CN102679912A - Auto-collimator based on differential comparison principle - Google Patents
Auto-collimator based on differential comparison principle Download PDFInfo
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Abstract
The invention provides an auto-collimator based on a differential comparison principle and relates to an auto-collimator and aims to solve the problem of the low measurement accuracy of the existing auto-collimator. A polarizer, a condenser, a pinhole and a spectroscope are sequentially arranged on an optical axis of the light emitted from a laser; a laser beam emitted from the laser is transmitted by the polarizer, then enters into the condenser, and is focused to the pinhole through the condenser; the light passing through the pinhole enters into the spectroscope; the light reflected by the spectroscope enters into a polarization spectroscope; the light beam transmitted by the polarization spectroscope enters into a collimating mirror; the light beam transmitted by the collimating mirror enters into a plane mirror and a lambda/4 wave plate; the light beam transmitted by the lambda/4 wave plate enters into a pyramid prism; the light beam reflected by a plane reflecting mirror turns back along an incident light path and enters into a first area array CCD (charge coupled device) photosurface; the light beam entered into the pyramid prism is reflected and subsequently turns back along the incident light path and then enters into the spectroscope; and the light beam reflected by the polarization spectroscope enters into a photosurface of a second area array CCD. The auto-collimator based on the differential comparison principle provided by the invention serves as an auto-collimator.
Description
Technical field
The present invention relates to a kind of autocollimator, particularly a kind of autocollimator based on differential comparison principle.
Background technology
Autocollimator is to utilize the optical autocollimating principle, is used for small angle measurement or can be exchanged into the metrology and measurement instrument a kind of commonly used of small angle measurement.It has unique advantage in realizing low-angle multidimensional, non-cpntact measurement, angular detection, the platform plane degree that is widely used in optical element detects, mechanical axis system rock and the precision measurements such as linearity detection of precise guide rail in.
According to Fig. 1; The autocollimator principle of work is following: on the cross-graduation plate of the light beam that light source sends on condenser evenly throws light on the focal plane that is positioned at object lens; The cruciform groove is behind spectroscope, object lens and catoptron; Light returns through object lens and spectroscope, and the cruciform groove is imaged on the area array CCD device, and the area array CCD device is placed on the focal plane of object lens.
According to Fig. 2, when catoptron F had small angle θ to change, incident ray and reflection ray angle changed 2 θ, so as O the displacement of d, at this moment relation displacement and catoptron bias angle theta between were arranged with respect to catoptron during perpendicular to optical axis as O ':
d＝f·tan(2θ) (1)
Wherein, f is the focal length of collimator objective, f=860mm in this test.Because of measured angle is very little, formula (1) can be reduced to:
D=f2 θ; That is θ=d/2f (2)
Under the situation of two dimension, horizontal direction displacement x and the vertical direction displacement y of the picture O in the time of need considering as O ' with respect to catoptron perpendicular to optical axis simultaneously.Can obtain the two-dimensional deflection angle θ of catoptron through the measure two dimensional displacement
x, θ
y
Autocollimator technical development at present mainly concentrates on how to improve measurement range, how to improve measuring accuracy, how to improve aspects such as measuring distance.Generally in 30m, uncertainty of measurement is about 0.5 " to 3 " for the maximum measuring distance of autocollimator at present.Along with the increase of measuring distance, the measurement environment fluctuation directly influences measuring accuracy, causes uncertainty of measurement to increase, and the present invention mainly solves the raising measuring distance, reduces the influence of environmental fluctuating to measuring accuracy, improves the measuring accuracy of autocollimator.
Summary of the invention
The present invention seeks to have proposed a kind of autocollimator based on differential comparison principle in order to solve the present not high problem of autocollimator measuring accuracy.
A kind of autocollimator of the present invention based on differential comparison principle, it comprises laser instrument, the polarizer, condenser, pin hole, spectroscope, polarization spectroscope, collimating mirror, λ/4 wave plates, plane mirror, prism of corner cube, first area array CCD and second area array CCD;
On the optical axis of the light that laser instrument is launched, set gradually the polarizer, condenser, pin hole and spectroscope; Laser instrument emitted laser bundle is incident to condenser after polarizer transmission; Focus to pin hole through condenser, see through pin hole light beam afterwards and be incident to spectroscope, the light beam after the spectroscope reflection is incident to polarization spectroscope; Light beam through the polarization spectroscope transmission is incident to collimating mirror; Light beam through the collimating mirror transmission is incident to plane mirror and λ/4 wave plates, is incident to prism of corner cube through the light beam of λ/4 wave plate transmissions
Return and be incident to polarization spectroscope through the plane mirror beam reflected along input path; Be transmitted through spectroscope through polarization spectroscope, be incident to the photosurface of first area array CCD through the light beam of spectroscope transmission;
Return along input path after being incident to the beam reflection of prism of corner cube, in order through λ/4 wave plates with after the collimating mirror transmission, be incident to polarization spectroscope, the light beam after the polarization spectro mirror reflection is incident to the photosurface of second area array CCD.
