CN109974576A - Single frequency laser interferometer nonlinearity erron modification method and device - Google Patents
Single frequency laser interferometer nonlinearity erron modification method and device Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
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Abstract
Single frequency laser interferometer nonlinearity erron modification method and device belong to laser measuring technique field；The present invention can be under the premise of having no need to change the first reflecting mirror and the second reflector position, continuous optical path difference variation is generated between measuring beam and reference beam using spiral phase plate, so that interference signal generates enough phase changes, realize the preextraction to interference signal characteristic parameter, to be modified using the characteristic parameter of preextraction to the nonlinearity erron during single frequency laser interferometer displacement measurement, high precision position shift measurement is realized；The amendment problem that the present invention realizes the preextraction to single frequency laser interferometer interference signal characteristic parameter, can effectively solve the problem that nonlinearity erron in interferometry especially micro-displacement measurement has significant technical advantage in field of precision measurement.
Description
Technical field
The invention belongs to laser measuring technique fields, relate generally to a kind of single frequency laser interferometer nonlinearity erron amendment side
Method and device.
Background technique
As the fast development of scientific research and commercial production levels rapidly improve, scientific research and industrial circle are to displacement measurement
Higher requirements are also raised, and the minimum change of displacement measurement is also just developing towards nanometer scale direction.Single-frequency laser interference
It is the instrument for carrying out high precision position shift measurement using laser interference principle, has many advantages, such as non-contact, high-precision.One single-frequency swashs
Optical interferometer includes that at least one is capable of providing the light source of single-frequency laser；Monochromatic sources are divided into reference beam and measurement light by one
The spectroscope of beam；One is capable of the first reflecting mirror of reflected reference beam；One is capable of the second reflecting mirror of reflected measuring beam,
Second reflecting mirror is usually fixed on testee, is moved together with testee；At least one is able to detect interference
The photodetector of signal, the interference signal are the reference beams and described second reflected by first reflecting mirror
Measuring beam that reflecting mirror reflects, which is interfered, to be formed；And signal processing unit, the photodetector is coupled, suitable for adopting
Collect the interference signal of the photodetector output；The reference beam and measuring beam frequency having the same.It compares
In two-frequency laser interferometer, since it is simple with structure, processing of circuit is easy, the requirement to environment is lower, measuring speed exists
Many advantages, such as unrestricted in principle, thus more it is widely used in displacement measurement field.However, in practical applications,
The presence of nonlinearity erron but becomes always the critical issue that limitation single frequency laser interferometer realizes high-acruracy survey.
Fig. 1 is typical single frequency laser interferometer structure, and the single-frequency laser issued from laser 1 passes through polarization splitting prism
2 light splitting are reference beam and measuring beam；Wherein the reflected beams are reflected as reference beam by plane mirror A 4, and two
It is secondary by quarter wave plate A 3, transmitted light beam is reflected as measuring beam by plane mirror B 6, and passes twice through quarter wave plate B
After 5, reference beam and measuring beam transmit and are reflected through respectively polarization splitting prism 2；Reference beam and measuring beam pass through
Its polarization direction rotates 45 ° after 1/2 wave plate 7, and after the light splitting of unpolarized Amici prism 8, transmitted light is by quarter wave plate C 9 and partially
Vibration Amici prism B 10 is incident on photodetector A 11 and photodetector B 12, and two paths of signals is done by arithmetic unit A 13 to be subtracted
Interference signal I is obtained after method operationx；It is incident on by the reflected light of unpolarized Amici prism 8 by polarization splitting prism C 14
Photodetector C 15 and photodetector D 16, two paths of signals obtain interference signal after arithmetic unit B 17 does subtraction
Iy.Ideally, IxAnd IyIt can indicate are as follows: (P.Hu, J.Zhu, X.Guo, and J.Tan, " Compensation for
the Variable Cyclic Error in Homodyne Laser Interferometers,"Sensors,2015,15
(2): 3090-3106.):
Wherein, A is the alternating-current magnitude of interference signal, phase difference of the φ between reference beam and measuring beam.Thus may be used
To find out, Ix、IyThe sin cos functions about φ are shown as, its amplitude is equal in the ideal situation, direct current biasing is zero and mutually
It is orthogonal.However in a practical situation, due to undesirable, the I of optical device etc.xAnd IyIt can indicate are as follows:
Wherein, Ax、AyRespectively direct current biasing error, Bx、ByRespectively constant amplitude error, δ are not non-orthogonal errors.By public affairs
Formula (2) is as can be seen that Ix、IyActually appear the sin cos functions containing above-mentioned three difference.Above-mentioned two-way is contained to the interference of three differences
When signal is directly used in displacement resolving, periodic nonlinearity erron can be generated, measurement accuracy is influenced.Therefore it must pass through acquisition
The characteristic parameter A of interference signalx、Ay、Bx、ByWith δ to Ix、IyBe modified, obtain ideal quadrature interference signals cos φ and
Sin φ corrects nonlinearity erron to realize.
