CN104390603A - Micro spherical type short coherent point diffraction interference measurement system and method - Google Patents
Micro spherical type short coherent point diffraction interference measurement system and method Download PDFInfo
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Abstract
The invention provides a micro spherical type short coherent point diffraction interference measurement system and method and belongs to the micro spherical type detection technical field. The micro spherical type short coherent point diffraction interference measurement system and method aims at solving the problems that the contrast ratio of the interference field of the existing short coherent point diffraction interference measurement method is poor and accordingly the measurement accuracy is affected. The micro spherical type short coherent point diffraction interference measurement system comprises a short coherent laser, a first half lambda wave plate, a rectangular reflecting mirror, a polarization splitting prism, a first pyramid prism, a first plane mirror, a second pyramid prism, a PZT (Piezoelectric Ceramic Transducer) phase shifter, a delay platform, a second half lambda wave plate, an optical fiber coupling mirror, a single-mode polarization-maintaining optical fiber, a convergent lens, a pinhole lens, a first collimating lens, a quarter lambda wave plate, a micro-objective, a second plane mirror, a second collimating lens, a polaroid, an area array CCD (Charge Coupled Device) and a computer. According to the micro spherical type short coherent point diffraction interference measurement method, an optical path structure that the quarter lambda wave plate is combined with the polaroid is adopted to select beams in the interference field and accordingly direct current components in the beams are reduced, the contrast ratio of interference fringes is improved, and the adjustable optimization of the contrast ratio is implemented. The micro spherical type short coherent point diffraction interference measurement system and method is applied to the micro spherical type detection.
Description
Technical field
The present invention relates to micro-spherical short coherent point diffraction interference measuring system and measuring method, belong to micro-spherical detection technique field.
Background technology
Tiny spherical surface is as one of the most frequently used components and parts form, and be applied to the numerous areas such as space flight, military affairs, industry, medical treatment, the surperficial surface precision of tiny spherical surface has vital impact to its performance.
Conventional art carries out detecting the atomic force microscope and the means such as Laser Scanning Confocal Microscope that adopt to tiny spherical surface, although have very high longitudinal measuring accuracy, but its single measurement range is very little, and need to coordinate high-accuracy mechanical scanning motion device could realize overall measuring three-dimensional morphology, this mode affects seriously by mechanical movement error, there is detection efficiency low, horizontal resolution characteristic difference and isolated defects point and the problem such as easily to omit.
Existing short relevant phase shift point-diffraction interference measuring method is selected coherent light beam by the short relevant method be combined with optical path compensation, thus introducing amount of phase shift, between the reference light of i.e. the measurement light that returns of tested spherical face and diffraction, light path is approximately zero, interference can be produced, and and optical path difference between other light beam exceed coherent length, do not participate in interfering, only as the bias light of interference field.This just determines interference field can not have good contrast, and when especially measuring transparent ball, too low surface reflectivity causes intetference-fit strengthening extreme difference, and phase information is extracted very difficult, affects the measuring accuracy of interference system.
Summary of the invention
The present invention seeks to the interference field poor contrast in order to solve existing short relevant phase shift point-diffraction interference measuring method, affecting the problem of measuring accuracy, providing a kind of micro-spherical short coherent point diffraction interference measuring system and measuring method.
Micro-spherical of the present invention short coherent point diffraction interference measuring system, it comprises short coherent laser, λ/2 wave plate, corner cube mirror, polarization splitting prism, the first prism of corner cube, the first level crossing, the second prism of corner cube, PZT phase shifter, postpones platform, the 2nd λ/2 wave plate, fibre-coupled mirrors, single-mode polarization maintaining fiber, convergent lens, pin hole mirror, the first collimation lens, λ/4 wave plate, microcobjective, the second level crossing, the second collimation lens, polaroid, area array CCD and computing machine
The shoot laser of short coherent laser is incident to corner cube mirror through λ/2 wave plate, the light entrance face of corner cube mirror is vertical with the light splitting surface of polarization splitting prism, after incident light 90 ° turns to by the first right-angle surface of corner cube mirror, be incident to polarization splitting prism, and it is incident with light splitting surface angle at 45 °, the reflected light of polarization splitting prism is incident to the first prism of corner cube as measurement light, angle at 45 ° is incident to polarization splitting prism to the emergent light of the first prism of corner cube with light splitting surface again, is incident to the second right-angle surface of corner cube mirror after polarization splitting prism reflection;
The transmitted light of polarization splitting prism is incident to the first level crossing as with reference to light, after the first flat mirror reflects, be incident to the second prism of corner cube, the emergent light of the second prism of corner cube is again after the first flat mirror reflects, be incident to polarization splitting prism, then after polarization splitting prism transmission, be incident to the second right-angle surface of corner cube mirror; Second prism of corner cube is arranged on the motion end face of PZT phase shifter, and PZT phase shifter is arranged at and postpones on platform;
Measure light and reference light after the light splitting surface of polarization splitting prism closes and restraints, be incident to the second right-angle surface of corner cube mirror, again by after penetrate after, single-mode polarization maintaining fiber is incident to after the 2nd λ/2 wave plate and fibre-coupled mirrors, the emergent light of single-mode polarization maintaining fiber is after convergent lens is assembled, through the glass substrate of pin hole mirror, converge on pin hole;
A part of after the first collimation lens collimation by the diffraction light of pin hole outgoing, through λ/4 wave plate, then converge at tested microsphere surface through microcobjective; The light beam obtained after tested microsphere surface reflection is again after microcobjective, λ/4 wave plate and the first collimation lens collimation, reflected by the metal mirror of pin hole mirror, light beam directive second level crossing that this reflection obtains, the reflected light of the second level crossing, after the second collimation lens collimation, arrives area array CCD through polaroid;
By diffraction light another part of pin hole outgoing directly through the second flat mirror reflects, then after the second collimation lens collimation, arrive area array CCD through polaroid;
The image signal output end of area array CCD connects the picture signal input end of computing machine; The control signal output terminal of computing machine connects the control signal input end of PZT phase shifter.
Described first collimation lens, λ/4 wave plate, microcobjective are coaxial with tested microballoon;
The focus of the first collimation lens overlaps with the pin hole of pin hole mirror.
The centre of sphere of tested microballoon is positioned at the center of microcobjective outgoing beam.
The shoot laser wavelength 523nm of short coherent laser, coherent length 1mm; The long 10m of single-mode polarization maintaining fiber, core diameter 6 μm.
The extinction ratio of polaroid is 10000:1.
The polarization of polaroid is identical with the direction of propagation of the reference light occurred before diffraction through direction.
Based on micro-spherical short coherent point diffraction interference measuring method of above-mentioned micro-spherical short coherent point diffraction interference measuring system,
The linearly polarized light beam of short coherent laser outgoing is behind a wave plate adjustment polarization direction, λ/2, and through corner cube mirror reflection, 90 ° turn to, and are two bundles in the light splitting surface punishment of polarization splitting prism;
Three-dimensional adjustment is carried out to delay platform, micrometric displacement is carried out to PZT phase shifter and moves, realize micrometric displacement phase shift campaign and the motion of Long Distances optical path compensation of the second prism of corner cube;
The measurement light closed after bundle is consistent with the reference light direction of propagation, and polarization direction is orthogonal;
The approximate spherical wave of single-mode polarization maintaining fiber end outgoing, after the pin hole of convergent lens and pin hole mirror, produces diffraction, generates ideal ball ground roll;
After arriving area array CCD by a diffraction light part for pin hole outgoing with another part, form interference pattern; PZT phase shifter is made to drive the second prism of corner cube to move, area array CCD collection obtains the interference pattern of several changes, this interference pattern as calculated machine resolves, obtain the initial phase difference between measurement light and reference light that in interference field, each pixel is corresponding, and then try to achieve optical path difference between the two, realize the measuring surface form of tested microballoon.
Rotate λ/2 wave plate and change the light intensity ratio measuring light and reference light, the optimization realizing interference field contrast is adjustable; Rotate the 2nd λ/2 wave plate and change the measurement light of single-mode polarization maintaining fiber outgoing and the polarization direction of reference light, make measurement polarisation of light direction parallel with the reflecting surface of pin hole mirror.
