CN114353671B - Dual-wavelength diffraction interference system and method for realizing synchronous measurement of displacement and angle - Google Patents
Dual-wavelength diffraction interference system and method for realizing synchronous measurement of displacement and angle Download PDFInfo
- Publication number
- CN114353671B CN114353671B CN202210044773.4A CN202210044773A CN114353671B CN 114353671 B CN114353671 B CN 114353671B CN 202210044773 A CN202210044773 A CN 202210044773A CN 114353671 B CN114353671 B CN 114353671B
- Authority
- CN
- China
- Prior art keywords
- light
- optical fiber
- wavelength
- displacement
- fiber coupler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The invention discloses a dual-wavelength diffraction interference system and a method for realizing synchronous measurement of displacement and angle, belonging to the field of optical measurement, wherein the system realizes the approximate common-path integration of double interferometers in a mode of combining an optical fiber path and a space path, replaces most space optical elements with an optical fiber device, realizes the practicability and integration of the laser interferometer, effectively reduces the influence of environmental factors on the interferometer, and improves the stability; the diffraction grating is used as a light splitting element, so that the separation of a dual-wavelength mixed light beam and the light splitting of a single-wavelength light beam are realized, the displacement of two positions can be synchronously measured, and the deflection angle of a measured target can be directly calculated. Therefore, the system has high integration level, good portability and strong anti-interference capability, and can be used for synchronously measuring high-precision displacement and angle under a complex environment.
Description
Technical Field
The invention belongs to the field of optical precision measurement, and relates to a dual-wavelength diffraction interference system and method for synchronously measuring displacement and angle.
Background
With the rapid development of high and new technologies such as ultra-precision machining, semiconductor chip manufacturing, biomedical engineering and the like, higher requirements are put forward on displacement and angle measurement technologies and instruments, and a large measurement range and nanoscale measurement accuracy are required. For example: the motion mechanisms of the ultra-precision machine tool and the photoetching machine are required to reach the nanometer positioning precision within the range of hundreds of millimeters; in the aspect of biomedicine, a multi-degree-of-freedom nano positioning control technology is required for micro-nano operation of subcells of cells. The monitoring and calibration of the piezoelectric driving displacement workbench, the electromagnetic driving displacement workbench, the motor driving linear displacement workbench and the like need to measure the linear displacement and also need to give a deflection angle. The existing method generally adopts a plurality of sensors to measure simultaneously or measure displacement and deflection angles in a time-sharing manner, so that the problem of simultaneously measuring the displacement and the angle at the same time has important application value.
The laser interferometry has the characteristics of high precision and large range, and is a main means for realizing the measurement of the nanometer displacement. The dual-interferometer structure can be used for simultaneously obtaining the displacement of two points on the surface of the measured object, and further calculating the deflection angle of the measured object. However, due to the extremely high measurement resolution and sensitivity of the laser interferometry, the measurement result is greatly affected by the environmental interference such as micro vibration, noise, air flow, temperature and the like in the measurement process. In the aspect of anti-interference, a passive anti-interference technology is mostly adopted, and the method is complex and the process is complicated through various isolation measures, some special algorithms, synchronous high-speed acquisition and the like. How to synchronously carry out large-optical-path displacement and large-angle offset measurement, how to reduce and eliminate environmental interference errors and develop a stable laser interferometry system, and the method becomes a technical problem to be solved urgently in the field of current laser interferometry.
Therefore, the development of a system and a method which have the advantages of simple structure, convenient operation, accurate measurement result, strong environmental interference resistance and capability of simultaneously realizing the synchronous measurement of the spatial displacement and the angle has important significance for the development of the field of laser interferometry.
