CN108716887A - Differential type displacement sensor and its measurement method - Google Patents
Differential type displacement sensor and its measurement method Download PDFInfo
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- CN108716887A CN108716887A CN201810481648.3A CN201810481648A CN108716887A CN 108716887 A CN108716887 A CN 108716887A CN 201810481648 A CN201810481648 A CN 201810481648A CN 108716887 A CN108716887 A CN 108716887A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The present invention provides a kind of differential type displacement sensor and its measurement method, which includes laser beam one；It is divided microscope group one, including spectroscope one and reflective mirror two, and two setting in a certain angle of spectroscope one and reflective mirror, and the laser beam of the reflective surface of triangular wave speculum is made to be incident to spectroscope one, a part of laser beam is successively incident to one of photodetector one after spectroscope one and reflective mirror two reflect, and another part laser beam is incident to another photodetector one after the transmission of spectroscope one；The incoming position variable quantity of processing system, the laser beam one for being received according to photodetector one calculates the change in displacement value of testee.Differential type displacement sensor of the present invention when triangular wave reflecting surface is there are that when mismachining tolerance, can make the comprehensive magnification multiple of entire sensor be consistent, has reliably ensured the measurement accuracy of sensor by being divided the setting of microscope group one.
Description
Technical field
The present invention relates to field of measuring technique, more particularly to a kind of differential type displacement sensor and its measurement method.
Background technology
Displacement measurement new principle based on optical triangulation amplifying method is on the basis of optical triangulation amplifying method, in conjunction with three
Angle wave optical device is realized with high-precision PSD (Position Seitive Device, position sensitive (sensitivity) detector).
Triangular wave optical device segments linear displacement at equal intervals, while reducing optical device machining accuracy with size requirement, reduces
The size requirement of high-precision PSD realizes high precision position shift measurement in a small range.Displacement measurement based on optical triangulation amplifying method
Principle is with structure as shown in Figure 1, as shown in Figure 1, after relative displacement occurs for reading head and triangular wave optical reflection component, passing through
Optical triangulation amplifies, and horizontal thin tail sheep t is amplified to T on photodetector (PSD), can carry the precision of linear measure longimetry significantly
It rises.Amplification factor is related with the reflecting face of triangular wave speculum, to keep the amplification factor of sensor consistent, then require three
The angle of each reflecting surface of angle wave reflection mirror is consistent, however the limitation based on processing technology, can not ensure triangular wave speculum
Each reflecting surface angle it is consistent, and also certainly exist mismachining tolerance in triangular wave reflecting surface process itself, cause
The incident light angle of PSD in measurement process changes, i.e., the measurement accuracy of current displacement sensor cannot be protected.
Invention content
The purpose of the present invention is to provide a kind of required precisions that can reduce the processing of triangular wave mirror mirror, improve position
The differential type displacement sensor and its measurement method of shift measurement precision.
To achieve the goals above, the present invention provides following technical scheme：
A kind of differential type displacement sensor, including：
Triangular wave speculum, including several reflectings surface；
Laser beam one is incident to a reflecting surface of triangular wave speculum；
It is divided microscope group one, including spectroscope one and reflective mirror two, and two setting in a certain angle of spectroscope one and reflective mirror,
And the laser beam one of the reflective surface of triangular wave speculum is made to be incident to spectroscope one, one priority of a part of laser beam is through dividing
Light microscopic one and reflective mirror two are incident to one of photodetector one after reflecting, another part laser beam is saturating once spectroscope one
Another photodetector one is incident to after penetrating；
Two photodetectors one for receiving the laser beam through being divided one transmission or reflection of microscope group, and measure it
Incoming position；
The incoming position variable quantity of processing system, the laser beam one for being received according to two photodetectors one calculates
Go out the change in displacement value of testee.
In the scheme advanced optimized, the installation position between two photodetectors one and light splitting microscope group one, which meets, closes
System：The incidence angle for being incident to two photodetectors one respectively after being divided microscope group one is identical.For example, spectroscope one and reflective mirror
Two are arranged in 90 degree of angles, and two photodetectors one are arranged in parallel.So set, can make when triangular wave speculum
When the angle of reflecting surface changes, it is consistent with the multiple of amplification to ensure that two photodetectors one reduce respectively, simplifies operation
Process.
In another scheme, above-mentioned differential type displacement sensor further includes：
Laser beam two is incident to a reflecting surface of triangular wave speculum；
It is divided microscope group two, including spectroscope three and reflective mirror four, and spectroscope three and reflective mirror four are arranged at an angle,
And the laser beam two of the reflective surface of triangular wave speculum is made to be incident to spectroscope three, two priority of a part of laser beam is through dividing
Light microscopic three and reflective mirror four are incident to one of photodetector two after reflecting, another part laser beam two is saturating through spectroscope three
Another photodetector two is incident to after penetrating；
Two photodetectors two for receiving the laser beam two through being divided two transmission or reflection of microscope group, and measure
Its incoming position；
The processing system is specifically used for, according to the incident position of laser beam one received on two photodetectors one
The incoming position variable quantity of laser beam two received on variable quantity or two photodetectors two is set, processing is tested
The change in displacement value of object.
On the other hand, the embodiment of the present invention provides a kind of above-mentioned differential type displacement sensor progress displacement survey of application simultaneously
The method of amount, includes the following steps：
Testee is fixed on triangular wave speculum or reading head；
Adjust laser beam one, triangular wave speculum, photodetector one, the position relationship for being divided microscope group one so that triangle
The laser beam one of the reflective surface of wave reflection mirror is incident to spectroscope one, and one priority of a part of laser beam is through spectroscope one and instead
Light microscopic two is incident to one of photodetector one after reflecting, another part laser beam is incident to after the transmission of spectroscope one
Another photodetector one；
Emit laser beam one, the laser beam one is incident to light splitting after the reflective surface of the triangular wave speculum
Microscope group one is detected the initial position of the reflection laser beam, through dividing after light splitting microscope group one reflects by a photodetector one
Light microscopic group one is detected the initial position of the transmission laser beam by another photodetector one after transmiting；
Testee displacement, in displacement process, two photodetectors one detect the position of laser beam one respectively
Variation, until testee stops displacement；
Processing system is handled by the change in location detected to two photodetectors one, obtains testee
Shift value.
Compared with prior art, the invention has the advantages that：
Differential type displacement sensor of the present invention, by being divided the setting of microscope group one, when the reflection face angle of triangular wave speculum
It spends there are the amplification factor increase that when mismachining tolerance, can make a photodetector one, and another photodetector
Amplification factor reduces, and synthesis result can keep the whole amplification factor of differential type displacement sensor constant, i.e., entire differential type
The amplification factor of displacement sensor is not influenced by the angle mismachining tolerance of the reflecting surface of triangular wave speculum, displacement measurement accuracy
It is insensitive to the angle mismachining tolerance of triangular wave reflecting surface, therefore the measurement accuracy of differential type displacement sensor can be improved.
Differential type displacement sensor of the present invention by photodetector one and photodetector two and corresponds to light splitting microscope group
Continuous dislocation measurement may be implemented in setting.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly introduced, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as to model
The restriction enclosed for those of ordinary skill in the art without creative efforts, can also be according to these
Attached drawing obtains other relevant drawings.
Fig. 1 show the displacement measurement principle schematic of displacement sensor in the prior art.
Fig. 2 show a kind of measuring principle schematic diagram of the differential type displacement sensor of structure of the offer of embodiment 1.
Fig. 3 show the measuring principle schematic diagram of the differential type displacement sensor of another structure of the offer of embodiment 1.
Fig. 4 show the measuring principle schematic diagram of the differential type displacement sensor of another structure of the offer of embodiment 1.