The modification method of nonlinearity erron was proposed that he is using least square method to big by Heydemann in 1981 earliest
Ellipse fitting is carried out in the interference signal of a cycle, so that the characteristic parameter of interference signal is obtained, to realize to non-linear
Amendment (P.L.M.Heydemann, Determination and correction of the quadrature fringe of error
Measurement errors in interferometers.Appl.Opt.1981,20:3382-3384), this method is non-
The modified classical way of linearity error, researcher can be referred to as according to this method propose a variety of improved methods
Heydemann revised law；The Dai of German federal physical study institute is by detecting the maximum in each road interference signal a cycle
And minimum, in real time extract nonlinearity erron parameter, realize to nonlinearity erron it is real-time correct (G.-L.Dai,
F.Pohlenz,H.-U.Danzebrink,K.Hasche,G.Wilkening,Improving the performance of
interferometers in metrological scanning probe microscopes.Meas.Sci.Technol.
2004,15:444-450), referred to as extreme value modification method.Although both the above method realizes the amendment of nonlinearity erron, but
Its precondition that can be worked normally are as follows: the phase change of interference signal is not less than a cycle.
In order to realize above-mentioned precondition, need to make the phase of interference signal to generate the change for being not less than a cycle (2 π)
Change, i.e., the optical path difference variation between reference beam and measuring beam is not less than optical maser wavelength.The method generallyd use in practice is
Mobile second reflecting mirror or the first reflecting mirror realize the phase of interference signal by change measuring beam or the light path of reference beam
Position variation.But both methods all have the defects that in practice it is certain.The method of mobile second reflecting mirror generally by
The movement of measurand is controlled, so that the second reflecting mirror generates the displacement for being greater than laser half-wavelength, so that it is big to obtain phase change
In the interference signal of a cycle.However in actual conditions, the displacement that measurand can move sometimes is less than above-mentioned displacement
Size is even unable to voltuntary movement, therefore is unable to satisfy above-mentioned precondition.In comparison, the method for mobile first reflecting mirror
The first reflecting mirror is driven generally by the piezoelectric ceramics or other movement control elements that increase additional, is equally greater than its generation
The displacement of laser half-wavelength usually can meet above-mentioned precondition since the displacement is relatively controllable.But the party
There is also certain problems for method: additional increased movement control elements increase the complexity of system and control, and inevitable
Affect the positional stability of the first reflecting mirror, to introduce measurement error.
2015, Zhu etc., which is proposed, carried out the modified method of nonlinearity erron using photoswitch, and this method is being referred to and surveyed
Amount light beam respectively configures photoswitch all the way, by the combination of two-way photoswitch "ON", "Off", can remain static in measured object
When obtain interference signal in part nonlinearity erron parameter, (J.Zhu, P.Hu, J.Tan, Homodyne laser
vibrometer capable of detecting nanometer displacements accurately by using
optical shutters.Appl.Opt.2015,54:10196–10199).This method cooperates specific optical path, may be implemented
Displacement is less than the amendment of nonlinearity erron in the measurement of λ/2.But this method also suffers from certain drawbacks: firstly, this method is only
The direct current biasing error and non-constant amplitude error parameter in three differences of interference signal characteristic parameter can be obtained, and non-orthogonal errors are joined
It is several, it can not obtain, it is therefore desirable to cooperate specific optical interference circuit structure that can just measure, not have generality；Secondly, should
Method needs two-way photoswitch, and which results in the increases of device volume, and needs to carry out multi-pass operation to two-way photoswitch,
Step is complicated.
Summary of the invention
Above-mentioned Nonlinearity Correction Method there are aiming at the problem that, the present invention proposes and has developed a kind of based on spiral phase plate
Single frequency laser interferometer nonlinearity erron modification method and device, the present invention having no need to change the first reflecting mirror and second anti-
Under the premise of penetrating mirror position, spiral phase is added in the position by being total to optical path in single frequency laser interferometer reference beam or measuring beam
Position plate, generates the optical path difference between the reference beam of interferometer and measuring beam using the phase-delay characteristic of spiral phase plate
Continuous variation realizes interference signal characteristic parameter so that the interference signal that detector obtains generates enough phase changes
Preextraction, and the modified purpose of nonlinearity erron is realized in measurement process using the characteristic parameter of preextraction.
The purpose of the present invention is achieved through the following technical solutions:
A kind of single frequency laser interferometer nonlinearity erron modification method includes: at least one energy in single frequency laser interferometer
The light source of single-frequency laser is enough provided；Optical path includes: spectroscope, the first reflecting mirror and the second reflecting mirror in the optical path, wherein
The spectroscope is suitable for for the monochromatic sources being divided into reference beam and measuring beam, and first reflecting mirror is suitable for described in reflection
Reference beam, second reflecting mirror are suitable for reflecting the measuring beam；At least one photoelectricity for being able to detect interference signal is visited
Device is surveyed, the interference signal is that the reference beam reflected by first reflecting mirror and second reflecting mirror reflect
To measuring beam interfere and to be formed.
Spiral phase plate is a kind of phase delay element being made of helical structure, along its circumferential each position to incident light
The linear rule variation of the phase delay size of beam.It therefore can be by being added at least in the single frequency laser interferometer optical path
One spiral phase plate, the spiral phase plate are suitable for changing the phase difference between the reference beam and the measuring beam；
By rotating at least one described spiral phase plate at least once, changes reference beam and/or measuring beam is incident on spiral phase
Position on the plate of position, so that the phase difference between the reference beam and measuring beam generates continuous variation；Corresponding
Interference signal then generates corresponding phase change, it is possible thereby to realize the preextraction of interference signal characteristic parameter；In single-frequency laser
During interferometer displacement measurement, using the nonlinearity erron parameter of preextraction, it can be realized to the non-linear of tested displacement
Error correction should make the reference beam and measuring beam be incident on the position on the spiral phase plate in the process and protect
It holds constant.
The position of the spiral phase plate is selected between the spectroscope and the first reflecting mirror and the spectroscope and the
Between two-mirror.
The center of spiral phase plate is deviateed in the position that the reference beam or measuring beam are incident on the spiral phase plate,
The i.e. described reference beam or measuring beam will not be overlapped with the center of the spiral phase plate, and the spiral phase plate is straight
Diameter is at least two times of the measuring beam or reference beam diameter that are incident on the spiral phase plate, so that institute of a certain moment
It is approximately equal to the phase delay of each point in reference beam or measuring beam diameter to state spiral phase plate, which meets this
The requirement of field technical staff.
A kind of single frequency laser interferometer nonlinearity erron correcting device is capable of providing single-frequency comprising at least one in the device
The light source of laser；Optical path includes: spectroscope, the first reflecting mirror and the second reflecting mirror in the optical path, wherein the spectroscope
Suitable for the monochromatic sources are divided into reference beam and measuring beam, first reflecting mirror is suitable for reflecting the reference beam,
Second reflecting mirror is suitable for reflecting the measuring beam；At least one is able to detect the photodetector of interference signal, described
Interference signal is the measurement that the reference beam reflected by first reflecting mirror and second reflecting mirror reflect
What beam interference was formed；And at least one spiral phase plate, each described spiral phase plate are placed in the optical path, institute
Spiral phase plate is stated to be suitable for changing the phase difference between the reference beam and the measuring beam.Described device further include: letter
Number processing unit, couples the photodetector, and suitable for acquiring the interference signal of the photodetector output, the interference is believed
Number characteristic parameter indicate the nonlinearity erron during the single frequency laser interferometer displacement measurement.
The position of the spiral phase plate is selected between the spectroscope and the first reflecting mirror and the spectroscope and the
Between two-mirror.
The center of spiral phase plate is deviateed in the position that the reference beam or measuring beam are incident on the spiral phase plate,
The i.e. described reference beam or measuring beam will not be overlapped with the center of the spiral phase plate, and the spiral phase plate is straight
Diameter is at least two times of the measuring beam or reference beam diameter that are incident on the spiral phase plate, so that institute of a certain moment
It is approximately equal to the phase delay of each point in reference beam or measuring beam diameter to state spiral phase plate, which meets this
The requirement of field technical staff.