Disclosure of Invention
The invention aims to solve the problems in the prior art, provides a dual-wavelength laser interferometry system and method with optical fiber integration, stable work, simple and convenient measurement and strong anti-interference capability, and solves the problems that the spatial displacement and angle synchronous measurement cannot be realized simultaneously and the environmental interference resistance is poor in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
a dual-wavelength diffraction interference system for realizing synchronous measurement of displacement and angle comprises a first light source, a second light source, a first optical fiber coupler, a second optical fiber coupler, a third optical fiber coupler, a collimator, an isolator, an optical fiber Bragg grating, a first photoelectric detector and a second photoelectric detector which are connected by optical fibers, a signal acquisition and processing circuit, and a blazed grating, a reference reflecting mirror, a collimating lens and a measuring mirror which are arranged in space;
the first light source emits light with a wavelength of λ1The first light wave and the second light source emit light with a wavelength of lambda2The second light waves respectively enter from the input end of the first optical fiber coupler, pass through the second optical fiber coupler and the collimator in sequence after being output, reach the blazed grating and are diffracted on the blazed grating, and zero-order diffracted light is projected onto the reference reflector and returns to the blazed grating along the original path after being reflected by the reference reflector; wavelength of λ1Of the first order diffracted light and having a wavelength of lambda2The second first-order diffraction light is scattered and emitted to a collimating lens, two first-order diffraction light beams are vertically projected to a measuring mirror through the collimating lens at intervals, the measuring mirror reflects the two first-order diffraction light beams and returns to the blazed grating along the original path, and the first-order diffraction light beams and zero-order diffraction light beams reflected by a reference reflector interfere at the blazed grating to form the second-order diffraction light beam with the wavelength of lambda1First interference light of wavelength lambda2The second interference light of (1); the first interference light and the second interference light sequentially pass through the collimator, the second optical fiber coupler, the isolator and the third optical fiber coupler and enter the optical fiber Bragg grating, wherein the first interference light reaches the first photoelectric detector through the optical fiber Bragg grating, and the second interference light is reflected by the optical fiber Bragg grating and then reversely passes through the third optical fiber coupler and enters the second photoelectric detector.
The invention further improves the following steps:
and an isolator is connected between the second optical fiber coupler and the third optical fiber coupler and is used for blocking the second interference light from flowing back to the second optical fiber coupler to influence the interference signal.
The first photoelectric detector and the second photoelectric detector are respectively connected with the signal acquisition and processing circuit and the computer.
A dual-wavelength diffraction interference method for realizing synchronous measurement of displacement and angle comprises the following steps:
the first light source emits light with a wavelength of λ1The first light wave is divided into first zero-order diffraction light and first one-order diffraction light after reaching a blazed grating through a first optical fiber coupler, a second optical fiber coupler and a collimator, the first zero-order diffraction light is incident to a reference reflector and then reflected to return along an original path, the first one-order diffraction light is incident to a measuring mirror through a collimating lens and then reflected to return along the original path, two returning light beams meet on the blazed grating and generate first interference light, and the first interference light is received by the collimator and then is received by a first photoelectric detector after sequentially passing through the second optical fiber coupler, an isolator, a third optical fiber coupler and an optical fiber Bragg grating;
the first photoelectric detector detects the light intensity change of the first interference light, the light intensity change is converted into an electric pulse signal through the signal acquisition and processing circuit, and the displacement of the measuring mirror along the incident direction of the first-order diffracted light is calculated through an electric pulse counting and phase detection technology;
the second light source emits light with a wavelength of λ2The second light wave is divided into second zero-order diffraction light and second first-order diffraction light after reaching the blazed grating through the first optical fiber coupler, the second optical fiber coupler and the collimator, the second zero-order diffraction light is incident to the reference reflector and then reflected to return along the original path, the second first-order diffraction light is incident to the measuring mirror through the collimating lens and then reflected to return along the original path, the two returning light beams meet on the blazed grating and generate second interference light, the second interference light is received by the collimator, then sequentially passes through the second optical fiber coupler, the isolator and the third optical fiber coupler to reach the optical fiber Bragg grating, is reflected by the optical fiber Bragg grating and then reversely passes through the third optical fiber coupler to be received by the second photoelectric detector;
the second photoelectric detector detects the light intensity change of the second interference light, the light intensity change is converted into an electric pulse signal through the signal acquisition and processing circuit, and the displacement of the measuring mirror along the incident direction of the second-order diffracted light is calculated through an electric pulse counting and phase detection technology;
and calculating the relative deflection angle of the measuring mirror according to the displacement of the measuring mirror along the incident direction of the first-order diffracted light, the displacement of the measuring mirror along the incident direction of the second-order diffracted light and the spacing distance of the two first-order diffracted lights.
The method is further improved in that:
the displacement calculation method of the measuring mirror comprises the following steps:
wherein, Δ z1For measuring the displacement of the mirror in the incident direction of the first diffracted light, Δ z2For measuring the displacement of the mirror in the incident direction of the second-order diffracted light, λ1Is the wavelength of the first light source, λ2Is the wavelength of the second light source, N1Receiving the calculated total number of electrical pulses, N, for the first photodetector2The calculated total number of electrical pulses is received for the second photodetector.
The calculation method of the relative deflection angle of the measuring mirror comprises the following steps:
wherein alpha is the relative deflection angle of the measuring mirror, and delta z1For measuring the displacement of the mirror in the incident direction of the first diffracted light, Δ z2H is the distance between two first-order diffracted lights for measuring the displacement of the mirror along the incident direction of the second first-order diffracted light.
Compared with the prior art, the invention has the following beneficial effects:
the invention adopts a double-wavelength approximate common-path laser interference structure, replaces most space optical elements with optical fiber devices, realizes the practicability and integration of the laser interferometer, effectively reduces the influence of environmental factors on the interferometer, improves the stability, and can be used for synchronous measurement of high-precision displacement and deflection in a complex environment. In addition, the blazed grating is arranged, so that the zero-order diffraction light and the first-order diffraction light of interference simultaneously meet the requirements of time coherence and spatial coherence, and displacement and offset angles of the measuring mirror in different directions can be measured along with the movement and offset of the blazed grating, so that the measurement of the spatial offset degree of the measuring mirror is realized. The method has the advantages of simple principle, convenient operation, accurate and stable measurement result and easy realization.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
FIG. 1 is a diagram of a two-wavelength diffractive interference system of the present invention.
FIG. 2 is a diagram of the steps of the two-wavelength diffraction interference method of the present invention.
FIG. 3 is a schematic view of a displacement angle measuring method according to the present invention.
Wherein: 1-a first light source, 2-a second light source, 3-a first optical fiber coupler, 4-a second optical fiber coupler, 5-a third optical fiber coupler, 6-a collimator, 7-an isolator, 8-an optical fiber Bragg grating, 9-a first photoelectric detector, 10-a second photoelectric detector, 11-a signal acquisition and processing circuit, 12-a blazed grating, 13-a reference reflector, 14-a collimating lens and 15-a measuring mirror.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present invention, it should be noted that if the terms "upper", "lower", "horizontal", "inner", etc. are used for indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings or the orientation or positional relationship which is usually arranged when the product of the present invention is used, the description is merely for convenience and simplicity, and the indication or suggestion that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, cannot be understood as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
Furthermore, the term "horizontal", if present, does not mean that the component is required to be absolutely horizontal, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the embodiments of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
The invention is described in further detail below with reference to the accompanying drawings:
referring to fig. 1, the inventionThe invention provides a dual-wavelength diffraction interference system for synchronously measuring displacement and angle, which comprises an optical fiber light path and a space light path, wherein a light source, an optical fiber coupler, a collimator, an isolator and an optical fiber Bragg grating are integrated in the optical fiber light path in an optical fiber connection mode, so that the functions of light beam transmission, interference signal collection and detection are realized; the space light path part is used as a measuring probe, is integrally packaged and then is arranged at a certain distance of a measured surface, and is used for splitting light waves with two wavelengths and generating an interference signal, and vertically projecting first-order diffraction light of the light waves with the two wavelengths to a measuring mirror at a certain distance. The system adopts a Michelson interference structure, and the wavelength emitted by a first light source 1 is lambda1And the wavelength emitted by the second light source 2 is lambda2The light waves respectively enter from the left input end of the first optical fiber coupler 3, are output as mixed light at the right output end, sequentially pass through the second optical fiber coupler 4 and the collimator 6 from left to right, enter the surface of the blazed grating 12, and are diffracted at the incident point; the diffracted zero-order diffraction light vertically enters the reference reflector 13, is reflected by the reference reflector 13 and returns to the blazed grating 12 along the original path; the diffracted first-order diffracted light is two beams of light separated in angle (the dispersion angle is determined by the wavelength of the incident light, the incident angle and the line distance parameter of the blazed grating), and the wavelength is lambda1First order diffracted light of wavelength lambda2Two first-order diffracted lights are projected to a measuring mirror 15 at a certain distance after passing through a collimating lens 14, are reflected on the surface of the measuring mirror 15 and then return to the blazed grating 12 along the original path, and interfere with a zero-order diffracted light reflected to the blazed grating 12 by a reference reflector 13 to form a mixed interference light (which contains a wavelength λ) carrying displacement information of two positions of the measuring mirror 151Of the first interference light and the wavelength of λ2Second interference light of) from right to left, returns to the second optical fiber coupler 4 through the collimator 6, and enters the fiber bragg grating 8 through the isolator 7 and the third optical fiber coupler 5; the first interference light passes through a Bragg grating 8, and the light intensity change is recorded by a first photoelectric detector 9; the second interference light is reflected by the fiber Bragg grating 8, propagates through the third fiber coupler 5 from left to right in the reverse direction, and is recorded by the second photodetector 10A strong change; then, the signal is transmitted to a computer after passing through a signal acquisition and processing circuit 11, and a stable measurement result is obtained through calculation; wherein the isolator 7 is used for blocking the second interference light from flowing back into the second fiber coupler 4 to generate adverse effect on the interference signal.
Referring to fig. 2, the measurement method using the above two-wavelength diffraction interference system specifically includes:
1) The first light source 1 emits light with a wavelength λ1The light wave is divided into zero-order diffraction light and first-order diffraction light after sequentially passing through the first optical fiber coupler 3, the second optical fiber coupler 4 and the collimator 6 to reach the blazed grating 12, the zero-order diffraction light is incident to the reference reflector 13 and then returns along the original path after being reflected, the first-order diffraction light is incident to the measuring mirror 15 through the collimating lens 14 and then returns along the original path after being reflected, the two beams of return light meet and interfere on the blazed grating 12, and the interference light is received by the collimator 6, then passes through the second optical fiber coupler 4, the isolator 7, the third optical fiber coupler 5 and the optical fiber Bragg grating 8 in sequence and then is received by the first photodetector 9;
the first photoelectric detector 9 detects the light intensity change of the first interference light and converts the light intensity change into an electric pulse signal, and the measuring mirror 15 is calculated to be lambda along the wavelength by electric pulse counting and phase detection technology1The displacement amount Δ z in the incident direction of the first order diffracted light of (2)1The calculation formula is as follows:
wherein λ is1Is the wavelength of the first light source 1, N1The calculated total number of electrical pulses is received for the first photo detector 9.
2) The second light source 2 emits light having a wavelength λ2The light is divided into zero-order diffraction light and first-order diffraction light after reaching the blazed grating 12 through the first optical fiber coupler 3, the second optical fiber coupler 4 and the collimator 6, the zero-order diffraction light is incident to the reference reflector 13 and then reflected to return along the original path, the first-order diffraction light is incident to the measuring mirror 15 through the collimator lens 14 and then reflected to return along the original path, the two return light beams meet and interfere on the blazed grating 12, and the interference occurs, so that the interference is realizedAfter being received by the collimator 6, the interference light sequentially passes through the second optical fiber coupler 4, the isolator 7 and the third optical fiber coupler 5 to reach the fiber Bragg grating 8, is reflected by the fiber Bragg grating 8 and then reversely passes through the third optical fiber coupler 5 to be received by the second photoelectric detector 10;
the second photoelectric detector 10 detects the light intensity change of the second interference light and converts the light intensity change into an electric pulse signal, and the electric pulse counting and phase detection technology is adopted to calculate the wavelength lambda of the measuring mirror 15 along the wavelength2The displacement amount Δ z in the incident direction of the first-order diffracted light2The calculation formula is as follows:
wherein λ is2Is the wavelength, N, of the second light source 22The calculated total number of electrical pulses is received for the second photodetector 10.
3) Referring to fig. 3, the first-order diffracted lights of two light waves with different wavelengths, due to different diffraction angles, can be projected on two different positions of the measuring mirror 15 after passing through the collimating lens 6, and the relative offset angle of the measuring mirror 15 can be calculated by measuring the displacement of the two positions and according to the known distance between the two first-order diffracted lights, and the calculation formula is as follows:
where α denotes the relative deflection angle of the measuring mirror 15, Δ z1Denotes the measuring mirror 15 along the wavelength λ1Amount of displacement in the incident direction of the first-order diffracted light, Δ z2Denotes the measuring mirror 15 along the wavelength λ2H represents the distance between the two first-order diffracted lights.
The method is also characterized in that the step 1) and the step 2) are synchronously completed at the same time, so that the calculation accuracy of the deflection angle is ensured.
The invention is also characterized in that the integrated optical fiber optical path and common optical path dual-wavelength laser interferometry system is designed. The optical fiber device is adopted to replace a part of space optical elements, so that the practicability and integration of the laser interferometer are realized, the influence of environmental factors on the interferometer is effectively reduced, and the stability is improved; meanwhile, the main part of the laser interference measurement system is divided into two approximate common light paths, the two interference light paths are separated only before the light source is coupled, during the measurement of the space light path and the detection of interference signals, and the rest are common light paths, so that errors caused by external interference (such as mechanical vibration, temperature fluctuation, environmental noise, electromagnetic interference and the like) can be eliminated by a difference method, the measurement accuracy is further improved, the synchronous accurate measurement of displacement amounts of different spatial positions is realized, and the deflection angle of a measured target is further calculated.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A dual-wavelength diffraction interference system for realizing synchronous measurement of displacement and angle is characterized by comprising a first light source (1), a second light source (2), a first optical fiber coupler (3), a second optical fiber coupler (4), a third optical fiber coupler (5), a collimator (6), an isolator (7), an optical fiber Bragg grating (8), a first photoelectric detector (9) and a second photoelectric detector (10) which are connected by optical fibers, a signal acquisition and processing circuit (11), a blazed grating (12), a reference reflector (13), a collimating lens (14) and a measuring mirror (15) which are spatially arranged;
the first light source (1) emits light with a wavelength of lambda1The first light wave and the second light source (2) emit light with a wavelength of lambda2The second light waves respectively enter from the input end of the first optical fiber coupler (3), pass through the second optical fiber coupler (4) and the collimator (6) in sequence after being output, reach the blazed grating (12), are diffracted on the blazed grating (12), and the zero-order diffraction light is projected onto a reference reflector (13) and is reflected by the reference reflector (13) and then returns to the blazed grating (12) along the original path; wavelength of λ1First order derivative ofThe incident light and the wavelength are lambda2The second first-order diffraction light is scattered and emitted to a collimating lens (14), two first-order diffraction light beams are vertically projected onto a measuring mirror (15) through the collimating lens (14) at intervals, the measuring mirror (15) reflects the two first-order diffraction light beams, the two first-order diffraction light beams return to a blazed grating (12) along the original path, and the zero-order diffraction light beams interfere with zero-order diffraction light beams reflected by a reference reflecting mirror (13) at the blazed grating (12) to form the second-order diffraction light beam with the wavelength of lambda1First interference light of wavelength lambda2The second interference light of (1); the first interference light and the second interference light sequentially enter the fiber Bragg grating (8) through the collimator (6), the second fiber coupler (4), the isolator (7) and the third fiber coupler (5), wherein the first interference light reaches the first photoelectric detector (9) through the fiber Bragg grating (8), and the second interference light is reflected by the fiber Bragg grating (8) and then reversely passes through the third fiber coupler (5) and enters the second photoelectric detector (10).
2. The dual-wavelength diffraction interference system for realizing synchronous displacement and angle measurement according to claim 1, wherein an isolator (7) is connected between the second fiber coupler (4) and the third fiber coupler (5) for blocking the second interference light from flowing back into the second fiber coupler (4) to affect the interference signal.
3. The dual-wavelength diffraction interference system for realizing synchronous displacement and angle measurement according to claim 1, wherein the first photodetector (9) and the second photodetector (10) are respectively connected with a signal acquisition and processing circuit (11), and the signal acquisition and processing circuit (11) is connected with a computer.
