CN100491901C - Synthetic wave interference nano surface tri-dimensional on-line measuring system and method - Google Patents
Synthetic wave interference nano surface tri-dimensional on-line measuring system and method Download PDFInfo
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- CN100491901C CN100491901C CNB2007101200791A CN200710120079A CN100491901C CN 100491901 C CN100491901 C CN 100491901C CN B2007101200791 A CNB2007101200791 A CN B2007101200791A CN 200710120079 A CN200710120079 A CN 200710120079A CN 100491901 C CN100491901 C CN 100491901C
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Abstract
The invention relates to a nano-surface interference 3D online measurement system with composite wave and the method thereof. The range depends on the wavelength of the composite wave, and the system has a common path interference structure. The beam with spectral width of 40 nm is color dispersed into two sectored lights with wavelength continuously and uniformly distributed in space by utilizing the double dispersion property of a dual-period grating, the two sectored lights are collimated to two parallel lights with transverse misplacement and partial overlapping, and the overlapped part forms a composite wave. The parallel lights of the composite wave passes through a plano-convex focusing lens with a cylindrical surface coated with a semi-transmitting and reflective film, then one half of the lights are reflected to become reference light and the other half of the lights are focused to become light, and then the light is reflected by different measuring points, interfered with the reference light and detected by an array CCD. If the phase variation of the interference signal of each pixel of CCD is measured, then the longitudinal variation at the measuring point can be obtained. The nano-surface 2D measurement is finished by once location; and the nano-surface 3D measurement is finished by transverse scanning of light. The measurement range is 600-1,000 micron, and the resolution is higher than 5 nm. The invention has the advantages of high measurement speed, and low cost; and is suitable for measurement of nano-surface with boss and deep groove.
Description
Technical field
The present invention relates to utilize a kind of synthetic wave interference nano surface tri-dimensional on-line measuring system and the method for light scanning, particularly relate to a kind of Nanosurface three-dimensional on-line measuring system and method that is applicable to, belong to field of optical measuring technologies with boss and deep groove structure.
Background technology
[1] D.P.Hand, T.A.Carolan, J.S.Barton, and J.D.C.Jones. optics letter (OpticsLetters),, the 18th volume, the 16th phase, 1361-1363 page or leaf in 1993.The principle of work of prior art document [1] as shown in Figure 1.Behind the light process faraday isolator and optical fiber 50:50 coupling mechanism that semiconductor laser sends, arrive measuring head, measuring head is a Feisuo interferometer, part light is reflected conduct with reference to light by fiber end face, another part light projects on the measured surface after focusing on through GRIN Lens, is come back in the system and with reference light by the measured surface reflection to interfere, interference signal is surveyed by detector D1, and the phase decision of interference signal is in vertical height of measured surface measured point; The drive current that changes this laser instrument is to change the glow frequency of laser instrument, light with four kinds of different frequencies is measured same point, obtain four interference signals, because incident light wave frequency difference, the position of four interference signals are just different mutually, regulate drive current, make the phase differential pi/2 of adjacent two interference signals, by following formula, can demodulate the optical path difference D of this point, promptly finish the measurement of single-point:
I
n(n=1,2,3,4) are the intensity of the n time interference signal, and c is the light velocity, and v is the incident light frequency.
Stepper motor drives measuring head transversal scanning measured surface again, promptly finishes the measurement to measured surface.
[2] Dejiao Lin, Xiangqian Jiang, Fang Xie, Wei Zhang, Lin Zhang and IanBennion. optics express train (Optics Express),, the 12nd volume, the 23rd phase, 5729-5734 page or leaf in 2004.The principle of work of prior art document [2] as shown in Figure 2.Sending wavelength by semiconductor laser is λ
0Light be divided into two-way after through two 3dB-coupling mechanisms, the one tunnel is reflected by fiber grating, another road is reflected by reference mirror.The two-way reflected light is through meeting once more behind the 3dB-coupling mechanism and interfering, interference signal is through behind the gyroscope, reflected by another fiber grating, pass through gyroscope once more, surveyed by the PIN detector then, the signal that this detector detects is handled the length that the rear drive piezoelectric ceramic tube is regulated the reference arm of fibre optic interferometer through servo circuit, makes two interference arms stablizing interferometer be in quadrature (phase differential is a pi/2) all the time, thereby realizes stablizing the purpose of this interferometer.
