CN106643478A - Displacement measurement optical system - Google Patents
Displacement measurement optical system Download PDFInfo
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- CN106643478A CN106643478A CN201710123810.XA CN201710123810A CN106643478A CN 106643478 A CN106643478 A CN 106643478A CN 201710123810 A CN201710123810 A CN 201710123810A CN 106643478 A CN106643478 A CN 106643478A
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- light
- prism
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- polarization splitting
- splitting prism
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02011—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a displacement measurement optical system, comprising a laser light source, a first polarized beam splitter, a light guide prism set, a reflector, a polarized conversion element, a second polarized beam splitter, a photoelectric converter and a processing system. According to the displacement measurement optical system, the light output by the light source is split by adopting the polarized beam splitters, polarized light is used as reference light and measurement light, and the displacement of an object is measured based on the laser interferometry principle, so that high-precision measurement of large-range displacement can be realized; and compared with the prior art, the optical system has the advantages that the energy loss of the light output by the light source is low during light splitting, the energy utilization rate of the light source is improved and the optical system has a compact structure.
Description
Technical field
The present invention relates to optical interferometry technical field, more particularly to a kind of displacement measurement optical system.
Background technology
Scientific experiment and the field such as instrument manufacturing in high-accuracy requirement, it is often necessary to which the straight-line displacement amount of target is carried out
The high-acruracy survey of nanometer scale.In existing optical measurement means, the measuring method with degree of precision includes grating scale
Measurement and laser interferometry, though advantage of the optical grating ruler measurement with low cost, its certainty of measurement substantially can only achieve micron
Magnitude；Compared with optical grating ruler measurement, laser interferometry then has the certainty of measurement of nanometer scale.
However, in original laser interferometry system, due to being to laser instrument output light using unpolarized beam splitter
Light splitting is carried out by force, and the light energy that result in about 50% is reflected back laser instrument direction, in turn results in the reduction of optical energy utilization rate；
Therefore visible original laser interferometry system is low to the capacity usage ratio of light source.
The content of the invention
It is an object of the invention to provide a kind of displacement measurement optical system, is realized based on narrow bandwidth laser interferometry principle
High-acruracy survey to large range displacement, and improve the utilization rate to energy of light source.
For achieving the above object, the present invention provides following technical scheme：
A kind of displacement measurement optical system, including LASER Light Source, the first polarization splitting prism, light guiding prism group, speculum,
Polarization conversion device, the second polarization splitting prism, optical-electrical converter and processing system；
First polarization splitting prism is located in the emergent light light path of the LASER Light Source, and the first polarization splitting prism will
Light source light is divided into the two-beam that polarization direction is orthogonal and the direction of propagation is perpendicular；
The light beam of the first polarization splitting prism reflection enters the light guiding prism group described in Jing, in the light guiding prism group
Interior change polarization state, is directed into first plane of incidence for being incident upon second polarization splitting prism；
The another light beam of the first polarization splitting prism transmission described in Jing, goes out after polarization conversion device changes polarization state
The speculum is incident upon, reflected light backtracking is reflected and through polarization conversion device to first polarization splitting prism
After changing polarization direction, second plane of incidence of second polarization splitting prism is incident to, the speculum can be along its light path side
To movement, for connecting testee；
Light beam enters the emergent light formed after second polarization splitting prism, and with the second beam light described second is entered
The emergent light of formation converges and interferes after polarization splitting prism, and interference light is received by the optical-electrical converter；
The processing system is used to be calculated according to the interference fringe and intensity signal of optical-electrical converter record to be treated
Survey the displacement of object.
Alternatively, it is provided with for changing light polarization state in the propagation light path of light beam in the light guiding prism group
Polarization conversion device；
Light beam is incident to second polarization splitting prism Jing after polarization conversion device is transformed to circularly polarized light, described
This Shu Guang is divided into two vertical beam emergent lights of the direction of propagation by the second polarization splitting prism, respectively with the second beam light by described second
Two vertical beam emergent lights of the direction of propagation that polarization splitting prism is divided into converge and interfere；
The optical-electrical converter includes the first optical-electrical converter for receiving first via interference light and for receiving second
Second optical-electrical converter of road interference light；
The processing system specifically for the interference fringe that recorded according to first optical-electrical converter and intensity signal with
And the interference fringe and intensity signal of the second optical-electrical converter record determines the displacement and moving direction of object under test.
Alternatively, the light guiding prism group includes the first right-angle reflecting prism, light guiding prism and the second right-angle reflecting prism；
The right-angle surface of first right-angle reflecting prism is reflecting surface, the of the first polarization splitting prism reflection described in Jing
Light beam is incident by the inclined-plane of first right-angle reflecting prism, and with 45 degree of angles its right-angle surface is incided, and is reflected onto another
Right-angle surface, after be reflected into the light guiding prism；
The inclined-plane of second right-angle reflecting prism is reflecting surface, and the light of light guiding prism outgoing is straight by described second described in Jing
The right-angle surface of corner reflection prism is incident, and with 45 degree of angles its inclined-plane is incided, after be reflected onto second polarization splitting prism
First plane of incidence.
Alternatively, the light guiding prism is located at side of first polarization splitting prism towards the speculum, in institute
State light guiding prism to be provided for changing the polarization conversion device of the polarization state of light towards the side of the speculum.
Alternatively, set between second plane of incidence and first polarization splitting prism of second polarization splitting prism
Put the polarization conversion device for changing the polarization direction of light.
Alternatively, it is provided for changing light between the inclined-plane and the light guiding prism of first right-angle reflecting prism
The polarization conversion device of polarization state.
Alternatively, the polarisation transformation unit for arranging between the inclined-plane and the light guiding prism of first right-angle reflecting prism
Part is quarter-wave plate, 1/2nd wave plates or 1/8th wave plates；
The light guiding prism towards the speculum a side surface arrange polarization conversion device be quarter-wave
Piece；
What is arranged between second plane of incidence of first polarization splitting prism and second polarization splitting prism is inclined
The inverting element that shakes is 1/2nd wave plates.
Alternatively, the speculum is right-angle reflecting prism or level crossing.
Alternatively, with the connection of face laminating type between each optical element,
Alternatively, it is fixedly connected by optics glue laminating or by frame for movement between the respective face of each optical element.
As shown from the above technical solution, it is displacement measurement optical system provided by the present invention, including LASER Light Source, first inclined
Shake Amici prism, light guiding prism group, speculum, polarization conversion device, the second polarization splitting prism, optical-electrical converter and processing system
System.
The illumination that LASER Light Source sends is mapped to the first polarization splitting prism, is divided into that polarization direction is orthogonal and the direction of propagation is hung down
Straight two-beam；The light beam of the polarization splitting prisms of Jing first reflection changes into light guiding prism group and polarizes as reference light
After state, first plane of incidence for being incident upon the second polarization splitting prism is directed into；The second of the polarization splitting prisms of Jing first transmission
The outgoing of beam light is to the speculum being connected with testee, reflected light backtracking to the first polarization splitting prism, in the first polarization
The polarization conversion device arranged in light path between Amici prism and speculum changes the polarization direction for propagating light, makes to be returned by speculum
The light for returning returns to the first polarization splitting prism and is reflected, and reflected light is incident to the second polarization spectro behind altered polarization direction
Second plane of incidence of prism；Light beam enters the emergent light formed after the second polarization splitting prism, and with the second beam light the is entered
The emergent light formed after two polarization splitting prisms converges and interferes, and interference light is received by optical-electrical converter, processing system according to
The interference fringe and intensity signal of optical-electrical converter record calculates the displacement for obtaining object under test.
Displacement measurement optical system of the present invention, carries out light splitting, with polarised light using polarization beam splitter to light source output light
As reference light and measurement light, the measurement to ohject displacement is realized based on laser interferometry principle, be capable of achieving to position on a large scale
The high-acruracy survey of shifting, and compared with prior art, it is little to light source output light energy losses during the light splitting of this optical system, improve
Energy of light source utilization rate.
Description of the drawings
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of schematic diagram of displacement measurement optical system provided in an embodiment of the present invention.
Specific embodiment
In order that those skilled in the art more fully understand the technical scheme in the present invention, below in conjunction with of the invention real
The accompanying drawing in example is applied, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described enforcement
Example is only a part of embodiment of the invention, rather than the embodiment of whole.Based on the embodiment in the present invention, this area is common
The every other embodiment that technical staff is obtained under the premise of creative work is not made, should all belong to protection of the present invention
Scope.
The embodiment of the present invention provides a kind of displacement measurement optical system, including LASER Light Source, the first polarization splitting prism, leads
Light prism group, speculum, polarization conversion device, the second polarization splitting prism, optical-electrical converter and processing system；
First polarization splitting prism is located in the emergent light light path of the LASER Light Source, and the first polarization splitting prism will
Light source light is divided into the two-beam that polarization direction is orthogonal and the direction of propagation is perpendicular；
The light beam of the first polarization splitting prism reflection enters the light guiding prism group described in Jing, in the light guiding prism group
Interior change polarization state, is directed into first plane of incidence for being incident upon second polarization splitting prism；
The another light beam of the first polarization splitting prism transmission described in Jing, goes out after polarization conversion device changes polarization state
The speculum is incident upon, reflected light backtracking is reflected and through polarization conversion device to first polarization splitting prism
After changing polarization direction, second plane of incidence of second polarization splitting prism is incident to, the speculum can be along its light path side
To movement, for connecting testee；
Light beam enters the emergent light formed after second polarization splitting prism, and with the second beam light described second is entered
The emergent light of formation converges and interferes after polarization splitting prism, and interference light is received by the optical-electrical converter；
The processing system is used to be calculated according to the interference fringe and intensity signal of optical-electrical converter record to be treated
Survey the displacement of object.
Wherein, the first polarization splitting prism and the second polarization splitting prism are to be coated with multi-layer film structure on the inclined-plane of prism,
And with the glued cube prism for being formed in inclined-plane.First plane of incidence and second plane of incidence of the second polarization splitting prism is respectively
Two outer surfaces of two polarization splitting prisms.
The light guiding prism group refers to the optical module being made up of multiple prisms, for guiding the propagation of light.
The polarization conversion device refers to polarization direction or the polarization state by changing the phase difference of light to change light
Optical element.
The present embodiment displacement measurement optical system, it is orthogonal that light source output light is divided into polarization direction by the first polarization splitting prism
And the vertical two-beam in the direction of propagation；The polarization splitting prisms of Jing first reflection light beam as reference light, into leaded light
Prism group changes after polarization state, is directed into first plane of incidence for being incident upon the second polarization splitting prism；The polarization spectros of Jing first
To the speculum being connected with testee, reflected light backtracking is to the first polarization spectro rib for second beam light outgoing of prism transmission
Mirror, the polarization conversion device arranged in light path between the first polarization splitting prism and speculum changes the polarization side for propagating light
To, making the light returned by speculum return to the first polarization splitting prism and be reflected, reflected light enters behind altered polarization direction
It is incident upon second plane of incidence of the second polarization splitting prism；Light beam enters the emergent light formed after the second polarization splitting prism,
The emergent light formed into after the second polarization splitting prism with the second beam light converges and interferes, and interference light is connect by optical-electrical converter
Receive, the interference fringe and intensity signal that processing system is recorded according to optical-electrical converter calculates the displacement for obtaining object under test.
The present embodiment displacement measurement optical system, light splitting is carried out using polarization beam splitter to light source output light, to polarize
Light realizes the measurement to ohject displacement as reference light and measurement light based on laser interferometry principle, is capable of achieving on a large scale
The high-acruracy survey of displacement, and compared with prior art, it is little to light source output light energy losses during the light splitting of this optical system, carry
High energy of light source utilization rate, while bulk is compact.
The present embodiment displacement measurement optical system is elaborated below in conjunction with the accompanying drawings.
Fig. 1 is refer to, a kind of schematic diagram of the displacement measurement optical system provided for the present embodiment.The present embodiment displacement is surveyed
Amount optical system include LASER Light Source 1, the first polarization splitting prism 2, light guiding prism group 3, speculum 4, polarization conversion device, the
Two polarization splitting prisms 5, optical-electrical converter and processing system 9.
First polarization splitting prism 2 is located in the emergent light light path of LASER Light Source 1, and the first polarization splitting prism 2 is by light source
Output light is divided into the two-beam that polarization direction is orthogonal and the direction of propagation is vertical, respectively P light and S light.
The light beam of the reflection of the first polarization splitting prisms of Jing 2 is that P light enters light guiding prism group 3, and Jing light guiding prisms group 3 is guided
First plane of incidence of the second polarization splitting prism 5 is incident to, as reference light.
It is specific in the present embodiment, Fig. 1 is referred to, the light guiding prism group 3 includes the first right-angle reflecting prism 30, leaded light
The right-angle reflecting prism 32 of prism 31 and second.
Wherein, the right-angle surface of the first right-angle reflecting prism 30 is reflecting surface, and the of the reflection of the first polarization splitting prisms of Jing 2
Light beam is incident by the inclined-plane of first right-angle reflecting prism 30, and with 45 degree of angles its right-angle surface is incided, and is reflected onto another
One right-angle surface, after be reflected into the light guiding prism 31；The inclined-plane of the second right-angle reflecting prism 32 is reflecting surface, is led described in Jing
The light of the outgoing of light prism 31 is incident by the right-angle surface of second right-angle reflecting prism 32, and with 45 degree of angles its inclined-plane is incided, after
It is reflected onto first plane of incidence of second polarization splitting prism 5.
The polarization for changing light polarization state is provided with the propagation light path of light beam in the light guiding prism group 3
Inverting element 60；Light beam is directed into and is incident upon second polarization Jing after polarization conversion device 60 is transformed to circularly polarized light
Amici prism 5.This Shu Guang is divided into two vertical beam emergent lights of the direction of propagation by the second polarization splitting prism 5, what formation was reflected
Emergent light and the emergent light all the way that transmits all the way, as reference light.
Polarization conversion device 60 may be provided between the inclined-plane and the light guiding prism 31 of the first right-angle reflecting prism 30, its
In, polarization conversion device 60 can be quarter-wave plate, 1/2nd wave plates or 1/8th wave plates.
Second beam light S light of the transmission of the first polarization splitting prisms of Jing 2, outgoing to speculum 4, the speculum 4 may move,
For being connected with testee.The speculum 4 can be using right-angle reflecting prism or level crossing.
In concrete the present embodiment, the light guiding prism 31 in light guiding prism group 3 is located at the first polarization splitting prism 2 towards described
The side of speculum 4, is provided for changing the polarization state of light in the light guiding prism 31 towards the side of the speculum 4
Polarization conversion device 61.
Second beam light S light of the transmission of the first polarization splitting prisms of Jing 2, through light guiding prism 31 and polarisation transformation unit 61, will
The S light of propagation becomes circularly polarized light, and outgoing is to speculum 4.The light returned by speculum 4 again passes by polarization conversion device 61 and becomes
Into P light, into light guiding prism 31, the first polarization splitting prism 2 is again incident on, and is reflected by the first polarization splitting prism 2,
It is incident to second plane of incidence of the second polarization splitting prism 5.
Wherein, polarization conversion device 61 can be quarter-wave plate.
Arrange between second plane of incidence and first polarization splitting prism 2 of second polarization splitting prism 5 and use
In the polarization conversion device 62 of the polarization direction for changing light.Polarization conversion device 62 can be 1/2nd wave plates.It is inclined by first
The P light of the Amici prism 2 that shakes reflection rotates 45 degree, enters and inject the second polarization spectro through polarization conversion device 62, polarization direction
Prism 5.The Shu Guang is divided into two vertical beam emergent lights of the direction of propagation by the second polarization splitting prism 5, and formation is reflected all the way
Emergent light and the emergent light all the way for transmiting, as measurement light.
As two beam emergent lights of measurement light, converge with the two beam emergent lights as reference light interfere respectively.Enter one
Step receives wherein any interference light all the way using optical-electrical converter, then according to the interference fringe and light intensity letter of optical-electrical converter record
Breath can calculate the displacement for obtaining object under test.
Therefore, the present embodiment displacement measurement optical system, two beams polarization is divided into by polarization beam splitter by light source output light
The orthogonal polarised light in direction, measures, in light splitting to light source output respectively as reference light and measurement light to ohject displacement
Light energy losses are little, can improve to energy of light source utilization rate；And propagated by prism element guiding during beam propagation,
Energy loss of the light in communication process can be reduced, the utilization rate to energy of light source can be improved, simultaneity factor physical dimension is compact.
In a kind of concrete application of this displacement measurement optical system, including for receiving the first light of first via interference light
Electric transducer 7 and the second optical-electrical converter 8 for receiving the second tunnel interference light.
The interference fringe and intensity signal of interference light all the way are recorded by the first optical-electrical converter 7, is turned by the second photoelectricity
Parallel operation 8 records the interference fringe and intensity signal of another road interference light, and the processing system 9 is specifically for according to first light
The interference fringe and intensity signal of electric transducer record, and the interference fringe and light intensity letter of second optical-electrical converter record
Breath determines the displacement and moving direction of object under test.
Therefore, the present embodiment displacement measurement optical system, is divided into two beams inclined by polarization beam splitter by light source output light
Light shake respectively as reference light and measurement light, the measurement to ohject displacement is not only realized, is also capable of achieving to object moving direction
Measurement.
Further, can be with face laminating side in this optical system between each optical element in the various embodiments described above
Formula connects, and makes this optical system structure compact, takes up room little.Optics sticker can be passed through between the respective face of each optical element
Close.Or can also be fixedly connected by frame for movement, by mechanical structured member fixed space position.
Or, this optical system also can be arranged with being spaced apart formula with certain space between each optical element.Each light
Learning element can be fixedly connected by frame for movement, by mechanical structured member fixed space position.
Further, in the various embodiments described above, the light of light can be received in the setting of the side of optical-electrical converter receiving light
Element is learned, to improve the acceptance rate to interference light, the contrast of interference image is improved.
Therefore, displacement measurement optical system of the present invention, two beams polarization is divided into by polarization beam splitter by light source output light
Light is measured respectively as reference light and measurement light to ohject displacement, is capable of achieving the high-acruracy survey to large range displacement, is surveyed
Accuracy of measurement can reach nanoscale and Subnano-class；Also, it is little to light source output light energy losses during the light splitting of this optical system, and
Propagated by prism element guiding during beam propagation, it is possible to decrease energy loss of the light in communication process, so as to improve
Energy of light source utilization rate, and then more fully using the dynamic range of electrooptical device finally can realize to measured object
The lifting of displacement body detection accuracy.
A kind of displacement measurement optical system provided by the present invention is described in detail above.Tool used herein
Body example is set forth to the principle and embodiment of the present invention, and the explanation of above example is only intended to help and understands this
Bright method and its core concept.It should be pointed out that for those skilled in the art, without departing from the present invention
On the premise of principle, some improvement and modification can also be carried out to the present invention, these are improved and modification also falls into right of the present invention
In the protection domain of requirement.
Claims (10)
1. a kind of displacement measurement optical system, it is characterised in that including LASER Light Source, the first polarization splitting prism, light guiding prism
Group, speculum, polarization conversion device, the second polarization splitting prism, optical-electrical converter and processing system；
First polarization splitting prism is located in the emergent light light path of the LASER Light Source, and the first polarization splitting prism is by light source
Light is divided into the two-beam that polarization direction is orthogonal and the direction of propagation is perpendicular；
The light beam of the first polarization splitting prism reflection enters the light guiding prism group described in Jing, changes in the light guiding prism group
Become polarization state, be directed into first plane of incidence for being incident upon second polarization splitting prism；
Described in Jing the first polarization splitting prism transmission another light beam, through polarization conversion device change polarization state after outgoing extremely
The speculum, reflected light backtracking is reflected and is changed through polarization conversion device to first polarization splitting prism
Behind polarization direction, second plane of incidence of second polarization splitting prism is incident to, the speculum can be moved along its optical path direction
It is dynamic, for connecting testee；
Light beam enters the emergent light formed after second polarization splitting prism, with the second beam light into the described second polarization
The emergent light of formation converges and interferes after Amici prism, and interference light is received by the optical-electrical converter；
The processing system is used to calculate acquisition determinand according to the interference fringe and intensity signal of optical-electrical converter record
The displacement of body.
2. displacement measurement optical system according to claim 1, it is characterised in that the first beam in the light guiding prism group
The polarization conversion device for changing light polarization state is provided with the propagation light path of light；
Light beam is incident to second polarization splitting prism Jing after polarization conversion device is transformed to circularly polarized light, and described second
This Shu Guang is divided into two vertical beam emergent lights of the direction of propagation by polarization splitting prism, is polarized by described second with the second beam light respectively
Two vertical beam emergent lights of the direction of propagation that Amici prism is divided into converge and interfere；
The optical-electrical converter includes the first optical-electrical converter for receiving first via interference light and does for receiving the second tunnel
Relate to the second optical-electrical converter of light；
The processing system is specifically for the interference fringe that recorded according to first optical-electrical converter and intensity signal and institute
The interference fringe and intensity signal for stating the second optical-electrical converter record determines the displacement and moving direction of object under test.
3. displacement measurement optical system according to claim 1 and 2, it is characterised in that the light guiding prism group includes the
One right-angle reflecting prism, light guiding prism and the second right-angle reflecting prism；
The right-angle surface of first right-angle reflecting prism is reflecting surface, the first beam of the first polarization splitting prism reflection described in Jing
Light is incident by the inclined-plane of first right-angle reflecting prism, and with 45 degree of angles its right-angle surface is incided, and is reflected onto another right angle
Face, after be reflected into the light guiding prism；
The inclined-plane of second right-angle reflecting prism is reflecting surface, and the light of light guiding prism outgoing described in Jing is anti-by second right angle
The right-angle surface for penetrating prism is incident, and with 45 degree of angles its inclined-plane is incided, after be reflected onto the first of second polarization splitting prism
The plane of incidence.
4. displacement measurement optical system according to claim 3, it is characterised in that the light guiding prism is located at described first
Polarization splitting prism is provided for changing in the light guiding prism towards the side of the speculum towards the side of the speculum
The polarization conversion device of the polarization state of darkening.
5. displacement measurement optical system according to claim 4, it is characterised in that in second polarization splitting prism
The polarization conversion device of the polarization direction of change light is provided between second plane of incidence and first polarization splitting prism.
6. displacement measurement optical system according to claim 3, it is characterised in that in first right-angle reflecting prism
The polarization conversion device of the polarization state of change light is provided between inclined-plane and the light guiding prism.
7. the displacement measurement optical system according to any one of claim 4-6, it is characterised in that anti-at first right angle
Penetrate between the inclined-plane of prism and the light guiding prism arrange polarization conversion device be quarter-wave plate, 1/2nd wave plates or
The wave plate of person 1/8th；
The light guiding prism towards the speculum a side surface arrange polarization conversion device be quarter-wave plate；
The polarization arranged between second plane of incidence of first polarization splitting prism and second polarization splitting prism becomes
Element is changed for 1/2nd wave plates.
8. displacement measurement optical system according to claim 1, it is characterised in that the speculum is right-angle reflecting prism
Or level crossing.
9. displacement measurement optical system according to claim 1, it is characterised in that with face laminating side between each optical element
Formula connects, or is arranged with having between each optical element in the form of space interval.
10. displacement measurement optical system according to claim 9, it is characterised in that between the respective face of each optical element
It is fixedly connected by optics glue laminating or by frame for movement.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108286943A (en) * | 2018-01-15 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | Displacement measurement optical system applied to lithography system workbench |
| CN109520428A (en) * | 2018-11-09 | 2019-03-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of displacement measurement optical system |
| CN111288955A (en) * | 2020-03-07 | 2020-06-16 | 中国计量科学研究院 | Integrated strain calibration system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101916957B (en) * | 2010-08-05 | 2012-03-07 | 哈尔滨工业大学 | Acousto-optic modulation-based 2mu m polarized orthogonal laser emitting system applied to laser heterodyne interferometer |
| CN105004273B (en) * | 2015-06-29 | 2017-06-16 | 华中科技大学 | A kind of laser interferometer displacement measuring system |
| CN104964649B (en) * | 2015-07-20 | 2017-07-28 | 哈尔滨工业大学 | Grating beam splitting formula simultaneous phase-shifting interferometric measuring means and method |
| CN105300274B (en) * | 2015-11-13 | 2018-06-12 | 山东神戎电子股份有限公司 | A kind of heterodyne interferometry system convenient for adjusting splitting ratio |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108286943A (en) * | 2018-01-15 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | Displacement measurement optical system applied to lithography system workbench |
| CN109520428A (en) * | 2018-11-09 | 2019-03-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of displacement measurement optical system |
| CN111288955A (en) * | 2020-03-07 | 2020-06-16 | 中国计量科学研究院 | Integrated strain calibration system |
| CN111288955B (en) * | 2020-03-07 | 2021-06-29 | 中国计量科学研究院 | Integrated strain calibration system |
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