4. A two-wavelength diffractive interferometry method for performing simultaneous displacement and angle measurements using the two-wavelength diffractive interferometry system of any of claims 1-3, comprising the steps of:
the first light source (1) emits light with a wavelength of lambda1The first light wave reaches the blazed grating (12) through the first optical fiber coupler (3), the second optical fiber coupler (4) and the collimator (6) and then is divided into first zero-order diffraction light and first one-order diffraction lightThe first zero-order diffraction light enters a reference reflector (13), then returns along the original path after being reflected, the first primary diffraction light enters a measuring mirror (15) through a collimating lens (14), then returns along the original path after being reflected, the two returning light beams meet on a blazed grating (12) and generate first interference light, and the first interference light is received by a collimator (6), then sequentially passes through a second optical fiber coupler (4), an isolator (7), a third optical fiber coupler (5) and an optical fiber Bragg grating (8) and then is received by a first photodetector (9);
the first photoelectric detector (9) detects the light intensity change of the first interference light, the light intensity change is converted into an electric pulse signal through the signal acquisition and processing circuit (11), and the displacement of the measuring mirror (15) along the incident direction of the first-order diffracted light is calculated through an electric pulse counting and phase detection technology;
the wavelength emitted by the second light source (2) is lambda2The second light wave is divided into second zero-order diffraction light and second first-order diffraction light after reaching a blazed grating (12) through a first optical fiber coupler (3), a second optical fiber coupler (4) and a collimator (6), the second zero-order diffraction light is incident to a reference reflector (13), the second zero-order diffraction light returns along an original path after being reflected, the second first-order diffraction light is incident to a measuring mirror (15) through a collimating lens (14), the second first-order diffraction light returns along the original path after being reflected, the two returning light beams meet on the blazed grating (12) and generate second interference light, the second interference light is received by the collimator (6), then sequentially passes through the second optical fiber coupler (4), an isolator (7) and a third optical fiber coupler (5) to reach an optical fiber Bragg grating (8), and is received by a second photoelectric detector (10) after being reflected by the optical fiber Bragg grating (8) and reversely passing through the third optical fiber coupler (5);
the second photoelectric detector (10) detects the light intensity change of the second interference light, the second interference light is converted into an electric pulse signal through the signal acquisition and processing circuit (11), and the displacement of the measuring mirror (15) along the incident direction of the second-order diffracted light is calculated through an electric pulse counting and phase detection technology;
and calculating the relative deflection angle of the measuring mirror (15) according to the displacement of the measuring mirror (15) along the incident direction of the first-order diffracted light, the displacement along the incident direction of the second-order diffracted light and the spacing distance of the two first-order diffracted lights.
5. The dual wavelength diffraction interference method for realizing simultaneous measurement of displacement and angle according to claim 4, wherein the displacement calculation method of the measuring mirror (15) is:
wherein, Δ z1For measuring the displacement of the mirror (15) in the incident direction of the first order diffracted light, Δ z2For measuring the displacement of the mirror (15) in the incident direction of the second order diffracted light, lambda1Is the wavelength, lambda, of the first light source (1)2Is the wavelength of the second light source, N1For the first photodetector (9) to receive the calculated total number of electrical pulses, N2The calculated total number of electrical pulses is received for the second photodetector (10).
6. The method of claim 4, wherein the relative deflection angle of the measuring mirror (15) is calculated by:
wherein alpha is the relative deflection angle of the measuring mirror (15) and delta z1For measuring the displacement of the mirror (15) in the incident direction of the first order diffracted light, Δ z2H is the distance between two first-order diffracted lights for measuring the displacement of the mirror (15) along the incident direction of the second first-order diffracted light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210044773.4A CN114353671B (en) | 2022-01-14 | 2022-01-14 | Dual-wavelength diffraction interference system and method for realizing synchronous measurement of displacement and angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210044773.4A CN114353671B (en) | 2022-01-14 | 2022-01-14 | Dual-wavelength diffraction interference system and method for realizing synchronous measurement of displacement and angle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114353671A CN114353671A (en) | 2022-04-15 |
| CN114353671B true CN114353671B (en) | 2022-11-01 |
Family
ID=81091634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210044773.4A Active CN114353671B (en) | 2022-01-14 | 2022-01-14 | Dual-wavelength diffraction interference system and method for realizing synchronous measurement of displacement and angle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114353671B (en) |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62274216A (en) * | 1986-05-23 | 1987-11-28 | Nippon Telegr & Teleph Corp <Ntt> | Method and instrument for measuring fine displacement |
| WO1989012799A1 (en) * | 1988-06-22 | 1989-12-28 | Robert Bosch Gmbh | Method of path and angle measurement |
| EP0682230A2 (en) * | 1994-05-13 | 1995-11-15 | Canon Kabushiki Kaisha | Apparatus for measuring displacement for object using diffraction grating |
| US6166817A (en) * | 1998-08-20 | 2000-12-26 | Sony Precision Technology Inc. | Optical displacement measurement system for detecting the relative movement of a machine part |
| DE102010006749A1 (en) * | 2010-02-02 | 2011-08-04 | Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt, 38116 | Measuring device for measuring at least one change in position and / or at least one change in angle and a method for dynamically measuring at least one change in position and / or an angle change |
| TW201248120A (en) * | 2011-05-17 | 2012-12-01 | Univ Nat Yunlin Sci & Tech | Interferometer system for simultaneous measurement of linear displacement and tilt angle |
| CN105806215A (en) * | 2016-03-10 | 2016-07-27 | 中国科学院高能物理研究所 | Roll angle measurement device and method based on bi-blazed grating heterodyne interference |
| CN106767431A (en) * | 2016-12-09 | 2017-05-31 | 西安交通大学 | A kind of confocal micro-displacement measuring device of length scanning and method |
| CN107144217A (en) * | 2017-04-25 | 2017-09-08 | 西安交通大学 | Fiber optic interferometric confocal system for optical element crudy on-line checking |
| CN107664481A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | grating measuring device |
| CN107664482A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | grating measuring device |
| CN107917680A (en) * | 2017-11-07 | 2018-04-17 | 南京航空航天大学 | Minute angle method for quickly identifying based on balzed grating, |
| CN109579707A (en) * | 2018-11-23 | 2019-04-05 | 北京空间飞行器总体设计部 | A kind of six degree of freedom high-precision base line measurement system and method based on femtosecond light comb |
| CN112033306A (en) * | 2019-06-03 | 2020-12-04 | 株式会社三丰 | Optical angle sensor |
| CN112484647A (en) * | 2020-11-18 | 2021-03-12 | 北京华卓精科科技股份有限公司 | Interferometer displacement measurement system and method |
| CN112484648A (en) * | 2020-11-18 | 2021-03-12 | 北京华卓精科科技股份有限公司 | Displacement measurement system and method for heterodyne optical fiber interferometer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6208424B1 (en) * | 1998-08-27 | 2001-03-27 | Zygo Corporation | Interferometric apparatus and method for measuring motion along multiple axes |
-
2022
- 2022-01-14 CN CN202210044773.4A patent/CN114353671B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62274216A (en) * | 1986-05-23 | 1987-11-28 | Nippon Telegr & Teleph Corp <Ntt> | Method and instrument for measuring fine displacement |
| WO1989012799A1 (en) * | 1988-06-22 | 1989-12-28 | Robert Bosch Gmbh | Method of path and angle measurement |
| EP0682230A2 (en) * | 1994-05-13 | 1995-11-15 | Canon Kabushiki Kaisha | Apparatus for measuring displacement for object using diffraction grating |
| US6166817A (en) * | 1998-08-20 | 2000-12-26 | Sony Precision Technology Inc. | Optical displacement measurement system for detecting the relative movement of a machine part |
| DE102010006749A1 (en) * | 2010-02-02 | 2011-08-04 | Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt, 38116 | Measuring device for measuring at least one change in position and / or at least one change in angle and a method for dynamically measuring at least one change in position and / or an angle change |
| TW201248120A (en) * | 2011-05-17 | 2012-12-01 | Univ Nat Yunlin Sci & Tech | Interferometer system for simultaneous measurement of linear displacement and tilt angle |
| CN105806215A (en) * | 2016-03-10 | 2016-07-27 | 中国科学院高能物理研究所 | Roll angle measurement device and method based on bi-blazed grating heterodyne interference |
| CN107664482A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | grating measuring device |
| CN107664481A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | grating measuring device |
| CN106767431A (en) * | 2016-12-09 | 2017-05-31 | 西安交通大学 | A kind of confocal micro-displacement measuring device of length scanning and method |
| CN107144217A (en) * | 2017-04-25 | 2017-09-08 | 西安交通大学 | Fiber optic interferometric confocal system for optical element crudy on-line checking |
| CN107917680A (en) * | 2017-11-07 | 2018-04-17 | 南京航空航天大学 | Minute angle method for quickly identifying based on balzed grating, |
| CN109579707A (en) * | 2018-11-23 | 2019-04-05 | 北京空间飞行器总体设计部 | A kind of six degree of freedom high-precision base line measurement system and method based on femtosecond light comb |
| CN112033306A (en) * | 2019-06-03 | 2020-12-04 | 株式会社三丰 | Optical angle sensor |
| CN112484647A (en) * | 2020-11-18 | 2021-03-12 | 北京华卓精科科技股份有限公司 | Interferometer displacement measurement system and method |
| CN112484648A (en) * | 2020-11-18 | 2021-03-12 | 北京华卓精科科技股份有限公司 | Displacement measurement system and method for heterodyne optical fiber interferometer |
Non-Patent Citations (2)
| Title |
|---|
| 光栅干涉位移测量技术发展综述;王国超等;《激光技术》;20100930(第05期);全文 * |
| 基于衍射光栅的光纤光栅传感器解调系统研究;冯忠伟等;《计测技术》;20110831(第04期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114353671A (en) | 2022-04-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2104833B1 (en) | Partial coherence interferometer with measurement ambiguity resolution | |
| US11703361B2 (en) | Five-degree-of-freedom heterodyne grating interferometry system | |
| CN106289068A (en) | A kind of two degrees of freedom heterodyne grating interferometer displacement measurement method | |
| KR101959341B1 (en) | Position-measuring device and system having a plurality of position-measuring devices | |
| US8400641B2 (en) | Interferometer for aspherical or spherical surface measurements | |
| CN106940220B (en) | A kind of laser wavelength real-time measurement device of Simple low-cost | |
| CN104697440A (en) | Multi-light-beam cascading staircase angle reflector laser interferometer and measurement method thereof | |
| CN113701640B (en) | Three-axis grating ruler | |
| CN104729403A (en) | Multiple-beam step type plane reflecting mirror laser interferometer and measurement method thereof | |
| CN105043242B (en) | A kind of contrast anti-interference ladder planar reflector laser interference instrument and scaling method and measuring method | |
| EP0611438A1 (en) | Measuring instruments. | |
| CN112444194A (en) | Fabry-Perot grating interferometer for two-degree-of-freedom displacement measurement, measurement method thereof and six-degree-of-freedom interferometer | |
| CN104697443B (en) | A kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method | |
| CN104964641B (en) | A kind of magnetic micro-displacement platform formula cascade ladder corner reflector laser interferometer and scaling method and measuring method | |
| CN114353671B (en) | Dual-wavelength diffraction interference system and method for realizing synchronous measurement of displacement and angle | |
| CN204594416U (en) | Modified cascade notch cuttype corner reflector laser interferometer | |
| CN204757922U (en) | Comparison type anti -interference fine motion cascading ladder corner reflection mirror laser interferometer | |
| WO2022095128A1 (en) | Six-degree-of-freedom measuring grating scale | |
| Zhang et al. | Interferometeric straightness measurement system using triangular prisms | |
| CN105180801B (en) | A kind of contrast anti-interference stepped corner reflector laser interferometer and scaling method and measuring method | |
| CN105157559B (en) | A kind of contrast anti-interference cascade ladder corner reflector laser interferometer and scaling method and measuring method | |
| CN104848782B (en) | A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method | |
| CN204495277U (en) | A kind of anti-interference ladder corner reflector laser interferometer | |
| CN104930968B (en) | A kind of magnetic micro-displacement platform formula ladder planar reflector laser interference instrument and scaling method and measuring method | |
| CN104897049B (en) | The scaling method and measuring method of a kind of magnetic micro-displacement platform formula planar reflector laser interference instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |