CN107941477A - A kind of spectroscope measuring method and device that can accurately control incidence angle - Google Patents
A kind of spectroscope measuring method and device that can accurately control incidence angle Download PDFInfo
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Abstract
In order to solve the technical problem that traditional spectroscope splitting ratio and reflection and transmission rate measuring method light path is complicated, error is big, the present invention provides a kind of spectroscope measuring method and device that can accurately control incidence angle.Characteristic of the present invention based on spectroscope to part light reflection, using the method for aperture, pentaprism and the second plane mirror autocollimatic, reduces the error of optical path；Solves the calibration to 45 ° of incident angle benchmark using the method for autocollimator vertical incidence；The accurate control to spectroscope incidence angle small angle variation is realized using the angle detection function of autocollimator, when autocollimator precision is 1 " when, incident angle control accuracy can reach 0.5 " magnitude.
Description
Technical field
The invention belongs to spectroscope fields of measurement, is related to a kind of spectroscope measuring method and dress that can accurately control incidence angle
Put.The present invention is suitable for measuring spectroscope and the spectroscopical measurement of light intensity.
Background technology
Spectroscope is a kind of common optical element, light beam can be divided into two parts according to different light splitting requirements, pressed
It can be divided into light intensity spectroscope, measuring spectroscope and polarization spectroscope according to dichroism.With the development of optical film technique, divide
Light microscopic typically plates some layer films to realize that light splitting requires on the glass substrate.Most common use of spectroscope is exactly with certain
Incident angle it is incident, wherein 45 ° of incidence angles are most commonly seen, and spectroscope is due to the difference of design requirement, complicated spectro-film pair
Angle is extremely sensitive, along with deviation caused by coating process, be easy to cause the offset of optimized incidence.In addition, work as spectroscope
During applied in optical system, due to the influence of assembly technology, there are certain error for assembling incidence angle.The change of incidence angle can draw
The change of dichroic mirror rate, transmitance is played, reduces spectroscopical design objective.Therefore need after spectroscope machines,
Reflectivity, transmissivity and its change in the range of design incidence angle and incidence angle small angle variation is measured：First, detection
Whether the incidence angle of design offsets in process, second, the accurately reflectivity in the range of measurement incidence angle small angle variation
Change with transmissivity, determine the tolerance in light path assembling process.
There are problems with for traditional spectroscope splitting ratio and reflection and transmission rate measuring method：To improve measurement accuracy, its
Optical system for testing and method are often more complicated；In addition, can not accurately be controlled incident angle and its small angle variation, measure
Error is big.
The content of the invention
Asked to solve the technology that traditional spectroscope splitting ratio and reflection and transmission rate measuring method light path is complicated, error is big
Topic, the present invention provides a kind of spectroscope measuring method and device that can accurately control incidence angle, based on spectroscope to part light
The characteristic of reflection, using the method for aperture, pentaprism and the second plane mirror autocollimatic, (autocollimatic is primarily referred to as these three
Element), reduce the error of optical path；Solved using the method for autocollimator vertical incidence to 45 ° of incident angle bases
Accurate calibration；The accurate control to spectroscope incidence angle small angle variation is realized using the angle detection function of autocollimator
System, angle control range are related with autocollimator visual field.
The present invention technical solution be：
A kind of spectroscope measuring method that can accurately control incidence angle, comprises the following steps：
Step 1, build light path
1.1) tunable laser, collimating mirror, aperture, the first plane mirror are set gradually；Due to aperture light
The size of the center-hole diameter D of door screen is related with measurement error, and D is smaller, and measurement error is smaller；But from beam energy and it is easy to see
For the angle examined, D is too small to cause human eye not observe, therefore center-hole diameter D=0.1~1mm of the aperture；
1.2) pentaprism is set on the reflected light path of first plane mirror；
1.3) the second plane mirror is set on the emitting light path of the pentaprism；
Above-mentioned steps 1.1) -1.3) in, often set an optical element, the pitching of the optical element should be adjusted, make by
The light beam of the optical element is located in horizontal plane, so after step 1.3) is completed, by all optical elements light beam all
In same level plane；
Step 2, carry out light path debugging in horizontal plane
2.1) 90 ° of light path autocollimatics；
