CN102564318A - High precision absolute displacement measurement system based on optical fiber composite interference - Google Patents
High precision absolute displacement measurement system based on optical fiber composite interference Download PDFInfo
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Abstract
The invention discloses a high precision absolute displacement measurement system based on optical fiber composite interference, which belongs to the technical field of optical measurement. The system is composed of a broadband light source, an optical fiber isolator, a 3dB-coupler, two self-collimating lens, an optical fiber grating, two reflectors, two detectors, a circulator, a one-dimensional translation platform, piezoelectric ceramic, a feedback control circuit, a signal generator, a signal processing circuit, an analog/digital conversion card, a computer and result output. The high precision absolute displacement measurement system based on the optical fiber composite interference utilizes the optical fiber grating to reflect light with wavelength meeting the Bragg condition, enables an optical fiber interferometer to simultaneously work in the states of low coherent interference and high coherent interference, utilizes a low coherent interference signal to determine the amplitude of tested displacement, enables measurement range not to be limited by the wavelength of optical waves, achieves absolute measurement, utilizes a high coherent interference signal to measure a value of the displacement, and utilizes feedback control to suppress the influence of the environment interference on the optical fiber interferometer to achieve high precision measurement.
Description
Technical field
The present invention relates to field of optical measuring technologies, particularly relate to a kind of high precision absolute displacement measuring system of interfering based on Optical Fiber Composite.
Background technology
The document that existing technology therewith is close has following two:
[1] D.P.Hand, T.A.Carolan, J.S.Barton; And J.D.C.Jones. " Profile measurement of optically rough surfaces by fiber-optic interferometry ", Opt.Lett., Vol.18; No.16,1993, (Optics Letters (optics letter) P.1361-1363.; The 18th volume, the 16th phase, P.1361-1363)
The know-why of document [1] is as shown in Figure 1.
Behind the light process faraday isolator and optical fiber 3dB-coupling mechanism that semiconductor laser sends, arrive measuring head, measuring head is a Feisuo interferometer; Part light is reflected light as a reference by fiber end face; Another part light projects on the measured surface after focusing on through GRIN Lens, is come back in the system and with reference light by the measured surface reflection to interfere; Interference signal is surveyed by detector, and the phase decision of interference signal is in vertical height of measured surface measured point; The drive current that changes this laser instrument is measured same point with the light of four kinds of different frequencies to change the glow frequency of laser instrument, obtains four interference signals; Because the incident light wave frequency is different, the position of four interference signals is just different mutually, regulates drive current; Make the phase differential pi/2 of adjacent two interference signals; Through following formula, can demodulate the optical path difference D of this point, promptly accomplish the measurement of single-point:
I
n(n=1,2,3,4) are the intensity of the n time interference signal, and c is the light velocity, and ν is the incident light frequency.
Stepper motor drives measuring head transversal scanning measured surface again, promptly accomplishes the measurement to measured surface.
[2] Dejiao Lin, Xiangqian Jiang, Fang Xie; Wei Zhang, Lin Zhang and Ian Bennion. " High stability multiplexed fibre interferometer and its application on absolutedisplacement measurement and on-line surface metrology ", Optics Express; Vol.12, Issue 23,2004; P.5729-5734. (Optics Express (optics is express), 2004, the 12nd rolled up; The 23rd phase, P.5729-5734)
The technical schematic diagram of document [2] is as shown in Figure 2.
This system comprises the Michelson interferometer that two light paths almost overlap.A Michelson interferometer is to utilize fiber grating and reference mirror on the gage beam to constitute as catoptron, is used to accomplish steady operation; Another Michelson interferometer is to utilize measurement mirror and reference mirror to constitute as catoptron, is used to accomplish surveying work.Because the shared catoptron of the reference arm of two interferometers, the reference arm light path of two interferometers overlaps fully, because the gage beam of two interferometers almost overlaps, so an interferometer has been stablized, another interferometer is also just stable again.
Sending wavelength by semiconductor laser is λ
0Light be divided into two-way after through two 3dB-coupling mechanisms, the one tunnel is reflected by fiber grating, another road is reflected by reference mirror.The two-way reflected light is through meet behind the 3dB-coupling mechanism and interfere once more; Interference signal by another fiber grating reflection, passes through circulator through behind the circulator once more; Surveyed by detector then; The signal that this detector detects is handled the length that the rear drive piezoelectric ceramic tube is regulated the reference arm of fibre optic interferometer through servo circuit, makes two interference arms stablizing interferometer be in quadrature (phase differential is a pi/2) all the time, thereby realizes stablizing the purpose of this interferometer.
The wavelength X that tunable laser is sent
mVariable light is divided into two-way after through two optical fiber 3dB-coupling mechanisms; One the tunnel through get back in the interferometer by measuring mirror reflection behind the optical fiber self-focus lens more once more, got back to once more in the interferometer by the reference mirror reflection behind another road process optical fiber self-focus lens again, meets behind the two-way light process 3dB-coupling mechanism; Form interference signal; Behind this interference signal process circulator and the fiber grating, surveyed, promptly measure the displacement of measuring mirror through phase analysis again by detector.
The problem and shortage that above-mentioned two prior aries exist is:
1, measure the restriction that range receives incident light wave length λ, it is very little to measure range, is merely λ/2, can not measure greater than the displacement of λ/2 span.
2, can not carry out absolute measurement.
Summary of the invention
The present invention is based on wavelength-division multiplex technique, utilize the fiber grating reflection to satisfy the light of the wavelength of Bragg condition, make fibre optic interferometer be operated in low coherence interference and high coherent interference state simultaneously.Utilize the amplitude of low coherence interference signal deciding displacement, make the measurement range not limited by optical wavelength, and realize absolute measurement; Utilize the value of high coherent interference signal Displacement Measurement, and utilize FEEDBACK CONTROL to suppress the influence of environmental disturbances, realize high-acruracy survey fibre optic interferometer.
The present invention realizes through following technical scheme.
A kind of high precision absolute displacement measuring system of interfering based on Optical Fiber Composite is exported B6 by wideband light source S1, fibre optic isolater GL, 3dB-coupling mechanism N, two autocollimation mirror G3 and G4, fiber grating FBG, two catoptron G1 and G2, two detector PD1 and PD2, circulator H, one dimension translation stage M, piezoelectric ceramics PZT, feedback control circuit B4, signal generator B5, signal processing circuit B1, A/D transition card B2, computing machine B3 and result and is formed; Be divided into two-way behind the light process fibre optic isolater GL that wideband light source S1 sends, the three-dB coupler N; This two-way light impinges perpendicularly on and measures on mirror G1 and the reference mirror G2 respectively by behind autocollimation mirror G3 and the G4 collimation, and by measuring mirror G1 and reference mirror G2 reflected back system once more; Two bundle reflected light meet at 3dB-coupling mechanism N once more; Wherein one the tunnel close light arrival fibre optic isolater GL,, therefore can not exert an influence light source S1 because this light of effect of fibre optic isolater GL can not arrive light source S1; Arrive fiber grating FBG behind another Lu Heguang process circulator H; The light that closes the wavelength that satisfies this fiber grating FBG Bragg condition in the light is reflected by fiber grating; Reflected light passes through circulator H once more, is surveyed by detector PD1, and what detector PD1 detected is high coherent interference signal; The light that sees through fiber grating FBG is surveyed by detector PD2.When the optical path difference of fibre optic interferometer during less than the coherent length of light source, what detector PD2 detected is the low coherence interference signal, and when the optical path difference of fibre optic interferometer was zero, the signal that detector PD2 detects was for maximum; Signal generator B5 produces periodically sawtooth wave; Interfere the one dimension translation stage M of arm to add periodic sawtooth voltage to being arranged in one of fibre optic interferometer; The optical path difference of linear regulation fibre optic interferometer periodically, detector PD1 and PD2 detect high coherent interference signal and the low coherence interference signal in a regulating cycle respectively.When change in displacement; The position of the low coherence interference signal peak value point that detector PD2 detects will be moved pro rata; Utilize the amplitude of moving range decision displacement of the position of this peak point, utilize the value of the number of interference fringes decision displacement of high coherent interference signal in the moving range of the position of the low coherence interference signal peak value point that detector PD2 detects that detector PD1 detects; The signal that detector PD1 and PD2 detect is exported B6 output measurement result by the result after being for data processing through the program among signal processing circuit B1, A/D transition card B2 and the computing machine B3 simultaneously; The high coherent interference signal that detector PD1 detects is also imported feedback control circuit B4 simultaneously, and after handling through feedback control circuit B4, its output signal is added on the piezoelectric ceramics PZT, and drive pressure electroceramics PZT regulates the optical path difference of fibre optic interferometer.
Further,, utilize fiber grating FBG reflection to satisfy the light of the wavelength of Bragg condition, make fibre optic interferometer work in low coherence interference and high coherent interference state simultaneously as a kind of priority scheme; Determine the amplitude of tested displacement with the amount of movement of the position of low coherence interference signal peak value point, with the value of high coherent interference signal Displacement Measurement.
Further, as a kind of priority scheme, the high coherent interference signal that utilizes detector PD1 to detect is handled the optical path difference that rear drive piezoelectric ceramics PZT regulates fibre optic interferometer through feedback control circuit B4, thereby suppresses the influence of environmental disturbances to the demodulated interferential appearance.
Beneficial effect of the present invention mainly contains two:
1, the present invention utilizes the amplitude of low coherence interference signal deciding displacement, makes to measure the restriction that range does not receive optical wavelength, and realizes absolute measurement; Utilize the value of high coherent interference signal Displacement Measurement, realize high-acruracy survey.
2, the present invention utilizes FEEDBACK CONTROL to suppress the influence of environmental disturbances to fibre optic interferometer, to high-acruracy survey assurance is provided.
Description of drawings
Fig. 1 is the schematic diagram of prior art document [1];
Fig. 2 is the schematic diagram of prior art document [2];
Fig. 3 is principle of the invention figure.
Embodiment
Below in conjunction with accompanying drawing 3 and embodiment the present invention is further described.
As shown in Figure 3; A kind of high precision absolute displacement measuring system of interfering based on Optical Fiber Composite is exported B6 by wideband light source S1, fibre optic isolater GL, 3dB-coupling mechanism N, two autocollimation mirror G3 and G4, fiber grating FBG, two catoptron G1 and G2, two detector PD1 and PD2, circulator H, one dimension translation stage M, piezoelectric ceramics PZT, feedback control circuit B4, signal generator B5, signal processing circuit B1, A/D transition card B2, computing machine B3 and result and is formed.
Be divided into two-way behind the light process fibre optic isolater GL that wideband light source S1 sends, the 3dB-coupling mechanism N; This two-way light impinges perpendicularly on and measures on mirror G1 and the reference mirror G2 respectively by behind autocollimation mirror G3 and the G4 collimation, and by measuring mirror G1 and reference mirror G2 reflected back system once more; Two bundle reflected light meet at 3dB-coupling mechanism N once more; Wherein one the tunnel close light arrival fibre optic isolater GL,, therefore can not exert an influence light source because this light of effect of fibre optic isolater GL can not arrive light source; Arrive fiber grating FBG behind another Lu Heguang process circulator H, the light that closes the wavelength that satisfies this fiber grating Bragg condition in the light is by fiber grating FBG reflection, and reflected light passes through circulator H once more, is surveyed by detector PD1.What detector PD1 detected is high coherent interference signal, and this signal can be expressed as:
I
1＝I
10+V
1cosk(x
1-x
2) (1)
In the formula, I
10Be the DC component of interference signal, V
1Be the visibility of interference signal, k is the light wave wave number, x
1And x
2Be respectively two light paths of interfering arm of fibre optic interferometer.
The light that sees through fiber grating is surveyed by detector PD2, and when the optical path difference of fibre optic interferometer during less than the coherent length of light source, what detector PD2 detected is the low coherence interference signal, and this signal can be expressed as:
In the formula, I
20Be DC component, I
22Be normalised amplitude, L
cBe the coherent length of light source, k is the light wave wave number.Can know (x by (2) formula
1-x
2) variation can cause simultaneously that fringe visibility and signal phase change.As (x
1-x
2)=0 o'clock, signal I
2To get maximum value, promptly when the optical path difference of fibre optic interferometer was zero, the signal that detector PD2 detects was for maximum.
Can know that with (2) formula the fibre optic interferometer in the system is operated in high coherent interference and low coherence interference state simultaneously from signal (1) formula that detector PD1 and PD2 detect.
When the displacement of measuring mirror G1 changes, the high coherent interference signal that detector PD1 detects will periodically change with the cosine rule; The position of the low coherence interference signal peak value point that detector PD2 detects will be moved pro rata.In the moving range of the position of the signal peak value point that detector PD2 detects, the number of interference fringes of the high coherent interference signal that corresponding detector PD1 detects is directly proportional with the displacement of measurement mirror G1.
During Displacement Measurement; Signal generator B5 produces periodically sawtooth wave; Interfere the one dimension translation stage M of arm to add periodic sawtooth voltage to being arranged in one of fibre optic interferometer; The optical path difference of linear regulation fibre optic interferometer periodically, detector PD1 and PD2 detect high coherent interference signal and the low coherence interference signal in a regulating cycle respectively.When change in displacement; The position of the low coherence interference signal peak value point that detector PD2 detects will be moved pro rata; Utilize the amplitude of moving range decision displacement of the position of this peak point, utilize the value of the number of interference fringes decision displacement of high coherent interference signal in the moving range of the position of the low coherence interference signal peak value point that detector PD2 detects that detector PD1 detects.Relation below the number of interference fringes of tested displacement and detector PD1 satisfies:
In the formula, Δ d is for measuring the displacement of mirror, λ
BraggBe the bragg wavelength of FBG reflection, n is the number of interference fringes of high coherent interference signal in the moving range of the position of low coherence interference signal peak value point.
The signal that detector PD1 and PD2 detect is exported B6 output measurement result by the result after being for data processing through the program among signal processing circuit B1, A/D transition card B2 and the computing machine B3 simultaneously.
The high coherent interference signal that detector PD1 detects also inputs to feedback control circuit B4 simultaneously; After feedback control circuit B4 processing; Its output signal is added on the piezoelectric ceramics PZT, and drive pressure electroceramics PZT regulates the optical path difference of fibre optic interferometer, when measurement mirror G1, reference mirror G2 and one dimension translation stage M remain static; Make fibre optic interferometer be in quadrature (phase differential is always pi/2) all the time, thereby suppress the influence of environmental disturbances fibre optic interferometer.Because the frequency of operation of feedback control circuit B4 is 0～2Hz, can blanketing frequency be the environmental disturbances of 0～2Hz.In a regulating cycle of the optical path difference of one dimension translation stage M linear regulation fibre optic interferometer; The high coherent interference signal that detector PD1 and PD2 detect and the cycle of low coherence interference signal are all much larger than 2Hz, so feedback control circuit is for high coherent interference signal that is used to measure and the not influence of low coherence interference signal.
Above-mentioned instantiation has been described in realization in order to demonstrate the invention.But other variations of the present invention and modification it will be apparent to those skilled in the art that, do not have the essence and any modification/variation in the cardinal rule scope of disclosure or imitate conversion all to belong to claim protection domain of the present invention in the present invention.
Claims (3)
1. high precision absolute displacement measuring system of interfering based on Optical Fiber Composite; It is characterized in that it is by wideband light source (S1), fibre optic isolater (GL), 3dB-coupling mechanism (N), two autocollimation mirror (G3; G4), fiber grating (FBG), two catoptron (G1; G2), two detectors (PD1, PD2), circulator (H), one dimension translation stage (M), piezoelectric ceramics (PZT), feedback control circuit (B4), signal generator (B5), signal processing circuit (B1), A/D transition card (B2), computing machine (B3) and result's output (B6) forms; Be divided into two-way behind the light process fibre optic isolater (GL) that wideband light source (S1) sends, the 3dB-coupling mechanism (N); This two-way light is respectively by autocollimation mirror (G3; G4) behind the collimation, impinge perpendicularly on and measure on mirror (G1) and the reference mirror (G2), and by measuring mirror (G1) and reference mirror (G2) reflected back system once more; Two bundle reflected light meet at 3dB-coupling mechanism (N) once more; Wherein one the tunnel close light arrival fibre optic isolater (GL),, therefore can not exert an influence light source (S1) because this light of effect of fibre optic isolater (GL) can not arrive light source (S1); Another Lu Heguang arrives fiber grating (FBG) through behind the circulator; The light that closes the wavelength that satisfies this fiber grating (FBG) Bragg condition in the light is reflected by fiber grating (FBG); Reflected light passes through circulator (H) once more; Surveyed by detector (PD1), what detector (PD1) detected is high coherent interference signal; The light that sees through fiber grating (FBG) is surveyed by detector (PD2); Two autocollimation mirrors (G3, G4), (G1 G2) constitutes fibre optic interferometers to two catoptrons; When the optical path difference of fibre optic interferometer during less than the coherent length of light source; What detector (PD2) detected is the low coherence interference signal, and when the optical path difference of fibre optic interferometer was zero, the signal that detector (PD2) detects was for maximum; Signal generator (B5) produces periodically sawtooth wave; Interfere the one dimension translation stage (M) of arm to add periodic sawtooth voltage to being arranged in one of fibre optic interferometer; The optical path difference of linear regulation fibre optic interferometer periodically; Detector (PD1; PD2) detect high coherent interference signal and low coherence interference signal in a regulating cycle respectively, when change in displacement, the position of the low coherence interference signal peak value point that detector (PD2) detects will be moved pro rata; Utilize the amplitude of moving range decision displacement of the position of this peak point, the number of interference fringes of high coherent interference signal the moving range of the position of the low coherence interference signal peak value point that detector (PD2) detects in that utilizes detector (PD1) to detect determines the value of displacement; Detector is (after PD1, the signal that PD2) detects the program in signal processing circuit (B1), A/D transition card (B2) and the computing machine (B3) of passing through simultaneously is for data processing, by result's output (B6) output measurement result; The high coherent interference signal that detector (PD1) detects is also imported feedback control circuit simultaneously, and after handling through feedback control circuit, its output signal is added on the piezoelectric ceramics (PZT), and drive pressure electroceramics (PZT) is regulated the optical path difference of fibre optic interferometer.
2. a kind of high precision absolute displacement measuring system of interfering according to claim 1 based on Optical Fiber Composite; It is characterized in that: utilize fiber grating (FBG) reflection to satisfy the light of the wavelength of Bragg condition, make fibre optic interferometer work in high coherent interference and low coherence interference state simultaneously; Determine the amplitude of tested displacement with the amount of movement of the position of low coherence interference signal peak value point, with the value of high coherent interference signal Displacement Measurement.
3. a kind of high precision absolute displacement measuring system of interfering according to claim 1 based on Optical Fiber Composite; It is characterized in that: the high coherent interference signal that utilizes detector (PD1) to detect is handled the optical path difference that rear drive piezoelectric ceramics (PZT) is regulated fibre optic interferometer through feedback control circuit (B4), thereby suppresses the influence of environmental disturbances to the demodulated interferential appearance.
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| CN104677296A (en) * | 2015-03-09 | 2015-06-03 | 北京交通大学 | System for measurement of displacement through self-mixing interference fusion of beat waves and single waves of fiber laser |
| CN104634256A (en) * | 2015-03-09 | 2015-05-20 | 北京交通大学 | Fiber laser single-wave self-mixing interference displacement measuring system |
| CN105333816A (en) * | 2015-11-05 | 2016-02-17 | 北京交通大学 | Super lateral resolution surface three-dimensional online interference measuring system based on spectral dispersion full field |
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| CN114894120A (en) * | 2022-05-26 | 2022-08-12 | 安徽大学 | Dual-wavelength-based measuring range-adjustable surface topography measuring device and measuring method |
| CN114894120B (en) * | 2022-05-26 | 2024-03-19 | 安徽大学 | Dual-wavelength-based measurement range-adjustable surface morphology measurement device and measurement method |
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