Advantage of the present invention: the mode that the present invention adopts λ/4 wave plate to be combined with polaroid carries out selectivity filtering to the bias light of interference field, reduce the DC component in interference signal, remain again the advantage of original short relevant phase shift point-diffraction interference measuring method simultaneously, solve the short relevant phase shift diffraction interference measuring system interference field poor contrast of wave-front division formula, the problem that adjustable extent is little.
The present invention for single sensing range, can increase the area coverage of single measurement with the spherical crown on tested tiny spherical surface.Adopt λ/4 wave plate in conjunction with the light channel structure of polaroid, select the light beam in interference field, reduce DC component wherein, improve the contrast of interference fringe, the optimization realizing contrast is adjustable.Meanwhile, still adopt short-phase dry length laser spots diffraction interference and optical path compensation technology, retain its original advantage, as eliminated stray light, avoiding multiple reflection face to form multi interference etc., and adopt PZT phase shifter to drive prism of corner cube to realize high precision phase shift.The present invention can realize detecting without leak source of tiny spherical surface face type feature, is applicable to antiradar reflectivity transparent spherical shell surfaces externally and internally face type simultaneously and measures, have detection efficiency high, without leak source, measuring accuracy is high, automaticity is high advantage.50nm is better than to target spherical surface type accuracy of detection RMS value.
Accompanying drawing explanation
Fig. 1 is the principle schematic of micro-spherical of the present invention short coherent point diffraction interference measuring system;
Fig. 2 is when tested microballoon is transparent ball, the beam propagation figure in tested microballoon.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1, micro-spherical short coherent point diffraction interference measuring system described in present embodiment, it comprises short coherent laser 1, one λ/2 wave plate 2, corner cube mirror 3, polarization splitting prism 4, first prism of corner cube 5, first level crossing 6, second prism of corner cube 7, PZT phase shifter 8, postpone platform 9, 2nd λ/2 wave plate 10, fibre-coupled mirrors 11, single-mode polarization maintaining fiber 12, convergent lens 13, pin hole mirror 14, first collimation lens 15, λ/4 wave plate 16, microcobjective 17, second level crossing 18, second collimation lens 19, polaroid 20, area array CCD 21 and computing machine 22,
The shoot laser of short coherent laser 1 is incident to corner cube mirror 3 through λ/2 wave plate 2, the light entrance face of corner cube mirror 3 is vertical with the light splitting surface of polarization splitting prism 4, after incident light 90 ° turns to by the first right-angle surface of corner cube mirror 3, be incident to polarization splitting prism 4, and it is incident with light splitting surface angle at 45 °, the reflected light of polarization splitting prism 4 is incident to the first prism of corner cube 5 as measurement light, angle at 45 ° is incident to polarization splitting prism 4 to the emergent light of the first prism of corner cube 5 with light splitting surface again, the second right-angle surface of corner cube mirror 3 is incident to after polarization splitting prism 4 reflects,
The transmitted light of polarization splitting prism 4 is incident to the first level crossing 6 as with reference to light, after the first level crossing 6 reflects, be incident to the second prism of corner cube 7, the emergent light of the second prism of corner cube 7 is again after the first level crossing 6 reflects, be incident to polarization splitting prism 4, then be incident to the second right-angle surface of corner cube mirror 3 after polarization splitting prism 4 transmission; Second prism of corner cube 7 is arranged on the motion end face of PZT phase shifter 8, and PZT phase shifter 8 is arranged at and postpones on platform 9;
Measure light and reference light after the light splitting surface of polarization splitting prism 4 closes and restraints, be incident to the second right-angle surface of corner cube mirror 3, again by after penetrate after, single-mode polarization maintaining fiber 12 is incident to after the 2nd λ/2 wave plate 10 and fibre-coupled mirrors 11, the emergent light of single-mode polarization maintaining fiber 12 is after convergent lens 13 is assembled, through the glass substrate of pin hole mirror 14, converge on pin hole;
A part of after the first collimation lens 15 collimates by the diffraction light of pin hole outgoing, through λ/4 wave plate 16, then converge at tested microballoon 23 surface through microcobjective 17; The light beam obtained after tested microballoon 23 surface reflection is again after microcobjective 17, λ/4 wave plate 16 and the first collimation lens 15 collimation, reflected by the metal mirror of pin hole mirror 14, light beam directive second level crossing 18 that this reflection obtains, the reflected light of the second level crossing 18, after the second collimation lens 19 collimates, arrives area array CCD 21 through polaroid 20;
Directly reflected through the second level crossing 18 by diffraction light another part of pin hole outgoing, then after the second collimation lens 19 collimates, arrive area array CCD 21 through polaroid 20;
The image signal output end of area array CCD 21 connects the picture signal input end of computing machine 22; The control signal output terminal of computing machine 22 connects the control signal input end of PZT phase shifter 8.
In present embodiment, short coherent laser 1, λ/2 wave plate 2 and corner cube mirror 3 are positioned at the side of polarization splitting prism 4, light beam is after the reflecting surface 90 ° of corner cube mirror 3 turns to, incident with light splitting surface angle at 45 °, the first prism of corner cube 5 is positioned at polarization splitting prism 4 reflected light outgoing side.First level crossing 6, second prism of corner cube 7, PZT phase shifter 8 and delay platform 9 are positioned at polarization splitting prism 4 transmitted light outgoing side, and the reflecting surface of the first level crossing 6 is parallel with the light splitting surface of polarization splitting prism 4.Second prism of corner cube 7 is placed in the motion end face of PZT phase shifter 8, can carry out micrometric displacement move with it.PZT phase shifter 8 is placed in and postpones, on platform 9, to carry out the adjustment of Long Distances D translation with it.2nd λ/2 wave plate 10, fibre-coupled mirrors 11, single-mode polarization maintaining fiber 12, convergent lens 13 and pin hole mirror 14 are positioned at corner cube mirror 3 beam exit side.2nd λ/2 wave plate 10 and fibre-coupled mirrors 11 coaxial.
Second level crossing 18, first collimation lens 15, λ/4 wave plate 16, microcobjective 17 and tested microballoon 23 are positioned at pin hole mirror 14 emergent light side, and the centre of sphere of tested microballoon 23 is arranged in the convergent beam of microcobjective 17 outgoing in the heart.Second collimation lens 19, polaroid 20 and area array CCD 21 are positioned at the second level crossing 18 reflected light outgoing side, and coaxially, its focus is equivalent to and overlaps with pin hole for the second collimation lens 19 and polaroid 20.The image planes of area array CCD 21 are vertical with the parallel beam after collimation.
Embodiment two: present embodiment is described below in conjunction with Fig. 1, present embodiment is described further embodiment one, and described first collimation lens 15, λ/4 wave plate 16, microcobjective 17 are coaxial with tested microballoon 23;
The focus of the first collimation lens 15 overlaps with the pin hole of pin hole mirror 14.
Embodiment three: present embodiment is described below in conjunction with Fig. 1, present embodiment is described further embodiment one or two, and the centre of sphere of described tested microballoon 23 is positioned at the center of microcobjective 17 outgoing beam.
Embodiment four: present embodiment is described further embodiment one, two or three, the shoot laser wavelength 523nm of short coherent laser 1, coherent length 1mm; The long 10m of single-mode polarization maintaining fiber 12, core diameter 6 μm.
The output power 300mw continuously adjustabe of described short coherent laser 1, ten one-hour rating stability are less than 1%;
Embodiment five: present embodiment is described further embodiment one, two, three or four, the extinction ratio of polaroid 20 is 10000:1.
Embodiment six: present embodiment is described further embodiment one, two, three, four or five, the polarization of polaroid 20 is identical with the direction of propagation of the reference light occurred before diffraction through direction.
In use, microcobjective 17 can select enlargement ratio 10 times, numerical aperture 0.4 in the present invention; Area array CCD 21 resolution 2048 × 2048, pixel dimension 7 μm, dark 10 of maximum support position; Professional industrial computer selected by computing machine.
Embodiment six: present embodiment is described below in conjunction with Fig. 1 and Fig. 2, present embodiment is the micro-spherical short coherent point diffraction interference measuring method based on micro-spherical short coherent point diffraction interference measuring system described in embodiment one,
The linearly polarized light beam of short coherent laser 1 outgoing, after λ/2 wave plate 2 adjusts polarization direction, reflects through corner cube mirror 3, and 90 ° turn to, and is two bundles in the light splitting surface punishment of polarization splitting prism 4;
Three-dimensional adjustment is carried out to delay platform 9, micrometric displacement is carried out to PZT phase shifter 8 and moves, realize micrometric displacement phase shift campaign and the motion of Long Distances optical path compensation of the second prism of corner cube 7;
The measurement light closed after bundle is consistent with the reference light direction of propagation, and polarization direction is orthogonal;
The approximate spherical wave of single-mode polarization maintaining fiber 12 end outgoing, after the pin hole of convergent lens 13 and pin hole mirror 14, produces diffraction, generates ideal ball ground roll;
After arriving area array CCD 21 by a diffraction light part for pin hole outgoing with another part, form interference pattern; PZT phase shifter 8 is made to drive the second prism of corner cube 7 to move, area array CCD 21 collection obtains the interference pattern of several changes, this interference pattern as calculated machine 22 resolves, obtain the initial phase difference between measurement light and reference light that in interference field, each pixel is corresponding, and then try to achieve optical path difference between the two, realize the measuring surface form of tested microballoon 23.
Embodiment seven: present embodiment is described below in conjunction with Fig. 1 and Fig. 2, present embodiment further illustrates embodiment six, and rotate λ/2 wave plate 2 and change the light intensity ratio measuring light and reference light, the optimization realizing interference field contrast is adjustable; Rotate the 2nd λ/2 wave plate 10 and change the measurement light of single-mode polarization maintaining fiber 12 outgoing and the polarization direction of reference light, make measurement polarisation of light direction parallel with the reflecting surface of pin hole mirror 14.
The principle of work of the inventive method:
Incident beam is divided into two bundles by the light splitting surface of polarization splitting prism 4, and reflected light as measuring light, directive first prism of corner cube 5, and returns light splitting surface after turning to through its 180 °.Transmitted light, as with reference to light, turns to through the first level crossing 6, directive second prism of corner cube 7, returns light splitting surface equally after 180 ° turn to.First prism of corner cube 5 maintains static, and the second prism of corner cube 7 is then placed in the tache motorice of PZT phase shifter 8.Because measurement light and reference light turn to rear polarizer direction not change at 180 °, so at light splitting surface place, measure light and still reflect, reference light is transmission still, and another reflecting surface to corner cube mirror 3 after closing bundle turns to.
Adopt single-mode polarization maintaining fiber 12 to carry out filtering and the conduction of light beam, can avoid light beam in transmitting procedure, produce obvious depolarization.The approximate spherical wave of single-mode polarization maintaining fiber 12 end outgoing produces diffraction through convergent lens 13, pin hole mirror 14, generates ideal ball ground roll.
A part for diffraction light converges at tested microsphere surface through the first collimation lens 15, λ/4 wave plate 16, microcobjective 17.Convergent beam center overlaps with the centre of sphere, is equivalent to vertical measured surface incident, and after measured surface reflection, approximate former road returns, then the metal mirror reflection on pin hole mirror 14.Owing to there is certain angle, light beam directive second level crossing 18 after reflection, then arrive area array CCD through the second collimation lens 19, polaroid 20; Another part of diffraction light directly turns to through the second level crossing 18, arrives area array CCD, forms interference pattern.PZT phase shifter 8 drives the second prism of corner cube 7 to move, the interference pattern of several changes of area array CCD record, calculate the initial phase difference between measurement light and reference light that in interference field, each pixel is corresponding, and then solve optical path difference between the two, realize measuring surface form.
During traditional point-diffraction interference is measured, the light in interference field can divide quinquepartite: the measurement light of the measurement light, the directly diffraction that return through tested microsphere surface, the reference light of reference light, directly diffraction returned through measured surface and surround lighting.Owing to postponing the optical path compensation effect of platform, make the measurement light that returns through tested microsphere surface and direct diffraction side reference light optical path difference approximately equal, be less than the coherent length of light source, interference can be formed, and the optical path difference between other light beams exceeds coherent length, cannot interference be formed, incite somebody to action light as a setting.Namely effective interference signal is: the measurement light returned through tested microsphere surface and the reference light of direct diffraction.Bias light is: the directly measurement light of diffraction, the reference light returned through measured surface and surround lighting.Can effectively regulate the beam intensity ratio measuring light and reference light to adjust the contrast of interference field although rotate λ/2 wave plate, along with the adjustment of light intensity allocation proportion, bias light also changes thereupon, cannot obtain desirable interference field contrast.
And in the present invention, the polarization of polaroid be adjusted to through direction and the reference light before diffraction occur in the same way.Now, the measurement light of the tested microsphere surface of directive twice is through λ/4 wave plate 16, and change of polarized direction 90 °, can through polaroid, and directly the measurement light of diffraction cannot be through.The reference light of direct diffraction can directly through polaroid, and the reference light returned through measured surface is because twice through λ/4 wave plate, change of polarized direction 90 ° and cannot pass through polaroid.So, now can arrive the reference light of the measurement light only returned of area array CCD, directly diffraction and a small amount of surround lighting.Overwhelming majority bias light is polarized sheet interception, can change the light intensity ratio measuring light and reference light, obtain the interference fringe that contrast is good, thus the optimization realizing contrast is adjustable by rotating λ/2 wave plate.And rotate λ/2 wave plate and can change the measurement light of single-mode polarization maintaining fiber outgoing and the polarization direction of reference light simultaneously, measurement polarisation of light direction is adjusted to parallel with pin hole mirror reflecting surface, reduces the impact of the oblique reflection aberration that pinholed surface institute plating reflectance coating produces.
As shown in Figure 2, when measuring transparent beads, require that tested microsphere diameter is greater than the coherent length of LASER Light Source.Because surfaces externally and internally has measurement light to return, now only need suitably adjust according to tested microsphere diameter the optical path compensation amount postponing platform, just can realize the controlled selection of measured surface.
Claims (8)
1. micro-spherical short coherent point diffraction interference measuring system, it is characterized in that, it comprises short coherent laser (1), one λ/2 wave plate (2), corner cube mirror (3), polarization splitting prism (4), first prism of corner cube (5), first level crossing (6), second prism of corner cube (7), PZT phase shifter (8), postpone platform (9), 2nd λ/2 wave plate (10), fibre-coupled mirrors (11), single-mode polarization maintaining fiber (12), convergent lens (13), pin hole mirror (14), first collimation lens (15), λ/4 wave plate (16), microcobjective (17), second level crossing (18), second collimation lens (19), polaroid (20), area array CCD (21) and computing machine (22),
The shoot laser of short coherent laser (1) is incident to corner cube mirror (3) through λ/2 wave plate (2), the light entrance face of corner cube mirror (3) is vertical with the light splitting surface of polarization splitting prism (4), after incident light 90 ° turns to by the first right-angle surface of corner cube mirror (3), be incident to polarization splitting prism (4), and it is incident with light splitting surface angle at 45 °, the reflected light of polarization splitting prism (4) is incident to the first prism of corner cube (5) as measurement light, angle at 45 ° is incident to polarization splitting prism (4) to the emergent light of the first prism of corner cube (5) with light splitting surface again, the second right-angle surface of corner cube mirror (3) is incident to after polarization splitting prism (4) reflection,
The transmitted light of polarization splitting prism (4) is incident to the first level crossing (6) as with reference to light, after the first level crossing (6) reflection, be incident to the second prism of corner cube (7), the emergent light of the second prism of corner cube (7) is again after the first level crossing (6) reflection, be incident to polarization splitting prism (4), then be incident to the second right-angle surface of corner cube mirror (3) after polarization splitting prism (4) transmission; Second prism of corner cube (7) is arranged on the motion end face of PZT phase shifter (8), and PZT phase shifter (8) is arranged at and postpones on platform (9);
Measure light and reference light after the light splitting surface of polarization splitting prism (4) closes and restraints, be incident to the second right-angle surface of corner cube mirror (3), again by after penetrate after, single-mode polarization maintaining fiber (12) is incident to after the 2nd λ/2 wave plate (10) and fibre-coupled mirrors (11), the emergent light of single-mode polarization maintaining fiber (12) is after convergent lens (13) is assembled, through the glass substrate of pin hole mirror (14), converge on pin hole;
A part of after the first collimation lens (15) collimation by the diffraction light of pin hole outgoing, through λ/4 wave plate (16), then converge at tested microballoon (23) surface through microcobjective (17); The light beam obtained after tested microballoon (23) surface reflection is again after microcobjective (17), λ/4 wave plate (16) and the first collimation lens (15) collimation, reflected by the metal mirror of pin hole mirror (14), light beam directive second level crossing (18) that this reflection obtains, the reflected light of the second level crossing (18), after the second collimation lens (19) collimation, arrives area array CCD (21) through polaroid (20);
Directly reflected through the second level crossing (18) by diffraction light another part of pin hole outgoing, then after the second collimation lens (19) collimation, arrive area array CCD (21) through polaroid (20);
The image signal output end of area array CCD (21) connects the picture signal input end of computing machine (22); The control signal output terminal of computing machine (22) connects the control signal input end of PZT phase shifter (8).
2. micro-spherical according to claim 1 short coherent point diffraction interference measuring system, it is characterized in that, described first collimation lens (15), λ/4 wave plate (16), microcobjective (17) are coaxial with tested microballoon (23);
The focus of the first collimation lens (15) overlaps with the pin hole of pin hole mirror (14).
3. micro-spherical according to claim 2 short coherent point diffraction interference measuring system, is characterized in that, the centre of sphere of tested microballoon (23) is positioned at the center of microcobjective (17) outgoing beam.
4. micro-spherical according to claim 3 short coherent point diffraction interference measuring system, is characterized in that, the shoot laser wavelength 523nm of short coherent laser (1), coherent length 1mm; Single-mode polarization maintaining fiber (12) long 10m, core diameter 6 μm.
5. micro-spherical according to claim 4 short coherent point diffraction interference measuring system, is characterized in that, the extinction ratio of polaroid (20) is 10000:1.
6. micro-spherical according to claim 5 short coherent point diffraction interference measuring system, is characterized in that, the polarization of polaroid (20) is identical with the direction of propagation of the reference light occurred before diffraction through direction.
7., based on micro-spherical short coherent point diffraction interference measuring method of spherical micro-described in claim short coherent point diffraction interference measuring system, it is characterized in that,
The linearly polarized light beam of short coherent laser (1) outgoing is behind λ/2 wave plate (2) adjustment polarization direction, reflect through corner cube mirror (3), 90 ° turn to, and are two bundles in the light splitting surface punishment of polarization splitting prism (4);
Three-dimensional adjustment is carried out to delay platform (9), micrometric displacement is carried out to PZT phase shifter (8) and moves, realize micrometric displacement phase shift campaign and the motion of Long Distances optical path compensation of the second prism of corner cube (7);
The measurement light closed after bundle is consistent with the reference light direction of propagation, and polarization direction is orthogonal;
The approximate spherical wave of single-mode polarization maintaining fiber (12) end outgoing, after the pin hole of convergent lens (13) and pin hole mirror (14), produces diffraction, generates ideal ball ground roll;
After arriving area array CCD (21) by a diffraction light part for pin hole outgoing with another part, form interference pattern; PZT phase shifter (8) is made to drive the second prism of corner cube (7) mobile, area array CCD (21) collection obtains the interference pattern of several changes, this interference pattern as calculated machine (22) resolves, obtain the initial phase difference between measurement light and reference light that in interference field, each pixel is corresponding, and then try to achieve optical path difference between the two, realize the measuring surface form of tested microballoon (23).
8. micro-spherical according to claim 7 short coherent point diffraction interference measuring method, is characterized in that, rotate λ/2 wave plate (2) and change the light intensity ratio measuring light and reference light, the optimization realizing interference field contrast is adjustable; Rotate the 2nd λ/2 wave plate (10) and change the measurement light of single-mode polarization maintaining fiber (12) outgoing and the polarization direction of reference light, make measurement polarisation of light direction parallel with the reflecting surface of pin hole mirror (14).
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| CN112902833B (en) * | 2021-03-04 | 2022-02-18 | 哈尔滨工业大学 | Anti-vibration short-coherence space-time hybrid phase-shifting Fizeau interferometer |
| CN112903713A (en) * | 2021-03-09 | 2021-06-04 | 哈尔滨工业大学 | Dark field imaging and spatial phase-shifting interference combined microsphere defect detection device and method |
| CN112964197A (en) * | 2021-03-23 | 2021-06-15 | 哈尔滨工业大学 | Micro-sphere surface morphology detection device based on negative feedback phase-locked vibration suppression |
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