2.1.1 the collimated mirror collimation of laser for) sending tunable laser；
2.1.2 light beam obtains small-bore light beam by the centre bore of the aperture after) making collimation；
2.1.3 the first plane mirror) is adjusted, the small-bore light beam is turned back by first plane mirror,
It is incident to pentaprism；
2.1.4 pentaprism posture) is adjusted, makes to be incident to the first plane mirror by the light beam that the pentaprism plane of incidence reflects,
After the reflection of the first plane mirror, into the centre bore of the aperture；
2.1.5 the second plane mirror) is adjusted, makes to turn back the light beam after 90 ° after the reflection of the second plane mirror by pentaprism,
Pentaprism is again introduced into, turns back through pentaprism and is incident to the first plane mirror after 90 °, after being reflected by the first plane mirror,
Into the centre bore of the aperture；
2.2) 45 ° of input path autocollimatics of spectroscope to be measured；
2.2.1 the pentaprism is replaced with into spectroscope to be measured；
2.2.2 adjust spectroscope posture to be measured, make dichroic mirror to be measured deflect after light by the second plane mirror
Spectroscope to be measured is reflected back, after deflecting again, is incident to the first plane mirror, is entered after the reflection of the first plane mirror
The centre bore of the aperture；
2.3) 45 ° of benchmark calibrations of spectroscope to be measured；
It is first plane of incidence that spectroscope to be measured, which is defined, in face of the face of the first plane mirror, and spectroscope to be measured is flat away from first
The face of face speculum is second plane of incidence；Using autocollimator vertical incidence spectroscopical second plane of incidence to be measured, treated
Survey 45 ° of benchmark calibrations of spectroscope；
Step 3, measurement
3.1) aperture is replaced with into adjustable diaphragm or bore more than light splitting aperture of mirror to be measured and does not block light
Non-adjustable diaphragm, first laser power meter is replaced with by the second plane mirror, in the transmission of first plane of incidence of spectroscope to be measured
Place second laser power meter in direction；Light path and second laser work(between the first laser power meter and tunable laser
Equivalent optical path between rate meter and tunable laser；
3.2) adjusting adjustable diaphragm makes the light beam for being incident to the first plane mirror reach suitable bore；
3.3) measure；
The first situation：If spectroscope to be measured is measuring spectroscope；
3.3.1 reflection efficiency η of the spectroscope to be measured to different angle incident light) is measuredR(θ)；
3.3.1.1 spectroscope posture to be measured) is adjusted, incident angle is controlled using autocollimator, utilizes first laser work(
Rate measures must be through the intensity of reflected light I after dichroic mirror to be measuredR1(θ)；
3.1.1.2 spectroscope to be measured) is removed, the incident intensity I of measuring beam is measured using second laser power meterR0(θ)；
3.1.1.3) reflection efficiency η of the spectroscope to be measured to different angle incident light is calculated using following formulaR(θ)：
3.3.2 reflection efficiency η of the spectroscope to be measured to different angle incident light) is measuredT(θ)；
3.3.2.1) by spectroscope to be measured add light path, using in step 2.3) autocollimator demarcate 45 ° of benchmark into
Row autocollimatic, the output wavelength for adjusting tunable laser is the transmitted light wavelength of spectroscopic design to be measured；
3.3.2.2 spectroscope posture to be measured) is adjusted, incident angle is controlled by autocollimator, utilizes second laser work(
Rate measures the transmitted intensity I after must being transmitted through spectroscope to be measuredT1(θ)；
3.3.2.3 spectroscope to be measured) is removed, the incident intensity I of measuring beam is measured using second laser power meterT0(θ)；
3.3.2.4) efficiency of transmission η of the spectroscope to be measured to different angle incident light is calculated using following formulaT(θ)：
Second case：If spectroscope to be measured is light intensity spectroscope；
3.1.1 spectroscope posture to be measured) is adjusted, incident angle is controlled by autocollimator, utilizes first laser power
Measuring must be through the intensity of reflected light I after dichroic mirror to be measuredR1(θ), is measured through light splitting to be measured using second laser power meter
Transmitted intensity I after mirror transmissionT1(θ)；
3.1.2) spectroscope to be measured is calculated to different angle incident light, the ratio between its transmitted light and reflected light K using following formula：
Further, it is contemplated that for some spectroscopical measurements, the laser of use can only select black light, the step
It is rapid 1.1) in use aperture use be made of fluorescent material or surface coating fluorescent material photosensitive aperture, this
Sample can see spot size incident thereon and position on two faces of diaphragm.
Further, pentaprism is placed on the turntable with regulating device in the step 1.2), by the turntable
It is placed on the reflected light path of first plane mirror.
Further, the step 2.1.4) and 2.1.5) in, should control make the reflected light hot spot of the first plane mirror with it is small
Registration error between the diaphragm centre bore of hole is less than D/8, to reduce measurement error.
Invention also provides a kind of measuring device for realizing above-mentioned spectroscope measuring method, it is characterized in that：
Including tunable laser, collimating mirror, aperture, the first plane mirror, turntable, pentaprism, the second plane mirror, from
Collimating light pipe, first laser power meter, second laser power meter；Center-hole diameter D=0.1~1mm of the aperture；
The measuring device further includes adjustable diaphragm or bore is more than light splitting aperture of mirror to be measured and does not block the non-adjustable of light
Diaphragm；
The tunable laser, aperture, collimating mirror, the first plane mirror are set gradually；
The turntable is arranged on the reflected light path of first plane mirror；The turntable is adjusted with six degree of freedom
Device；The turntable is used for pentaprism described in fixed placement or spectroscope to be measured；
The pentaprism, the second plane mirror and aperture are used for 90 ° of light path autocollimatics, and when measurement is removed；90°
Light path is set on the turntable from the punctual pentaprism by the regulating device, and second plane mirror is arranged on
On the emitting light path of the pentaprism；
The autocollimator is used to demarcate spectroscopical 45 ° of benchmark to be measured and carries out 45 ° of references angle monitorings；
During measurement, the aperture is more than light splitting aperture of mirror to be measured by the adjustable diaphragm or bore and does not block light
Non-adjustable diaphragm is replaced, and second plane mirror is replaced by the first laser power meter；The first laser power meter
On spectroscopical reflected light path to be measured；The second laser power meter is arranged on spectroscopical transmitted light path to be measured, with
The first laser power meter aplanatism is set.
Further, it is contemplated that for some spectroscopical measurements, the laser of use can only select black light, described small
Hole diaphragm is used to be made or the photosensitive aperture of surface coating fluorescent material of fluorescent material, such two faces in diaphragm
On, it can see spot size incident thereon and position.
Further, the center-hole diameter D of the photosensitive aperture, the light of photosensitive aperture to the pentaprism plane of incidence
Learn distance L1And second plane mirror from pentaprism exit facet optical distance L2Chosen by following formula：
In formula, Δ1To debug error caused by light path using pentaprism；Δ2To debug light using the second plane mirror
Error caused by road；Δ is the worst error of 90 ° of light path autocollimatics.
Further, the L1=3m, L2When=1m, D=0.5mm, light path debugging is convenient and precision is higher, maximum measurement
Error is less than 1.88 ".
Compared with prior art, it is an advantage of the invention that：
1) present invention is turned back using the first plane mirror progress light path, and it is incident to pentaprism to add photosensitive aperture
The optical distance in face, improves measurement accuracy；
Photosensitive aperture, pentaprism and the second plane mirror are used when light path is debugged, in same optical axis plane
Pentaprism incident light and the second plane mirror normal exact vertical are realized, improves 90 ° of autocollimatic precision, and then improve survey
Accuracy of measurement；
Spectroscopical 45 ° of incidence angles to be measured accurately monitoring and 45 ° of benchmark calibrations are realized using autocollimator, are realized
Same light path once debugs multiple measurement, and measurement efficiency is high；
The accurate control of incidence angle change is realized using autocollimator, angle control precision σ is autocollimator essence
Spend σ1Half, i.e.,When autocollimator precision is 1 " when, incident angle control accuracy can reach 0.5 " magnitude；
Device is simple, and light path is easy to adjust, and measuring method is easy to grasp；
Coordinated using collimating mirror and adjustable diaphragm, point of different bores on the premise of guaranteeing in quantity set, can be measured
Light microscopic.
2) 90 ° of light path autocollimatic error deltas of the invention are：
In above formula, D is the centre bore bore of photosensitive aperture；
L1Optical distance for the first plane mirror to the pentaprism plane of incidence；
L2For optical distance of second plane mirror from pentaprism exit facet；
According to above-mentioned formula, as selection D=0.5mm, L1=3m, L2During=1m, the worst error Δ of 90 ° of light path autocollimatics is small
In 3.76 ", the worst error of spectroscope angular surveying to be measured is less than Δ/2, i.e. maximum error of measuring is less than 1.88 ", than existing
Technology measurement error significantly reduces.
3) from above-mentioned formula can be seen that the present invention twice the autocollimatic light path of light path it is longer, measurement accuracy advantage is bigger,
Therefore first plane mirror can be positioned over to diverse location in measurement, the second plane mirror of adjustment is from pentaprism exit facet
Distance, so as to meet different error requirements.
4) present invention using with six-degree-of-freedom adjusting turntable, adjustment pentaprism/spectroscopical position to be measured and
Posture, it is convenient and efficient.
5) measuring method applicability of the invention is wide, can have one to any by adjusting the position of autocollimator
Or the optics of multiple mirror-reflection planes carries out angle control.
Brief description of the drawings
Fig. 1 is 90 ° of light path autocollimatic principle schematics of the embodiment of the present invention.
Fig. 2 is 45 ° of benchmark calibration principle schematics of spectroscope incident beam to be measured of the embodiment of the present invention.
Fig. 3 is the spectroscope measuring principle schematic diagram of inventive embodiments.
Figure label：1- tunable laser, 2- collimating mirrors, the photosensitive apertures of 3-, the first plane mirrors of 4-, 5- turn
Platform, 6- pentaprisms, 7- spectroscopes to be measured, the second plane mirrors of 8-, 9- autocollimators, 10- first laser power meters, 11-
Second laser power meter, 12- adjustable diaphragms.
Embodiment
Elaborate below in conjunction with attached drawing to the present invention.
The method of the present invention includes build light path, light path debugging and the step greatly of measurement three.
First, light path is built
Step 1, by tunable laser 1, collimating mirror 2, photosensitive aperture 3, the first plane made of fluorescent material
Speculum 4 is set gradually along same light path；Laser beam bore can be limited by the centre bore of photosensitive aperture 3, improve light
Road adjustment accuracy；Required laser during due to measuring some spectroscopes is black light, therefore uses photosensitive aperture 3 can
Clear observation reflected light facula position, it is convenient to debug light path；In other embodiments, it is photosensitive if visible photo measure can be used
Aperture 3 can be substituted with common diaphragm, certainly, also may be used using photosensitive aperture 3；The effect of first plane mirror 4 is
Turn back light path, increase photosensitive aperture 3 to the optical distance between 6 plane of incidence of pentaprism；In view of 4 folding of the first plane mirror
Turn the effect of light path, the angle between the first plane mirror 4 and its incident beam only requires that the first plane is anti-without particular requirement
The angle penetrated between the incident ray of mirror 4 and reflection light is acute angle, and on the one hand can turn back light path, makes experiment light path tighter
Gather, on the other hand can adjust optical path distance, adjust measurement error；
Step 2, set pentaprism 6 on the reflected light path of first plane mirror 4；, will for ease of pose adjustment
Pentaprism 6 is placed on turntable 5；Turntable 5 carries six-degree-of-freedom adjusting, can adjust the position and attitude of pentaprism 6；
Step 3, set the second plane mirror 8 on the emitting light path of turning back of the pentaprism 6；
In order to ensure measuring accuracy, above-mentioned steps 1.1) -1.3) in, an optical element is often set, the optics should be adjusted
The pitching of element, makes to be located in horizontal plane by the light beam of the optical element, so after step 1.3) is completed, by all
The light beam of optical element is all located in same level plane；
2nd, light path debugging is carried out in horizontal plane
Step 1,90 ° of light path autocollimatics；
The collimated mirror 2 of 1.1 laser for sending tunable laser 1 collimates；
1.2 make collimation after light beam by the centre bore of photosensitive aperture 3, obtain small-bore light beam；
1.3 only adjust the first plane mirror 4 (not adjusting pitching, only adjust orientation) in two dimensional surface, make osculum
Footpath light beam is turned back by the first plane mirror 4, is incident to pentaprism 6；
1.4 first time autocollimatics；
Rotating table 5 enters the light beam by the reflection of 6 plane of incidence of pentaprism to adjust 6 posture of pentaprism in horizontal plane
The first plane mirror 4 is incident upon, after the reflection of the first plane mirror 4, returns to the centre bore of the photosensitive aperture 3, shape
Into 6 vertical incidence light path of pentaprism；
1.5 second of autocollimatic；
The second plane mirror 8 is adjusted in horizontal plane, makes to turn back the light beam after 90 ° (i.e. by five ribs by pentaprism 6
The light beam of mirror 6) after the reflection of the second plane mirror, pentaprism 6 is again introduced into, turns back through pentaprism 6 and is incident to the first plane after 90 °
Speculum 4, after being reflected by the first plane mirror 4, returns to the centre bore of the photosensitive aperture 3, formation is incident to five ribs
6 light beam of mirror, the 90 ° light paths vertical with 8 normal of the second plane mirror；
Light path by the straight light path of autocollimatic twice of above-mentioned steps 1.4 and 1.5 is longer, and measurement error is smaller, light path such as Fig. 1
It is shown；Can by adjust the first plane mirror 4 and the second plane mirror 8 each the optics between 6 minute surface of pentaprism away from
From adjustment measurement accuracy；When the light distance of the first plane mirror 4 and the incident minute surface of pentaprism 6 is 3m, the second plane reflection
The optical distance that mirror 8 is emitted minute surface with pentaprism 6 is 1m, when the centre bore aperture of photosensitive aperture 3 is 0.5m, 90 ° of light paths
The worst error of autocollimatic is less than 3.76 ", spectroscopical maximum error of measuring is less than 1.88 ".
In above-mentioned steps 1.4 and 1.5, the reflected light hot spot for making the first plane mirror and photosensitive 3 center of aperture should be controlled
Registration error between hole is less than D/8, to reduce measurement error；D is the centre bore bore of photosensitive aperture 3.
745 ° of step 2, spectroscope to be measured input path autocollimatics；
The pentaprism 6 is replaced with spectroscope 7 to be measured by 2.1；
2.2 rotating tables 5 make the light after the reflection of spectroscope 7 deflection to be measured by second to adjust 7 posture of spectroscope to be measured
Plane mirror 8 is reflected back spectroscope 7 to be measured, after deflecting again, is incident to the first plane mirror 4, anti-through the first plane
Penetrate after mirror 4 reflects and enter the centre bore of the photosensitive aperture 3, complete 745 ° of input path autocollimatics of spectroscope to be measured；For
Measuring spectroscope, the output wavelength for adjusting tunable laser 1 is 7 reflected light wavelength of spectroscope to be measured, for light intensity spectroscope,
The output wavelength for adjusting tunable laser 1 is the wavelength of light intensity spectroscopic design light；
745 ° of step 3, spectroscope to be measured benchmark calibrations；
It is first plane of incidence that spectroscope 7 to be measured, which is defined, in face of the face of the first plane mirror 4, and spectroscope 7 to be measured deviates from the
The face of one plane mirror 4 is second plane of incidence；Using second plane of incidence of 9 vertical incidence of autocollimator spectroscope 7 to be measured,
745 ° of benchmark calibrations of spectroscope to be measured are carried out, as shown in Figure 2.
3rd, measure
After step 1, light path debugging are completed, the photosensitive aperture 3 is replaced with into adjustable diaphragm 12 or bore is big
The non-adjustable diaphragm of light is not blocked in 7 bore of spectroscope to be measured and, the second plane mirror 8 is replaced with into first laser power meter
10, second laser power meter 11 is placed in transmission direction and the reflected light path aplanatism position of 7 first plane of incidence of spectroscope to be measured,
As shown in Figure 3；According to adjustable diaphragm 12, then beam diameter can be adjusted according to light splitting aperture of mirror, be incided so as to adjust
The beam diameter of spectroscope 7 to be measured, to ensure stable and larger incident laser energy, while eliminates the excessive screening brought of hot spot
Gear, concentrates incident laser energy.The aplanatism refers to the light between first laser power meter 10 and tunable laser 1
Equivalent optical path between journey and second laser power meter 11 and tunable laser 1, since laser has decay in atmosphere, waits light
Journey can ensure that decay intensity is identical, avoid influencing measurement accuracy because laser attenuation intensity is different.
The light beam that step 2, adjusting adjustable diaphragm 12 make to be incident to the first plane mirror 4 reaches suitable bore；Here institute
That states suitable refers specifically to not only without blocking but also can guarantee that higher-energy concentration degree.
Step 3, measurement；
(1) if spectroscope to be measured 7 is measuring spectroscope：
Reflection efficiency η of the 1.1 measurement spectroscopes 7 to be measured to different angle incident lightR(θ)；
1.1.1 rotating table 5, by 9 vertical incidence of autocollimator spectroscope 7 to be measured, control is incident to light splitting to be measured
The laser incident angle θ of mirror 7 simultaneously reads the variable quantity of incident angle θ, is measured using first laser power meter 10 through light splitting to be measured
Intensity of reflected light I after the reflection of mirror 7R1(θ)；
1.1.2 spectroscope 7 to be measured is removed, the incident intensity I of measuring beam is measured using second laser power meter 11R0(θ)；
1.1.3 reflection efficiency η of the spectroscope 7 to be measured to different angle incident light is calculated using following formulaR(θ)：
Efficiency of transmission η of the 1.2 measurement spectroscopes 7 to be measured to different angle incident lightT(θ)；
1.2.1 spectroscope 7 to be measured is added into light path, the 45 ° of benchmark demarcated using autocollimator 9 carry out autocollimatic, adjust
The output wavelength of tunable laser 1 is the transmitted light wavelength of spectroscope 7 to be measured design；
1.2.2 rotating table 5, by 9 vertical incidence of autocollimator spectroscope 7 to be measured, control incident angle and read
Incident angle variable quantity, the transmitted intensity I after being transmitted through spectroscope 7 to be measured is measured using second laser power meter 11T1
(θ)；
1.2.3 spectroscope 7 to be measured is removed, the incident intensity I of measuring beam is measured using second laser power meter 11T0(θ)；
1.2.4 efficiency of transmission η of the spectroscope 7 to be measured to different angle incident light is calculated using following formulaT(θ)：
(2) if spectroscope to be measured 7 is light intensity spectroscope：
1.1 rotating tables 5, by 9 vertical incidence of autocollimator spectroscope 7 to be measured, control is incident to spectroscope 7 to be measured
Laser incident angle θ and read the variable quantity of incident angle θ, measured using first laser power meter 10 through spectroscope 7 to be measured
Intensity of reflected light I after reflectionR1(θ), the transmission after being transmitted through spectroscope 7 to be measured is measured using second laser power meter 11
Luminous intensity IT1(θ)；
1.2 calculate spectroscope 7 to be measured to different angle incident light, the ratio between its transmitted light and reflected light K using following formula：
In above-mentioned steps 3, when being incident to the laser incident angle of spectroscope 7 to be measured using the control of autocollimator 9, laser
The changing value of incident angle is twice of incident value, and therefore, angle control precision is the 1/2 of 9 precision of autocollimator.In addition,
The position of autocollimator 9 is adjusted, can be to any optics device with one or more reflectings surface using the method for the present invention
45 ° of incident angles of part are accurately controlled.
Measuring principle of the present invention：
After the completion of 90 ° of light path autocollimatics, pentaprism 6 is replaced with into spectroscope 7 to be measured first, according to spectroscope 7 to be measured to anti-
The optical lever effect of light is penetrated, only when the incidence angle of spectroscope 7 to be measured is 45 °, reflection of the spectroscope 7 to be measured to light beam is made
With the 90 ° of effects of turning back that can substitute pentaprism 6, light path autocollimatic is carried out, it is incident to form spectroscope 45° angle.Then, auto-collimation is used
9 vertical incidence of light pipe spectroscope 7 to be measured carries out 45 ° of references angle monitorings, and photosensitive aperture 3 is replaced with adjustable diaphragm 12,
The light intensity of 7 reflected light of spectroscope and transmitted light to be measured is measured, and removes the light intensity of incident light measured after spectroscope 7 to be measured, into
And it can obtain splitting ratio, reflection efficiency, the efficiency of transmission of spectroscope 7 to be measured.
Claims (8)
1. a kind of spectroscope measuring method that can accurately control incidence angle, it is characterised in that comprise the following steps：
Step 1, build light path
1.1) tunable laser (1), collimating mirror (2), aperture, the first plane mirror (4) are set gradually；It is described small
Center-hole diameter D=0.1~1mm of hole diaphragm；
1.2) pentaprism (6) is set on the reflected light path of first plane mirror (4)；
1.3) the second plane mirror (8) is set on the emitting light path of the pentaprism (6)；
Above-mentioned steps 1.1) -1.3) in, an optical element is often set, the pitching of the optical element should be adjusted, made by the light
The light beam for learning element is located in horizontal plane, so after step 1.3) is completed, is all located at by the light beam of all optical elements
In same level plane；
Step 2, carry out light path debugging in horizontal plane
2.1) 90 ° of light path autocollimatics；
2.1.1) the collimated mirror of laser (2) for sending tunable laser (1) collimates；
2.1.2 light beam obtains small-bore light beam by the centre bore of the aperture after) making collimation；
2.1.3 the first plane mirror (4)) is adjusted, the small-bore light beam is rolled over by first plane mirror (4)
Turn, be incident to pentaprism (6)；
2.1.4 pentaprism (6) posture) is adjusted, the light beam by the reflection of pentaprism (6) plane of incidence is incident to the first plane mirror
(4), after the first plane mirror (4) reflection, into the centre bore of the aperture；
2.1.5 the second plane mirror (8)) is adjusted, the light beam after 90 ° that makes to be turned back by pentaprism (6) is reflected through the second plane mirror
Afterwards, pentaprism (6) is again introduced into, turns back through pentaprism (6) and is incident to the first plane mirror (4) after 90 °, it is anti-by the first plane
After penetrating mirror (4) reflection, into the centre bore of the aperture；
2.2) (7) 45 ° of input path autocollimatics of spectroscope to be measured；
2.2.1 the pentaprism (6) is replaced with into spectroscope to be measured (7)；
2.2.2 adjust spectroscope to be measured (7) posture, make spectroscope to be measured (7) reflection deflection after light by the second plane reflection
Mirror (8) is reflected back spectroscope to be measured (7), after deflecting again, the first plane mirror (4) is incident to, through the first plane reflection
Enter the centre bore of the aperture after mirror (4) reflection；
2.3) (7) 45 ° of benchmark calibrations of spectroscope to be measured；
It is first plane of incidence that spectroscope to be measured (7), which is defined, in face of the face of the first plane mirror (4), and spectroscope (7) to be measured is deviated from
The face of first plane mirror (4) is second plane of incidence；Use the of autocollimator (9) vertical incidence spectroscope to be measured (7)
Two planes of incidence, carry out (7) 45 ° of benchmark calibrations of spectroscope to be measured；
Step 3, measurement
3.1) aperture is replaced with into adjustable diaphragm (12) or bore more than spectroscope to be measured (7) bore and does not block light
Non-adjustable diaphragm, the second plane mirror (8) is replaced with into first laser power meter (10), in spectroscope (7) first to be measured
The transmission direction of the plane of incidence places second laser power meter (11)；The first laser power meter (10) and tunable laser
(1) equivalent optical path between light path and second laser power meter (11) and tunable laser (1) between；
3.2) light beam that adjusting adjustable diaphragm (12) makes to be incident to the first plane mirror (4) reaches suitable bore；
3.3) measure；
The first situation：If spectroscope (7) to be measured is measuring spectroscope；
3.3.1 reflection efficiency η of the spectroscope (7) to be measured to different angle incident light) is measuredR(θ)；
3.3.1.1 spectroscope (7) posture to be measured) is adjusted, incident angle is controlled using autocollimator (9), utilizes first laser
Power meter (10) measures the intensity of reflected light I after being reflected through spectroscope to be measured (7)R1(θ)；
3.1.1.2 spectroscope (7) to be measured) is removed, the incident intensity I of measuring beam is measured using second laser power meter (11)R0
(θ)；
3.1.1.3) reflection efficiency η of the spectroscope (7) to be measured to different angle incident light is calculated using following formulaR(θ)：
<mrow>
<msub>
<mi>&eta;</mi>
<mi>R</mi>
</msub>
<mrow>
<mo>(</mo>
<mi>&theta;</mi>
<mo>)</mo>
</mrow>
<mo>=</mo>
<mfrac>
<mrow>
<msub>
<mi>I</mi>
<mrow>
<mi>R</mi>
<mn>1</mn>
</mrow>
</msub>
<mrow>
<mo>(</mo>
<mi>&theta;</mi>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<msub>
<mi>I</mi>
<mrow>
<mi>R</mi>
<mn>0</mn>
</mrow>
</msub>
<mrow>
<mo>(</mo>
<mi>&theta;</mi>
<mo>)</mo>
</mrow>
</mrow>
</mfrac>
<mo>;</mo>
</mrow>
3.3.2 reflection efficiency η of the spectroscope (7) to be measured to different angle incident light) is measuredT(θ)；
3.3.2.1 spectroscope to be measured (7)) is added into light path, the 45 ° of benchmark demarcated using autocollimator in step 2.3) (9)
Autocollimatic is carried out, the output wavelength for adjusting tunable laser (1) is the transmitted light wavelength of spectroscope to be measured (7) design；
3.3.2.2 spectroscope (7) posture to be measured) is adjusted, incident angle is controlled by autocollimator (9), utilizes second laser
Power meter (11) measures the transmitted intensity I after being transmitted through spectroscope to be measured (7)T1(θ)；
3.3.2.3 spectroscope (7) to be measured) is removed, the incident intensity I of measuring beam is measured using second laser power meter (11)T0
(θ)；
3.3.2.4) efficiency of transmission η of the spectroscope (7) to be measured to different angle incident light is calculated using following formulaT(θ)：
<mrow>
<msub>
<mi>&eta;</mi>
<mi>T</mi>
</msub>
<mrow>
<mo>(</mo>
<mi>&theta;</mi>
<mo>)</mo>
</mrow>
<mo>=</mo>
<mfrac>
<mrow>
<msub>
<mi>I</mi>
<mrow>
<mi>T</mi>
<mn>1</mn>
</mrow>
</msub>
<mrow>
<mo>(</mo>
<mi>&theta;</mi>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<msub>
<mi>I</mi>
<mrow>
<mi>T</mi>
<mn>0</mn>
</mrow>
</msub>
<mrow>
<mo>(</mo>
<mi>&theta;</mi>
<mo>)</mo>
</mrow>
</mrow>
</mfrac>
<mo>;</mo>
</mrow>
Second case：If spectroscope (7) to be measured is light intensity spectroscope；
3.1.1 spectroscope (7) posture to be measured) is adjusted, incident angle is controlled by autocollimator (9), utilizes first laser work(
Rate meter (10) measures the intensity of reflected light I after being reflected through spectroscope to be measured (7)R1(θ), is surveyed using second laser power meter (11)
Transmitted intensity I after must being transmitted through spectroscope to be measured (7)T1(θ)；
3.1.2) spectroscope (7) to be measured is calculated to different angle incident light, the ratio between its transmitted light and reflected light K using following formula：
2. the spectroscope measuring method according to claim 1 that can accurately control incidence angle, it is characterised in that：The step
1.1) in use aperture use be made of fluorescent material or surface be coated with fluorescent material photosensitive aperture
(3)。
3. the spectroscope measuring method according to claim 1 that can accurately control incidence angle, it is characterised in that：The step
1.2) pentaprism (6) is placed on the turntable with regulating device (5) in, it is flat that the turntable (5) is placed on described first
On the reflected light path of face speculum (4).
4. the spectroscope measuring method according to claim 1 that can accurately control incidence angle, it is characterised in that：The step
2.1.4 in) and 2.1.5), should control misses the registration between the reflected light hot spot of the first plane mirror and aperture centre bore
Difference is less than D/8, and D is the center-hole diameter of aperture.
5. it can accurately control the spectroscope measuring device of incidence angle, it is characterised in that：Including tunable laser (1), collimating mirror
(2), aperture, the first plane mirror (4), turntable (5), pentaprism (6), the second plane mirror (8), autocollimator
(9), first laser power meter (10), second laser power meter (11)；The center-hole diameter D=0.1 of the aperture~
1mm；
What the measuring device further included that adjustable diaphragm (12) or bore be more than spectroscope to be measured (7) bore and do not block light can not
Light modulation door screen；
The tunable laser (1), aperture, collimating mirror (2), the first plane mirror (4) are set gradually；
The turntable (5) is arranged on the reflected light path of first plane mirror (4)；The turntable (5) is free with six
Spend regulating device；The turntable (5) is used for pentaprism (6) described in fixed placement or spectroscope to be measured (7)；
The pentaprism (6), the second plane mirror (8) and aperture are used for 90 ° of light path autocollimatics, and when measurement is removed；
90 ° of light paths are arranged on the turntable (5) from the punctual pentaprism (6) by the regulating device, and second plane is anti-
Mirror (8) is penetrated to be arranged on the emitting light path of the pentaprism (6)；
The autocollimator (9) is used for 45 ° of benchmark for demarcating spectroscope to be measured (7) and carries out 45 ° of references angle monitorings；
During measurement, the aperture is more than spectroscope to be measured (7) bore and is not blocked by the adjustable diaphragm (12) or bore
The non-adjustable diaphragm of light is replaced, and second plane mirror (8) is replaced by the first laser power meter (10)；Described first
Laser power meter (10) is located on the reflected light path of spectroscope to be measured (7)；The second laser power meter (11) is arranged on to be measured
On the transmitted light path of spectroscope (7), set with first laser power meter (10) aplanatism.
6. the spectroscope measuring device according to claim 5 that can accurately control incidence angle, it is characterised in that：The aperture
Diaphragm use be made of fluorescent material or surface be coated with fluorescent material photosensitive aperture (3).
7. the spectroscope measuring device according to claim 6 that can accurately control incidence angle, it is characterised in that：It is described photosensitive
Center-hole diameter D, the optical distance L of photosensitive aperture to pentaprism (6) plane of incidence of aperture (3)1And second is flat
Optical distance L of the face speculum (8) from pentaprism (6) exit facet2Chosen by following formula：
In formula, Δ1To debug error caused by light path using pentaprism (6)；Δ2For using the second plane mirror (8) debugging
Error caused by light path；Δ is the worst error of 90 ° of light path autocollimatics.
8. the spectroscope measuring device according to claim 7 that can accurately control incidence angle, it is characterised in that：The L1=
3m,L2=1m, D=0.5mm.
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| CN108692920A (en) * | 2018-05-11 | 2018-10-23 | 中国科学院西安光学精密机械研究所 | A kind of reflection-type light beam segmentation etc. is than demultiplier and its producing device, production method |
| CN109143906A (en) * | 2018-10-19 | 2019-01-04 | 中国航空制造技术研究院 | A kind of intelligence diaphragm and laser calibration method |
| CN109632262A (en) * | 2018-12-29 | 2019-04-16 | 深圳航星光网空间技术有限公司 | A kind of calibration system of block prism |
| CN110864647A (en) * | 2019-12-19 | 2020-03-06 | 中国科学院长春光学精密机械与物理研究所 | Method, device, equipment and system for measuring beam splitting angle of laser beam splitter |
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| CN112005090A (en) * | 2020-05-12 | 2020-11-27 | 中国科学院微小卫星创新研究院 | Micro-thrust micro-impulse applying device and method based on light pressure principle |
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| CN116007908A (en) * | 2023-03-27 | 2023-04-25 | 中国工程物理研究院激光聚变研究中心 | Device and method for measuring high-transmittance and high-reflectance and non-uniformity of large-caliber flat plate element |
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