CN1264830A - Sub-nanometer resolution phase conjugate interference measuring device for object vibration amplitude - Google Patents
Sub-nanometer resolution phase conjugate interference measuring device for object vibration amplitude Download PDFInfo
- Publication number
- CN1264830A CN1264830A CN00115304A CN00115304A CN1264830A CN 1264830 A CN1264830 A CN 1264830A CN 00115304 A CN00115304 A CN 00115304A CN 00115304 A CN00115304 A CN 00115304A CN 1264830 A CN1264830 A CN 1264830A
- Authority
- CN
- China
- Prior art keywords
- light
- lens
- vibration amplitude
- sub
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010287 polarization Effects 0.000 claims abstract description 33
- 239000013078 crystal Substances 0.000 claims abstract description 23
- 230000021615 conjugation Effects 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 7
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 3
- 229910002113 barium titanate Inorganic materials 0.000 claims description 3
- FAYIAZWDTNGQRX-UHFFFAOYSA-N [Na].[K].[Sr].[Ba] Chemical compound [Na].[K].[Sr].[Ba] FAYIAZWDTNGQRX-UHFFFAOYSA-N 0.000 claims description 2
- WOIHABYNKOEWFG-UHFFFAOYSA-N [Sr].[Ba] Chemical compound [Sr].[Ba] WOIHABYNKOEWFG-UHFFFAOYSA-N 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- 230000003760 hair shine Effects 0.000 description 3
- -1 Argon ion Chemical class 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 150000001398 aluminium Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A sub-nanometer resolution phase conjugate interference measuring device for object vibration amplitude comprises a first lens, a second lens, a beam splitter, a polarization converter and an object to be measured, wherein the first lens, the second lens, the beam splitter, the polarization beam splitter and the polarization converter are sequentially arranged in the advancing direction of a light beam emitted by a light source. The light beam with speckle noise reflected by the object to be measured is reflected by the polarization beam splitter and converged to the photorefractive crystal by the fourth lens. The phase conjugate light generated by the photorefractive crystal is reflected to the object to be measured by the polarization beam splitter, and the phase conjugate light reflected by the object to be measured does not have speckle noise. Therefore, the vibration amplitude of the object to be measured, whether the surface is smooth or rough, can be detected with sub-nanometer resolution.
Description
The present invention relates to the Ya Nami (10 of object vibration amplitude
-10Rice is to 10
-12Rice) resolution phase conjugation interferometric measuring means, particularly this device is not only applicable to ganoid testee, and is applicable to shaggy testee.
Formerly in the technology, as a kind of effective untouchable precision measurement apparatus, laser interferometer has obtained using widely.When using traditional homodyne or high-precision difference interference measuring device to measure, in order to obtain the interference signal of high s/n ratio, the surface of testee is necessary for the shiny surface near minute surface.Yet the surface of most testees is coarse.Contain a large amount of speckle noises from the light of such surface reflection, this causes difficulty to high-acruracy survey.The interferometer that is used for measuring vibrations that proposes such as Suzuki Xiaochang (Takamasa Suzuki) Mr. of Japanese Nigata (Niigata) university, (referring to technology formerly: Takamasa Suzuki, Takao Okada, OsamiSasaki, and Takeo Maruyama, " Real-time vibration measurement using a feedback typeof laser diode interferometer with an optical fiber; " Opt.Eng., 1997,36 (9), 2496-2502.) if testee wherein is the object of rough surface, can't realize that then the high-quality of vibration amplitude is measured.In addition, also only be 40 nanometers (4 * 10 under the best situation of the vibration amplitude measuring accuracy of this interferometer
-8Rice).
Purpose of the present invention is exactly in order to overcome the deficiency in the above-mentioned technology formerly, a kind of measurement mechanism of Measuring Object vibration amplitude to be provided, and it will utilize the phase compensation characteristic of phase-conjugation light, in conjunction with the sinusoidal phase modulation technology, realizes Ya Nami (10
-10Rice is to 10
-12Rice) precision ground Measuring Object vibration amplitude, and no matter the surface of testee is smooth or coarse all can measuring.
The sub-nm resolution phase conjugation interferometric measuring means of object vibration amplitude of the present invention, its structure as shown in Figure 1.It comprises light source 1, along the linearly polarized light beam G of light source 1 emission
0Working direction on be equipped with first lens, 2, the second lens 3 and beam splitter 5 with light source 1 successively with optical axis O-O ground.Light beam G
0Be divided into transmitted light beam Gt through beam splitter 5
1With folded light beam Gf
1, at transmitted light beam Gt
1Be equipped with polarization beam apparatus 8 successively on the light path of advancing and polarisation transformer 11 shines testee 12.Folded light beam Gf on the reflecting surface of beam splitter 5 relative light sources 1
1Light path on be equipped with reference to reflection attenuation device 4.Along the folded light beam Gf on the reflecting surface of beam splitter 5 relative testees 12
2Light path on be equipped with the 3rd lens 6 and photoelectric apparatus 7.The electric signal of photoelectric apparatus 7 outputs is by amplifier 13 and data collecting card 14 input computing machines 15.On the reflection direction of the polarization beam apparatus 8 relative testee 12 reflectings surface direction vertical, be equipped with the 4th lens 9 with light source 1 optical axis O-O.Focus place at the 4th lens 9 is equipped with photorefractive crystal 10.That is to say the light beam Gp that sees through polarisation transformer 11 by testee 12 reflection backs
2Polarization direction and the light beam GP that sees through for the first time before the polarisation transformer 11
1The polarization direction vertical.Light beam Gp
2Reflect after the 4th lens 9 are assembled to photorefractive crystal 10 by polarization beam apparatus 8.The phase-conjugation light that is produced by photorefractive crystal 10 is polarized beam splitter 8 reflections behind the 4th lens 9 collimations, seeing through polarisation transformer 11 backs shines on the testee 12 for the second time, the phase-conjugation light that reflects by testee 12 behind polarisation transformer 11, the light beam GP before polarization direction and the testee of incident for the first time 12
1The polarization direction is identical.This light beam is back to beam splitter 5 after seeing through polarization beam apparatus 8, is assembled to photoelectric apparatus 7 through the 3rd lens 6 by beam splitter 5 reflections again.
Above said light source 1 be meant and in measurement mechanism of the present invention, can make photorefractive crystal 10 produce LASER Light Source phase-conjugation light, that have a certain specific wavelength, be gas laser, or semiconductor laser, or solid state laser etc.
Said is beam reflection elements with reference to reflection attenuation device 4, and its reflectivity satisfies when measuring with after beam splitter 5 cooperates, and the object light that photoelectric apparatus 7 receives and the beam intensity ratio of reference light approached 1: 1.So with reference to the reflection attenuation device is to plate the parallel flat 401 of analysing light film and anti-reflection film respectively by the two sides to constitute with attenuator 404, as shown in Figure 2.Or plate parallel flat 401 and two polarizers 402,403 of analysing light film and anti-reflection film respectively by the two sides and constitute, as shown in Figure 1.Or only plate the parallel flat of analysing light film and anti-reflection film respectively and constitute by a two sides.
Said photoelectric apparatus 7 is electrooptical devices such as photodiode, or photoelectric cell.
Said polarization beam apparatus 8 is with the orthogonal two-beam in polarization direction separately that is to say, in the present invention, as shown in Figure 1, allows the polarization direction be that the light beam of A sees through, and allows polarization direction another Shu Guang vertical with A be reflected.Be polarization splitting prism, or the polarization parallel flat board etc.
After said photorefractive crystal 10 is meant that light source 1 emitted light beams shines on this photorefractive crystal 10 through above-mentioned each optical element, can produce the photorefractive crystal of self-pumping phase-conjugation light, be barium titanate (BaTiO
3) crystal, or potassium sodium strontium barium niobate (KNSBN) crystal, or the strontium barium niobate crystal etc.
Said polarisation transformer 11 is meant a branch of polarized light by it, by testee 12 reflections, returns the optical element that changes 90 degree once more by its rear polarizer direction, is Faraday rotator, or quarter-wave plate etc.
Structure as shown in Figure 1 is the linearly polarized light G of A when the polarization direction that light source 1 sends
0Behind first lens 2 and second lens, 3 expansion bundles, see through the light beam Gt of beam splitter 5
1, shine on the testee 12 through polarization beam apparatus 8 and polarisation transformer 11.After the light beam that contains a large amount of speckle noises of testee 12 reflections saw through polarisation transformer 11, its polarization direction became the light beam Gp of B
2The polarization direction vertical with polarization direction A.Light beam Gp
2After polarization beam apparatus 8 reflections, assemble to photorefractive crystal 10 by the 4th lens 9.The phase-conjugation light that is produced by photorefractive crystal 10 collimates through the 4th lens 9, by polarization beam apparatus 8 reflections, shine testee 12 after seeing through polarisation transformer 11 again, because phase-conjugation light has the phase compensation characteristic, therefore the phase-conjugation light that is reflected by testee 12 for the second time no longer contains dapple noise.Simultaneously, these phase conjugation light transmission polarisation transformer 11 rear polarizer directions become A again, and this light beam sees through polarization beam apparatus 8 backs by beam splitter 5 reflections, is assembled to photoelectric apparatus 7 by the 3rd lens 6 then, and this Shu Guang is called object light.The linearly polarized light beam G that sends by light source 1
0Folded light beam Gf after beam splitter 5 reflections
1Shine with reference on the reflection attenuation device 4.After seeing through beam splitter 5 again with reference to the folded light beam of reflection attenuation device 4, assemble to photoelectric apparatus 7, be called reference light by reference reflection attenuation device 4 beam reflected by the 3rd lens 6.Reference light and object light interference.After the electric signal that is received back output by photoelectric apparatus 7 was amplified by amplifier 13, data collecting card 14 was stored in the computing machine 15 to carry out data processing after the analog electrical signal of amplifier 13 outputs is converted to digital signal.
I (t)=I
0(t)+S
0(t) cos[zcos (ω
cT+ θ)+α
0+ α (t)], (1) wherein, I
0(t) and S
0(t) be respectively the amplitude of interference signal DC component and AC compounent, α
0Phase place for testee 12 interference signal when static.α (t) is the phase change that testee 12 vibrations are introduced.ω
cBe the frequency of sinusoidal phase modulation, t is the time, and θ is the initial phase of modulation signal.The amplitude z=4 π α/λ of interference signal phase modulation (PM)
0, wherein a is a vibration amplitude to be measured, λ
0Centre wavelength for light source 1.Formula (1) is carried out Fourier transform try to achieve the z value.The vibration amplitude of testee 12
a＝λ
0z/4π。(2) measuring accuracy of z reaches 0.01rad and is easier to realize.If adopting wavelength is the Argon ion laser of 514nm, the measuring accuracy of amplitude is 0.4nm.If the measuring accuracy of z is brought up to 0.001rad, then the measuring accuracy of amplitude is brought up to 0.04nm (4 * 10
-11Rice).
Advantage of the present invention is:
1. owing to contain photorefractive crystal 10 in the measurement mechanism of the present invention, produce phase-conjugation light, can eliminate the speckle noise that testee 12 brings with phase compensation characteristic.Therefore measurement mechanism of the present invention has enlarged the scope of measuring object greatly to no matter being that ganoid or coarse testee 12 all is suitable for.Make the surface of testee 12 expand general more coarse surfaces such as stainless steel, aluminium sheet to by shiny surface near minute surface.
2. owing to contain photorefractive crystal 10 in the measurement mechanism of the present invention, produce phase-conjugation light, can eliminate the speckle noise that testee 12 brings with phase compensation characteristic.Even measured surface is a rough surface, the resolution of its measurement still can reach Ya Nami.Therefore, measuring accuracy height.Even measured surface is a rough surface, measuring accuracy still can reach inferior nanometer scale.
3. measurement mechanism of the present invention is simple in structure, compact, reasonable.
Description of drawings
Fig. 1 is the synoptic diagram of the sub-nm resolution phase conjugation interferometric measuring means of object vibration amplitude of the present invention.
Fig. 2 is for being to be coated with the measurement mechanism synoptic diagram that the parallel flat 401 of analysing light film and anti-reflection film and attenuator 404 constitute respectively by the two sides with reference to the structure of reflection attenuation device 4 in the measurement mechanism of the present invention.
Embodiment:
Structure as shown in Figure 2.Wherein light source 1 is the argon ion gas laser of wavelength 514nm, and beam splitter 5 is parallel flats that light film, another side plating anti-reflection film are analysed in the one side plating.Photoelectricity receiving element 7 is a photodiode.Polarization beam apparatus 8 is polarization splitting prisms.Being coated with the parallel flat 401 of analysing light film and anti-reflection film with reference to reflection attenuation device 4 respectively by the two sides constitutes with attenuator 404.Polarisation transformer 11 is Faraday rotators.Photorefractive crystal 10 is barium titanate (BaTiO
3) crystal.Testee 12 is for having the aluminium sheet of rough surface.The vibration amplitude that records this aluminium sheet is 130nm, and measuring accuracy is 0.5nm, and resolution is less than 5 * 10
-10Rice.
Claims (6)
1. the sub-nm resolution phase conjugation interferometric measuring means of an object vibration amplitude comprises: light source (1), and along the linearly polarized light beam (G of light source (1) emission
0) on the working direction, with the same optical axis of light source (1) (O-O) be equipped with first lens (2), second lens (3) and beam splitter (5) successively; Beam splitter (5) transmitted light beam (Gt
1) light path on be equipped with polarisation transformer (11) and testee (12); Folded light beam (Gf on the reflecting surface of the relative light source (1) of beam splitter (5)
1) light path on be equipped with reference to reflection attenuation device (4); Folded light beam (Gf on the reflecting surface of the relative testee (12) of beam splitter (5)
2) light path on be equipped with the 3rd lens (6) and photoelectric apparatus (7); The electric signal of photoelectric apparatus (7) output is by amplifier (13) and data collecting card (14) input computing machine (15); It is characterized in that between beam splitter (5) and the polarisation transformer (11), be equipped with polarization beam apparatus (8) (O-O) with beam splitter (5) and the same optical axis of polarisation transformer (11); Be equipped with the 4th lens (9) on polarization beam apparatus (8) direction that relatively reflection direction of testee (12) reflecting surface is vertical with light source (1) optical axis (O-O); The focus place of the 4th lens (9) is equipped with photorefractive crystal (10).
2. the sub-nm resolution phase conjugation interferometric measuring means of object vibration amplitude according to claim 1 is characterized in that said light source (1) is a gas laser, or semiconductor laser, or solid state laser.
3. the sub-nm resolution phase conjugation interferometric measuring means of object vibration amplitude according to claim 1 is characterized in that said photorefractive crystal (10) is a barium titanate crystal, or potassium sodium strontium barium niobate crystal, or the strontium barium niobate crystal.
4. the sub-nm resolution phase conjugation interferometric measuring means of object vibration amplitude according to claim 1, it is characterized in that said is to plate the parallel flat (401) of analysing light film and anti-reflection film respectively by the two sides to plate parallel flat (401) and two polarizers (402 of analysing light film and anti-reflection film respectively with attenuator (404) formation or by the two sides with reference to reflection attenuation device (4), 403) constitute, or plate the parallel flat of analysing light film and anti-reflection film respectively by a two sides and constitute.
5. the sub-nm resolution phase conjugation interferometric measuring means of object vibration amplitude according to claim 1 is characterized in that said polarization beam apparatus 8 is polarization splitting prisms, or the polarization parallel flat board.
6. the sub-nm resolution phase conjugation interferometric measuring means of object vibration amplitude according to claim 1 is characterized in that said polarisation transformer 11 is Faraday rotators, or quarter-wave plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00115304 CN1122836C (en) | 2000-03-30 | 2000-03-30 | Sub-nanometer resolution phase conjugate interference measuring device for object vibration amplitude |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00115304 CN1122836C (en) | 2000-03-30 | 2000-03-30 | Sub-nanometer resolution phase conjugate interference measuring device for object vibration amplitude |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1264830A true CN1264830A (en) | 2000-08-30 |
| CN1122836C CN1122836C (en) | 2003-10-01 |
Family
ID=4584771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00115304 Expired - Fee Related CN1122836C (en) | 2000-03-30 | 2000-03-30 | Sub-nanometer resolution phase conjugate interference measuring device for object vibration amplitude |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1122836C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100373146C (en) * | 2005-10-21 | 2008-03-05 | 中国科学院上海光学精密机械研究所 | Method for detecting random vibration of shock isolation device |
| CN106338334A (en) * | 2016-09-26 | 2017-01-18 | 中北大学 | Dual acousto-optic modulation phase conjugate heterodyne detection device |
-
2000
- 2000-03-30 CN CN 00115304 patent/CN1122836C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100373146C (en) * | 2005-10-21 | 2008-03-05 | 中国科学院上海光学精密机械研究所 | Method for detecting random vibration of shock isolation device |
| CN106338334A (en) * | 2016-09-26 | 2017-01-18 | 中北大学 | Dual acousto-optic modulation phase conjugate heterodyne detection device |
| CN106338334B (en) * | 2016-09-26 | 2019-01-15 | 中北大学 | A kind of dual-acousto-optic phase modulation conjugation heterodyne detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1122836C (en) | 2003-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101413783B (en) | Double-frequency laser interferometry apparatus | |
| CN107192336B (en) | Dual-wavelength superheterodyne interference wide-range high-precision real-time displacement measurement system and method | |
| US4688940A (en) | Heterodyne interferometer system | |
| US5724136A (en) | Interferometric apparatus for measuring motions of a stage relative to fixed reflectors | |
| US6654127B2 (en) | Optical delay line | |
| JP2997047B2 (en) | Optical measuring device | |
| CN101033937A (en) | Method and device of light splitting, image-forming and synchronous phase-shifting in optical interferometry. | |
| CN108627100A (en) | Two degrees of freedom heterodyne grating interference measuring system | |
| CN111442715B (en) | Heterodyne laser interferometer based on integral secondary light splitting component | |
| KR20050119672A (en) | Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry | |
| WO2022105533A1 (en) | Interferometer displacement measurement system and method | |
| CN116428966A (en) | Three-degree-of-freedom laser interferometry device | |
| US20050111006A1 (en) | Apparatus and method for ellipsometric measurements with high spatial resolution | |
| CN2419594Y (en) | Optical Measuring Instrument for Object Vibration Amplitude | |
| KR101081370B1 (en) | High resolution optical interferometer with parallel multiple pass configuration and apparatus for measuring distance using the same | |
| CN1122836C (en) | Sub-nanometer resolution phase conjugate interference measuring device for object vibration amplitude | |
| CN106643478A (en) | Displacement measurement optical system | |
| JP5629455B2 (en) | Interferometer | |
| CN113701645B (en) | Two-degree-of-freedom heterodyne grating interferometer | |
| JP2023036027A (en) | Heterodyne light source for use in metrology system | |
| CN106338334B (en) | A kind of dual-acousto-optic phase modulation conjugation heterodyne detection device | |
| CN111006582B (en) | Interference phase shift sensitivity enhancing method based on moire fringes | |
| JP2714754B2 (en) | Waveguide dispersion measurement method and apparatus | |
| RU2742694C1 (en) | Two-wave laser displacement meter | |
| JPS63128211A (en) | Spacing measuring method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |