(1) present invention propose it is a kind of suitable for high speed homodyne orthogonal laser interference vibration measuring speed estimate phase demodulating side
Method, this method can break through the limitation of Nyquist sampling frequency in conventional phase demodulation method, and sample frequency is made to depend on maximum
Acceleration rather than maximum speed reduce high speed and measure requirement to hardware sample frequency, correspondingly reduces and is acquired
Data volume, the requirement to hardware memory spatial content reduces, to efficiently solve demodulation speed existing for prior art
Slowly, the inherent shortcoming that data volume is big, hardware requirement is high.
(2) present invention is created under the premise of homodyne orthogonal laser interference vibration meter can be made to realize that high speed measures by proposing
New Phase Demodulation Method of Optic scheme is reduced to the hard of the data acquisition and procession equipment of homodyne orthogonal laser interference vibration meter
Part performance requirement expands the application range of high-rate laser vialog to reduce hardware cost, is applied to for laser vibration measurer same
The application scenarios such as the experiment of the exact science of Shi Yaoqiu high measurement accuracies and high measurement speed, precision engineering provide strong support.
Description of the drawings
Fig. 1 is the step schematic diagram that speed estimates vibration measurement with laser phase demodulating method.
Fig. 2 is required sample rate and vibration frequency relationship when being measured to maximum speed 1m/s simple harmonic oscillations.
Specific implementation mode
The specific implementation mode of the present invention is described in detail below in conjunction with the accompanying drawings.
A kind of speed estimates vibration measurement with laser phase demodulating method, and this approach includes the following steps：
(1) to collected original interference orthogonal signalling IxAnd IyCarry out gain and bias correction；
(2) according to IxAnd IyPhase sequence is calculated as follows
Arctan () is arctan function in formula；
(3) phase at initial two momentWithIn a striped, it is calculated as follows corresponding initial two
The displacement d at moment1And d2：
λ is optical maser wavelength in formula；
(4) for later at the time of i=3,4 ..., estimate the speed at corresponding moment, displacement, phase integer as follows
Item and phase are small several：
In formulaIt is speed, displacement, phase integer item and the small several estimation results of phase, △ T respectively
It is sampling time interval, round () is to seek the bracket function for being rounded up to nearest integer, and rem () is to ask remaining after being divided by
Several remainder functions；Remainder function rem (x, the y)=x-ny, x and y is parameter, n=round (x/y) in formula；
(5) small several according to actual phaseIt is small several with phase is estimatedBetween difference, according to following formula carry out
It corrects and obtains the actual phase integral ring k at corresponding momentiWith actual displacement di：
Initial two displacement d1And d2Meet | d1-d2|<λ/4。
One embodiment of the present of invention is provided with reference to Fig. 1~Fig. 2.In the present embodiment, speed of the present invention is estimated sharp
Flash ranging shakes phase demodulating method applied to homodyne orthogonal laser interference vibration meter high speed vibration measuring.The laser vibration measurer is by interference part
Divide, probe portion and data acquisition process part three parts composition, laser form orthogonal dry after interference portion and probe portion
It relates to signal and is acquired by computer and is handled.Fig. 1 is the step schematic diagram that speed estimates vibration measurement with laser phase demodulating method.
In the present embodiment, the computer in data acquisition process part is mounted with 24 PXI interface multi-channel synchronous data acquisition cards, and
The data acquisition process program based on software through pictures platform is used, is controlled chronologically by program according to steps presented
Speed persistently is carried out to the interference orthogonal signalling of acquisition and estimates the digital demodulations such as phase demodulating and resolving, obtains surveyed vibration signal
Displacement and phase.
Fig. 2 is required sample rate and vibration frequency relationship when being measured to maximum speed 1m/s simple harmonic oscillations.Simple harmonic quantity shakes
Dynamic maximum speed is 1m/s, and according to nyquist sampling theorem, conventional phase demodulation method requires sample rate up to 6.32MHz,
And sample rate depends on maximum velocity.However, the present invention speed estimate vibration measurement with laser phase demodulating to frequency from 1Hz to
The vibration of 1kHz allow accordingly minimum sample rate be 6.3kHz to 200kHz, at this time sample rate depending on peak acceleration without
It is maximum speed, therefore sample rate at least reduces 95%, collected data volume also correspondingly greatly reduces.
Therefore, speed proposed by the present invention is estimated vibration measurement with laser phase demodulating method and can be broken through in conventional phase demodulation method
The limitation of Nyquist sampling frequency reduces requirement of the high speed measurement to hardware sample frequency, correspondingly reduces and acquired
Data volume, requirement to hardware memory spatial content reduces, and speed estimate the application of vibration measurement with laser phase demodulating method can
Hardware cost is reduced, the application range of laser vibration measurer is expanded.
Claims (2)
1. a kind of speed estimates vibration measurement with laser phase demodulating method, it is characterised in that this approach includes the following steps：
(1) to collected original interference orthogonal signalling IxAnd IyCarry out gain and bias correction；
(2) according to IxAnd IyPhase sequence is calculated as follows
Arctan () is arctan function in formula；
(3) phase at initial two momentWithIn a striped, corresponding initial two moment are calculated as follows
Displacement d1And d2：
λ is optical maser wavelength in formula；
(4) for later at the time of i=3,4 ..., estimate as follows the speed at corresponding moment, displacement, phase integer item and
Phase is small several：
In formulaIt is speed, displacement, phase integer item and the small several estimation results of phase respectively, △ T are to adopt
Sample time interval, round () are to seek the bracket function for being rounded up to nearest integer, and rem () is to seek the remainder after being divided by
Remainder function；Remainder function rem (x, the y)=x-ny, x and y is parameter, n=round (x/y) in formula；
(5) small several according to actual phaseIt is small several with phase is estimatedBetween difference, be modified according to following formula
To the actual phase integral ring k at corresponding momentiWith actual displacement di：
2. speed according to claim 1 estimates vibration measurement with laser phase demodulating method, it is characterised in that：Described initial two
Displacement d1And d2Meet | d1-d2|<λ/4。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810208083.1A CN108627234B (en) | 2018-03-14 | 2018-03-14 | Speed estimates vibration measurement with laser phase demodulating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810208083.1A CN108627234B (en) | 2018-03-14 | 2018-03-14 | Speed estimates vibration measurement with laser phase demodulating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108627234A true CN108627234A (en) | 2018-10-09 |
| CN108627234B CN108627234B (en) | 2019-09-20 |
Family
ID=63706231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810208083.1A Active CN108627234B (en) | 2018-03-14 | 2018-03-14 | Speed estimates vibration measurement with laser phase demodulating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108627234B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09222356A (en) * | 1995-12-12 | 1997-08-26 | Akashi:Kk | Device for calibrating vibration pick-up |
| KR100994247B1 (en) * | 2008-08-20 | 2010-11-12 | 한국과학기술원 | Method and apparatus for determining phase sensitivity of an accelerometer based on an analysis of the harmonic components of the interference signal |
| CN104897273A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Quadrature error-free single-path circular polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter |
| CN104897271A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Polarization resistance single line polarization interference and single Woodward prism spectral homodyne laser vibrometer |
| CN104913838A (en) * | 2015-06-12 | 2015-09-16 | 哈尔滨工业大学 | Anti-polarization mixing single-path circular polarization interference and single wollaston prism splitting-type homodyne laser vibrometer |
| CN104931125A (en) * | 2015-06-12 | 2015-09-23 | 哈尔滨工业大学 | Anti-polarization-mixing double-line polarization interference and single Wollaston prism beam splitting homodyne laser vibrometer |
| CN104964735A (en) * | 2015-07-06 | 2015-10-07 | 江苏安智光电科技有限公司 | Laser phase generated carrier doppler vibration signal detection system and demodulation method |
| CN106248195A (en) * | 2016-08-08 | 2016-12-21 | 哈尔滨工业大学 | The high robust homodyne laser vibration measurer of additional phase shift compensation and four steppings |
| CN106338333A (en) * | 2016-08-08 | 2017-01-18 | 哈尔滨工业大学 | High-robustness homodyne laser vibration measurer based on wave plate yawing and four-step adjustment method thereof |
-
2018
- 2018-03-14 CN CN201810208083.1A patent/CN108627234B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09222356A (en) * | 1995-12-12 | 1997-08-26 | Akashi:Kk | Device for calibrating vibration pick-up |
| KR100994247B1 (en) * | 2008-08-20 | 2010-11-12 | 한국과학기술원 | Method and apparatus for determining phase sensitivity of an accelerometer based on an analysis of the harmonic components of the interference signal |
| CN104897273A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Quadrature error-free single-path circular polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter |
| CN104897271A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Polarization resistance single line polarization interference and single Woodward prism spectral homodyne laser vibrometer |
| CN104913838A (en) * | 2015-06-12 | 2015-09-16 | 哈尔滨工业大学 | Anti-polarization mixing single-path circular polarization interference and single wollaston prism splitting-type homodyne laser vibrometer |
| CN104931125A (en) * | 2015-06-12 | 2015-09-23 | 哈尔滨工业大学 | Anti-polarization-mixing double-line polarization interference and single Wollaston prism beam splitting homodyne laser vibrometer |
| CN104964735A (en) * | 2015-07-06 | 2015-10-07 | 江苏安智光电科技有限公司 | Laser phase generated carrier doppler vibration signal detection system and demodulation method |
| CN106248195A (en) * | 2016-08-08 | 2016-12-21 | 哈尔滨工业大学 | The high robust homodyne laser vibration measurer of additional phase shift compensation and four steppings |
| CN106338333A (en) * | 2016-08-08 | 2017-01-18 | 哈尔滨工业大学 | High-robustness homodyne laser vibration measurer based on wave plate yawing and four-step adjustment method thereof |
Non-Patent Citations (2)
| Title |
|---|
| PENGCHENG HU等: "《DC-offset-free homodyne interferometer and its nonlinearity compensation》", 《OPTICS EXPRESS》 * |
| 于梅等: "《两种激光绝对法振动测试技术的比对实验及分析》", 《现代测量与实验室管理》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108627234B (en) | 2019-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110596785B (en) | Vibration noise correction compensation method suitable for atomic interference gravimeter and portable device | |
| CN102788558B (en) | Three-dimensional deformation measuring system and three-dimensional deformation measuring method combining speckle correlation and speckle interference | |
| CN103256929A (en) | Estimation of conventional inertial sensor errors with atomic inertial sensor | |
| CN103075969B (en) | Differential laser interference nano-displacement measurement method and differential laser interference nano-displacement measurement apparatus | |
| CN102332956B (en) | Dispersion compensation method for broadband light source | |
| US20050065728A1 (en) | Method and apparatus for compensating attitude of inertial navigation system and method and apparatus for calculating position of inertial navigation system using the same | |
| CN104048621B (en) | A kind of digital phase-shifting technique three-dimensional measurement technology of profiling phase error detecting method based on constant phase coding | |
| KR20100022691A (en) | Method and apparatus for determining phase sensitivity of an accelerometer based on an analysis of the harmonic components of the interference signal | |
| CN105043243A (en) | Orthogonal homodyne laser interferometer and measurement method thereof | |
| CN105571517A (en) | Modified coherence peak demodulation method for fiber end face detection | |
| CN107806821A (en) | With the difference single-frequency interference signal processing unit and method of integrated four photodetectors | |
| CN104061998A (en) | Diffuse reflection type homodyne orthogonal laser vibration measurer | |
| Zhong et al. | Vision-based measurement system for structural vibration monitoring using non-projection quasi-interferogram fringe density enhanced by spectrum correction method | |
| CN108801436B (en) | The high-rate laser vialog of phase demodulating is estimated based on speed | |
| CN102680010B (en) | Quick and high-precision low coherence interference demodulation method based on calibration algorithm and phase shift technology | |
| CN108627234B (en) | Speed estimates vibration measurement with laser phase demodulating method | |
| CN105698702A (en) | Diplopore heterodyne ineterferometer based on acousto-optic low-frequency difference phase shift | |
| CN101738167A (en) | Resonant cavity frequency stabilization-based absolute distance measurement system and implementing method thereof | |
| CN108801435B (en) | Based on the compound high-rate laser vialog for estimating phase demodulating of speed, acceleration | |
| CN108627235B (en) | Speed, acceleration is compound to estimate vibration measurement with laser phase demodulating method | |
| JP2003270096A (en) | Measurement of optical characteristics of device under test | |
| CN105571516A (en) | Full field of view low frequency heterodyne interferometer | |
| CN205066684U (en) | System is interfered mutually to harmonious moving of computer control | |
| EP3012577B1 (en) | Method for measuring a deformation of a surface of an object, computer program, and computer readable recording medium | |
| KR20150015200A (en) | Device for measuring frequency of power based on zero-crossing and method for measuring frequency of power based on zero-crossing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |