CN102288120A - Phase shifting interferometry-based sphere diameter absolutely-precise measuring system and method thereof - Google Patents
Phase shifting interferometry-based sphere diameter absolutely-precise measuring system and method thereof Download PDFInfo
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Abstract
The invention relates to a phase shifting interferometry-based sphere diameter absolutely-precise measuring system and a method thereof. The phase shifting interferometry-based sphere diameter absolutely-precise measuring system comprises a tunable laser, a polarization-maintaining optical fiber system, a laser frequency locking system, a laser frequency tracing system and a sphere diameter interferometer which are mutually connected. According to the invention, the method which is used for interfering phase control based on frequency scanning by the tunable laser is adopted, thus the phenomena of mechanical vibration and nonlinearity caused when piezoelectric ceramic is used for interfering phase control are avoided and the accuracy for phase shift control is enhanced; a Fabry-Perot cavity is additionally adopted, the outputted laser frequency is locked at a transmission peak of the Fabry-Perot cavity, and then an assumption of equally-spaced phase shift required by an asynchronous sampling phase shift algorithm is strictly ensured and the calculating accuracy of the phase shift algorithm is enhanced; and in addition, the femtosecond optical frequency combing system-based laser frequency tracing system is further adopted, the output laser frequency of the tunable laser can be traced to the microwave frequency standard, thus a diameter measuring result of a sphere to be measured has metrological significance.
Description
Technical field
The invention belongs to the precise measurement technique field, be specifically related to a kind of absolute delicate metering system of sphere diameter based on phase shift interference and method thereof.
Background technology
The absolute delicate metering of sphere diameter the metrology field demand that has a wide range of applications such as accurately measures at Avogadro's number.When utilizing the X-ray crystal density method accurately to measure Avogadro's number, need be about the single-crystal silicon sphere diameter that 94mm, quality be about 1kg to diameter and carry out precision measurement, thereby calculate the sphere volume of silicon ball.Because the raising of silicon ball processing technique, its circularity has been better than 100nm, surfaceness has been better than 0.2nm, obtain by theoretical analysis, will be much smaller than the measuring error of mean diameter, so improve the necessary ways that silicon bulb diameter accuracy of measurement be a continuation raising Avogadro's number accuracy of measurement when silicon mean diameter of a ball calculates the spheroid volume by the caused error of silicon ball circularity.For the relative measurement uncertainty with Avogadro's number is decreased to 2 * 10
-8, the uncertainty of measurement of diameter should be reduced to 0.3nm.At present, still can realize the sphere diameter precision measurement of above-mentioned precision without any a tame mechanism, this problem still is one of hot research problem of international how tame metering mechanism, and existing measuring system has had a strong impact on the precision of measuring by mechanical vibration and the non-linear phenomena that piezoelectric ceramics is used for causing when interferometric phase is controlled.
Summary of the invention
In order to overcome the deficiency that above-mentioned prior art exists, the object of the present invention is to provide a kind of absolute delicate metering system of sphere diameter based on phase shift interference and method thereof, the problem that mechanical vibration that caused when having avoided existing measuring system to be used for interferometric phase control by piezoelectric ceramics and non-linear phenomena have had a strong impact on the precision of measuring has really realized the sphere diameter precision measurement.
In order to achieve the above object, the technical solution adopted in the present invention is:
The absolute delicate metering of a kind of sphere diameter system based on phase shift interference, comprise tunable laser 1, the output terminal of this tunable laser 1 inserts polarization maintaining optical fibre system 2, described polarization maintaining optical fibre system 2 is connected respectively with laser frequency lock system 3, laser frequency traceability system 4 and sphere diameter interferometer 5 by polarization maintaining optical fibre 203, described laser frequency lock system 3 also communicates to connect with tunable laser 1, and laser frequency lock system 3, laser frequency traceability system 4 and sphere diameter interferometer 5 communicate to connect with computing machine 6.
The external-cavity semiconductor laser that described tunable laser 1 adopts based on the grating frequency stabilization.
Described polarization maintaining optical fibre system 2 comprises the optoisolator 201 that its input end is connected with the output terminal of tunable laser 1, the output terminal of optoisolator 201 is connected with the input head of first polarization maintaining optical fiber collimator 202, the delivery of first polarization maintaining optical fiber collimator 202 is connected by the inlet of polarization maintaining optical fibre 203 with first polarization-maintaining fiber coupler 204, and the outlet of first polarization-maintaining fiber coupler 204 is connected respectively with laser frequency lock system 3, laser frequency traceability system 4 and sphere diameter interferometer 5 by polarization maintaining optical fibre 203.
Described laser frequency lock system 3 comprises second polarization maintaining optical fiber collimator 301, the delivery institute emitting laser light going direction of this second polarization maintaining optical fiber collimator 301 is that horizontal direction and this laser beam polarization direction are perpendicular to horizontal longitudinal direction, be furnished with electro-optic crystal 302 successively at interval along this laser beam direct of travel, polarization splitting prism 303, quarter wave plate 304 and the first constant temperature vacuum chamber 305 that includes Fabry-Perot-type cavity 306, the first constant temperature vacuum chamber 305 has light entrance 312, the accent of this light entrance 312 and Fabry-Perot-type cavity 306 is over against this laser beam direct of travel, and electro-optic crystal 302, electric drive 308, phase shifter 309, frequency mixer 310 and laser driver 311 are electrically connected successively in twos, frequency mixer 310 also is electrically connected with the photodetector 307 that its probe portion is positioned on the emission light path of polarization splitting prism 303, and laser driver 311 also communicates connection with computing machine 6, and this laser driver 311 and tunable laser 1 also are electrically connected.
