CN108225193A - Diffraction grating heterodyne system two-dimension displacement measuring system and method - Google Patents

Diffraction grating heterodyne system two-dimension displacement measuring system and method Download PDF

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Publication number
CN108225193A
CN108225193A CN201810245787.6A CN201810245787A CN108225193A CN 108225193 A CN108225193 A CN 108225193A CN 201810245787 A CN201810245787 A CN 201810245787A CN 108225193 A CN108225193 A CN 108225193A
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China
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light
prism
grating
receiver
diffraction
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Inventor
李文昊
吕强
巴音贺希格
唐玉国
刘兆武
于宏柱
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN201810245787.6A priority Critical patent/CN108225193A/en
Publication of CN108225193A publication Critical patent/CN108225193A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness

Abstract

The present invention provides a kind of novel diffraction grating displacement measurement system, and including two-frequency laser, reading head, one-dimensional measurement grating, the first receiver, second receiver and signal processing system, reading head is designed using symmetrical structure;Two-frequency laser is to signal processing system input reference signal and what is sent out there is frequency difference and orhtogonal linear polarizaiton light to be incident in reading head, and reference light is divided into reading head and measures light;Two beams of left and right measure light and are incident to respectively in one-dimensional reflecting grating, and generate diffraction light in one-dimensional reflecting grating, diffraction light presses backtracking reading head, interference respectively with two beam reference lights of left and right, it respectively enters in the first receiver and the second receiver, signal processing system carries out signal processing, obtains one-dimensional measurement grating in grating vector direction and the displacement information of grating normal direction.The present invention improves the displacement measurement range of grating normal direction while grating vector direction and grating normal direction position shift measurement is realized, system structure is simple.

Description

Diffraction grating heterodyne system two-dimension displacement measuring system and method
Technical field
The invention belongs to accurate displacement field of measuring technique, are related to a kind of diffraction grating heterodyne system two-dimension displacement measuring system And method.
Background technology
Diffraction grating displacement measurement system is interfered using symmetrical level diffraction light using grating pitch as measuring basis and realizes position Shift measurement, light path is symmetrical and light path is short, and the displacement measurement system is small by environmental constraints, and measurement reproducibility is good, coordinates the electricity of high power Careful point can realize high-resolution and high-acruracy survey.Diffraction grating displacement measurement system uses one-dimensional measurement grating more at present It realizes that one dimension displacement measures, is measured for two-dimension displacement, it is most of all to realize that being parallel to grating puts down by using two-dimensional grating The two-dimension displacement in face measures, and grating vector and the two-dimension displacement of grating normal direction are realized using one-dimensional grating in some documents It measures, but the range of grating normal direction is limited by the size of spot size and optical element dimension, can not realize long row Journey measures.
Therefore, it for the technology for realizing two-dimension displacement measurement using one-dimensional grating, needs to seek a kind of novel displacement survey Measuring method and measuring system while high-precision two-dimensional displacement measurement is realized, are improved along the position of grating normal direction Shift measurement range, and apparatus structure is simple, can realize miniaturization, it is integrated.
Invention content
It is an object of the invention to propose a kind of novel diffraction grating displacement measurement system, grating vector direction is being realized While with grating normal direction position shift measurement, the displacement measurement range of grating normal direction is improved, and system structure will letter It is single, realize miniaturization and integrated..
On the one hand, a kind of diffraction grating heterodyne system two-dimension displacement measuring system is provided, including two-frequency laser, reading head, One-dimensional measurement grating, the first receiver, second receiver and signal processing system, the reading head are set using symmetrical structure Meter;
The two-frequency laser is to the signal processing system input reference signal;
What the two-frequency laser was sent out is incident on certain frequency difference and orhtogonal linear polarizaiton light in the reading head, It is divided into two beam reference lights of left and right in the reading head and two beams of left and right measures light;
Two beams of left and right measure light and are incident in the one-dimensional reflecting grating by Littrow angle respectively, and in the one-dimensional reflection Diffraction light is generated on grating, diffraction light reading head as described in backtracking is concerned with respectively with the two beam reference light of left and right It relates to, and respectively enters in first receiver and the second receiver;
First receiver and the second receiver convert optical signal into electric signal, and are conveyed to signal processing system System, signal processing system carry out signal processing, obtain grating in grating vector direction and the displacement information of grating normal direction.
In some embodiments, including two-frequency laser, reading head, one-dimensional measurement grating, the first receiver, second receiver And signal processing system, the reading head are designed using symmetrical structure;
The two-frequency laser is to the signal processing system input reference signal;
What the two-frequency laser was sent out is incident on certain frequency difference and orhtogonal linear polarizaiton light in the reading head, It is divided into two beam reference lights of left and right in the reading head and two beams of left and right measures light;
Two beams of left and right measure light and are incident to respectively in the one-dimensional reflecting grating, and generated in the one-dimensional reflecting grating Diffraction light, diffraction light reading head as described in backtracking are interferenceed respectively with the two beam reference light of left and right, and respectively into Enter in first receiver and the second receiver;
First receiver and the second receiver convert optical signal into electric signal, and are conveyed to signal processing system System, signal processing system carry out signal processing, obtain grating in grating vector direction and the displacement information of grating normal direction.
In some embodiments, the reading head includes the first prism and the second rib that two symmetrically arranged acute angles are 45 degree Mirror, symmetrically arranged third prism and the 4th prism, symmetrically arranged third receiver and the 4th receiver, symmetrically arranged Five quarter-wave plates, the 6th quarter-wave plate, the 7th quarter-wave plate and the 8th quarter-wave plate;
The a line of first prism and second prism is coated with spectro-film and is bonded into Amici prism;
The third prism is bonded with the another a line of the first prism and is coated with spectro-film, forms polarization beam splitter prism;
4th prism is bonded with the another a line of second prism and is coated with spectro-film, forms polarization beam splitting rib Mirror;
What the two-frequency laser was sent out have certain frequency difference and orhtogonal linear polarizaiton light be incident on first prism and Behind the side of the second prism fitting, it is divided into identical left side light beam and right side light beam,
Reflection and transmission occurs on the side that the left side light beam is bonded in first prism and the third prism, is formed Third reflected light and third transmitted light, the right side light beam occur on the side of second prism and the 4th prism fitting Reflection and transmission, form the 4th reflected light and the 4th transmitted light;
The third transmitted light is incident on inside the third prism, and passes through the third prism and the 5th a quarter Wave plate is reflected into Littrow angle on the one-dimensional measurement grating, is formed diffraction light on the left of auto-collimation and is pressed backtracking, enters The third receiver;4th transmitted light is incident on inside the 4th prism, and passes through the 4th prism and the 6th Quarter-wave plate is reflected into Littrow angle on the one-dimensional measurement grating, is formed diffraction light on the right side of auto-collimation and is returned by former road It returns, into the 4th receiver;
The third reflected light is by the 7th quarter-wave plate, the 5th plane mirror, first rib After mirror and the third prism, into the third receiver;
4th reflected light is by the 8th quarter-wave plate, the 6th plane mirror, second rib After mirror and the 4th prism, into the 4th receiver.
In some embodiments, the one dimension displacement grating along x-axis be subjected to displacement Δ x when, left side diffraction light and right side diffraction Phase change can all occur for light, but change on the contrary, left side diffraction light phase change is -4 π sin θ Δ x/ λ, right side diffraction light phase It is the absolute value of diffraction time to change as 4 π sin θ Δs x/ λ, wherein m, and d is the one dimension displacement screen periods, and θ is incident for light Littrow angle on to grating.
When the one dimension displacement grating is subjected to displacement Δ z along z-axis, left side diffraction light and right side diffraction light phase change phase Together, it is 4 π cos θ Δ z/ λ;
It is 0 to enable with reference to light phase, when the one dimension displacement grating is subjected to displacement, third reflected light and third transmitted light it Between phase difference be φxleft+ 4 π cos θ Δ z/ λ of=- 4 π sin θ Δ x/ λ, the phase between the 4th reflected light and the 4th transmitted light Difference is φxright+ 4 π cos θ Δ z/ λ of=4 π sin θ Δ x/ λ,
With reference to grating equation 2dsin θ=m λ, the displacement in x-axis is Δ x=d (φxrightxleft4 π m of)/(), in z-axis Displacement be Δ z=d (φxrightxleft)/(4πmcotθ)。
In some embodiments, a line of first prism and the second prism is symmetrically glued together, the third rib The a line of mirror and a line of first prism are glued together, a line of the 4th prism and second prism A line it is glued together.
In some embodiments, the two-frequency laser inputs original reference signals, the original to the signal processing system Beginning reference signal is used to ensure that the signal processing system calculates the one-dimensional measurement grating in grating vector direction and raster method The stability of the displacement information in line direction.
On the other hand, the present invention also provides a kind of diffraction grating heterodyne system method for measuring two-dimension displacement, using above-mentioned institute The diffraction grating heterodyne system displacement measurement system stated carries out displacement measurement.
Advantageous effect:
The diffraction grating heterodyne system displacement measurement system of the present invention is realizing grating vector direction and grating normal direction position The displacement measurement range of grating normal direction is improved while shift measurement, and system structure is simple, realize miniaturization and integrated Change.
Description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, to embodiment or will show below There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention, for those of ordinary skill in the art, without creative efforts, can be with Other apparent modes of texturing are obtained according to these attached drawings.
Fig. 1 is grating displacement measuring system overall structure diagram of the present invention;
Fig. 2 is the reading head structure diagram of grating displacement measuring system one embodiment of the present invention;
Fig. 3 is that the reading head of grating displacement measuring system one embodiment of the present invention minimizes integrated structure schematic diagram.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with attached drawing and specific implementation Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only explaining this hair It is bright, without being construed as limiting the invention.
Fig. 1-3 shows diffraction grating heterodyne system displacement measurement system of the present invention.Referring to Fig. 1, for grating position of the present invention The structure diagram of shift measurement system, including two-frequency laser 1, reading head 2, one-dimensional measurement grating 3, the first receiver 4, second Receiver 5 and signal processing system 6, the reading head 2 are designed using symmetrical structure.
The two-frequency laser 1 inputs original reference signals (dotted line) to the signal processing system 6, the purpose is to:Disappear Except frequency difference, ensure that the signal processing system calculates the one-dimensional measurement grating in grating vector direction and grating normal direction The stability and accuracy of displacement information.
What the two-frequency laser 1 was sent out is incident on certain frequency difference and orhtogonal linear polarizaiton light in the reading head 2, It is divided into two beam reference lights of left and right in the reading head 2 and two beams of left and right measures light.
Two beams of left and right measure light and are incident to respectively in the one-dimensional reflecting grating 3, and produced in the one-dimensional reflecting grating 3 Raw diffraction light, diffraction light reading head 2 as described in backtracking are interferenceed respectively with the two beam reference light of left and right, and point Jin Ru not be in first receiver 4 and the second receiver 5, interference signal is converted to electric signal input signal by receiver Processing system 6, such as the dotted line in Fig. 1.
First receiver 4 and the second receiver 5 convert optical signal into electric signal, and be conveyed to signal processing System 6, signal processing system 6 is according to the first receiver 4 and the signal and two-frequency laser 1 of the transmission of the second receiver 5 The reference signal of transmission carries out signal processing, obtains one-dimensional reflecting grating 3 in grating vector direction and the position of grating normal direction Move information.
One dimension displacement grating 3 along x-axis be subjected to displacement Δ x when, phase change can all occur for left side diffraction light and right side diffraction light Change, but change on the contrary, left side diffraction light phase change is -4 π sin θ Δ x/ λ, right side diffraction light phase change is 4 π sin θ Δs x/ λ, wherein m are the absolute value of diffraction time, and d is the period of the one dimension displacement grating 3, and θ is the profit that light is incident on grating Special sieve angle.
When the one dimension displacement grating 3 is subjected to displacement Δ z along z-axis, left side diffraction light and right side diffraction light phase change It is identical, it is 4 π cos θ Δ z/ λ;
Enable with reference to light phase be 0, when the one dimension displacement grating 3 is subjected to displacement, the left side reflected light of reading head 2 and thoroughly The phase difference penetrated between light is φxleft+ 4 π cos θ Δ z/ λ of=- 4 π sin θ Δ x/ λ, the phase between right side reflected light and transmitted light Potential difference is φxright+ 4 π cos θ Δ z/ λ of=4 π sin θ Δ x/ λ,
With reference to grating equation 2dsin θ=m λ, the displacement in x-axis is Δ x=d (φxrightxleft4 π m of)/(), in z-axis Displacement be Δ z=d (φxrightxleft)/(4πmcotθ)。
Referring to Fig. 2, in one embodiment of the invention, the structure of reading head 2 is:Reading head 2 includes Amici prism 201st, the first polarization splitting prism 202, the second polarization splitting prism 203, the first plane mirror 208, the second plane mirror 210th, third plane mirror 209, fourth plane speculum 211, the first quarter-wave plate 206, the second quarter-wave plate 204th, 207 and the 4th quarter-wave plate 205 of third quarter-wave plate.
What two-frequency laser 1 was sent out there is certain frequency difference and orhtogonal linear polarizaiton light to be incident on the institute in the reading head 2 Amici prism 201 is stated, divides through the Amici prism 201 and surveys light beam and right side light beam to be left, the left side light beam is through the first polarization Amici prism 202 is reflected and is transmitted, and is divided into the first reflected light and the first transmitted light, first reflected light is reference light, through institute After stating the first quarter-wave plate 206 and first plane mirror 208, transmitted through first polarization splitting prism 202 Enter first receiver 4 afterwards;First transmitted light is measures light, through second quarter-wave plate 204 and second It being incident on the one-dimensional measurement grating 3 with Littrow angle after plane mirror 210, auto-collimation diffraction light presses backtracking, then It once transmits by second quarter-wave plate 204, is connect after the reflection of the first polarization splitting prism 202 into described first Receive device 4, there is polarizer in first receiver 4, the polarizer by the polarization direction tune of the two-beam received it is consistent after, Two-beam interferes.
Right side light beam is reflected and is transmitted through the second polarization splitting prism 203, is divided into the second reflected light and the second transmitted light.The Two reflected lights are reference light, after the third quarter-wave plate 207 and the third plane mirror 209, through described the Enter second receiver 5 after the transmission of two polarization splitting prisms 203;Second transmitted light is measures light, through described four or four point One of be incident on the one-dimensional measurement grating 3 with Littrow angle after wave plate 205 and fourth plane speculum 211, auto-collimation is spread out Light is penetrated by backtracking, is transmitted again through the 4th quarter-wave plate 205, through the second polarization splitting prism 203 instead Enter second receiver 5 after penetrating, have polarizer in the second receiver 5, the polarizer is connect the second receiver 5 After the polarization direction tune of the two-beam of receipts is consistent, two-beam interferes.
Referring to Fig. 3, for a kind of miniaturization, integrated 2 structure of reading head.Reading head 2 is symmetrically arranged including two Acute angle is 45 degree of the first prism 21 and the second prism 22, and symmetrically arranged 23 and the 4th prism 24 of third prism is symmetrical arranged 41 and the 4th receiver 51 of third receiver, symmetrically arranged 5th quarter-wave plate 25, the 6th quarter-wave plate 26, 7th quarter-wave plate 27 and the 8th quarter-wave plate 28, the 5th plane mirror 29 and the 6th plane mirror 290;
Wherein, a line of first prism 21 and second prism 22 is coated with spectro-film and is bonded into light splitting rib Mirror.Specifically, the prism that the first prism 21 and the second prism 22 are 45 ° for two acute angles, by the first prism 21 and the second prism 22 plate spectro-film at interface 211 and compose beam splitter prism.
The third prism 23 is bonded with the another a line of the first prism 21 and is coated with spectro-film, forms polarization beam splitting rib Mirror.Specifically, 23 and first prism 21 of third prism plates polarization beam splitting film at interface 223 and composes polarization beam splitter prism.
4th prism 24 is bonded with the another a line of second prism 22 and is coated with spectro-film, forms polarization beam splitting Prism.Specifically, the 4th prism 24 and the second prism 22 plate polarization beam splitting film at interface 224 and compose polarization beam splitting rib Mirror.
What two-frequency laser 1 was sent out is incident on first prism 21 and institute with certain frequency difference and orhtogonal linear polarizaiton light Behind the interface 211 for stating the fitting of the second prism 22, it is divided into identical left side light beam and right side light beam.
Occur on the side (interface 223) that left side light beam is bonded in first prism 21 and the third prism 23 reflection and Transmission, forms third reflected light (S light) and third transmitted light (P light), and the right side light beam is in second prism 22 and described Reflection and transmission occurs on the side of 4th prism 24 fitting, forms the 4th reflected light and the 4th transmitted light.
Third transmitted light (P light) is incident on inside the third prism 23, and the interface 215 for passing through third prism 23 is anti- It penetrates, is incident on the one-dimensional measurement grating 3 with Littrow angle by the 5th quarter-wave plate 25, formed on the left of auto-collimation and spread out Light is penetrated and by backtracking, into the third receiver 41;4th transmitted light is incident on inside the 4th prism 24, And the interface 216 for passing through the 4th prism 24 is reflected, and is reflected by the 6th quarter-wave plate 26 with Littrow angle described On one-dimensional measurement grating 3, form diffraction light on the right side of auto-collimation and press backtracking, into the 4th receiver 51;
The third reflected light is after the 7th quarter-wave plate 27, the 5th plane mirror 29, former road It returns, and after the first prism 21 and third prism 23, into the third receiver 41.
4th reflected light is after the 8th quarter-wave plate 28, the 6th plane mirror 290, former road It returns, after the second prism 22 and the 4th prism 24, into the 4th receiver 51.It is final measure light and reference light into Enter to receive 41 and receiver 51.It is integrated the design achieves the miniaturization of reading head shown in Fig. 2, be conducive to reduction system body Product, facilitates the installation and debugging of system, improves the stability of system.
In addition, the present invention also provides a kind of diffraction grating heterodyne system method for measuring two-dimension displacement, using above-mentioned diffraction grating Heterodyne system displacement measurement system realizes the displacement detecting of two-dimentional reflecting grating, detection method with the system the course of work, specifically It repeats no more.
The specific embodiment of present invention described above, is not intended to limit the scope of the present invention..Any basis Various other corresponding changes and deformation made by the technical concept of the present invention, should be included in the guarantor of the claims in the present invention In the range of shield.

Claims (7)

1. a kind of diffraction grating heterodyne system two-dimension displacement measuring system, which is characterized in that including two-frequency laser, reading head, one Dimension measures grating, the first receiver, second receiver and signal processing system, and the reading head is designed using symmetrical structure;
What the two-frequency laser was sent out is incident on certain frequency difference and orhtogonal linear polarizaiton light in the reading head, described It is divided into two beam reference lights of left and right in reading head and two beams of left and right measures light;
Two beams of left and right measure light and are incident in the one-dimensional reflecting grating by Littrow angle respectively, and in the one-dimensional reflecting grating Upper generation diffraction light, diffraction light reading head as described in backtracking are interferenceed respectively with the two beam reference light of left and right, and It respectively enters in first receiver and the second receiver;
First receiver and the second receiver convert optical signal into electric signal, and be conveyed to signal processing system, Signal processing system carries out signal processing, obtains the one-dimensional measurement grating in grating vector direction and the position of grating normal direction Move information.
