CN108195849A - Position phase defect detecting system and method based on the safe graceful interferometer of short relevant dynamic - Google Patents
Position phase defect detecting system and method based on the safe graceful interferometer of short relevant dynamic Download PDFInfo
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Abstract
The invention discloses a kind of position phase defect detecting systems and method based on the safe graceful interferometer of short relevant dynamic.The system includes short cross polarization light source and the safe graceful interferometer two parts of polarization.Method is：The light beam that coherent laser short first is sent out enters Michelson interference structure after polarizer and half-wave plate, is emitted the orthogonal linearly polarized light in a pair of of polarization direction, this is coupled in polarization maintaining optical fibre linearly polarized light, the light source as main interferometer；Then the phase difference of interferometer main part interference cavity is matched by adjusting PZT, compensates the bit phase delay between reference light and test light；Finally differ the interference pattern of pi/2 successively using polarizing camera and acquire four amplitude shift phasors, by Phase-shifting algorithm solve phase defect in place information.The present invention has the advantages that visual field is big, high resolution, shock resistance are good, easy to operate, can be used for the real-time high-precision detection of optical element position phase defect.
Description
Technical field
It is particularly a kind of based on the safe graceful interferometer of short relevant dynamic the invention belongs to optical interferometry Instrument technology field
Position phase defect detecting system and method.
Background technology
The defects of optical element, can be divided into amplitude defect and position phase defect.In application process, the amplitude in optical element
Defect can lead to the scattering of energy, and position phase defect can cause the energy of optical system transmitting beam to be assembled, so as to destroy optics
Element or film layer.Especially in high power laser system, position phase defect is to cause the master of damage from laser present on optical element
Want reason.
In recent years, the measurement problem of nanoscale defect increasingly receives significant attention, thus for high-resolution and
The demand of the fine measuring instrument of big visual field is higher and higher.The line that U.S. Lao Lunsi laboratories F.L.Ravizza et al. is proposed is swept
It retouches phase differential imaging technique (LPDI) contraposition phase defect and carries out coarse localization, aligned using phase shift diffraction interference technology (PSDI)
Phase defect is accurately solved, and this method can be used for quickly detecting optical elements of large caliber.Wherein, PSDI be by
Johnson propose a kind of double optical fiber structures point-diffraction interferometer, this structure be disadvantageous in that two optical fiber it
Between required distance it is excessively stringent, while ensureing that two diffraction rings separate, also to ensure the frequency of linear carrier frequency striped not
It can exceed that the sample frequency of CCD.This method is simple in structure, and the defects of will not introducing other elements is interfered, but there are still some to ask
Topic：1) distribution for requiring defect is sparse, and the spacing between Adjacent defect must not exceed 12mm；2) visual field is small, can only once survey and regard
A position phase defect in；3) it needs using no mirror imaging technique, the amplitude of CCD target surfaces, phase distribution is imaged onto
Sample surfaces calculate complicated；4) environmental perturbation cannot be resisted.
Invention content
The purpose of the present invention is to provide a kind of big visual field, high-resolution, shock resistance are good, easy to operate based on short relevant
The position phase defect detecting system and method for the safe graceful interferometer of dynamic.
Realize that the object of the invention technical solution is：A kind of position phase defect inspection based on the safe graceful interferometer of short relevant dynamic
Examining system, including short cross polarization light source and the safe graceful interferometer two parts of polarization；Short coherent laser in short cross polarization light source
The light beam that device is sent out through Michelson interference structure, generates the orthogonal linearly polarized light in a pair of of polarization direction, safe graceful dry into polarization
Interferometer, by adjusting the phase difference of the safe graceful interferometer main part interference cavity of the second pyramid matching polarization, compensation reference light is with surveying
The bit phase delay between light is tried, four width phase shifting interferences are obtained simultaneously on polarization camera, wherein：
The short cross polarization light source is used to generate the orthogonal linearly polarized light in a pair of of phase delay, polarization direction；
Safe graceful interferometer is combined by the safe graceful interferometer of polarization with polarization imaging technology, makes to reflect from the second reference mirror
Reference light back and form interference field from the reflected test light of the first reference mirror.
Further, the short cross polarization light source includes the short coherent laser, the polarization that are sequentially arranged along optical path direction
Piece, half-wave plate, the first pyramid, PBS pyramids gluing, the second pyramid, coupled lens and polarization maintaining optical fibre；The polarizer and half-wave plate
Common to generate polarised light, on the other hand the glued on the one hand reflection s light of PBS pyramids transmits p light, the second pyramid and PBS pyramids are glued
Between distance for Δ, the optical path difference of s light and p light for 2 Δs and polarization direction it is orthogonal.
Further, the safe graceful interferometer of the polarization includes collimator objective, PBS1/4 wave plates cemented prism, measured piece, the
One reference mirror, the second reference mirror, imaging lens and polarization camera；It is orthogonal from a pair of of polarization direction that short cross polarization light source is sent out
Linearly polarized light enter the safe graceful interferometer of polarization, be emitted directional light after collimated object lens collimation, the directional light is through PBS1/4 wave plates
After cemented prism, respectively by the first reference mirror and the second reference mirror, wherein s light is joined through PBS1/4 wave plates cemented prism and first
Examine mirror reflection after be converted to test light p, p light through PBS1/4 wave plates cemented prism transmission, the second reference mirror reflection after be converted to ginseng
Light s is examined, converts the test light p and reference light s of gained along backtracking, and respectively through the transmission of PBS1/4 wave plates cemented prism and instead
It penetrates, polarization camera target surface is imaged onto by imaging lens.
Further, the PBS1/4 wave plates cemented prism be cuboid, and respectively optical system for testing, reference path, into
The glued quarter wave plate in three sides as corresponding to light path.
It is a kind of based on the position phase defect inspection method based on the safe graceful interferometer of short relevant dynamic, include the following steps：
Step 1, the light beam that short coherent laser is sent out generates a pair of of phase delay, partially by Michelson interference structure
Shake the orthogonal linearly polarized light in direction, is then placed in measured piece in the optical system for testing of the safe graceful interferometer of polarization；
Step 2, the distance between the second pyramid and PBS pyramid gluings Δ are adjusted, makes the distance, delta and the safe graceful interference of polarization
The phase difference of interference cavity matches in instrument, and the interference pattern of pi/2 is differed successively using polarizing camera and acquiring four amplitude shift phasors；
Step 3, four width interference patterns are handled using four step Phase-shifting algorithms, calculates the transmission wavefront of measured piece, from
And obtain the position phase defect information on measured piece.
Compared with prior art, the present invention its remarkable advantage is：(1) by safe graceful interferometer and polarization simultaneous phase-shifting technology
It is combined, the dynamic for realizing a phase defect measures；(2) short cross polarization light source is combined with polarized interferometer, it is suppressed that
The coherent noise that the interference of interferometer internal optical component front and rear surfaces generates；(3) polarization splitting prism is improved, realizes optics
Big visual field, the high resolution detection of position phase defect in element；(4) test process is simple, easy to adjust, the requirement to environment compared with
It is low.
Description of the drawings
Fig. 1 is that the present invention is based on the structure diagrams of the position phase defect detecting system of the safe graceful interferometer of short relevant dynamic.
Fig. 2 is the structure diagram of polarization splitting prism in the present invention.
Figure label is as follows：1st, short cross polarization light source；2nd, short coherent laser；3rd, polarizer；4th, half-wave plate；5th, first
Pyramid；6th, PBS pyramids are glued；7th, the second pyramid；8th, coupled lens；9th, polarization maintaining optical fibre；10th, the safe graceful interferometer of polarization；11st, it collimates
Object lens；12nd, PBS1/4 wave plates cemented prism；13rd, measured piece；14th, the first reference mirror；15th, the second reference mirror；16th, imaging lens；
17th, camera is polarized.
Specific embodiment
With reference to Fig. 1, the present invention is based on the position phase defect detecting system of the safe graceful interferometer of short relevant dynamic, including short relevant inclined
Shake light source 1 and safe graceful 10 two parts of interferometer of polarization, and short cross polarization light source with the safe graceful interferometer of polarization is combined, is realized
The dynamic detection of position phase defect.The light beam that short coherent laser 2 in short cross polarization light source 1 is sent out, through Michelson interference
Structure generates the orthogonal linearly polarized light in a pair of of polarization direction, into the safe graceful interferometer 10 of polarization, by adjusting the second pyramid 7
Phase difference with the safe graceful 10 main part interference cavity of interferometer of polarization, compensates the bit phase delay between reference light and test light,
It polarizes and obtains four width phase shifting interferences on camera 17 simultaneously.
(1) the short cross polarization light source 1 is used to generate the orthogonal linearly polarized light in a pair of of phase delay, polarization direction；
The short cross polarization light source 1 include common optical axis be sequentially arranged short coherent laser 2, polarizer 3, half-wave plate 4,
First pyramid 5, PBS pyramids gluing 6, the second pyramid 7, coupled lens 8 and polarization maintaining optical fibre 9；The polarizer 3 and half-wave plate 4 are common
With polarised light is generated, PBS pyramids gluing 6 reflects s light, transmits p light, and the distance between the second pyramid 7 and PBS pyramids gluing 6 is Δ,
The optical path difference of s light and p light is 2 Δs and polarization direction is orthogonal.
(2) the safe graceful interferometer 10 of the polarization is to be combined safe graceful interferometer with polarization imaging technology, is made from the second ginseng
It examines the mirror reference light being reflected back and the test light being reflected back from the first reference mirror forms interference field；
The safe graceful interferometer 10 of polarization include the collimator objective 11 of common optical axis setting, PBS1/4 wave plates cemented prism 12,
Measured piece 13, the first reference mirror 14, the second reference mirror 15, imaging lens 16 and polarization camera 17；It is sent out from short cross polarization light source 1
Enter the safe graceful interferometer 10 of polarization, after collimated object lens 11 collimate, outgoing after the orthogonal linearly polarized light in a pair of of polarization direction for going out
Directional light, after PBS1/4 wave plates cemented prism 12, respectively by the first reference mirror 14 and the second reference mirror 15, wherein s light passes through
Test light p, p light is converted to through PBS1/4 wave plate cemented prisms after PBS1/4 wave plates cemented prism 12 and the reflection of the first reference mirror 14
After 12 transmissions, the reflection of the second reference mirror 15 reference light s, test light p and reference light s are converted to along backtracking, and pass through respectively
PBS1/4 wave plates cemented prism 12 is transmitted and is reflected, and polarization 17 target surface of camera is imaged onto by imaging lens 16.
With reference to Fig. 2, the PBS1/4 wave plates cemented prism 12 be cuboid, and respectively optical system for testing, reference path, into
The glued quarter wave plate in three sides as corresponding to light path, when bore D is bigger, the cutoff frequency of optical systemMore
Height, so as to improve the imaging resolution of the system.While the bore for increasing PBS1/4 wave plates cemented prism 12, it is controlled
Thickness, so as to which the aberration for controlling optical system will not increase.The PBS1/4 wave plates cemented prism 12 ensure that long working distance
From while, ensure that big visual field, the high resolution measurement of a phase defect.Side three pieces of quarter wave plates of gluing, are greatly saved dry
The useful space inside interferometer.
The present invention is based on the position phase defect inspection methods of the safe graceful interferometer of short relevant dynamic, include the following steps：
Step 1, the light beam that short coherent laser 2 is sent out generates a pair of of phase delay, partially by Michelson interference structure
Shake the orthogonal linearly polarized light in direction, is then placed in measured piece 13 in the optical system for testing of the safe graceful interferometer 10 of polarization；
Step 2, motorized precision translation stage is adjusted so that the distance between second pyramid 7 and PBS pyramids gluing 6 and polarization are safe graceful
The phase difference of interference cavity matches in interferometer 10, and the interference of pi/2 is differed successively using polarizing camera 17 and acquiring four amplitude shift phasors
Figure；
Step 3, four width interference patterns are handled using four step Phase-shifting algorithms, calculate the transmission wavefront of measured piece 13,
So as to obtain the position phase defect information on measured piece 13.
Embodiment 1
The present invention is based on the position phase defect detecting system of the safe graceful interferometer of short relevant dynamic light channel structure as shown in Figure 1,
Including：
1) short cross polarization light source 1, for generating the orthogonal linearly polarized light in a pair of of phase delay, polarization direction.It is described short
Cross polarization light source 1 includes short coherent laser 2, polarizer 3, half-wave plate 4, the first pyramid 5, the PBS that common optical axis is sequentially arranged
Pyramid gluing 6, the second pyramid 7, coupled lens 8 and polarization maintaining optical fibre 9；The polarizer 3 and half-wave plate 4 generate polarised light jointly,
PBS pyramids gluing 6 reflects s light, transmits p light, and the distance between the second pyramid 7 and PBS pyramids gluing 6 is the light of Δ, s light and p light
Path difference is 2 Δs and polarization direction is orthogonal.
2) safe graceful interferometer with polarization imaging technology is combined, makes from the second reference mirror 15 by the safe graceful interferometer 10 of polarization
The reference light being reflected back and the test light being reflected back from the first reference mirror 14 form interference field.The safe graceful interferometer 10 of polarization wraps
Collimator objective 11, PBS1/4 wave plates cemented prism 12, measured piece 13, the first reference mirror 14, second for including common optical axis setting refer to
Mirror 15, imaging lens 16 and polarization camera 17；The linearly polarized light orthogonal from a pair of of polarization direction that short cross polarization light source 1 is sent out
Enter the safe graceful interferometer 10 of polarization afterwards, after collimated object lens 11 collimate, directional light is emitted, through PBS1/4 wave plates cemented prism 12
Afterwards, respectively by the first reference mirror 14 and the second reference mirror 15, wherein s light is referred to through PBS1/4 wave plates cemented prism 12 and first
Mirror 14 is converted to test light p, p light and is converted after PBS1/4 wave plates cemented prism 12 transmits, the second reference mirror 15 reflects after reflecting
It is reference light s, test light p and reference light s along backtracking, and transmits and reflect through PBS1/4 wave plates cemented prism 12 respectively,
Polarization 17 target surface of camera is imaged onto by imaging lens 16.
The PBS1/4 wave plates cemented prism 12 is cuboid, and respectively in optical system for testing, reference path, imaging optical path institute
The glued quarter wave plate in corresponding three sides, when bore D is bigger, the cutoff frequency of optical systemIt is higher, optics
The resolution ratio of system is higher.While the bore for increasing PBS1/4 wave plates cemented prism 12, its thickness is controlled, so as to control light
The aberration of system will not increase.The PBS1/4 wave plates cemented prism 12 ensure that while ensure that long reach
The big visual field of position phase defect, high resolution measurement.Side three pieces of quarter wave plates of gluing, are greatly saved effective inside interferometer
Space.
Optical element position is measured using the above-mentioned position phase defect detecting system based on the safe graceful interferometer of short relevant dynamic mutually to lack
Sunken step is：
1) it opens short coherent laser 2 and treats its stabilization；
2) measured piece 13 is positioned in the optical system for testing of the safe graceful interferometer of polarization, opened at computer and interference diagram data
Software is managed, recalls real-time collected interference fringe；
3) the second pyramid 7 is adjusted so that the collected intetference-fit strengthenings of CCD are best；
4) pitching of the first reference mirror 14 of adjustment, heeling condition, make visual field intra-striate number be between 0~2 striped；
5) masks area is chosen, that is, draws a circle to approve Mask, using four step Phase-shifting algorithms, Mask regions is resolved, are calculated
The transmission wavefront of measured piece 13, so as to obtain the position phase defect information on measured piece 13.
In conclusion the present invention is based on the position phase defect detecting system and method for the safe graceful interferometer of short relevant dynamic, have
The advantages of visual field is big, high resolution, shock resistance are good, easy to operate can realize real-time, the high-precision of optical element position phase defect
Detection.
Claims (5)
1. a kind of position phase defect detecting system based on the safe graceful interferometer of short relevant dynamic, which is characterized in that including short relevant inclined
Shake light source (1) and safe graceful interferometer (10) two parts of polarization；Short coherent laser (2) in short cross polarization light source (1) is sent out
Light beam, through Michelson interference structure, the orthogonal linearly polarized light in a pair of of polarization direction is generated, into the safe graceful interferometer of polarization
(10), the phase difference of safe graceful interferometer (10) the main part interference cavity of polarization, compensation reference are matched by adjusting the second pyramid (7)
Bit phase delay between light and test light obtains four width phase shifting interferences simultaneously on polarization camera (17), wherein：
The short cross polarization light source (1) is for generating the orthogonal linearly polarized light in a pair of of phase delay, polarization direction；
Safe graceful interferometer is combined by the safe graceful interferometer (10) of polarization with polarization imaging technology, is made from the second reference mirror (15)
Reflected reference light and form interference field from the reflected test light of the first reference mirror (14).
2. the position phase defect detecting system according to claim 1 based on the safe graceful interferometer of short relevant dynamic, feature exist
In, the short cross polarization light source (1) including be sequentially arranged along optical path direction short coherent laser (2), polarizer (3), half
Wave plate (4), the first pyramid (5), PBS pyramids glued (6), the second pyramid (7), coupled lens (8) and polarization maintaining optical fibre (9)；It is described
Polarizer (3) and half-wave plate (4) generate polarised light jointly, and PBS pyramids gluing (6) on the one hand reflects s light, on the other hand transmits p
Light, the distance between the second pyramid (7) and PBS pyramids glued (6) are Δ, the optical path difference of s light and p light for 2 Δs and polarization direction just
It hands over.
3. the position phase defect detecting system according to claim 1 based on the safe graceful interferometer of short relevant dynamic, feature exist
In, the safe graceful interferometer (10) of polarization including collimator objective (11), PBS1/4 wave plates cemented prism (12), measured piece (13),
First reference mirror (14), the second reference mirror (15), imaging lens (16) and polarization camera (17)；From short cross polarization light source (1)
The orthogonal linearly polarized light in a pair of of polarization direction for sending out enters the safe graceful interferometer (10) of polarization, goes out after collimated object lens (11) collimation
Directional light is penetrated, which is referred to after PBS1/4 wave plates cemented prism (12) by the first reference mirror (14) and second respectively
Mirror (15), wherein s light are converted to test light p, p light after PBS1/4 wave plates cemented prism (12) and the first reference mirror (14) reflection
Reference light s is converted to after PBS1/4 wave plates cemented prism (12) transmission, the second reference mirror (15) reflection, converts the test of gained
Light p and reference light s are transmitted and are reflected through PBS1/4 wave plates cemented prism (12) respectively along backtracking, by imaging lens
(16) it is imaged onto polarization camera (17) target surface.
4. the position phase defect detecting system according to claim 3 based on the safe graceful interferometer of short relevant dynamic, feature exist
In the PBS1/4 wave plates cemented prism (12) is cuboid, and right in optical system for testing, reference path, imaging optical path institute respectively
The glued quarter wave plate in three sides answering.
5. a kind of position phase defect inspection method based on based on the safe graceful interferometer of short relevant dynamic described in claim 1, feature
It is, includes the following steps：
Step 1, the light beam that short coherent laser (2) sends out generates a pair of of phase delay, polarization by Michelson interference structure
Measured piece (13) is then placed in the optical system for testing of the safe graceful interferometer (10) of polarization by the orthogonal linearly polarized light in direction；
Step 2, the distance between the second pyramid (7) and PBS pyramids glued (6) Δ are adjusted, makes the distance, delta and polarization safe graceful dry
The phase difference of interference cavity matches in interferometer (10), and the dry of pi/2 is differed successively using four amplitude shift phasors of camera (17) acquisition are polarized
Relate to figure；
Step 3, four width interference patterns are handled using four step Phase-shifting algorithms, calculates the transmission wavefront of measured piece (13), from
And obtain the position phase defect information on measured piece (13).
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| CN112378346B (en) * | 2020-10-30 | 2022-03-15 | 中国计量大学 | Phase compensation method for polarization aberration of large-caliber polarization phase-shifting Fizeau interferometer |
| CN112378346A (en) * | 2020-10-30 | 2021-02-19 | 中国计量大学 | Phase compensation method for polarization aberration of large-caliber polarization phase-shifting Fizeau interferometer |
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| CN112630232B (en) * | 2020-12-01 | 2021-12-03 | 北京理工大学 | Method and device for detecting defects of inner surface and outer surface of differential confocal fixed-surface interference target pill |
| CN112666172B (en) * | 2020-12-01 | 2022-02-11 | 北京理工大学 | Method and device for detecting outer surface defects of differential confocal fixed-surface interference target pill |
| CN112683918B (en) * | 2020-12-01 | 2022-02-11 | 北京理工大学 | Method and device for detecting inner surface defects of differential confocal fixed-surface interference target pellet |
| CN113189119B (en) * | 2021-04-30 | 2021-11-23 | 东明县人民医院 | Internal defect detection device for medical optical element |
| CN113189119A (en) * | 2021-04-30 | 2021-07-30 | 东明县人民医院 | Internal defect detection device for medical optical element |
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| CN113533366B (en) * | 2021-07-06 | 2024-05-24 | 常州联影智融医疗科技有限公司 | Defect detection device and detection method for end face of light guide beam |
| CN115112045A (en) * | 2022-06-24 | 2022-09-27 | 南京理工大学 | Interference measurement method based on all-fiber orthogonal polarization optical path matching short coherent light source |
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