CN106338334B - A kind of dual-acousto-optic phase modulation conjugation heterodyne detection device - Google Patents
A kind of dual-acousto-optic phase modulation conjugation heterodyne detection device Download PDFInfo
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Abstract
A kind of dual-acousto-optic phase modulation conjugation heterodyne detection device, is mainly characterized by efficiently utilizing luminous energy, is suitable for Weak absorption, can get vibration and the frequency spectrum of micro-vibration, the phase generated using the amplitude that Suo Lieer-Babinet phase compensator obtains micro-vibration；It is compared using reference path with optical path, greatly reduces the common-mode noise generated by environmental factor variation, improve measurement accuracy；The phase-conjugation light with phase compensation characteristic generated using photorefractive crystal eliminates " the speckle noise " of the generation of testee surface, and the surface of testee is expanded to relatively rough surface by being similar to mirror surface；Orthogonal two beams crossed polarized light is obtained using alliteration optical modulator, eliminates the influence of acousto-optic modulator intensity modulation, it is easy to accomplish the high-precision measurement of amplitude；The beat frequency of alliteration optical modulator is middle frequency difference, realizes low frequency signal in the processing of radio-frequency region, eliminates the interference of low-frequency noise.
Description
Technical field
It is a kind of based on laser, alliteration optical modulator and photorefractive crystal characteristic the invention belongs to physical optical arts
And a kind of dual-acousto-optic phase modulation proposed is conjugated optical heterodyne detection device.
Background technique
Optical heterodyne detection technology has very high sensitivity compared with incoherent technique, and measurement accuracy wants high 7-8
A order of magnitude, therefore had a wide range of applications in signal detection；But the interference signal of high s/n ratio in order to obtain, it is right
The smoothness requirements on testee surface be it is relatively high, in general closer to shiny surface more be conducive to improve signal-to-noise ratio.It is right
In coarse testee surface, a large amount of " speckle noise " is carried in reflected light, this brings larger to high-acruracy survey
Difficulty.
The sub-nm resolution phase conjugation interference of Chinese invention patent, a kind of object vibration amplitude of ZL00115304.8 is surveyed
Device is measured, including in the direction of advance of source emissioning light beam, being successively equipped with the first lens, the second lens, beam splitter, polarization point
Beam device, polarisation transformer to testee.By the light beam with dapple noise of testee first reflection through polarization beam splitting
After device reflection, photorefractive crystal is converged to by the 4th lens.The phase-conjugation light that photorefractive crystal generates is anti-by polarization beam apparatus
It is mapped to testee, the phase-conjugation light of testee reflection is no longer with dapple noise.This is that one kind is not only suitable for surface
Smooth testee, and be also applied for shaggy testee, measure the resolution ratio of vibration amplitude less than 5 ×
10-10Rice.
This vibration measuring method is disadvantageous in that without reference path, cannot utilize radio-frequency technique processing phase (amplitude)
Signal.Accordingly, it is difficult to eliminate the interference of common-mode noise caused by environmental factor and low-frequency noise (also referred to as 1/f noise).
Summary of the invention
It is existing based on optical interferometry object vibration method and to be solved the purpose of the present invention is overcoming the shortcomings of
Technical problem provides a kind of phase conjugation heterodyne spy using green (light) laser, alliteration optical modulator and photorefractive crystal composition
Survey new equipment.
To achieve the purpose of the present invention, the technical solution of the present invention is as follows:
A kind of dual-acousto-optic phase modulation conjugation heterodyne detection device, it is characterised in that: orthogonal including generating two beams
Cross-polarization electro-optical device, phase reference device, micro-vibration amplitude (phase) measuring device and data acquisition and procession display dress
It sets；The micro-vibration phase amplitude measurement device, by a beam expander 14, two polarizing beam splitters, i.e. the first polarization spectro
Device 15, the second polarizing beam splitter 24, three polarization converters, i.e. the first polarization converter 16, the second polarization converter 22 and
Three polarization converters 25, two biconvex lens, i.e. the first biconvex lens 19 and the second biconvex lens 27, the second analyzer 18, one
A half-wave plate 23, the injection device 17 that is all-trans, the second photodetector 20 and a photorefractive crystal 28 form；Wherein:
● the orthogonal cross-polarization electro-optical device of two beam of generation includes a laser 1, a polarised light point
Light device 2, two total reflection right-angle prisms, i.e., the first total reflection right-angle prism 3 and the second total reflection right-angle prism 6, two drivings
Frequency is respectively f1And f2Acousto-optic modulator, i.e. first sound-optic modulator (4) and second sound-optic modulator 5 and polarization close
Light device 7；
● the phase reference device includes an optical splitter 8, the first analyzer 9, third biconvex lens 10 and first
Photodetector 11；
● the data acquisition and processing (DAP) device includes two bandpass filters, i.e. the first bandpass filter 12 and the
Two band-pass filter 21,16 oscillograph cards 13 of a binary channels and a set of computer system 29；
● the laser beam issued by laser 1 is divided into two bunch polarised lights through third polarised light splitter 2: a branch of is p light
(i.e. light vector direction of vibration be parallel to the plane of incidence polarised light), another beam are that (i.e. light vector direction of vibration is perpendicular to incidence for s light
The polarised light in face).It is f that p light, which enters driving frequency by the first total reflection right-angle prism 3,1First sound-optic modulator 4, s light is logical
Frequency of overdriving is f2Second sound-optic modulator 5 after, generate two 0 grade of diffraction lights and two+1 grade of diffraction lights, driving respectively
Frequency is f2Second sound-optic modulator 5+1 grade of diffraction light by second total reflection right-angle prism 6 and driving frequency be f1?
+ 1 grade of diffraction light of one acousto-optic modulator 4 enters polarization splicer 7, and synthesis light beam is by the transmitted light beam of optical splitter 8 by the
After one analyzer 9, interfered on the photosurface of the first photodetector 11 by third biconvex lens 10, and be converted to
Beat frequency is the electric signal of middle frequency difference, phase reference signal of the electric signal of the middle frequency difference as system, through the first bandpass filtering
Device 12 filters, and becomes digital signal into 16 oscillograph cards 13 of binary channels；
Light beam is synthesized by the reflected beams of optical splitter 8 by after beam expander 14, into the first polarizing beam splitter 15,
Middle s light is reflected and is totally reflected later by the injection device 17 that is all-trans that the first polarization converter 16 reaches regulating reflection degree, should
Reflected light becomes p light again by the first polarization converter 16, and penetrates the first polarizing beam splitter 15 and the second analyzer 18
Later, it is focused on by the first biconvex lens 19 on the photosurface of second photodetector 20；Through the p of the first polarizing beam splitter 15
Light penetrates the second polarizing beam splitter 24 by being still p light after the second polarization converter 22 and half-wave plate 23, later by the
Three polarization converters 25 reach 26 surface of testee and are totally reflected, which carries " speckle noise " again by third
Polarization converter 25 becomes s light and is reflected by the second polarizing beam splitter 24, by converging to Preset grating after the second biconvex lens 27
On crystal 28, the phase-conjugation light generated by photorefractive crystal 28, by the second polarization spectro after being collimated by the second biconvex lens 27
The another secondary reflection of device 24, and reach 26 surface of testee through third polarization converter 25 and be totally reflected, reflected phase
Position conjugate beam becomes p light after third polarization converter 25, and partially by the second polarizing beam splitter 24, half-wave plate 23 and second
Become s light after vibration converter 22, is reflected by the first polarizing beam splitter 15 and by the second analyzer 18 by the first biconvex lens
19 focus on the photosurface of the second photodetector 20, occur with the p light on the photosurface of arrival photodetector 20 before
Interference, and be converted to the electric signal that beat frequency is middle frequency difference, measuring signal of the electric signal of the middle frequency difference as system, through second
Bandpass filter (21) filtering, becomes digital signal into 16 oscillograph cards 13 of binary channels；
The digital signal passes through processing of the computer system 29 to reference signal and measuring signal data, obtains micro-vibration
Amplitude, the spectrum value of signal.
The present invention compared with prior art, has substantive distinguishing features outstanding and significant effect are as follows:
The present invention can efficiently utilize luminous energy, be suitable for Weak absorption, can get the amplitude and spectrum information of micro-vibration,
The phase generated using the amplitude that Suo Lieer-Babinet phase compensator obtains micro-vibration；Utilize reference path and measurement light
Road compares, and significantly reduces the common-mode noise generated by environmental factor variation, improves measurement accuracy.
The phase-conjugation light with phase compensation characteristic that the present invention utilizes photorefractive crystal to generate, eliminates testee
" the speckle noise " generated, the surface of testee is expanded to relatively rough surface by being similar to mirror surface；Utilize dual-acousto-optic tune
Device processed obtains orthogonal two beams crossed polarized light, eliminates the influence of acousto-optic modulator intensity modulation, it is easy to accomplish amplitude
High-precision measurement；The beat frequency of alliteration optical modulator is middle frequency difference, realizes low frequency signal in radio-frequency region processing, eliminates
The interference of low-frequency noise (1/f noise).
Present invention is mainly used for the micro-vibrations of measurement object, be both suitable for the smooth object in surface, it is thick to be also suitable for surface
Rough object.
Detailed description of the invention
Fig. 1 is a kind of schematic illustration of dual-acousto-optic phase modulation conjugation heterodyne detection device；
Fig. 2 is the waveform diagram of the reference path that beat frequency is 30MHz and optical path；
Fig. 3 is the demodulation result that the vibration frequency of testee aluminium sheet is the micro-vibration of 6kHz.
In Fig. 1: laser 1, the first polarizing beam splitter 15, the second polarizing beam splitter 24 and third polarizing beam splitter 2, first
Right angle total reflection prism 3 and the second right angle total reflection prism 6, first sound-optic modulator 4 and second sound-optic modulator 5, polarization close
Light device 7, optical splitter 8, the first analyzer 9 and the second analyzer 18, the first biconvex lens 19, the second biconvex lens 27 and third are double
Convex lens 10, the first photodetector 11 and the second photodetector 20, the first bandpass filter 12 and the second bandpass filter
21,16 oscillograph cards 13 of binary channels, beam expander 14, the first polarization converter 16, the second polarization converter 22, third optical rotation
Parallel operation 25, be all-trans injection device 17, half-wave plate 23, testee 26, photorefractive crystal 28, computer system 29.
Specific embodiment
Below in conjunction with Detailed description of the invention specific implementation method of the present invention.
Shown in Fig. 1, a kind of dual-acousto-optic phase modulation of the present invention is conjugated heterodyne detection device, including generates two beams and be mutually perpendicular to
Cross-polarization electro-optical device, phase reference device, micro-vibration amplitude (phase) measuring device and data acquisition and procession show
Device, it is characterised in that: described micro-vibration amplitude (phase) measuring device is a kind of to eliminate testee surface reflection
In include " speckle noise " device, the dress that " the speckle noise " that includes in testee surface reflection can be eliminated
It sets, by a beam expander 14, two polarizing beam splitters, i.e. the first polarizing beam splitter 15 and the second polarizing beam splitter 24, three partially
Shake converter, i.e. the first polarization converter 16, the second polarization converter 22 and third polarization converter 25, two biconvex lens,
That is the first biconvex lens 19 and the second biconvex lens 27, the second analyzer 18, a half-wave plate 23, the injection device 17 that is all-trans,
Second photodetector 20 and a photorefractive crystal 28 form；Wherein:
● the orthogonal cross-polarization electro-optical device of two beam of generation includes a laser 1, a polarised light point
Light device 2, two total reflection right-angle prisms, i.e., the first total reflection right-angle prism 3 and the second total reflection right-angle prism 6, two drivings
Frequency is respectively f1And f2Acousto-optic modulator, i.e. first sound-optic modulator (4) and second sound-optic modulator 5 and polarization close
Light device 7；
● the phase reference device includes an optical splitter 8, the first analyzer 9, third biconvex lens 10 and first
Photodetector 11；
● the data acquisition and processing (DAP) device includes two bandpass filters, i.e. the first bandpass filter 12 and the
Two band-pass filter 21,16 oscillograph cards 13 of a binary channels and a set of computer system 29；
● the laser beam issued by laser 1 is divided into two bunch polarised lights through third polarizing beam splitter 2: a branch of is p light, separately
A branch of is s light.It is f that p light, which enters driving frequency by the first total reflection right-angle prism 3,1First sound-optic modulator 4, s light passes through
Driving frequency is f2Second sound-optic modulator 5 after, generate two 0 grade of diffraction lights and two+1 grade of diffraction lights, driving frequency respectively
Rate is f2Second sound-optic modulator 5+1 grade of diffraction light by second total reflection right-angle prism 6 and driving frequency be f1First
+ 1 grade of diffraction light of acousto-optic modulator 4 enters polarization splicer 7, and synthesis light beam passes through first by the transmitted light beam of optical splitter 8
After analyzer 9, interfered on the photosurface of the first photodetector 11 by third biconvex lens 10, and be converted to bat
Frequency is the electric signal of middle frequency difference, phase reference signal of the electric signal of the middle frequency difference as system, through the first bandpass filter
12 filtering, become digital signal into 16 oscillograph cards 13 of binary channels；
Light beam is synthesized by the reflected beams of optical splitter 8 by after beam expander 14, into polarization beam apparatus 15, wherein s
Light is reflected and is totally reflected later by the injection device 17 that is all-trans that the first polarization converter 16 reaches regulating reflection degree, the reflection
Light becomes p light again by the first polarization converter 16, and after the first polarizing beam splitter 15 of transmission and the second analyzer 18,
It is focused on by the first biconvex lens 19 on the photosurface of second photodetector 20；It is logical through the p light of the first polarizing beam splitter 15
Crossing after the second polarization converter 22 and half-wave plate 23 is still p light, and penetrates the second polarizing beam splitter 24, inclined by third later
Vibration converter 25 reaches 26 surface of testee and is totally reflected, which carries " speckle noise " again by polarization
Device 25 becomes s light and is reflected by factory's polarizing beam splitter 24, by being converged on photorefractive crystal 28 after the second biconvex lens 27,
The phase-conjugation light generated by photorefractive crystal 28, after being collimated by the second biconvex lens 27 again by the second polarizing beam splitter 24
Reflection, and reach 26 surface of testee through third polarization converter 25 and be totally reflected, reflected phase-conjugation light warp
Become p light after crossing third polarization converter 25, and passes through the second polarizing beam splitter 24, half-wave plate 23 and the second polarization converter 22
Become s light later, reflected by the first polarizing beam splitter 15 and focuses on the by the first biconvex lens 19 by the second analyzer 18
On the photosurface of two photodetectors 20, with reach the second photodetector 20 before photosurface on p light interfere, and
The electric signal that beat frequency is middle frequency difference is converted to, measuring signal of the electric signal of the middle frequency difference as system is filtered through the second band logical
Wave device 21 filters, and becomes digital signal into 16 oscillograph cards 13 of binary channels.By computer system 29 to reference signal and
The processing of measuring signal data obtains amplitude, the spectrum value of micro-vibration signal.
It is interfered on the photosurface of first photodetector 11, the first bandpass filter 12 filters out direct current therein
After item, optical frequency item, the electric signal of output be can be written as
In formula, Δ ω=ω2-ω1、Δ θ=θ2-θ1, ω2With ω1Respectively second sound-optic modulator 5
With the frequency displacement of+1 grade of diffraction light of first sound-optic modulator 4,WithRespectively in reference path, second sound-optic modulator 5
The phase of 11 photosurface of the first photodetector, θ are reached with+1 grade of diffraction light of first sound-optic modulator 42With θ1Respectively second
The initial phase of acousto-optic modulator 5 and first sound-optic modulator 4.
It is interfered on the photosurface of second photodetector 20, the second bandpass filter 21 filters out direct current therein
After item, optical frequency item, the electric signal of output be can be written as
In formula, WithRespectively in optical path, second sound-optic modulator 5 and the first acousto-optic
+ 1 grade of diffraction light of modulator 4 reaches the phase of 20 photosurface of the second photodetector, remaining same formula of parameter meaning (1).
When the driving frequency of second sound-optic modulator 5 is 110.12MHz, the driving frequency of first sound-optic modulator 4 is
When 80MHz, frequency difference between the two is 30.12MHz, and the waveform of laser heterodyne interferometry signal is as shown in Fig. 2, wherein the channel CH1 is
Reference signal, the channel CH2 are measuring signals.
If in optical path, the equivalent optical path of s light and p light then comes when testee surface has micro-vibration to be displaced s (t)
The phase shift of (4 π/λ) s (t) will be generated from the signal light of testee surface reflection, wherein λ is optical wavelength, at this moment the second photoelectricity
The expression formula of 20 photoelectric current of detector is
Im∝cos[Δωt+(4π/λ)s(t)+Δθ] (3)
In formula, Δ ω and the same formula of Δ θ meaning (1).The photoelectric current provided in formula (1) and (3) is converted to quilt after voltage
(selected photodetector is photoelectric converter, current-to-voltage converting circuit and voltage amplifier circuit in the present invention for amplification
Integrate), and be respectively the first bandpass filter 12 and the second bandpass filter 21 of beat frequency, filtering by centre frequency
Voltage afterwards, which is sent to 16 oscillograph cards 13 of binary channels, which carries out analog-to-digital conversion, becomes digital signal, which is deposited
Storage is used for data processing and display in computer system 29.
In specific implementation, the splitting ratio of optical splitter 8 is 70:30 (reflective light intensity: transmitted light intensity), the first analyzer 9 and the
The extinction ratio of two analyzers 18 is greater than 10000:1, and the first polarization converter 16 uses quarter wave plate, the choosing of the second polarization converter 22
With Faraday polarization apparatus, third polarization converter 25, which is selected, uses quarter wave plate, and beam expander 14 uses 5 times of beam expanders, and Preset grating is brilliant
Body 28 selects barium titanate crystal, and the injection device 17 that is all-trans is total reflection right-angle prism either prism of corner cube；The intensity of s light and p light
It can change by adjusting the Linear Control voltage of first sound-optic modulator 4 and second sound-optic modulator 5；In computer system 29
Control and calculation procedure equipped with data sampling and processing and display, these programs include micro-vibration waveform drawing and amplitude, phase
The functions such as position and frequency spectrum calculating.
It is the waveform diagram of reference path and optical path that beat frequency is 30.12MHz, wherein measuring signal is opposite shown in Fig. 2
The phase of reference signal is π/4, and electric signal of the channel CH1 from the first photodetector 11 is reference signal, and the channel CH2 is come
It is measuring signal from the electric signal of the second photodetector 20.By adjusting the injection device 17 that is all-trans in specific implementation, so that measurement
Signal is 0 (or integral multiple of 2 π) with respect to the phase of reference signal, that is, makes the waveform of reference path and optical path
Strictly coincide together.Reference signal and measuring signal are sampled respectively, then pass through data processing, and the phase of the two can be obtained
Potential difference.
It is the demodulation result that the vibration frequency that testee 26 is aluminium sheet is the micro-vibration of 6kHz shown in Fig. 3.Wherein Fig. 3
It (a) is the vibrational waveform figure of demodulation, Fig. 3 (b) is the result of spectrum analysis of vibrational waveform.In specific implementation, quilt shown in FIG. 1
One end (rigid connection) that object 26 (aluminium sheet) is fixed on Piezoelectric Ceramic bar is surveyed, then drive power supply for piezoelectric ceramics is set
Driving voltage and driving frequency make testee make micro-vibration by certain frequency and amplitude, to reference signal and measuring signal
It samples respectively, data processing is carried out to sampled value, vibrational waveform and rumble spectrum can be obtained.For example, Piezoelectric Ceramic is electric
Pressure is 1.8 volts, and when driving frequency is 6kHz, demodulation result shown in Fig. 3 can be obtained, from Piezoelectric Ceramic voltage and displacement
The table of comparisons, it is known that its vibration amplitude is about 170 nanometers.
Using Suo Lieer-Babinet phase compensator, having surveyed testee 26 is shaggy aluminium sheet micro-vibration
The phase that amplitude generates, and amplitude is scaled by formula (3), its amplitude discrimination is obtained by phase resolution.For example, laser
Output wavelength is 633nm, the injection device 17 that is all-trans is the girdle prisms such as right angle, and photodetector 11 and 20 is silicon substrate across resistance amplification photoelectricity
Detector, the resolution ratio of the present apparatus is up to 2.76 × 10-12Rice.
Claims (5)
1. a kind of dual-acousto-optic phase modulation is conjugated heterodyne detection device, it is characterised in that: orthogonal just including generating two beams
Hand over polarized light device, phase reference device, micro-vibration phase amplitude measurement device and data acquisition and procession display device；
The micro-vibration phase amplitude measurement device, by a beam expander (14), two polarizing beam splitters, i.e. the first polarizing beam splitter
(15), the second polarizing beam splitter (24), three polarization converters, i.e. the first polarization converter (16), the second polarization converter
(22) and third polarization converter (25), two biconvex lens, i.e. the first biconvex lens (19) and the second biconvex lens (27),
Two analyzers (18), a half-wave plate (23), an injection device that is all-trans (17), the second photodetector (20) and a Preset grating
Crystal (28) composition；Wherein:
● the orthogonal cross-polarization electro-optical device of two beam of generation includes a laser (1), a third polarised light
Optical splitter (2), two total reflection right-angle prisms, i.e., the first total reflection right-angle prism (3) and the second total reflection right-angle prism (6),
Two driving frequencies are respectively f1And f2Acousto-optic modulator, i.e., first sound-optic modulator (4) and second sound-optic modulator (5) and
One polarization splicer (7)；
● the phase reference device includes an optical splitter (8), the first analyzer (9), third biconvex lens (10) and the
One photodetector (11)；
● the data acquisition and processing (DAP) device includes two bandpass filters, i.e. the first bandpass filter (12) and second
Bandpass filter (21), 16 oscillograph cards (13) of a binary channels and a set of computer system (29)；
● be divided into two bunch polarised lights through third polarised light splitter (2) by the laser beam that laser (1) issues: a branch of is p light,
Another beam is s light, and it is f that p light, which enters driving frequency by the first total reflection right-angle prism (3),1First sound-optic modulator (4), s
Light is f by driving frequency2Second sound-optic modulator (5) after, generate two 0 grade of diffraction lights and two+1 grade of diffraction respectively
Light, driving frequency f2Second sound-optic modulator (5)+1 grade of diffraction light by second total reflection right-angle prism (6) and drive
Frequency is f1First sound-optic modulator (4)+1 grade of diffraction light enter polarization splicer (7), synthesis light beam pass through optical splitter
(8) transmitted light beam passes through after the first analyzer (9), by third biconvex lens (10) in the first photodetector (11)
It is interfered on photosurface, and is converted to the electric signal that beat frequency is middle frequency difference, phase of the electric signal of the middle frequency difference as system
Position reference signal, filters through the first bandpass filter (12), becomes digital signal into 16 oscillograph cards (13) of binary channels；
Light beam is synthesized by the reflected beams of optical splitter (8) by after beam expander (14), into the first polarizing beam splitter (15),
Wherein s light is reflected and is all-trans later by the injection device that is all-trans (17) that the first polarization converter (16) reach regulating reflection degree
It penetrates, which becomes p light again by the first polarization converter (16), and penetrates the first polarizing beam splitter (15) and second
After analyzer (18), focused on the photosurface of the second photodetector (20) by the first biconvex lens (19)；Through first
The p light of polarizing beam splitter (15) penetrates second partially by being still p light after the second polarization converter (22) and half-wave plate (23)
It shakes optical splitter (24), reaches testee (26) surface by third polarization converter (25) later and be totally reflected, the reflected light
It carries " speckle noise " and becomes s light again by polarization converter (25) and reflected by the second polarizing beam splitter (24), by the
It is converged on photorefractive crystal (28) after two biconvex lens (27), the phase-conjugation light generated by photorefractive crystal (28), quilt
By the second polarizing beam splitter (24) another secondary reflection after second biconvex lens (27) collimation, and penetrate third polarization converter (25)
It reaches testee (26) surface to be totally reflected, reflected phase-conjugation light becomes after third polarization converter (25)
P light, and by becoming s light after the second polarizing beam splitter (24), half-wave plate (23) and the second polarization converter (22), by first
Polarizing beam splitter (15) reflects and focuses on the second photodetector by the first biconvex lens (19) by the second analyzer (18)
(20) it on photosurface, is interfered with the p light on the photosurface of arrival photodetector (20) before, and be converted to beat frequency and be
The electric signal of middle frequency difference, measuring signal of the electric signal of the middle frequency difference as system are filtered through the second bandpass filter (21),
Become digital signal into 16 oscillograph cards (13) of binary channels；
The digital signal passes through the processing of computer system (29) to reference signal and measuring signal data, obtains micro-vibration letter
Number amplitude, spectrum value.
2. a kind of dual-acousto-optic phase modulation according to claim 1 is conjugated heterodyne detection device, it is characterised in that: described to swash
Light device (1) is gas laser semiconductor laser or solid state laser.
3. a kind of dual-acousto-optic phase modulation according to claim 1 is conjugated heterodyne detection device, it is characterised in that: described the
Two polarization converters (22) are Faraday rotators.
4. a kind of dual-acousto-optic phase modulation according to claim 1 is conjugated heterodyne detection device, it is characterised in that: described the
One polarization converter (16), the second polarization converter (25) are Faraday rotator or quarter-wave plate.
5. a kind of dual-acousto-optic phase modulation according to claim 1 is conjugated heterodyne detection device, it is characterised in that: described
The crystallographic axis of half-wave plate (23) with by the p optical vibration direction angle of the first polarizing beam splitter (15) be 22.5 degree, acting on is
The p light for crossing the first polarizing beam splitter (15), after the second polarization converter (22) and half-wave plate (23), partially relative to first
Vibration optical splitter (15) is still p light.
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| CN110849593B (en) * | 2019-11-22 | 2021-06-01 | 中国科学院长春光学精密机械与物理研究所 | Measuring equipment for measuring wave aberration of optical system based on heterodyne interference of acousto-optic modulator |
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