The invention has the advantages that: second area array CCD, 2 epigraphs are as benchmark image, and the light path environmental facies on this light path and first area array CCD 1 carry out Difference Calculation through the image to two-way light together, can eliminate because the error that optical path disturbance is introduced.In 30m, uncertainty of measurement is 0.1 at measuring distance for autocollimator of the present invention " about, measuring accuracy improved.The present invention is applicable to the application of the light path of big measuring distance.
Description of drawings
Fig. 1 is existing autocollimation system principle structural representation, and A is a light source among the figure, and B is a condenser, and C is a cross-line graticule, and D is a spectroscope, and E is object lens, and F is a catoptron.
Fig. 2 is the index path of existing measuring system, and among the figure, M is a catoptron, and P is object lens, and Q is the focal plane.
Fig. 3 is the structural representation of the autocollimator based on differential comparison principle of the present invention.
Embodiment
Embodiment one: combine Fig. 3 that this embodiment is described; A kind of autocollimator of the present invention based on differential comparison principle, it comprises laser instrument 1, the polarizer 2, condenser 3, pin hole 4, spectroscope 5, polarization spectroscope 6, collimating mirror 7, λ/4 wave plate 8, plane mirror 9, prism of corner cube 10, first area array CCD 11 and second area array CCD 12;
On the optical axis of the light that laser instrument 1 is launched, set gradually the polarizer 2, condenser 3, pin hole 4 and spectroscope 5; Laser instrument 1 emitted laser bundle is incident to condenser 3 after the polarizer 2 transmissions; Focus to pin hole 4 through condenser 3, see through pin hole 4 light beam afterwards and be incident to spectroscope 5, the light beam after spectroscope 5 reflections is incident to polarization spectroscope 6; Light beam through polarization spectroscope 6 transmissions is incident to collimating mirror 7; Light beam through collimating mirror 7 transmissions is incident to plane mirror 9 and λ/4 wave plates 8, is incident to prism of corner cube 10 through the light beam of λ/4 wave plates, 8 transmissions
Return and be incident to polarization spectroscope 6 through plane mirror 9 beam reflected along input path; Be transmitted through spectroscope 5 through polarization spectroscope 6, be incident to the photosurface of first area array CCD 11 through the light beam of spectroscope 5 transmissions;
Return along input path after being incident to the beam reflection of prism of corner cube 10, in order through λ/4 wave plates 8 with after collimating mirror 7 transmissions, be incident to polarization spectroscope 6, the light beam after polarization spectroscope 6 reflections is incident to the photosurface of second area array CCD 12.
The light of prism of corner cube 10 vertical reflections arrives polarization spectroscope 6, twice and cooperates with polarization spectroscope 6 through λ/4 wave plates 8, reflex on second area array CCD 2 through λ/4 wave plate 8 in the present embodiment.And directly impinge upon on first area array CCD 1 through polarization spectroscope 6 by the light of plane mirror 9 reflections.
Second area array CCD, 2 epigraphs are as benchmark image, and the light path environmental facies on this light path and first area array CCD 1 carry out Difference Calculation through the image to two-way light together, can eliminate because the error that optical path disturbance is introduced.
Embodiment two: this embodiment is further specifying the described autocollimator based on differential comparison principle of embodiment one; Prism of corner cube 10 is arranged on the optical axis of collimating mirror 7; The reflecting surface of the reflecting surface of prism of corner cube 10 and plane mirror 9 is positioned on the same plane; And be fixedly connected, prism of corner cube 10 can be done the one dimension rectilinear motion along the optical axis of collimating mirror 7.
Prism of corner cube 10 can move along with plane mirror 9 together like this.
Embodiment three: this embodiment is that the moving range of prism of corner cube 10 is 0 to 80 meter to the further specifying of the described autocollimator based on differential comparison principle of embodiment two.
Prism of corner cube 10 is fixedly connected with plane mirror 9, so prism of corner cube 10 is being with plane mirror 9 and measured target to move together.
Embodiment four: this embodiment is that the splitting ratio of prism of corner cube 10 and plane mirror 9 is 1: 1 or 1: 2 to the further specifying of the described autocollimator based on differential comparison principle of embodiment one.
Embodiment five: this embodiment is that the splitting ratio of spectroscope 5 is 1: 1 to the further specifying of the described autocollimator based on differential comparison principle of embodiment one.