Fig. 5 show a kind of measuring principle schematic diagram of the differential type displacement sensor of structure of the offer of embodiment 2.
Figure label explanation：
Lasing light emitter 1, lasing light emitter 22, laser beam 1, laser beam 24, triangular wave speculum 5, shell 6, photodetection
Device 1, photodetector 28 are divided microscope group 1, are divided microscope group 2 10.
Specific implementation mode
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clearly complete
Description.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, it is not intended to limit the present invention.Base
In the embodiment of the present invention, every other implementation that those skilled in the art are obtained under the premise of no creative work
Example, belongs to protection scope of the present invention.
Embodiment 1
Referring to Fig. 2, providing a kind of differential type displacement sensor, including lasing light emitter 1 in the present embodiment, triangular wave is anti-
Mirror 5 is penetrated, microscope group 1, photodetector 1 are divided, wherein
Lasing light emitter 1 is for launching laser beam 1, and a reflecting surface of directive triangular wave speculum 5；Spectroscope
Group 1, including spectroscope one and reflective mirror two, and spectroscope one and reflective mirror two are vertically arranged, the reflection of triangular wave speculum 5
The laser beam 1 of face reflection is incident to spectroscope one, and one 3 priority of a part of laser beam is after spectroscope one and reflective mirror two reflect
It is incident to one of photodetector 1, another part laser beam 1 is incident to another photoelectricity after the transmission of spectroscope one
Detector 1；Two photodetectors 1 are arranged in parallel, and laser beam 1 is incident to the incidence of two photodetectors 1
Angle is identical；Two photodetectors 1 are used to receive incident laser beam one, and measure its incoming position；Processing system is used for
The incoming position variable quantity of the laser beam 1 received according to two photodetectors one calculates the change in displacement of testee
Value.
In order to ensure the amplification performance of differential type displacement sensor, it is incident to the laser beam one and light of photodetector 1
The angle of electric explorer 1 is preferably less than 45 degree.
As shown in Fig. 2, the laser beam 1 before displacement is indicated by the solid line, the laser beam 1 after displacement is represented by dashed line, and swashs
The transmission path of light beam 1 is as follows：
Before displacement, lasing light emitter 1 emits laser beam 1 to a reflecting surface of triangular wave speculum 5, triangular wave speculum
Laser beam 1 is reflexed to the spectroscope one in light splitting microscope group 1 by 5 reflecting surface, and a part of laser beam 1 is first split mirror one
Reflective mirror two is reflexed to, then one of photodetector 1 (PSD2 in figure), another part are reflexed to through reflective mirror two
Laser beam 1 is incident to another photodetector 1 (PSD1 in figure) after the transmission of spectroscope one, and PSD1 receives spectroscope
The laser beam one of one transmission, and incoming position is measured, it is denoted as the first incoming position at this time, PSD2 receives what reflective mirror two reflected
Laser beam one, and incoming position is measured, it is denoted as the second incoming position at this time.
It (is shown as in Fig. 2 to left dislocation, lasing light emitter 1, light splitting microscope group 1 and photodetector 1 when displacement after displacement
Synchronous shift), the same reflecting surface of the transmitting laser beam 1 of lasing light emitter 1 to triangular wave speculum 5, triangular wave speculum 5
Reflecting surface by laser beam 1 reflex to light splitting microscope group 9 in spectroscope one, a part of laser beam 1 be first split mirror one reflection
One of photodetector 1 (PSD2 in figure), another part laser beam are reflexed to reflective mirror two, then through reflective mirror two
One 3 are incident to another photodetector 1 (PSD1 in figure) after the transmission of spectroscope one, and it is saturating that PSD 1 receives spectroscope one
The laser beam one penetrated, and incoming position is measured, it is denoted as third incoming position at this time, PSD2 receives the laser that reflective mirror two reflects
Shu Yi, and incoming position is measured, it is denoted as the 4th incoming position at this time.
The displacement variable that PSD1 can be obtained by the first incoming position and third incoming position, by the second incoming position and
Four incoming positions can obtain the displacement variable of PSD2, take the weighted average of the displacement variable of PSD1 and PSD2 as poor
The displacement variable of fraction displacement sensor can accurately calculate the displacement of testee further according to the amplification factor of system.
In the present embodiment, by the setting of two photodetectors 1 and light splitting microscope group 1, when triangular wave speculum
The angle of several reflectings surface there are when mismachining tolerance, i.e., the angle difference of reflecting surface when, one of photodetector 1
The amplification factor of (PSD2 in such as Fig. 2) reduces, and the times magnification of another photodetector 1 (PSD1 in such as Fig. 2)
Number increases, and synthesis result is (i.e. ) can protect
The amplification factor for holding differential type displacement sensor entirety is constant, therefore can eliminate the angle mismachining tolerance of reflecting surface and influence to put
In other words big multiple can ensure the amplification factor of differential type displacement sensor not by the shadow of 5 processing technology of triangular wave speculum
It rings.
It should be noted that in the present embodiment, based on the considerations of facilitating operation and assembly, by spectroscope one and reflective mirror two
It is arranged in 90 degree of angles, and two photodetectors one are arranged in parallel.But as embodiment, light splitting microscope group one can also
There are other settings, at this time two one not parallel settings of photodetector, such as shown in Fig. 3, as long as meeting following condition：
Two setting in a certain angle of spectroscope one and reflective mirror, and make the laser of the reflective surface of triangular wave speculum
Beam one is incident to spectroscope one, and one priority of a part of laser beam is incident to one of them after spectroscope one and reflective mirror two reflect
Photodetector one, another part laser beam are incident to another photodetector one after the transmission of spectroscope one.
For example, when spectroscope one and reflective mirror two are arranged in non-90 degree angle, when the angle of the reflecting surface of triangular wave speculum
Degree changes, the displacement measured respectively using PSD1 and PSD2 will one reduce (relative to the displacement of testee, according to
It is so magnifying state, i.e., is only the diminution of amplification factor), an increase, but diminution is different from increased multiple, such as PSD1
Displacement increase after amplification factor be d1 times, the amplification factor after the displacement of PSD2 is reduced is d2 times, then entirely poor at this time
The shift value (i.e. the shift value of testee) of fraction displacement sensor is then：
It is further to note that when spectroscope one and reflective mirror two are arranged in non-90 degree angle, it can also be by setting
Set the position relationship between PSD1 and PSD2 so that the incidence angle for being incident to the laser beam of PSD1 and PSD2 is identical, and then realizes
When the angle of the reflecting surface of triangular wave speculum changes, the change in displacement measured respectively using PSD1 and PSD2 is contracted respectively
The small and identical multiple of increase, as shown in figure 3, to simplify calculating process.
It should also be noted that, in Fig. 2-3, the reflecting surface of triangular wave speculum 5 and the angle of horizontal plane are 30 degree, incident
Incidence angle to the laser beam 1 of the reflecting surface of triangular wave speculum 5 is 30 degree, so the reflecting surface of triangular wave speculum 5 is anti-
The laser beam penetrated is to be incident to photodetector 1 vertically, an only example shown in Fig. 2-3, to triangular wave in the present embodiment
There is no limit be incident to laser beam 1 incidence angle of the reflecting surface of triangular wave speculum 5 to the angle of the reflecting surface of speculum 5
Also there is no limit for degree, such as shown in Fig. 4.
Can refering to fig. 1, differential type displacement sensor can also include shell 6, lasing light emitter 1, light splitting microscope group 1 and light
Electric explorer 1 is fixedly installed in shell 6, forms reading head, the laser beam 1 and its reflected light that lasing light emitter 1 emits
Beam can pass through the transmitting-receiving end face of reading head.Lasing light emitter 1, light splitting microscope group 1 and photodetector 1 are fixedly installed on
In shell 6, mutual position can be kept to fix, can also ensure that three keeps synchronous shift.
It when measurement, can be fixed on testee, read using by triangular wave speculum 5 according to practical situations
Head remains stationary, and when testee is subjected to displacement, with reading head relative motion occurs for triangular wave speculum 5, and reading head can
The triangular wave speculum 5 i.e. shift value of testee is obtained to measure；Reading head is fixed on measured object alternatively, can also use
On body, triangular wave speculum 5 remains stationary as, and testee, which is subjected to displacement, drives reading head movement, reading head and triangle wave reflection
Relative displacement occurs for mirror 5, and reading head can measure the relative displacement between reading head and triangular wave speculum 5, so obtain by
Survey the shift value of object；Selection triangular wave speculum 5 or reading head are measured to be fixed on testee, improves measurement just
Profit.
When carrying out displacement measurement using above-mentioned differential type displacement sensor, its step are as follows：
Testee is fixed on triangular wave speculum or reading head by step 1；
Step 2, adjustment laser beam one, triangular wave speculum, photodetector one, the position relationship for being divided microscope group one, makes
The laser beam one for obtaining the reflective surface of triangular wave speculum is incident to spectroscope one, and one priority of a part of laser beam is through spectroscope
One and reflective mirror two reflect after be incident to one of photodetector one, another part laser beam is after the transmission of spectroscope one
It is incident to another photodetector one；
Step 3, emits laser beam one, and the laser beam one enters after the reflective surface of the triangular wave speculum
It is incident upon light splitting microscope group one, is detected the initial bit of the reflection laser beam by a photodetector one after light splitting microscope group one reflects
It sets, is detected the initial position of the transmission laser beam by another photodetector one after light splitting microscope group one transmits；
Step 4, testee displacement, in displacement process, two photodetectors one detect laser beam one respectively
The variation of position, until testee stops displacement；
Step 5, processing system are handled by the change in location detected to two photodetectors one, obtain quilt
Survey the shift value of object.
Embodiment 2
Can be refering to Fig. 5, compared with the differential type displacement sensor described in embodiment 1, the difference that is provided in the present embodiment
Fraction displacement sensor further includes laser beam two, is incident to another reflecting surface of triangular wave speculum 5；And with lower component：
It is divided microscope group 29, including spectroscope three and reflective mirror four, and spectroscope three and reflective mirror four are vertically arranged, triangle
The laser beam 24 of another reflective surface of wave reflection mirror 5 is incident to spectroscope three, and a part of laser beam 24 is successively
It is incident to one of photodetector 28 after spectroscope three and reflective mirror four reflect, another part laser beam 24 is through light splitting
Mirror three is incident to another photodetector 28 after transmiting；The position relationship of two photodetectors 28 meets：Laser beam 24
The incidence angle for being incident to two photodetectors 28 is identical；Two photodetectors 28 are used to receive incident laser beam 24,
And measure its incoming position.
In this differential type displacement sensor, the processing system is then according to received on the photodetector 1
One 3 incoming position variable quantity of laser beam and the photodetector 28 on received 24 incoming position of laser beam variation
Amount, processing obtain the change in displacement value of testee.
Continuous dislocation measurement may be implemented in differential type displacement sensor described in the present embodiment.Specifically, two can be selected
One of a laser beam measures, when one of laser beam pip is located at certain positions of reflecting surface, as reflecting surface top,
The length of the intersection position etc. of two reflectings surface, corresponding photodetector is again limited, it is thus possible to can not be reflected into corresponding photoelectricity
Detector, the photodetector can not just calculate its shift value, another laser beam pip is located at another reflecting surface
Other positions can be reflected into corresponding photodetector and can carry out conversion measurement, can realize each of testee movement
It carves, at least one can be reflected into corresponding photodetection in the laser beam that each reflecting surface is reflected on triangular wave speculum 5
Device, at this time processing system can toggle the reflection laser beam position variation for calculating two photodetectors, be overlapped tired
Meter, to realize to testee displacement disposably variation or the measurement of continuous increment type change in displacement, measurement method is simple, can
It leans on, it is easy to operate, and measurement accuracy can be improved.
As shown in figure 5, laser beam 1, laser beam 24 are obtained by lasing light emitter 1 and the transmitting of lasing light emitter 22 respectively, this
Kind setting can simplify the structure of differential type displacement sensor.Of course, laser beam 1 and laser beam 24 can also be by one
Lasing light emitter obtains, and then needs a spectroscope and at least one speculum at this time, complicated.
Two sets of measuring systems can may be contained within forming a reading head in a shell, can also two sets of measuring systems point
It is not set in a shell, separately constitutes two reading heads.Specifically, lasing light emitter one, lasing light emitter two, light splitting microscope group one, point
Two, two photodetectors one of light microscopic group and two photodetectors two are fixedly installed in a shell, form a reading
Several heads.Alternatively, lasing light emitter one, light splitting microscope group one and two photodetectors one are fixedly installed in a shell, composition one
A reading head, lasing light emitter two, light splitting microscope group two and two photodetectors two are fixedly installed in another shell, and composition is another
One reading head.
It can be integrally formed component to be divided microscope group one and light splitting microscope group two, convenient for manufacture, and ensure mutual angle
Degree is fixed, and spectroscope one and reflective mirror two make for same raw material at this time, have the function of light splitting, in order to enhance reflective mirror two
Reflecting effect, can the reflecting surface of reflective mirror two be arranged total reflection film；Can also be to connect structure with reflective mirror by spectroscope
At since reflective mirror two and reflective mirror four play reflex, so total reflection mirror may be used in reflective mirror two and reflective mirror four.
Similarly, spectroscope three can be arranged with reflective mirror four in non-90 degree angle, and spectroscope three and reflective mirror four
Between angle and spectroscope one and reflective mirror two between angle may be the same or different.
As shown in Figure 2, photodetector is using position sensitive detector PSD.
Readily comprehensible, in the present embodiment, the purpose that lasing light emitter one and lasing light emitter two is arranged is to avoid one of which photoelectricity
When detector (one or two) does not receive laser beam, laser beam can be received by another group of photodetector, realize that displacement is surveyed
Amount, therefore other than set-up mode as shown in Figure 5, can also there is other set-up modes, as long as lasing light emitter one and lasing light emitter two
Stagger setting so that laser beam one and laser beam two are respectively in the original incident point position difference of the first reflecting surface.Such as
Laser beam two can be incident to another first reflecting surface in the first incident reflecting surface homonymy of laser beam one, can also enter
It is incident upon another first reflecting surface (seeing Fig. 5) in the first incident reflecting surface offside of laser beam one, it can be with incidence
The same reflecting surface incident to laser beam one, but incidence point position is different.
When carrying out displacement measurement using differential type displacement sensor described in the present embodiment, its step are as follows：
Testee is fixed on triangular wave speculum or reading head by step 1；
Step 2, adjustment laser beam one, triangular wave speculum, photodetector one, the position relationship for being divided microscope group one, makes
The laser beam one for obtaining the reflective surface of triangular wave speculum is incident to spectroscope one, and one priority of a part of laser beam is through spectroscope
One and reflective mirror two reflect after be incident to one of photodetector one, another part laser beam is after the transmission of spectroscope one
It is incident to another photodetector one；It adjusts laser beam two, triangular wave speculum, photodetector two, be divided microscope group two
Position relationship so that the laser beam two of the reflective surface of triangular wave speculum is incident to spectroscope three, a part of laser beam two
It successively is incident to one of photodetector two after spectroscope three and reflective mirror four reflect, another part laser beam two is through dividing
Light microscopic three is incident to another photodetector two after transmiting；
Step 3, emits laser beam one, and the laser beam one enters after the reflective surface of the triangular wave speculum
It is incident upon light splitting microscope group one, is detected the initial bit of the reflection laser beam by a photodetector one after light splitting microscope group one reflects
It sets, is detected the initial position of the transmission laser beam by another photodetector one after light splitting microscope group one transmits；Alternatively, hair
Laser beam two is penetrated, the laser beam two is incident to light splitting microscope group two, warp after the reflective surface of the triangular wave speculum
Light splitting microscope group two is detected the initial position of the reflection laser beam by a photodetector two after reflecting, saturating through being divided microscope group two
The initial position of the transmission laser beam is detected after penetrating by another photodetector two；
Step 4, testee displacement, in displacement process, two photodetectors one detect laser beam one respectively
The variation of position or two photodetectors two detect the variation of the position of laser beam two respectively, until testee stops
Stop bit moves；
Step 5, processing system pass through the position that is detected to two photodetectors one or two photodetectors two
Variation is handled, and the shift value of testee is obtained.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art can easily think of the change or the replacement in the technical scope disclosed by the present invention, all should
Cover within the scope of the present invention.
Claims (10)
1. a kind of differential type displacement sensor, which is characterized in that including：
Triangular wave speculum, including several reflectings surface；
Laser beam one is incident to the reflecting surface of triangular wave speculum；
It is divided microscope group one, including spectroscope one and reflective mirror two, and two setting in a certain angle of spectroscope one and reflective mirror, and is made
The laser beam one for obtaining the reflective surface of triangular wave speculum is incident to spectroscope one, and one priority of a part of laser beam is through spectroscope
One and reflective mirror two reflect after be incident to one of photodetector one, another part laser beam is after the transmission of spectroscope one
It is incident to another photodetector one；
Two photodetectors one for receiving the laser beam one through being divided one transmission or reflection of microscope group, and measure it and enter
Penetrate position；
Processing system, the incoming position variable quantity of the laser beam one for being received according to two photodetectors calculate tested
The change in displacement value of object.
2. differential type displacement sensor according to claim 1, which is characterized in that two photodetectors one and spectroscope
Installation position between group one meets relationship：Laser beam is incident to two photodetectors one respectively after being divided microscope group one
Incidence angle is identical.
3. differential type displacement sensor according to claim 2, which is characterized in that spectroscope one and reflective mirror two are in 90 degree
Angle is arranged, and two photodetectors one are arranged in parallel.
4. differential type displacement sensor according to claim 1, which is characterized in that further include shell, laser beam one is by swashing
The transmitting of light source one obtains, and lasing light emitter one, light splitting microscope group one and two photodetectors one are fixedly installed in shell, and composition is read
Several heads.
5. according to any differential type displacement sensors of claim 1-3, which is characterized in that further include：
Laser beam two is incident to a reflecting surface of triangular wave speculum, and laser beam one and laser beam two are respectively in triangular wave
The original incident point position of reflecting surface is different；
It is divided microscope group two, including spectroscope three and reflective mirror four, and four setting in a certain angle of spectroscope three and reflective mirror, and is made
The laser beam two for obtaining the reflective surface of triangular wave speculum is incident to spectroscope three, and two priority of a part of laser beam is through spectroscope
Three and reflective mirror four reflect after be incident to one of photodetector two, another part laser beam two is after the transmission of spectroscope three
It is incident to another photodetector two；
Two photodetectors two for receiving the laser beam two through being divided two transmission or reflection of microscope group, and measure it and enter
Penetrate position；
The processing system is specifically used for, and is become according to the incoming position of laser beam one received on two photodetectors one
The incoming position variable quantity of received laser beam two in change amount or two photodetectors two, processing obtain testee
Change in displacement value.
6. differential type displacement sensor according to claim 5, which is characterized in that between spectroscope three and reflective mirror four
Angle between angle and spectroscope one and reflective mirror two is identical.
7. differential type displacement sensor according to claim 5, which is characterized in that laser beam one and laser beam two are incident
To the same reflecting surface of triangular wave speculum, alternatively, laser beam one and laser beam two are incident to triangular wave speculum respectively
Two different reflectings surface.
8. differential type displacement sensor according to claim 5, which is characterized in that further include shell, laser beam one and swash
Light beam two is obtained by lasing light emitter one and the transmitting of lasing light emitter two respectively, lasing light emitter one, lasing light emitter two, light splitting microscope group one, light splitting microscope group
Two, two photodetectors one and two photodetectors two are fixedly installed in shell, form reading head；Alternatively,
Further include two shells, laser beam one and laser beam two are obtained by lasing light emitter one and the transmitting of lasing light emitter two respectively, lasing light emitter
One, it is divided microscope group one and two photodetectors one is fixedly installed in a shell, form a reading head, lasing light emitter
Two, it is divided microscope group two and two photodetectors two is fixedly installed in another shell, form another reading head.
9. the measurement method of any difference displacement sensors of claim 1-4, which is characterized in that include the following steps：
Testee is fixed on triangular wave speculum or reading head；
Adjust laser beam one, triangular wave speculum, photodetector one, the position relationship for being divided microscope group one so that triangular wave is anti-
The laser beam one for penetrating the reflective surface of mirror is incident to spectroscope one, and one priority of a part of laser beam is through spectroscope one and reflective mirror
One of photodetector one is incident to after two reflections, another part laser beam is incident to another after the transmission of spectroscope one
A photodetector one；
Emit laser beam one, the laser beam one is incident to light splitting microscope group after the reflective surface of the triangular wave speculum
One, the initial position of the reflection laser beam is detected by a photodetector one after light splitting microscope group one reflects, through spectroscope
The initial position of the transmission laser beam is detected after one transmission of group by another photodetector one；
Testee displacement, in displacement process, two photodetectors one detect the variation of the position of laser beam one respectively,
Until testee stops displacement；
Processing system is handled by the change in location detected to two photodetectors one, obtains the displacement of testee
Value.
10. the measurement method of any difference displacement sensors of claim 5-8, which is characterized in that include the following steps：
Testee is fixed on triangular wave speculum or reading head；
Adjust laser beam one, triangular wave speculum, photodetector one, the position relationship for being divided microscope group one so that triangular wave is anti-
The laser beam one for penetrating the reflective surface of mirror is incident to spectroscope one, and one priority of a part of laser beam is through spectroscope one and reflective mirror
One of photodetector one is incident to after two reflections, another part laser beam is incident to another after the transmission of spectroscope one
A photodetector one；Laser beam two, triangular wave speculum, photodetector two, the position relationship for being divided microscope group two are adjusted, is made
The laser beam two for obtaining the reflective surface of triangular wave speculum is incident to spectroscope three, and two priority of a part of laser beam is through spectroscope
Three and reflective mirror four reflect after be incident to one of photodetector two, another part laser beam two is after the transmission of spectroscope three
It is incident to another photodetector two；
Emit laser beam one, the laser beam one is incident to light splitting microscope group after the reflective surface of the triangular wave speculum
One, the initial position of the reflection laser beam is detected by a photodetector one after light splitting microscope group one reflects, through spectroscope
The initial position of the transmission laser beam is detected after one transmission of group by another photodetector one；Alternatively, transmitting laser beam two,
The laser beam two is incident to light splitting microscope group two after the reflective surface of the triangular wave speculum, anti-through being divided microscope group two
The initial position for being detected the reflection laser beam after penetrating by a photodetector two, by another after light splitting microscope group two transmits
Photodetector two detects the initial position of the transmission laser beam；
Testee displacement, in displacement process, two photodetectors one detect the variation of the position of laser beam one respectively,
Or two photodetectors two detect the variation of the position of laser beam two respectively, until testee stops displacement；
Processing system passes through at the change in location that is detected to two photodetectors one or two photodetectors two
Reason, obtains the shift value of testee.
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