CN107167071A - Synchronous phase shift interference measurement apparatus based on depolarization Amici prism - Google Patents
Synchronous phase shift interference measurement apparatus based on depolarization Amici prism Download PDFInfo
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- CN107167071A CN107167071A CN201710520160.2A CN201710520160A CN107167071A CN 107167071 A CN107167071 A CN 107167071A CN 201710520160 A CN201710520160 A CN 201710520160A CN 107167071 A CN107167071 A CN 107167071A
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- polarization
- phase shift
- amici prism
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
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Abstract
The present invention relates to a kind of synchronous phase shift interference measurement apparatus based on depolarization Amici prism, belong to optical interference detection technique field.The system includes laser (1), the first lens (2), pinhole filter (3), the second lens (4), polarizer (5), the first depolarization Amici prism (6), polarization splitting prism (7), reference mirror (8), test mirrors (9), quarter wave plate (10), the second depolarization Amici prism (11), speculum (12), polarization phase-shifting array (13), CMOS cameras (14).The device can obtain two width interference patterns in real time, reduce the requirement to environment, light path need not be changed in operation, also without mobile any experiment apparatus, flexible to operation, stability is high, and system complexity is low, for the synchronous phase shift interference device based on orthogonal grating light splitting, its simple in construction, cost is lower.
Description
Technical field
The present invention relates to optical interference detection technique field, and in particular to a kind of synchronous phase based on depolarization Amici prism
Move interferometric measuring means.
Background technology
Measuring surface form has highly important application, the surface three dimension of smooth object in industrial production and manufacturing industry
Shape need accurate measurement to ensure workmanship, optical phase shift interference because there is noncontact, lossless and precision it is high,
It has been used as the metering outfit of measuring surface form for a long time.Traditional phase-shifting technique mainly moves ginseng by driving piezoelectric ceramics
Mirror is examined, in time domain acquisition multi-frame interferometry pattern, but this easy nonlinearity erron and environmental factor by piezoelectric ceramics is not
Stable influence, such as ambient vibration or air turbulence, so as to cause measured deviation.It is applied to measurement for ease of interference technique dynamic
State object, has risen synchronous phase shift interference e measurement technology recent years, and it can obtain several phase shifting interference images with moment, due to
This real-time, greatly reduces the influence of environmental disturbances, improves the precision and stability of system.
Synchronous phase shift interference e measurement technology is based on spatial Phase-shifting Method, and gathering several in synchronization has the dry of constant phase shift amount
Pattern is related to, influence of such ambient vibration to each width interference pattern is all identical, is shaken so as to fundamentally prevent environment
The dynamic influence to interferometry.
Chinese patent《The synchronous phase shift Fizeau interference device that can be measured in real time》, Publication No. CN102589414A, disclosure
Day it is on July 18th, 2012, the patent replaces traditional Fizeau interference by using a surface smoothness very high quarter wave plate
Canonical reference optical flat in instrument, makes reference beam experienced identical path with object beam, improves the anti-interference of system
Ability.They realize the separation of light beam using a pair of orthogonal Ronchi gratings, and are obtained with reference to polarizer group by single exposure
Four width phase-shifted interference patterns are obtained, the real-time of measurement is realized, but system that employs high-quality quarter wave plate and grating
Right, the cost that result in device is high.
Xi'an ray machine Yao Baoli etc. propose it is a kind of based on Amici prism two step phase shift interference measurement apparatus (P.Gao,
B.L.Yao, J.Min, R.Guo, J.Zheng, T.Ye.Parallel two-step phase-shifting microscopic
interferometry based on a cube beamsplitter.Optics Communications,2011,284
(18):4136-4140).Beam splitter with cross-polarization is two beams, wherein light beam using Amici prism by the device
In object beam beam intensity ratio reference beam light intensity it is strong, the situation of light beam is just on the contrary, they employ one in addition
Individual quarter wave plate and 1/2 wave plate ensure that the reference beam in two light beams is identical with the light distribution of object beam, so as to obtain bar
The preferable phase-shifted interference pattern of line contrast, but the device employs quarter wave plate and 1/2 wave plate to regulate and control fringe contrast, this
Undoubtedly add the complexity of system.
