CN100455987C - Three-dimensional on-line measuring method and system using synthesis wave to interfere whole-field nano surface - Google Patents
Three-dimensional on-line measuring method and system using synthesis wave to interfere whole-field nano surface Download PDFInfo
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- CN100455987C CN100455987C CNB2007101206618A CN200710120661A CN100455987C CN 100455987 C CN100455987 C CN 100455987C CN B2007101206618 A CNB2007101206618 A CN B2007101206618A CN 200710120661 A CN200710120661 A CN 200710120661A CN 100455987 C CN100455987 C CN 100455987C
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Abstract
The invention discloses a nanometer surface 3D on-line measuring method by using composed wave to interfere the whole field and a system for the method. The measuring range is depending upon the composed wavelength and co-path interference structure. The double color scattering property of the double-period grating scatters the light beam of spectrum width 40 nm into two segment light pieces with wavelengths continuously and evenly distributed in the space, which are collimated into two parallel light pieces that are staggered in cross direction and are partially overlapped; the overlapped part forms the composed wave. The beam of the parallel light pieces of the composed wave is expanded by two co-focus plane cylinder lens, then through a parallel glass plate, one surface of which is coated with a semi-permeable and half-reflecting membrane, half light intensity is reflected as reference light, another half light intensity is reflected by different measured points, and is detected by a planar array CCD after being interfered by the reference light. Once the phase change of the interference signal for each pixel of CCD is measured, the longitudinal change of the measured point is got. 3D measurements for the surface is completed in one positioning. The measurement is of high speed and low cost. The measuring range is 600 swung dash 1000 Mu m, the resolution is better than 5 nm, is applicable for measuring nanometer surfaces with bosses and deep slots.
Description
Technical field
The present invention relates to a kind of synthesis wave to interfere whole-field nano surface three-dimensional on-line measuring method and system of utilizing, particularly relate to a kind of Nanosurface three-dimensional on-line measuring method and system that be applicable to, belong to field of optical measuring technologies with boss and deep groove structure.
Background technology
[1] D.P.Hand, T.A.Carolan, J.S.Barton, and J.D.C.Jones. optics letter (OpticsLetters),, the 18th volume, the 16th phase, 1361-1363 page or leaf in 1993.The principle of work of prior art document [1] as shown in Figure 1.Behind the light process faraday isolator and optical fiber 50:50 coupling mechanism that semiconductor laser sends, arrive measuring head, measuring head is a Feisuo interferometer, part light is reflected conduct with reference to light by fiber end face, another part light projects on the measured surface after focusing on through GRIN Lens, is come back in the system and with reference light by the measured surface reflection to interfere, interference signal is surveyed by detector D1, and the phase decision of interference signal is in vertical height of measured surface measured point; The drive current that changes this laser instrument is to change the glow frequency of laser instrument, light with four kinds of different frequencies is measured same point, obtain four interference signals, because incident light wave frequency difference, the phase place of four interference signals are just different, regulate drive current, make the phase differential pi/2 of adjacent two interference signals, by following formula, can demodulate the optical path difference D of this point, promptly finish the measurement of single-point:
I
n(n=1,2,3,4) are the intensity of the n time interference signal, and c is the light velocity, and v is the incident light frequency.
Stepper motor drives measuring head transversal scanning measured surface again, promptly finishes the measurement to measured surface.
[2] Dejiao Lin, Xiangqian Jiang, Fang Xie, Wei Zhang, Lin Zhang and IanBennion. optics express train (Optics Express),, the 12nd volume, the 23rd phase, 5729-5734 page or leaf in 2004.The principle of work of prior art document [2] as shown in Figure 2.Sending wavelength by semiconductor laser is λ
0Light be divided into two-way after through two 3dB-coupling mechanisms, the one tunnel is reflected by fiber grating, another road is reflected by reference mirror.The two-way reflected light is through meeting once more behind the 3dB-coupling mechanism and interfering, interference signal is through behind the gyroscope, reflected by another fiber grating, pass through gyroscope once more, surveyed by the PIN detector then, the signal that this detector detects is handled the length that the rear drive piezoelectric ceramic tube is regulated the reference arm of fibre optic interferometer through servo circuit, makes two interference arms stablizing interferometer be in quadrature (phase differential is a pi/2) all the time, thereby realizes stablizing the purpose of this interferometer.