2. diffraction grating heterodyne system two-dimension displacement measuring system as described in claim 1, which is characterized in that the reading head packet Include Amici prism, the first polarization splitting prism, the second polarization splitting prism, the first plane mirror, the second plane mirror, Three plane mirrors, fourth plane speculum, the first quarter-wave plate, the second quarter-wave plate, third quarter-wave Piece and the 4th quarter-wave plate;
It is described in the reading head that the two-frequency laser was sent out there is certain frequency difference and orhtogonal linear polarizaiton light to be incident on Amici prism is divided into left survey light beam and right side light beam through the Amici prism, and the left side light beam is through the first polarization splitting prism Reflection and transmission, are divided into the first reflected light and the first transmitted light, and first reflected light is reference light, through the described 1st/ After one wave plate and first plane mirror, enter first receiver after first polarization splitting prism transmission; First transmitted light is measures light, with Littrow angle incidence after second quarter-wave plate and the second plane mirror Onto the one-dimensional measurement grating, auto-collimation diffraction light presses backtracking, saturating again through second quarter-wave plate It penetrates, first receiver is entered after the reflection of the first polarization splitting prism, there is polarizer in first receiver, it is described inclined Shake piece by the polarization direction tune of the two-beam received it is consistent after, two-beam interferes;
The right side light beam is reflected and is transmitted through the second polarization splitting prism, is divided into the second reflected light and the second transmitted light, described Second reflected light is reference light, after the third quarter-wave plate and the third plane mirror, through described second partially Enter second receiver after the Amici prism that shakes transmission;Second transmitted light is measures light, through the 4th quarter-wave plate It being incident on the one-dimensional measurement grating with Littrow angle with after fourth plane speculum, auto-collimation diffraction light presses backtracking, It is transmitted again through the 4th quarter-wave plate, enters second receiver, institute after the reflection of the second polarization splitting prism Stating has polarizer in second receiver, the polarization direction tune one for the two-beam that the polarizer is received the second receiver After cause, two-beam interferes.
3. diffraction grating heterodyne system two-dimension displacement measuring system as described in claim 1, which is characterized in that the reading head packet The first prism and the second prism that two symmetrically arranged acute angles are 45 degree, symmetrically arranged third prism and the 4th prism are included, Symmetrically arranged third receiver and the 4th receiver, symmetrically arranged 5th quarter-wave plate, the 6th quarter-wave plate, 7th quarter-wave plate, the 8th quarter-wave plate, the 5th plane mirror, the 6th plane mirror;
The a line of first prism and second prism is coated with spectro-film and is bonded into Amici prism;
The third prism is bonded with the another a line of the first prism and is coated with spectro-film, forms polarization beam splitter prism;
4th prism is bonded with the another a line of second prism and is coated with spectro-film, forms polarization beam splitter prism;
What the two-frequency laser was sent out have certain frequency difference and orhtogonal linear polarizaiton light is incident on first prism and described Behind the side of second prism fitting, it is divided into identical left side light beam and right side light beam,
Reflection and transmission occurs on the side that the left side light beam is bonded in first prism and the third prism, forms third Reflected light and third transmitted light, the right side light beam reflect on the side of second prism and the 4th prism fitting And transmission, form the 4th reflected light and the 4th transmitted light;
The third transmitted light is incident on inside the third prism, and passes through the third prism and the 5th quarter-wave plate It is incident on the one-dimensional measurement grating with Littrow angle, forms on the left of auto-collimation diffraction light simultaneously by backtracking, into described Third receiver;4th transmitted light is incident on inside the 4th prism, and passes through the 4th prism and the six or four point One of wave plate be incident on the one-dimensional measurement grating with Littrow angle, form on the right side of auto-collimation diffraction light by backtracking, into Enter the 4th receiver;
The third reflected light by the 7th quarter-wave plate, the 5th plane mirror, first prism and After the third prism, into the third receiver;
4th reflected light by the 8th quarter-wave plate, the 6th plane mirror, second prism and After 4th prism, into the 4th receiver.
4. diffraction grating heterodyne system two-dimension displacement measuring system as claimed in claim 2 or claim 3, which is characterized in that described one-dimensional Displacement grating along x-axis be subjected to displacement Δ x when, phase change can all occur for left side diffraction light and right side diffraction light, but change on the contrary, Left side diffraction light phase change is -4 π sin θ Δ x/ λ, and right side diffraction light phase change is diffraction for 4 π sin θ Δs x/ λ, wherein m The absolute value of level, d are the period of the one-dimensional grating, and θ is the Littrow angle that light is incident on grating.
When the one dimension displacement grating is subjected to displacement Δ z along z-axis, left side diffraction light is identical with right side diffraction light phase change, It is 4 π cos θ Δ z/ λ;
It is 0 to enable with reference to light phase, when the one dimension displacement grating is subjected to displacement, between third reflected light and third transmitted light Phase difference is φxleft+ 4 π cos θ Δ z/ λ of=- 4 π sin θ Δ x/ λ, the phase difference between the 4th reflected light and the 4th transmitted light are φxright+ 4 π cos θ Δ z/ λ of=4 π sin θ Δ x/ λ, with reference to grating equation 2dsin θ=m λ, the displacement in x-axis is Δ x=d (φxrightxleft4 π m of)/(), the displacement in z-axis is Δ z=d (φxrightxleft)/(4πmcotθ)。
5. diffraction grating heterodyne system two-dimension displacement measuring system as claimed in claim 3, which is characterized in that first prism It is symmetrically glued together with a line of the second prism, a line glue of a line of the third prism and first prism It is combined, a line of the 4th prism and a line of second prism are glued together.
6. diffraction grating heterodyne system two-dimension displacement measuring system as described in claim 1, which is characterized in that the double-frequency laser Device inputs original reference signals to the signal processing system, and the original reference signals are used to ensure the signal processing system The one-dimensional measurement grating is calculated in grating vector direction and the stability of the displacement information of grating normal direction.
7. a kind of diffraction grating heterodyne system method for measuring two-dimension displacement, which is characterized in that using such as any one of claim 1-6 institutes The diffraction grating heterodyne system two-dimension displacement measuring system stated carries out displacement measurement.
CN201810245787.6A 2018-03-23 2018-03-23 Diffraction grating heterodyne system two-dimension displacement measuring system and method Pending CN108225193A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109632011A (en) * 2019-01-23 2019-04-16 中国科学院长春光学精密机械与物理研究所 It is a kind of to be displaced and angle synchronized measurement system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2494991Y (en) * 2001-09-21 2002-06-12 无锡市星迪仪器有限公司 Elbow colour mixture prism
CN103673891A (en) * 2013-11-21 2014-03-26 清华大学 Grating heterodyne interference auto-collimation measuring device
CN106289068A (en) * 2016-07-22 2017-01-04 清华大学 A kind of two degrees of freedom heterodyne grating interferometer displacement measurement method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2494991Y (en) * 2001-09-21 2002-06-12 无锡市星迪仪器有限公司 Elbow colour mixture prism
CN103673891A (en) * 2013-11-21 2014-03-26 清华大学 Grating heterodyne interference auto-collimation measuring device
CN106289068A (en) * 2016-07-22 2017-01-04 清华大学 A kind of two degrees of freedom heterodyne grating interferometer displacement measurement method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109632011A (en) * 2019-01-23 2019-04-16 中国科学院长春光学精密机械与物理研究所 It is a kind of to be displaced and angle synchronized measurement system
CN109632011B (en) * 2019-01-23 2020-08-21 中国科学院长春光学精密机械与物理研究所 Displacement and angle synchronous measurement system

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Application publication date: 20180629