CN109682992A - A kind of high-precision laser interference accelerometer - Google Patents
A kind of high-precision laser interference accelerometer Download PDFInfo
- Publication number
- CN109682992A CN109682992A CN201910016980.7A CN201910016980A CN109682992A CN 109682992 A CN109682992 A CN 109682992A CN 201910016980 A CN201910016980 A CN 201910016980A CN 109682992 A CN109682992 A CN 109682992A
- Authority
- CN
- China
- Prior art keywords
- mass block
- optical path
- magnet
- spectroscope
- reflecting film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 43
- 238000005305 interferometry Methods 0.000 claims abstract description 36
- 230000001133 acceleration Effects 0.000 claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 claims abstract description 24
- 230000011514 reflex Effects 0.000 claims description 18
- 230000008859 change Effects 0.000 claims description 14
- 238000005286 illumination Methods 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 3
- 230000000694 effects Effects 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 13
- 238000000034 method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention discloses a kind of high-precision lasers to interfere accelerometer, including fixed frame, laser, the first interferometry optical path, the second interferometry optical path, mass block, the first high-reflecting film, the second high-reflecting film, magnetic resetting apparatus and digital feedback circuit；Variation of the digital feedback circuit based on the phase of interference signal in the first interferometry optical path and the second interferometry optical path is calculated displacement and the acceleration of mass block by difference form, then makes quality block reset by controlling magnetic resetting apparatus.Due to foring two sets of interferometry optical paths and measuring acceleration by difference form output, the displacement signal of mass block is exaggerated one times, it is suppressed that the influence of the common-mode noises such as environment, laser frequency effectively improves the measurement accuracy of accelerometer.
Description
Technical field
The present invention relates to optical acceleration sensor fields, interfere acceleration more particularly, to a kind of high-precision laser
Meter.
Background technique
Accelerometer is the important devices of accurate measurement and inertial navigation, for measuring acceleration and the position of moving object
Move, the accelerometer of optical signal detecting compared with conventional accelerometer, sensitivity, dynamic range, in terms of have it is bright
Aobvious advantage, is widely used.Wherein optical accelerometer is broadly divided into intensity modulation type, phase modulation-type and wavelength
Modulation type.It is most widely used at present and to have compared with high measurement accuracy be phase modulation-type, but since its measurement process can deposit
In common-mode noise, its measurement accuracy is made to be affected.
Summary of the invention
The present invention is to solve in existing phase modulation-type accelerometer, since there are common-mode noises to reduce measurement accuracy etc.
Problem provides a kind of high-precision laser interference accelerometer.
To realize the above goal of the invention, and the technological means used is:
A kind of high-precision laser interference accelerometer, including fixed frame, laser, the first interferometry optical path, second
Interferometry optical path, mass block, the first high-reflecting film, the second high-reflecting film, magnetic resetting apparatus and digital feedback circuit；
One end of the mass block is connect by flexible structure with the fixed frame, and the other end of the mass block is fixed
It is connected on magnetic resetting apparatus, the first high-reflecting film is separately installed in the left and right sides of the mass block and the second height is anti-
Film, the first interferometry optical path, the second interferometry optical path be respectively arranged at first high-reflecting film, the second high-reflecting film one
Side；
Wherein the first interferometry optical path includes the first spectroscope, the first photodetector, the first reflecting mirror, acceleration hair
When changing, mass block is subjected to displacement, and the light beam that laser issues is divided into two-beam by the first spectroscope, and wherein light beam shines
It is reflexed at the first spectroscope after being mapped to the first high-reflecting film by the reflex of the first high-reflecting film；Another Shu Guangzhao is mapped to first
It is reflexed at the first spectroscope after reflecting mirror by the reflex of the first reflecting mirror, two-beam occurs dry at the first spectroscope
It relates to, and is incident to the first photodetector；Wherein the second interferometry optical path include the second spectroscope, the second photodetector,
Second reflecting mirror, when acceleration changes, mass block is subjected to displacement, and the light beam that laser issues is divided by the second spectroscope
Two-beam, wherein two beam illumination, which are mapped to after the second high-reflecting film, reflexes to the second spectroscope by the reflex of the second high-reflecting film
Place；Another two beams illumination is reflexed at the second spectroscope after being mapped to the second reflecting mirror by the reflex of the second reflecting mirror, two beams
Light interferes at the second spectroscope, and is incident to the second photodetector；
The digital feedback circuit is based on interference signal in the first interferometry optical path and the second interferometry optical path
The variation of phase is calculated displacement and the acceleration of mass block by difference form, then makes matter by controlling magnetic resetting apparatus
Gauge block resets.
In above scheme, by forming two sets of interferometry optical paths, the displacement occurred when by mass block by extraneous acceleration
Variation is converted into the phase change of laser interference optical path interference signal, and is input to digital feedback circuit and carries out difference measurement, and
Make quality block reset by controlling magnetic resetting apparatus.Due to foring two sets of interferometry optical paths and being exported by difference form
It measures, the displacement signal of mass block is exaggerated one times, it is suppressed that the influence of the common-mode noises such as environment, laser frequency.
Preferably, the magnetic resetting apparatus include sleeve, the first fixing piece, the second fixing piece, coil, the first magnet with
And second magnet, first fixing piece, the second fixing piece are oppositely arranged, the opposite side of the first fixing piece, the second fixing piece
On be respectively arranged with the first magnet, the second magnet, the both ends of the first magnet, the second magnet respectively with the sleeve are arranged, coil
It is wrapped on sleeve, coil is fixedly connected on sleeve with the other end that the digital feedback circuit is electrically connected the mass block.
Preferably, the flexible structure is spring leaf.
Preferably, first fixing piece, the second fixing piece are magnet steel.
Preferably, the input terminal of the digital feedback circuit receives the first photodetector, the second photodetector respectively
The phase of the interference signal of detection, the output end output feedback current of the digital feedback circuit is to the coil, so that described
Coil generates feedback force under the magnetic fields of first magnet and the second magnet, and acts on the sleeve to make quality
Block reset.
Preferably, when extraneous acceleration is constant, the mass block is in equilibrium state, and the phase of the interference signal is not
It changes；When extraneous acceleration change, the displacement of the mass block changes, and the digital feedback circuit receives
The variation of the phase of interference signal in one interferometry optical path and the second interferometry optical path calculates feedback current and exports anti-
Feed flow to the coil, so that the coil generates feedback force under the magnetic fields of first magnet and the second magnet,
And the sleeve is acted on to make mass block (103) be reset to equilibrium state.Due to the corresponding feedback of the feedback force at this time
Acceleration is equal to extraneous input acceleration, and the measurement of extraneous acceleration can be realized in measurement feedback current I.
Preferably, the change in displacement of the mass block are as follows: m Δ a=k Δ x, wherein m is the quality of mass block, and Δ a is to add
Velocity magnitude, k are stiffness factor, and Δ x is the change in displacement of mass block.
Preferably, the generation feedback force FInstead=BIL；Wherein B is magnetic field strength, and I is feedback current, and L is coil length.
Compared with prior art, the beneficial effect of technical solution of the present invention is:
In accelerometer of the invention, the change in displacement occurred when by mass block by extraneous acceleration is converted into laser interference
The phase change of optical path interference signal, due to foring two sets of interferometry optical paths and being measured by difference form output,
The displacement signal of mass block is exaggerated one times, it is suppressed that the influence of the common-mode noises such as environment, laser frequency effectively improves
The measurement accuracy of accelerometer.
Detailed description of the invention
Fig. 1 is overall structure figure of the invention.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；
In order to better illustrate this embodiment, the certain components of attached drawing have omission, zoom in or out, and do not represent actual product
Size；
To those skilled in the art, it is to be understood that certain known features and its explanation, which may be omitted, in attached drawing
's.
The following further describes the technical solution of the present invention with reference to the accompanying drawings and examples.
As shown in Figure 1, a kind of high-precision laser interference accelerometer, including fixed frame 101, laser 201, first are dry
It relates to optical path, the second interferometry optical path, mass block 103, the first high-reflecting film 109, the second high-reflecting film 110, magnetic and resets dress
It sets and digital feedback circuit 208；
One end of the mass block 103 is connect by flexible structure 102 with the fixed frame 101, the mass block 103
The other end be fixedly connected on magnetic resetting apparatus, it is high to be separately installed with first in the left and right sides of the mass block 103
Anti- film 109 and the second high-reflecting film 110, the first interferometry optical path, that the second interferometry optical path is respectively arranged at described first is high
The side of anti-film 109, the second high-reflecting film 110；
Wherein the first interferometry optical path includes the first spectroscope 204, the first photodetector 206, the first reflecting mirror
202, when acceleration changes, mass block 103 is subjected to displacement, and the light beam that laser 201 issues is divided by the first spectroscope 204
At two-beam, wherein light beam is irradiated to after the first high-reflecting film 109 and reflexes to first by the reflex of the first high-reflecting film 109
At spectroscope 204；Another Shu Guangzhao is mapped to after the first reflecting mirror 202 and reflexes to by the reflex of the first reflecting mirror 202
At one spectroscope 204, two-beam interferes at the first spectroscope 204, and is incident to the first photodetector 206；Wherein
Second interferometry optical path includes the second spectroscope 205, the second photodetector 207, the second reflecting mirror 203, and acceleration occurs
When variation, mass block 103 is subjected to displacement, and the light beam that laser 201 issues is divided into two-beam by the second spectroscope 205, wherein
Two beam illumination are reflexed at the second spectroscope 205 after being mapped to the second high-reflecting film 110 by the reflex of the second high-reflecting film 110；
Another two beams illumination is mapped to after the second reflecting mirror 203 and reflexes to the second spectroscope 205 by the reflex of the second reflecting mirror 203
Place, two-beam interferes at the second spectroscope 205, and is incident to the second photodetector 207；
The digital feedback circuit 208 is based on interference signal in the first interferometry optical path and the second interferometry optical path
Phase variation, by difference form calculate mass block 103 displacement and acceleration, then by control magnetic resetting apparatus
Reset mass block 103.
Wherein, the magnetic resetting apparatus include sleeve 209, the first fixing piece 104, the second fixing piece 105, coil 106,
First magnet 107 and the second magnet 108, first fixing piece 104, the second fixing piece 105 are oppositely arranged, the first fixing piece
104, the first magnet 107, the second magnet 108, the first magnet 107, are respectively arranged on the opposite side of the second fixing piece 105
Both ends of two magnet 108 respectively with the sleeve 209 are arranged, and coil 106 is wrapped on sleeve 209, coil 106 and the number
Feed circuit 208 is electrically connected, and the other end of the mass block 103 is fixedly connected on sleeve 209.Wherein, the flexible structure
102 be spring leaf, and first fixing piece 104, the second fixing piece 105 are magnet steel.
Wherein, the input terminal of the digital feedback circuit 208 receives the first photodetector 206 respectively, the second photoelectricity is visited
The phase for the interference signal that device 207 detects is surveyed, the output end of the digital feedback circuit 208 exports feedback current to the coil
106, so that the coil 106 generates feedback force under the magnetic fields of first magnet 107 and the second magnet 108, and make
For the sleeve 209 to make mass block 103 reset.
Wherein, when extraneous acceleration is constant, the mass block 103 is in equilibrium state, the phase of the interference signal
It does not change；When extraneous acceleration change, the displacement of the mass block 103 changes, the digital feedback circuit 208
The variation of the phase of interference signal in the first interferometry optical path and the second interferometry optical path is received, feedback current is calculated
And feedback current is exported to the coil 106, so that the coil 106 is in first magnet 107 and the magnetic of the second magnet 108
Feedback force is generated under field action, and acts on the sleeve 209 to make mass block 103 be reset to equilibrium state.It is described at this time
The corresponding feedback acceleration of feedback force is equal to extraneous input acceleration, and the survey of extraneous acceleration can be realized in measurement feedback current I
Amount.
Wherein, the change in displacement of the mass block 103 are as follows: m Δ a=k Δ x, wherein m is the quality of mass block 103, Δ a
For acceleration magnitude, k is stiffness factor, and Δ x is the change in displacement of mass block 103.
Wherein, the generation feedback force FInstead=BIL；Wherein B is magnetic field strength, and I is feedback current, and L is long for coil 106
Degree.In the present embodiment, i.e. FInstead=BIL=m Δ a, after measurement obtains feedback current I, since B, I, L, m were it is known that by should
Equation can acquire acceleration Δ a, to realize the measurement of acceleration.
The terms describing the positional relationship in the drawings are only for illustration, should not be understood as the limitation to this patent；
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (8)
1. a kind of high-precision laser interferes accelerometer, which is characterized in that including fixed frame (101), laser (201), the
One interferometry optical path, the second interferometry optical path, mass block (103), the first high-reflecting film (109), the second high-reflecting film (110),
Magnetic resetting apparatus and digital feedback circuit (208)；
One end of the mass block (103) is connect by flexible structure (102) with the fixed frame (101), the mass block
(103) the other end is fixedly connected on magnetic resetting apparatus, is separately installed in the left and right sides of the mass block (103)
First high-reflecting film (109) and the second high-reflecting film (110), the first interferometry optical path, the second interferometry optical path are respectively arranged at
First high-reflecting film (109), the second high-reflecting film (110) side；
Wherein the first interferometry optical path includes the first spectroscope (204), the first photodetector (206), the first reflecting mirror
(202), when acceleration changes, mass block (103) is subjected to displacement, and the light beam that laser (201) issues passes through the first light splitting
Mirror (204) is divided into two-beam, and wherein light beam is irradiated to the reflection that the first high-reflecting film (109) passes through the first high-reflecting film (109) afterwards
Effect reflexes at the first spectroscope (204)；Another Shu Guangzhao is mapped to the first reflecting mirror (202) afterwards by the first reflecting mirror
(202) reflex reflexes at the first spectroscope (204), and two-beam interferes at the first spectroscope (204), is incorporated to
It is incident upon the first photodetector (206)；Wherein the second interferometry optical path includes the second spectroscope (205), the second photodetection
Device (207), the second reflecting mirror (203), when acceleration changes, mass block (103) is subjected to displacement, and laser (201) issues
Light beam be divided into two-beam by the second spectroscope (205), wherein two beam illumination are mapped to the second high-reflecting film (110) afterwards by second
The reflex of high-reflecting film (110) reflexes at the second spectroscope (205)；After another two beams illumination is mapped to the second reflecting mirror (203)
It is reflexed at the second spectroscope (205) by the reflex of the second reflecting mirror (203), two-beam is in the second spectroscope (205)
Place interferes, and is incident to the second photodetector (207)；
The digital feedback circuit (208) is based on interference signal in the first interferometry optical path and the second interferometry optical path
The variation of phase calculates displacement and the acceleration of mass block (103) by difference form, then passes through control magnetic resetting apparatus
Reset mass block (103).
2. accelerometer according to claim 1, which is characterized in that the magnetic resetting apparatus includes sleeve (209),
One fixing piece (104), the second fixing piece (105), coil (106), the first magnet (107) and the second magnet (108), described
One fixing piece (104), the second fixing piece (105) are oppositely arranged, the opposite side of the first fixing piece (104), the second fixing piece (105)
Be respectively arranged with the first magnet (107), the second magnet (108) on face, the first magnet (107), the second magnet (108) respectively with institute
The both ends for stating sleeve (209) are arranged, and coil (106) is wrapped on sleeve (209), coil (106) and the digital feedback circuit
(208) it is electrically connected, the other end of the mass block (103) is fixedly connected on sleeve (209).
3. accelerometer according to claim 1, which is characterized in that the flexible structure (102) is spring leaf.
4. accelerometer according to claim 2, which is characterized in that first fixing piece (104), the second fixing piece
It (105) is magnet steel.
5. accelerometer according to claim 2, which is characterized in that the input terminal of the digital feedback circuit (208) point
The phase of the first photodetector (206), the interference signal that the second photodetector (207) detects is not received, and the number is anti-
The output end output feedback current of current feed circuit (208) is to the coil (106), so that the coil (106) is in first magnetic
Feedback force is generated under the magnetic fields of iron (107) and the second magnet (108), and acts on the sleeve (209) to make quality
Block (103) resets.
6. accelerometer according to claim 2, which is characterized in that when extraneous acceleration is constant, the mass block
(103) it is in equilibrium state, the phase of the interference signal does not change；When extraneous acceleration change, the mass block
(103) displacement changes, and the digital feedback circuit (208) receives the first interferometry optical path and the second interference is surveyed
The variation of the phase of interference signal in optical path is measured, feedback current is calculated and exports feedback current to the coil (106), so that institute
It states coil (106) and generates feedback force under the magnetic fields of first magnet (107) and the second magnet (108), and act on
The sleeve (209) is to make mass block (103) be reset to equilibrium state.
7. according to right want 6 described in accelerometer, which is characterized in that the change in displacement of the mass block (103) are as follows: m Δ a=
K Δ x, wherein m is the quality of mass block (103), and Δ a is acceleration magnitude, and k is stiffness factor, and Δ x is mass block (103)
Change in displacement.
8. accelerometer according to claim 6, which is characterized in that the generation feedback force FInstead=BIL；Wherein B is magnetic
Field intensity, I are feedback current, and L is coil (106) length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910016980.7A CN109682992A (en) | 2019-01-08 | 2019-01-08 | A kind of high-precision laser interference accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910016980.7A CN109682992A (en) | 2019-01-08 | 2019-01-08 | A kind of high-precision laser interference accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109682992A true CN109682992A (en) | 2019-04-26 |
Family
ID=66192739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910016980.7A Pending CN109682992A (en) | 2019-01-08 | 2019-01-08 | A kind of high-precision laser interference accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109682992A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111323614A (en) * | 2020-03-21 | 2020-06-23 | 哈尔滨工程大学 | Closed-loop disc type optical fiber accelerometer based on moving coil feedback mechanism |
| CN111721970A (en) * | 2020-06-16 | 2020-09-29 | 维沃移动通信有限公司 | Capacitive acceleration sensor, control method and control device thereof, and electronic equipment |
| WO2023201936A1 (en) * | 2022-04-18 | 2023-10-26 | 北京华卓精科科技股份有限公司 | Accelerometer |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1952665A (en) * | 2006-11-08 | 2007-04-25 | 浙江大学 | High distinguishability subnanosecond magnitude optical three-dimensional accelerometer |
| CN101256198A (en) * | 2008-03-26 | 2008-09-03 | 北京航空航天大学 | Gleam dynamoelectric acceleration gauge based on laser feedback interference |
| CN101576383A (en) * | 2009-06-04 | 2009-11-11 | 重庆大学 | Two-path optical interference fine optical micro-electro-mechanical gyroscope |
| CN102175141A (en) * | 2011-01-13 | 2011-09-07 | 清华大学 | Double-channel single-frequency laser interferometer |
| CN102494681A (en) * | 2011-12-06 | 2012-06-13 | 北京航空航天大学 | Difference double-interference type optical fiber gyroscope based on birefringence modulation |
| CN102520209A (en) * | 2011-12-28 | 2012-06-27 | 天津大学 | Quartz flexible accelerometer based on laser self-mixing interference |
| CN104729493A (en) * | 2013-12-18 | 2015-06-24 | 广西大学 | Novel detection method of optical fiber gyroscope |
| CN106841680A (en) * | 2017-03-30 | 2017-06-13 | 吉林大学 | A kind of optical fiber interference type detector device with collimater |
| CN106940387A (en) * | 2017-04-10 | 2017-07-11 | 三峡大学 | A kind of Michelson interference formula optical fiber acceleration transducer |
-
2019
- 2019-01-08 CN CN201910016980.7A patent/CN109682992A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1952665A (en) * | 2006-11-08 | 2007-04-25 | 浙江大学 | High distinguishability subnanosecond magnitude optical three-dimensional accelerometer |
| CN101256198A (en) * | 2008-03-26 | 2008-09-03 | 北京航空航天大学 | Gleam dynamoelectric acceleration gauge based on laser feedback interference |
| CN101576383A (en) * | 2009-06-04 | 2009-11-11 | 重庆大学 | Two-path optical interference fine optical micro-electro-mechanical gyroscope |
| CN102175141A (en) * | 2011-01-13 | 2011-09-07 | 清华大学 | Double-channel single-frequency laser interferometer |
| CN102494681A (en) * | 2011-12-06 | 2012-06-13 | 北京航空航天大学 | Difference double-interference type optical fiber gyroscope based on birefringence modulation |
| CN102520209A (en) * | 2011-12-28 | 2012-06-27 | 天津大学 | Quartz flexible accelerometer based on laser self-mixing interference |
| CN104729493A (en) * | 2013-12-18 | 2015-06-24 | 广西大学 | Novel detection method of optical fiber gyroscope |
| CN106841680A (en) * | 2017-03-30 | 2017-06-13 | 吉林大学 | A kind of optical fiber interference type detector device with collimater |
| CN106940387A (en) * | 2017-04-10 | 2017-07-11 | 三峡大学 | A kind of Michelson interference formula optical fiber acceleration transducer |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111323614A (en) * | 2020-03-21 | 2020-06-23 | 哈尔滨工程大学 | Closed-loop disc type optical fiber accelerometer based on moving coil feedback mechanism |
| CN111721970A (en) * | 2020-06-16 | 2020-09-29 | 维沃移动通信有限公司 | Capacitive acceleration sensor, control method and control device thereof, and electronic equipment |
| CN111721970B (en) * | 2020-06-16 | 2022-03-18 | 维沃移动通信有限公司 | Capacitive acceleration sensor, control method and control device thereof, and electronic equipment |
| WO2023201936A1 (en) * | 2022-04-18 | 2023-10-26 | 北京华卓精科科技股份有限公司 | Accelerometer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2859302B1 (en) | Optical accelerometer system | |
| CN109682992A (en) | A kind of high-precision laser interference accelerometer | |
| US7990539B2 (en) | Sensor and method utilizing multiple optical interferometers | |
| JPH07181007A (en) | Measuring device wherein interferometer is applied | |
| CN106940220B (en) | A kind of laser wavelength real-time measurement device of Simple low-cost | |
| RU155509U1 (en) | LASER-INTERFERENCE HYDROPHONE WITH THERMOSTABILIZATION SYSTEM | |
| JP2012083274A (en) | Vibration measuring device and vibration measuring method according to white light interferometry | |
| RU2601530C1 (en) | Device for measuring angular movements of object | |
| KR20110131975A (en) | Absolute gravimeter using high resolution optical interferometer with parallel multiple pass configuration | |
| RU2253882C1 (en) | Gravity meter | |
| US6462823B1 (en) | Wavelength meter adapted for averaging multiple measurements | |
| CN110554402A (en) | Measuring device and processing device | |
| CN104697442B (en) | A kind of motion compensation formula planar reflector laser interference instrument and application method | |
| CN105783738B (en) | A kind of measurement method of increment type small-range displacement sensor | |
| Busurin et al. | Micro-opto-electro-mechanical system accelerometer based on coarse-fine processing of Fabry–Perot interferometer signals | |
| JP2014102192A (en) | White color interference device, measuring method of position and displacement of the same | |
| JPS6356924B2 (en) | ||
| CN110006356B (en) | Real-time calibration device and method based on SS-OCT (SS-OCT) distance measurement system | |
| Pachisia et al. | Multiple reflection assisted Laser Doppler Vibrometer setup for high resolution displacement measurement | |
| WO2016084195A1 (en) | White light interference device and method of detecting position and displacement by means of white light interference device | |
| Haddad et al. | Gaussian beams and spatial modulation in nanopositioning | |
| CN101799548B (en) | All-fiber velocity measurement system and phase velocity measurement method | |
| RU81323U1 (en) | COMBINED FIBER OPTICAL PRESSURE AND TEMPERATURE SENSOR | |
| Kang et al. | An optical straightness measurement sensor for the KRISS watt balance | |
| Urakseev et al. | Differential Fiber Optic Sensor Based on Bragg Gratings |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190426 |