The wavelength X that tunable laser is sent
mVariable light is divided into two-way after through two optical fiber 3dB-coupling mechanisms, one the tunnel through getting back in the interferometer once more by measuring mirror reflection again behind the optical fiber self-focus lens, get back in the interferometer once more by the reference mirror reflection again behind another road process optical fiber self-focus lens, meet behind the two-way light process 3dB-coupling mechanism, form interference signal, behind this interference signal process gyroscope and the fiber grating, surveyed, promptly measure the displacement of measuring mirror through phase analysis again by the PIN detector.
The problem and shortage that above-mentioned two prior aries exist is:
1, all be the spot scan metering system, measuring speed is slow, and measurement needs two-dimensional scan for surface three dimension, scanning mechanism complexity, instrument cost height;
2, to the interference sensitivity of measurement environment vibration and temperature drift, be not suitable for on-line measurement;
3, measure the restriction that range is subjected to incident light wave length λ, measure range, can't measure Nanosurface with boss and deep groove structure less than λ/2.
Purpose of the present invention is exactly to propose a kind of synthesis wave to interfere whole-field nano surface three-dimensional on-line measuring method and system of utilizing at the problem and shortage of prior art existence.
Summary of the invention
The objective of the invention is to be achieved through the following technical solutions.
The parallel beam that utilization is made up of a series of parallel composite waves carries out measurement of full field to measured surface, measure light path and constitute concurrent path interference system in the road altogether with reference path, this system by super-radiance light emitting diode SLD, optical fiber self-focus lens Z, binary cycle grating G, collimation lens L1, flat post lens L2 and L3, spectroscope BS, one side plated the dull and stereotyped P of parallel glass of semi-transparent semi-reflecting film, vertically micro displacement workbench M1, laterally micro displacement workbench M2, area array CCD, phase measurement, signal generator, A/D transition card, computing machine, result export, drive controlling forms; Utilize a centre wavelength to constitute a common path interference instrument for super-radiance light emitting diode SLD, optical fiber self-focus lens Z, binary cycle grating G, collimation lens L1, flat post lens L2 and L3, the spectroscope BS of 850nm spectrum width 40nm, the dull and stereotyped P of parallel glass that one side has been plated semi-transparent semi-reflecting film, make ambient vibration and temperature drift obtain common mode inhibition, thereby make this measuring system be applicable to on-line measurement the influence of measuring system; Super-radiance light emitting diode SLD is collimated into parallel beam after sending the light process optical fiber self-focus lens Z that spectrum width is 40nm, binary cycle grating G with this light beam chromatic dispersion be two wavelength in the space continuous equally distributed fan-shaped mating plate, it is two transversion malpositions and partly overlapping parallel mating plate that collimation lens L1 is collimated into these two fan-shaped mating plates, these two parallel mating plates form the parallel mating plate of being made up of a series of parallel composite waves in the part of space overlap, the parallel mating plate of this composite wave expands Shu Chengwei composite wave parallel beam through two confocal flat post lens L2 and L3, this composite wave parallel beam impinges perpendicularly on the dull and stereotyped P of parallel glass after seeing through spectroscope BS, the one side of the dull and stereotyped P of parallel glass is coated with semi-transparent semi-reflecting film, half light intensity of composite wave parallel beam is reflected, return along former road, this part light is as reference light; Second half light intensity transmission, and project on the measured surface, by meeting with reference light in the measured surface reflected back system and interfering, the synthesis wave to interfere signal is surveyed by area array CCD through spectroscope BS reflection back, the pixel that CCD is different detects the light of the different measured points of measured surface reflected back and the interference signal that reference light meets and produces, and vertical (perpendicular to measured surface) information of measured surface is stated from the phase change of interference signal.Demodulate the phase changing capacity of each pixel interference signal of CCD, promptly measure vertical variable quantity of each corresponding measured point on the measured surface, realize the surface three dimension measurement.
Phase changing capacity for the demodulated interferential signal, signal generator sends the certain sawtooth voltage of periodic amplitude and drives the light path that vertical micro displacement workbench M1 regulates the measurement light path through drive controlling, if measured surface is the ideal plane, so, interference signal and sawtooth signal same frequency and same-phase; If measured surface is the surface with boss and deep groove structure, there is vertical variation of Δ h, exist phase differential to be so between interference signal and the sawtooth signal
Compare the phase place of interference signal and the phase place of sawtooth signal, the phase measurement link is measured its phase differential
Make analog to digital conversion through the A/D transition card, be for data processing by computing machine again, promptly measure vertical changing value Δ h of corresponding measured point, the interference signal that each pixel of area array CCD is exported carries out such processing successively, measure vertical changing value Δ h of each corresponding measured point, promptly finish the three-dimensional measurement of measured surface; The measurement range is λ
s/ 2, synthetic wavelength
Be far longer than optical wavelength λ
1And λ
2, the size in two cycles that can be by regulating grating is to regulate two overlapping optical wavelength λ
1And λ
2Size, thereby the synthetic wavelengths that obtain different sizes are regulated the measurement range, native system are applicable to have the Nanosurface three-dimensional on-line measuring of boss and deep groove structure.
The invention has the beneficial effects as follows:
1, carries out the whole-field nano surface three-dimensional measurement.The parallel beam that a series of parallel composite waves are formed carries out whole audience three-dimensional measurement to measured surface, and the measuring process one-time positioning is finished surface three dimension and measured.Measuring speed of the present invention is fast, need not scanning mechanism, and system architecture is simple, and cost is low, the measuring accuracy height.
2, the present invention utilizes light source, optical fiber self-focus lens Z, binary cycle grating G, collimation lens L1, flat post lens L2 and L3, spectroscope BS, the dull and stereotyped P of parallel glass to constitute concurrent path interference system, make interference such as ambient vibration and temperature drift obtain common mode inhibition, thereby make system be applicable to on-line measurement the influence of measuring system.
3, the method with synthesis wave to interfere enlarges the interferometry range.The measurement range is λ
s/ 2, synthetic wavelength
Be far longer than optical wavelength λ
1And λ
2, and can be by regulating optical wavelength λ
1And λ
2Obtain different synthetic wavelengths and regulate the measurement range, measure range and can reach 600～1000 μ m, resolution is better than 5nm, native system is applicable to have the Nanosurface three-dimensional on-line measuring of boss and deep groove structure.
Description of drawings
Fig. 1 is the fundamental diagram of prior art document [1];
Fig. 2 is the fundamental diagram of prior art document [2];
Fig. 3 is a fundamental diagram of the present invention.
Mark among the figure: Z-optical fiber self-focus lens, G-binary cycle grating, L1-collimation lens, the flat post lens of L2-, the flat post lens of L3-, BS-spectroscope, P-parallel glass flat board, the vertical micro displacement workbench of M1-, the horizontal micro displacement workbench of M2-.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is further described.
As shown in Figure 3, be collimated into behind the light process optical fiber self-focus lens Z of the spectrum width 40nm that the super luminescence diode SLD of centre wavelength 850nm sends and be parallel beam, this bundle parallel beam through binary cycle grating G chromatic dispersion become two wavelength in the space continuous equally distributed fan-shaped mating plate, these two fan-shaped mating plates through collimation lens L1 collimation become wavelength in the space equally distributed parallel mating plate continuously, these two parallel mating plates are parallel to each other, transversion malposition, and overlapping at space segment.The wavelength X of two parallel mating plates of the correspondence of difference in a lateral direction of the lap of two parallel mating plates
1And λ
2After meeting, difference, these two different wavelength form composite wave, the synthetic wavelength of composite wave
Be far longer than optical wavelength λ
1And λ
2The parallel mating plate of composite wave expands Shu Chengwei composite wave parallel beam through two confocal flat post lens L2 and L3, this composite wave parallel beam sees through spectroscope BS, impinge perpendicularly on the dull and stereotyped P of parallel glass, the one side of the dull and stereotyped P of parallel glass is coated with semi-transparent semi-reflecting film, half light intensity of composite wave parallel beam is reflected, return along former road, this part light is as reference light; Second half light intensity transmission, and projecting on the measured device surface by measured surface reflected back system, is met with reference light and is interfered, and the synthesis wave to interfere signal is surveyed by area array CCD through spectroscope BS reflection.The area array CCD different pixels detects the catoptrical interference signal of the different measured point of measured surface, the phase changing capacity of interference signal
Embodied vertical changing value Δ h of measured point.
With the pass of Δ h be
Synthetic wavelength λ
sBe far longer than optical wavelength, it is decided by two grating cycles of binary cycle grating G.The range of native system is λ
s/ 2, be far longer than range λ/2 (λ is an optical wavelength) of traditional interferometry.Realize the purpose of wide range interferometry, native system has been applicable to have the Nanosurface three-dimensional measurement of boss and deep groove structure.
For the phase changing capacity of demodulated interferential signal, the sawtooth signal that signal generator sends by drive controlling drive vertical micro displacement workbench M1 at the uniform velocity longitudinal scanning realize measuring the adjusting of light path light path.Regulate the initial position and the sawtooth signal amplitude of worktable, make the interference signal same frequency same-phase ground variation of sawtooth signal and the some pixels of CCD in the light path scanning process.If measured surface is the ideal plane, the interference signal of other pixel of CCD also with sawtooth signal same frequency same-phase; If measured surface is the surface with boss and deep groove structure, the interference signal of other pixel of CCD and the phase place of sawtooth signal are just inequality, and the phase differential between the two is measured in phase measurement
, through promptly obtaining vertical changing value Δ h of corresponding measured point after the computer data processing; Interference signal to each pixel of CCD is all done such processing, promptly measures vertical changing value of each corresponding measured point, finishes the three-dimensional measurement on surface.Compare with spot scan Nanosurface three-dimension measuring system, this measuring method and system greatly improve measuring speed, and need not scanning mechanism, and system architecture is simple, and cost is low, the measuring accuracy height.
Above-mentioned instantiation has been described in realization in order to demonstrate the invention.But other variations of the present invention and modification it will be apparent to those skilled in the art that, in the essence of the disclosed content of the present invention and any modification/variation in the cardinal rule scope or imitate conversion all to belong to claim protection domain of the present invention.
Claims (4)
1, a kind of synthesis wave to interfere whole-field nano surface three-dimensional on-line measuring method that utilizes, it is characterized in that: be collimated into parallel beam after the light that utilizes super-radiance light emitting diode (SLD) to send spectrum width 40nm passes through optical fiber self-focus lens (Z), binary cycle grating (G) with this parallel beam chromatic dispersion be two wavelength in the space continuous equally distributed fan-shaped mating plate, become two transversion malpositions and partly overlapping parallel mating plate behind collimation lens (L1) collimation, these two parallel mating plates form the parallel mating plate of being made up of a series of parallel composite waves in the part of space overlap; The parallel mating plate of this composite wave expands Shu Chengwei composite wave parallel beam through two confocal flat post lens L2 and L3, this composite wave parallel beam impinges perpendicularly on the parallel glass flat board (P) after seeing through spectroscope (BS), the one side of parallel glass flat board (P) is coated with semi-transparent semi-reflecting film, half light intensity of composite wave parallel beam is reflected, return along former road, this part light is as reference light; Second half light intensity transmission, and project on the measured surface, interfere by meeting in the measured surface reflected back system and with reference light, by the area array CCD detection, the different pixel of area array CCD detects the light of the different measured points of measured surface reflected back and the interference signal that reference light meets and produces to the synthesis wave to interfere signal through spectroscope (BS) reflection; Measured surface is stated from the phase change of interference signal in the vertical information perpendicular to the measured surface direction, demodulate the phase changing capacity of each pixel interference signal of area array CCD, promptly measure on the measured surface each corresponding measured point at vertical variable quantity perpendicular to the measured surface direction; Phase changing capacity for the demodulated interferential signal, signal generator send sawtooth signal through the drive controlling link drive vertical micro displacement workbench (M1) at the uniform velocity longitudinal scanning realize measuring the adjusting of light path light path, regulate the initial position and the sawtooth signal amplitude of vertical micro displacement workbench (M1), the interference signal same frequency same-phase ground of some pixels of sawtooth signal and area array CCD in vertical micro displacement workbench (M1) scanning process is changed; If measured surface is the ideal plane, the interference signal of other pixel of area array CCD also with sawtooth signal same frequency same-phase; If measured surface is the surface with boss and deep groove structure, there is vertical variation of Δ h, the phase differential of interference signal and sawtooth signal is so
Synthetic wavelength wherein
λ
1And λ
2It is the optical wavelength of two parallel mating plates of the correspondence of difference in a lateral direction of the lap of described two parallel mating plates; Measure its phase differential through the phase measurement link
Make analog to digital conversion through the A/D transition card, be for data processing by computing machine again, measure corresponding measured point at vertical changing value Δ h perpendicular to the measured surface direction, the interference signal that each pixel of area array CCD is exported carries out such processing successively, measure each corresponding measured point at vertical changing value, finish the three-dimensional measurement of measured surface perpendicular to the measured surface direction.
2, a kind of synthesis wave to interfere whole-field nano surface three-dimensional on-line measuring method that utilizes according to claim 1, it is characterized in that: the method range extension that utilizes synthesis wave to interfere, make the measurement range of described measuring method break through the restriction of optical wavelength, range is decided by synthetic wavelength λ
s, the measurement range of described measuring method is λ
s/ 2, by regulating two grating cycles of binary cycle grating (G), regulate synthetic wavelength λ
sSize, to obtain the measurement ranges of different sizes.
3, a kind of realize claim 1 or 2 described measuring methods utilize synthesis wave to interfere whole-field nano surface three-dimensional on-line measuring system, it is characterized in that: the parallel beam that utilizes a series of parallel composite waves to form carries out measurement of full field to measured surface, measures light path and reference path and constitutes the common path interference instrument in the road altogether; This system by super-radiance light emitting diode (SLD), optical fiber self-focus lens (Z), binary cycle grating (G), collimation lens (L1), flat post lens L2 and L3, spectroscope (BS), one side plated the parallel glass flat board (P) of semi-transparent semi-reflecting film, vertically micro displacement workbench (M1), laterally micro displacement workbench (M2), area array CCD, phase measurement link, signal generator, A/D transition card, computing machine, output element, drive controlling link are formed as a result; The parallel glass flat board (P) that utilizes a centre wavelength to plate semi-transparent semi-reflecting film for super-radiance light emitting diode (SLD), optical fiber self-focus lens (Z), binary cycle grating (G), collimation lens (L1), flat post lens L2 and L3, spectroscope (BS), the one side of 850nm spectrum width 40nm constitutes a described common path interference instrument, make ambient vibration and temperature drift obtain common mode inhibition, thereby make this measuring system be applicable to on-line measurement the influence of measuring system.
4, a kind of synthesis wave to interfere whole-field nano surface three-dimensional on-line measuring system that utilizes according to claim 3, it is characterized in that: described binary cycle grating (G) is the grating that two kinds of different cycles are scribed at the same position on a glass plate, the grating pair in each cycle is with the inferior dispersion angle difference of a kind of same one-level of light of wavelength, so when the light of a certain wavelength incides on this binary cycle grating (G), at same chromatic dispersion level time two dispersed light beams that dispersion angle is different of existence, thereby make this binary cycle grating (G) have the double dispersion characteristic.
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Patent Citations (5)
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| US5135309A (en) * | 1990-03-09 | 1992-08-04 | Carl-Zeiss-Stiftung | Method and apparatus for non-contact measuring of object surfaces |
| US5982489A (en) * | 1996-01-29 | 1999-11-09 | Nikon Corporation | Method and apparatus for measuring depth of a depression in a pattern by light interference from crossed light beams |
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