The invention has the characteristics that and good result:
(1) compared to Heydemann or the modified method of extreme value, this method can have no need to change the first reflecting mirror
Under the premise of the second reflector position, continuous light path is generated between measuring beam and reference beam using spiral phase plate
Difference variation, realizes the preextraction to interference signal characteristic parameter, to repair to the nonlinearity erron during interferometry
Just, high precision position shift measurement is realized.Compared to both the above method, the present invention especially solves tested displacement and is less than laser half-wave
Long non-linear hour error can not effective compensation the problem of, improve the precision of measurement.
(2) the modified method of nonlinearity erron is carried out compared to using photoswitch, due to having only used a small volume
Optical element reduce system bulk and complexity instead of the photoswitch of two-way complicated in mechanical structure, and to operate
Step is simplified；Due to that can be extracted to whole interference signal characteristic parameters, and independent of specific interference light
Line structure, therefore the amendment precision of nonlinearity erron is improved, improve the applicability of modification method.
Detailed description of the invention
Fig. 1 is that two subdivision optical path single frequency laser interferometers of the compositions such as existing polarization splitting prism and plane mirror are matched
Set structural schematic diagram；
The General allocation structure schematic diagram that Fig. 2 is the present invention when being applied in Fig. 1 for single frequency laser interferometer；
Fig. 3 is the schematic diagram of spiral phase plate of the present invention Yu light beam relative position；
Piece number illustrates in Fig. 1: 1 single-frequency laser, 2 polarization splitting prism A, 3 quarter wave plate A, 4 first reflecting mirrors, 5 1/4
Wave plate B, 6 second reflecting mirrors, 7 1/2 wave plates, 8 Amici prisms, 9 quarter wave plate C, 10 polarization splitting prism B, 11 photodetectors
A, 12 photodetector B, 13 subtracter A, 14 polarization splitting prism C, 15 photodetector C, 16 photodetector D, 17 subtractions
Device B, 18 signal processing units.
Piece number illustrates in Fig. 2: 21 single-frequency lasers, 22 polarization splitting prism A, 23 spiral phase plates, 24 rotary shafts, 25
Quarter wave plate A, 26 first reflecting mirrors, 27 quarter wave plate B, 28 second reflecting mirrors, 29 1/2 wave plates, 30 unpolarized Amici prisms, 31
Quarter wave plate C, 32 polarization splitting prism B, 33 photodetector A, 34 photodetector B, 35 subtracter A, 36 polarization splitting prisms
C, 37 photodetector C, 38 photodetector D, 39 subtracter B, 40 signal processing units, 41 position A.
Piece number illustrates in Fig. 3: 23 spiral phase plates, 42 light-beam positions.
Specific embodiment
Since single frequency laser interferometer itself has various forms of light channel structures, below with polarization point shown in Fig. 2
For two subdivision optical path Homodyne interferometers of the compositions such as light prism and plane mirror, the embodiment of the present invention is retouched in detail
It states.
A kind of single frequency laser interferometer nonlinearity erron correcting device based on spiral phase plate, the device include that single-frequency swashs
Light device 21, polarization splitting prism A 22, spiral phase plate 23, quarter wave plate A 25, the first reflecting mirror 26, quarter wave plate B 27,
Two-mirror 28,1/2 wave plate 29, unpolarized Amici prism 30, quarter wave plate C 31, polarization splitting prism B 32, photodetector
A 33, photodetector B 34, subtracter A 35, polarization splitting prism C 36, photodetector C 37, photodetector D38,
Subtracter B 39；Polarization splitting prism A 22, quarter wave plate B 27 and are configured in order on the emitting light path of single-frequency laser 21
Two-mirror 28, the quarter wave plate B 27 is located at x, in y plane, and, quarter wave plate B 27 coaxial with polarization splitting prism A 22
Fast axis direction is at 45 ° counterclockwise with y-axis, and the second reflecting mirror 28 is parallel with quarter wave plate B 27；In the polarization splitting prism A 22
Reflected light path on configure in order quarter wave plate A 25 and the first reflecting mirror 26, the quarter wave plate A 25 is located at y, in z-plane, and
Coaxial with polarization splitting prism A 22,25 fast axis direction of quarter wave plate A and y-axis are at 45 ° clockwise, first reflecting mirror 26 with
Quarter wave plate A 25 is parallel；1/2 is configured in order in the opposite side positioned at the first reflecting mirror 26 of the polarization splitting prism A 22
Wave plate 29, unpolarized Amici prism 30, quarter wave plate C 31, polarization splitting prism B 32, photodetector A 33,1/2 wave
Piece 29 is located at y, in z-plane, and coaxial with polarization splitting prism A 22,1/2 wave plate, 29 fast axis direction and z-axis counterclockwise at
22.5 °, the quarter wave plate C 31 is located at y, in z-plane, and, quarter wave plate C 31 fast axle side coaxial with polarization splitting prism A 22
To at 45 ° counterclockwise with z-axis；The photodetector B 34 on the reflected light path of the polarization splitting prism B 32；Institute
It states and configures in order polarization splitting prism C 36 and photodetector C 37 on the reflected light path of unpolarized Amici prism 30；Described
Photodetector D 38 on the reflected light path of polarization splitting prism C 36；The photodetector A 33, photodetector B
34 interference signals detected are input to the progress subtraction of subtracter A 35 and obtain interference signal Ix；The photodetector C
37, the interference signal that photodetector D 38 is detected is input to subtracter B39 progress subtraction and obtains interference signal Iy；?
