CN104990619A - Polarization- and aliasing-resistance Michelson heterodyne laser vibration measurer based on double acousto-optic modulation and non-polarizing light splitting - Google Patents
Polarization- and aliasing-resistance Michelson heterodyne laser vibration measurer based on double acousto-optic modulation and non-polarizing light splitting Download PDFInfo
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Abstract
A polarization- and aliasing-resistance Michelson heterodyne laser vibration measurer based on double acousto-optic modulation and non-polarizing light splitting belongs to the field of laser interference measurement. A non-polarizing beam splitter (NBS) is adopted to perform light splitting and then form a reference arm and a measuring arm, incident light beams on the reference arm and the measuring arm generate diffraction via acousto-optic modulators, and frequency-shifted first-stage diffraction light are adjusted through light beam folding elements, so light beam propagation directions are parallel to the incident light beams; reflected light is located over acousto-optic modulators through adjustments of cube-corner prisms, so measuring light and reference light respectively pass through the acousto-optic modulators for one time; and the reference cube-corner prism and the measuring cube-corner prism are adjusted, so light beam superposition occurs when the reference light and the measuring light pass through the non-polarizing beam splitter (NBS) again, and an interference is generated. Heterodyne laser measuring is achieved through adoption of less optical elements, optical path adjustments are simple, problems of polarization leakage, polarization aliasing, complex optical path adjustments and the like which exist in an existing technical scheme can be effectively solved, and the laser vibration measurer has an obvious technical advantage in the ultra-precision vibration measurement field.
Description
Technical field
The invention belongs to laser interferometry field, relate generally to a kind of based on dual-acousto-optic modulation and the anti-polarization aliasing Michelson heterodyne laser vialog of depolarization light splitting.
Background technology
Laser vibration measurer, as vibration value being traceable to the ultra precise measurement instrument of optical maser wavelength, being widely used in displacement kinetic measurement, vibration survey and monitoring, ultraprecise and equipping and the field such as the system integration, scientific research and experiment.Laser vibration measurer based on laser interferance method can be divided into homodyne and the large class of heterodyne two according to principle, and the two has remarkable difference on principle of work, light channel structure and technical characterstic.The null method of measurement adopts single-frequency laser as light source, based on Michelson laser interference principle that is classical or that improve, changes direct displacement by the phase place measuring interference fringe; And heterodyne measurement method is generally adopt double-frequency laser as light source, based on Doppler effect, the indirect displacement by the movement velocity of measurement Doppler frequency difference measurement measured piece.Its signal transacting of homodyne laser vibration measurer is carry out luminous intensity measurement in essence, system itself is straight-flow system, have that structure is simple, measuring accuracy is high, wide dynamic range, be non-linearly easy to the advantages such as compensation, shortcoming is that poor anti jamming capability, measurement result are large by light intensity variable effect.Heterodyne laser vialog (normal title laser doppler vialog) its signal transacting is carry out frequency measurement in essence, system itself is dynamic communication system, have that antijamming capability is strong, measuring accuracy is high, measurement result by features such as light intensity variable effect are little, therefore heterodyne measurement method receives the concern of researchist always and becomes the study hotspot of this area.
Difference interference measuring requires to interfere between arm vialog two to form certain frequency difference.The method producing frequency difference mainly utilizes Zeeman effect and acoustooptic modulation.Zeeman effect affects by frequency difference latch-up phenomenon, and the double frequency frequency difference of generation is general less, and usual maximum frequency difference is no more than 4MHz.The frequency difference that acoustooptic modulation method obtains is usually comparatively large, and frequency difference reaches more than 20MHz, and frequency stability is very good, can meet the demand of high speed, high-acruracy survey.
Existing heterodyne laser vialog (the 1.Martin B producing frequency difference based on acoustooptic modulation, et.al. " High-precision laservibrometers based on digital Doppler-signal processing ", Proceedings of SPIE, Vol.4827:50-61,2002; 2.Stefan Franz, et.al. " Heterodyne interferometer having an optical modulator " .US Patent:US7688451B2; ) be based on Mach-Zehnder interferometer, adopt frequency stabilized laser as light source, form two by polarization spectroscope PBS light splitting and interfere arm, as gage beam and reference arm, interfering on arm at least one adopts acousto-optic modulator to realize frequency displacement, thus makes to form frequency difference between two interference arms; Plane mirror, polarization spectroscope PBS and non-polarization Beamsplitter NBS is adopted to carry out conjunction light to light beam again.The frequency difference of the double-frequency laser that monophone optical frequency shift technical scheme produces is large, high to system hardware rate request, for addressing this problem, dual-acousto-optic modulation technique scheme can be adopted to produce the relatively little light beam of two-way frequency difference, respectively as reference light and measurement light, although dual-acousto-optic modulation scheme can reduce frequency difference, add optical system complexity.To sum up, the shortcoming that prior art exists is: 1) prior art is all based on Mach-Zehnder interferometer, interfere arm and gage beam entirety rectangular, by the summit punishment light of polarization spectroscope at rectangle, light is closed at the diagonal angle place of optical splitting point again by extra polarization spectroscope PBS, non-polarization Beamsplitter NBS and catoptron, there is multiple polarization spectroscope PBS in this technical scheme, there is polarisation leakage phenomenon, causes light path nonlinearity erron remarkable; 2) according to the principle of work of acousto-optic modulator, only have first-order diffraction light frequency displacement can occur, but there is certain angle with incident beam, thus make light path close light difficulty, reference light and measurement light are difficult to interfere.
Due to acousto-optic modulator first-order diffraction light and the factor such as incident light is not parallel and optical element is undesirable, especially the polarisation leakage of polarization spectroscope PBS, existing heterodyne laser vialog technical scheme is caused to adjust difficulty, and the restriction being subject to light channel structure, principle and optical device self character undesirable, there is the nonlinearity erron being difficult to overcome, be difficult to meet Ya Na meter even micromicron class precision vibration survey demand.Therefore, how by the innovation on light channel structure and principle, provide a kind of light path to adjust simple or that nonlinearity erron is less heterodyne laser vibration measuring technical scheme, meaning is very great.
Summary of the invention
The object of the invention is to adjust difficulty for the existing Mach light path that once moral heterodyne laser vibration measuring technical scheme existed on light channel structure and principle, the problems such as nonlinearity erron, there is provided a kind of based on dual-acousto-optic modulation and the anti-polarization aliasing Michelson heterodyne laser vialog of depolarization light splitting, by the innovation of light channel structure and principle, based on Michelson interferometer, adopt less optical element to realize heterodyne laser interference to measure, adjust simple and convenient, effectively can solve light path in prior art and there is polarization leakage and polarization aliasing is remarkable, the problem of light path adjustment difficulty.
Technical solution of the present invention is:
A kind of based on dual-acousto-optic modulation and the anti-polarization aliasing Michelson heterodyne laser vialog of depolarization light splitting, be made up of laser instrument, non-polarization Beamsplitter, first sound-optic modulator, the first light beam turn back element, reference angle cone prism, high-speed photodetector of element, measured angular cone prism, second sound-optic modulator, the second light beam of turning back, it is characterized in that: described laser instrument sends linearly polarized light, light splitting is carried out through non-polarization Beamsplitter, reflected light forms the first light beam as measurement light, and transmitted light forms the second light beam as reference light; First light beam produces the first diffracted beam through first sound-optic modulator, first diffracted beam is turned back after element adjustment through the first light beam, direction of beam propagation is parallel to the first light beam, after the reflection of measured angular cone prism, then forms the 3rd light beam through non-polarization Beamsplitter transmission; Second light beam produces the second diffracted beam through second sound-optic modulator, second diffracted beam is turned back after element adjustment through the second light beam, direction of beam propagation is parallel to the second light beam, after the reflection of reference angle cone prism, then reflects to form the 4th light beam through non-polarization Beamsplitter; 3rd light beam, the 4th beam path overlap and polarization direction is identical; 3rd light beam, the 4th light beam interfere, and are received by high-speed photodetector.
First and second light beam described element of turning back is plane mirror or wedge.
The first-order diffraction light of first and second acousto-optic modulator described is orthogonal with incident light polarization.
Described laser instrument is frequency stabilized laser.
The good result of technological innovation of the present invention and generation is:
(1) the present invention proposes a kind of Michelson heterodyne laser vibration measuring technical scheme based on acoustooptic modulation.This technical scheme is based on Michelson interferometer, and light path is simple, and components and parts are less, decreases the link that nonlinearity erron produces; Utilize the characteristic of acousto-optic modulator first-order diffraction light generation frequency displacement, make two to interfere between arm and form frequency difference; Adopt prism of corner cube as measurement mirror and reference mirror, make the back light of interference arm be positioned at above acousto-optic modulator, only through an acousto-optic modulator, thus achieve heterodyne laser interference measurement.By above-mentioned technological innovation, efficiently solve prior art path optics element more, nonlinearity erron is originated more problem.
(2) the present invention only need adjust and interfere the light beam on arm to turn back element, make the direction of propagation of first-order diffraction light beam parallel with incident beam or zero order beam, namely the position by adjustment measured angular cone prism and reference angle cone prism makes reference light and measures light to interfere, and light path adjustment is very convenient.Solve the problem of prior art light path adjustment inconvenience.
(3) the present invention adopts the light splitting of depolarization Amici prism NBS equal proportion, the polarization state of dichroism and incident light has nothing to do, therefore polarisation leakage and aliasing is suppressed from principle, the present invention efficiently solves serious polarisation leakage and the polarization aliasing of prior art existence, the significant problem of measurement result nonlinearity erron.
Accompanying drawing explanation
Fig. 1 is the anti-polarization aliasing Michelson heterodyne laser vialog three-dimensional views that the present invention is based on dual-acousto-optic modulation and depolarization light splitting;
Fig. 2 is the light path principle diagram of the anti-polarization aliasing Michelson heterodyne laser vialog that the present invention is based on dual-acousto-optic modulation and depolarization light splitting;
Fig. 3 is the three-dimensional views of anti-another embodiment of polarization aliasing Michelson heterodyne laser vialog that the present invention is based on dual-acousto-optic modulation and depolarization light splitting;
Fig. 4 is the light path principle diagram of anti-another embodiment of polarization aliasing Michelson heterodyne laser vialog that the present invention is based on dual-acousto-optic modulation and depolarization light splitting;
Fig. 5 is acousto-optic modulator principle of work of the present invention;
Fig. 6 is principles of signal processing figure of the present invention;
In figure, turn back element, 7 reference angle cone prisms, 8 high-speed photodetectors, 9 first light beams, 10 second light beams, 11 second diffracted beams, 12 the 3rd light beams, 13 the 4th light beams, 14 first light beams of 1 laser instrument, 2 non-polarization Beamsplitters, 3 first sound-optic modulators, 4 measured angular cone prisms, 5 second sound-optic modulators, 6 second light beams are turned back element, 15 first diffracted beams.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail, and provides embodiment.
A kind of based on dual-acousto-optic modulation and the anti-polarization aliasing Michelson heterodyne laser vialog of depolarization light splitting, be made up of laser instrument 1, non-polarization Beamsplitter 2, first sound-optic modulator 3, first light beam turn back element 6, reference angle cone prism 7, high-speed photodetector 8 of element 14, measured angular cone prism 4, second sound-optic modulator 5, second light beam of turning back, it is characterized in that: described laser instrument 1 sends linearly polarized light, light splitting is carried out through non-polarization Beamsplitter 2, reflected light forms the first light beam 9 as measurement light, and transmitted light forms the second light beam 10 as reference light; First light beam 9 produces the first diffracted beam 15 through first sound-optic modulator 3, first diffracted beam 15 is turned back after element 14 adjustment through the first light beam, direction of beam propagation is parallel to the first light beam 9, after measured angular cone prism 4 reflects, then forms the 3rd light beam 12 through non-polarization Beamsplitter 2 transmission; Second light beam 10 produces the second diffracted beam 11 through second sound-optic modulator 5, second diffracted beam 11 is turned back after element 6 adjustment through the second light beam, direction of beam propagation is parallel to the second light beam 10, after reference angle cone prism 7 reflects, then reflects to form the 4th light beam 13 through non-polarization Beamsplitter 2; 3rd light beam 12, the 4th light beam 13 light path overlap and polarization direction is identical; 3rd light beam 12, the 4th light beam 13 interfere, and are received by high-speed photodetector 8.
First and second light beam described turns back element 14,6 for plane mirror or wedge.
The first-order diffraction light of first and second acousto-optic modulator 3,5 described is orthogonal with incident light polarization.
Described laser instrument 1 is frequency stabilized laser.
Composition graphs 1 and Fig. 2 give as one embodiment of the present of invention.In the present embodiment, first and second light beam turns back element 14,6 for plane mirror.Laser instrument 1 adopts the He-Ne laser instrument through frequency stabilization, and wavelength is 632.8nm, noise < 0.05%rms, and output power is 1mW, and polarization turns to 1000: 1, and frequency is ω
0, in space coordinates xyz, laser instrument 1 sends linearly polarized light, and polarization direction is x-axis, is P light.Through the light splitting of non-polarization Beamsplitter 2 equal proportion, the transmitted light that the reflected light of P component is formed as the first light beam 9, the P component measuring light is formed as the second light beam 10 with reference to light.On gage beam, the first light beam 9 of P component is through first sound-optic modulator 3, and the driving frequency of first sound-optic modulator 3 is ω
c1, the first diffracted beam 15 of outgoing is S light, and frequency is ω
0+ ω
c1, the direction of propagation and incident light have certain angle.First diffracted beam 15 is after plane mirror adjustment, and the direction of propagation is parallel with the first light beam 9, reflects through measured angular cone prism 4, and the back light of gage beam is positioned at above first sound-optic modulator 3, then forms the 3rd light beam 12 through non-polarization Beamsplitter 2 transmission.The athletic meeting of measured angular cone prism 4 produces Doppler shift ± ω
d, therefore the back light frequency of gage beam is ω
0+ ω
c1± ω
d.On reference arm, the second light beam 10 of P component is through second sound-optic modulator 5, and the driving frequency of second sound-optic modulator 5 is ω
c2, the second diffracted beam 11 of outgoing is S light, and frequency is ω
0+ ω
c2, the direction of propagation and incident light have certain angle.Second diffracted beam 11 is after plane mirror adjustment, and the direction of propagation is parallel with the second light beam 10, reflects through reference angle cone prism 7, and the back light of reference arm is positioned at above second sound-optic modulator 5, then reflects to form the 4th light beam 13 through non-polarization Beamsplitter 2.Measure light the 3rd light beam 12, reference light the 4th light beam 13 overlaps, polarization direction is identical, interfere, frequency is Δ ω
c± ω
dinterference signal received by high-speed photodetector 8, wherein Δ ω
cthe driving frequency being two acousto-optic modulators is poor, i.e. Δ ω
c=ω
c1-ω
c2.In the present embodiment, high-speed photodetector 8 is the photodetector of Si PIN type, and photosensitive area diameter is 0.8mm, bandwidth 200MHz.
Fig. 3 and Fig. 4 provides an alternative embodiment of the invention.In the present embodiment, first and second light beam turns back element 14,6 for being wedge, according to refraction law principle, changes direction of beam propagation.
Fig. 5 is acousto-optic modulator principle of work diagram of the present invention.In the present embodiment, for second sound-optic modulator 5, the acousto-optic crsytal of acousto-optic modulator is bragg cell, due to the inherent characteristic of Prague acoustooptic diffraction, hyperacoustic frequency can not be too little, is generally not less than 20MHz, then the double-frequency laser frequency difference that can obtain is equal to or greater than 20MHz.When incident light oblique incidence is to acousto-optic modulator, emergent light only has diffraction zero-level light and one-level light, and the frequency of diffraction zero-level light is identical with incident light with direction, diffraction one-level light generation frequency displacement, and the direction of propagation and zero order light or incident light have a deflection angle.Diffraction zero-level polarization state is consistent with incident light, and one-level light is orthogonal with incident light polarization.
Fig. 6 is principles of signal processing diagram of the present invention.The reference signal cos ω of first sound-optic modulator 3
c1the reference signal cos ω of t and second sound-optic modulator 5
c2t is multiplied, and obtains the reference signal cos Δ ω of lower frequency after low-pass filtering
ct; Measuring-signal cos (the Δ ω that high-speed photodetector 8 receives
c± ω
d) t respectively with the reference signal cos Δ ω of lower frequency
cthe sin Δ ω of t and its phase shift 90 °
ct is multiplied, and respectively after low-pass filtering, A/D conversion, obtains orthogonal signal, then obtains the phase place of moving object through arctangent computation
Claims (4)
1. one kind based on dual-acousto-optic modulation and the anti-polarization aliasing Michelson heterodyne laser vialog of depolarization light splitting, by laser instrument (1), non-polarization Beamsplitter (2), first sound-optic modulator (3), first light beam is turned back element (14), measured angular cone prism (4), second sound-optic modulator (5), second light beam is turned back element (6), reference angle cone prism (7), high-speed photodetector (8) forms, it is characterized in that: described laser instrument (1) sends linearly polarized light, light splitting is carried out through non-polarization Beamsplitter (2), reflected light forms the first light beam (9) as measuring light, transmitted light forms the second light beam (10) as reference light, first light beam (9) produces the first diffracted beam (15) through first sound-optic modulator (3), first diffracted beam (15) is turned back after element (14) adjustment through the first light beam, direction of beam propagation is parallel to the first light beam (9), after measured angular cone prism (4) reflection, then form the 3rd light beam (12) through non-polarization Beamsplitter (2) transmission, second light beam (10) produces the second diffracted beam (11) through second sound-optic modulator (5), second diffracted beam (11) is turned back after element (6) adjustment through the second light beam, direction of beam propagation is parallel to the second light beam (10), after reference angle cone prism (7) reflection, then reflect to form the 4th light beam (13) through non-polarization Beamsplitter (2), 3rd light beam (12), the 4th light beam (13) light path overlap and polarization direction is identical, 3rd light beam (12), the 4th light beam (13) interfere, and are received by high-speed photodetector (8).
2. according to claim 1 based on dual-acousto-optic modulation and the anti-polarization aliasing Michelson heterodyne laser vialog of depolarization light splitting, it is characterized in that: first and second light beam described element (14,6) of turning back is plane mirror or wedge.
3. according to claim 1 based on dual-acousto-optic modulation and the anti-polarization aliasing Michelson heterodyne laser vialog of depolarization light splitting, it is characterized in that: the first-order diffraction light of first and second acousto-optic modulator described (3,5) is orthogonal with incident light polarization.
4. according to claim 1 based on dual-acousto-optic modulation and the anti-polarization aliasing Michelson heterodyne laser vialog of depolarization light splitting, it is characterized in that: described laser instrument (1) is frequency stabilized laser.
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