CN104897048B - The interference of single channel linear polarization and double Wo Lasite prismatic decomposition formula homodyne laser vibration measurers without quadrature error - Google Patents
The interference of single channel linear polarization and double Wo Lasite prismatic decomposition formula homodyne laser vibration measurers without quadrature error Download PDFInfo
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Abstract
The interference of single channel linear polarization and double Wo Lasite prismatic decomposition formula homodyne laser vibration measurers without quadrature error belong to laser interferometry field；Interference portion produces orthogonal single channel polarization direction, the linear polarization reference light of light path coincidence and linear polarization by a quarter-wave plate and non-polarization Beamsplitter NBS and measures light, probe portion reference light and measurement light produce four tunnel phases into the Wo Lasite prisms of particular kind of relationship around light beam Space Rotating angle by two and differ 90 ° of photosignal, so as to obtain the prominent characteristic for suppressing nonlinearity erron from light channel structure and principle；The present invention realizes four-way homodyne orthogonal laser interferometry using less optical element, can effectively solve light path in prior art and polarization leakage and polarization aliasing be present, direct current biasing error and non-orthogonal errors be present in output signal, the problems such as measurement result nonlinearity erron is notable, there is significant technical advantage in ultraprecise vibration measurement field.
Description
Technical field
The invention belongs to laser interferometry field, the single channel linear polarization interference of a kind of no quadrature error and double is related generally to
Wo Lasite prismatic decomposition formula homodyne laser vibration measurers.
Background technology
Laser vibration measurer is widely used as the ultra precise measurement instrument that vibration value can be traceable to optical maser wavelength
In the field such as the measurement of displacement dynamic, vibration measurement and monitoring, ultraprecise equipment and the system integration, scientific research and experiment.It is based on
The laser vibration measurer of laser interferance method can be divided into homodyne and the major class of heterodyne two according to principle, and the two is in operation principle, light channel structure
With there is significant difference on technical characterstic.The null method of measurement uses single-frequency laser as light source, based on classical or improved mikey
The inferior laser interference principle of that, the direct displacement of phase place change by measuring interference fringe；And heterodyne measurement method is to use double frequency
Laser, based on Doppler effect, the movement velocity of measured piece is measured and indirect location by measuring Doppler frequency difference as light source
Move.Heterodyne laser vialog (often claiming laser doppler vialog), its signal transacting was substantially to carry out frequency measurement, system sheet
Body is dynamic communication system, it is small to have the characteristics that strong antijamming capability, measurement result are influenceed by light intensity change, shortcoming is non-linear
Error source is more, and amendment is more complicated, has higher technical sophistication degree and technical difficulty.And homodyne laser vibration measurer technology
It is then more ripe, have that simple in construction, measurement accuracy is high, wide dynamic range, non-linear the advantages that being easy to compensation.Especially in recent years
Come, scientific research with experiment propose sub- nanometer even micromicron precision vibration measurement demand, the null method of measurement again by
The concern of researcher and as the study hotspot of this area.
With the development of interferometry technology, homodyne laser vibration measurer uses advanced homodyne orthogonal laser vibration measuring more at present
Scheme, using Polarized light phase-shift interference technique, the orthogonal photosignal of two-way is obtained, passes through arctangent computation and continuous phase solution
Adjust, realize the high-resolution survey of vibration.Homodyne orthogonal laser vialog output two paths of signals should be in the ideal case
Amplitude, the harmonic signal without direct current biasing, quadrature in phase, the Lie groupoid of two paths of signals should be a standard round；But it is actual due to
Laser power drift, optical component is undesirable and the factor, especially polarization spectroscope such as optical element error in mounting position
There is polarisation leakage in the optics such as PBS and polarizer, wave plate device has the factors such as phase delay error, causes reality output
Two-way orthogonal signalling direct current biasing, non-constant amplitude and non-orthogonal errors be present, so as to measurement result bring nonlinearity erron.It is existing
Some homodyne orthogonal laser vialog nonlinearity errons are up to several nanometers, even tens nanometers, although can lead to a certain extent
Cross mathematical method to be modified, but very high requirement is proposed to the processing speed of sample rate and data signal, and require two-way
The Lie groupoid of signal, which is necessary for complete ellipse, can just be modified.On the one hand amendment computing has a strong impact on the real-time of measurement
Property, another aspect precision and effect are also restrained.Therefore, how by the innovation on light channel structure and principle, from principle
Factor caused by nonlinearity erron is avoided, is to solve the problems, such as homodyne orthogonal laser vialog nonlinearity erron most efficient method,
And the hot issue of this area research.
The light channel structure of homodyne orthogonal laser vialog is made up of interference portion and probe portion two large divisions.Prior art
For scheme in interference portion and/or probe portion, by light channel structure, principle and optics self character is undesirable is limited, and deposits
In the nonlinearity erron for being difficult to overcome.Advantage and disadvantage to prior art and it is described below the reason for produce nonlinearity erron：
(1) in the homodyne orthogonal laser vialog technical scheme of traditional classical, interference portion is divided using polarization spectroscope PBS
Light, produce the reference light of P components and the measurement light of S components；Probe portion is first all the way through inclined after non-polarization Beamsplitter NBS light splitting
Shake after piece, be received by a photoelectric detector, another way first becomes circularly polarized light through quarter-wave plate, then again through polarizer by light
Electric explorer receives.In the technical scheme, the polarizer for polarization spectroscope PBS and the probe portion use that interference portion uses disappears
Polarisation leakage phenomenon be present, cause the light path nonlinearity erron notable in light than low (typically in 1000: 1 magnitudes).
(2) 1999 years, the homodyne orthogonal laser vibration measuring technology based on non-polarization Beamsplitter NBS and Wo Lasite prismatic decomposition
Scheme, it is written into (ISO16063-41 " Methods in " ISO16063-11 laser interferance methods vibrate absolute calibration " standard
the calibration of vibration and shock transducers--Part 41：Calibration of
laser vibrometers”.).In the technical scheme, interference portion LASER Light Source polarization light output, make the inclined of linearly polarized light
Shake the quick shaft direction angle at 45 ° in direction and quarter-wave plate, and linearly polarized light becomes circular polarization after quarter-wave plate
Light, circularly polarized light is divided using non-polarization Beamsplitter NBS, on reference arm using polarizer by the polarization state of reference light by
Circular polarization becomes linear polarization, and it is always circularly polarized light to measure light；Probe portion reference light and measurement light are through Wo Lasite prisms
Light splitting produces the orthogonal interference signal of two-way.Because probe portion uses Wo Lasite prismatic decompositions, Wo Lasite prisms utilize
The physical characteristic of birefringece crystal itself separates different polarised lights, has larger extinction ratio (can be higher than 100000: 1), because
This probe portion can be considered in the absence of polarization aliasing.It is disadvantageous in that existing for the technical scheme：1) put on reference arm
Putting polarizer causes reference light to be substantially reduced relative to the light intensity of measurement light, introduces the not constant amplitude error of two-way output signal；2)
Interference portion produces linearly polarized light using polarizer, and polarizer extinction ratio is low, and interference portion has polarization aliasing and introduced non-thread
Property error.
(3) 2009 years, G Peter of Slovenia etc. propose it is a kind of based on non-polarization Beamsplitter NBS and eight/
Homodyne orthogonal laser vialog (1.G Peter, T Pozar, M Janez. " the Quadrature phase-shift of one wave plate
Error analysis using a homodyne laser interferometer " .Optics Express, 2009,17
(18)：16322-16331.2.G Peter, T Pozar, M Janez. " Phase-shift error in quadrature-
Detection-based interferometers " .Proc.of SPIE, 2010, Vol.7726：77260X-1-77260X-
10.).In the technical scheme, interference portion lasing light emitter output polarization direction is the linearly polarized light in 45 ° of directions, using depolarization point
Light microscopic NBS is divided, and reference light is turned back passes through 1/8th wave plates twice, and polarization state is changed into circular polarization from linear polarization, and surveys
Measure light polarization direction and keep constant；Reference light and measurement light are producing two-way just in probe portion using polarization spectroscope PBS light splitting
The interference signal of friendship.The light path of the technical scheme is simpler, and optical element is less.It is disadvantageous in that existing for it：1) eight points
One of wave plate device precision it is poor, actual phase shift be less than 45 °, linear polarization reference light actually obtains by 1/8th wave plates twice
Be elliptically polarized light, cause the nonopiate phase displacement error of the two paths of signals of reality output larger；2) probe portion is using PBS points
Light, polarisation leakage phenomenon be present, introduce larger nonlinearity erron.
Other two kinds of improved forms be present in the technical scheme：First, Jeongho Ahn of South Korea etc. are in G Peter scheme light
On the basis of road, using prism of corner cube substitute G Peter schemes in Plane reference mirror and measurement mirror (Jeongho Ahn,
“Nonliear Error Compensation and Alignment Error Insensitive Method for
Resolution Enhancement of Precise Displacement Measuring Interferometer ",
Doctoral thesis, 2010), in reference arm, the wave plate of λ/8 is substituted using quarter-wave plate, because pyramid reference mirror is anti-
Penetrate forward and backward reference light and lateral displacement be present, therefore reference light can be made only to pass through a quarter-wave plate, the scheme after improvement can
Comparatively ideal circular polarization state reference light is obtained, but because the lateral displacement of reference light is smaller, quarter-wave plate is as used wave plate
Frame, which is fixed, can block adjacent beams, therefore the actual surface that quarter-wave plate is typically affixed on to non-polarization Beamsplitter NBS, meeting
Cause adjustment difficult.Second, Hungarian D á niel I etc. instead of probe portion in G Peter schemes using Wo Lasite prisms
Polarization spectroscope PBS (D á niel I. " the Advanced successive phase unwrapping algorithm divided
For quadrature output Michelson interferometers " .Measurement, 2005,37 (2)：95-
102.) polarisation leakage problem of probe portion, is only improved to a certain extent.
Above-mentioned several homodyne orthogonal laser vibration measuring technical schemes use binary channels Detection Techniques, preferable feelings in probe portion
What is exported under condition is the orthogonal photosignal that two-way phase differs 90 °, and because output signal is direct current signal, the power of laser floats
Move and other common mode disturbances factors can cause the direct current biasing of two-way orthogonal signalling to change.According to the phase solution of signal transacting
Calculate formula " φ=tan-1[(Iy-I0)/(Ix-I0)], wherein IxAnd IyFor orthogonal photosignal, I0For direct current biasing " understand, directly
Stream offset change can directly affect phase calculation result, so as to introduce nonlinearity erron.In binary channels Detection Techniques scheme, swash
Luminous power drift is an important errors source of nonlinearity erron.There is scholar to propose new Four-channel detection technology scheme, thinking
It is by polarizing phase shift, obtaining the photosignal that four tunnel phases are respectively 0 °, 90 °, 180 ° and 270 °, phase is differed 180 °
Two signal subtractions, can error that effectively DC-offset correction and other common mode disturbances factors introduce, improve the anti-interference of system
Ability.
One of the two big parts of probe portion as homodyne orthogonal laser vialog light path, its performance and precision are to zero
The nonlinearity erron size and measurement accuracy of poor orthogonal laser vialog have the function that very important.For existing various available
In the Four-channel detection technology scheme of homodyne orthogonal laser vibration measuring, the reason for respective advantage and disadvantage and producing nonlinearity erron
It is described below：
(1) nineteen ninety-five, Italian scholar Greco propose that one kind is based on quarter-wave plate phase shift and polarization spectroscope first
Four-channel detection technology scheme (Greco V, Molesini G, the Quercioli F. " Accurate of PBS light splitting
Polarization interferometer " .Review of Scientific Instruments, 1995,66 (7)：
3729-3734.).The technical scheme can be used for the probe portion of homodyne orthogonal laser vialog, such as pre-optical path output signal shape
Formula is the orthogonal linearly polarized light in two polarization directions, is designated as P light and S light, makes the quick shaft direction and P light or S of half wave plate
The polarization direction of light becomes polarization direction as the two of 45 ° of directions into 22.5 ° of angles, then P light, S light after half wave plate
Individual orhtogonal linear polarizaiton light, then be divided through non-polarization Beamsplitter NBS equal proportions, wherein directly being obtained all the way through polarization spectroscope PBS
Two-way phase is 0 ° and 180 ° of interference signal, and it is inclined that another way first becomes circle through fast axle for the quarter-wave plate in 45 ° of directions
Shake light, then is divided to obtain other two-way phase through polarization spectroscope PBS as 90 ° and 270 ° of interference signal, finally gives four tunnels
Phase differs 90 ° of interference signal.It is disadvantageous in that existing for the technical scheme：1) optical element is more, nonlinearity erron
Source is more；2) it is divided using polarization spectroscope PBS, polarisation leakage phenomenon is present, causes nonlinearity erron notable.
(2) 2001 years, TaiWan, China scholar Lee etc. proposed the four-way detection based on Space Rotating polarization spectroscope PBS
Technical scheme (Lee, J.Y.Su, D.C. " Central fringe identification by phase quadrature
Interferometric technique and tunable laser-diode " .Optics Communications,
2001,198 (4-6)：333-337).The Four-channel detection technology scheme passes through on the basis of the technical scheme that Greco is proposed
By one of 45 ° of polarization spectroscope PBS Space Rotatings so that light path reduces a half wave plate.But due to PBS not
Evitable light splitting error, i.e., mutually orthogonal polarised light can not be kept completely separate, therefore there is also more significant polarisation leakage
Phenomenon, have a strong impact on the output quality of each road signal.
(3) 1997 years, American scholar Peter proposed a kind of Four-channel detection technology based on Wo Lasite prismatic decompositions
Scheme (Peter G. " Homodyne interferometric receiver and calibration method having
improved accuracy and functionality”.US Patent：US5663793).The technical scheme can be used for zero
The probe portion of poor orthogonal laser vialog, such as pre-optical path two crossed polarized lights of output, it is divided by a kind of partial polarization
Mirror (PPBS) is divided into two beams, a branch of to be directly divided into two beams through Wo Lasite prisms and then received by two photodetectors, another
Shu Xianjing quarter-wave plates, then be divided into two beams through Wo Lasite prisms and then received by two photodetectors, finally give
Four tunnel phases differ 90 ° of interference signal.It is disadvantageous in that existing for the technical scheme：1) probe portion needs extra four
/ mono- wave plate could produce the photosignal that four tunnel phases differ 90 °；2) probe portion light path is asymmetric, and it is inclined to be easily introduced direct current
Put, not constant amplitude and non-orthogonal errors, so as to introduce nonlinearity erron.
(4) 2006 years, Wang Li of Shanghai University of Science and Technology etc. was proposed on the basis of Peter Four-channel detection technology scheme
On, before quarter-wave plate is placed on into spectroscope, then by around the one of Wo Lasite prisms of beam direction Space Rotating
45 ° realize four-way detection (Wang Li, Hou Wen rose " single frequency laser interferometer four-way receiving system " measure journal,
2006,27 (4)：313-316).The advantages of technical scheme is that light path symmetry is preferable, solves the scheme of Peter propositions
Non-orthogonal errors problem, it is disadvantageous in that existing for it：1) probe portion needs extra quarter-wave plate to produce
Four tunnel phases differ 90 ° of photosignal；2) spectroscope used is common spectroscope BS, and spectrophotometric result is with inciding four-way
The polarization state of probe portion is relevant, and has larger additional phase shift.
(5) 2015 years, Hu Pengcheng of Harbin Institute of Technology etc. it is also proposed one kind and be based on Space Rotating Wo Lasite ribs
Four-channel detection technology scheme (Pengcheng Hu, et.al. " the DC-offset homodyne interferometer of mirror
And its nonlinearity compensation " .Optics Express, 2015,23 (7)：8399-8408).The skill
In art scheme, such as the linearly polarized light that two polarization directions of interference portion output are orthogonal, P light and S light are designated as, through non-polarization Beamsplitter
NBS is divided into two beams, a branch of to be directly divided into two beams through the Wo Lasite prisms around 45 ° of beam direction Space Rotating, then by two
Photodetector receives, another Shu Xianjing optical axises quarter-wave plate consistent with the polarization direction of a linearly polarized light, then passes through
Another Wo Lasite prisms around 45 ° of beam direction Space Rotating are divided into two beams, are then received by another two photodetector.Most
The interference signal that four tunnel phases differ 90 ° is obtained eventually.It is disadvantageous in that existing for the technical scheme：1) probe portion needs volume
Outer quarter-wave plate could produce the photosignal that four tunnel phases differ 90 °；2) probe portion light path is asymmetric, is easily introduced
Direct current biasing, non-constant amplitude and non-orthogonal errors, so as to introduce nonlinearity erron.
To sum up, due to laser power drift, optical component is undesirable and the factor such as optical element alignment error, especially
It is the polarisation leakage of the optics such as polarization spectroscope PBS and polarizer and the phase delay error of wave plate device, causes existing
There is homodyne orthogonal laser vialog technical scheme in interference portion and/or probe portion, by light channel structure, principle and optics
, there is the nonlinearity erron for being difficult to overcome in the undesirable limitation of self character, nonlinearity erron is difficult up to several nm even tens nm
To meet real-time, high-acruracy survey, the sub- nanometer especially of future generation even vibration such as micromicron class precision and nanoscale amplitude is surveyed
Amount demand.Therefore, how the innovation on light channel structure and principle is passed through, there is provided one kind can suppress non-from light channel structure and principle
The homodyne orthogonal laser vibration measuring technical scheme of linearity error, meaning are very great.
The content of the invention
The purpose of the present invention is to exist for existing homodyne orthogonal laser vibration measuring technical scheme on light channel structure and principle
Nonlinearity erron problem, there is provided a kind of single channel linear polarization interference of no quadrature error and double Wo Lasite prismatic decomposition formula homodynes
Laser vibration measurer, by the innovation of light channel structure and principle, four-way homodyne orthogonal laser is realized using less optical element
Interferometry, the source of various nonlinearity errons is eliminated from principle, suppress non-linear from light channel structure with being obtained in principle
The significant properties of error, can effectively solve that light path in prior art has polarization leakage and polarization aliasing, output signal are deposited
In direct current biasing and non-orthogonal errors, the problem of measurement result nonlinearity erron is notable
The present invention technical solution be：
A kind of single channel linear polarization interference of no quadrature error and double Wo Lasite prismatic decomposition formula homodyne laser vibration measurers, by
Interference portion and probe portion composition, the probe portion is by the second non-polarization Beamsplitter, the first quarter-wave plate, first wet
Lars spy's prism, bis- Wo Lasite prisms, the first photodetector, the second photodetector, the 3rd photodetector and
Four photodetectors form, and the interference portion is by laser, the first non-polarization Beamsplitter, measurement mirror, the second quarter-wave
Piece, reference mirror composition；Laser sends linearly polarized light, is divided through the first non-polarization Beamsplitter, and reflected light forms the first light
Shu Zuowei measures light, and transmitted light forms the second light beam as reference light；First light beam is then depolarized through first after measurement mirror reflection
The spectroscope that shakes transmits to form the 3rd light beam；Second light beam becomes circularly polarized light after the second quarter-wave plate, through reference mirror
The second quarter-wave plate is again passed by after reflection and becomes linearly polarized light, then reflects to form the 4th through the first non-polarization Beamsplitter
Light beam；3rd light beam, the 4th light beam are the linearly polarized light that light path overlaps and polarization direction is orthogonal.
The laser is frequency stabilized carbon dioxide laser.
The measurement mirror, reference mirror are level crossing or prism of corner cube.
The technological innovation and caused good result of the present invention is：
(1) present invention proposes a kind of four-way homodyne orthogonal laser vialog technology for suppressing nonlinearity erron from principle
Scheme.The technical scheme light path is simple, and component is few, reduces link caused by nonlinearity erron；Utilize Wo Lasite prisms
The physical characteristic light splitting of birefringece crystal itself, high extinction ratio (100000: 1 can be higher than) can be obtained, using depolarization point
Light microscopic NBS carries out equal proportion light splitting, and dichroism is unrelated with the polarization state of incident light, so as to suppress polarization leakage from principle
With aliasing；By above-mentioned technological innovation, efficiently solve prior art light path and serious polarization leakage and polarization aliasing be present,
The problem of direct current biasing and non-orthogonal errors, measurement result nonlinearity erron is notable be present in output signal.
(2) present invention can compensate for by two Wo Lasite prisms of rotation and the setting angle of two quarter-wave plates
Light source undesirable (elliptic polarization etc.), optical element are undesirable (wave plate delay error, the additional phase shift etc. of non-polarization Beamsplitter)
Cause to export direct current biasing, non-orthogonal errors problem existing for orthogonal signalling；Non-polarization Beamsplitter NBS dichroism tool simultaneously
There is extraordinary stability；The orthogonal signalling of acquisition can obtain circular ideal formula of the center in origin after amplitude correc-tion is carried out
Lie groupoid, nonlinearity erron can as little as micromicron magnitude.It is big to solve prior art nonlinearity erron, corrects complicated tired
The problem of difficulty, amendment computing take, and amendment precision is low, it disclosure satisfy that real-time, sub- nanometer of future generation even micromicron class precision, nanometer
The vibration measurement demands such as level amplitude.
Brief description of the drawings
Fig. 1 is the interference of the single channel linear polarization without quadrature error of the present invention and double Wo Lasite prismatic decomposition formula homodyne laser
The light path principle figure of vialog；
Fig. 2 is one embodiment of probe portion of the present invention；
Fig. 3 is another embodiment of probe portion of the present invention；
In figure, 1 laser, 2 first quarter-wave plates, 3 first non-polarization Beamsplitters, 4 measurement mirrors, 5 the 2nd 4/
One wave plate, 6 reference mirrors, 7 mono- Wo Lasite prisms, 8 bis- Wo Lasite prisms, 9 first photodetectors, 10 second photoelectricity
Detector, 11 the 3rd photodetectors, 12 the 4th photodetectors, 13 interference portions, 14 probe portions, 15 first light beams, 16
Second light beam, 17 the 3rd light beams, 18 the 4th light beams, 19 the 5th light beams, 20 the 6th light beams, 21 the oneth o light, 22 the oneth e light, 23
Two o light, 24 the 2nd e light, 25 second non-polarization Beamsplitters.
Embodiment
The embodiment of the present invention is described in detail below in conjunction with the accompanying drawings, and provides embodiment.
A kind of single channel linear polarization interference of no quadrature error and double Wo Lasite prismatic decomposition formula homodyne laser vibration measurers, by
Interference portion 13 and probe portion 14 form, and the probe portion is by the second non-polarization Beamsplitter 25, the first quarter-wave plate
2nd, mono- Wo Lasite prisms 7, bis- Wo Lasite prisms 8, the first photodetector 9, the second photodetector 10, the 3rd light
The photodetector 12 of electric explorer 11 and the 4th forms, and the interference portion 13 is by laser 1, the first non-polarization Beamsplitter 3, survey
Amount mirror 4, the second quarter-wave plate 5, reference mirror 6 form；Laser 1 sends linearly polarized light, enters through the first non-polarization Beamsplitter 3
Row light splitting, reflected light form the first light beam 15 and form the second light beam 16 as measurement light, transmitted light and be used as reference light；First light beam
15 after measurement mirror 4 reflects, then is transmitted through the first non-polarization Beamsplitter 3 and form the 3rd light beam 17；Second light beam 16 passes through second
Become circularly polarized light after quarter-wave plate 5, again passing by the second quarter-wave plate 5 after the reflection of reference mirror 6, to become line inclined
Shake light, then reflects to form the 4th light beam 18 through the first non-polarization Beamsplitter 3；3rd light beam 17, the 4th light beam 18 are light path weight
Close and the orthogonal linearly polarized light in polarization direction.
The laser 1 is frequency stabilized carbon dioxide laser.
The measurement mirror 4, reference mirror 6 are level crossing or prism of corner cube.
Fig. 1 is one embodiment of the light path principle of homodyne laser vibration measurer interference portion of the present invention.In the present embodiment, swash
He-Ne laser of the use of light device 1 Jing Guo frequency stabilization, wavelength 632.8nm, noise ＜ 0.05%rms, power output 1mW, partially
Shake and turn to 1000: 1, in space coordinates xyz, laser 1 sends linearly polarized light, and polarization direction is x-axis, as P light, therefore
Its Jones vector expression formula isBut there is certain polarizing angle.Linearly polarized light is through the equal proportion point of the first non-polarization Beamsplitter 3
Light, reflected light form the first light beam 15 of the P components as measurement light, and transmitted light forms second of the P components as reference light
Light beam 16.According to the Jones matrix expression formula of speculumIt can obtain, reflected light has with respect to incident light along y-axis direction of vibration
There is 180 ° of phase shift.In measuring arm, the first light beam 15 of P components is after measurement mirror 4 reflects or P components, then through first
The transmission of non-polarization Beamsplitter 3 forms the 3rd light beam 17.On reference arm, the second quarter-wave plate 5 is placed in x/y plane, its
Existing phase delay error is pi/2 50, and the second light beam 16 first passes through the second quarter-wave plate and becomes circularly polarized light, through reference
After mirror 6 reflects, then become through the second quarter-wave plate the linearly polarized light of S components, then reflected through the first non-polarization Beamsplitter 3
Form the 4th light beam 18.Third and fourth light beam 17,18 is the linearly polarized light that light path overlaps and polarization direction is orthogonal.
Fig. 2 is one embodiment of laser vibration measurer probe portion of the present invention.The reference light of P light and S light and measurement light are first
After fast axle and z-axis the first quarter-wave plate 2 at 45 ° are changed into dextrorotation and left-hand polarization light, through the second non-polarization Beamsplitter
25 light splitting, the light beam 19 of reflected light the 5th are divided into the first o light 21 and the first e light 22 by mono- Wo Lasite prisms 7 again, respectively by the
First, two photodetectors 9,10 receive, and the light beam 20 of transmitted light the 6th is divided into the He of the 2nd o light 23 by bis- Wo Lasite prisms 8 again
2nd e light 24, received respectively by first and second photodetector 11,12.Non-polarization Beamsplitter does not ensure that proper
By 50: 50 light splitting, its transmissivity is typically slightly larger than reflectivity.Mono- Wo Lasite prisms 7 are lain in a horizontal plane in xz planes, around x
Axle rotates 45 ° of the space angle of bis- Wo Lasite prisms.
Another embodiment of Fig. 3 laser vibration measurer probe portions of the present invention.The reference light of P light and S light and measurement light warp
Second non-polarization Beamsplitter 25 is divided, and the light beam 19 of reflected light the 5th is divided into the first o light 21 and the by mono- Wo Lasite prisms 7 again
One e light 22, received respectively by first and second photodetector 9,10, the light beam 20 of transmitted light the 6th first through fast axle and z-axis into 0 ° the
One quarter-wave plate 2, then it is divided into the 2nd o light 23, the 2nd e light 24 through bis- Wo Lasite prisms 8, it is respectively third and fourth light
Electric explorer 11,12 receives, and first and second Wo Lasite prisms 7,8 rotate 45 ° around direction of beam propagation
In the present embodiment, photodetector uses the two quadrant photodetector of Si PIN types, and photosensitive area size is
10mm × 10mm, sensitivity are 0.45A/W (λ=632.8nm), and two quadrants of two quadrant photodetector are respectively as
First, two photodetector 9,10；Similarly, using two quadrants of another two quadrant photodetector as third and fourth photoelectricity
Detector 11,12.
In the present embodiment, by adjusting the fast axle of the first quarter-wave plate 2 and the angle and the second quarter-wave of z-axis
The fast axle of piece 5 and the angle of x-axis, the interference signal that first and third, two, four photodetectors 9,11,10,12 receive can be made
Phase relativeness is respectively 0 °, 90 °, 180 ° and 270 °, while the interference letter for receiving first and second photodetector 9,10
Number the interference signal that direct current biasing is equal, third and fourth photodetector 11,12 receives direct current biasing it is equal.Due to disappearing
The transmissivity of polarization spectroscope 25 is slightly larger than its reflectivity, therefore the interference letter that first and second photodetector 9,10 receives
Number AC amplitude be slightly less than the AC amplitude of third and fourth photodetector 11,12.Therefore, when first and second photodetector 9,
After the interference signal that 10 interference signals received subtract each other, third and fourth photodetector 11,12 receives subtracts each other, two can be obtained
Orthogonal signalling of the road without direct current biasing, without quadrature error, after amplitude correc-tion, finally give the Lie groupoid of two-way orthogonal signalling
For a preferable center origin standard round.
Claims (3)
1. the interference of single channel linear polarization and the double Wo Lasite prismatic decomposition formula homodyne laser vibration measurers of a kind of no quadrature error, by doing
Part (13) and probe portion (14) composition are related to, the probe portion is by the second non-polarization Beamsplitter (25), the first a quarter
Wave plate (2), mono- Wo Lasite prisms (7), bis- Wo Lasite prisms (8), the first photodetector (9), the second photoelectricity are visited
Survey device (10), the 3rd photodetector (11) and the 4th photodetector (12) composition, it is characterised in that：The interference portion
(13) by laser (1), the first non-polarization Beamsplitter (3), measurement mirror (4), the second quarter-wave plate (5), reference mirror (6) group
Into；Laser (1) sends linearly polarized light, is divided through the first non-polarization Beamsplitter (3), and reflected light forms the first light beam (15)
As measurement light, transmitted light forms the second light beam (16) and is used as reference light；First light beam (15) through measurement mirror (4) reflection after, then
Transmitted through the first non-polarization Beamsplitter (3) and form the 3rd light beam (17)；Second light beam (16) passes through the second quarter-wave plate (5)
After become circularly polarized light, again pass by the second quarter-wave plate (5) after reference mirror (6) reflection and become linearly polarized light, then
The 4th light beam (18) is reflected to form through the first non-polarization Beamsplitter (3)；3rd light beam (17), the 4th light beam (18) are light path weight
Close and the orthogonal linearly polarized light in polarization direction.
2. the interference of single channel linear polarization and the double Wo Lasite prismatic decomposition formula homodynes of no quadrature error according to claim 1
Laser vibration measurer, it is characterised in that：The laser (1) is frequency stabilized carbon dioxide laser.
3. the interference of single channel linear polarization and the double Wo Lasite prismatic decomposition formula homodynes of no quadrature error according to claim 1
Laser vibration measurer, it is characterised in that：The measurement mirror (4), reference mirror (6) are level crossing or prism of corner cube.
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| CN111025668B (en) * | 2019-12-30 | 2023-04-25 | 珠海光库科技股份有限公司 | Optical device integrating polarization coherent beam splitting |
| CN112284246A (en) * | 2020-09-21 | 2021-01-29 | 哈尔滨工业大学 | Method and device for correcting direct current bias error of homodyne laser interferometer |
| CN113390467B (en) * | 2021-07-14 | 2022-05-03 | 安徽至博光电科技股份有限公司 | Vibration and temperature measuring device and signal processing method thereof |
| CN113959358A (en) * | 2021-10-27 | 2022-01-21 | 中国计量科学研究院 | Four-quadrant interferometric measurement system based on integrated array wave plate |
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