CN105333816B - A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the spectral dispersion whole audience - Google Patents
A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the spectral dispersion whole audience Download PDFInfo
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Abstract
The invention discloses a kind of super online interferometer measuration system of lateral resolution surface three dimension based on the spectral dispersion whole audience, belong to field of optical measurements.The system is by wideband light source, isolator, optical fiber and fibre-optical splice, sphere and cylindrical lens, spectroscope, right-angle prism, diaphragm, grating, speculum, planar array detector, photodetector, fp filter, piezoelectric ceramics, signal transacting, feedback control, data collecting card, computer, translation stage and translation stage driving, as a result output etc. form.Grating by broadband spectral dispersion into wavelength laterally consecutive distribution mating plate, through expand impinge perpendicularly on measured surface carry out measurement of full field；Using two kinds of wavelength measurements there is difference in height to be more than the step of half-wavelength and the surface of big aspect ratio trench；Super lateral resolution measurement is realized using fp filter；Feedback control compensation environmental disturbances make system be adapted to on-line measurement, and measurement result is accurately traceable to wavelength standard, is not influenceed by light source spectral drift.
Description
Technical field
The present invention relates to field of optical measurements, more particularly, to a kind of super lateral resolution table based on the spectral dispersion whole audience
The three-dimensional online interferometer measuration system in face.
Background technology
The existing document being close with this technology has following two：
[1]D.P.Hand,T.A.Carolan,J.S.Barton,and J.D.C.Jones.“Profile
measurement of optically rough surfaces by fiber-optic interferometry”,
Opt.Lett., Vol.18, No.16,1993, and P.1361-1363. (Optics Letters (optics letter), volume 18, the 16th
Phase, P.1361-1363)
The technical principle of document [1] is as shown in Figure 1.
The light that semiconductor laser is sent reaches measurement head, measurement after faraday isolator and optical fiber three-dB coupler
Head is a Feisuo interferometer, and a part of light is used as reference light by fiber end face reflection, and another part light passes through GRIN Lens
After focusing, project on measured surface, come back in system by measured surface reflection and interfered with reference light, interference letter
Number detected by detector, the phase decision of interference signal is in the longitudinal direction height of measured surface measured point；Change the drive of the laser
Streaming current is measured with changing the glow frequency of laser with the light of four kinds of different frequencies to same point, obtains four interference
Signal, because incident light wave frequency is different, the position of four interference signals is mutually just different, adjusts driving current, makes two neighboring dry
The phase difference pi/2 of signal is related to, passes through following formula, you can demodulates the optical path difference D of the point, that is, completes the measurement of single-point：
In(n=1,2,3,4) is the intensity of n-th interference signal, and c is the light velocity, and ν is incident light frequency.
Stepper motor drives measurement head transversal scanning measured surface again, that is, completes the measurement to measured surface.
[2]Dejiao Lin,Xiangqian Jiang,Fang Xie,Wei Zhang,Lin Zhang and Ian
Bennion.“High stability multiplexed fibre interferometer and its application
On absolute displacement measurement and on-line surface metrology ", Optics
Express, Vol.12, Issue 23,2004, P.5729-5734. (Optics Express (optics is express), 2004, the
Volume 12, the 23rd phase, P.5729-5734)
The technical schematic diagram of document [2] is as shown in Figure 2.
This system includes the Michelson's interferometer that two light paths almost overlap.One Michelson's interferometer is to utilize survey
Measure the fiber grating on arm and reference mirror is formed as speculum, for completing steady operation；Another Michelson's interferometer
Be by the use of measure mirror and reference mirror as speculum form, for complete measure work.Because the reference arm of two interferometers is total to
With a speculum, the reference arm light path of two interferometers is completely superposed, and because the measuring arm of two interferometers almost overlaps,
So an interferometer stabilizes, another interferometer also just stabilizes.
It is λ to send wavelength by semiconductor laser0Light be divided into two-way after two three-dB couplers, all the way by light
Fine optical grating reflection, another way are referenced speculum reflection.Two-way reflected light is met and done again after three-dB coupler
Relating to, interference signal is reflected after circulator by another fiber grating, again passes by circulator, is then detected by detector,
The signal that this detector detects moves the reference arm of piezoelectric ceramic tube regulation fibre optic interferometer by servo circuit processing rear-guard
Length, two interfere arms for stablizing interferometer is in quadrature (phase difference is pi/2) all the time, stablize the interference so as to realize
The purpose of instrument.
The wavelength X that tunable laser is sentmVariable light is divided into two-way after two optical fiber three-dB couplers, and one
Road is turned again in interferometer by the reflection of measurement mirror again after optical fiber self-focus lenses, and another way passes through optical fiber self-focus lenses
Turned again to again by reference mirror reflection in interferometer afterwards, two-way light meets after three-dB coupler, forms interference signal, and this is dry
Signal is related to after circulator and fiber grating, is detected by detector, then the displacement of measurement mirror is measured by phase analysis.
Problem and shortage existing for above-mentioned two prior art is：
1st, it is that spot scan measured surface carries out surface three dimension measurement, luminous point needs progress two-dimensional scan to complete surface
Three-dimensional measurement, sweep mechanism is complicated, and measuring speed is slow.
2nd, the lateral resolution of measurement is decided by spot diameter, and spot diameter is limited by diffraction limit, therefore, laterally divides
Resolution is decided by diffraction limit, it is difficult to obtains the measurement result of high lateral resolution.
3rd, the surface of groove for having difference in height to be more than the step of half-wavelength and have big depth-to-width ratio can not be measured.
The content of the invention
The present invention is connected using the wavelength that diffraction grating dispersion broadband spectral is formed in laterally (perpendicular to light wave propagation direction)
The mating plate of continuous distribution, expands into collimated light beam by this mating plate and impinges perpendicularly on measured surface, and whole audience survey is carried out to measured surface
Amount, one-time positioning completes surface three dimension measurement, fast without scanning, measuring speed；Using two kinds of different wavelength respectively to tested
Same measured point measures on surface, and the difference by tuning the two wavelength can obtain different size of composite wave wavelength,
The noncontinuous surface for enabling a system to the groove to difference in height up to the step and depth-to-width ratio of millimeter magnitude more than 50 carries out three-dimensional
Quick measurement；The super lateral resolution in fiber lengths direction is realized using tunable Fabry-Perot wave filters；Utilize feedback control
Influence of the system balance environmental disturbances to measuring system, to improve measuring system antijamming capability, it is allowed to be adapted to on-line measurement；Spread out
Penetrate grating dispersion broadband spectral and form mating plate of the wavelength in laterally consecutive distribution and the fixation of various wavelength locations, enable measurement result
Wavelength standard accurately is traceable to, the drift of light source light spectrum does not influence on measurement result.
The present invention is achieved by the following technical solutions.
A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the spectral dispersion whole audience, by wideband light source
X1, isolator B1, optical fiber F, fiber connector C, spherical convex lens L1, L2, L3, cylindrical convex lens L4, L5, L6, L7, spectroscope
S1, S2, S3, S4, right-angle prism R1, R2, R3；Diaphragm D1, D2, light trap P, diffraction grating G, plane mirror M, translation stage
T1, T2, photoelectric detector PD 1, planar array detector PD2, tunable Fabro-Perot wave filters X2, piezoelectric ceramics PZT, data
Capture card B2, signal processing circuit B3, feedback control circuit B4, computer B5, as a result export B6, translation stage driving B7 compositions.
The light that wideband light source X1 is sent is exported, by sphere after isolator B1 and optical fiber F by fiber connector C
Convex lens L1 collimates the collimated light beam to be formed after spherical convex lens L2, is focused on spherical convex lens L2 rear focal point,
The circular hole diaphragm D1 of focus after positioned at L2, then the parallel beam incident to be formed is collimated to right-angled edge by spherical convex lens L3
On mirror R1, turned to through right-angle prism R1, reach spectroscope S1, transmission and reflection two-beam are divided into by spectroscope S1, wherein transmiting
Light reaches spectroscope S2, then is divided into transmission and reflection two-beam by spectroscope S2, and the reflected beams are reflected system, transmitted light beam
Incided along cylindrical convex lens L4 primary optical axis on cylindrical convex lens L4, be focused on focal point after cylindrical convex lens L4, cylinder
Convex lens L4 rear focus on diffraction grating G diffraction surfaces, so, light beam is focused on diffraction grating G, then by diffraction light
Grid G dispersions, wavelength is formed in fan-shaped mating plate laterally continuously distributed (perpendicular to light wave propagation direction).This fan-shaped mating plate is by cylinder
Convex lens L5 is collimated into parallel mating plate of the wavelength in laterally consecutive distribution, and this parallel mating plate passes through two confocal cylindrical convex lens L6
Expanded with L7 and reach spectroscope S3 for collimated light beam, this collimated light beam, be divided into transmission and reflection two-beam, wherein transmissive parallel
Light is incided on plane mirror M, by plane mirror M reflection, turns again to spectroscope S3, then is reflected by spectroscope S3 and thoroughly
Penetrate into two beam collimated light beams.
It is incident upon from cylindrical convex lens L7 and by the spectroscope S3 collimated light beams reflected on measured surface, on measured surface
Different measured points is reflected back the light of different wave length.Reflected light arrives again at spectroscope S3, and the mirror S3 that is split be divided into transmission and
Reflect two beam directional lights.Wherein transmissive parallel light beam with by reaching spectroscope S3 and the mirror S3 that is split after plane mirror M reflection
The directional light of reflection meets and interfered, and the light of each wavelength forms the interference signal of oneself, and this interference collimated light beam reaches
Spectroscope S4, and the mirror S4 that is split is divided into two beam collimated light beams of transmission and reflection.Transmissive parallel beam orthogonal incides Fabry-
On a Perot wave filters X2 parallel flat, meet that the light of Fabry-Perot wave filter X2 coherent phase elongate member wavelength is able to
Through adjacent wavelength is filtered at intervals of the light of the pectination wavelength of Fabry-Perot wave filters free spectral range through Fabry-Perot
Ripple device X2, the discontinuous pectination collimated light beam of cross section light energy is formed, pixel detecting is corresponded to by planar array detector PD2.This
The interference signal of group pectination wavelength is by the reflected light and plane reflection of one group of equally spaced each point by survey line of measured surface
Mirror M reflected light meets what is formed, and the interference signal of each wavelength carries longitudinal information of corresponding measured point in pectination wavelength.Face
The interference signal that array detector PD2 is detected inputs computer B5 after data collecting card B2.
In order to be measured to other points, translation stage T2 drives a Fabry-Perot wave filters X2 parallel flat to move
It is dynamic, so as to adjust Fabry-Perot wave filters X2 chamber length, make another group to meet Fabry-Perot wave filter coherent phase strips
The pectination wavelength of part by planar array detector PD2 by being detected, the interference signal that planar array detector PD2 is detected is adopted by data
Computer B5 is inputted after truck B2.The interference signal of this group of pectination wavelength is equally spaced tested by another group on measured surface
The reflected light of each point on line meets what is formed with plane mirror M reflected light, and therefore, each wavelength is dry in pectination wavelength
Relate to longitudinal information that signal carries corresponding measured point.So repeat, make on measured surface the reflected light of each measured point with
The plane mirror M reflected light interference signal to be formed that meets all is detected by planar array detector PD2.Computer B5 is to interference signal
Processing is demodulated, realizes the surface measurement of full field for being not more than half-wavelength to longitudinal difference in height of two adjacent measured points, measurement knot
Fruit is by result output B6 outputs.
Due to light trap P effect so that interferometer can not be reached from the light beam of spectroscope S1 reflections, therefore, not to surveying
Amount works, and now, only reaches interferometer and measured surface from the light beam of spectroscope S1 transmissions, participates in completing measurement work.
It is more than the measurement of the step of half-wavelength and the noncontinuous surface of groove for longitudinal difference in height of two adjacent measured points,
First, according to above step, planar array detector PD2 detects the interference letter of the reflected light formation of each measured point on measured surface
Number, and interference signal is inputted into computer B5 after data collecting card B2.Then, light trap P is moved to saturating from spectroscope S1
The light-beam position (as illustrated, position of the dotted line between spectroscope S1 and S2) penetrated, light trap P blocks to be transmitted from spectroscope S1
Light beam, be allowed to be not involved in measuring.After being turned to by the light beam that spectroscope S1 reflects by right-angle prism R2 and R3, spectroscope is reached
S2, the mirror S2 that is split are divided into reflection and transmission two light beams, and transmitted light beam projects measuring system, and the reflected beams are convex to deviate cylinder
Lens L4 primary optical axis but direction parallel to cylindrical convex lens L4 primary optical axis is incided on cylindrical convex lens L4, is focused onto
In cylindrical convex lens L4 rear focus.Because cylindrical convex lens L4 rear focus is on diffraction grating G diffraction surfaces, so, light beam
It is focused on diffraction grating G diffraction surfaces, then by diffraction grating G dispersions, forms sectored light of the wavelength in laterally consecutive distribution
Piece, this fan-shaped mating plate are collimated into parallel mating plate of the wavelength in laterally consecutive distribution by cylindrical convex lens L5.Because this Shu Guang is spreading out
The incidence angle penetrated on grating G and that Shu Guang (light transmitted from spectroscope S1 and spectroscope S2 for crossing cylindrical convex lens L4 primary optical axis
Beam) diffraction grating G incidence angle it is different, so the two panels wavelength that this two-beam is formed after diffraction grating G diffraction is in horizontal stroke
Into continuously distributed fan-shaped mating plate, every kind of wavelength is different in the locus of this two panels sector mating plate；Collimated by lens L5
The wavelength of formation is in the parallel wave plate of spatial distribution, and every kind of wavelength is in the position of the parallel mating plate of two panels in transversion malposition.This is parallel
Mating plate expands by two confocal cylindrical convex lens L6 and L7 and reaches spectroscope S3 for collimated light beam, this collimated light beam, be divided into
Transmission and reflection two-beam, wherein transmissive parallel light are incided on plane mirror M, by plane mirror M reflection, turned again to
Spectroscope S3, then reflected by spectroscope S3 and transmitted into two beam collimated light beams.It is incident upon by the spectroscope S3 collimated light beams reflected
On measured surface, different measured points is reflected back the light of different wave length on measured surface.Reflected light arrives again at spectroscope S3, and
The mirror S3 that is split is divided into two beam directional lights of transmission and reflection.Wherein transmitted light beam by plane mirror M reflection with reaching spectroscope
S3 is simultaneously met and interfered by the S3 directional lights reflected, and the light of every kind of wavelength forms the interference signal of oneself, and this interference is parallel
Light beam reaches spectroscope S4, and the mirror S4 that is split is divided into two beam collimated light beams of transmission and reflection.Transmitted light beam impinges perpendicularly on
On a Fabry-Perot wave filters X2 parallel flat, meet Fabry-Perot wave filter X2 coherent phase elongate member wavelength
Light is passed through, and adjacent wavelength passes through Fabry- at intervals of the light of the pectination wavelength of Fabry-Perot wave filters free spectral range
Perot wave filter X2, the discontinuous pectination collimated light beam of cross section light energy is formed, corresponding to pixel by planar array detector PD2 visits
Survey.The interference signal that planar array detector PD2 is detected inputs computer B5 after data collecting card B2.This group of pectination wavelength
Interference signal be by the anti-of reflected light and the plane mirror M of one group of equally spaced discrete each point by survey line of measured surface
Penetrate light and meet what is formed, the interference signal of each wavelength carries longitudinal information of corresponding measured point in pectination wavelength.
In order to be measured to other points, one of longitudinal translation platform T3 drive Fabry-Perot wave filters X2 is parallel flat
Plate moves, and so as to adjust Fabry-Perot wave filters X2 chamber length, makes another group to meet Fabry-Perot wave filter coherent phases
The pectination wavelength of elongate member by planar array detector PD2 by being detected, the interference signal that planar array detector PD2 is detected passes through number
According to input computer B5 after capture card B2.The interference signal of this group of pectination wavelength is equally spaced by another group on measured surface
The discrete each point reflected light by survey line and plane mirror M reflected light meet what is formed, therefore, each ripple in pectination wavelength
Long interference signal carries longitudinal information of corresponding measured point.So repeat, make the anti-of each measured point on measured surface
The reflected light interference signal to be formed that meets for penetrating light and plane mirror M is all detected by planar array detector PD2, and face battle array is detected
The interference signal that device PD2 is detected inputs computer B5 after data collecting card B2.
Computer B5 is demodulated processing to the interference signal of input, realize to have difference in height be more than half-wavelength step and
The surface measurement of full field of deep trouth, measurement result are exported by result output B6.Because the transverse direction of every kind of wavelength in two panels sector mating plate
Position is different, is so achieved that and same measured point on measured surface is measured respectively using two kinds of different wavelength.
The interference signal of two kinds of wavelength is demodulated, realizes the three-dimensional to there is difference in height to be more than the step of half-wavelength and the surface of deep trouth
Measurement.
The interference collimated light beam reflected by spectroscope S4 reaches slit diaphragm D2, and the every bit of this light is different wavelength
The interference signal of formation, photoelectric detector PD 1 is reached through slit diaphragm D2 interference signal, is detected by photoelectric detector PD 1.
The interference signal that PD1 is detected is after signal processing circuit B3, by feedback control circuit B4 processing, feedback control circuit B4's
Output signal is added on the piezoelectric ceramics PZT in the reference arm of interferometer, the light of the reference arm of driving PZT regulation interferometers
Journey, two interfere arms of interferometer is maintained at quadrature, influence of the environmental disturbances to interferometer is thus eliminated, so as to reach
The purpose of stably measured system, measuring system is set to be adapted to on-line measurement.
Further, as a kind of preferred scheme, the wavelength formed using diffraction grating G dispersions broadband spectral is laterally consecutive
The fan-shaped mating plate of distribution, this fan-shaped mating plate is expanded into collimated light beam and impinged perpendicularly on measured surface, measured surface is carried out
Whole audience three-dimensional measurement, only needs one-time positioning to complete measured surface three-dimensional measurement, and measuring speed is fast.
Further, as a kind of preferred scheme, using the light of two kinds of wavelength respectively to same measured point on measured surface
Measure, by demodulating the interference signal of both wavelength, measuring system is more than the step of half-wavelength to difference in height
And the noncontinuous surface of the groove of big depth-to-width ratio carries out three-dimensional measurement.
Further, as a kind of preferred scheme, form wavelength using diffraction grating G dispersions broadband spectral and continuously divide in space
The constant collimated light beam in the locus of cloth and various wavelength, enables measurement result to be accurately traceable to wavelength standard, light source light
Frequency bias does not influence on measurement result.Which not only improves the ability of the environmental disturbances such as measuring system resisting temperature drift, and
Solid foundation has been established in acquisition to high measurement accuracy.
Further, as a kind of preferred scheme, using Fabry-Perot wave filters X2 by wavelength in laterally consecutive distribution
Collimated light beam is converted into energy in laterally discontinuous pectination collimated light beam, is differentiated with the transverse direction improved in wave arrangement direction
Rate.
Further, as a kind of preferred scheme, it is added in using feedback control circuit B4 output signal positioned at interferometer
On piezoelectric ceramics PZT in reference arm, driving PZT adjusts the light path of the reference arm of interferometer, makes two interfere arms of interferometer
Quadrature is maintained at, so as to eliminate influence of the environmental disturbances to interferometer, the antijamming capability of measuring system is improved, reaches steady
Determine the purpose of measuring system, measuring system is adapted to on-line measurement.
Beneficial effects of the present invention mainly have：
1. wavelength is formed laterally continuously distributed (perpendicular to light wave transmissions direction) using diffraction grating G dispersions broadband spectral
Fan-shaped mating plate, this fan-shaped mating plate is expanded into collimated light beam, this collimated light beam is impinged perpendicularly on measured surface, to be tested table
Face carries out whole audience three-dimensional measurement.One-time positioning completes surface three dimension measurement, and measuring speed is fast.
2. same measured point on measured surface is measured respectively using the light of two kinds of wavelength, by demodulating both
The interference signal of wavelength, enable measuring system to difference in height be more than half-wavelength step and big depth-to-width ratio groove it is discontinuous
Surface carries out three-dimensional measurement.
3. wavelength is formed in laterally consecutive distribution and the locus of various wavelength using diffraction grating G dispersions broadband spectral
Constant collimated light beam, enables measurement result to be accurately traceable to wavelength standard, and light source light spectrum drift does not have shadow to measurement result
Ring.
4. wavelength is converted into energy in horizontal stroke in the collimated light beam of laterally consecutive distribution using Fabry-Perot wave filters X2
To discontinuous pectination collimated light beam, to improve the lateral resolution in wave arrangement direction.
5. the piezoelectric ceramics PZT in the reference arm of interferometer is added in using feedback control circuit B4 output signal
On, the light path of the reference arm of driving PZT regulation interferometers, two interfere arms of interferometer is maintained at quadrature, so as to disappear
Except influence of the environmental disturbances to interferometer, the antijamming capability of measuring system is improved, reaches the purpose of stably measured system, makes survey
Amount system is adapted to on-line measurement.
Brief description of the drawings
Fig. 1 is the schematic diagram of prior art literature [1]；
Fig. 2 is the schematic diagram of prior art literature [2]；
Fig. 3 is principle of the invention figure.
Embodiment
With reference to Fig. 3 and embodiment, the invention will be further described.
As shown in figure 3, system is by wideband light source X1, isolator B1, optical fiber F, fiber connector C, spherical convex lens L1,
L2, L3, cylindrical convex lens L4, L5, L6, L7, spectroscope S1, S2, S3, S4, right-angle prism R1, R2, R3, diaphragm D1, D2, diffraction
Grating G, light trap P, plane mirror M, translation stage T1, T2, photoelectric detector PD 1, planar array detector PD2 is tunable
Fabro-Perot wave filter X2, piezoelectric ceramics PZT, data collecting card B2, signal processing circuit B3, feedback control circuit B4, meter
Calculation machine B5, as a result export B6, translation stage driving B7 compositions.
The light that wideband light source X1 is sent passes through isolator B1 and optical fiber F, is exported by fiber connector C, by sphere convex lens
Mirror L1 collimates the collimated light beam to be formed after spherical convex lens L2, is focused on spherical convex lens L2 rear focal point, passes through
The circular hole diaphragm D1 of focus after spherical convex lens L2, then collimate the parallel beam incident to be formed by spherical convex lens L3 and arrive
Right-angle prism R1 is turned to, and reaches spectroscope S1, is divided into transmission and reflection two-beam by spectroscope S1, wherein transmitted light reaches light splitting
Mirror S2, then transmission and reflection two-beam are divided into by spectroscope S2, the reflected beams are reflected system.Transmitted light beam is along cylinder convex lens
Mirror L4 primary optical axis is incided on cylindrical convex lens L4, is focused on focal point after cylindrical convex lens L4, cylindrical convex lens L4's
Focus is on diffraction grating G diffraction surfaces afterwards, so, light beam is focused on diffraction grating G, then by diffraction grating G dispersions, shape
Into wavelength in the continuously distributed fan-shaped mating plate in space.This fan-shaped mating plate is collimated into wavelength by cylindrical convex lens L5 and continuously divided in space
The parallel mating plate of cloth, this parallel mating plate are expanded as collimated light beam, this collimated light beam by two confocal cylindrical convex lens L6 and L7
Spectroscope S3 is reached, is divided into transmission and reflection two-beam, wherein transmissive parallel light is incided on plane mirror M, by plane
Speculum M reflection, spectroscope S3 is turned again to, then reflected by spectroscope S3 and transmitted into two beam collimated light beams.By spectroscope S3
The collimated light beam of reflection is incident upon on measured surface, and different measured points is reflected back the light of different wave length on measured surface.Reflection
Light arrives again at spectroscope S3, and the mirror S3 that is split is divided into two beam directional lights of transmission and reflection.Wherein transmitted light beam with by plane
Speculum M reflection reaches spectroscope S3 and the directional light of the mirror S3 that is split reflections meets and interfered, the light shape of each wavelength
Into the interference signal of oneself, this interference collimated light beam reaches spectroscope S4, and the mirror S4 that is split is divided into transmission and two beams of reflection are put down
Row light beam.Transmitted light beam is impinged perpendicularly on a Fabry-Perot wave filters X2 parallel flat, meets Fabry-Perot
The light of wave filter X2 coherent phase elongate member wavelength is passed through, and adjacent wavelength is at intervals of Fabry-Perot wave filter free spectrums
The light of the pectination wavelength in area passes through Fabry-Perot wave filter X2, forms the discontinuous pectination collimated light beam of cross section light energy,
Pixel detecting is corresponded to by planar array detector PD2, the interference signal that planar array detector PD2 is detected is defeated after data collecting card B2
Enter computer B5.The interference signal of this group of pectination wavelength is by the anti-of one group of equally spaced each point by survey line of measured surface
The reflected light for penetrating light and plane mirror M meets what is formed, and the interference signal of each wavelength carries corresponding tested in pectination wavelength
Longitudinal information of point.
In order to be measured to other points, one of longitudinal translation platform T3 drive Fabry-Perot wave filters X2 is parallel flat
Plate moves, and so as to adjust Fabry-Perot wave filters X2 chamber length, makes another group to meet Fabry-Perot wave filter coherent phases
The pectination wavelength of elongate member by planar array detector PD2 by being detected, the interference signal of this group of pectination wavelength is by measured surface
The upper another group of equally spaced reflected light by each point on survey line and plane mirror M reflected light meet what is formed, therefore, pectination
The interference signal of each wavelength carries longitudinal information of corresponding measured point in wavelength.So repeat, make each on measured surface
The reflected light of individual measured point and plane mirror M the reflected light interference signal to be formed that meets all are detected by planar array detector PD2,
And the interference signal that planar array detector PD2 is detected is inputted into computer B5 after data collecting card B2.
In order to demodulate longitudinal information of measured point from interference signal, it is necessary to enter to the optical path difference of interferometer during measurement
Row linear modulation.Therefore, during planar array detector PD2 detects interference signal, longitudinal translation platform T1 drives testee
Longitudinal direction (perpendicular to measured surface direction) is linearly mobile, the optical path difference of linear modulation interferometer.Corresponding to planar array detector PD2N
× M pixel, points are tested on measured surface as N × M, measured point is arranged as N rows M row, and j-th of corresponding i-th row is tested
The interference signal of point is represented by：
In formula：A(i,j)0It is the DC quantity of interference signal, A(i,j)It is the visibility of interference signal, △(i,j)It is that interferometer exists
The optical path difference of j-th of measured point of the i-th row, n are air refractions, and v is the translational speed for vertically moving platform T1, and t is longitudinal shifting
The time of dynamic platform T1 modulation optical path differences, λjIt is the wavelength that jth is tested point reflection.
The interference signal of+1 measured point of jth of corresponding i-th row is represented by：
In formula：A(i,j+1)0It is the DC quantity of interference signal, A(i,j+1)It is the visibility of interference signal, △(i,j+1)It is
Michelson interferometers are in the optical path difference of+1 measured point of jth of the i-th row, and n is air refraction, and v vertically moves platform T1
Translational speed, t are to vertically move the time that platform T1 modulates optical path difference, λj+1It is the wavelength that jth+1 is tested point reflection.
When wavelength impinge perpendicularly in the continuously distributed collimated light beam in transverse direction (direction of propagation of ripple) direction it is tunable
When on a Fabry-Perot wave filters X2 parallel flat, only meet that the light of the wavelength of (3) formula coherent phase elongate member is saturating
Cross,
2nd=k λ (3)
In formula：D is Fabry-Perot wave filters X2 chamber length, and n is air refraction, and k is positive integer, and λ is light wave ripple
It is long.Work as wavelength XjWhen meeting Fabry-Perot wave filters X2 coherent phase elongate member, the interference signal of (1) formula will transmit through
Fabry-Perot wave filters, and the pixel detecting as corresponding to locus on planar array detector PD2, the signal detected are：
In formula：T is the transmissivity on the relative two sides of Fabry-Perot wave filter X2 two parallel plates, R Fabry-
The reflectivity on the relative two sides of Perot wave filter X2 two parallel plates, I(i,j)To incide Fabry-Perot wave filters X2 light
By force.
(4) in formula, because T, R are constants, as the optical path difference of interferometer is by linear modulation, I(i,j)Become in cosine rule
Change, the signal that planar array detector PD2 is detected also changes in cosine rule.Similarly, the correspondence that planar array detector PD2 is detected
The signal of the measured point of jth+1 also changes in cosine rule.Compare the phase difference of this two-way cosine signal, further according to phase difference
Measure longitudinal difference in height of j-th of measured point of the i-th row and+1 measured point of jth on measured surface.So repeat, demodulate each pair
Longitudinal difference in height of adjacent measured point, that is, realize the surface three dimension for being not more than half-wavelength to longitudinal difference in height of two adjacent measured points
Measurement.
It is more than the measurement of the step of half-wavelength and the noncontinuous surface of groove for longitudinal difference in height of two adjacent measured points,
First, according to above step, planar array detector PD2 detects the interference signal of each measured point on measured surface, and will interference
Signal inputs computer B5 after data collecting card B2.Then, light trap P is moved into the light-beam position from spectroscope S1 transmissions
(as illustrated, position of the dotted line between spectroscope S1 and S2), light trap P block the light beam from spectroscope S1 transmissions, are allowed to
It is not involved in measuring, after being turned to by the light beam that spectroscope S1 reflects by right-angle prism R2 and R3, reaches spectroscope S2, be split mirror S2
It is divided into reflection and transmission two light beams, transmitted light beam projects measuring system, and the reflected beams are to deviate cylindrical convex lens L4 key light
Axle but direction parallel to cylindrical convex lens L4 primary optical axis is incided on cylindrical convex lens L4, is focused onto cylindrical convex lens L4
Rear focus on.Because cylindrical convex lens L4 rear focus is on diffraction grating G diffraction surfaces, so, light beam is focused on diffraction
On grating G diffraction surfaces, then by diffraction grating G dispersions, wavelength is formed in the fan-shaped mating plate of laterally consecutive distribution, this fan-shaped mating plate
Parallel mating plate of the wavelength in laterally consecutive distribution is collimated into by cylindrical convex lens L5.Due to this Shu Guang entering on diffraction grating G
Firing angle with cross that Shu Guang (light beam transmitted from S1 and S2) of cylindrical convex lens L4 primary optical axis diffraction grating G incidence angle not
Together, so the two panels wavelength that is formed after diffraction grating G diffraction of this two-beam is in the fan-shaped mating plate of laterally consecutive distribution, often
Individual wavelength is different in the locus of this two panels sector mating plate；The wavelength to be formed is collimated laterally consecutive by cylindrical convex lens L5
The parallel wave plate of distribution, every kind of wavelength are equipped with transversion malposition in the space bit of the parallel mating plate of two panels.This parallel mating plate passes through two
Confocal cylindrical convex lens L6 and L7 expands reaches spectroscope S3 for collimated light beam, this collimated light beam, is divided into transmission and reflection two
Shu Guang, wherein transmissive parallel light are incided on plane mirror M, by plane mirror M reflection, turn again to spectroscope S3, then
Reflected by spectroscope S3 and transmitted into two beam collimated light beams.It is incident upon by the spectroscope S3 collimated light beams reflected on measured surface,
Different measured points is reflected back the light of different wave length on measured surface.Reflected light arrives again at spectroscope S3, and the mirror S3 that is split
It is divided into two beam directional lights of transmission and reflection.Wherein transmitted light beam is with being reached spectroscope S3 by plane mirror M reflection and being split
The directional light of mirror S3 reflections meets and interfered, and the light of each wavelength forms the interference signal of oneself, this interference collimated light beam
Spectroscope S4 is reached, and the mirror S4 that is split is divided into two beam collimated light beams of transmission and reflection.Transmitted light beam impinges perpendicularly on Fabry-
On a Perot wave filters X2 parallel flat, meet that the light of Fabry-Perot wave filter X2 coherent phase elongate member wavelength is able to
Through adjacent wavelength is filtered at intervals of the light of the pectination wavelength of Fabry-Perot wave filters free spectral range through Fabry-Perot
Ripple device X2, cross section light energy pectination collimated light beam is formed, pixel detecting, planar array detector PD2 are corresponded to by planar array detector PD2
The interference signal detected inputs computer B5 after data collecting card B2.The interference signal of this group of pectination wavelength is by quilt
Survey the equally spaced discrete reflected light by each point on survey line in one group of surface and plane mirror M reflected light meets what is formed, comb
The interference signal of each wavelength carries longitudinal information of corresponding measured point in shape wavelength.
In order to be measured to other points, one of longitudinal translation platform T3 drive Fabry-Perot wave filters X2 is parallel flat
Plate moves, and so as to adjust Fabry-Perot wave filters X2 chamber length, makes another group to meet Fabry-Perot wave filter coherent phases
The pectination wavelength of elongate member by planar array detector PD2 by being detected, the interference signal that planar array detector PD2 is detected passes through number
According to input computer B5 after capture card B2.The interference signal of this group of pectination wavelength is equally spaced by another group on measured surface
The discrete reflected light by each point on survey line and plane mirror M reflected light meet what is formed, therefore, each ripple in pectination wavelength
Long interference signal carries longitudinal information of corresponding measured point.So repeat, make the anti-of each measured point on measured surface
The reflected light interference signal to be formed that meets for penetrating light and plane mirror M is all detected by planar array detector PD2, planar array detector
The interference signal that PD2 is detected inputs computer B5 after data collecting card B2.
Because the locus of each wavelength is different in two panels sector mating plate, so it is achieved that and utilizes two different ripples
Length measures to same measured point on measured surface respectively.
Corresponding planar array detector has N × M pixel detecting to interference signal, just has N × M measured point on measured surface.
When the light beam that is transmitted by spectroscope S1 participates in measurement, interference that j-th of pixel detecting of planar array detector PD2 the i-th row arrives
Signal phase is：
When the light beam that is reflected by spectroscope S1 participates in measurement, the same pixel of planar array detector PD2 same a line (the
J-th of pixel of i rows) phase of interference signal that detects is：
In formula (5) and formula (6)：WithIt is the phase of interference signal,WithIt is interference signal phase
Fractional part (i.e. initial phase), m1(i,j)And m2(i,j)It is positive integer, △(i,j)It is interferometer in j-th of measured point of the i-th row
Optical path difference, λ1jAnd λ2jIt is the wavelength for inciding j-th of measured point.
Similarly, when the light beam transmitted by spectroscope S1 participates in measurement, the jth+1 of planar array detector PD2 the i-th row
Pixel detecting to the phase of interference signal be：
When the light beam reflected by spectroscope S1 participates in measurement ,+1 pixel of jth of planar array detector PD2 the i-th row is visited
The phase of the interference signal measured is：
In formula (7) and formula (8)：WithIt is the phase of interference signal,WithIt is interference letter
The fractional part (i.e. initial phase) of number phase, m1(i,j+1)And m2(i,j+1)It is positive integer, △(i,j+1)It is jth of the interferometer in the i-th row
The optical path difference of+1 measured point, λ1(j+1)And λ2(j+1)It is the wavelength for inciding+1 measured point of jth.
Longitudinal difference in height of+1 measured point of the jth of the i-th row and j-th of measured point is on measured surface：
In formula：N is air refraction, i=1,2 ..., N, j=1,2 ..., M-1.
Longitudinal difference in height of the adjacent measured point of each pair is demodulated, that is, realizes that longitudinal difference in height of two adjacent measured points is more than half
The measurement of the step of wavelength and the noncontinuous surface of groove.
The interference collimated light beam reflected by spectroscope S4 reaches slit diaphragm D2, and the every bit of this light is different wavelength
The interference signal of formation, photoelectric detector PD 1 is reached through slit diaphragm D2 interference signal, is detected by photoelectric detector PD 1.
The interference signal that PD1 is detected is after signal processing circuit B3, by feedback control circuit B4 processing, feedback control circuit B4's
Output signal is added on the piezoelectric ceramics PZT in the reference arm of interferometer, the light of the reference arm of driving PZT regulation interferometers
Journey, two interfere arms of interferometer is maintained at quadrature, influence of the environmental disturbances to interferometer is thus eliminated, so as to reach
The purpose of stably measured system, measuring system is set to be adapted to on-line measurement.
Realization in order to demonstrate the invention, describes above-mentioned instantiation, but other changes of the present invention and repaiies
Change, it will be apparent to those skilled in the art that, appointing in the range of essence and basic principle of the present invention without disclosure
What modification/change imitates conversion to belong to claims of the invention.
Claims (2)
- A kind of 1. super online interferometer measuration system of lateral resolution surface three dimension based on the spectral dispersion whole audience, it is characterized in that by width Band light source X1, isolator B1, optical fiber F, fiber connector C, three spherical convex lens L1, L2, L3, four cylindrical convex lens L4, L5, L6, L7, four spectroscopes S1, S2, S3, S4, three right-angle prisms R1, R2, R3, two diaphragms D1, D2, light trap P, spread out Penetrate grating G, plane mirror M, two translation stage T1, T2, photoelectric detector PD 1, planar array detector PD2, tunable Fabro- Perot wave filters X2, piezoelectric ceramics PZT, data collecting card B2, signal processing circuit B3, feedback control circuit B4, computer B5, result output B6, translation stage driving B7 compositions；The light that wideband light source X1 is sent is after isolator B1 and optical fiber F, by light Fine connector C outputs, collimate the collimated light beam to be formed after spherical convex lens L2 by spherical convex lens L1, are focused on ball Face convex lens L2 rear focal point, the circular hole diaphragm D1 of focus after positioned at spherical convex lens L2, then by spherical convex lens L3 collimates the parallel beam incident to be formed to right-angle prism R1, is turned to through right-angle prism R1, spectroscope S1 is reached, by spectroscope S1 is divided into transmission and reflection two-beam, and wherein transmitted light reaches spectroscope S2, then is divided into two beams of transmission and reflection by spectroscope S2 Light, the reflected beams are reflected system, and primary optical axis of the transmitted light beam along cylindrical convex lens L4 is incided on cylindrical convex lens L4, quilt Focus on focal point after cylindrical convex lens L4, cylindrical convex lens L4 rear focus on diffraction grating G diffraction surfaces, so, light Beam is focused on diffraction grating G, then by diffraction grating G dispersions, is formed wavelength and connected in the transverse direction perpendicular to light wave propagation direction The fan-shaped mating plate of continuous distribution, this fan-shaped mating plate are collimated into wavelength in the transverse direction perpendicular to light wave propagation direction by cylindrical convex lens L5 Continuously distributed parallel mating plate, this parallel mating plate are expanded as collimated light beam by two confocal cylindrical convex lens L6 and L7, and this is flat Row light beam reaches spectroscope S3, is divided into transmission and reflection two-beam, and wherein transmissive parallel light is incided on plane mirror M, By plane mirror M reflection, spectroscope S3 is turned again to, then is reflected by spectroscope S3 and is transmitted into two beam collimated light beams；Come from Cylindrical convex lens L7 is simultaneously incident upon on measured surface, different measured point on measured surface by the spectroscope S3 collimated light beams reflected Be reflected back the light of different wave length, reflected light arrives again at spectroscope S3, and the mirror S3 that is split be divided into transmission with reflection two beams it is parallel Light, wherein transmissive parallel light beam and the directional light phase reflected by reaching spectroscope S3 and the mirror S3 that is split after plane mirror M reflection Meet and interfere, the light of each wavelength forms the interference signal of oneself, and this interference collimated light beam reaches spectroscope S4, and is divided Light microscopic S4 is divided into two beam collimated light beams of transmission and reflection, and transmissive parallel beam orthogonal incides Fabry-Perot wave filters X2's On one parallel flat, meet that the light of Fabry-Perot wave filter X2 coherent phase elongate member wavelength is passed through, between adjacent wavelength The light for being divided into the pectination wavelength of Fabry-Perot wave filter X2 free spectral ranges passes through Fabry-Perot wave filter X2, is formed horizontal The discontinuous pectination collimated light beam of section light energy, pixel detecting, planar array detector PD2 detections are corresponded to by planar array detector PD2 The interference signal arrived inputs computer B5 after data collecting card B2, and the interference signal of this group of pectination wavelength is by being tested table The reflected light of the equally spaced each point by survey line in one group of face meets what is formed with plane mirror M reflected light, pectination wavelength In the interference signal of each wavelength carry longitudinal information of corresponding measured point；In order to be measured to other points, translation stage T2 bands Dynamic Fabry-Perot wave filters X2 parallel flat movement, so as to adjust Fabry-Perot wave filters X2 chamber length, makes Another group of pectination wavelength for meeting Fabry-Perot wave filter X2 coherent phase elongate members by, detected by planar array detector PD2, The interference signal that planar array detector PD2 is detected inputs computer B5 after data collecting card B2, this group of pectination wavelength Interference signal is the reflection by the reflected light of another group of equally spaced each point by survey line on measured surface and plane mirror M Light meets what is formed, and the interference signal of each wavelength carries longitudinal information of corresponding measured point in pectination wavelength；So repeat, The reflected light of each measured point and plane mirror M reflected light is set on measured surface to meet the interference signal quilt cover to be formed Array detector PD2 is detected；Computer B5 is demodulated processing to interference signal, realizes longitudinal difference in height to two adjacent measured points No more than the surface measurement of full field of half-wavelength, measurement result is exported by result output B6；Due to light trap P effect so that from The light beam of spectroscope S1 reflections can not reach interferometer, therefore, measurement not worked, and now, only be transmitted from spectroscope S1 Light beam reach interferometer and measured surface, participate in completing measurement work；It is more than for longitudinal difference in height of two adjacent measured points The measurement of the step of half-wavelength and the noncontinuous surface of groove, first, according to above step, planar array detector PD2 detect by The interference signal that the reflected light of each measured point on surface is formed is surveyed, and interference signal is inputted to meter after data collecting card B2 Calculation machine B5, then, light trap P is moved into the light-beam position from spectroscope S1 transmissions, light trap P is blocked from spectroscope S1 transmissions Light beam, it is allowed to be not involved in measuring；After being turned to by the light beam that spectroscope S1 reflects by right-angle prism R2 and right-angle prism R3, reach and divide Light microscopic S2, the mirror S2 that is split are divided into reflection and transmission two light beams, and transmitted light beam projects measuring system, and the reflected beams are to deviate post Face convex lens L4 primary optical axis but direction parallel to cylindrical convex lens L4 primary optical axis is incided on cylindrical convex lens L4, is gathered It is burnt in cylindrical convex lens L4 rear focus, because cylindrical convex lens L4 rear focus is on diffraction grating G diffraction surfaces, so, Light beam is focused on diffraction grating G diffraction surfaces, then by diffraction grating G dispersions, forms wavelength perpendicular to light wave propagation side To laterally consecutive distribution fan-shaped mating plate, this fan-shaped mating plate is collimated into wavelength perpendicular to light wave propagation by cylindrical convex lens L5 The parallel mating plate of the laterally consecutive distribution in direction；Because incidence angles of this Shu Guang on diffraction grating G is with crossing cylindrical convex lens L4 That beam of primary optical axis is different with incidence angle of the light that spectroscope S2 is transmitted in diffraction grating G from spectroscope S1, so this two-beam Fan-shaped mating plate of the two panels wavelength formed after diffraction grating G diffraction in the laterally consecutive distribution perpendicular to light wave propagation direction In, every kind of wavelength is different in the locus of this two panels sector mating plate, collimates to form wavelength vertical by cylindrical convex lens L5 In the parallel wave plate of two panels of the laterally consecutive distribution in light wave propagation direction, every kind of wavelength is in the position of the parallel mating plate of two panels in transverse direction Dislocation, this parallel mating plate expand by two confocal cylindrical convex lens L6 and L7 and reach light splitting for collimated light beam, this collimated light beam Mirror S3, it is divided into transmission and reflection two-beam, wherein transmissive parallel light is incided on plane mirror M, anti-by plane mirror M Penetrate, turn again to spectroscope S3, then reflected by spectroscope S3 and transmitted into two beam collimated light beams, reflected by spectroscope S3 parallel Light beam is incident upon on measured surface, and different measured points is reflected back the light of different wave length on measured surface, and reflected light arrives again at Spectroscope S3, and the mirror S3 that is split be divided into transmission and reflection two beam directional lights, wherein transmitted light beam with by plane mirror M reflection The directional light for reaching spectroscope S3 and the mirror S3 that is split reflections meets and interfered, and the light of every kind of wavelength forms the interference of oneself Signal, this interference collimated light beam reaches spectroscope S4, and the mirror S4 that is split is divided into two beam collimated light beams of transmission and reflection, transmitted light Beam is impinged perpendicularly on a Fabry-Perot wave filters X2 parallel flat, meets Fabry-Perot wave filter X2 coherent phases The light of elongate member wavelength is passed through, comb wave of the adjacent wavelength at intervals of Fabry-PerotX2 wave filter X2 free spectral ranges Long light passes through Fabry-Perot wave filter X2, forms the discontinuous pectination collimated light beam of cross section light energy, is detected by face battle array Device PD2 corresponds to pixel detecting, and the interference signal that planar array detector PD2 is detected inputs computer after data collecting card B2 B5, the interference signal of this group of pectination wavelength be by one group of equally spaced each point by survey line of measured surface reflected light with it is flat Face speculum M reflected light meets what is formed, and the interference signal of each wavelength carries the longitudinal direction of corresponding measured point in pectination wavelength Information；In order to be measured to other points, longitudinal translation platform T3 drives a Fabry-Perot wave filters X2 parallel flat to move It is dynamic, so as to adjust Fabry-Perot wave filters X2 chamber length, make another group to meet that Fabry-Perot wave filter X2 coherent phases are grown The pectination wavelength of condition by planar array detector PD2 by being detected, the interference signal that planar array detector PD2 is detected passes through data The interference signal that computer this group of pectination wavelength of B5 is inputted after capture card B2 is by another group of equally spaced quilt on measured surface Each point reflected light and plane mirror M reflected light on survey line meet what is formed, and therefore, each wavelength is dry in pectination wavelength Relate to longitudinal information that signal carries corresponding measured point；So repeat, make on measured surface the reflected light of each measured point with The plane mirror M reflected light interference signal to be formed that meets all is detected by planar array detector PD2, and by planar array detector PD2 The interference signal detected inputs computer B5 after data collecting card B2；Computer B5 solves to the interference signal of input Reason is mediated, realizes that difference in height is more than the step of half-wavelength and the surface measurement of full field of deep trouth, measurement result are exported by result to having B6 is exported；The interference collimated light beam reflected by spectroscope S4 reaches slit diaphragm D2, and the every bit of this light is different wavelength The interference signal of formation, photoelectric detector PD 1 is reached through slit diaphragm D2 interference signal, is detected by photoelectric detector PD 1, The interference signal that photoelectric detector PD 1 detects is after signal processing circuit B3, by feedback control circuit B4 processing, feedback control Circuit B4 processed output signal is added on the piezoelectric ceramics PZT in the reference arm of interferometer, the PZT regulations of driving piezoelectric ceramics The light path of the reference arm of interferometer, two interfere arms of interferometer is maintained at quadrature, thus eliminate environmental disturbances to dry The influence of interferometer, so as to reach the purpose of stably measured system, measuring system is set to be adapted to on-line measurement.
- 2. a kind of super lateral resolution surface three dimension based on the spectral dispersion whole audience according to claim 1 interferes survey online Amount system, it is characterised in that measured respectively to same measured point on measured surface using the light of two kinds of wavelength, pass through solution The interference signal of both wavelength is adjusted, measuring system is more than the step of half-wavelength and the groove of big depth-to-width ratio to difference in height Noncontinuous surface carry out three-dimensional measurement.
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| CN113566714B (en) * | 2021-07-29 | 2022-09-20 | 同济大学 | Self-tracing type grating interference precision displacement measurement system |
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