CN102520209A - Quartz flexible accelerometer based on laser self-mixing interference - Google Patents
Quartz flexible accelerometer based on laser self-mixing interference Download PDFInfo
- Publication number
- CN102520209A CN102520209A CN2011104480201A CN201110448020A CN102520209A CN 102520209 A CN102520209 A CN 102520209A CN 2011104480201 A CN2011104480201 A CN 2011104480201A CN 201110448020 A CN201110448020 A CN 201110448020A CN 102520209 A CN102520209 A CN 102520209A
- Authority
- CN
- China
- Prior art keywords
- laser
- circuit
- mixing interference
- self
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002156 mixing Methods 0.000 title claims abstract description 42
- 239000010453 quartz Substances 0.000 title claims abstract description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 230000001133 acceleration Effects 0.000 claims abstract description 24
- 238000006073 displacement reaction Methods 0.000 claims abstract description 15
- 238000012545 processing Methods 0.000 claims abstract description 8
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 9
- 235000014676 Phragmites communis Nutrition 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 230000003321 amplification Effects 0.000 claims description 6
- 239000013307 optical fiber Substances 0.000 claims description 6
- 238000004458 analytical method Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 4
- 238000009966 trimming Methods 0.000 claims description 4
- 238000001914 filtration Methods 0.000 claims description 3
- 238000010183 spectrum analysis Methods 0.000 claims description 3
- 230000009466 transformation Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 10
- 238000001514 detection method Methods 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000017531 blood circulation Effects 0.000 description 1
- 210000003477 cochlea Anatomy 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 238000007805 zymography Methods 0.000 description 1
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to the field of inertia detecting instruments. In order to provide an accelerometer having the advantages of high measuring precision, high resolution ratio, wide dynamic range, simple and compact structure, electromagnetic interference resistance and the like, the technical scheme includes that a quartz flexible accelerometer based on laser self-mixing interference comprises a meter and a digital rebalance loop, wherein the meter comprises a shell, a pendulum component, a torquer and a laser self-mixing interference signal sensor, and the digital rebalance loop comprises a laser device driving power supply, a photoelectric detection circuit, a data acquisition circuit, a digital signal processing circuit and a torque current generator. When acceleration is inputted, the laser self-mixing interference signal sensor detects displacement of the pendulum component and converts the displacement into electric signals, the electric signals are converted into current signals in proportion with the acceleration by the aid of the digital rebalance loop, the current signals are fed back to the torquer and lead the torquer to generate rebalance torque, and the acceleration can be obtained by detecting the current of the torquer. The quartz flexible accelerometer is mainly applied to acceleration measurement.
Description
Technical field
The present invention relates to inertia measuring instrument field, especially based on the quartz flexible accelerometer of laser self-mixing interference.
Background technology
Quartz flexible accelerometer is a kind of mechanical pendulous accelerometer; It has precision and highly sensitive, temperature coefficient is little, simple in structure, advantage such as volume is little; Be one of inertia type instrument ideal in accurate inertial navigation, the guidance system, be widely used in Aeronautics and Astronautics, navigation and land navigation control field.
As the fundamental measurement element of inertial navigation, guidance system, the quartz flexible accelerometer precision directly influences the performance of inertial navigation, guidance system.Along with the continuous development of science and technology, the precision of inertial navigation, guidance system improves constantly, and is also increasingly high for the requirement of the resolution of quartz flexible accelerometer and precision.Especially for the big aircraft of the long distance of the needs of current state key development, long-time flight, HAE unmanned plane, under water for AUV and the deep space probe etc., high-precision accelerometer is essential especially.Yet in the domestic existing quartz flexible accelerometer, precision is generally at tens μ g
0/ ppm level, resolution be 5-10 μ g only
0, its performance index are far below external like product, and also exist a certain distance between the requirement of high precision inertial navigation guidance system, need further to improve the measuring accuracy of existing quartz flexible accelerometer.
The raising of accelerometer precision has two kinds of approach: the one, and the eigenfrequency of reduction accelerometer harmonic oscillator reduces but its cost is a frequency span, and another kind of method is to improve the detection level of accelerometer signal sensor.In the quartz flexible accelerometer output capacitance variable quantity of condenser type signal transducer be proportional to displacement square, resolution is limited, obtain high resolving power, the size of system then needs suitable broadening; Receive simultaneously factors such as electronic noise, mechanical thermonoise and environment stray capacitance to influence condenser type signal transducer output signal-to-noise ratio low, reached the detection limit of small capacitance testing circuit, condenser type quartz flexible accelerometer precision is difficult to break through μ g
0/ ppm.
The laser self-mixing interference technology is emerging in recent years a kind of precision optics noncontact measurement; Have advantages such as resolution height, precision height, wide dynamic range, anti-electromagnetic interference (EMI), and its measuring system only there is one to interfere passage, easy collimation, simple and compact for structure.Current; The laser self-mixing interference technology has been widely used in flaw detection research, measuring three-dimensional morphology, measuring blood flow rate, the measurement of cochlea vibration of thin membrane etc.; Especially laser is from mixing the microdisplacement measurement technology through years development; At present realized being higher than the displacement measurement precision of nanometer, under the structure of conventional quartz flexure accelerometers, corresponding acceleration analysis precision can be higher than 1 μ g in theory
0Up to now, do not see the relevant report that this technology is used for the quartz flexible accelerometer design as yet.
Summary of the invention
The present invention is intended to solve the deficiency that overcomes prior art; Solve quartz flexible accelerometer receive factors such as size restrictions and electronic noise, mechanical thermonoise, environment stray capacitance influence that resolution is low, precision is difficult for the problem that improves, and a kind of quartz flexible accelerometer based on laser self-mixing interference with advantages such as measuring accuracy height, resolution height, wide dynamic range, simple and compact for structure, anti-electromagnetic interference (EMI) is provided.For achieving the above object, the technical scheme that the present invention takes is that the quartz flexible accelerometer based on laser self-mixing interference includes: gauge outfit and numeral be the balanced loop again; Gauge outfit is made up of shell, pendulum assembly, torquer, laser self-mixing interference signal transducer; Numeral balanced loop again comprises laser drive power, photoelectric detective circuit, data acquisition circuit, digital signal processing circuit and torque current generator; When acceleration is imported; The laser self-mixing interference signal transducer detects the displacement of pendulum assembly and converts electric signal into; This electric signal is converted into and the proportional current signal of acceleration the balanced loop through numeral again; And feed back to torquer and make it produce trimming moment again, can obtain acceleration through detecting the torquer electric current.
The laser self-mixing interference signal transducer is made up of vertical cavity surface emitting laser VCSEL, photodiode, optical fiber; The pendulum assembly is a quartz pendulous reed; Vertical cavity surface emitting laser VCSEL adopts sawtooth current to drive; Shoot laser focuses on the quartz pendulous reed through collimation lens and produces reflection or scattering, and reflection or the scattered light that part is carried displacement information feeds back in the vertical cavity surface emitting laser VCSEL laser chamber with light generation self-mixed interference in the chamber, causes laser cavity emergent light variable power; The photodetector that is provided with in the laser cavity detects self-mixing interference and is converted into electric signal; This electric signal adopts the whole phase FFT Spectral Analysis Method to extract the phase place of self-mixing interference through converting digital signal into through digital I/V conversion, amplification, filtering and the ADC of balanced loop more then, obtains the displacement of pendulum assembly; Add square in the balanced loop again through numeral, and then obtain high-precision acceleration analysis data through adding the square electric current.
Photoelectric detective circuit is exported photo-signal with gauge outfit and is converted voltage signal into, and photoelectric detective circuit comprises I/V change-over circuit, pre-amplification circuit, and the I/V change-over circuit adopts precision resistance to accomplish the conversion of faint light current signal to voltage signal; Pre-amplification circuit adopts the appearance with high cmrr to use operational amplifier; Data acquisition circuit adopts 24 ADC to accomplish the transformation of simulating signal to digital signal, comprises anti-aliasing filter 503 and A/D change-over circuit; Digital signal processing circuit is mainly accomplished self-mixing interference phase extraction, acceleration demodulation, comprises that power circuit, clock circuit, reset circuit, LCD show; The torque current generator is used to produce the torquer electric current, comprises D/A change-over circuit, smoothed filter circuit and trsanscondutance amplifier.
The present invention adopts the displacement of the responsive quality of laser self-mixing interference measuring method sense acceleration meter, and following advantage is arranged:
1, avoids capacitance acceleration detection method problem based on the acceleration detection method of laser self-mixing interference effect, the problem includes: receive noise and problem that effect of parasitic capacitance accelerometer precision is limited, had advantages such as resolution height, measuring accuracy height, wide dynamic range, anti-electromagnetic interference (EMI).
2, the laser self-mixing interference signal transducer only has one to interfere passage, is prone to collimation, simple and compact for structure, and the accelerometer size is further reduced.
3, the laser self-mixing interference signal transducer adopts vertical cavity surface emitting laser HVS6003-001 as light source; Its front end has autocollimation calibration lens; And this laser instrument inside is packaged with photodiode, can be used as photodetector, has further reduced the signal transducer volume.
4, the laser self-mixing interference measurement is based on micro-displacement measurement a little; Adopt the exact position of three points on three road laser measurement pendulums just can adjust the physical location of pendulum, overcome that pendulum rocks and acceleration sensitive axle and carrier movement input shaft do not overlap the error effect that brings to measurement.
5, utilize the whole phase FFT Zymography to carry out the phase demodulating of self-mixing interference, this method can improve self-mixing interference phase extraction precision, and spectral leakage be little, algorithm is simple under the prerequisite that does not increase system complexity.
Description of drawings
Fig. 1 is a structure principle chart of the present invention.
Fig. 2 is an optical system configuration composition of the present invention.
Fig. 3 is a drive circuit for laser schematic diagram of the present invention.
Fig. 4 is a numeral of the present invention balanced loop block diagram again.
Embodiment
Patent of the present invention adopts following technical scheme: a kind of novel quartz flexible accelerometer based on laser self-mixing interference comprises gauge outfit and numeral balanced loop again.Gauge outfit is by shell, pendulum assembly, torquer, laser constitution.Numeral balanced loop again comprises laser drive power, photoelectric detective circuit, data acquisition circuit, digital signal processing circuit and torque current generator.When acceleration is imported; The laser self-mixing interference signal transducer detects the displacement of pendulum assembly and converts electric signal into; This electric signal is converted into and the proportional current signal of acceleration the balanced loop through numeral again; And feed back to torquer and make it produce trimming moment again, can obtain acceleration through detecting the torquer electric current.
The laser self-mixing interference signal transducer is made up of vertical cavity surface emitting laser (VCSEL), photodiode, optical fiber, quartz pendulous reed.It is following that it detects principle: VCSEL adopts sawtooth current to drive; Shoot laser focuses on through collimation lens and produces reflection or scattering on the quartz pendulous reed; The exterior light that part is carried displacement information feeds back in the laser chamber with light generation self-mixed interference in the chamber; Cause laser cavity emergent light variable power, photodetector detects self-mixing interference and is converted into electric signal, and this electric signal converts digital signal into through I/V conversion, amplification, filtering and ADC; Adopt the whole phase FFT Spectral Analysis Method to extract the phase place of self-mixing interference then; Obtain the displacement of pendulum assembly, add square in the balanced loop again through numeral, and then obtain high-precision acceleration analysis data through adding the square electric current.
Below in conjunction with accompanying drawing and specific embodiment further explain the present invention.
Fig. 1 is a structure principle chart of the present invention.This novel quartz flexible accelerometer is made up of balanced loop 500 shell 100, pendulum assembly, push-pull type torquer, laser self-mixing interference signal transducer and numeral again.Shell 100 is the hardware of a sealing, and pendulum assembly, torquer, laser self-mixing interference signal transducer are packaged in the shell 100.The pendulum assembly comprises torquer moving-coil 302 and pendulum 202, and torquer moving-coil 302 is installed on the center of pendulum 202 through the mode of glueing joint, and pendulum 202 bottoms connect flexible beam 201 makes the pendulum assembly link to each other with accelerometer housing 100 elasticity.The push-pull type torquer comprises permanent magnet 303, yoke 301, torquer moving winding 302, and yoke 301 is fixed on the middle part of housing 100, and permanent magnet 303 is installed on the center of yoke 301 through cementation method, and passes torquer moving-coil 302.The laser self-mixing interference signal transducer comprises target 401, optical fiber 402, collimation lens 403, laser instrument 404, photodiode 406; Target 401 is installed in the top of pendulum 202; Laser instrument 404, photodiode 406 are packaged in the metal sleeve 405 that is used for scattering; Collimation lens 403 is fixed in sleeve 405 1 ends, and sleeve 405 is installed on the accelerometer housing 100.The output terminal of photodiode 406 connects the input of digital rebalancing circuit 500, and the output current I of digital rebalancing circuit 500 feeds back to torquer moving-coil 302, makes torquer produce trimming moment again.
Fig. 2 representes optical system configuration composition of the present invention.Optical system is made up of photodiode 406, laser instrument 404, collimation lens 403, optical fiber 402, quartz pendulous reed 401, driving power 600.Laser instrument 404 is by driving power 600 driven for emitting lights; Output laser is behind collimation lens 403 collimations; Be radiated at generation reflection and scattering on the quartz pendulous reed 401 through optical fiber 402 transmission; Part light feed back in laser instrument 404 resonator cavitys with the chamber in light mix formation self-mixed interference, modulated laser output power.Laser instrument 404 is vertical cavity surface emitting laser HVS6003-001, and this laser instrument inside is packaged with photodiode, can be used as photodetector, and its front end has autocollimation calibration lens, has further reduced the signal transducer volume.
Fig. 3 representes laser drive power circuit theory diagrams of the present invention.Drive circuit for laser 600 is made up of modulation current source and sawtooth signal generation circuit, Drive Protecting Circuit.The sawtooth signal generator is used to produce the sawtooth wave undulating current of modulated laser output signal, adopts Direct Digital synthesis method of the frequency (DDS) to generate the sawtooth wave drive current, comprises DDS chip 604, frequency adjustment 601, amplitude adjustment 602 and power supply 603.Modulation current source 605 is used to produce constant DC component makes laser works in the range of linearity.The sawtooth signal generator is sent into V/I conversion 608 with the modulation current source after adding circuit 605 stacks can produce the modulating current that is used for drive laser.Holding circuit comprises soft start 607, current-limiting protection 609, and when soft start 607 protection laser instruments do not receive electric power starting and the surge that produces influences, current-limiting protection 609 protection laser works electric currents are lower than the maximum allowed current of VCSEL.
Fig. 4 representes numeral of the present invention balanced loop again.This novel quartz flexible accelerometer numeral balanced loop 500 again is made up of photoelectric detective circuit, data acquisition circuit, digital signal processing circuit, torque current generator.Photoelectric detective circuit is exported photo-signal with gauge outfit and is converted voltage signal into, comprises I/V change-over circuit 501, pre-amplification circuit 502, and I/V change-over circuit 501 adopts precision resistance to accomplish the conversion of faint light current signal to voltage signal; Pre-amplification circuit 502 adopts the appearance with high cmrr to use operational amplifier.Data acquisition circuit adopts 24 ADC to accomplish the transformation of simulating signal to digital signal, comprises anti-aliasing filter 503 and A/D change-over circuit 504.Digital signal processing circuit is mainly accomplished self-mixing interference phase extraction, acceleration demodulation, comprises that power circuit 510, clock circuit 511, reset circuit 512, LCD show 509.The torque current generator is used to produce the torquer electric current, comprises D/A change-over circuit 506, smoothed filter circuit 507 and trsanscondutance amplifier 508.
Claims (3)
1. the quartz flexible accelerometer based on laser self-mixing interference is characterized in that, includes: gauge outfit and numeral be the balanced loop again; Gauge outfit is made up of shell, pendulum assembly, torquer, laser self-mixing interference signal transducer; Numeral balanced loop again comprises laser drive power, photoelectric detective circuit, data acquisition circuit, digital signal processing circuit and torque current generator; When acceleration is imported; The laser self-mixing interference signal transducer detects the displacement of pendulum assembly and converts electric signal into; This electric signal is converted into and the proportional current signal of acceleration the balanced loop through numeral again; And feed back to torquer and make it produce trimming moment again, can obtain acceleration through detecting the torquer electric current.
2. the quartz flexible accelerometer based on laser self-mixing interference as claimed in claim 1 is characterized in that the laser self-mixing interference signal transducer is made up of vertical cavity surface emitting laser VCSEL, photodiode, optical fiber; The pendulum assembly is a quartz pendulous reed; Vertical cavity surface emitting laser VCSEL adopts sawtooth current to drive; Shoot laser focuses on the quartz pendulous reed through collimation lens and produces reflection or scattering, and reflection or the scattered light that part is carried displacement information feeds back in the vertical cavity surface emitting laser VCSEL laser chamber with light generation self-mixed interference in the chamber, causes laser cavity emergent light variable power; The photodetector that is provided with in the laser cavity detects self-mixing interference and is converted into electric signal; This electric signal adopts the whole phase FFT Spectral Analysis Method to extract the phase place of self-mixing interference through converting digital signal into through digital I/V conversion, amplification, filtering and the ADC of balanced loop more then, obtains the displacement of pendulum assembly; Add square in the balanced loop again through numeral, and then obtain high-precision acceleration analysis data through adding the square electric current.
3. the quartz flexible accelerometer based on laser self-mixing interference as claimed in claim 1; It is characterized in that; Photoelectric detective circuit is exported photo-signal with gauge outfit and is converted voltage signal into; Photoelectric detective circuit comprises I/V change-over circuit, pre-amplification circuit, and the I/V change-over circuit adopts precision resistance to accomplish the conversion of faint light current signal to voltage signal; Pre-amplification circuit adopts the appearance with high cmrr to use operational amplifier; Data acquisition circuit adopts 24 ADC to accomplish the transformation of simulating signal to digital signal, comprises anti-aliasing filter 503 and A/D change-over circuit; Digital signal processing circuit is mainly accomplished self-mixing interference phase extraction, acceleration demodulation, comprises that power circuit, clock circuit, reset circuit, LCD show; The torque current generator is used to produce the torquer electric current, comprises D/A change-over circuit, smoothed filter circuit and trsanscondutance amplifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110448020 CN102520209B (en) | 2011-12-28 | 2011-12-28 | Quartz flexible accelerometer based on laser self-mixing interference |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110448020 CN102520209B (en) | 2011-12-28 | 2011-12-28 | Quartz flexible accelerometer based on laser self-mixing interference |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102520209A true CN102520209A (en) | 2012-06-27 |
| CN102520209B CN102520209B (en) | 2013-06-19 |
Family
ID=46291197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110448020 Expired - Fee Related CN102520209B (en) | 2011-12-28 | 2011-12-28 | Quartz flexible accelerometer based on laser self-mixing interference |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102520209B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107102168A (en) * | 2017-04-27 | 2017-08-29 | 青岛智腾微电子有限公司 | A kind of quartz flexible accelerometer |
| CN108240902A (en) * | 2016-12-27 | 2018-07-03 | 天津大学 | A kind of test device and test method of electromagnetic torque device |
| AU2016394137B2 (en) * | 2016-02-25 | 2018-08-16 | Institute Of Geology And Geophysics, Chinese Academy Of Sciences | Flexible high-precision accelerometer |
| CN109682992A (en) * | 2019-01-08 | 2019-04-26 | 中山大学 | A kind of high-precision laser interference accelerometer |
| CN113405474A (en) * | 2021-08-03 | 2021-09-17 | 重庆大学 | Flexible swing sheet displacement testing device and testing method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200953027Y (en) * | 2006-09-30 | 2007-09-26 | 北京航天万新科技有限公司 | Improved quartz flexible accelerometer |
| CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
| CN101639541A (en) * | 2009-09-07 | 2010-02-03 | 北京航天控制仪器研究所 | Accelerometer relative gravity meter |
| CN201749128U (en) * | 2010-08-18 | 2011-02-16 | 中国电子科技集团公司第四十三研究所 | Servo circuit of quartz flexible accelerometer |
| CN102024085A (en) * | 2010-12-22 | 2011-04-20 | 北京航空航天大学 | Magnetic-structural coupling simulation method for quartz flexible accelerometer based on finite elements |
-
2011
- 2011-12-28 CN CN 201110448020 patent/CN102520209B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200953027Y (en) * | 2006-09-30 | 2007-09-26 | 北京航天万新科技有限公司 | Improved quartz flexible accelerometer |
| CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
| CN101639541A (en) * | 2009-09-07 | 2010-02-03 | 北京航天控制仪器研究所 | Accelerometer relative gravity meter |
| CN201749128U (en) * | 2010-08-18 | 2011-02-16 | 中国电子科技集团公司第四十三研究所 | Servo circuit of quartz flexible accelerometer |
| CN102024085A (en) * | 2010-12-22 | 2011-04-20 | 北京航空航天大学 | Magnetic-structural coupling simulation method for quartz flexible accelerometer based on finite elements |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2016394137B2 (en) * | 2016-02-25 | 2018-08-16 | Institute Of Geology And Geophysics, Chinese Academy Of Sciences | Flexible high-precision accelerometer |
| US10309984B2 (en) | 2016-02-25 | 2019-06-04 | Institute Of Geology And Geophysics, Chinese Academy Of Sciences | High-precision pendulous accelerometer |
| CN108240902A (en) * | 2016-12-27 | 2018-07-03 | 天津大学 | A kind of test device and test method of electromagnetic torque device |
| CN107102168A (en) * | 2017-04-27 | 2017-08-29 | 青岛智腾微电子有限公司 | A kind of quartz flexible accelerometer |
| CN109682992A (en) * | 2019-01-08 | 2019-04-26 | 中山大学 | A kind of high-precision laser interference accelerometer |
| CN113405474A (en) * | 2021-08-03 | 2021-09-17 | 重庆大学 | Flexible swing sheet displacement testing device and testing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102520209B (en) | 2013-06-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101270991B (en) | System for measuring interfere type optic fiber gyroscope eigenfrequency and half-wave voltage adopting square wave modulation | |
| CN102520209B (en) | Quartz flexible accelerometer based on laser self-mixing interference | |
| CN102620811B (en) | Novel high-precision heterodyne laser vibration measuring instrument | |
| CN101968380B (en) | Ultralow frequency vibration measurer calibration system and laser interferometer thereof | |
| CN201749128U (en) | Servo circuit of quartz flexible accelerometer | |
| CN102759635A (en) | Micro-optical acceleration sensor integrated with grating piezoelectric modulation and detection method thereof | |
| CN110108299B (en) | Silicon micromechanical gyroscope scale factor online self-calibration system | |
| CN103697954B (en) | A kind of microcavity interference flow velocity pressure reduction sensitive structure and microcavity interference flow velocity of optical flow transducer | |
| CN103487133B (en) | Method and device for improving signal-to-noise ratio of laser micro-vibration sensing system | |
| CN104166015A (en) | High-precision wide-range optical NEMS micro accelerometer based on monolithic integration | |
| CN111006753B (en) | Phase feedback controlled optical fiber interference ultralow frequency vibration measuring device and method | |
| CN202563087U (en) | Laser ranging instrument | |
| CN109870592A (en) | A kind of optical accelerometer based on electromagnetism power drive | |
| CN109541257A (en) | A kind of pendulous accelerometer | |
| CN101509772A (en) | Optical phase detecting high precision silicon microelectromechanical gyroscope | |
| CN103439530A (en) | Optical accelerometer | |
| CN110531443B (en) | Calibration device of earthquake intensity meter | |
| CN211527422U (en) | Micro-inertia measuring unit | |
| CN103968821B (en) | Two-way resonance type optical gyroscope | |
| CN102003957A (en) | Four-frequency laser gyro zero offset compensation method | |
| CN103234590B (en) | Underground optical fiber flow sensor in oil field | |
| CN108444464B (en) | Method for suppressing noise of relative intensity of light source in optical fiber gyroscope | |
| CN201417314Y (en) | Tricomponent photoelectricity mixing integration acceleration seismic geophone | |
| RU2684683C1 (en) | Aerometric pressure sensor | |
| CN201828334U (en) | Ultra-low-frequency vibration metering instrument calibration system and laser interferometer thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130619 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |