CN104897047A - Quadrature error-free double-path polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter - Google Patents
Quadrature error-free double-path polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter Download PDFInfo
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Abstract
The invention belongs to the field of laser interference measurement, and relates to a quadrature error-free double-path polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter. An interference part generates double paths of linear polarization reference light and linear polarization measurement light whose polarization directions are orthogonal and light paths are overlapped through a quarter-wave plate and a polarization-eliminating beam splitter NBS, and in a detection part, reference light and measurement light generate four paths of photoelectric signals with a phase difference of 90 degrees through two Wollaston prisms whose spatial rotation angles around light beams form a specific relation, thereby obtaining an outstanding characteristic of inhibiting a nonlinear error from a light path structure and in principle. The quadrature error-free double-path polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter provided by the invention adopts less optical elements to realize four-channel homodyne quadrature laser interference measurement, can effectively solve the problems in an existing technical scheme that polarization leakage and polarization aliasing exist in the light paths, a direct current biased error and a non-quadrature error exist in an output signal, and a nonlinear error of a measurement result is obvious, and thus has remarkable technical advantages in the field of ultra-precise vibration measurement.
Description
Technical field
The invention belongs to laser interferometry field, relate generally to a kind of two-way linear polarization without quadrature error and interfere and two Wo Lasite prismatic decomposition formula homodyne laser vibration measurer.
Background technology
Laser vibration measurer, as vibration value being traceable to the ultra precise measurement instrument of optical maser wavelength, being widely used in displacement kinetic measurement, vibration survey and monitoring, ultraprecise and equipping and the field such as the system integration, scientific research and experiment.Laser vibration measurer based on laser interferance method can be divided into homodyne and the large class of heterodyne two according to principle, and the two has remarkable difference on principle of work, light channel structure and technical characterstic.The null method of measurement adopts single-frequency laser as light source, based on Michelson laser interference principle that is classical or that improve, changes direct displacement by the phase place measuring interference fringe; And heterodyne measurement method adopts double-frequency laser as light source, based on Doppler effect, the indirect displacement by the movement velocity of measurement Doppler frequency difference measurement measured piece.Heterodyne laser vialog (normal title laser doppler vialog) its signal transacting is carry out frequency measurement in essence, system itself is dynamic communication system, have that antijamming capability is strong, measurement result is by features such as light intensity variable effect are little, shortcoming is that nonlinearity erron source is more, revise more complicated, there is higher technical sophistication degree and technical difficulty.Homodyne laser vibration measurer technology is then comparatively ripe, has that structure is simple, measuring accuracy is high, wide dynamic range, is non-linearly easy to the advantages such as compensation.Especially in recent years, scientific research proposes Ya Na meter even the vibration survey demand of micromicron precision with experiment, and the null method of measurement receives the concern of researchist again and becomes the study hotspot of this area.
Along with the development of interfere measurement technique, current homodyne laser vibration measurer adopts advanced homodyne orthogonal laser vibration measuring scheme, utilizes Polarized light phase-shift interference technique, obtains two-way orthogonal optical electric signal, by arctangent computation and continuous phase demodulation, realize the high-resolution survey of vibration.The two paths of signals that homodyne orthogonal laser vialog exports is the amplitude such as Ying Shi, harmonic signal without direct current biasing, quadrature in phase in the ideal case, and the Lie groupoid of two paths of signals should be a standard round; But reality is due to factors such as laser power drift, the undesirable and optical element error in mounting position of optical component, especially there is polarisation leakage in the optical device such as polarization spectroscope PBS and polaroid, there is the factors such as phase delay error in wave plate device, cause the two-way orthogonal signal of actual output to there is direct current biasing, non-constant amplitude and non-orthogonal errors, thus bring nonlinearity erron to measurement result.Existing homodyne orthogonal laser vialog nonlinearity erron can reach a few nanometer, even tens nanometers, although can be revised by mathematical method to a certain extent, but very high requirement is proposed to the processing speed of sampling rate and digital signal, and requires that the Lie groupoid of two paths of signals is necessary for complete ellipse and just can revises.Revise the real-time that computing has a strong impact on measurement on the one hand, precision and effect are also restricted on the other hand.Therefore, how by the innovation on light channel structure and principle, from the factor that principle avoids nonlinearity erron to produce, being solve the most effective method of homodyne orthogonal laser vialog nonlinearity erron problem, is also the hot issue of this area research.
The light channel structure of homodyne orthogonal laser vialog is made up of interference portion and probe portion two large divisions.Prior art is to relate to part and/or probe portion, by the restriction that light channel structure, principle and optical device self character are undesirable, there is the nonlinearity erron being difficult to overcome.The relative merits of prior art and the reason of generation nonlinearity erron are described below:
(1) in the homodyne orthogonal laser vialog technical scheme of traditional classical, interference portion adopts polarization spectroscope PBS light splitting, produces the reference light of P component and the measurement light of S component; First after non-polarization Beamsplitter NBS light splitting, a road is after polaroid for probe portion, and by photoelectric detector, another Lu Xianjing quarter-wave plate becomes circularly polarized light, and then through polaroid by photoelectric detector.In this technical scheme, there is polarisation leakage phenomenon, cause this light path nonlinearity erron remarkable in the polarization spectroscope PBS that interference portion adopts and the polaroid extinction ratio low (generally in 1000: 1 magnitudes) that probe portion adopts.
(2) 1999 years, based on the homodyne orthogonal laser vibration measuring technical scheme of non-polarization Beamsplitter NBS and Wo Lasite prismatic decomposition, be written in " ISO16063-11 laser interferance method vibration absolute calibration " standard (ISO16063-41 " Methods for the calibration of vibration and shock transducers--Part 41:Calibration of laser vibrometers " .).In this technical scheme, interference portion LASER Light Source polarization light output, make the quick shaft direction of the polarization direction of linearly polarized light and quarter-wave plate angle at 45 °, linearly polarized light becomes circularly polarized light after quarter-wave plate, non-polarization Beamsplitter NBS is adopted to carry out light splitting to circularly polarized light, reference arm adopts polaroid become linear polarization with reference to polarisation of light state by circular polarization, and measure light and be always circularly polarized light; Probe portion reference light and measurement light produce the orthogonal interference signal of two-way through Wo Lasite prismatic decomposition.Because probe portion adopts Wo Lasite prismatic decomposition, Wo Lasite prism utilizes the physical characteristics of birefringece crystal self to be separated different polarized lights, have larger extinction ratio (can higher than 100000: 1), therefore probe portion can be considered to there is not polarization aliasing.The weak point that this technical scheme exists is: 1) reference arm is placed polaroid and cause reference light greatly to reduce relative to the light intensity measuring light, introduce the not constant amplitude error of two-way output signal; 2) interference portion adopts polaroid to produce linearly polarized light, and polaroid extinction ratio is low, and interference portion exists polarization aliasing and introduces nonlinearity erron.
(3) 2009 years, the G Peter etc. of Slovenia proposes a kind of homodyne orthogonal laser vialog (1.G Peter based on non-polarization Beamsplitter NBS and 1/8th wave plates, T Pozar, M Janez. " Quadrature phase-shift error analysis using a homodyne laser interferometer " .Optics Express, 2009, 17 (18): 16322-16331.2.G Peter, T Pozar, M Janez. " Phase-shift error in quadrature-detection-based interferometers " .Proc.of SPIE, 2010, Vol.7726:77260X-1-77260X-10.).In this technical scheme, interference portion lasing light emitter exports the linearly polarized light that polarization direction is 45 ° of directions, and adopt non-polarization Beamsplitter NBS to carry out light splitting, reference light turns back twice through 1/8th wave plates, polarization state becomes circular polarization from linear polarization, and measures light polarization direction and remain unchanged; Reference light and measurement light adopt polarization spectroscope PBS light splitting to produce the orthogonal interference signal of two-way at probe portion.The light path of this technical scheme is comparatively simple, and optical element is less.Its weak point existed is: 1) 1/8th wave plate device precision are poor, actual phase shift is less than 45 °, actual what obtain is elliptically polarized light through 1/8th wave plates for linear polarization reference light twice, causes the nonopiate phase displacement error of the two paths of signals of actual output larger; 2) probe portion adopts PBS light splitting, there is polarisation leakage phenomenon, introduces larger nonlinearity erron.
There are other two kinds of improved forms in this technical scheme: one is that Jeongho Ahn of Korea S etc. is on the basis of G Peter scheme light path, prism of corner cube is adopted to replace the Plane reference mirror in G Peter scheme and measure mirror (Jeongho Ahn, " Nonliear Error Compensation and Alignment Error Insensitive Method for Resolution Enhancement of Precise Displacement Measuring Interferometer ", Doctoral thesis, 2010), in reference arm, quarter-wave plate is adopted to replace λ/8 wave plate, before the reflection of pyramid reference mirror, there is transversal displacement in rear reference light, therefore reference light can be made only through a quarter-wave plate, scheme after improvement can obtain comparatively ideal circular polarization state reference light, but because the transversal displacement of reference light is less, quarter-wave plate can block adjacent beams as adopted wave plate frame to fix, therefore the actual surface normally quarter-wave plate being affixed on non-polarization Beamsplitter NBS, adjustment difficulty can be caused.Two is that Hungarian D á niel I etc. adopts Wo Lasite prism to instead of polarization spectroscope PBS (D á niel I. " the Advanced successive phase unwrapping algorithm for quadrature output Michelson interferometers " .Measurement of probe portion in G Peter scheme, 2005,37 (2): 95-102.) polarisation leakage problem of probe portion, is only improved to a certain extent.
Above-mentioned several homodyne orthogonal laser vibration measuring technical scheme all adopts binary channels Detection Techniques at probe portion, what ideally export is the orthogonal optical electric signal of two-way phase 90 °, because output signal is direct current signal, the power excursion of laser and other common mode interference factor can cause the direct current biasing of two-way orthogonal signal to change.According to the phase place solution formula " φ=tan of signal transacting
-1[(I
y-I
0)/(I
x-I
0)], wherein I
xand I
yfor orthogonal optical electric signal, I
0for direct current biasing " known, direct current biasing change can directly affect phase place calculation result, thus introduces nonlinearity erron.In binary channels Detection Techniques scheme, laser power drift is an important errors source of nonlinearity erron.Scholar is had to propose new Four-channel detection technology scheme, thinking is by polarization phase shift, obtain the photosignal that four tunnel phase places are respectively 0 °, 90 °, 180 ° and 270 °, make two signal subtractions of phase 180 °, can the effective error introduced of DC-offset correction and other common mode interference factors, improve the antijamming capability of system.
Probe portion is as one of the two large ingredients of homodyne orthogonal laser vialog light path, and its performance and precision have very important effect to the nonlinearity erron size of homodyne orthogonal laser vialog and measuring accuracy.For the existing various Four-channel detection technology scheme that can be used for the vibration measuring of homodyne orthogonal laser, the reason of respective relative merits and generation nonlinearity erron is described below:
(1) nineteen ninety-five, Italy scholar Greco proposes a kind of Four-channel detection technology scheme (Greco V based on quarter-wave plate phase shift and polarization spectroscope PBS light splitting first, Molesini G, Quercioli F. " Accurate polarization interferometer " .Review of Scientific Instruments, 1995,66 (7): 3729-3734.).This technical scheme can be used for the probe portion of homodyne orthogonal laser vialog, if prime light path output signal type is the orthogonal linearly polarized light in two polarization directions, be designated as P light and S light, the quick shaft direction of 1/2nd wave plates is made to become 22.5 ° of angles with P light or S polarisation of light direction, then P light, S light becomes two orhtogonal linear polarizaiton light that polarization direction is 45 ° of directions after 1/2nd wave plates, again through the light splitting of non-polarization Beamsplitter NBS equal proportion, wherein a road directly obtains through polarization spectroscope PBS the interference signal that two-way phase place is 0 ° and 180 °, the fast axle of another Lu Xianjing be 45 ° of directions quarter-wave plate become circularly polarized light, the interference signal that other two-way phase place is 90 ° and 270 ° is obtained again through polarization spectroscope PBS light splitting, finally obtain the interference signal of four road phase 90 °.The weak point that this technical scheme exists is: 1) optical element is more, and nonlinearity erron source is more; 2) adopt polarization spectroscope PBS light splitting, there is polarisation leakage phenomenon, cause nonlinearity erron remarkable.
(2) calendar year 2001, TaiWan, China scholar Lee etc. propose the Four-channel detection technology scheme (Lee based on Space Rotating polarization spectroscope PBS, J.Y.Su, D.C. " Central fringe identification by phase quadrature interferometric technique and tunable laser-diode " .Optics Communications, 2001,198 (4-6): 333-337).On the basis of the technical scheme that this Four-channel detection technology scheme proposes at Greco, by by one of them polarization spectroscope PBS Space Rotating 45 °, light path is made to decrease 1/2nd wave plates.But because PBS inevitably divides optical path difference, namely mutually orthogonal polarized light cannot be separated completely, therefore also there is more significant polarisation leakage phenomenon, have a strong impact on the output quality of each road signal.
(3) 1997 years, American scholar Peter proposed a kind of Four-channel detection technology scheme based on Wo Lasite prismatic decomposition (Peter G. " Homodyne interferometric receiver and calibration method having improved accuracy and functionality " .US Patent:US5663793).This technical scheme can be used for the probe portion of homodyne orthogonal laser vialog, as prime light path exports two crossed polarized lights, two bundles are divided into by a kind of partial polarization spectroscope (PPBS), a branch ofly directly be divided into two bundles then by two photoelectric detector through Wo Lasite prism, another Shu Xianjing quarter-wave plate, be divided into two bundles then by two photoelectric detector through Wo Lasite prism again, finally obtain the interference signal of four road phase 90 °.The weak point that this technical scheme exists is: 1) probe portion needs extra quarter-wave plate could produce the photosignal of four road phase 90 °; 2) probe portion light path is asymmetric, easily introduces direct current biasing, non-constant amplitude and non-orthogonal errors, thus introduces nonlinearity erron.
(4) 2006 years, the Wang Li of Shanghai University of Science and Technology etc. propose on the basis of the Four-channel detection technology scheme of Peter, before quarter-wave plate is placed on spectroscope, again by realizing four-way detection (Wang Li around 45 °, one of them Wo Lasite prism of beam direction Space Rotating, Hou Wenmei. " single frequency laser interferometer four-way receiving system ". metering journal, 2006,27 (4): 313-316).The advantage of this technical scheme is that light path symmetry is better, solve the non-orthogonal errors problem of the scheme that Peter proposes, its weak point existed is: 1) probe portion needs extra quarter-wave plate could produce the photosignal of four road phase 90 °; 2) spectroscope adopted is common spectroscope BS, and spectrophotometric result is relevant with the polarization state inciding four-way probe portion, and has larger additional phase shift.
(5) 2015 years, the Hu Pengchengs of Harbin Institute of Technology etc. it is also proposed a kind of Four-channel detection technology scheme (Pengcheng Hu based on Space Rotating Wo Lasite prism, et.al. " DC-offset homodyne interferometer and its nonlinearity compensation " .Optics Express, 2015,23 (7): 8399-8408).In this technical scheme, as interference portion exports the orthogonal linearly polarized light in two polarization directions, be designated as P light and S light, two bundles are divided into through non-polarization Beamsplitter NBS, a branch of direct warp is divided into two bundles around the Wo Lasite prism of beam direction Space Rotating 45 °, then by two photoelectric detector, the quarter-wave plate that another Shu Xianjing optical axis is consistent with the polarization direction of a linearly polarized light, two bundles are divided into again, then by another two photoelectric detector through another Wo Lasite prism around beam direction Space Rotating 45 °.Finally obtain the interference signal of four road phase 90 °.The weak point that this technical scheme exists is: 1) probe portion needs extra quarter-wave plate could produce the photosignal of four road phase 90 °; 2) probe portion light path is asymmetric, easily introduces direct current biasing, non-constant amplitude and non-orthogonal errors, thus introduces nonlinearity erron.
To sum up, due to laser power drift, the factors such as the undesirable and optical element alignment error of optical component, especially the polarisation leakage of optical device and the phase delay error of wave plate device such as polarization spectroscope PBS and polaroid, cause existing homodyne orthogonal laser vialog technical scheme at interference portion and/or probe portion, by light channel structure, principle and the undesirable restriction of optical device self character, there is the nonlinearity erron being difficult to overcome, nonlinearity erron can reach a few nm even tens nm, be difficult to meet in real time, high-acruracy survey, especially Ya Na meter of future generation even micromicron class precision, and the vibration survey demand such as nanoscale amplitude.Therefore, how by the innovation on light channel structure and principle, provide a kind of homodyne orthogonal laser vibration measuring technical scheme that can suppress nonlinearity erron from light channel structure and principle, meaning is very great.
Summary of the invention
The object of the invention is the nonlinearity erron problem existed on light channel structure and principle for existing homodyne orthogonal laser vibration measuring technical scheme, a kind of two-way linear polarization without quadrature error is provided to interfere and two Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, by the innovation of light channel structure and principle, less optical element is adopted to realize the interferometry of four-way homodyne orthogonal laser, the source of various nonlinearity erron is eliminated from principle, the remarkable characteristic suppressing nonlinearity erron is obtained from light channel structure and principle, effectively can solve light path in prior art and there is polarization leakage and polarization aliasing, there is direct current biasing and non-orthogonal errors in output signal, the significant problem of measurement result nonlinearity erron.
Technical solution of the present invention is:
A kind of two-way linear polarization without quadrature error is interfered and two Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, be made up of interference portion and probe portion, described interference portion is made up of laser instrument, the first non-polarization Beamsplitter, measurement mirror, the second quarter-wave plate, reference mirror; Laser instrument sends linearly polarized light, carries out light splitting through the first non-polarization Beamsplitter, and reflected light forms the first light beam as measurement light, and transmitted light forms the second light beam as reference light; First light beam after measuring mirror reflection, then reflects to form the 3rd light beam and transmission formation the 4th light beam through the first non-polarization Beamsplitter; Second light beam becomes circularly polarized light after the second quarter-wave plate, after reference mirror reflection, again become linearly polarized light through the second quarter-wave plate, then forms the 5th light beam through the first non-polarization Beamsplitter transmission and reflects to form the 6th light beam; 3rd light beam, the 5th light beam are that light path overlaps and the orthogonal linearly polarized light in polarization direction, and the 4th light beam, the 6th light beam are that light path overlaps and the orthogonal linearly polarized light in polarization direction; Described probe portion is made up of the first quarter-wave plate, mono-Wo Lasite prism, bis-Wo Lasite prism, the first photodetector, the second photodetector, the 3rd photodetector and the 4th photodetector, 3rd light beam, the 5th light beam are divided into an o light, an e light through mono-Wo Lasite prism, respectively by the first photodetector, the second photoelectric detector; 4th light beam, the 6th light beam first, after the first quarter-wave plate, are divided into the 2nd o light, the 2nd e light by bis-Wo Lasite prism, respectively by the 3rd photodetector, the 4th photoelectric detector.
Described laser instrument is frequency stabilized laser.
Described measurement mirror, reference mirror are corner cube reflector.
The good result of technological innovation of the present invention and generation is:
(1) the present invention proposes a kind of four-way homodyne orthogonal laser vialog technical scheme suppressing nonlinearity erron from principle.This technical scheme light path is simple, and components and parts are few, decreases the link that nonlinearity erron produces; Utilize the physical characteristics light splitting of Wo Lasite prism birefringece crystal self, high extinction ratio (can higher than 100000: 1) can be obtained, non-polarization Beamsplitter NBS is adopted to carry out equal proportion light splitting, the polarization state of dichroism and incident light has nothing to do, thus can suppress polarization leakage and aliasing from principle; By above-mentioned technological innovation, efficiently solving prior art light path and there is serious polarization leakage and polarization aliasing, there is direct current biasing and non-orthogonal errors, the significant problem of measurement result nonlinearity erron in output signal.
(2) the present invention is by the setting angle of rotation two Wo Lasite prisms and two quarter-wave plates, can compensatory light undesirable (elliptical polarization etc.), optical element undesirable (additional phase shift etc. of wave plate delay error, the non-polarization Beamsplitter) direct current biasing, the non-orthogonal errors problem that cause output orthogonal signal to exist; The dichroism of non-polarization Beamsplitter NBS has extraordinary stability simultaneously; The orthogonal signal obtained are after carrying out amplitude correc-tion, and can obtain the Lie groupoid of center in the circular ideal formula of initial point, nonlinearity erron can be low to moderate micromicron magnitude.Solve prior art nonlinearity erron large, revise complexity difficulty, revise computing consuming time, revise the problem that precision is low, real-time, the Ya Na meter even vibration survey demand such as micromicron class precision, nanoscale amplitude of future generation can be met.
(3) interference portion of the present invention produces two-way interference light, and therefore probe portion does not need to increase non-polarization Beamsplitter again and carries out light splitting, and LASER Light Source utilization factor is 100%, and optical element is few, and integrated level is higher.
Accompanying drawing explanation
Fig. 1 is that the two-way linear polarization without quadrature error of the present invention interferes an embodiment with the light path principle figure of two Wo Lasite prismatic decomposition formula homodyne laser vibration measurer;
Fig. 2 is an embodiment of first and second Wo Lasite prism setting angle;
In figure, 1 laser instrument, 2 first quarter-wave plates, 3 first non-polarization Beamsplitters, 4 measure mirror, 5 second quarter-wave plates, 6 reference mirrors, 7 mono-Wo Lasite prisms, 8 bis-Wo Lasite prisms, 9 first photodetectors, 10 second photodetectors, 11 the 3rd photodetectors, 12 the 4th photodetectors, 13 interference portions, 14 probe portions, 15 first light beams, 16 second light beams, 17 the 3rd light beams, 18 the 4th light beams, 19 the 5th light beams, 20 the 6th light beams, 21 the one o light, 22 the one e light, 23 the 2nd o light, 24 the 2nd e light.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail, and provides embodiment.
A kind of two-way linear polarization without quadrature error is interfered and two Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, be made up of interference portion 13 and probe portion 14, described interference portion 13 is made up of laser instrument 1, first non-polarization Beamsplitter 3, measurement mirror 4, second quarter-wave plate 5, reference mirror 6; Laser instrument 1 sends linearly polarized light, carries out light splitting through the first non-polarization Beamsplitter 3, and reflected light forms the first light beam 15 as measurement light, and transmitted light forms the second light beam 16 as reference light; First light beam 15 after measuring mirror 4 and reflecting, then reflects to form the 3rd light beam 17 and transmission formation the 4th light beam 18 through the first non-polarization Beamsplitter 3; Second light beam 16 becomes circularly polarized light after the second quarter-wave plate 5, after reference mirror 6 reflects, again become linearly polarized light through the second quarter-wave plate 5, then form the 5th light beam 19 through the first non-polarization Beamsplitter 3 transmission and reflect to form the 6th light beam 20; 3rd light beam 17, the 5th light beam 19 overlap and the orthogonal linearly polarized light in polarization direction for light path, and the 4th light beam 18, the 6th light beam 20 are for light path coincidence and the orthogonal linearly polarized light in polarization direction; Described probe portion is made up of the first quarter-wave plate 2, mono-Wo Lasite prism 7, bis-Wo Lasite prism 8, first photodetector 9, second photodetector 10, the 3rd photodetector 11 and the 4th photodetector 12,3rd light beam 17, the 5th light beam 19 are divided into an o light 21, an e light 22 through mono-Wo Lasite prism 7, are received respectively by the first photodetector 9, second photodetector 10; 4th light beam 18, the 6th light beam 20 first, after the first quarter-wave plate 2, are divided into the 2nd o light 23, the 2nd e light 24 by bis-Wo Lasite prism 8, are received respectively by the 3rd photodetector 11, the 4th photodetector 12.
Described laser instrument 1 is frequency stabilized laser.
Described measurement mirror 4, reference mirror 6 are corner cube reflector.
Fig. 1 gives as one embodiment of the present of invention.In the present embodiment, laser instrument 1 adopts the He-Ne laser instrument through frequency stabilization, wavelength is 632.8nm, noise < 0.05%rms, and output power is 1mW, polarization turns to 1000: 1, in space coordinates xyz, laser instrument 1 sends linearly polarized light, and polarization direction is x-axis, be P light, therefore its Jones vector expression formula is
But there is certain polarizing angle.P light is through the first non-polarization Beamsplitter 3 equal proportion light splitting, and reflected light forms the first light beam 15 as the P component measuring light, and transmitted light forms the second light beam 16 as the P component with reference to light.According to the Jones matrix expression formula of catoptron
Can obtain, the relative incident light of reflected light has the phase shift of 180 ° along y-axis direction of vibration.On gage beam, the first light beam 15 of P component after measuring mirror 4 and reflecting or P component, then reflects to form the 3rd light beam 17 through the first non-polarization Beamsplitter 3 and transmission forms the 4th light beam 18.On reference arm, second quarter-wave plate 5 is placed in xy plane, its phase delay error existed is pi/2 50, when the fast axle of the second quarter-wave plate 5 and x-axis at 45 ° time, second light beam 16 first becomes circularly polarized light through the second quarter-wave plate, after reference mirror 6 reflects, then become S component through the second quarter-wave plate, then form the 5th light beam 19 through the first non-polarization Beamsplitter 3 transmission and reflect to form the 6th light beam 20.Three, five light beams 17,19 overlap and the orthogonal linearly polarized light in polarization direction for light path, and the 4th, six light beams 18,20 are for light path coincidence and the orthogonal linearly polarized light in polarization direction.At probe portion 14,3rd light beam 17 and the 5th light beam 19 are divided into an o light 21 and an e light 22 by mono-Wo Lasite prism 7, received by first and second photodetector 9,10 respectively, 4th light beam 18 and the 6th light beam 20 are first after fast axle and z-axis the first quarter-wave plate 2 at 45 °, be divided into the 2nd o light 23 and the 2nd e light 24 by bis-Wo Lasite prism 8, received by first and second photodetector 11,12 respectively.Non-polarization Beamsplitter can not ensure proper by 50: 50 light splitting, and its transmissivity is generally slightly larger than reflectivity.
In the present embodiment, photodetector adopts the two quadrant photodetector of Si PIN type, photosensitive area size is 10mm × 10mm, and sensitivity is 0.45A/W (λ=632.8nm), and two quadrants of two quadrant photodetector are respectively as first and second photodetector 9,10; In like manner, adopt two quadrants of another two quadrant photodetector as third and fourth photodetector 11,12.
In the present embodiment, by the angle of the fast axle and z-axis that adjust the first quarter-wave plate 2 and the fast axle of the second quarter-wave plate 5 and the angle of x-axis, the space angle of mono-Wo Lasite prism 7 is rotated around z-axis, and the space angle of bis-Wo Lasite prism 8 is rotated around x-axis, can first be made, three, two, four photodetectors 9, 11, 10, the phase place relativeness of 12 interference signals received is respectively 0 °, 90 °, 180 ° and 270 °, make first simultaneously, two photodetectors 9, the direct current biasing of 10 interference signals received is equal, 3rd, four photodetectors 11, the direct current biasing of 12 interference signals received is equal.Because the transmissivity of non-polarization Beamsplitter 3 is greater than its reflectivity slightly, the AC amplitude of interference signal that therefore first and second photodetector 9,10 receives is slightly less than the AC amplitude of third and fourth photodetector 11,12.Therefore, after the interference signal that the interference signal received when first and second photodetector 9,10 subtracts each other, third and fourth photodetector 11,12 receives subtracts each other, two-way can be obtained without direct current biasing, orthogonal signal without quadrature error, after amplitude correc-tion, the Lie groupoid finally obtaining two-way orthogonal signal is the standard round of a desirable center at initial point.
Fig. 2 is the embodiment of first and second Wo Lasite prism setting angle.For bis-Wo Lasite prism 8, four, six light beams 18,20 impinge perpendicularly on first piece of prism of bis-Wo Lasite prism 8, because the optical axis of second piece of prism has turned over 90 ° relative to first piece of prism, therefore light beam is at the section of first piece of prism and second piece of prism, and the direction of propagation of o light and e light there occurs change.Ideally, bis-Wo Lasite prism 8 have rotated 45 ° around x-axis.
Claims (3)
1. the two-way linear polarization without quadrature error is interfered and two Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, be made up of interference portion (13) and probe portion (14), it is characterized in that: described interference portion (13) is made up of laser instrument (1), the first non-polarization Beamsplitter (3), measurement mirror (4), the second quarter-wave plate (5), reference mirror (6); Laser instrument (1) sends linearly polarized light, carries out light splitting through the first non-polarization Beamsplitter (3), and reflected light forms the first light beam (15) as measuring light, and transmitted light forms the second light beam (16) as reference light; First light beam (15) after measuring mirror (4) reflection, then reflects to form the 3rd light beam (17) and transmission formation the 4th light beam (18) through the first non-polarization Beamsplitter (3); Second light beam (16) becomes circularly polarized light after the second quarter-wave plate (5), after reference mirror (6) reflection, again become linearly polarized light through the second quarter-wave plate (5), then form the 5th light beam (19) through the first non-polarization Beamsplitter (3) transmission and reflect to form the 6th light beam (20); 3rd light beam (17), the 5th light beam (19) overlap and the orthogonal linearly polarized light in polarization direction for light path, and the 4th light beam (18), the 6th light beam (20) overlap and the orthogonal linearly polarized light in polarization direction for light path; Described probe portion is made up of the first quarter-wave plate (2), mono-Wo Lasite prism (7), bis-Wo Lasite prism (8), the first photodetector (9), the second photodetector (10), the 3rd photodetector (11) and the 4th photodetector (12), 3rd light beam (17), the 5th light beam (19) are divided into an o light (21), an e light (22) through mono-Wo Lasite prism (7), are received respectively by the first photodetector (9), the second photodetector (10); 4th light beam (18), the 6th light beam (20) are first after the first quarter-wave plate (2), be divided into the 2nd o light (23), the 2nd e light (24) by bis-Wo Lasite prism (8), received by the 3rd photodetector (11), the 4th photodetector (12) respectively.
2. the two-way linear polarization without quadrature error according to claim 1 is interfered and two Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, it is characterized in that: described laser instrument (1) is frequency stabilized laser.
3. the two-way linear polarization without quadrature error according to claim 1 is interfered and two Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, it is characterized in that: described measurement mirror (4), reference mirror (6) are corner cube reflector.
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