CN206300612U - A kind of nanometer measuring device based on synthesis interference signal polarization state detection technique - Google Patents
A kind of nanometer measuring device based on synthesis interference signal polarization state detection technique Download PDFInfo
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- CN206300612U CN206300612U CN201621311677.8U CN201621311677U CN206300612U CN 206300612 U CN206300612 U CN 206300612U CN 201621311677 U CN201621311677 U CN 201621311677U CN 206300612 U CN206300612 U CN 206300612U
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- light
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- liquid crystal
- polarization state
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Abstract
The utility model discloses a kind of nanometer measuring device based on synthesis interference signal polarization state detection technique.The utility model is made up of laser interference unit and polarization state detection unit two parts.Laser interference unit adds polarizer on the basis of single-frequency Michelson's interferometer, to realize the conversion of laser polarization state.Polarization Detection unit is using the polarization measurement system based on electrooptical liquid crystal phase-modulation.Polarization state detection unit can measure laser interference unit emergent light Stokes vectors, and the ovality angle ε and azimuth angle theta of polarised light are obtained by Stokes vectors.There is linear relationship with the displacement x of moving lens in azimuth angle theta, it is possible thereby to high-resolution displacement subdivision is obtained, and without the limitation in measurement range.The present apparatus is using electro-optic phase modulation measurement laser polarization state, it is to avoid the machine error of conventional rotating wave plate method, and fast with measuring speed, and measurement range is big, certainty of measurement is high, the advantages of light path is simple.
Description
Technical field
The utility model is related to Technology of Precision Measurement field, more particularly to a kind of based on the polarization state inspection of synthesis interference signal
The nanometer measuring device of survey technology.
Background technology
Surface nanometer-displacement technology is high-grade, digitally controlled machine tools, great scale integrated circuit, large-area scanning probe microscope
It is to realize high-end manufacture, semiconductor, biomedicine etc. Deng the core technology and key feature of the high-end manufacturing equipment of ultraprecise
The guarantee of field nanometer manufacture.Nano measurement method main at present has PSTM, grating sensor and laser to do
Interferometer etc., this several method is attained by Subnano-class resolution ratio.PSTM measurement range be only micron range and
There are problems that meter Su Yuan, grating sensor optical element is laid difficult.Laser interferometer can realize wide range nano measurement, resist and do
Disturb ability strong, be now widely used nano measurement method, laser interferometer is the move of stripe by causing to displacement
Displacement measurement is realized in treatment, thus the certainty of measurement of divided method and subdivision accuracy the influence laser interferometer of interference fringe and
Measurement Resolution, the optical nonlinearity error that optical polarization aliasing causes in addition also limit effective resolution of laser interferometer
Rate.
Application publication number CN103075969A discloses a kind of differential type laser interference surface nanometer-displacement method and device,
The measuring method is interfered and differential principle using single-frequency.But the measurement process of the method is a reduction process, real-time is surveyed
Amount is restricted.Application publication number CN104697438A discloses a kind of motion compensation formula corner reflector laser interferometer and uses
Method, the interferometer obtains the fractional part of interference wave in interventional procedures to improve essence by setting removable micromotion platform
Degree, but it does not consider influence of the optical nonlinearity error to certainty of measurement.
The content of the invention
To overcome above-mentioned the deficiencies in the prior art, the utility model provides a kind of based on the polarization state inspection of synthesis interference signal
The nanometer measuring device of survey technology.
The technological invention that the utility model is used is as follows：
The utility model by lasing light emitter, polarizer, λ/2 wave plate, the first polarization spectroscope, λ/4 wave plate, fixed mirror,
2nd λ/4 wave plate, moving lens, the 3rd λ/4 wave plate, the first liquid crystal modulator, the second liquid crystal modulator, the second polarization spectroscope,
First photodetector, the second photodetector composition.
The annexation of each part mentioned above is as follows：
The lasing light emitter emergent linear polarised light angle of polarization is 45 °, can be obtained by polarizer and the adjustment of λ/2 wave plate, the polarised light
It is divided into two beams through the first polarization spectroscope：That is P polarization light and S-polarization light.P polarization light after λ/4 wave plate by becoming round
Polarised light is sent to fixed mirror, and S-polarization light becomes circularly polarized light and is sent to moving lens after the 2nd λ/4 wave plate.P polarization light
By turning into circularly polarized light by λ/4 wave plate and the first polarization spectroscope after fixed mirror reflection, S-polarization light is by moving lens
Circularly polarized light is turned into by the 2nd λ/4 wave plate and the first polarization spectroscope after reflection.Two circularly polarized lights are by the 3rd λ/4 wave plate
As linearly polarized photon, the linearly polarized photon by the second polarization by after the first liquid crystal modulator, the second liquid crystal modulator, being divided
Light microscopic is divided into the orthogonal linearly polarized photon P light and S light of two beams, and its light intensity is detected by the first photodetector and the second detector
ITAnd IR, change 2 phase-delay quantities of liquid crystal modulator, then its light intensity I is detected by 2 photodetectorsT' and IR’.By
The light intensity for measuring can obtain moving lens displacement Δ x.
Compared with prior art, the beneficial effects of the utility model are：
1. the utility model introduces laser polarization interference technique on the basis of single-frequency Michelson's interferometer and laser is inclined
Polarization state detection technique, builds new polarized interferometer, and Measurement Resolution can be made to reach nanometer scale, measurement range is not surveyed again
The amount upper limit.
2. the utility model can be detected by the wave plate in rotational interference light path and polarizer, with reference to laser polarization state
Technology, can intuitively observe and change the linearity ε of interference light, can effectively reduce optical nonlinearity error, so as to improve survey
Accuracy of measurement.
3. the utility model measures the polarization state of polarised light using phase modulation, compared to traditional commercial polarimeter,
Machine error is reduced, signal to noise ratio is improved, so as to improve the resolution ratio and measuring speed of interferometer, cost is also reduced.
4. the utility model light channel structure is simple, easy to use, can be measured in real time.
Brief description of the drawings
Fig. 1 is the overall structure diagram of nanometer measuring device of the present utility model
Specific embodiment
The utility model is further illustrated below in conjunction with the accompanying drawings.
As shown in figure 1, the utility model by lasing light emitter 1, polarizer 2, λ/2 wave plate 3, the first polarization spectroscope 4, a λ/
4 wave plates 5, fixed mirror 6, the 2nd λ/4 wave plate 7, moving lens 8, the 3rd λ/4 wave plate 9, the first liquid crystal modulator 10, the second liquid crystal are adjusted
Device processed 11, the second polarization spectroscope 12, the first photodetector 13, the second photodetector 14 are constituted.
The utility model device is made up of laser interference unit and polarization state detection unit two parts, wherein laser interference list
Unit is by lasing light emitter 1, polarizer 2, λ/2 wave plate 3, the first polarization spectroscope 4, λ/4 wave plate 5, fixed mirror 6, the 2nd λ/4 wave plate
7th, moving lens 8, the 3rd λ/4 wave plate 9 are constituted.The a branch of linearly polarized photon of the outgoing of lasing light emitter 1, the linearly polarized photon sequentially passes through polarization
Piece 2, λ/2 wave plate 3, the linearly polarized photon that the angle of polarization is 45 ° can be obtained by polarizer 2, the adjustment of λ/2 wave plate 3, this 45 °
Linearly polarized photon is divided into two beam linearly polarized photons respectively S-polarization light and P polarization light by the first polarization spectroscope 4.P polarization
Light is sent to fixed mirror 6 by becoming circularly polarized light after λ/4 wave plate 5, and S-polarization light becomes round after the 2nd λ/4 wave plate 7
Polarised light is sent to moving lens 8.P polarization light after the reflection of fixed mirror 6 by passing through λ/4 wave plate 5 and the first polarization spectro
Mirror 4 turns into circularly polarized light, and S-polarization light is turned into by after the reflection of moving lens 8 by the 2nd λ/4 wave plate 7 and the first polarization spectroscope 4
Circularly polarized light.Two circularly polarized lights turn into linearly polarized photon through the 3rd λ/4 wave plate.The linearly polarized photon is laser interference part
Emergent light.
When moving lens 8 are moved, the phase angle θ of laser interference unit emergent light can change, and changing value is ± φ, just
Minus symbol is relevant with the moving direction of moving lens, and the emergent light of laser interference unit is linearly polarized photon, phase angle θ and phase
Variable quantity Φ is relevant.Therefore, the displacement Δ x of moving lens 8 can be measured by measuring the azimuth angle theta of plane of polarization, displacement
Δ x is with the relational expression of azimuthal variation amount Δ θ：
In formula, λ0It is vacuum laser wavelength, n is air refraction.The integer multiples that displacement value Δ x is changed by azimuth angle theta
The currency decision of phase pulse number and the θ less than a cycle, the rotation side of the direction of motion foundation azimuth angle theta of testee
Judge to (counterclockwise or clockwise).
Polarization Detection unit of the present utility model is polarized by the first liquid crystal modulator 10, the second liquid crystal modulator 11, second
Spectroscope 12, the first photodetector 13, the second photodetector 14 are constituted.The emergent light of laser interference unit is polarization inspection
Survey the incident light of unit.The linearly polarized photon is inclined by second by after the first liquid crystal modulator 10, the second liquid crystal modulator 11
The spectroscope 13 that shakes is divided into the orthogonal linearly polarized light P light and S light of two beams, is visited by the first photodetector 14 and the second detector 15
Survey its light intensity ITAnd IR, change 2 phase-delay quantities of liquid crystal modulator, then its light intensity I is detected by 2 photodetectorsT' and
IR’。
Polarization Detection unit of the present utility model uses the polarimeter based on electrooptical liquid crystal phase-modulation, using electricity
The double refractive inde of optical modulator is accurately controlled by added voltage-controlled characteristic, the polarization state to interferometer emergent light
System.The first liquid crystal modulator 10, the phase-delay quantity of the second liquid crystal modulator 11 in polarization state detection unit is by high voltage amplifier
Device output amplitude control, wherein the first liquid crystal modulator 10 fast axle choose in the horizontal direction, the second liquid crystal modulator 11 it is fast
Axle is from the horizontal by 45 °.The first liquid crystal modulator 10, the phase-delay quantity of the second liquid crystal modulator 11, Ke Yiyou for changing
The different light intensity that first photodetector 14, the second detector 15 are surveyed, it is possible to calculate Stokes vectors, ovality angle ε
And azimuth angle theta, so as to describe the polarization state of light beam comprehensively.Stokes vectors are with the relational expression of light intensity：
It is 0 phase delay to control the first liquid crystal modulator 10, and the second liquid crystal modulator of control 11 is respectively 0 and λ/2 phase
Postpone, the emergent light of laser interference unit by by the second polarization spectroscope 13 after out of phase delay by being divided into two beams just
The linearly polarized light P light and S light of friendship, its light intensity I is detected by the first photodetector 14 and the second detector 15TAnd IR, change 2
The phase-delay quantity of liquid crystal modulator, then detect its light intensity I by 2 photodetectorsT' and IR’.S can be measured1。
Similarly, the first liquid crystal modulator of control 10 is 0 phase delay, and the second liquid crystal modulator of control 11 is respectively λ/4 and 3
λ/4 phase delay, can measure S2。
Similarly, the first liquid crystal modulator of control 10 is λ/4 phase delay, and the second liquid crystal modulator of control 11 is respectively λ/4
With 3 λ/4 phase delays, S can be measured3。
Again by S1, S2, S3Ovality angle ε and azimuth angle theta, the wherein relation of ovality angle ε and Stokes vector can be measured
Expression formula is：
Ovality angle ε can characterize the polarization linearity of interferometer emergent light, with reference to wave plate position adjustment, it is ensured that interferometer goes out
Light is penetrated for linearly polarized photon (ε=0 °), suppresses main by the non-linear of light source polarization state, wave plate azimuth angle deviation, polarization spectro
The polarization ellipse of the bad interferometer emergent light for causing of mirror degree of polarization, so as to reduce interferometer non-linearity error, improves measurement
Precision.
Azimuth angle theta is with the relational expression of Stokes vectors：
I.e.
Substitute into representative value：As wavelength X=632.992027nm, when the certainty of measurement of azimuth angle theta reaches 0.01 °, interfere bar
Line subdivision multiple reaches 36000 times, and better than current interference fringe divided method, the resolution ratio of displacement can reach
0.017nm.
So far the utility model is completed.
Claims (1)
1. it is a kind of based on the nanometer measuring device for synthesizing interference signal polarization state detection technique, it is characterised in that the device is by laser
Source, polarizer, λ/2 wave plate, the first polarization spectroscope, λ/4 wave plate, fixed mirror, the 2nd λ/4 wave plate, moving lens, the 3rd λ/
4 wave plates, the first liquid crystal modulator, the second liquid crystal modulator, the second polarization spectroscope, the first photodetector, the second smooth electrical resistivity survey
Device composition is surveyed, the annexation of each part mentioned above is as follows：
The lasing light emitter emergent linear polarization light device angle of polarization is 45 °, can be obtained by polarizer and the adjustment of λ/2 wave plate, polarised light warp
First polarization spectroscope is divided into two beams：That is P polarization light and S-polarization light, P polarization light are inclined by becoming circle after λ/4 wave plate
The light that shakes is sent to fixed mirror, and S-polarization light becomes circularly polarized light after the 2nd λ/4 wave plate and is sent to moving lens, P polarization light warp
Circularly polarized light is turned into by λ/4 wave plate and the first polarization spectroscope after crossing fixed mirror reflection, S-polarization light is anti-by moving lens
Circularly polarized light is turned into by the 2nd λ/4 wave plate and the first polarization spectroscope after penetrating, two circularly polarized lights turn into through the 3rd λ/4 wave plate
Linearly polarized photon, the linearly polarized photon by after the first liquid crystal modulator, the second liquid crystal modulator, by the second polarization spectroscope
It is divided into two beams orthogonal linearly polarized light P light and S light, its light intensity I is detected by the first photodetector and the second photodetectorT
And IR, change 2 phase-delay quantities of liquid crystal modulator, then its light intensity I is detected by 2 photodetectorsT' and IR', by having surveyed
The light intensity for obtaining can obtain moving lens displacement Δ x.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621311677.8U CN206300612U (en) | 2016-11-29 | 2016-11-29 | A kind of nanometer measuring device based on synthesis interference signal polarization state detection technique |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621311677.8U CN206300612U (en) | 2016-11-29 | 2016-11-29 | A kind of nanometer measuring device based on synthesis interference signal polarization state detection technique |
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| CN206300612U true CN206300612U (en) | 2017-07-04 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109917828A (en) * | 2019-04-15 | 2019-06-21 | 中国航空工业集团公司北京长城计量测试技术研究所 | Interfere the small Force control system of differential displacement method |
| CN111780664A (en) * | 2020-06-29 | 2020-10-16 | 四川大学 | Michelson interferometer system capable of simultaneously outputting double-frequency fringes orthogonal to polarization direction and simultaneous output method |
| CN112414298A (en) * | 2020-10-27 | 2021-02-26 | 衡阳市智谷科技发展有限公司 | Transmission type digital holographic microscopy test method for full polarization state measurement |
| CN113607063A (en) * | 2021-08-03 | 2021-11-05 | 中国工程物理研究院激光聚变研究中心 | Nano displacement measurement method and system based on vortex light field interference |
-
2016
- 2016-11-29 CN CN201621311677.8U patent/CN206300612U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109917828A (en) * | 2019-04-15 | 2019-06-21 | 中国航空工业集团公司北京长城计量测试技术研究所 | Interfere the small Force control system of differential displacement method |
| CN109917828B (en) * | 2019-04-15 | 2021-10-15 | 中国航空工业集团公司北京长城计量测试技术研究所 | Interference differential displacement method micro force control system |
| CN111780664A (en) * | 2020-06-29 | 2020-10-16 | 四川大学 | Michelson interferometer system capable of simultaneously outputting double-frequency fringes orthogonal to polarization direction and simultaneous output method |
| CN111780664B (en) * | 2020-06-29 | 2021-11-09 | 四川大学 | Output method for simultaneously outputting dual-frequency stripes with orthogonal polarization directions |
| CN112414298A (en) * | 2020-10-27 | 2021-02-26 | 衡阳市智谷科技发展有限公司 | Transmission type digital holographic microscopy test method for full polarization state measurement |
| CN113607063A (en) * | 2021-08-03 | 2021-11-05 | 中国工程物理研究院激光聚变研究中心 | Nano displacement measurement method and system based on vortex light field interference |
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