The content of the invention
The invention aims to solve existing synchronous interferometer measuration system it is complicated, cost is high the problems such as, carry
For a kind of synchronous phase shift interference measurement apparatus based on depolarization Amici prism.
The present invention technical solution be:
Synchronous phase shift interference measurement apparatus of the present invention based on depolarization Amici prism, it is dry that it includes lighting module, polarization
Relate to module, synchronous phase shift module, lighting module includes laser and collimating and beam expanding system successively, the collimating and beam expanding system includes the
The front focal plane of one lens, pinhole filter and the second lens, the back focal plane of the first lens and the second lens keeps confocal, pin hole filter
Ripple device is located at the back focal plane of the first lens, and xyz three-dimensional cartesian coordinate systems are set up by z-axis direction of the optical axis direction of the first lens；
Polarization interference module includes polarizer, the first depolarization Amici prism, polarization splitting prism, reference mirror and test mirrors successively, partially
The Amici prism that shakes is placed on the reflected light path of the first depolarization Amici prism, and reference mirror and test mirrors are individually positioned in polarization point
On the transmitted light path and reflected light path of light prism, and away from polarization splitting prism apart from equal；Synchronous phase shift module includes 1/4 successively
Wave plate, parallel spectral module, polarization phase-shifting array and CMOS cameras, parallel spectral module include the second depolarization Amici prism and
Speculum.
The polarizer is placed along the direction perpendicular to z-axis, and its polarization direction respectively with x-axis and y-axis angle at 45 °,
Ask p-component of the polarization direction along x-axis equal with along the s component light intensity of y-axis, make the bar for the two width interference patterns that subsequent acquisition obtains
Line contrast is consistent.
The quick shaft direction of the quarter wave plate is placed along with the direction at x-axis and y-axis angle at 45 ° respectively.
The speculum is placed along with x-axis into the direction of -45° angle.
The polarization phase-shifting array be two polarizer groups into 1*2 arrays, two polarizers gun parallax difference 45° angle.
A kind of synchronous phase shift interference measuring method based on depolarization Amici prism, its implementation process is as follows：
Start laser, the collimated beam-expanding system of the light beam linearly polarized light parallel with being formed after polarizer for launching light source is incident
To the reflection of the first depolarization Amici prism, converge through polarization splitting prism reflection with formation reference beam after transmission and object beam
To quarter wave plate, now the orthogonal circularly polarized light of reference beam and object beam formation polarization direction, is then together incident to second and disappears
Polarization splitting prism, with the second depolarization Amici prism after the reflected mirror reflection of the reflected beams of the second depolarization Amici prism
Transmitted light beam is together parallel to be incident to polarization phase-shifting array, and the light beam of polarization phase-shifting array outgoing is photosensitive flat in CMOS cameras
Interference pattern is produced on face, the two width interference patterns collected are using right image as the first width interference pattern, and left image is
Second width interference pattern, the intensity of two width interference patterns in order is respectively I1And I2, by phase extraction algorithms and phase unwrapping
The processing for wrapping up in algorithm obtains the phase distribution of test mirrors, realizes synchronous phase shift interference measurement.
The beneficial effects of the invention are as follows：
1st, two width interference patterns can be obtained in real time, and because two width interference patterns are obtained in synchronization, external environment is done
Disturb identical, reduce the requirement to environment.
2nd, apparatus of the present invention need not change light path in operation, it is not required that mobile any experiment apparatus, easy to operate
Flexibly, stability is high, and system complexity is low.
3rd, two width interference pattern contrasts are identical, can simplify the difficulty of successive image processing.
4th, for the more existing synchronous phase shift interference device of apparatus of the present invention, its simple in construction, cost is lower.
Brief description of the drawings
Fig. 1 is the structural representation of the synchronous phase shift interference measurement apparatus of the present invention based on depolarization Amici prism；
Fig. 2 is the polarization direction schematic diagram of Fig. 1 polarization phase-shifting array.
Embodiment
Below in conjunction with the accompanying drawings and the present invention is discussed in detail in embodiment.
As shown in figure 1, the synchronous phase shift interference measurement apparatus based on depolarization Amici prism of the embodiment of the present invention includes：
Laser (1), the first lens (2), pinhole filter (3), the second lens (4), polarizer (5), the first depolarized Amici prism
(6), polarization splitting prism (7), reference mirror (8), test mirrors (9), quarter wave plate (10), the second depolarization Amici prism (11), anti-
Penetrate mirror (12), polarization phase-shifting array (13), CMOS cameras (14).
The component function that the present invention is included is as follows：
1st, laser (1), wavelength exports a branch of linearly polarized light and power stability in visible-range.
2nd, after the first lens (2), pinhole filter (3), the second lens (4) composition collimating and beam expanding system, the first lens
The front focal plane of focal plane and the second lens keeps confocal, and pinhole filter is located at the back focal plane of the first lens.
3rd, polarizer (5) change incident light polarization direction, and its polarization direction respectively with x-axis and y-axis angle at 45 °.
4th, the first depolarization Amici prism (6), the second depolarization Amici prism (11), for light beam transmission with it is anti-
Penetrate, and keep the polarization state of emergent light constant.
5th, polarization splitting prism (7) is used to produce the orthogonal linearly polarized light beam in two beam polarization directions.
6th, the polarization direction angle at 45 ° of quarter wave plate (10) its quick shaft direction respectively with reference beam and object beam so that ginseng
Examining light beam and object beam turns into the orthogonal circularly polarized light beam in polarization direction, for being subsequently formed synchronous phase shift interference.
7th, speculum (12) and x-axis are placed into the direction of -45° angle, change the reflected beams of the second depolarization Amici prism
The direction of propagation, make it parallel with the direction of propagation of the transmitted light beam of the second depolarization Amici prism.
8th, polarization phase-shifting array (13), are counterclockwise successively into 0 °, 45 ° of two pieces of polarizations by two polarization directions
Piece is constituted, and the interference pattern that two width phase-shift phases are respectively 0 °, 90 ° can be just collected by single exposure.
9th, CMOS cameras (14) have appropriate gray shade rank, Pixel Dimensions and pixel quantity.
Light path proposed by the invention is as shown in Fig. 1：
The collimation that the light beam of laser (1) transmitting is constituted via the first lens (2), pinhole filter (3) and the second lens (4)
Be incident to polarizer (5) after beam-expanding system collimator and extender, the polarization direction of the polarizer respectively with x-axis and y-axis angle at 45 °, protect
Demonstrate,prove that p-component of the polarization direction along x-axis is equal with along the s component light intensity of y-axis, so that the two width interference patterns that subsequent acquisition is obtained
Sample fringe contrast is consistent, and the outgoing beam of polarizer (5) becomes the adjustable linearly polarized light in a branch of polarization direction, and the line is inclined
The light that shakes reflexes to polarization splitting prism (7) by the first depolarization Amici prism (6), passes through the light after polarization splitting prism (7)
Beam be broken down into a branch of polarization direction perpendicular to paper s components and a branch of polarization direction parallel to paper p-component, from polarization
Amici prism (7) light splitting surface transmission p-component by reference mirror (8) reflect after as reference beam, it is a branch of from polarization in addition
The s components of the light splitting surface reflection of Amici prism (7) carry survey after test mirrors (9) reflection as object beam, the object beam
Show on trial the face type information on (9) surface, by adjusting the locus of reference mirror (8) and speculum (9), make the s components of reflection with
The p-component of transmission is merged together again after polarization splitting prism (7), so can be obtained by a pair of polarization directions orthogonal
Reference beam and object beam；Together enter then referring to light beam with object beam after the transmission of the first depolarization Amici prism (6)
It is incident upon quarter wave plate (10), the polarization direction angle at 45 ° of the quick shaft direction of the quarter wave plate respectively with reference beam and object beam, this
When outgoing beam become the orthogonal circularly polarized light beam in polarization direction in a pair, be then incident upon the second depolarization Amici prism (11),
The reflected beams of second depolarization Amici prism (11) by speculum (12) change the direction of propagation after with the second depolarization light splitting
The direction of propagation of the transmitted light beam of prism (11) is parallel, and the speculum is placed along with x-axis into -45° angle, then this two light beams one
Realize that polarization phase-shifting is interfered with polarization phase-shifting array (13) is incident to, pass through the width phase shift interference of CMOS cameras (14) synchronous acquisition two
Pattern.
The structural representation of polarization phase-shifting array (13) is entered as shown in Fig. 2 using polarization phase-shifting array (13) to interference pattern
Row polarization filtering, every width interference pattern is respectively by a polarizer of polarizer group, due to the polarization direction of each polarizer
Difference, different phase shifts are introduced in two width interference patterns, so as to obtain the interference pattern of the different phase shifts of two width.With this two width not
Intensity distribution with the interference pattern of phase shift can just calculate the phase distribution of test mirrors.
It is described above, it is only the embodiment in the present invention, but protection scope of the present invention is not limited thereto, and appoints
What be familiar with the people of the technology disclosed herein technical scope in local modifications or substitutions, should all cover of the invention
Within scope.
Claims (5)
1. the synchronous phase shift interference measurement apparatus based on depolarization Amici prism, it is characterised in that it includes：Lighting module, partially
Shake intervention module, synchronous phase shift module, and lighting module includes laser (1) and collimating and beam expanding system, the collimator and extender system successively
System includes the first lens (2), pinhole filter (3) and the second lens (4), the back focal plane and the second lens (4) of the first lens (2)
Front focal plane keep it is confocal, pinhole filter (3) be located at the first lens (2) back focal plane, with the optical axis direction of the first lens (2)
Xyz three-dimensional cartesian coordinate systems are set up for z-axis direction；Polarization interference module includes polarizer (5), the first depolarization light splitting rib successively
Mirror (6), polarization splitting prism (7), reference mirror (8) and test mirrors (9), polarization splitting prism (7) are placed on the first depolarization point
On the reflected light path of light prism (6), reference mirror (8) and test mirrors (9) are individually positioned in the transmitted light path of polarization splitting prism (6)
On reflected light path, and away from polarization splitting prism (6) apart from equal；Synchronous phase shift module includes quarter wave plate (10), parallel successively
Spectral module, polarization phase-shifting array (13) and CMOS cameras (14), parallel spectral module include the second depolarization Amici prism
And speculum (12) (11).
2. the synchronous phase shift interference measurement apparatus according to claim 1 based on depolarization Amici prism, it is characterised in that：
The polarizer (5) is placed along the direction perpendicular to z-axis, and its polarization direction respectively with x-axis and y-axis angle at 45 °, it is desirable to
P-component of the polarization direction along x-axis is equal with along the s component light intensity of y-axis, makes the striped for the two width interference patterns that subsequent acquisition obtains
Contrast is consistent.
3. the synchronous phase shift interference measurement apparatus according to claim 1 based on depolarization Amici prism, it is characterised in that：
The quick shaft direction of the quarter wave plate (10) is placed along with the direction at x-axis and y-axis angle at 45 ° respectively.
4. the synchronous phase shift interference measurement apparatus according to claim 1 based on depolarization Amici prism, it is characterised in that：
The speculum (12) is placed along with x-axis into the direction of -45° angle.
5. the synchronous phase shift interference measurement apparatus according to claim 1 based on depolarization Amici prism, it is characterised in that：
The polarization phase-shifting array (13) can for two polarizer groups into 1*2 arrays, two polarizers gun parallax difference 45° angle.
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| CN201710520160.2A CN107167071A (en) | 2017-06-30 | 2017-06-30 | Synchronous phase shift interference measurement apparatus based on depolarization Amici prism |
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Cited By (2)
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| CN108303372A (en) * | 2018-01-29 | 2018-07-20 | 哈尔滨工业大学 | Super-resolution measuring device and method while light beam phase shift and polarization rotation |
| CN111947592A (en) * | 2020-06-29 | 2020-11-17 | 中国科学院上海光学精密机械研究所 | Dynamic dual-wavelength phase-shifting interference measuring device and measuring method |
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|---|---|---|---|---|
| CN108303372A (en) * | 2018-01-29 | 2018-07-20 | 哈尔滨工业大学 | Super-resolution measuring device and method while light beam phase shift and polarization rotation |
| CN111947592A (en) * | 2020-06-29 | 2020-11-17 | 中国科学院上海光学精密机械研究所 | Dynamic dual-wavelength phase-shifting interference measuring device and measuring method |
| CN111947592B (en) * | 2020-06-29 | 2021-10-08 | 中国科学院上海光学精密机械研究所 | Dynamic dual-wavelength phase-shifting interference measuring device and measuring method |
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