The wavelength X that tunable laser is sent
mVariable light is divided into two-way after through two optical fiber 3dB-coupling mechanisms, one the tunnel through getting back in the interferometer once more by measuring mirror reflection again behind the optical fiber self-focus lens, get back in the interferometer once more by the reference mirror reflection again behind another road process optical fiber self-focus lens, meet behind the two-way light process 3dB-coupling mechanism, form interference signal, behind this interference signal process gyroscope and the fiber grating, surveyed, promptly measure the displacement of measuring mirror through phase analysis again by the PIN detector.
The problem and shortage that above-mentioned two prior aries exist is:
1, all be the spot scan metering system, measuring speed is slow, and measurement needs two-dimensional scan for surface three dimension, scanning mechanism complexity, instrument cost height;
2, to the interference sensitivity of measurement environment vibration and temperature drift, be not suitable for on-line measurement;
3, measure the restriction that range is subjected to incident light wave length λ, measure range, can't measure Nanosurface with boss and deep groove structure less than λ/2.
Purpose of the present invention is exactly to propose a kind of synthetic wave interference nano surface tri-dimensional on-line measuring system and method for utilizing light scanning at the problem and shortage of prior art existence.
Summary of the invention
The objective of the invention is to be achieved through the following technical solutions.
The parallel mating plate scanning measured surface that utilization is made up of a series of parallel composite waves carries out line sweep and measures, measure light path and constitute concurrent path interference system in the road altogether with reference path, this system by super-radiance light emitting diode SLD, optical fiber self-focus lens Z, binary cycle grating G, collimation lens L1, spectroscope BS, plane plated the flat post condenser lens L2 of semi-transparent semi-reflecting film, vertically micro displacement workbench M1, laterally micro displacement workbench M2, high speed linear array CCD, phase measurement, signal generator, A/D transition card, computing machine, result export, drive controlling forms; The flat post condenser lens L2 that utilizes a centre wavelength to plate semi-transparent semi-reflecting film for super-radiance light emitting diode SLD, optical fiber self-focus lens Z, binary cycle grating G, spectroscope BS, the plane of 850nm spectrum width 40nm constitutes a common path interference instrument, make ambient vibration and temperature drift obtain common mode inhibition, thereby make this measuring system be applicable to on-line measurement the influence of measuring system; Super-radiance light emitting diode SLD is collimated into parallel beam after sending the light process optical fiber self-focus lens Z that spectrum width is 40nm, binary cycle grating G with this light beam chromatic dispersion be two wavelength in the space continuous equally distributed fan-shaped mating plate, it is two transversion malpositions and partly overlapping parallel mating plate that collimation lens L1 is collimated into these two fan-shaped mating plates, these two parallel mating plates form the parallel mating plate of being made up of a series of parallel composite waves in the part of space overlap, the parallel mating plate of this composite wave impinges perpendicularly on the flat post lens focus L2 after seeing through spectroscope BS, the plane of flat post condenser lens L2 is coated with semi-transparent semi-reflecting film, half light intensity of the parallel mating plate of composite wave is reflected, return along former road, this part light is as reference light; Second half light intensity transmission, be focused into the light of a width less than 1 μ m, this light scanning measured surface, by meeting with reference light in the measured surface reflected back system and interfering, the synthesis wave to interfere signal is surveyed by high speed linear array CCD through spectroscope BS reflection back, the pixel that CCD is different detects the light of the different measured points of measured surface reflected back and the interference signal that reference light meets and produces, and vertical (perpendicular to measured surface) information of measured surface is stated from the phase change of interference signal.Demodulate the phase changing capacity of each pixel interference signal of CCD, promptly measure vertical variable quantity of corresponding measured point on the measured surface, realize surperficial two-dimensional measurement; Laterally micro displacement workbench M2 drives measured device and laterally moves, and the light scanning measured surface is done identical processing to the interference signal that each pixel of CCD detects again, realizes that promptly surface three dimension measures.
Phase changing capacity for the demodulated interferential signal, signal generator sends the certain sawtooth voltage of periodic amplitude and drives the light path that vertical micro displacement workbench M1 regulates the measurement light path through drive controlling, if measured surface is the ideal plane, so, interference signal and sawtooth signal same frequency and same-phase; If measured surface is the surface with boss and deep groove structure, there is vertical variation of Δ h, exist phase differential to be so between interference signal and the sawtooth signal
Compare the phase place of interference signal and the phase place of sawtooth signal, the phase measurement link is measured its phase differential
Make analog to digital conversion through the A/D transition card, be for data processing by computing machine, promptly measure vertical changing value Δ h of corresponding measured point, the interference signal that each pixel of line array CCD is exported carries out such processing successively, promptly finishes the two-dimensional measurement of measured surface; Drive controlling drives horizontal work level M2 transverse movement, and light transversal scanning measured surface is done identical processing to the signal of each pixel output of line array CCD more one by one, promptly finishes the three-dimensional measurement of measured surface; The measurement range is λ
s/ 2, synthetic wavelength
Be far longer than optical wavelength λ
1And λ
2, the size in two cycles that can be by regulating grating is to regulate two overlapping optical wavelength λ
1And λ
2Size, thereby the synthetic wavelengths that obtain different sizes are regulated the measurement range, native system are applicable to have the Nanosurface three-dimensional on-line measuring of boss and deep groove structure.
The invention has the beneficial effects as follows:
1, the light scanning Nanosurface carries out three-dimensional measurement.The parallel mating plate scanning measured surface that a series of parallel composite waves are formed carries out line sweep to be measured, and the measuring process one-time positioning is finished surperficial two-dimensional measurement; Light transversal scanning measured surface is finished surface three dimension and is measured.Measuring speed of the present invention is fast, and scanning mechanism is simple, and system cost is low, the measuring accuracy height.
2, the present invention utilizes light source, optical fiber self-focus lens Z, binary cycle grating G, collimation lens L1, spectroscope BS, flat post convergent lens L2 to constitute concurrent path interference system, make interference such as ambient vibration and temperature drift obtain common mode inhibition, thereby make system be applicable to on-line measurement the influence of measuring system.
3, the method with synthesis wave to interfere enlarges the interferometry range.The measurement range is λ/2, synthetic wavelength
Be far longer than optical wavelength λ
1And λ
2, and can be by regulating optical wavelength λ
1And λ
2Obtain different synthetic wavelengths and regulate the measurement range, measure range and can reach 600～1000 μ m, resolution is better than 5nm, native system is applicable to have the Nanosurface three-dimensional on-line measuring of boss and deep groove structure.
Description of drawings
Fig. 1 is the fundamental diagram of prior art document [1];
Fig. 2 is a prior art document 12] fundamental diagram;
Fig. 3 is a fundamental diagram of the present invention.
Mark among the figure: Z-optical fiber self-focus lens, G-binary cycle grating, L1-collimation lens, BS-spectroscope, L2-flat post condenser lens, M1-vertical micro displacement workbench, M2-horizontal micro displacement workbench.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is further described.
As shown in Figure 3, be collimated into behind the light process optical fiber self-focus lens Z of the spectrum width 40nm that the super luminescence diode SLD of centre wavelength 850nm sends and be parallel beam, this bundle parallel beam through binary cycle grating G chromatic dispersion become two wavelength in the space continuous equally distributed fan-shaped mating plate, these two fan-shaped mating plates through collimation lens L1 collimation become wavelength in the space equally distributed parallel mating plate continuously, these two parallel mating plates are parallel to each other, transversion malposition, and overlapping at space segment.The wavelength X of two parallel mating plates of the correspondence of difference in a lateral direction of the lap of two parallel mating plates
1And λ
2After meeting, difference, these two different wavelength form composite wave, the synthetic wavelength of composite wave
Be far longer than optical wavelength λ
1And λ
2The parallel mating plate of this composite wave sees through spectroscope BS, impinges perpendicularly on the flat post condenser lens L2, and the plane of flat post condenser lens L2 is coated with semi-transparent semi-reflecting film, and half light intensity of the parallel mating plate of composite wave is reflected, and Yan Yuanlu returns, and this part light is as reference light; Second half light intensity transmission is focused into the light of a width less than 1 μ m, and this ray cast is to the measured device surface, by measured surface reflected back system, meet with reference light and interfere, the synthesis wave to interfere signal is surveyed by high speed linear array CCD through spectroscope BS reflection.The line array CCD different pixels detects the catoptrical interference signal of the different measured point of measured surface, the phase changing capacity of interference signal
Embodied vertical changing value Δ h of measured point.
With the pass of Δ h be
Synthetic wavelength
Be far longer than optical wavelength, it is decided by two grating cycles of binary cycle grating G.The range of native system is λ
s/ 2, be far longer than range λ/2 (λ is an optical wavelength) of traditional interferometry.Realize the purpose of wide range interferometry, native system has been applicable to have the Nanosurface three-dimensional measurement of boss and deep groove structure.
For the phase changing capacity of demodulated interferential signal, the sawtooth signal that signal generator sends by drive controlling drive vertical micro displacement workbench M1 at the uniform velocity longitudinal scanning realize measuring the adjusting of light path light path.Regulate the initial position and the sawtooth signal amplitude of worktable, make the interference signal same frequency same-phase ground variation of sawtooth signal and the some pixels of CCD in the light path scanning process.If measured surface is the ideal plane, the interference signal of other pixel of CCD also with sawtooth signal same frequency same-phase; If measured surface is the surface with boss and deep groove structure, the interference signal of other pixel of CCD and the phase place of sawtooth signal are just inequality, and the phase differential between the two is measured in phase measurement
Through promptly obtaining vertical changing value Δ h of corresponding measured point after the computer data processing; Interference signal to each pixel of CCD is all done such processing, promptly finishes the two-dimensional measurement of measured surface; Drive controlling drives horizontal micro displacement workbench M2 and laterally moves, and the light scanning measured surface is done above the processing to the interference signal of each pixel of CCD again, promptly finishes the three-dimensional measurement on surface.
Above-mentioned instantiation has been described in realization in order to demonstrate the invention.But other variations of the present invention and modification it will be apparent to those skilled in the art that, in the essence of the disclosed content of the present invention and any modification/variation in the cardinal rule scope or imitate conversion all to belong to claim protection domain of the present invention.
Claims (4)
1, a kind of synthetic wave interference nano surface tri-dimensional on-line measuring method of utilizing light scanning, it is characterized in that: be collimated into parallel beam after the light that utilizes super-radiance light emitting diode (SLD) to send spectrum width 40nm passes through optical fiber autocollimatic lens (Z), binary cycle grating (G) with this parallel beam chromatic dispersion become two wavelength in the space continuous equally distributed fan-shaped mating plate, become two transversion malpositions and partly overlapping parallel mating plate behind collimation lens (L1) collimation, these two parallel mating plates form the parallel mating plate of being made up of a series of parallel composite waves in the part of space overlap; The parallel mating plate of this composite wave impinges perpendicularly on the flat post condenser lens (L2) after seeing through spectroscope (BS), the plane of flat post condenser lens (L2) is coated with semi-transparent semi-reflecting film, half light intensity of the parallel mating plate of composite wave is reflected, and Yan Yuanlu returns, and this part light is as reference light; Second half light intensity transmission, be focused into the light of a width less than 1 μ m, this light scanning measured device surface, interfere by meeting in the measured surface reflected back system and with reference light, by the high speed linear array CCD detection, the different pixel of high speed linear array CCD detects the light of the different measured points of measured surface reflected back and the interference signal that reference light meets and produces to the synthesis wave to interfere signal through spectroscope (BS) reflection; Measured surface is stated from the phase change of interference signal in the information perpendicular to the measured surface direction, demodulate the phase changing capacity of each pixel interference signal of high speed linear array CCD, promptly measure on the measured surface corresponding measured point at variable quantity perpendicular to the measured surface direction; Phase changing capacity for the demodulated interferential signal, signal generator send sawtooth signal through the drive controlling link drive vertical micro displacement workbench (M1) at the uniform velocity longitudinal scanning realize measuring the adjusting of light path light path, regulate the initial position and the sawtooth signal amplitude of vertical micro displacement workbench, the interference signal same frequency same-phase ground of some pixels of sawtooth signal and high speed linear array CCD in vertical micro displacement workbench (M1) scanning process is changed; If measured surface is the ideal plane, the interference signal of other pixel of high speed linear array CCD also with sawtooth signal same frequency same-phase; If measured surface is the surface with boss and deep groove structure, in the variation that has Δ h perpendicular to the measured surface direction, the phase differential of interference signal and sawtooth signal is so
Synthetic wavelength wherein
λ
1And λ
2Be certain any two optical wavelengths in a lateral direction of described two parallel mating plate overlapping regions parallel to each other; Measure its phase differential through the phase measurement link
Make analog to digital conversion through the A/D transition card, be for data processing by computing machine again, measure corresponding measured point at the changing value Δ h perpendicular to the measured surface direction, the interference signal that each pixel of high speed linear array CCD is exported carries out such processing successively, promptly finishes the two-dimensional measurement of measured surface; The drive controlling link drives horizontal micro displacement workbench (M2), realizes light transversal scanning measured surface, one by one the interference signal of each pixel output of high speed linear array CCD is done identical processing again, promptly finishes the three-dimensional measurement of measured surface.
2, a kind of synthetic wave interference nano surface tri-dimensional on-line measuring method of utilizing light scanning according to claim 1, it is characterized in that: the method range extension that utilizes synthesis wave to interfere, make the measurement range of described measuring method break through the restriction of optical wavelength, range is decided by synthetic wavelength λ
s, the measurement range of described measuring method is λ
s/ 2, by regulating two grating cycles of binary cycle grating (G), regulate synthetic wavelength λ
sSize, to obtain the measurement ranges of different sizes; Measure range and reach 600～1000 μ m, resolution is better than 5nm, is applicable to the Nanosurface three-dimensional on-line measuring with boss and deep groove structure.
3, a kind of synthetic wave interference nano surface tri-dimensional on-line measuring system that utilizes light scanning of realizing claim 1 or 2 described measuring methods, it is characterized in that: the line sweep measurement is carried out on the parallel mating plate scanning measured device surface that utilizes a series of parallel composite waves to form, and measures light path and reference path and constitutes the common path interference instrument in the road altogether; This system by super-radiance light emitting diode (SLD), optical fiber self-focus lens (Z), binary cycle grating (G), collimation lens (L1), spectroscope (BS), plane plated the flat post condenser lens (L2) of semi-transparent semi-reflecting film, vertically micro displacement workbench (M1), laterally micro displacement workbench (M2), high speed linear array CCD, phase measurement link, signal generator, A/D transition card, computing machine, output element, drive controlling link are formed as a result; The flat post condenser lens (L2) that utilizes a centre wavelength to plate semi-transparent semi-reflecting film for super-radiance light emitting diode (SLD), optical fiber self-focus lens (Z), binary cycle grating (G), collimation lens (L1), spectroscope (BS), the plane of 850nm spectrum width 40nm constitutes a described common path interference instrument, make ambient vibration and temperature drift obtain common mode inhibition, thereby make this measuring system be applicable to on-line measurement the influence of measuring system.
4, a kind of synthetic wave interference nano surface tri-dimensional on-line measuring system that utilizes light scanning according to claim 3, it is characterized in that: described binary cycle grating (G) is the grating that two kinds of different cycles are scribed at the same position on a glass plate, the grating pair in each cycle is with the inferior dispersion angle difference of a kind of same one-level of light of wavelength, so when the light of a certain wavelength incides on this binary cycle grating (G), at same chromatic dispersion level time two dispersed light beams that dispersion angle is different of existence, thereby make this binary cycle grating (G) have the double dispersion characteristic.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101949690A (en) * | 2010-08-24 | 2011-01-19 | 中国科学院光电技术研究所 | Optical surface shape detection device and optical surface shape detection method |
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| CN101889189B (en) * | 2008-09-30 | 2012-07-04 | 松下电器产业株式会社 | Surface shape measuring device and method |
| CN101718520B (en) * | 2009-11-16 | 2011-01-05 | 浙江大学 | System for quickly measuring surface quality |
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| DE102011085599B3 (en) * | 2011-11-02 | 2012-12-13 | Polytec Gmbh | Apparatus and method for interferometric measurement of an object |
| CN102538866B (en) * | 2011-12-23 | 2013-05-15 | 北京交通大学 | Surface three-dimensional measurement system with tunable beat-wave linear scanning |
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| CN104504735B (en) * | 2015-01-15 | 2017-03-01 | 中南大学 | A kind of material distribution detection method based on phase recovery |
| DE102016115827A1 (en) * | 2016-08-25 | 2018-03-01 | Nanofocus Ag | Method and device for optical surface measurement with the aid of a chromatic confocal sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101949690A (en) * | 2010-08-24 | 2011-01-19 | 中国科学院光电技术研究所 | Optical surface shape detection device and optical surface shape detection method |
| CN101949690B (en) * | 2010-08-24 | 2012-08-22 | 中国科学院光电技术研究所 | Optical surface shape detection device and optical surface shape detection method |
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