CN101995211B - On-line debugging device and method for single frequency laser polarization interferometer - Google Patents
On-line debugging device and method for single frequency laser polarization interferometer Download PDFInfo
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- CN101995211B CN101995211B CN201010296976XA CN201010296976A CN101995211B CN 101995211 B CN101995211 B CN 101995211B CN 201010296976X A CN201010296976X A CN 201010296976XA CN 201010296976 A CN201010296976 A CN 201010296976A CN 101995211 B CN101995211 B CN 101995211B
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Abstract
The invention provides an on-line debugging device and method for a single frequency laser polarization interferometer. The device comprises a frequency stabilized laser, an optoisolator, a polarization state rotating mechanism, a single frequency laser polarization interferometer to be detected, an optical transmission and reflection mechanism, an optical power meter, a multiway orthogonal interference signal detector, an interference signal acquisition and analysis system and an air flotation vibration-isolation optical platform. The invention is characterized in that the device integrates the functions of generation, rotation and measurement of high polarization degree lasers, and characteristic analysis on the orthogonal interference signal output by the interferometer, and completes installation and debugging of the integrated interferometer through the on-line performance testing on polarization optical elements and the evaluation on the light intensity output by the interferometer and the amplitude and phase distortion of the interference signal, thereby reducing the inherent nonlinear error of the optical path of the single frequency laser polarization interferometer to below nm and enhancing the measuring accuracy of the interferometer. The invention has the advantages of simple structure, high stability and reliability, and low cost, is simple in operation, and can complete on-line evaluation on the performance of the single frequency polarization laser interferometer.
Description
Technical field
What the present invention relates to is a kind of installation and debugging device of single-frequency laser polarized interferometer, is specifically related to reduce device and debugging apparatus in the integrated making process of laser interferometer of light path inherent nonlinearity error.
Background technology
Nano measurement relates to fields such as microelectronics, material science as the basis of nanosecond science and technology.The laser interferometry technology has advantages such as untouchable measurement, measuring accuracy is high, measuring speed is fast, is widely used in the nano measurement field.The development of nano measurement technology requires laser interferometer system that environment is had stronger adaptive faculty, has high stability and low drift.Polarized interferometer has the characteristics of common light path, times light path, and environmental impact is reduced greatly, has improved the systematic survey resolving power simultaneously, but the polarization laser interferometer also exists polarization optical element many, and light path is complicated; The relative mounting positions precision prescribed is high, is subject to vibration effect; The performance and the location parameter of polarizer have dependence to temperature, make interferometer be prone to deficiencies such as temperature influence, make in its practicability process to face many difficulties.The discrete interferometer structure that relies on the optical-mechanical fixed form to build, the fixing mechanical hook-up that depends on of each optical element keeps relative position motionless more, and the position adjustments method is complicated, is subject to environmental disturbances.If can realize the relative permanent fixation of each optical element in the interferometer; And remove element mechanical fixation and holding device, and make each optical element become one physically, then the stability of interferometer and reliability will greatly improve; Particularly resistance to shock and temperature stabilization performance; By means of the compact sized optical selection of components, can further reduce the yardstick of interferometer simultaneously, realize the miniaturization of polarization laser interferometer.Optical system is integrated effectively have been reduced because the error of the interferometer measurement value that linear drift causes, has improved the measuring accuracy and the anti-jamming capacity of interferometer.
In interferometer miniaturization and integrated process,, greatly reduced the Measurement Resolution and the precision of interferometer owing to receive the puzzlement of nonlinearity erron.The nonlinearity erron of analyzing interferometer theoretically mainly is that position and the performance imperfection thereof by optical element that interferometer adopts causes.The method that is used for compensating interferometer appearance nonlinearity erron has a lot, mainly can be divided into two kinds of Active Compensation and passive compensation methodes.By Heydemann (A laser measurement system for the high precision calibration of displacement transducers.Measurement Science and Technology; 1996; 7 (6): the Active Compensation method that 911-917.) proposes; Though can well reduce nonlinearity erron, can not handle mass data in real time.
The people such as tieing up C Chu that wears of Anjelen Sci. & Tech. Inc in 2006 discloses a kind of system and method (CN1873368) that is used for interferometer non-linearity compensation; The interferometer position data that from measuring-signal, generates is carried out the method for nonlinear compensation, comprises based on the digital position values that receives generating first group of nonlinear parameter; China National Measuring Science Research Inst. in 2010 is high thinks the interferometer (CN101839686A) that people such as field discloses a kind of laser interferometer nonlinearity erron modification method, device and used it; Utilize the harmonic wave separation revised law that said interferometer non-linearity error is revised, make the nonlinearity erron correction of single frequency laser interferometer reach optimization.Said method all belongs to the data Retreatment method of interferometer output signal, does not fundamentally reduce interferometer light path unintentional nonlinearity error.
Summary of the invention
The object of the present invention is to provide a kind of inherent nonlinearity error that can reduce single-frequency laser polarized interferometer light path, improve the single-frequency laser polarized interferometer on-line debugging device of the measuring accuracy of interferometer.The present invention also aims to provide a kind of single-frequency laser polarized interferometer on-line debugging method.
The objective of the invention is to realize like this:
Single-frequency laser polarized interferometer on-line debugging device of the present invention is by the frequency stabilized laser 1, optoisolator 2, the polarization state rotating mechanism 3 that place on the air supporting vibration-isolating platform 9, and single-frequency laser polarized interferometer to be measured 4, optical transmission reflecting mechanism 51,52, light power meter 61,62, multichannel quadrature interference signal detector 71～74, interference signal collection are formed with analytic system 8, air supporting vibration isolation optical table 9; Send the flashlight that becomes a branch of high polarization degree of stability behind the polarized light optoisolator 2 by frequency stabilized laser 1, behind polarization state rotating mechanism 3, get into testing laser interferometer 4; Flashlight is divided into two bundles 41,43 by interferometer 4; After two- beam 41,43 passes through the optical transmission reflecting mechanism 51,52 perpendicular to the beam Propagation direction respectively; Transmitted light 42,44 gets into light power meter 61,62 thereafter respectively; Reflected light returns interferometer 4 along former road, after being received by multichannel quadrature interference signal detector 71～74 respectively from the interference signal light 45～47 of interferometer 4 each port Port3～Port6 output, forms the quadrature interference signal; Be admitted to 8 pairs of interference signals of interference signal collection and analytic system straight, exchange amplitude and interferometric phase is analyzed, provide the measurement performance and the light path nonlinearity erron parameter of interferometer.
(1) wavelength of described frequency stabilized laser 1 requires to select according to interferometer to be measured; As to adopt wavelength be the He-Ne laser of 632.8nm, and frequency stability is greater than 10-7, and light-intensity variation is less than 0.5%; Spot diameter has and highly regulates and horizontal vertical angle beat regulatory function less than 1mm;
(2) described optoisolator 2 comprises polarizing prism 201,203 and Faraday spinner 202, and it has unidirectional transmission property, the input light source is risen partially, and prevent the light beam return light source, and is as shown in Figure 2;
(3) described polarization state rotating mechanism 3 can be realized the rotation to 0～360 ° of incident light polarization state;
(4) described optical transmission reflecting mechanism 51,52 catoptron 501 that passes through that comprises an adjustable positions is placed on the shaking table 502 that micro-displacement and vibration signal can take place; Pass through catoptron and can the incident light perpendicular to minute surface be divided into two bundles, a branch of transmission, a branch of reflection, transmitted light and catoptrical power ratio b are 1%≤b≤50%; The amplitude that shaking table is subjected to displacement is that nanometer arrives micrometer range, and vibration frequency is DC～1kHz, and is as shown in Figure 3;
(5) described multichannel quadrature interference signal detector 71～74 is made up of the photodetector that four detection wavelength coverages and Frequency Stabilized Lasers are complementary, and can gather and measure the alternating current-direct current amplitude and the interferometric phase of interference signal, and signal to noise ratio (S/N ratio) is greater than 80dB;
(6) described interference signal collection and analytic system 8 are with the acquired signal of light power meter 61,62 and multichannel quadrature interference signal detector 71～74; Be sent to system 8 through signalling channel 81, it can realize resolving and analyzing the nonopiate phase shift parameters of interference signal direct current amplitude, interchange amplitude, contrast, interferometric phase, four road interference signals.
Totally 8 polarization optical elements are integrated by polarization splitting prism 401,405,408, depolarized Amici prism 406, quarter wave plate 402,404,407 and 1/2 wave plate 404 for described single-frequency laser polarized interferometer 4 to be measured, and status requirement is following:
(1) bottom surface of polarization splitting prism 401 is in x, z-plane;
(2) quarter wave plate 402 is located in y, the z-plane, and initial fixation is in the side of polarization splitting prism 401, and the initial position and the dextrorotation of y axle of fast axle are transmitted 45.0 °;
(3) quarter wave plate 403 is located in x, the y plane, and initial fixation is on polarization splitting prism 401 side relative with incident light, and the initial position of fast axle and y axle are rotated counterclockwise and are 45.0 °;
(4) 1/2 wave plates 404 are positioned at y, z-plane, and initial fixation is on the relative side of polarization splitting prism 401 and quarter wave plate 402, and the initial position and the dextrorotation of y axle of fast axle are transmitted 22.5 °;
(5) depolarization Amici prism 406 bottom surfaces are in x, z-plane, initial fixation on the side of 1/2 wave plate (404), bottom surface and polarization splitting prism 401 coplanes;
(6) polarization splitting prism 405 bottom surfaces are in x, z-plane, initial fixation on depolarization Amici prism 406, bottom surface and polarization splitting prism 401 coplanes;
(7) quarter wave plate 407 is positioned at x, y plane, and initial fixation is at depolarization Amici prism 406, and the initial position and the dextrorotation of y axle of fast axle are transmitted 45.0 °;
(8) bottom surface of polarization splitting prism 408 is in x, z-plane, initial fixation on quarter wave plate (407), bottom surface and polarization splitting prism 401 coplanes.
Single-frequency laser polarized interferometer on-line debugging method of the present invention is: single-frequency laser polarized interferometer 4 installation and debugging processes to be measured, the fast and slow axis position of wave plate 402,403,404,407 are core and emphasis of adjustment:
(1) the quarter wave plate 402 main conversion that realize folded light beam 41 polarization states of polarization splitting prism 401; Rotation quarter wave plate 402; The angle of the fast axle of fine setting and y axle, and make polarization splitting prism 401 maximum with respect to the Output optical power of 402 installation sides, make the luminous power minimum of returning light source 1 simultaneously;
(2) the quarter wave plate 403 main conversion that realize transmitted light beam 42 polarization states of polarization splitting prism 401; Rotation quarter wave plate 403; The angle of the fast axle of fine setting and y axle, and make polarization splitting prism 401 maximum with respect to the Output optical power of 402 installation sides, make the luminous power minimum of returning light source 1 simultaneously;
(3) 1/2 wave plates 404 are mainly realized the adjusting to two output beams, 47～48 power ratios of two output beams 45～46 of the output port Port3 of interferometer 4 and Port4 or output port Port5 and Port6; Rotate the angle of the fast axle of 1/2 wave plate 404 fine setting and y axle, making the beam intensity ratio of Port3 and Port4 (perhaps Port5 and Port6) is 1: 1;
(4) the main adjusting that realizes the output port Port3 of interferometer 4 and Port5 (perhaps Port4 and Port6) output beam 45,47 (perhaps 46,48) interference signal orthogonality of quarter wave plate 407; On two optical transmission reflecting mechanisms 51, load vibration signal, the interference signal of multichannel quadrature interference signal detector 71～74 outputs is analyzed, obtain the lissajous figures of orthogonal signal, require nonlinear phase shift less than 1 °.
The integrated installation of described polarized interferometer 4, the technology of employing optical cement bonding coat 409 is the relative position of polarization splitting prism 401,405,408, depolarization Amici prism 406, quarter wave plate 402,403,407 and 1/2 wave plate 404 fixedly.
The present invention collects generation, rotation, the measurement of high-polarization laser, and the specificity analysis of the quadrature interference signal of interferometer output is in one.Be used for the performance test and the evaluation of the integrated process optical component of interferometer, laser interferometer.Through to the test of the on-line performance of polarization optical element and the amplitude of interferometer output intensity and interference signal, the evaluation of phase distortion; Accomplish the installation and debugging of integrated interferometer; Reduce the inherent nonlinearity error of single-frequency laser polarized interferometer light path greatly, improve the measuring accuracy of interferometer.
Compared with prior art, the invention has the advantages that:
(1) single-frequency laser polarized interferometer on-line debugging device comprises: the polarized light that (1) is made up of frequency stabilized laser 1, optoisolator 2, polarization state rotating mechanism 3 takes place and regulating device; The light intensity sniffer of forming by optical transmission reflecting mechanism 51,52 and light power meter 61,62; And the optical interference signals sniffer of forming by multichannel quadrature interference signal detector 71～74; It integrates the generation of polarized light, the detection and the interferometer interference pattern of polarized light measured; A complete optical component Performance Detection and interferometer performance evaluating system have been constituted; Can satisfy big extremely logarithm single frequency laser interferometer, particularly adopt the Performance Detection and assessment requirement of the polarized interferometer of multichannel orthogonal signal output;
(2) the on-line debugging device is online to the measurement of laser interferometer with assessment, has real-time, the interferometer components and parts fixing with installation process in; Can estimate the performance of interferometer,, revise the position adjustments amount of optical element simultaneously according to the nonlinearity erron parameter amplitude of interferometer output; Reduced the amplitude of interferometer inherent nonlinearity error greatly; Its numerical value is reduced to below the nm,, can makes its Measurement Resolution be lower than 0.1nm by means of the nonlinearity erron correction of software;
(3) the on-line debugging device has fully taken into account the optical characteristics of polarization laser interferometer; Having simplified the element of interferometer simultaneously installs and adjustment process; Through the regulating step of optimizing; The adjusting that makes each components and parts is not crosstalked with fixing separate, has greatly improved the integrated efficient of interferometer.
(4) the on-line debugging device substitutes the detection and the analysis of optical element polarization state with polarized light intensity; With the contrast of interferometer and the nonlinearity erron evaluation index of interferometer performance the most; Assessment and measuring process have been simplified greatly; Its temperature of integrated interferometer and the stability of vibration that obtain through the line debugging apparatus are superior to traditional discrete interferometer greatly, can satisfy the active demand of nano measurement to laser interferometer.
Description of drawings
Fig. 1 is a single-frequency laser polarized interferometer on-line debugging device;
Fig. 2 is the structural representation of optoisolator;
Fig. 3 is the structural representation of optical transmission reflecting mechanism;
Fig. 4 is a single-frequency laser polarization laser interferometer structure synoptic diagram to be debugged;
Fig. 5 is the installation and debugging schematic flow sheet of single-frequency laser polarization laser interferometer;
Fig. 6 is the lissajous figures and the nonopiate phase measurement figure of interferometer output orthogonal signal;
Fig. 7 interferometer displacement measurement and nonlinearity erron calibration result thereof.
Embodiment
Wait to debug the single-frequency laser polarized interferometer by polarization splitting prism 401,405,408 and quarter wave plate 402,404,407 and 1/2 wave plate 404 totally 8 polarization optical elements form, its light channel structure is as shown in Figure 4.Its installation requirement is following:
Its concrete installation and debugging process coarse adjustment and two steps of fine tuning of being divided into as shown in Figure 5, concrete grammar is following:
(1) bottom surface of frequency stabilized laser 1 output beam and air supporting vibration-isolating platform, promptly interferometer is installed parallel with integrated reference field;
(2) bottom surface of polarization splitting prism 401 is parallel with reference field; Laser beam is perpendicular to the plane of incidence of prism 401 and pass its center; It is 1: 1 that rotatory polarization attitude rotating mechanism 3 makes the ratio of Port1 and Port2 mouth light intensity, and the splitting ratio deviation is less than 5%, and its total light intensity transmissivity is greater than 95%;
(3) quarter wave plate 402 and optical transmission reflecting mechanism 51 are installed, light beam 41 is returned along former road, the fast axle of rotation quarter wave plate 402 and the angle of y axle, and make polarization splitting prism 401 maximum with respect to the Output optical power of 402 installation sides;
(4) quarter wave plate 403 and optical transmission reflecting mechanism 52 are installed; Light beam 42 is returned along former road; Block optics Transflective mechanism 51, the fast axle of rotation quarter wave plate 403 and the angle of y axle make polarization splitting prism 401 maximum with respect to the Output optical power of 402 installation sides;
(5) 1/2 wave plate 404, depolarization Amici prism 406 and polarization splitting prism 405 are installed, are rotated the fast axle of 1/2 wave plate 404 and the angle of y axle, the beam intensity ratio that makes Port3 and Port4 is 1: 1;
(7) measure the beam intensity ratio of port3～port6 port, if do not satisfy 1: 1: 1: 1, can be through repeating above-mentioned regulating step, satisfy above-mentioned condition to the output intensity ratio of four ports of Port3～Port6.
(8) block optics Transflective mechanism 52; Remove blocking of optical transmission reflecting mechanism 51 simultaneously; Measure the beam intensity ratio of port3～port6 port; If do not satisfy 1: 1: 1: 1, can be through repeating above-mentioned regulating step, to the output intensity ratio of four ports of Port3～Port6 be 1: 1: 1: 1;
(9) remove blocking of two optical transmission reflecting mechanisms 51,52 simultaneously; The loading amplitude is greater than the vibration signal of 500nm on optical transmission reflecting mechanism 51; Use multichannel quadrature interference signal detector 71～74, the interference signal 45～48 of interferometer port3～port6 port is measured.Require 0.85 of interference signal,, can pass through optical transmission reflecting mechanism 51,52, add the large spot registration, reach above-mentioned requirements if do not satisfy above-mentioned situation.
(10) interference signal of multichannel quadrature interference signal detector 71～74 outputs is analyzed, obtained the lissajous figures of orthogonal signal, require nonlinear phase shift less than 1 °.If do not satisfy above-mentioned requirements, can be through regulating quarter wave plate 407 and half-wave plate 404 repeatedly, till satisfying condition.
(11) adopt the fixedly relative position of polarization splitting prism 401,405,408 and quarter wave plate 402,404,407 and 1/2 wave plate 404 of optical cement adhesion technique, accomplish the installation and debugging of integrated interferometer.
Utilize single-frequency laser polarized interferometer on-line debugging apparatus system to interferometer carry out integrated after, its displacement measurement like Fig. 6 and shown in Figure 7.Can be known that by Fig. 6 the amplitude of the orthogonal polarization signals of interferometer output is equal basically, its nonlinear phase shift is 0.3 ° less than 1 ° of actual measurement; As shown in Figure 7,0～5 micron displacement to be measured, its nonlinearity erron is ± 0.3nm, less than 1nm.
Claims (7)
1. a single-frequency laser polarized interferometer on-line debugging device is characterized in that: by placing frequency stabilized laser (1), optoisolator (2), polarization state rotating mechanism (3), single-frequency laser polarized interferometer to be measured (4), optical transmission reflecting mechanism (51,52), light power meter (61,62), multichannel quadrature interference signal detector (71～74), interference signal collection on the air supporting vibration isolation optical table (9) to form with analytic system (8), air supporting vibration isolation optical table (9); Send polarized light becomes a branch of high polarization degree of stability behind optoisolator (2) flashlight by frequency stabilized laser (1), behind polarization state rotating mechanism (3), get into single-frequency laser polarized interferometer to be measured (4); Flashlight is divided into two bundles (41,43) by interferometer (4); After two-beam (41,43) passes through the optical transmission reflecting mechanism (51,52) perpendicular to the beam Propagation direction respectively; Transmitted light (42,44) gets into light power meter (61,62) thereafter respectively; Reflected light returns interferometer (4) along former road; (Port3～interference signal light of Port6) exporting (45～47) is respectively by after multichannel quadrature interference signal detector (71～74) reception from each port of interferometer (4); Form the quadrature interference signal, be admitted to interference signal collection and analytic system (8) to interference signal directly, exchange amplitude and interferometric phase is analyzed, provide the measurement performance and the light path nonlinearity erron parameter of interferometer.
2. single-frequency laser polarized interferometer on-line debugging device according to claim 1 is characterized in that: it is the He-Ne laser of 632.8nm that the wavelength of described frequency stabilized laser (1) adopts wavelength, and frequency stability is greater than 10
-7, light-intensity variation is less than 0.5%, and spot diameter has and highly regulates and horizontal vertical angle beat regulatory function less than 1mm.
3. single-frequency laser polarized interferometer on-line debugging device according to claim 2 is characterized in that: described optoisolator (2) comprises polarizing prism (201,203) and Faraday spinner (202), has unidirectional transmission property, and the input light source is risen partially.
4. single-frequency laser polarized interferometer on-line debugging device according to claim 3 is characterized in that: described polarization state rotating mechanism (3) is realized the rotation to 0～360 ° of incident light polarization state.
5. single-frequency laser polarized interferometer on-line debugging device according to claim 4; It is characterized in that: described multichannel quadrature interference signal detector (71～74) is made up of the photodetector that four detection wavelength coverages and Frequency Stabilized Lasers are complementary; Alternating current-direct current amplitude and interferometric phase to interference signal are gathered and are measured, and signal to noise ratio (S/N ratio) is greater than 80dB.
6. single-frequency laser polarized interferometer on-line debugging device according to claim 5; It is characterized in that: the acquired signal of light power meter (61,62) and multichannel quadrature interference signal detector (71～74) is sent to interference signal collection and analytic system (8) through signalling channel (81), realizes resolving and analyzing the nonopiate phase shift parameters of interference signal direct current amplitude, interchange amplitude, contrast, interferometric phase, four road interference signals.
7. single-frequency laser polarized interferometer on-line debugging device according to claim 6; Totally 8 polarization optical elements are integrated by three polarization splitting prisms (401,405,408), a depolarized Amici prism (406), three quarter wave plates (402,403,407) and one 1/2 wave plate (404) to it is characterized in that single-frequency laser polarized interferometer to be measured (4), and the relation of installation is:
The bottom surface of (1) first polarization splitting prism (401) is in the xz plane;
(2) first quarter wave plates (402) are located in the yz plane, and initial fixation is in the side of first polarization splitting prism (401), and the initial position and the dextrorotation of y axle of fast axle are transmitted 45.0 °;
(3) second quarter wave plates (403) are located in the xy plane, and initial fixation is on the side relative with incident light of first polarization splitting prism (401), and the initial position of fast axle and y axle are rotated counterclockwise and are 45.0 °; The main conversion that realizes transmitted light (42) polarization state of first polarization splitting prism (401) of second quarter wave plate (403);
(4) 1/2 wave plates (404) are positioned at the yz plane, and initial fixation is on the side relative with first quarter wave plate (402) of first polarization splitting prism (401), and the initial position and the dextrorotation of y axle of fast axle are transmitted 22.5 °;
(5) depolarized Amici prism (406) bottom surface is in the xz plane, initial fixation on the side of 1/2 wave plate (404), bottom surface and first polarization splitting prism (401) coplane;
(6) second polarization splitting prism (405) bottom surfaces in the xz plane, initial fixation on depolarized Amici prism (406), bottom surface and first polarization splitting prism (401) coplane;
(7) the 3rd quarter wave plates (407) are positioned at the yz plane, and initial fixation is in depolarized Amici prism (406), and the initial position and the dextrorotation of y axle of fast axle are transmitted 45.0 °;
The bottom surface of (8) the 3rd polarization splitting prisms (408) in the xz plane, initial fixation on the 3rd quarter wave plate (407), bottom surface and first polarization splitting prism (401) coplane.
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| CN102253390A (en) * | 2011-04-19 | 2011-11-23 | 中国工程物理研究院流体物理研究所 | Optical-fiber displacement interferometer |
| CN104748835B (en) * | 2015-03-05 | 2018-06-26 | 哈尔滨工业大学 | Amount of interference detaches laser interference vialog nonlinearity erron modification method and device |
| CN104748672B (en) * | 2015-03-05 | 2017-09-08 | 哈尔滨工业大学 | Amount of interference separates single frequency laser interferometer nonlinearity erron modification method and device |
| CN205879112U (en) * | 2016-09-06 | 2017-01-11 | 深圳市中图仪器科技有限公司 | A device for correction of laser survey signal |
| CN108627084B (en) * | 2018-04-27 | 2020-05-19 | 华中科技大学 | Laser instrument wavelength calibration system based on static michelson interferometer |
| CN110441034A (en) * | 2019-08-24 | 2019-11-12 | 天津大学青岛海洋技术研究院 | Optical device attenuation characteristic test device and method based on Mach-Zehnder interferometer |
| CN113566861A (en) * | 2021-07-21 | 2021-10-29 | 中国电子科技集团公司第四十一研究所 | Polarization state calibration device and calibration method for optical fiber polarization analyzer |
| CN117030207B (en) * | 2023-08-25 | 2024-03-08 | 茂莱（南京）仪器有限公司 | Automatic quality evaluation method, device, equipment and medium for laser interferometer |
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| CN201191235Y (en) * | 2008-04-16 | 2009-02-04 | 中国科学院上海光学精密机械研究所 | Fabry-perot interferometer frequency stability measuring apparatus |
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