Embodiment six: this embodiment is that the polarization angle and the polarization spectroscope 6 of the polarizer 2 are complementary to the further specifying of the described autocollimator based on differential comparison principle of embodiment one.
Embodiment seven: this embodiment is that the light wavelength of the light wavelength of the light wavelength of laser instrument 1 wavelength of light emitted, the polarizer 2 transmissions, spectroscope 5 reflections, the light wavelength of polarization spectroscope 6 reflections and prism of corner cube 10 reflections is 525 nanometers to the further specifying of the described autocollimator based on differential comparison principle of embodiment one.
The structure of the autocollimator based on differential comparison principle of the present invention is not limited to the described concrete structure of above-mentioned each embodiment, can also be the reasonable combination of the described technical characterictic of above-mentioned each embodiment.
Claims (7)
1. autocollimator based on differential comparison principle; It is characterized in that it comprises laser instrument (1), the polarizer (2), condenser (3), pin hole (4), spectroscope (5), polarization spectroscope (6), collimating mirror (7), λ/4 wave plates (8), plane mirror (9), prism of corner cube (10), first area array CCD (11) and second area array CCD (12);
On the optical axis of the light that laser instrument (1) is launched, set gradually the polarizer (2), condenser (3), pin hole (4) and spectroscope (5); Laser instrument (1) emitted laser bundle is incident to condenser (3) after the polarizer (2) transmission; Focus to pin hole (4) through condenser (3), see through pin hole (4) light beam afterwards and be incident to spectroscope (5), the light beam after spectroscope (5) reflection is incident to polarization spectroscope (6); Light beam through polarization spectroscope (6) transmission is incident to collimating mirror (7); Light beam through collimating mirror (7) transmission is incident to plane mirror (9) and λ/4 wave plates (8), is incident to prism of corner cube (10) through the light beam of λ/4 wave plates (8) transmission
Return and be incident to polarization spectroscope (6) through plane mirror (9) beam reflected along input path; Be transmitted through spectroscope (5) through polarization spectroscope (6), be incident to the photosurface of first area array CCD (11) through the light beam of spectroscope (5) transmission;
Return along input path after being incident to the beam reflection of prism of corner cube (10); Be incident to polarization spectroscope (6) through λ/4 wave plates (8) with after collimating mirror (7) transmission in order, the light beam after polarization spectroscope (6) reflection is incident to the photosurface of second area array CCD (12).
2. the autocollimator based on differential comparison principle according to claim 1; It is characterized in that; Prism of corner cube (10) is arranged on the optical axis of collimating mirror (7); The reflecting surface of the reflecting surface of prism of corner cube (10) and plane mirror (9) is positioned on the same plane, and is fixedly connected, and prism of corner cube (10) can be done the one dimension rectilinear motion along the optical axis of collimating mirror (7).
3. the autocollimator based on differential comparison principle according to claim 2 is characterized in that, the moving range of prism of corner cube (10) is 0 to 80 meter.
4. the autocollimator based on differential comparison principle according to claim 1 is characterized in that, the splitting ratio of prism of corner cube (10) and plane mirror (9) is 1: 1 or 1: 2.
5. the autocollimator based on differential comparison principle according to claim 1 is characterized in that, the splitting ratio of spectroscope (5) is 1: 1.
6. the autocollimator based on differential comparison principle according to claim 1 is characterized in that, the polarization angle of the polarizer (2) and polarization spectroscope (6) are complementary.
7. the autocollimator based on differential comparison principle according to claim 1; It is characterized in that the light wavelength of the light wavelength of the light wavelength of laser instrument (1) wavelength of light emitted, the polarizer (2) transmission, spectroscope (5) reflection, the light wavelength of polarization spectroscope (6) reflection and prism of corner cube (10) reflection is 525 nanometers.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103471562A (en) * | 2013-09-09 | 2013-12-25 | 北京航天计量测试技术研究所 | Auto-collimation measurement method and device for long-distance dynamic contact ratio of quasi parallel light |
| CN104776983A (en) * | 2015-04-14 | 2015-07-15 | 成都太科光电技术有限责任公司 | Polarized laser auto-collimation tester |
| CN106052596A (en) * | 2016-06-03 | 2016-10-26 | 北京理工大学 | High-precision photoelectric auto-collimator based on far exit pupil and small diameter ratio design |
| CN106840045A (en) * | 2017-01-06 | 2017-06-13 | 中国科学院光电研究院 | The accuracy detecting device and its detection method of a kind of autocollimator |
| CN107421470A (en) * | 2017-05-25 | 2017-12-01 | 哈尔滨工业大学 | A kind of two-way autocollimator |
| CN108061527A (en) * | 2017-12-20 | 2018-05-22 | 中国科学院长春光学精密机械与物理研究所 | A kind of two-dimensional laser autocollimator of anti-air agitation |
| CN108444397A (en) * | 2018-05-18 | 2018-08-24 | 北方民族大学 | New Displacement Transducer and its measurement method |
| CN108716887A (en) * | 2018-05-18 | 2018-10-30 | 北方民族大学 | Differential type displacement sensor and its measurement method |
| CN109579780A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device and method |
| CN114545644A (en) * | 2022-02-22 | 2022-05-27 | 湖北优光科学仪器有限公司 | High-precision corner-adjustable optical fiber collimation system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4074937A (en) * | 1976-02-09 | 1978-02-21 | Zygo Corporation | Optical measuring device |
| CN1587898A (en) * | 2004-09-02 | 2005-03-02 | 哈尔滨工业大学 | Three differential confocal microscopic imaging method and device |
| CN1687702A (en) * | 2005-05-27 | 2005-10-26 | 哈尔滨工业大学 | 2D photoelectric auto collimation equipment and measuring method based on dynamic differential compensation process |
| CN201050980Y (en) * | 2007-05-21 | 2008-04-23 | 天津市奥特梅尔光电科技有限公司 | Dual axis photoelectric autocollimation |
| CN101852594A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Super-resolution laser polarization differential confocal imaging method and device |
-
2012
- 2012-05-24 CN CN201210163692.2A patent/CN102679912B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4074937A (en) * | 1976-02-09 | 1978-02-21 | Zygo Corporation | Optical measuring device |
| CN1587898A (en) * | 2004-09-02 | 2005-03-02 | 哈尔滨工业大学 | Three differential confocal microscopic imaging method and device |
| CN1687702A (en) * | 2005-05-27 | 2005-10-26 | 哈尔滨工业大学 | 2D photoelectric auto collimation equipment and measuring method based on dynamic differential compensation process |
| CN201050980Y (en) * | 2007-05-21 | 2008-04-23 | 天津市奥特梅尔光电科技有限公司 | Dual axis photoelectric autocollimation |
| CN101852594A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Super-resolution laser polarization differential confocal imaging method and device |
Non-Patent Citations (2)
| Title |
|---|
| 张俊杰等: "CCD自准直仪示值漂移的自校准系统", 《计量学报》 * |
| 邹九贵等: "高精度二维自准直仪的研制", 《新技术与新仪器》 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103471562A (en) * | 2013-09-09 | 2013-12-25 | 北京航天计量测试技术研究所 | Auto-collimation measurement method and device for long-distance dynamic contact ratio of quasi parallel light |
| CN104776983A (en) * | 2015-04-14 | 2015-07-15 | 成都太科光电技术有限责任公司 | Polarized laser auto-collimation tester |
| CN106052596A (en) * | 2016-06-03 | 2016-10-26 | 北京理工大学 | High-precision photoelectric auto-collimator based on far exit pupil and small diameter ratio design |
| CN106052596B (en) * | 2016-06-03 | 2019-07-23 | 北京理工大学 | Based on remote emergent pupil, small pupil diameter than design high precision photoelectric autocollimator |
| CN106840045A (en) * | 2017-01-06 | 2017-06-13 | 中国科学院光电研究院 | The accuracy detecting device and its detection method of a kind of autocollimator |
| CN107421470B (en) * | 2017-05-25 | 2019-05-14 | 哈尔滨工业大学 | A kind of two-way autocollimator |
| CN107421470A (en) * | 2017-05-25 | 2017-12-01 | 哈尔滨工业大学 | A kind of two-way autocollimator |
| CN108061527A (en) * | 2017-12-20 | 2018-05-22 | 中国科学院长春光学精密机械与物理研究所 | A kind of two-dimensional laser autocollimator of anti-air agitation |
| CN108444397A (en) * | 2018-05-18 | 2018-08-24 | 北方民族大学 | New Displacement Transducer and its measurement method |
| CN108716887A (en) * | 2018-05-18 | 2018-10-30 | 北方民族大学 | Differential type displacement sensor and its measurement method |
| CN108444397B (en) * | 2018-05-18 | 2024-02-27 | 深邦智能科技集团(青岛)有限公司 | Displacement sensor and measuring method thereof |
| CN109579780A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device and method |
| CN109579780B (en) * | 2019-01-11 | 2021-01-12 | 哈尔滨工业大学 | Polarization-based light splitting auto-collimation three-dimensional angle measuring device and method |
| CN114545644A (en) * | 2022-02-22 | 2022-05-27 | 湖北优光科学仪器有限公司 | High-precision corner-adjustable optical fiber collimation system |
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