CN104748672A - Interference-mount separating type nonlinear error correcting method and device for single-frequency laser interferometer - Google Patents

Interference-mount separating type nonlinear error correcting method and device for single-frequency laser interferometer Download PDF

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CN104748672A
CN104748672A CN201510111173.5A CN201510111173A CN104748672A CN 104748672 A CN104748672 A CN 104748672A CN 201510111173 A CN201510111173 A CN 201510111173A CN 104748672 A CN104748672 A CN 104748672A
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wave plate
quarter wave
polarization splitting
splitting prism
laser interferometer
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CN104748672B (en
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谭久彬
朱静浩
胡鹏程
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Harbin Institute of Technology
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Abstract

The invention provides an interference-mount separating type nonlinear error correcting method and device for a single-frequency laser interferometer, and belongs to the technical field of laser measurement. The method is that performing separating measurement for reference light and measuring light strength through a light switch; extracting nonlinear error parameters in the related light signals; correcting DC deviation error and non-uniform amplitude of an orthogonal signal and other errors. With the adoption of the method and the device, the technical effect of extracting the nonlinear error parameters in the single-frequency laser interferometer as startup and quickly correcting the nonlinear error in the single-frequency laser interferometer on real time can be achieved.

Description

Amount of interference is separated single frequency laser interferometer nonlinearity erron modification method and device
Technical field
The invention belongs to laser measuring technique field, relate generally to a kind of single frequency laser interferometer nonlinearity erron modification method and device.
Background technology
In today of ultra precise measurement develop rapidly, quick ultraprecise displacement measurement obtains to be paid close attention to and research widely, wherein has higher requirement to the precision measured in the application of space industry.Compared to two-frequency laser interferometer, single frequency laser interferometer has that structure is simple, processing of circuit easily, to multiple advantages such as the requirement of environment are lower, its measuring speed is unrestricted in principle, because of but the Main Means of high speed length and displacement fields of measurement.But nonlinearity erron is the key issue of restriction single frequency laser interferometer precision always.
1981, Heydemann proposes to utilize the ellipse fitting method of least square method obtain the nonlinearity erron parameter in interference signal and then revise (P.L.M.Heydemann to nonlinearity erron, Determination and correction ofquadrature fringe measurement errors in interferometers.Appl.Opt.1981,20:3382-3384); The graduate Dai of German federal physical technique proposes to utilize ADC detect the peak-to-valley value extract real-time nonlinearity erron parameter of each channel signal of four-way single frequency laser interferometer and make correction (Dai, G.-L. to it; Pohlenz, F.; Danzebrink, H.-U.; Hasche, K.; Wilkening, G.Improving the performance of interferometers in metrological scanning probemicroscopes.Meas.Sci.Technol.2004,15:444-450), real-time Heydemann modification method is called.But these methods above-mentioned generally all need target mirror displacement to reach λ/2 just can make signal nonlinearity erron parameter and identifying more accurately, when target mirror displacement is less than λ/2, the data discrete recorded is higher, cannot make accurate identification to nonlinearity erron parameter, the effect thus revised is bad.
2012, Rerucha proposes the method by modulated laser light source frequency, realize identification (the Rerucha S of single frequency laser interferometer nonlinearity erron parameter under quasistatic, Buchta Z, Sarbort M, et al.Detection of interference phase bydigital computation of quadrature signals in homodyne laser interferometry.Sensors, 2012,12 (10): 14095-14112), but this method needs to add and can modulate LASER Light Source, and identification needs the regular hour.
Summary of the invention
When target mirror displacement is less than λ/2 for above-mentioned Heydemann modification method cannot accurately proposes nonlinearity erron parameter and revise, and modulation of source method identification nonlinearity erron needs the problem can modulating LASER Light Source, the present invention proposes and have developed a kind of amount of interference and is separated single frequency laser interferometer nonlinearity erron modification method and device, reaches and can realize single frequency laser interferometer start i.e. acquisition nonlinearity erron parameter and the object making correction when displacement measurement.
Object of the present invention is achieved through the following technical solutions:
A kind of amount of interference is separated single frequency laser interferometer nonlinearity erron modification method, and the method step is as follows:
(1) open single frequency laser interferometer, be positioned at the photoswitch S on reference path and optical path r, S mswitch to open mode simultaneously; Frequency stabilized laser Emission Lasers, is polarized Amici prism and is separated into reference beam and measuring beam, and every road light beam successively by quarter wave plate, photoswitch, then returns through catoptron reflection Hou Yuan road, and polarization state is by incident polarization Amici prism again after half-twist; Be separated into by four-way detection system the coherent light that phase place differs pi/2 successively from the orthogonal level of polarization splitting prism outgoing and the polarized light of vertical polarization;
(2) S is made rswitch to open mode, simultaneously S mswitch to closed condition; Now measuring beam is by photoswitch S mblock, reference light irradiates No. four detectors normal through original optical path and produces photo-signal, stores the strength signal I of No. four detectors r1, I r2, I r3, I r4;
(3) S is made rswitch to closed condition, simultaneously S mswitch to open mode; Now reference beam is by photoswitch S rblock, measure light and irradiate No. four detectors generation photo-signals normal through original optical path, store the strength signal I of No. four detectors m1, I m2, I m3, I m4;
(4) two photoswitch S are again made r, S mswitch to open mode, now reference beam and measuring beam all can normal through photoswitch S simultaneously r, S m, single frequency laser interferometer normally works, and completes the measurement to target; Signal now on No. four detectors is the superposition of direct current signal and AC signal, the coherent signal I that storage detector exports 1, I 2, I 3, I 4.
(5) following computing is done to the strength signal of No. four detectors stored and the coherent signal of output
I x = ( I 1 - I r 1 - I m 1 ) - ( I 3 - I r 3 - I m 3 ) 2 ( I r 1 I m 1 + I r 3 I m 3 )
I y = ( I 2 - I r 2 - I m 2 ) - ( I 4 - I r 4 - I m 4 ) 2 ( I r 2 I m 2 + I r 4 I m 4 )
Remove the DC component of each passage in four-way single frequency laser interferometer, correct Amplitude Ration, obtain without direct current biasing error etc. amplitude orthogonal signal.
A kind of amount of interference is separated single frequency laser interferometer nonlinearity erron correcting device, the emitting light path of frequency stabilized laser configures polarization splitting prism A, quarter wave plate B successively and measures catoptron, described quarter wave plate B is positioned at x, y plane, and coaxial with polarization splitting prism A, quarter wave plate B quick shaft direction and y-axis are at 45 ° counterclockwise; The reflected light path of described polarization splitting prism A configures quarter wave plate A and reference mirror successively, and described quarter wave plate A is positioned at y, z-plane, and coaxial with polarization splitting prism A, and quarter wave plate A quick shaft direction and y-axis are at 45 ° clockwise; 1/2 wave plate, depolarization Amici prism and polarization splitting prism B is configured successively at the opposite side portion place being positioned at reference mirror of described polarization splitting prism A, described 1/2 wave plate is positioned at y, z-plane, and coaxial with polarization splitting prism A, 1/2 wave plate quick shaft direction becomes 22.5 ° clockwise with y-axis; Described polarization splitting prism B and depolarization Amici prism are parallel to each other and coaxial, photodetector A and photodetector device B respectively on the transmitted light path and reflected light path of described polarization splitting prism B; The reflected light path of described depolarization Amici prism once configures quarter wave plate C and polarization splitting prism C, and described quarter wave plate C is positioned at x, y plane, and coaxial with depolarization Amici prism, and quarter wave plate C quick shaft direction and y-axis are at 45 ° counterclockwise; Photodetector C and photodetector D is configured on polarization splitting prism C transmitted light path and reflected light path respectively; The bottom surface of described polarization splitting prism A, B, C and depolarization Amici prism is all positioned at x, z-plane, and coplanar; It is characterized in that: photoswitch A and reference mirror are parallel to each other and are configured between quarter wave plate A and reference mirror coaxially; Photoswitch B and measurement catoptron are parallel to each other and are configured in quarter wave plate B coaxially and measure between catoptron.
The present invention has following characteristics and good result:
(1) compared to Heydemann modification method, owing to only needing switches light on off state can obtain nonlinearity erron parameter, thus start can be extracted nonlinearity erron parameter and then revise nonlinearity erron.
(2) extracting the error correcting method of nonlinearity erron parameter compared to modulated light source, without the need to modulating LASER Light Source, reducing the requirement to light source.
(3) due to the parameter of nonlinearity erron can be extracted in advance, and then rebuild the orthogonal signal of single frequency laser interferometer, run without the need to doing complex mathematical again to the data obtained, reduce the requirement of system to hardware.
Accompanying drawing explanation
Fig. 1 is that amount of interference is separated single frequency laser interferometer nonlinearity erron correcting device General allocation structure schematic diagram;
Fig. 2 is that amount of interference is separated single frequency laser interferometer nonlinearity erron modification method FB(flow block);
Fig. 3 is correction effect figure of the present invention
In figure piece number illustrate: 1, frequency stabilized laser, 2, polarization splitting prism A, 3, quarter wave plate A, 4, photoswitch A, 5 reference mirrors, 6, quarter wave plate B, 7, photoswitch B, 8 measure catoptrons, 9,1/2 wave plate, 10 depolarization Amici prisms, 11, polarization splitting prism B, 12, photodetector A, 13, photodetector B, 14, quarter wave plate C, 15, polarization splitting prism C, 16, photodetector C, 17, photodetector D.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of the present invention is described in detail.
A kind of amount of interference is separated single frequency laser interferometer nonlinearity erron correcting device, the emitting light path of frequency stabilized laser 1 configures polarization splitting prism A2, quarter wave plate B6 successively and measures catoptron 8, described quarter wave plate B6 is positioned at x, y plane, and coaxial with polarization splitting prism A2, quarter wave plate B6 quick shaft direction and y-axis are at 45 ° counterclockwise; The reflected light path of described polarization splitting prism A2 configures quarter wave plate A3 and reference mirror 5 successively, and described quarter wave plate A3 is positioned at y, z-plane, and coaxial with polarization splitting prism A2, and quarter wave plate A3 quick shaft direction and y-axis are at 45 ° clockwise; 1/2 wave plate 9, depolarization Amici prism 10 and polarization splitting prism B11 is configured successively at the opposite side portion place being positioned at reference mirror 5 of described polarization splitting prism A2, described 1/2 wave plate 9 is positioned at y, z-plane, and coaxial with polarization splitting prism A2,1/2 wave plate 9 quick shaft direction becomes 22.5 ° clockwise with y-axis; Described polarization splitting prism B11 and depolarization Amici prism 10 are parallel to each other and coaxial, photodetector A12 and photodetector device B13 respectively on the transmitted light path and reflected light path of described polarization splitting prism B11; The reflected light path of described depolarization Amici prism 10 once configures quarter wave plate C14 and polarization splitting prism C15, described quarter wave plate C14 is positioned at x, y plane, and coaxial with depolarization Amici prism 10, quarter wave plate C14 quick shaft direction and y-axis are at 45 ° counterclockwise; Photodetector C16 and photodetector D17 is configured on polarization splitting prism C15 transmitted light path and reflected light path respectively; The bottom surface of described polarization splitting prism A2, B11, C15 and depolarization Amici prism 10 is all positioned at x, z-plane, and coplanar; Photoswitch A4 and reference mirror 5 are parallel to each other and are configured between quarter wave plate A3 and reference mirror 5 coaxially; Photoswitch B7 and measurement catoptron 8 are parallel to each other and are configured in quarter wave plate B6 coaxially and measure between catoptron 8; Wherein the position of 1/2 wave plate 9 and quarter wave plate C14 can exchange, and quick shaft direction is constant; Described measurement catoptron (8) and reference mirror (5) comprise level crossing, prism of corner cube.
A kind of amount of interference is separated single frequency laser interferometer nonlinearity erron modification method, and the method step is as follows:
(1) open single frequency laser interferometer, it can normally be worked.During interference, the Electric Field Distribution of two bundle laser can be expressed as follows:
(2) make Sr switch to open mode, Sm switches to closed condition simultaneously.Now measuring beam is blocked by photoswitch Sm, and reference light irradiates No. four detectors normal through original optical path and produces photo-signal, only has reference optical signal in the signal on No. four detectors, for:
In formula, α is detector photoelectric transformation efficiency; K represents probe access, k=1, and 2,3,4; Cosine square be 1/2 at the mean value in laser optical frequency cycle, then final output photoelectric stream can be expressed as
I rk = 1 2 α E r 0 k 2
(3) S is made rswitch to closed condition, simultaneously S mswitch to open mode.Now reference beam is by photoswitch S rblock, measure light and irradiate No. four detectors generation photo-signals normal through original optical path, in the signal on No. four detectors, only have measurement light signal, for:
I mk = 1 2 α E m 0 k 2
(4) again make two photoswitches switch to open mode, now reference beam and measuring beam all can normal through photoswitches, and single frequency laser interferometer normally works, and complete the measurement to target simultaneously.Signal reference light now on No. four detectors and the coherent signal measuring light, the built-up radiation field on detector photosensitive unit is:
Light detecting device is all square-law detector, and the photocurrent of the output of detector is:
In formula, first and second is equivalent to the DC component that detecting device exports; Section 3 be reference light with measure light with frequency item, its mean value is zero; Section 4 is difference frequency term, and two light frequencies are equal, and thus final output photoelectric stream can be expressed as
The AC signal of Section 3 in formula needed for single frequency laser interferometer measurement, detector photocurrent expression formula in the step of contrast (1) (2) can be found out, can be obtained the DC component in final coherent light signal by control optical switch status, the AC signal that final each road detector obtains is:
AC signal after normalization is:
(5) final quadrature signal does following computing
I x = ( I 1 - I r 1 - I m 1 ) - ( I 3 - I r 3 - I m 3 ) 2 ( I r 1 I m 1 + I r 3 I m 3 )
I y = ( I 2 - I r 2 - I m 2 ) - ( I 4 - I r 4 - I m 4 ) 2 ( I r 2 I m 2 + I r 4 I m 4 )
Then can remove the DC component of each passage in four-way single frequency laser interferometer, obtain without direct current biasing error etc. amplitude orthogonal signal.As shown in Figure 3, before revising, the Lissajou figure centre coordinate of single frequency laser interferometer output orthogonal signal is (0.1,0.15), and have direct current biasing error, the Amplitude Ration of two-way orthogonal signal is 1.06; Revised orthogonal signal Lissajou figure centre coordinate is (0,0), eliminates direct current biasing error, and the Amplitude Ration of two-way orthogonal signal is 1.02, and orthogonal signal amplitude difference is less.

Claims (4)

1. amount of interference is separated a single frequency laser interferometer nonlinearity erron modification method, and the method step is as follows, it is characterized in that:
Described method step is as follows:
(1) open single frequency laser interferometer, be positioned at the photoswitch S on reference path and optical path r, S mswitch to open mode simultaneously; Frequency stabilized laser Emission Lasers, is polarized Amici prism and is separated into reference beam and measuring beam, and every road light beam successively by quarter wave plate, photoswitch, then returns through catoptron reflection Hou Yuan road, and polarization state is by incident polarization Amici prism again after half-twist; Be separated into by four-way detection system the coherent light that phase place differs pi/2 successively from the orthogonal level of polarization splitting prism outgoing and the polarized light of vertical polarization;
(2) S is made rswitch to open mode, simultaneously S mswitch to closed condition; Now measuring beam is by photoswitch S mblock, reference light irradiates No. four detectors normal through original optical path and produces photo-signal, stores the strength signal I of No. four detectors r1, I r2, I r3, I r4;
(3) S is made rswitch to closed condition, simultaneously S mswitch to open mode; Now reference beam is by photoswitch S rblock, measure light and irradiate No. four detectors generation photo-signals normal through original optical path, store the strength signal I of No. four detectors m1, I m2, I m3, I m4;
(4) two photoswitch S are again made r, S mswitch to open mode, now reference beam and measuring beam all can normal through photoswitch S simultaneously r, S m, single frequency laser interferometer normally works, and completes the measurement to target; Signal now on No. four detectors is the superposition of direct current signal and AC signal, the coherent signal I that storage detector exports 1, I 2, I 3, I 4.
(5) following computing is done to the strength signal of No. four detectors stored and the coherent signal of output
I x = ( I 1 - I r 1 - I m 1 ) - ( I 3 - I r 3 - I m 3 ) 2 ( I r 1 I m 1 + I r 3 I m 3 )
I y = ( I 2 - I r 2 - I m 2 ) - ( I 4 - I r 4 - I m 4 ) 2 ( I r 2 I m 2 + I r 4 I m 4 )
The DC component of each passage in four-way single frequency laser interferometer can be removed, correct Amplitude Ration, obtain without direct current biasing error etc. amplitude orthogonal signal.
2. an amount of interference is separated single frequency laser interferometer nonlinearity erron correcting device, the method step is as follows, the emitting light path of frequency stabilized laser (1) configures polarization splitting prism A (2), quarter wave plate B (6) successively and measures catoptron (8), described quarter wave plate B (6) is positioned at x, y plane, and it is coaxial with polarization splitting prism A (2), quarter wave plate B (6) quick shaft direction and y-axis at 45 ° counterclockwise, described measurement catoptron (8) is parallel with quarter wave plate B (6); The reflected light path of described polarization splitting prism A (2) configures quarter wave plate A (3) and reference mirror (5) successively, described quarter wave plate A (3) is positioned at y, z-plane, and it is coaxial with polarization splitting prism A (2), quarter wave plate A (3) quick shaft direction and y-axis at 45 ° clockwise, described reference mirror (5) is parallel with quarter wave plate A (3); 1/2 wave plate (9), depolarization Amici prism (10) and polarization splitting prism B (11) is configured successively at the opposite side portion place being positioned at reference mirror (5) of described polarization splitting prism A (2), described 1/2 wave plate (9) is positioned at y, z-plane, and coaxial with polarization splitting prism A (2), 1/2 wave plate (9) quick shaft direction becomes 22.5 ° clockwise with y-axis; Described polarization splitting prism B (11) and depolarization Amici prism (10) are parallel to each other and coaxial, photodetector A (12) and photodetector device B (13) respectively on the transmitted light path and reflected light path of described polarization splitting prism B (11); At reflected light path last time configuration quarter wave plate C (14) and the polarization splitting prism C (15) of described depolarization Amici prism (10), described quarter wave plate C (14) is positioned at x, y plane, and coaxial with depolarization Amici prism (10), quarter wave plate C (14) quick shaft direction and y-axis at 45 ° counterclockwise; Photodetector C (16) and photodetector D (17) is configured on polarization splitting prism C (15) transmitted light path and reflected light path respectively; Described polarization splitting prism A, B, C (2,11,15) are all positioned at x, z-plane with the bottom surface of depolarization Amici prism (10), and coplanar; It is characterized in that: photoswitch A (4) and reference mirror (5) are parallel to each other and are configured between quarter wave plate A (3) and reference mirror (5) coaxially; Photoswitch B (7) and measurement catoptron (8) are parallel to each other and are configured in quarter wave plate B (6) coaxially and measure between catoptron (8).
3. amount of interference according to claim 2 is separated single frequency laser interferometer nonlinearity erron correcting device, it is characterized in that: the position of described 1/2 wave plate (9) and quarter wave plate C (14) can exchange, and quick shaft direction is constant.
4. amount of interference according to claim 2 is separated single frequency laser interferometer nonlinearity erron correcting device, it is characterized in that: described measurement catoptron (8) and reference mirror (5) comprise level crossing, prism of corner cube.
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CN106323461A (en) * 2015-07-08 2017-01-11 哈尔滨工业大学 Biaxial interference mirror assembly beam splitting characteristic detection method
CN106980174B (en) * 2017-02-28 2019-04-16 浙江大学 A kind of comprehensive fluorescence super-resolution microscopic imaging device
CN106980174A (en) * 2017-02-28 2017-07-25 浙江大学 A kind of comprehensive fluorescence super-resolution microscopic imaging device
CN107167071A (en) * 2017-06-30 2017-09-15 哈尔滨理工大学 Synchronous phase shift interference measurement apparatus based on depolarization Amici prism
CN109974576A (en) * 2018-11-14 2019-07-05 哈尔滨工业大学 Single frequency laser interferometer nonlinearity erron modification method and device
CN109539975A (en) * 2018-11-14 2019-03-29 哈尔滨工业大学 Single frequency laser interferometer nonlinearity erron modification method and device
WO2020098227A1 (en) * 2018-11-14 2020-05-22 哈尔滨工业大学 Method and device for correcting non-linear errors of single-frequency laser interferometer
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CN110260781A (en) * 2019-07-08 2019-09-20 哈尔滨工业大学 Laser interferometer non-orthogonal errors modification method and device based on liquid crystal phase shifter
CN110260782A (en) * 2019-07-08 2019-09-20 哈尔滨工业大学 Based on bar in order to alunite compensator interferometer non-orthogonal errors modification method and device
CN110487173A (en) * 2019-08-22 2019-11-22 上海理工大学 Reflective quadrature in phase single-frequency laser interference measuring device and measuring method
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