CN105806215A - Roll angle measurement device and method based on bi-blazed grating heterodyne interference - Google Patents
Roll angle measurement device and method based on bi-blazed grating heterodyne interference Download PDFInfo
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- CN105806215A CN105806215A CN201610136640.4A CN201610136640A CN105806215A CN 105806215 A CN105806215 A CN 105806215A CN 201610136640 A CN201610136640 A CN 201610136640A CN 105806215 A CN105806215 A CN 105806215A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Abstract
The invention relates to a roll angle measurement device and method based on bi-blazed grating heterodyne interference, and belongs to the technical field of laser precision measurement. The device comprises: a laser source, a bi-blazed grating unit, an interference unit and a retroreflection unit; wherein the laser resource is used for providing a laser beam and a reference signal, the laser beam comprises a first polarized component and a second polarized component of which frequency is different and linear polarization directions are orthometric, and the frequency of the reference signal is corresponding to the frequency difference between the first polarized component and the second polarized component; the bi-blazed grating unit comprises a first blazed grating and a second blazed grating, and the first blazed grating and the second blazed grating can move with to-be-measured object; the interference unit can split the laser beam into a first polarized light and a second polarized light and is arranged between the one side of the bi-blazed grating unit and the laser source; and the retroreflection unit is arranged on the other side of the bi-blazed grating unit. The method can improve the diffraction efficiency of a diffraction light in a roll angle measurement process.
Description
Technical field
The present invention relates to accurate laser measurement technical field, particularly relate to a kind of rolling angle measurement device and method based on double balzed grating difference interference.
Background technology
Precise guide rail kinematic pair is the crucial general character moving component of modern precision engineering, is widely used in the high-tech art fields such as synchrotron radiation, Digit Control Machine Tool, space flight military project.All there is angular errors and the angle of pitch, deflection angle and the roll angle of 3 degree of freedom in all guide rail movements pair.Rolling angle measurement is the premise improved of error compensation, precision and basis, is also one of key technology of the metering of accurate benchmark and geometric measurement.Relative to the above two, existing roll angle measurement method or instrument are difficult to meet high-precision measurement demand, as synchronized radiating surface shape detection middle guide roll angle requirement 2 " in scope, precision is better than 0.2 ", the angular displacement being primarily due to rolling is perpendicular to guide rail movement direction, causes the ripe clinometer of the high accuracy such as two-frequency laser interferometer/autocollimator to cannot be used directly for rolling angle measurement.
At present, for a rolling angle measurement difficult problem, main research and probe concentrates on following several respects:
First, laser interferance method.The US Patent No. 3790284 of R.R.Baldwin proposes the interference technique of a kind of pair of wollaston prism, but reflecting mirror and double; two wollaston prisms to debug alignment requirements high and relatively costly, so limiting its application；The US Patent No. 2010/0141957 of W.Hou and China Patent Publication No. are that CN101650166A proposes a kind of roll angle interferometer measuration system on this basis, prism wedge is utilized to replace wollaston prism to move with object to be measured as sensing element, it reduce cost but add phasometer and make system structure complicated, and still it is strict with hot spot and prism wedge centrosymmetry, this measurement occasion non-constant at rolling center is difficult to apply；The US Patent No. 5056921 of R.J.Chaney is it is also proposed that the plane mirror interferometer mode of a kind of multiple beam, owing to plane mirror runs through the stroke of whole linear movement, so longer and high-precision plane mirror is the bottleneck that technology realizes.
Second, the method that auto-collimation is combined with PSD." Measurementandcontrolofrollingofaprecisionmovingtable " (ProceedingsoftheIEEEInternationalconferenceonintelligent processingsystems of WeiGao et al., 1997,28-31:70-74) a kind of method combined based on laser auto-collimation and PSD is proposed, utilize two differential type PSD detectors, realize rolling angle measurement, the surface quality of plane mirror is proposed higher requirement by the method, and it is subject to the impact of the factor such as temperature, stress deformation, thus reducing Measurement reliability；The China Patent Publication No. of extraction side etc. of rectifying is that CN101846506A " roll angle measurement method based on common path parallel beams " adopts symmetrical light path to improve sensitivity based on laser auto-collimation principle, by measuring the facula position information after reflecting, obtain rolling angle measurement value, although light channel structure improves anti-interference altogether, but the method structure relative complex, increase and regulate difficulty, and be subject to linearity impact.
3rd, based on the photon flux method of polarization characteristic.The China Patent Publication No. of Zhang Enyao et al. is that CN1396435A " roll angle photoelectric detecting method and device based on orthogonal double polarizing light " discloses the two row methods adopting phase contrast to be 180 °, two semiconductor lasers in modulation light path produce two bundle timesharing crossed polarized light alternately respectively, light intensity difference is produced, thus obtaining the value of roll angle after analyzer；The China Patent Publication No. of extraction side etc. of rectifying is that CN1687701A " a kind of roll angle measurement method and device " discloses with quarter wave plate for sensing element, by wollaston prism light splitting, the method detecting two light intensity difference and voltage difference by many quadrant detectors and realizing rolling angle measurement；The China Patent Publication No. of Shi Enxiu et al. is that CN101354243A " non-contact laser detection method of guide rail rolling angle " discloses with 1/2 wave plate for sensing element, by polarization splitting prism, line polarized light is carried out light splitting, detect the roll angle measurement method of the light intensity difference of two bundles；The China Patent Publication No. of Feng Qibo et al. is that CN101339012A " a kind of roll angle measurement method based on grating and device " discloses and a kind of as sensing element, one-dimensional plane transmission grating carried out light splitting, obtains rolling angle measurement values by detecting two facula positions changes.It is higher to reflecting mirror required precision, and needs to demarcate for nonlinear response；The China Patent Publication No. of Kuang Cuifang et al. is that CN103162645A " a kind of rolling measurement method measured based on the ellipse degree of bias " discloses with 1/2 wave plate for sensing element, utilize line polarized light to become elliptically polarized light through quarter wave plate, carry out the calculating of the initial ellipse degree of bias by the photodetector detection minimum and maximum value of light intensity and obtain real-time roll angle information.During measurement analyzer rotation find minimum and maximum light intensity value will affect efficiency and precision.The method, based on light intensity, is subject to the impact of the factor such as environment, light source, and generally its resolution is restricted.
4th, based on the phase method of polarization characteristic.The China Patent Publication No. of Yin Chunyong et al. is that CN1335483A " roll angle measurement method and rolling angle measurement instrument thereof " discloses based on transverse zeeman laser, make crossed polarized light that micro-ellipse inclinedization to occur with quarter wave plate, again using 1/2 wave plate as sensing element, the phase place change that 1/2 wave plate causes is detected in non-linear sensitive volume, carry out phase difference measurement by phasometer and reference signal and obtain rolling angle value, though the method has higher sensitivity, but inelastic region needs to demarcate, and affects certainty of measurement；And the China Patent Publication No. of Wang Zhao etc. is CN102654392A " a kind of rolling angle measurement device and method based on array multiple reflections " and publication number is that CN102818541A " a kind of high-resolution rolling angle measurement device and measuring method " proposes to reach to put forward high-resolution purpose based on the phase method of multiple reflections, and individually disclose based on array with based on the optical path of two kinds of multiple reflections devices of lens type and principle.The method can realize high-resolution, but nonlinear response curve needs to demarcate, and reduces its precision, and stability is short of.
Accordingly, it would be desirable to a kind of new rolling angle measurement device and method based on double balzed grating difference interference.
In information above-mentioned disclosed in described background section only for strengthening the understanding of the background to the present invention, therefore it can include not constituting the information to prior art known to persons of ordinary skill in the art.
Summary of the invention
The present invention provides a kind of rolling angle measurement device and method based on double balzed grating difference interference, to promote the diffraction efficiency of diffraction light.
Other characteristics of the present invention and advantage will be apparent from by detailed description below, or partially by the practice of the present invention and acquistion.
According to an aspect of the present invention, the rolling angle measurement device of a kind of double balzed grating difference interference is provided, including: lasing light emitter, for providing laser beam and reference signal, wherein said laser beam comprises the first polarized component and the second polarized component that frequency is different and linear polarization is orthogonal, and the frequency of described reference signal is corresponding to the difference on the frequency of described first polarized component and described second polarized component；Double balzed grating unit, it includes the first balzed grating, and the second balzed grating, and wherein said first balzed grating, can move with object to be measured with described second balzed grating,；Interference unit, for being divided into the first polarized light and described second polarized light by described laser beam, between its side being arranged at described double balzed grating unit and described lasing light emitter；And retroeflection unit, it is arranged at the opposite side of described double balzed grating unit；Wherein, described first polarized light is incident to described first balzed grating, there is the first diffraction light of an angle of diffraction through described first balzed grating, outgoing, and glitter at its default level spectrum, described first diffraction light is incident to described retroeflection unit, reflexing to described first balzed grating, through described retroeflection unit is antiparallel, through described first balzed grating, outgoing the second diffraction light, this second diffraction light retroeflection to described interference unit generates the first measuring beam；Described second polarized light is incident to described second balzed grating, along the direction paralleled with described first polarized light, there is the 3rd diffraction light of an angle of diffraction through described second balzed grating, outgoing, and glitter at its default level spectrum, described 3rd diffraction light is incident to described retroeflection unit, reflex to described second balzed grating, through described retroeflection unit is antiparallel, through described second balzed grating, outgoing the 4th diffraction light, the 4th diffraction light retroeflection to described interference unit generates the second measuring beam；Described first measuring beam overlaps with described second measuring beam and interferes generation measurement signal, and obtains the roll angle of described object to be measured according to described measurement signal and described reference signal.
In an embodiment, wherein said first balzed grating, includes the first cutting face and the first grating face, described first polarized light is perpendicular to described first grating face and is incident to described first balzed grating, and described second diffraction light is perpendicular to described first grating face from described first balzed grating, outgoing；Described second balzed grating, includes the second cutting face and the second grating face, and described second polarized light is perpendicular to described second grating face and is incident to described second balzed grating, and described 4th diffraction light is perpendicular to described second grating face from described second balzed grating, outgoing.
In an embodiment, wherein said first balzed grating, and described second balzed grating, are arranged at the limit, two opposite sides at the rolling center of described object to be measured or same side.
In an embodiment, wherein said default level is+1 grade or-1 grade.
In an embodiment, wherein said retroeflection unit includes the first combination type reflecting mirror and the second combination type reflecting mirror, described first combination type reflecting mirror is arranged on the diffraction optical axis of described first balzed grating, and described second combination type reflecting mirror is arranged on the diffraction optical axis of described second balzed grating,.
In an embodiment, wherein said retroeflection unit includes the first reflecting prism and the second reflecting prism, described first reflecting prism is arranged on the diffraction optical axis of described first balzed grating, and described second reflecting prism is arranged on the diffraction optical axis of described second balzed grating,.
In an embodiment, also including: signal processing unit, it calculates described roll angle by a pre-defined algorithm.
In accordance with a further aspect of the present invention, the rolling angle measurement device of a kind of double balzed grating difference interference is provided, including: lasing light emitter, for providing laser beam and reference signal, wherein said laser beam comprises the first polarized component and the second polarized component that frequency is different and linear polarization is orthogonal, and the frequency of described reference signal is corresponding to the difference on the frequency of described first polarized component and described second polarized component；Polarization splitting prism, for described laser beam is divided into the first polarized light and described second polarized light, it is arranged on the optical axis of described lasing light emitter；Reflector, described second polarized light is incident to described reflector, and it is arranged on the reflection optical axis of described polarization splitting prism；First balzed grating, described first polarized light normal incidence is to described first balzed grating, and it is arranged in the transmission optical axis of described polarization splitting prism；Second balzed grating, normal incidence is to described second balzed grating, after described reflector reflects for described second polarized light, and it is arranged on the reflection optical axis of described reflector；First retroeflection subelement, it is arranged on the diffraction optical axis of described first balzed grating, for by described first polarized light retroeflection to described first balzed grating, and described polarization splitting prism, generating the first measuring beam；Second retroeflection subelement, it is arranged on the diffraction optical axis of described second balzed grating, for by described second polarized light retroeflection to described second balzed grating, and described reflector, described polarization splitting prism, generating the second measuring beam；Wherein said lasing light emitter also includes receiver hole, and it, for receiving described first measuring beam and the measurement signal of described second measuring beam retroeflection coincidence generation, obtains the value of described roll angle according to described measurement signal and described reference signal.
In an embodiment, wherein said reflector includes any one in right-angle reflecting prism, plane mirror and pentagonal prism.
In an embodiment, wherein said first retroeflection subelement and described second retroeflection subelement are any one in reflecting prism, combination type reflecting mirror.
According to a further aspect in the invention, the roll angle measurement method of a kind of rolling angle measurement device based on above-mentioned double balzed grating difference interference is provided, including: the wavelength of the laser beam sent according to described lasing light emitter and the grating constant of described first balzed grating, and the second balzed grating, obtain described first diffraction light and the angle of diffraction of described 3rd diffraction light respectively；When described first balzed grating, and described second balzed grating, move at a predetermined velocity because of object rolling to be measured, obtain described first measuring beam and the frequency shift amount of described second measuring beam respectively according to described predetermined speed, the wavelength of described laser beam and the described angle of diffraction；Frequency shift amount according to described first measuring beam and described second measuring beam obtains the described measurement signal side-play amount relative to described reference signal；Obtain the relative angular displacement of described double balzed grating relative to the grating constant of the side-play amount of described reference signal and described first balzed grating, and the second balzed grating, according to described measurement signal；The value of described roll angle is obtained according to described relative angular displacement rolling radius calculation relative to described double balzed grating.
In an embodiment, the formula of the value wherein calculating described roll angle is:
Wherein, α is roll angle, T is count time period, s is described first balzed grating, and the relative angular displacement of described second balzed grating, L is relative rolling radius, d is described first balzed grating, and the grating constant of described second balzed grating, and Δ f is the difference on the frequency of described measurement signal and described reference signal.
In sum, technical scheme compared with prior art has clear advantage and beneficial effect.Laser beam diffraction generation that lasing light emitter is launched by the present invention by adopting double balzed grating are glittered at predetermined level spectrum, it is possible to improve the diffraction efficiency of diffraction light greatly, reduce the difficulty of optical path adjusting, improve the signal to noise ratio of reception signal.
Accompanying drawing explanation
Accompanying drawing herein is merged in description and constitutes the part of this specification, it is shown that meets embodiments of the invention, and is used for explaining principles of the invention together with description.
Fig. 1 schematically shows the three dimensional structure schematic diagram of the rolling angle measurement device of a kind of double balzed grating difference interference according to example embodiment of the present invention；
Fig. 2 is the linear movement schematic diagram of the left view of Fig. 1 and rollpiston；
Fig. 3 is the top view of Fig. 1；
Fig. 4 is the schematic diagram that glitters of balzed grating,+1 grade or-1 order diffraction level；
Fig. 5 schematically shows the flow chart of the roll angle measurement method of a kind of double balzed grating difference interference according to example embodiment of the present invention.
Wherein, description of reference numerals is as follows:
1-lasing light emitter；
2-interference unit；
201-polarization splitting prism；
202-right-angle reflecting prism；
3-double balzed grating unit；
301-the first balzed grating,；
302-the second balzed grating,；
4-retroeflection unit；
401-the first combination type reflecting mirror；
402-the second combination type reflecting mirror；
5-rollpiston；
α-roll angle to be measured；
θ-grating ± 1 order diffraction angle；
D-Z is to linear range of movement；
The length of H-the first combination type reflecting mirror 401 and the second combination type reflecting mirror 402；
The relative rolling radius of L-；
D-grating constant；
The blaze angle of γ-balzed grating,；
V-grid stroke speed.
Detailed description of the invention
It is described more fully with example embodiment referring now to accompanying drawing.But, example embodiment can be implemented in a variety of forms, and is not understood as limited to example set forth herein；On the contrary, it is provided that these embodiments make the present invention will more fully and completely, and the design of example embodiment is conveyed to those skilled in the art all sidedly.Accompanying drawing is only the schematic illustrations of the present invention, is not necessarily drawn to scale.Accompanying drawing labelling identical in figure represents same or similar part, thus will omit repetition thereof.
Additionally, described feature, structure or characteristic can be combined in one or more embodiment in any suitable manner.In the following description, it is provided that many details are thus providing fully understanding embodiments of the present invention.It will be appreciated, however, by one skilled in the art that can put into practice technical scheme and omit in described specific detail is one or more, or other method, constituent element, device, step etc. can be adopted.In other cases, known features, method, device, realization, material or operation are not shown in detail or describe to avoid that a presumptuous guest usurps the role of the host and to make each aspect of the present invention thicken.
Embodiment described in following exemplary embodiment does not represent all embodiments consistent with the present invention.On the contrary, they only with in appended claims describe in detail, the present invention some in the example of consistent apparatus and method.
In embodiment with claim, unless be particularly limited to some extent for article in literary composition, otherwise " one " and " described " can refer to single one or more.
A kind of three dimensional structure schematic diagram of the rolling angle measurement device of the double balzed grating difference interference of the example embodiment of the present invention shown in Fig. 1.Fig. 2 is the linear movement schematic diagram of the left view of Fig. 1 and rollpiston.Fig. 3 is the top view of Fig. 1.Fig. 4 is the schematic diagram that glitters of balzed grating,+1 grade or-1 order diffraction level.
With reference to Fig. 1, Fig. 2 and Fig. 3, this rolling angle measurement device includes: lasing light emitter 1, for providing laser beam and reference signal, wherein said laser beam comprises the first polarized component and the second polarized component (in Fig. 1 shown in the arrow in light path) that frequency is different and linear polarization is orthogonal, and the frequency of described reference signal is corresponding to the difference on the frequency of described first polarized component and described second polarized component；Double balzed grating unit 3 is as sensing element, it includes the first balzed grating, 301 and the second balzed grating, 302, wherein said first balzed grating, 301 and described second balzed grating, 302 and can move with object to be measured (with rollpiston 5 for exemplary illustration in Fig. 1)；Interference unit 2, for being divided into the first polarized light and described second polarized light by described laser beam, between its side being arranged at described double balzed grating unit 3 and described lasing light emitter 1；And retroeflection unit 4, it is arranged at the opposite side of described double balzed grating unit 3；Wherein, described laser beam is incident to described interference unit 2 through the first light path L11, described first polarized light is incident to described first balzed grating, 301 through the second light path L12, there is along the 3rd light path L13 outgoing the first diffraction light of a diffraction angle through described first balzed grating, 301 diffraction, and glitter at its default level spectrum, described first diffraction light is incident to described retroeflection unit 4 along the 3rd light path L13, described first balzed grating, 301 is reflexed to along the 4th light path L14 is antiparallel through described retroeflection unit 4, through described first balzed grating, 301 outgoing the second diffraction light, this second diffraction light generates the first measuring beam through the 5th light path L15 retroeflection to described interference unit 2；Described second polarized light is incident to described second balzed grating, 302 along direction i.e. the 7th light path L22 paralleled with described first polarized light, there is the 3rd diffraction light of an angle of diffraction through described second balzed grating, 302 outgoing, and glitter at its default level spectrum, described 3rd diffraction light is incident to described retroeflection unit 4 through the 8th light path L23, described second balzed grating, 302 is reflexed to through antiparallel i.e. the 9th light path L24 of described retroeflection unit 4, through described second balzed grating, 302 outgoing the 4th diffraction light, 4th diffraction light generates the second measuring beam through the tenth light path L25 retroeflection to described interference unit 2；Described first measuring beam overlaps with described second measuring beam and interferes generation measurement signal, and obtains the roll angle α of described object to be measured according to described measurement signal and described reference signal.
In embodiments of the present invention, balzed grating, refers to that, when the wire casing section of grating ruling toothing, the light energy of grating is just concentrated in a predetermined direction, namely on a certain order of spectrum.During from this orientation detection, the maximum intensity of spectrum, this phenomenon is called glitters, and this grating is called balzed grating,.In the balzed grating, being so carved into, the groove face playing diffraction is a smooth plane.Wavelength corresponding to maximum light intensity, is called blaze wavelength.By the design of blaze angle, it is possible to make grating be applicable to certain first-order spectrum of a certain specific band.The cutting face of balzed grating, is not parallel with grating face, there is an angle (blaze angle) between the two, so that (between seam) interferes zero level primary maximum separately between the very big and all groove face of central authorities of single cutting face (being equivalent to single seam) diffraction, make light energy from interfering zero level primary maximum, i.e. zero order spectrum, shift and focus on certain one-level spectrally to go, it is achieved glittering of this grade of spectrum.Grating interference primary maximum direction is with grating face normal direction for its zero level direction (m=0 in Fig. 4), and the central primary maximum direction (m=1 or-1 in such as Fig. 4) of diffraction is then determined by other factorses such as cutting face normal directions.
With reference to Fig. 4, in the exemplary embodiment, described double balzed grating unit 3 includes two identical balzed grating,s 301 and 302, and the grating constant of described balzed grating, is d.Such as, illustrate for wherein said first balzed grating, 301, it includes the first cutting face 3011 and the first grating face 3012, between described first cutting face 3011 and described first grating face 3012, there is a blaze angle γ, described first polarized light is perpendicular to described first grating face 3012 and is incident to described first balzed grating, 301, and described second diffraction light is perpendicular to described first grating face 3012 from described first balzed grating, 301 outgoing.
Such as, described first polarized light with relative to the normal in described first cutting face 3011 with angle of incidence i, relative to described first grating face 3012 vertical incidence to described first balzed grating, 301, as i=γ, described first balzed grating, 301 is incident at m=0 level spectrum, and m=+1 level or-1 grade of spectrum glitter；Same described second balzed grating, 302 includes the second cutting face and the second grating face, described second polarized light is perpendicular to described second grating face and is incident to described second balzed grating, 302, and described 4th diffraction light is perpendicular to described second grating face from described second balzed grating, 302 outgoing.It should be noted that, although the embodiment of the present invention illustrates for described default level for+1 grade or-1 grade, but it is not limited thereto, the diffraction of balzed grating, is determined by angle of incidence i, diffraction angle and wavelength X, the interference of balzed grating, is determined by blaze angle γ, angle of incidence i and wavelength X, it is possible to select according to concrete system design considerations.
In FIG, described first balzed grating, 301 and described second balzed grating, 302 are arranged at the limit, two opposite sides at the rolling center of described object to be measured and rollpiston 5.Further, described first balzed grating, 301 and described second balzed grating, 302 can be symmetricly set in the limit, two opposite sides and in the same plane at the rolling center of described object to be measured and rollpiston 5.But the present invention is not limited thereto, for instance described first balzed grating, 301 and described second balzed grating, 302 can also be arranged at the same side at the rolling center of described object to be measured and rollpiston 5.In the present embodiment the both sides that described first balzed grating, 301 and described second balzed grating, 302 are arranged at rolling center can be improved the precision of rolling angle measurement.
In FIG, described rollpiston 5 is a plectane in the present embodiment, but the shape of rollpiston 5 is not restricted to this, and it can also be other arbitrary shapes such as rectangle.Further, other arbitrarily described first balzed grating, 301 can be got up with described second balzed grating, 302 held separate and makes described first balzed grating, 301 and described second balzed grating, 302 therewith together with the device that moves all open the described rollpiston 5 of replacement as object to be measured.
In FIG, wherein said retroeflection unit 4 includes the first combination type reflecting mirror 401 and the second combination type reflecting mirror 402, described first combination type reflecting mirror 401 is arranged at the default level of described first balzed grating, 301 (such as, + 1 grade or-1 grade) on diffraction optical axis, described second combination type reflecting mirror 402 is arranged on default level (such as ,+1 grade or-1 grade) the diffraction optical axis of described second balzed grating, 302.Further, described first combination type reflecting mirror 401 is identical with described second combination type reflecting mirror 402, and they are two long plane mirrors and combine with 90 ° of angles.
Such as, the first public rib 4013 that described first combination type reflecting mirror 401 includes the first long plane mirror 4011 and the second long plane mirror 4012 and described first long plane mirror 4011 and described second long plane mirror 4012 intersects vertically；The second public rib 4023 that described second combination type reflecting mirror 402 includes the 3rd long plane mirror 4021 and the 4th long plane mirror 4022 and described 3rd long plane mirror 4021 and described 4th long plane mirror 4022 intersects vertically.
In fig. 2, the described first public rib 4013 that described first diffraction light is perpendicular to described first combination type reflecting mirror 401 is incident, and the described second public rib 4023 that described 3rd diffraction light is perpendicular to described second combination type reflecting mirror 402 is incident.
In the exemplary embodiment, first public rib 4013 of the first combination type reflecting mirror 401 is parallel to the plane that described first diffraction light of described first balzed grating, is incident to the incident illumination composition of described first balzed grating, with described first polarized light, and vertical with described first diffraction light；Second public rib 4023 of described second combination type reflecting mirror 402 is parallel to the plane that described 3rd diffraction light of described second balzed grating, is incident to the incident illumination composition of described second balzed grating, with described second polarized light, and vertical with described 3rd diffraction light.
In the exemplary embodiment, the first of described first combination type reflecting mirror 401 the long plane mirror 4011 and the minute surface of the second long plane mirror 4012 are 45 ° with the angle of described first diffraction light.But the present invention is not limited thereto; such as; during the described first diffraction light described first long plane mirror 4011 of incidence; it it is 30 ° with the angle of the minute surface of described first long plane mirror 4011; and described first diffraction light after reflection from described second long plane mirror 4012 outgoing; can be 60 ° with the angle of the minute surface of described second long plane mirror 4012, as long as being capable of any angle of the described first antiparallel incidence of diffraction light and outgoing all within protection scope of the present invention.Described above is equally applicable to described second combination type reflecting mirror 402, does not repeat them here.
In the exemplary embodiment, described first combination type reflecting mirror 401 reflects along described described first diffraction light incident for 3rd light path L13, makes described first diffraction light along described 4th light path L14 and described 5th light path L15 retroeflection to described polarization splitting prism 201 as described first measuring beam；Described second combination type reflecting mirror 402 reflects along described described 3rd diffraction light incident for 8th light path L23, make described 3rd diffraction light along described 9th light path L24 and described tenth light path L25 retroeflection to described right-angle reflecting prism 202, and reflex to described polarization splitting prism 201 as described second measuring beam through described right-angle reflecting prism 202 along with described 6th parallel for light path L21 the 11st light path L26.
But the present invention is not limited thereto, such as described retroeflection unit 4 can include the first reflecting prism and the second reflecting prism, described first reflecting prism is arranged on the diffraction optical axis of described first balzed grating, 301, and described second reflecting prism is arranged on the diffraction optical axis of described second balzed grating, 302.
In the exemplary embodiment, it is possible to select dual-frequency laser measurement head as described lasing light emitter 1, and dual-frequency laser measurement head, interference unit 2 and retroeflection unit 4 are all fixing in time measuring, for geo-stationary, only double balzed grating unit 3 moves together along with object to be measured.
In the exemplary embodiment, described interference unit 2 can include polarizing beam splitter and reflector, described polarizing beam splitter is arranged between side and the described lasing light emitter 1 of described double balzed grating unit 3, and it is corresponding with described first grating 301, described reflector is arranged at the side of described double balzed grating unit 3, and corresponding with described polarizing beam splitter and described second grating 302.Wherein, described reflector is relative with polarizing beam splitter, and is positioned on the reflection optical axis of described polarizing beam splitter.
In the exemplary embodiment, described polarizing beam splitter can be polarization splitting prism 201, and described reflector can be right-angle reflecting prism 202.But, described polarizing beam splitter and reflector are not limited thereto, and described polarizing beam splitter can also be polarization spectro sheet, and described reflector can also be plane mirror or pentagonal prism etc..
In the exemplary embodiment, described laser beam is divided into described second polarized light along described second light path L12 described first polarized light transmitted and edge and described the 6th perpendicular for second light path L12 light path L21 transmission by described polarization splitting prism 201；Described right-angle reflecting prism 202 makes along described 6th light path L21 the second polarized light reflection transmitted, and is incident to described second grating 302 along described 7th light path L22.
In the exemplary embodiment, the antiparallel and described 12nd light path L27 of described first light path L11, the antiparallel and described 5th light path L15 of described second light path L12, the described 3rd antiparallel and described 4th light path L14 of light path L13；The described 6th antiparallel and described 11st light path L26 of light path L21, the described 7th antiparallel and described tenth light path L25 of light path L22, the described 8th antiparallel and described 9th light path L24 of light path L23.
In the exemplary embodiment, described rolling angle measurement device also includes: signal processing unit, and it calculates described roll angle by a pre-defined algorithm.Wherein said signal processing unit can be integrated in dual-frequency laser measurement head.
In the exemplary embodiment, described first measuring beam overlaps with described second measuring beam and interferes, retroeflection is received as the measurement signal of difference interference in the receiver hole of dual-frequency laser measurement head, the reference signal provided with described dual-frequency laser measurement head carries out difference, namely obtains the Doppler frequency change difference DELTA f of the first measuring beam that object rolling movement to be measured causes and the second measuring beam.By the difference interference measuring data processing method being length metering benchmark with grating constant, the small relative angular displacement s of double balzed grating can be obtained, can finally try to achieve the value of roll angle α to be measured according to the geometrical relationship α=s/L of relative angular displacement s with relative rolling radius L.
But, the position relationship of above-mentioned each element is not limited thereto, any described light path condition that can realize above-described embodiment belong to protection scope of the present invention.
In the exemplary embodiment, described lasing light emitter 1 can also include built-in opto-electronic receiver, signal processing and the function such as circuit segmentation and PC communication interface.
According to another invention embodiment, the rolling angle measurement device of a kind of double balzed grating difference interference is provided, including: lasing light emitter 1, for providing laser beam and reference signal, wherein said laser beam comprises the first polarized component and the second polarized component that frequency is different and linear polarization is orthogonal, and the frequency of described reference signal is corresponding to the difference on the frequency of described first polarized component and described second polarized component；Polarization splitting prism 201, for described laser beam is divided into the first polarized light and described second polarized light, it is arranged on the optical axis of described lasing light emitter 1；Reflector 202, described second polarized light is incident to described reflector 202, and it is arranged on the reflection optical axis of described polarization splitting prism 201；First balzed grating, 301, described first polarized light normal incidence is to described first balzed grating, 301, and it is arranged in the transmission optical axis of described polarization splitting prism 201；Second balzed grating, 302, normal incidence is to described second balzed grating, 302 after described reflector 202 reflects for described second polarized light, and it is arranged on the reflection optical axis of described reflector 202；First retroeflection subelement 401, it is arranged on the diffraction optical axis of described first balzed grating, 301, for by described first polarized light retroeflection to described first balzed grating, 301 and described polarization splitting prism 201, generating the first measuring beam；Second retroeflection subelement 402, it is arranged on the diffraction optical axis of described second balzed grating, 302, for by described second polarized light retroeflection to described second balzed grating, 302 and described reflector 202, described polarization splitting prism 201, generating the second measuring beam；Wherein said lasing light emitter 1 also includes receiver hole, and it, for receiving described first measuring beam and the measurement signal of described second measuring beam retroeflection coincidence generation, obtains the value of described roll angle according to described measurement signal and described reference signal.
In the exemplary embodiment, wherein said reflector 202 includes any one in right-angle reflecting prism (as shown in Figure 1), plane mirror and pentagonal prism.
In the exemplary embodiment, wherein said first retroeflection subelement 401 and described second retroeflection subelement 402 are any one in reflecting prism, combination type reflecting mirror.
Fig. 5 schematically shows the flow chart of the roll angle measurement method of a kind of double balzed grating difference interference according to example embodiment of the present invention.
As shown in Figure 5, the roll angle measurement method of a kind of rolling angle measurement device based on above-mentioned double balzed grating difference interference is provided, the method includes: in step S510, the wavelength X of the laser beam sent according to described lasing light emitter 1 and the grating constant of described first balzed grating, 301 and the second balzed grating, 302, obtain described first diffraction light and the diffraction angle of described 3rd diffraction light respectively.
During measurement, lasing light emitter 1 such as dual-frequency laser measurement head, interference unit 2 such as polarization splitting prism 201 and right-angle reflecting prism 202, retroeflection unit 4 such as the first combination type reflecting mirror 401 and the second combination type reflecting mirror 402 is all fixing, for geo-stationary, only double balzed grating unit 3 i.e. the first balzed grating, 301 moves together with object to be measured such as rollpiston 5 with the second balzed grating, 302.The laser beam of dual-frequency laser measurement head outgoing polarization splitting prism 201 in interference unit 2 is split up into the first polarized light (P light) and the second polarized light (S light).
In FIG, first time diffraction is there is and+1 grade glitter (as shown in figure 4 above) in laser beam by Z-direction normal incidence (angle of incidence is 0 °) to the first balzed grating, 301, ensure the high-diffraction efficiency (up to 70%-85%) of this grade, its ± 1 order diffraction light meets grating equation:
Dsin θ=± λ (1)
In formula: d is grating constant or pitch.According to light path principle of reversibility, then, its+1 or-1 grade of first diffraction light normal incidence is returned by reflected parallel after the first combination type reflecting mirror 401, incident with+1 grade or-1 order diffraction angle θ from the opposite side of the first balzed grating, 301, there is diffraction in second time, this time+1 grade of diffraction or-1 grade of second diffraction light are by parallel but in opposite direction for the incident illumination (the first polarized light of described first balzed grating, 301 of incidence) during with first time diffraction, and similarly glitter guarantee high-diffraction efficiency in this order of diffraction, it is again passed through described polarization splitting prism 201, generate the first measuring beam.Its+1 or-1 grade of second diffraction light is orthogonal to the first grating face outgoing of the first balzed grating, 301, also meets formula (1).
nullAfter second polarized light is reflected by polarization splitting prism 201，Then by after right-angle reflecting prism 202 (also feasible planes reflecting mirror or pentagonal prism replace) reflection，Third time diffraction is there is in normal incidence after the second balzed grating, 302，Its+1 grade or-1 grade of the 3rd diffraction light glitter，And normal incidence is returned by reflected parallel after the second combination type reflecting mirror 402，Incident with+1 grade or-1 order diffraction angle θ from the opposite side of the second balzed grating, 302，There is the 4th diffraction，This time+1 or-1 grade of the 4th diffraction light of diffraction glitters，And by parallel but in opposite direction with the incident illumination of third time diffraction (i.e. the second polarized light of incident described second balzed grating, 302)，Reflected by the right-angle reflecting prism 202 (also feasible planes reflecting mirror or pentagonal prism replace) in interference unit 2 and polarization splitting prism 201 successively，Generate the second measuring beam.
In step S520, when the V motion at a predetermined velocity because of object rolling to be measured of described first balzed grating, 301 and described second balzed grating, 302, obtain described first measuring beam and the frequency shift amount of described second measuring beam respectively according to described predetermined speed V, the wavelength X of described laser beam and described diffraction angle.
When the first balzed grating, 301 carries out small movements because of object to be measured and rollpiston rolling (roll angle is α), in little scope, this motion can be approximately X-direction linear movement (setting grid stroke speed as V).According to doppler principle, ± 1 order diffraction light will produce frequency change and frequency displacement, and first time is identical with+1 or-1 grade of first diffraction light of second time diffraction and the second diffraction light frequency shift amount, and twice frequency displacement has synergistic effect.Therefore, the frequency shift amount of the first measuring beam can be expressed as:
In formula, Δ f1It is expressed as the frequency shift amount of the first measuring beam；λ is the wavelength of laser beam, can be taken as 633nm according to He-Ne laser；θ be first time diffraction ± 1 order diffraction angle.
Can be obtained by formula (1) and (2):
In like manner, second measuring beam also will produce Doppler frequency shift, but owing to the first balzed grating, 301 and the second balzed grating, 302 are positioned at the opposite sides limit formation difference structure at rolling center, the frequency displacement making the first measuring beam and the second measuring beam is in opposite direction, then the frequency shift amount Δ f of the second measuring beam2Can be expressed as:
In step S530, obtain the described measurement signal side-play amount relative to described reference signal according to the frequency shift amount of described first measuring beam and described second measuring beam.
According to difference interference principle, two light beams i.e. the first measuring beam and the second measuring beam that reference arm is corresponding with measuring arm interfere, and described measurement signal can be tried to achieve by formula (3) and (4) difference relative to the offset Δ f of reference signal:
In step S540, obtain the relative angular displacement of described double balzed grating relative to the grating constant of the side-play amount of described reference signal and described first balzed grating, 301 and the second balzed grating, 302 according to described measurement signal.
If the relative angular displacement of the first balzed grating, 301 and the second balzed grating, 302 is s, respectively by formula (5) both sides time t is quadratured and can obtain:
In formula: T is count time period,It is generally electronic circuit counting to realize, shows as number and the pulse number of frequency in count cycle T.
According to above-mentioned formula (6) it can be seen that during displacement measurement each original pulse equivalent be d/4, be four times of optical fines, be 2 times of conventional laser interferometer.Obviously, original pulse equivalent d/4 and resolution are also difficult to meet high-acruracy survey demand, it is necessary to improve resolution further by means such as higher electronic circuit, digital subdividing.At present, it is that after λ/2 and 512 times or electronic fine-grained more greatly, the displacement measurement resolution of conventional commercial laser interferometer is up to 1nm or less through 2 times of optical fines and original pulse equivalent.Processing circuit and electronic fine-grained multiple based on same, displacement measurement resolution of the present invention is (d/4)/(λ/2)=d/ (2 λ) nanometer.
In step S550, calculate, according to described relative angular displacement rolling radius L relative to described double balzed grating, the value obtaining described roll angle.
In the exemplary embodiment, according to geometrical relationship α=s/L, the formula of the value wherein calculating described roll angle is:
Wherein, α is roll angle, T is count time period, s is described first balzed grating, 301 and the relative angular displacement of described second balzed grating, 302, L is relative rolling radius, d is described first balzed grating, and the grating constant of described second balzed grating, and Δ f is the difference on the frequency of described measurement signal and described reference signal.
In the exemplary embodiment, described relative rolling radius L is the level interval between described second light path L12 and described 7th light path L22, that is the level interval of described polarization splitting prism 201 and described right-angle reflecting prism 202.The reference signal provided according to described lasing light emitter 1 and the measurement signal received calculate and obtain roll angle α, and wherein the level interval of grating constant and described relative rolling radius L and described polarization splitting prism 201 and described right-angle reflecting prism 202 presets before measuring.
According to above analysis, it is assumed that displacement measurement resolution s_res of the present invention is d/ (2 λ) nm, L unit is m, then angular measurement resolution α _ res is represented by:
As in figure 2 it is shown, can be obtained by triangle geometrical relationship:
Dsin θ=H (9)
In formula, D is that object to be measured and rollpiston 5 are in Z-direction linear range of movement；H is the length of the first public rib 4013 of reflecting prism 401 and 402 and the second public rib 4023.
Can be obtained by formula (1) and (9):
Therefore, formula (10) is substituted into formula (8) can obtain:
Two important conclusions can be obtained by formula (11): first, increase the relative rolling radius L of the first and second measuring beams, angular measurement resolution can be improved；Second, namely increase ± 1 order diffraction angle θ by reducing grating constant, it is possible to improve angular measurement resolution.But, for wavelength X for determining value (633nm), this will cause that D/H value also will reduce, the increase of the length H of this reduction that certainly will cause Z-direction linear range of movement D or combination type reflecting mirror.For measuring, D is expected to be the bigger the better, it is clear that this will make angular resolution decline；It is unsuitable excessive that H is generally subjected to the factor restrictions such as existing manufacture level.Therefore, although angular measurement resolution is determined by grating constant, but it is more determined by the length H of Z-direction range of movement D and combination type reflecting mirror.Therefore, the combination type reflecting mirror group (first combination type reflecting mirror 401 and the second combination type reflecting mirror 402) adopted in the present invention, there is the advantages such as cost processing low, easy, length H be big.
Such as, Z-direction range of movement D for 1000mm, if the relative rolling radius L value of the first measuring beam and the second measuring beam is 0.5m, first combination type reflecting mirror 401 and the first public rib of the second combination type reflecting mirror 402 and the length H value of the second public rib are 500mm, now corresponding grating constant and ± 1 diffraction angle respectively 1.266 μm and 30 °, then angular measurement theoretical resolution is that 2nrad (is about 0.0004 ").In precision, if the certainty of measurement of single pattern displacement is 0.1 μm, then the certainty of measurement of double-raster displacement s is 0.05 μm, is up to 0.1 μ rad (0.02 ") according to the certainty of measurement of the roll angle of the method for the known employing present invention of formula (7).
In sum, technical scheme compared with prior art has clear advantage and beneficial effect.Laser beam diffraction generation that lasing light emitter is launched by the present invention by adopting double balzed grating are glittered at predetermined level spectrum, the diffraction efficiency of diffraction light can be improved greatly, diffraction efficiency is up to 70%～85%, reduce the difficulty of optical path adjusting, ensure that high s/n ratio, there is high-resolution and high-precision advantage.
Meanwhile, required for this rolling angle measurement device and method, optics is few, simple in construction, reliable and stable, it only comprises dual-frequency laser measurement head, interference unit, double balzed grating unit and retroeflection unit four part, it is easy to operate, and signal to noise ratio is high and less costly, has better application prospect.The present invention is especially suitable for the little roll angle high-acruracy survey to linear movement location, such as precision engineering fields such as a new generation's Synchrotron Radiation, Digit Control Machine Tool, three coordinate measuring machine and litho machines.
Above describe principles of the invention and preferred embodiment, for two-frequency laser interferometer in elaboration, but the principle of the invention and device are equally applicable for single frequency laser interferometer system, only dual-frequency laser measurement head and corresponding function are changed into single-frequency laser and measures head and corresponding function.Above-mentioned preferred embodiment is considered as illustrative and not restrictive.
Those skilled in the art, after considering description and putting into practice invention disclosed herein, will readily occur to other embodiment of the present invention.The application is intended to any modification of the present invention, purposes or adaptations, and these modification, purposes or adaptations are followed the general principle of the present invention and include the undocumented known general knowledge in the art of the present invention or conventional techniques means.Description and embodiments is considered only as exemplary, and the true scope of the present invention and spirit are pointed out by claim below.
More than it is particularly shown and described the illustrative embodiments of the present invention.It should be appreciated that the invention is not restricted to detailed construction described herein, set-up mode or realize method；On the contrary, it is intended to various amendments and equivalence in containing the spirit and scope being included in claims are arranged.
Claims (10)
1. the rolling angle measurement device of a double balzed grating difference interference, it is characterised in that including:
Lasing light emitter, for providing laser beam and reference signal, wherein said laser beam comprises the first polarized component and the second polarized component that frequency is different and linear polarization is orthogonal, and the frequency of described reference signal is corresponding to the difference on the frequency of described first polarized component and described second polarized component；
Double balzed grating unit, it includes the first balzed grating, and the second balzed grating, and wherein said first balzed grating, can move with object to be measured with described second balzed grating,；
Interference unit, for being divided into the first polarized light and described second polarized light by described laser beam, between its side being arranged at described double balzed grating unit and described lasing light emitter；And
Retroeflection unit, it is arranged at the opposite side of described double balzed grating unit；
Wherein, described first polarized light is incident to described first balzed grating, there is the first diffraction light of an angle of diffraction through described first balzed grating, outgoing, and glitter at its default level spectrum, described first diffraction light is incident to described retroeflection unit, reflexing to described first balzed grating, through described retroeflection unit is antiparallel, through described first balzed grating, outgoing the second diffraction light, this second diffraction light retroeflection to described interference unit generates the first measuring beam；Described second polarized light is incident to described second balzed grating, along the direction paralleled with described first polarized light, there is the 3rd diffraction light of an angle of diffraction through described second balzed grating, outgoing, and glitter at its default level spectrum, described 3rd diffraction light is incident to described retroeflection unit, reflex to described second balzed grating, through described retroeflection unit is antiparallel, through described second balzed grating, outgoing the 4th diffraction light, the 4th diffraction light retroeflection to described interference unit generates the second measuring beam；Described first measuring beam overlaps with described second measuring beam and interferes generation measurement signal, and obtains the roll angle of described object to be measured according to described measurement signal and described reference signal.
2. rolling angle measurement device according to claim 1, it is characterized in that, wherein said first balzed grating, includes the first cutting face and the first grating face, described first polarized light is perpendicular to described first grating face and is incident to described first balzed grating, and described second diffraction light is perpendicular to described first grating face from described first balzed grating, outgoing；Described second balzed grating, includes the second cutting face and the second grating face, and described second polarized light is perpendicular to described second grating face and is incident to described second balzed grating, and described 4th diffraction light is perpendicular to described second grating face from described second balzed grating, outgoing.
3. rolling angle measurement device according to claim 1, it is characterised in that wherein said first balzed grating, and described second balzed grating, are arranged at the limit, two opposite sides at the rolling center of described object to be measured or same side.
4. rolling angle measurement device according to claim 1, it is characterized in that, wherein said retroeflection unit includes the first combination type reflecting mirror and the second combination type reflecting mirror, described first combination type reflecting mirror is arranged on the diffraction optical axis of described first balzed grating, and described second combination type reflecting mirror is arranged on the diffraction optical axis of described second balzed grating,.
5. rolling angle measurement device according to claim 1, it is characterized in that, wherein said retroeflection unit includes the first reflecting prism and the second reflecting prism, described first reflecting prism is arranged on the diffraction optical axis of described first balzed grating, and described second reflecting prism is arranged on the diffraction optical axis of described second balzed grating,.
6. the rolling angle measurement device of a double balzed grating difference interference, it is characterised in that including:
Lasing light emitter, for providing laser beam and reference signal, wherein said laser beam comprises the first polarized component and the second polarized component that frequency is different and linear polarization is orthogonal, and the frequency of described reference signal is corresponding to the difference on the frequency of described first polarized component and described second polarized component；
Polarization splitting prism, for described laser beam is divided into the first polarized light and described second polarized light, it is arranged on the optical axis of described lasing light emitter；
Reflector, described second polarized light is incident to described reflector, and it is arranged on the reflection optical axis of described polarization splitting prism；
First balzed grating, described first polarized light normal incidence is to described first balzed grating, and it is arranged in the transmission optical axis of described polarization splitting prism；
Second balzed grating, normal incidence is to described second balzed grating, after described reflector reflects for described second polarized light, and it is arranged on the reflection optical axis of described reflector；
First retroeflection subelement, it is arranged on the diffraction optical axis of described first balzed grating, for by described first polarized light retroeflection to described first balzed grating, and described polarization splitting prism, generating the first measuring beam；
Second retroeflection subelement, it is arranged on the diffraction optical axis of described second balzed grating, for by described second polarized light retroeflection to described second balzed grating, and described reflector, described polarization splitting prism, generating the second measuring beam；Wherein
Described lasing light emitter also includes receiver hole, and it, for receiving described first measuring beam and the measurement signal of described second measuring beam retroeflection coincidence generation, obtains the value of described roll angle according to described measurement signal and described reference signal.
7. rolling angle measurement device according to claim 6, it is characterised in that wherein said reflector includes any one in right-angle reflecting prism, plane mirror and pentagonal prism.
8. rolling angle measurement device according to claim 6, it is characterised in that wherein said first retroeflection subelement and described second retroeflection subelement are any one in reflecting prism, combination type reflecting mirror.
9. the roll angle measurement method based on the rolling angle measurement device of double balzed grating difference interference described in the claims 1, it is characterised in that including:
The wavelength of the laser beam sent according to described lasing light emitter and the grating constant of described first balzed grating, and the second balzed grating, obtain described first diffraction light and the angle of diffraction of described 3rd diffraction light respectively；
When described first balzed grating, and described second balzed grating, move at a predetermined velocity because of object rolling to be measured, obtain described first measuring beam and the frequency shift amount of described second measuring beam respectively according to described predetermined speed, the wavelength of described laser beam and the described angle of diffraction；
Frequency shift amount according to described first measuring beam and described second measuring beam obtains the described measurement signal side-play amount relative to described reference signal；
Obtain the relative angular displacement of described double balzed grating relative to the grating constant of the side-play amount of described reference signal and described first balzed grating, and the second balzed grating, according to described measurement signal；
The value of described roll angle is obtained according to described relative angular displacement rolling radius calculation relative to described double balzed grating.
10. roll angle measurement method according to claim 9, it is characterised in that the formula of the value wherein calculating described roll angle is:
Wherein, α is roll angle, T is count time period, s is described first balzed grating, and the relative angular displacement of described second balzed grating, L is relative rolling radius, d is described first balzed grating, and the grating constant of described second balzed grating, and Δ f is the difference on the frequency of described measurement signal and described reference signal.
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| CN108775878A (en) * | 2018-05-31 | 2018-11-09 | 中国科学院高能物理研究所 | Grating Heterodyne Interferometer System Based and its roll angle measurement method |
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Application publication date: 20160727 |