Spiral phase plate 23 is configured between the polarization splitting prism A 22 and quarter wave plate A 25, the spiral phase plate 23 is located at y, z
In plane, rotary shaft 24 is located at 23 center of spiral phase plate and has certain distance with optical axis；The spiral phase plate 23 can also
To be configured at position A 41, i.e., it is parallel to each other with quarter wave plate B 27 and is coaxially arranged at polarization splitting prism A 22 and 1/4
Between wave plate B 27.
The two subdivision optical path single-frequency equally formed below with polarization splitting prism shown in Fig. 2 and plane mirror etc. are dry
For interferometer, illustrate this method the step of it is as follows:
(1) single-frequency laser interference vialog is opened, single-frequency laser issues a branch of single-frequency laser, which vertically enters first
It penetrates through spiral phase plate, the horizontal and vertical polarized component in laser is separated by measurement light by polarization splitting prism later
Beam and reference beam；Reference beam passes through quarter wave plate, then the backtracking after reflecting mirror reflects；Meanwhile measuring beam passes through 1/
After 4 wave plates, it is irradiated to measured target (such as plane mirror, prism of corner cube, testee surface) back reflection, along backtracking；
Reference beam and measuring beam pass twice through quarter wave plate, incident polarization Amici prism again after polarization state is rotated by 90 °；By
Spiral phase plate is successively passed twice through in reference beam, therefore introduces size and isPhase change；From polarization splitting prism
After the orthogonal level of outgoing and the reference beam and measuring beam of perpendicular polarisation state pass through the devices such as Amici prism, eventually by
The interference signal I that the two-way as shown in formula (2) contains three differences is obtained after detector and subtracterxAnd Iy；
(2) when rotating spiral phase plate around its center, reference beam is incident on the position on spiral phase plate also therewith
Change, according to the working characteristics of spiral phase plate, at this time spiral phase plate to the phase delay of reference beam also therewith byVariation isVariable quantity isAnd the phase of measuring beam does not change at this time；Therefore in this process, reference beam
The variable quantity of optical path difference between measuring beam isCorresponding two-way interference signal IxAnd IyPhase changing capacity
Also it isStore the two-way interference signal I in the change procedurexAnd Iy；WhenI.e. the variable quantity of optical path difference, which is greater than, swashs
When light wavelength lambda, two-way interference signal IxAnd IyPhase change be more than a cycle, Lie groupoid be complete oval logo；
(3) according to the two-way interference signal I stored in step (2)xAnd Iy, and using three poor parameter extracting methods, it is such as oval
Fitting process and extreme detection, available two-way interference signal IxAnd IyThree poor parameters, i.e. the characteristic parameter of interference signal:
Ax、Bx、Ay、ByAnd δ；
(4) reference beam is kept to be incident on the position on spiral phase plate during single frequency laser interferometer displacement measurement
It is constant, and using the interference signal characteristic parameter obtained in step (3), it proceeds as follows:
Three differences in interference signal can be eliminated to get to ideal quadrature interference signals sin (φ) and cos (φ), from
And realize the amendment of nonlinearity erron during interferometry, improve the accuracy of measurement.
Claims (10)
1. a kind of single frequency laser interferometer nonlinearity erron modification method, include in single frequency laser interferometer:
At least one is capable of providing the light source of single-frequency laser；
Optical path includes: spectroscope, the first reflecting mirror and the second reflecting mirror in the optical path, wherein the spectroscope is suitable for institute
It states monochromatic sources and is divided into reference beam and measuring beam, first reflecting mirror is suitable for reflecting the reference beam, and described second
Reflecting mirror is suitable for reflecting the measuring beam；
At least one is able to detect the photodetector of interference signal, and the interference signal is reflected by first reflecting mirror
Measuring beam that obtained reference beam and second reflecting mirror reflect, which is interfered, to be formed；
It is characterized in that, which comprises
Step 1: at least one spiral phase plate is placed in the optical path of single frequency laser interferometer, and the spiral phase plate is suitable
Phase difference between the change reference beam and the measuring beam；
Step 2: by rotating at least one described spiral phase plate at least once, so that the reference beam and measuring beam
Between phase difference generate continuous variation；
Step 3: the characteristic parameter of the interference signal is extracted；
Step 4: utilizing extracted characteristic parameter, to the nonlinearity erron during single frequency laser interferometer displacement measurement
It is modified.
2. single frequency laser interferometer nonlinearity erron modification method according to claim 1, it is characterised in that: the step
In one implementation process, the position of the spiral phase plate is selected between the spectroscope and the first reflecting mirror and the light splitting
Between mirror and the second reflecting mirror.
3. single frequency laser interferometer nonlinearity erron modification method according to claim 1, it is characterised in that: the step
In one implementation process, spiral phase plate is deviateed in the position that the reference beam or measuring beam are incident on the spiral phase plate
Center.
4. single frequency laser interferometer nonlinearity erron modification method according to claim 1, it is characterised in that: the step
In four implementation process, the reference beam and measuring beam should be made to be incident on the position on the spiral phase plate and kept not
Become.
5. single frequency laser interferometer nonlinearity erron modification method according to claim 1, it is characterised in that: the spiral
The diameter of phase-plate is at least two times of the measuring beam or reference beam diameter that are incident on the spiral phase plate.
6. a kind of single frequency laser interferometer nonlinearity erron correcting device, include in the device:
At least one is capable of providing the light source of single-frequency laser；
Optical path includes: spectroscope, the first reflecting mirror and the second reflecting mirror in the optical path, wherein the spectroscope is suitable for institute
It states monochromatic sources and is divided into reference beam and measuring beam, first reflecting mirror is suitable for reflecting the reference beam, and described second
Reflecting mirror is suitable for reflecting the measuring beam；
At least one is able to detect the photodetector of interference signal, and the interference signal is reflected by first reflecting mirror
Measuring beam that obtained reference beam and second reflecting mirror reflect, which is interfered, to be formed；
It is characterized by: the device also includes at least one spiral phase plate, each described spiral phase plate is placed in described
In optical path, the spiral phase plate is suitable for changing the phase difference between the reference beam and the measuring beam.
7. single frequency laser interferometer nonlinearity erron correcting device according to claim 6, it is characterised in that: described device
Further include: signal processing unit couples the photodetector, suitable for acquiring the interference signal of the photodetector output,
The characteristic parameter of the interference signal indicates the nonlinearity erron during the single frequency laser interferometer displacement measurement.
8. single frequency laser interferometer nonlinearity erron correcting device according to claim 6, it is characterised in that: the spiral
The position of phase-plate is selected between the spectroscope and the first reflecting mirror and between the spectroscope and the second reflecting mirror.
9. single frequency laser interferometer nonlinearity erron correcting device according to claim 6, it is characterised in that: the reference
Deviate the center of spiral phase plate in the position that light beam or measuring beam are incident on the spiral phase plate.
10. single frequency laser interferometer nonlinearity erron correcting device according to claim 6, it is characterised in that: the spiral shell
The diameter of rotation phase-plate is at least two times of the measuring beam or reference beam diameter that are incident on the spiral phase plate.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112857207A (en) * | 2021-03-09 | 2021-05-28 | 哈尔滨工业大学 | Single-beam three-degree-of-freedom homodyne laser interferometer based on array detector |
| CN117781851A (en) * | 2024-02-27 | 2024-03-29 | 合肥工业大学 | Multistage correction method for closed-loop piezoelectric driving phase shifter |
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| CN112857207A (en) * | 2021-03-09 | 2021-05-28 | 哈尔滨工业大学 | Single-beam three-degree-of-freedom homodyne laser interferometer based on array detector |
| CN112857207B (en) * | 2021-03-09 | 2022-12-16 | 哈尔滨工业大学 | Single-beam three-degree-of-freedom homodyne laser interferometer based on array detector |
| CN117781851A (en) * | 2024-02-27 | 2024-03-29 | 合肥工业大学 | Multistage correction method for closed-loop piezoelectric driving phase shifter |
| CN117781851B (en) * | 2024-02-27 | 2024-05-07 | 合肥工业大学 | Multistage correction method for closed-loop piezoelectric driving phase shifter |
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