Described laser frequency traceability system 4 comprises femtosecond frequency comb system 401 and the wavemeter 402 that is connected with the outlet of first polarization-maintaining fiber couplers 204 by polarization maintaining optical fibre 203, and frequency comb system 401 also communicates with computing machine 6 with wavemeter 402 and is connected.
Described sphere diameter interferometer 5 comprises first imageing sensor 510 that communicates connection with computing machine 6, second imageing sensor 511 and data collecting card 514, data collecting card 514 also communicates with baroceptor 513 with the temperature sensor 512 that places the second constant temperature vacuum chamber 515 and is connected, have the first transmitted light mouth 519 and the second transmitted light mouth 520 on the second constant temperature vacuum chamber 515, in the second constant temperature vacuum chamber 515, also have with the outlet of first polarization-maintaining fiber coupler 204 by be connected second polarization-maintaining fiber coupler 501 of its inlet of polarization maintaining optical fibre 203, the outlet of second polarization-maintaining fiber coupler 501 is connected with the input head of the 3rd polarization maintaining optical fiber collimator 502 and the input head of the 4th polarization maintaining optical fiber collimator 504 by polarization maintaining optical fibre 203, be respectively arranged with first Amici prism 503 and second Amici prism 505 on institute's emitting laser light going direction of the delivery of the delivery of the 3rd polarization maintaining optical fiber collimator 502 and the 4th polarization maintaining optical fiber collimator 504, the diameter interference instrument etalon 506 that has first reference mirror 521 and second reference mirror 522 in the light transmission direction setting of the light transmission direction of first Amici prism 503 and second Amici prism 505, has the default depth of parallelism between first reference mirror 521 and second reference mirror 522, the transmitted ray of the reference surface that should be by first reference mirror 521 and the reference surface of second reference mirror 522 can directly be gone in the diameter interference instrument etalon 506, and the light transmission direction of this first reference mirror 521 and second reference mirror, 522 difference subtends, first Amici prism 503 and the light transmission direction of second Amici prism 505, and be respectively arranged with first lens 508 and second lens 509 on the light reflection direction of the light reflection direction of first Amici prism 503 and second Amici prism 505, the light transmission focusing point of the light transmission focusing point of first lens 508 and second lens 509 is respectively in the first transmitted light mouth 519 and in the second transmitted light mouth 520, and the induction end of the induction end of first imageing sensor 510 and second imageing sensor 511 lays respectively on the beam projecting direction of the first transmitted light mouth 519 and on the beam projecting direction of the second transmitted light mouth 520.
The method of the absolute delicate metering of described sphere diameter based on phase shift interference system is the output terminal output presetted wavelength that at first starts tunable laser 1 by computing machine 6, the single-frequency and the single linearly polarized laser of predetermined electric power and the tuning without mode skip scope of being scheduled to, this single-frequency and single linearly polarized laser are one-way transmitted to first polarization maintaining optical fiber collimator 202 through the optoisolator 201 of polarization maintaining optical fibre system 2, transfer to first polarization-maintaining fiber coupler 204 by polarization maintaining optical fibre 203, first polarization-maintaining fiber coupler 204 is divided into aplanatic 4 road light beams with this single-frequency and single linearly polarized laser, the shoot laser polarization direction of 4 road light beams of this isocandela is consistent with its incident laser polarization direction, and four road light beams of this isocandela are transferred to second polarization maintaining optical fiber collimator 301 respectively by polarization maintaining optical fibre 203, femtosecond frequency comb system 401, the wavemeter 402 and second polarization-maintaining fiber coupler 501; The road light beam that transfers to second polarization-maintaining fiber coupler 501 is divided into aplanatic two-way divided beams, this two-way divided beams inputs to the 3rd polarization maintaining optical fiber collimator 502 and the 4th polarization maintaining optical fiber collimator 504 by polarization maintaining optical fibre 203 respectively, close the outgoing beam of the 4th polarization maintaining optical fiber collimator 504, the outgoing beam of the 3rd polarization maintaining optical fiber collimator 502 carries out transmission through first Amici prism 503, the transmitted light beam that first Amici prism 503 produces is incident to the reference surface of first reference mirror 521 of diameter interference instrument etalon 506, part beam reflection to the first Amici prism 503, reference surface and part that another part light beam is transmitted through second reference mirror 522 are reflected, the folded light beam that is reflected to form by the reference surface of the reference surface of first reference mirror 521 and second reference mirror 522 reflects via first Amici prism 503 like this, the focused beam that forms after first lens 508 focus on is incident to first imageing sensor 510 through the second constant temperature vacuum chamber 515, and the image that first imageing sensor 510 is obtained sends to computing machine 6, computing machine 6 changes the output optical maser wavelength of tunable laser 1, utilizes the multiwavelength laser interferometric method to record absolute distance between the reference surface of the reference surface of first reference mirror 521 of diameter interference instrument etalon 506 and second reference mirror 522; Then spheroid 507 to be measured is placed between the reference surface and second reference mirror 522 of first reference mirror 521 of diameter interference instrument etalon 506, and by temperature sensor 512 and baroceptor 513 real-time sphere diameter interferometer 5 temperature inside and the air pressure measured, and this temperature and air pressure numerical value be sent in the computing machine 6 by data collecting card 514, it is the laser beam of polarization direction perpendicular to horizontal longitudinal direction that while second polarization maintaining optical fiber collimator 301 will transmit the road light beam outgoing that comes, and electric drive 308 outputs signal to electro-optic crystal 302 and phase shifter 309, and laser beam is transmitted through described quarter wave plate 304 through polarization splitting prism 303 again after electro-optic crystal 302 modulation, quarter wave plate 304 rotates 45 ° after the first constant temperature vacuum chamber 305 is transmitted through Fabry-Perot-type cavity 306 with its light beam polarization direction like this, be transmitted through quarter wave plate 304 through Fabry-Perot-type cavity 306 laser beams reflected by the described first constant temperature vacuum chamber 305, after quarter wave plate 304 rotates 45 ° with this laser beam polarization direction along former direction, reflexing to photodetector 307 through polarization splitting prism 303 is converted into laser beam electric signal and sends to frequency mixer 310, and phase shifter 309 inputs to frequency mixer 310 with the phase shift signal that the output signal of electric drive 308 forms after phase shift, form error signal after the electric signal mixing that frequency mixer 310 sends this phase shift signal and photodetector 307, and this error signal inputed to laser driver 311, and error signal is inputed to computing machine 6 by laser driver 311, computing machine 6 passes through this error signal sending controling instruction in laser driver 311, the output laser frequency lock that forms feedback control signal tunable laser 1 by laser driver 311 is to the Fabry-Perot-type cavity 306 on predetermined four transmission peaks again, frequency preset is also consistent one by one at interval between these four transmission peaks, and to the output laser of the tunable laser under each transmission peaks 1, optoisolator 201 through polarization maintaining optical fibre system 2 is one-way transmitted to first polarization maintaining optical fiber collimator 202, transfer to first polarization-maintaining fiber coupler 204 by polarization maintaining optical fibre 203, first polarization-maintaining fiber coupler 204 is divided into aplanatic 4 road light beams with this single-frequency and single linearly polarized laser, the shoot laser polarization direction of 4 road light beams of this isocandela is consistent with its incident laser polarization direction, and four road light beams of this isocandela are transferred to second polarization maintaining optical fiber collimator 301 respectively by polarization maintaining optical fibre 203, femtosecond frequency comb system 401, the wavemeter 402 and second polarization-maintaining fiber coupler 501, be transferred to the two-way light beam of femtosecond frequency comb system 401 and wavemeter 402 in four road light beams of this isocandela, output laser frequency through femtosecond frequency comb system 401 and wavemeter 402 measurement tunable laser 1, and trace to the source to the microwave frequency benchmark, and the value that will export laser frequency and microwave frequency benchmark sends in the computing machine 6, and the road light beam that transfers to second polarization-maintaining fiber coupler 501 is divided into aplanatic two-way divided beams, this two-way divided beams inputs to the 3rd polarization maintaining optical fiber collimator 502 and the 4th polarization maintaining optical fiber collimator 504 by polarization maintaining optical fibre 203 respectively, the outgoing beam of the outgoing beam of the 3rd polarization maintaining optical fiber collimator 502 and the 4th polarization maintaining optical fiber collimator 504 carries out transmission through first Amici prism 503 and second Amici prism 505 respectively, the corresponding surface of the spheroid to be measured 507 of the transmitted light beam incident diameter interference respectively instrument etalon 506 that first Amici prism 503 and second Amici prism 505 produce also is reflected, folded light beam that is reflected to form by the corresponding surface of spheroid 507 to be measured and the folded light beam that reflected to form by the reference surface of the reference surface of first reference mirror 521 of diameter interference instrument etalon 506 and second reference mirror 522 are respectively via first Amici prism 503 and 505 reflections of second Amici prism like this, and the folded light beam that is reflected to form by first Amici prism 503 and second Amici prism 505 is respectively after first lens 508 and second lens 509 focus on, the focused beam that forms after first lens 508 and 509 focusing of second lens is incident to first imageing sensor 510 and second imageing sensor 511 respectively through the second constant temperature vacuum chamber 515, and the pattern that first imageing sensor 510 and second imageing sensor 511 obtain sent to computing machine 6, computing machine 6 is according to the pattern data of obtaining, two gap absolute distances that the value of output laser frequency and microwave frequency benchmark calculates that spheroid 507 to be measured forms with the reference surface of the reference surface of first reference mirrors 521 and second reference mirror 522 by the asynchronous-sampling phase shift algorithm and, deduct these two gap absolute distances with the absolute distance between the reference surface of the reference surface of described first reference mirror 521 and second reference mirror 522 then and promptly obtain the diameter value of spheroid 507 to be measured, and carry out this diameter value of error correction according to current temperature and the air pressure numerical value that is sent in the computing machine 6 by data collecting card 514.
Should adopt the method for carrying out interferometric phase control based on the absolute delicate metering of the sphere diameter of phase shift interference system based on the frequency sweeping of tunable laser 1, the mechanical vibration and the non-linear phenomena that have caused when having avoided piezoelectric ceramics to be used for interferometric phase control have improved the degree of accuracy of phase shift control; Add the laser frequency lock system 3 of employing based on Fabry-Perot-type cavity 306, with the output laser frequency lock of tunable laser 1 to the transmission peaks of Fabry-Perot-type cavity 306, strict guarantee the asynchronous-sampling phase shift algorithm require etc. step-length phase shift hypothesis, improved the counting accuracy of phase shift algorithm; Also adopt laser frequency traceability system 4 in addition, the output laser frequency of tunable laser 1 is traced to the source to the microwave frequency benchmark, thereby make the diameter measurement result of spheroid to be measured have the metrology meaning based on femtosecond frequency comb system.
Description of drawings
Fig. 1 is the absolute delicate metering system architecture of the sphere diameter based on a phase shift interference of the present invention synoptic diagram.
Fig. 2 is a principle of work structural representation of the present invention, and wherein arrow or dotted line are represented laser beam.
Embodiment
The present invention will be described in more detail below in conjunction with accompanying drawing.
As shown in Figure 1, based on the absolute delicate metering of the sphere diameter of phase shift interference system, comprise tunable laser 1, the output terminal of this tunable laser 1 inserts polarization maintaining optical fibre system 2, described polarization maintaining optical fibre system 2 is connected respectively with laser frequency lock system 3, laser frequency traceability system 4 and sphere diameter interferometer 5 by polarization maintaining optical fibre 203, described laser frequency lock system 3 also communicates to connect with tunable laser 1, and laser frequency lock system 3, laser frequency traceability system 4 and sphere diameter interferometer 5 communicate to connect with computing machine 6.The external-cavity semiconductor laser that described tunable laser 1 adopts based on the grating frequency stabilization.Described polarization maintaining optical fibre system 2 comprises the optoisolator 201 that its input end is connected with the output terminal of tunable laser 1, the output terminal of optoisolator 201 is connected with the input head of first polarization maintaining optical fiber collimator 202, the delivery of first polarization maintaining optical fiber collimator 202 is connected by the inlet of polarization maintaining optical fibre 203 with first polarization-maintaining fiber coupler 204, and the outlet of first polarization-maintaining fiber coupler 204 is connected respectively with laser frequency lock system 3, laser frequency traceability system 4 and sphere diameter interferometer 5 by polarization maintaining optical fibre 203.Described laser frequency lock system 3 comprises second polarization maintaining optical fiber collimator 301, the delivery institute emitting laser light going direction of this second polarization maintaining optical fiber collimator 301 is that horizontal direction and this laser beam polarization direction are perpendicular to horizontal longitudinal direction, be furnished with electro-optic crystal 302 successively at interval along this laser beam direct of travel, polarization splitting prism 303, quarter wave plate 304 and the first constant temperature vacuum chamber 305 that includes Fabry-Perot-type cavity 306, the first constant temperature vacuum chamber 305 has light entrance 312, the accent of this light entrance 312 and Fabry-Perot-type cavity 306 is over against this laser beam direct of travel, and electro-optic crystal 302, electric drive 308, phase shifter 309, frequency mixer 310 and laser driver 311 are electrically connected successively in twos, frequency mixer 310 also is electrically connected with the photodetector 307 that its probe portion is positioned on the emission light path of polarization splitting prism 303, and laser driver 311 also communicates connection with computing machine 6, and this laser driver 311 and tunable laser 1 also are electrically connected.Described laser frequency traceability system 4 comprises femtosecond frequency comb system 401 and the wavemeter 402 that is connected with the outlet of first polarization-maintaining fiber couplers 204 by polarization maintaining optical fibre 203, and frequency comb system 401 also communicates with computing machine 6 with wavemeter 402 and is connected.Described sphere diameter interferometer 5 comprises first imageing sensor 510 that communicates connection with computing machine 6, second imageing sensor 511 and data collecting card 514, data collecting card 514 also communicates with baroceptor 513 with the temperature sensor 512 that places the second constant temperature vacuum chamber 515 and is connected, have the first transmitted light mouth 519 and the second transmitted light mouth 520 on the second constant temperature vacuum chamber 515, in the second constant temperature vacuum chamber 515, also have with the outlet of first polarization-maintaining fiber coupler 204 by be connected second polarization-maintaining fiber coupler 501 of its inlet of polarization maintaining optical fibre 203, the outlet of second polarization-maintaining fiber coupler 501 is connected with the input head of the 3rd polarization maintaining optical fiber collimator 502 and the input head of the 4th polarization maintaining optical fiber collimator 504 by polarization maintaining optical fibre 203, be respectively arranged with first Amici prism 503 and second Amici prism 505 on institute's emitting laser light going direction of the delivery of the delivery of the 3rd polarization maintaining optical fiber collimator 502 and the 4th polarization maintaining optical fiber collimator 504, the diameter interference instrument etalon 506 that has first reference mirror 521 and second reference mirror 522 in the light transmission direction setting of the light transmission direction of first Amici prism 503 and second Amici prism 505, the depth of parallelism of first reference mirror 521 and second reference mirror 522 is better than 1 rad, the transmitted ray of the reference surface that should be by first reference mirror 521 and the reference surface of second reference mirror 522 can directly be gone in the diameter interference instrument etalon 506, and the light transmission direction of this first reference mirror 521 and second reference mirror, 522 difference subtends, first Amici prism 503 and the light transmission direction of second Amici prism 505, and be respectively arranged with first lens 508 and second lens 509 on the light reflection direction of the light reflection direction of first Amici prism 503 and second Amici prism 505, the light transmission focusing point of the light transmission focusing point of first lens 508 and second lens 509 is respectively in the first transmitted light mouth 519 and in the second transmitted light mouth 520, and the induction end of the induction end of first imageing sensor 510 and second imageing sensor 511 lays respectively on the beam projecting direction of the first transmitted light mouth 519 and on the beam projecting direction of the second transmitted light mouth 520.
As shown in Figure 2, the method of the absolute delicate metering of described sphere diameter based on phase shift interference system is 632.991nm at first exporting optical maser wavelength by the output terminal of computing machine 6 startup tunable laser 1, laser power is single-frequency and the single linearly polarized laser of 8mW and tuning without mode skip scope 20GHz, this single-frequency and single linearly polarized laser are one-way transmitted to first polarization maintaining optical fiber collimator 202 through the optoisolator 201 of polarization maintaining optical fibre system 2, transfer to first polarization-maintaining fiber coupler 204 by polarization maintaining optical fibre 203, first polarization-maintaining fiber coupler 204 is divided into aplanatic 4 road light beams with this single-frequency and single linearly polarized laser, the shoot laser polarization direction of 4 road light beams of this isocandela is consistent with its incident laser polarization direction, and four road light beams of this isocandela are transferred to second polarization maintaining optical fiber collimator 301 respectively by polarization maintaining optical fibre 203, femtosecond frequency comb system 401, the wavemeter 402 and second polarization-maintaining fiber coupler 501; The road light beam that transfers to second polarization-maintaining fiber coupler 501 is divided into aplanatic two-way divided beams, this two-way divided beams inputs to the 3rd polarization maintaining optical fiber collimator 502 and the 4th polarization maintaining optical fiber collimator 504 by polarization maintaining optical fibre 203 respectively, close the outgoing beam of the 4th polarization maintaining optical fiber collimator 504, the outgoing beam of the 3rd polarization maintaining optical fiber collimator 502 carries out transmission through first Amici prism 503, the transmitted light beam that first Amici prism 503 produces is incident to the reference surface of first reference mirror 521 of diameter interference instrument etalon 506, part beam reflection to the first Amici prism 503, reference surface and part that another part light beam is transmitted through second reference mirror 522 are reflected, the folded light beam that is reflected to form by the reference surface of the reference surface of first reference mirror 521 and second reference mirror 522 reflects via first Amici prism 503 like this, the focused beam that forms after first lens 508 focus on is incident to first imageing sensor 510 through the second constant temperature vacuum chamber 515, and the image that first imageing sensor 510 is obtained sends to computing machine 6, computing machine 6 changes the output optical maser wavelength of tunable laser 1, utilizes the multiwavelength laser interferometric method to record absolute distance between the reference surface of the reference surface of first reference mirror 521 of diameter interference instrument etalon 506 and second reference mirror 522; Then spheroid 507 to be measured is placed between the reference surface and second reference mirror 522 of first reference mirror 521 of diameter interference instrument etalon 506, and by temperature sensor 512 and baroceptor 513 real-time sphere diameter interferometer 5 temperature inside and the air pressure measured, and this temperature and air pressure numerical value be sent in the computing machine 6 by data collecting card 514, it is the laser beam of polarization direction perpendicular to horizontal longitudinal direction that while second polarization maintaining optical fiber collimator 301 will transmit the road light beam outgoing that comes, and electric drive 308 outputs signal to electro-optic crystal 302 and phase shifter 309, and laser beam is transmitted through described quarter wave plate 304 through polarization splitting prism 303 again after electro-optic crystal 302 modulation, quarter wave plate 304 rotates 45 ° after the first constant temperature vacuum chamber 305 is transmitted through Fabry-Perot-type cavity 306 with its light beam polarization direction like this, be transmitted through quarter wave plate 304 through Fabry-Perot-type cavity 306 laser beams reflected by the described first constant temperature vacuum chamber 305, after quarter wave plate 304 rotates 45 ° with this laser beam polarization direction along former direction, reflexing to photodetector 307 through polarization splitting prism 303 is converted into laser beam electric signal and sends to frequency mixer 310, and phase shifter 309 inputs to frequency mixer 310 with the phase shift signal that the output signal of electric drive 308 forms after phase shift, form error signal after the electric signal mixing that frequency mixer 310 sends this phase shift signal and photodetector 307, and this error signal inputed to laser driver 311, and error signal is inputed to computing machine 6 by laser driver 311, computing machine 6 passes through this error signal sending controling instruction in laser driver 311, the output laser frequency lock that is formed feedback control signal control tunable laser 1 by laser driver 311 is to the Fabry-Perot-type cavity 306 on predetermined four transmission peaks, frequency preset is also consistent one by one at interval between these four transmission peaks, and to the output laser of the tunable laser under each transmission peaks 1, optoisolator 201 through polarization maintaining optical fibre system 2 is one-way transmitted to first polarization maintaining optical fiber collimator 202, transfer to first polarization-maintaining fiber coupler 204 by polarization maintaining optical fibre 203, first polarization-maintaining fiber coupler 204 is divided into aplanatic 4 road light beams with this single-frequency and single linearly polarized laser, the shoot laser polarization direction of 4 road light beams of this isocandela is consistent with its incident laser polarization direction, and four road light beams of this isocandela are transferred to second polarization maintaining optical fiber collimator 301 respectively by polarization maintaining optical fibre 203, femtosecond frequency comb system 401, the wavemeter 402 and second polarization-maintaining fiber coupler 501, be transferred to the two-way light beam of femtosecond frequency comb system 401 and wavemeter 402 in four road light beams of this isocandela, output laser frequency through femtosecond frequency comb system 401 and wavemeter 402 measurement tunable laser 1, and trace to the source to the microwave frequency benchmark, and the value that will export laser frequency and microwave frequency benchmark sends in the computing machine 6, and the road light beam that transfers to second polarization-maintaining fiber coupler 501 is divided into aplanatic two-way divided beams, this two-way divided beams inputs to the 3rd polarization maintaining optical fiber collimator 502 and the 4th polarization maintaining optical fiber collimator 504 by polarization maintaining optical fibre 203 respectively, the outgoing beam of the outgoing beam of the 3rd polarization maintaining optical fiber collimator 502 and the 4th polarization maintaining optical fiber collimator 504 carries out transmission through first Amici prism 503 and second Amici prism 505 respectively, the corresponding surface of the spheroid to be measured 507 of the transmitted light beam incident diameter interference respectively instrument etalon 506 that first Amici prism 503 and second Amici prism 505 produce also is reflected, folded light beam that is reflected to form by the corresponding surface of spheroid 507 to be measured and the folded light beam that reflected to form by the reference surface of the reference surface of first reference mirror 521 of diameter interference instrument etalon 506 and second reference mirror 522 are respectively via first Amici prism 503 and 505 reflections of second Amici prism like this, and the folded light beam that is reflected to form by first Amici prism 503 and second Amici prism 505 is respectively after first lens 508 and second lens 509 focus on, the focused beam that forms after first lens 508 and 509 focusing of second lens is incident to first imageing sensor 510 and second imageing sensor 511 respectively through the second constant temperature vacuum chamber 515, and the pattern that first imageing sensor 510 and second imageing sensor 511 obtain sent to computing machine 6, computing machine 6 is according to the pattern data of obtaining, two gap absolute distances that the value of output laser frequency and microwave frequency benchmark calculates that spheroid 507 to be measured forms with the reference surface of the reference surface of first reference mirrors 521 and second reference mirror 522 by the asynchronous-sampling phase shift algorithm and, deduct these two gap absolute distances with the absolute distance between the reference surface of the reference surface of described first reference mirror 521 and second reference mirror 522 then and promptly obtain the diameter value of spheroid 507 to be measured, and carry out this diameter value of error correction according to current temperature and the air pressure numerical value that is sent in the computing machine 6 by data collecting card 514.
Claims (7)
1. the absolute delicate metering of the sphere diameter based on phase shift interference system, it is characterized in that: comprise tunable laser (1), the output terminal of this tunable laser (1) inserts polarization maintaining optical fibre system (2), described polarization maintaining optical fibre system (2) passes through polarization maintaining optical fibre (203) with laser frequency lock system (3), laser frequency traceability system (4) and sphere diameter interferometer (5) are connected respectively, the also same tunable laser of described laser frequency lock system (3) (1) communicates to connect, laser frequency lock system (3), laser frequency traceability system (4) and the same computing machine of sphere diameter interferometer (5) (6) communicate to connect.
2. according to the absolute delicate metering of the described sphere diameter based on phase shift interference of claim 1 system, it is characterized in that: described tunable laser (1) adopts the external-cavity semiconductor laser based on the grating frequency stabilization.
3. according to claim 1 or the absolute delicate metering of the described sphere diameter of claim 2 system based on phase shift interference, it is characterized in that: described polarization maintaining optical fibre system (2) comprises the optoisolator (201) that the output terminal of the same tunable laser of its input end (1) is connected, the output terminal of optoisolator (201) is connected with the input head of first polarization maintaining optical fiber collimator (202), the delivery of first polarization maintaining optical fiber collimator (202) is connected by the inlet of polarization maintaining optical fibre (203) with first polarization-maintaining fiber coupler (204), and the outlet of first polarization-maintaining fiber coupler (204) is passed through polarization maintaining optical fibre (203) with laser frequency lock system (3), laser frequency traceability system (4) and sphere diameter interferometer (5) are connected respectively.
4. according to the absolute delicate metering of the described sphere diameter of claim 3 system based on phase shift interference, it is characterized in that: described laser frequency lock system (3) comprises second polarization maintaining optical fiber collimator (301), the delivery institute emitting laser light going direction of this second polarization maintaining optical fiber collimator (301) is that horizontal direction and this laser beam polarization direction are perpendicular to horizontal longitudinal direction, be furnished with electro-optic crystal (302) successively at interval along this laser beam direct of travel, polarization splitting prism (303), quarter wave plate (304) and the first constant temperature vacuum chamber (305) that includes Fabry-Perot-type cavity (306), the first constant temperature vacuum chamber (305) has light entrance (312), the accent of this light entrance (312) and Fabry-Perot-type cavity (306) is over against this laser beam direct of travel, and electro-optic crystal (302), electric drive (308), phase shifter (309), frequency mixer (310) and laser driver (311) are electrically connected successively in twos, frequency mixer (310) also is electrically connected with the photodetector (307) that its probe portion is positioned on the emission light path of polarization splitting prism (303), and the also same computing machine of laser driver (311) (6) communicates connection, and this laser driver (311) and tunable laser (1) also are electrically connected.
5. according to the absolute delicate metering of the described sphere diameter of claim 4 system based on phase shift interference, it is characterized in that: described laser frequency traceability system (4) comprises femtosecond frequency comb system (401) and the wavemeter (402) that is connected with the outlet of first polarization-maintaining fiber coupler (204) by polarization maintaining optical fibre (203), and frequency comb system (401) communicates with the also same computing machine of wavemeter (402) (6) and is connected.
6. according to the absolute delicate metering of the described sphere diameter of claim 5 system based on phase shift interference, it is characterized in that: described sphere diameter interferometer (5) comprises that same computing machine (6) communicates first imageing sensor (510) of connection, second imageing sensor (511) and data collecting card (514), data collecting card (514) also communicates with baroceptor (513) with the temperature sensor (512) that places the second constant temperature vacuum chamber (515) and is connected, have the first transmitted light mouth (519) and the second transmitted light mouth (520) on the second constant temperature vacuum chamber (515), in the second constant temperature vacuum chamber (515), also have with the outlet of first polarization-maintaining fiber coupler (204) by be connected second polarization-maintaining fiber coupler (501) of its inlet of polarization maintaining optical fibre (203), the outlet of second polarization-maintaining fiber coupler (501) is connected with the input head of the 3rd polarization maintaining optical fiber collimator (502) and the input head of the 4th polarization maintaining optical fiber collimator (504) by polarization maintaining optical fibre (203), be respectively arranged with first Amici prism (503) and second Amici prism (505) on institute's emitting laser light going direction of the delivery of the delivery of the 3rd polarization maintaining optical fiber collimator (502) and the 4th polarization maintaining optical fiber collimator (504), the diameter interference instrument etalon (506) that has first reference mirror (521) and second reference mirror (522) in the light transmission direction setting of the light transmission direction of first Amici prism (503) and second Amici prism (505), has the default depth of parallelism between first reference mirror (521) and second reference mirror (522), the transmitted ray of the reference surface that should be by first reference mirror (521) and the reference surface of second reference mirror (522) can directly be gone in the diameter interference instrument etalon (506), and the light transmission direction of this first reference mirror (521) and second reference mirror (522) difference subtend first Amici prism (503) and the light transmission direction of second Amici prism (505), and be respectively arranged with first lens (508) and second lens (509) on the light reflection direction of the light reflection direction of first Amici prism (503) and second Amici prism (505), the light transmission focusing point of the light transmission focusing point of first lens (508) and second lens (509) is respectively in the first transmitted light mouth (519) and in the second transmitted light mouth (520), and the induction end of the induction end of first imageing sensor (510) and second imageing sensor (511) lays respectively on the beam projecting direction of the first transmitted light mouth (519) and on the beam projecting direction of the second transmitted light mouth (520).
7. according to the method for the absolute delicate metering of the described sphere diameter of claim 6 system based on phase shift interference, it is characterized in that: the method for the absolute delicate metering of described sphere diameter based on phase shift interference system is at first starting the output terminal output presetted wavelength of tunable laser (1) by computing machine (6), the single-frequency and the single linearly polarized laser of predetermined electric power and the tuning without mode skip scope of being scheduled to, optoisolator (201) through polarization maintaining optical fibre system (2) is one-way transmitted to first polarization maintaining optical fiber collimator (202) with this single-frequency and single linearly polarized laser, transfer to first polarization-maintaining fiber coupler (204) by polarization maintaining optical fibre (203), first polarization-maintaining fiber coupler (204) is divided into aplanatic 4 road light beams with this single-frequency and single linearly polarized laser, the shoot laser polarization direction of 4 road light beams of this isocandela is consistent with its incident laser polarization direction, and four road light beams of this isocandela are transferred to second polarization maintaining optical fiber collimator (301) respectively by polarization maintaining optical fibre (203), femtosecond frequency comb system (401), wavemeter (402) and second polarization-maintaining fiber coupler (501); The road light beam that transfers to second polarization-maintaining fiber coupler (501) is divided into aplanatic two-way divided beams, this two-way divided beams inputs to the 3rd polarization maintaining optical fiber collimator (502) and the 4th polarization maintaining optical fiber collimator (504) by polarization maintaining optical fibre (203) respectively, close the outgoing beam of the 4th polarization maintaining optical fiber collimator (504), the outgoing beam of the 3rd polarization maintaining optical fiber collimator (502) carries out transmission through first Amici prism (503), the transmitted light beam that first Amici prism (503) produces is incident to the reference surface of first reference mirror (521) of diameter interference instrument etalon (506), part beam reflection to the first Amici prism (503), reference surface and part that another part light beam is transmitted through second reference mirror (522) are reflected, the folded light beam that is reflected to form by the reference surface of the reference surface of first reference mirror (521) and second reference mirror (522) reflects via first Amici prism (503) like this, the focused beam that forms after first lens (508) focus on is incident to first imageing sensor (510) through the second constant temperature vacuum chamber (515), and the image that first imageing sensor (510) obtains sent to computing machine (6), computing machine (6) changes the output optical maser wavelength of tunable laser 1, utilizes the multiwavelength laser interferometric method to record absolute distance between the reference surface of the reference surface of first reference mirror (521) of diameter interference instrument etalon (506) and second reference mirror (522); Then spheroid to be measured (507) is placed between the reference surface and second reference mirror (522) of first reference mirror (521) of diameter interference instrument etalon (506), and measure sphere diameter interferometer (5) temperature inside and air pressure in real time by temperature sensor (512) and baroceptor (513), and this temperature and air pressure numerical value be sent in the computing machine (6) by data collecting card (514), it is the laser beam of polarization direction perpendicular to horizontal longitudinal direction that while second polarization maintaining optical fiber collimator (301) will transmit the road light beam outgoing that comes, and electric drive (308) outputs signal to electro-optic crystal (302) and phase shifter (309), and laser beam is transmitted through described quarter wave plate (304) through polarization splitting prism (303) again after electro-optic crystal (302) modulation, quarter wave plate (304) rotates 45 ° after the first constant temperature vacuum chamber (305) is transmitted through Fabry-Perot-type cavity (306) with its light beam polarization direction like this, be transmitted through quarter wave plate (304) through Fabry-Perot-type cavity (306) laser beams reflected by the described first constant temperature vacuum chamber (305), after quarter wave plate (304) rotates 45 ° with this laser beam polarization direction along former direction, reflexing to photodetector (307) through polarization splitting prism (303) is converted into electric signal with laser beam and sends to frequency mixer (310), and phase shifter (309) inputs to frequency mixer (310) with the phase shift signal that the output signal of electric drive (308) forms after phase shift, form error signal after the electric signal mixing that frequency mixer (310) sends this phase shift signal and photodetector (307), and this error signal inputed to laser driver (311), by laser driver (311) error signal is inputed to computing machine (6), computing machine (6) passes through this error signal sending controling instruction in laser driver (311), output laser frequency lock to the Fabry-Perot-type cavity (306) that is formed feedback control signal control tunable laser (1) by laser driver (311) is gone up on four predetermined transmission peaks, frequency preset is also consistent one by one at interval between these four transmission peaks, and to the output laser of the tunable laser under each transmission peaks (1), optoisolator (201) through polarization maintaining optical fibre system (2) is one-way transmitted to first polarization maintaining optical fiber collimator (202), transfer to first polarization-maintaining fiber coupler (204) by polarization maintaining optical fibre (203), first polarization-maintaining fiber coupler (204) is divided into aplanatic 4 road light beams with this single-frequency and single linearly polarized laser, the shoot laser polarization direction of 4 road light beams of this isocandela is consistent with its incident laser polarization direction, and four road light beams of this isocandela are transferred to second polarization maintaining optical fiber collimator (301) respectively by polarization maintaining optical fibre (203), femtosecond frequency comb system (401), wavemeter (402) and second polarization-maintaining fiber coupler (501), be transferred to the two-way light beam of femtosecond frequency comb system (401) and wavemeter (402) in four road light beams of this isocandela, output laser frequency through femtosecond frequency comb system (401) and wavemeter (402) measurement tunable laser (1), and trace to the source to the microwave frequency benchmark, and the value that will export laser frequency and microwave frequency benchmark sends in the computing machine (6), and the road light beam that transfers to second polarization-maintaining fiber coupler (501) is divided into aplanatic two-way divided beams, this two-way divided beams inputs to the 3rd polarization maintaining optical fiber collimator (502) and the 4th polarization maintaining optical fiber collimator (504) by polarization maintaining optical fibre (203) respectively, the outgoing beam of the outgoing beam of the 3rd polarization maintaining optical fiber collimator (502) and the 4th polarization maintaining optical fiber collimator (504) carries out transmission through first Amici prism (503) and second Amici prism (505) respectively, the corresponding surface of the spheroid to be measured (507) of the transmitted light beam difference incident diameter interference instrument etalon (506) that first Amici prism (503) and second Amici prism (505) produce also is reflected, folded light beam that is reflected to form by the corresponding surface of spheroid to be measured (507) and the folded light beam that reflected to form by the reference surface of the reference surface of first reference mirror (521) of diameter interference instrument etalon (506) and second reference mirror (522) are respectively via first Amici prism (503) and second Amici prism (505) reflection like this, and the folded light beam that is reflected to form by first Amici prism (503) and second Amici prism (505) is respectively after first lens (508) and second lens (509) focus on, the focused beam that forms after first lens (508) and second lens (509) focusing is incident to first imageing sensor (510) and second imageing sensor (511) respectively through the second constant temperature vacuum chamber (515), and the pattern that first imageing sensor (510) and second imageing sensor (511) obtain sent to computing machine (6), computing machine (6) is according to the pattern data of obtaining, two gap absolute distances that the value of output laser frequency and microwave frequency benchmark calculates that spheroid to be measured (507) forms with the reference surface of the reference surface of first reference mirror (521) and second reference mirror (522) by the asynchronous-sampling phase shift algorithm and, use absolute distance between the reference surface of the reference surface of described first reference mirror (521) and second reference mirror (522) to deduct these two gap absolute distances then and promptly obtain the diameter value of spheroid to be measured (507), and carry out this diameter value of error correction according to current temperature and the air pressure numerical value that is sent in the computing machine (6) by data collecting card (514).
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Cited By (4)
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| CN105466354A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical element thermal stress assessment system in vacuum environment |
| CN110058217A (en) * | 2019-01-25 | 2019-07-26 | 北京航天计量测试技术研究所 | A kind of link air refraction real-time compensation distance measuring method altogether |
| CN110793450A (en) * | 2019-10-15 | 2020-02-14 | 哈尔滨工程大学 | High-precision particle size measuring device and method based on optical fiber tweezers |
| CN111256613A (en) * | 2020-02-25 | 2020-06-09 | 厦门市省力机械有限公司 | Roundness tester and roundness testing method |
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| US6876456B2 (en) * | 2002-09-27 | 2005-04-05 | The Regents Of The University Of California | Absolute calibration of optical flats |
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Cited By (4)
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| CN105466354A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical element thermal stress assessment system in vacuum environment |
| CN110058217A (en) * | 2019-01-25 | 2019-07-26 | 北京航天计量测试技术研究所 | A kind of link air refraction real-time compensation distance measuring method altogether |
| CN110793450A (en) * | 2019-10-15 | 2020-02-14 | 哈尔滨工程大学 | High-precision particle size measuring device and method based on optical fiber tweezers |
| CN111256613A (en) * | 2020-02-25 | 2020-06-09 | 厦门市省力机械有限公司 | Roundness tester and roundness testing method |
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