CN200953027Y - Improved quartz flexible accelerometer - Google Patents

Improved quartz flexible accelerometer Download PDF

Info

Publication number
CN200953027Y
CN200953027Y CN 200620133975 CN200620133975U CN200953027Y CN 200953027 Y CN200953027 Y CN 200953027Y CN 200620133975 CN200620133975 CN 200620133975 CN 200620133975 U CN200620133975 U CN 200620133975U CN 200953027 Y CN200953027 Y CN 200953027Y
Authority
CN
China
Prior art keywords
quartz flexible
assembly
upper cover
cover plate
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 200620133975
Other languages
Chinese (zh)
Inventor
杨守安
顾文华
杨卓
袁枫
刘�英
张兰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aerospace Science and Industry Inertia Technology Co Ltd
Original Assignee
Hangtian Wanxi Science & Technology Co Ltd Beijing
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hangtian Wanxi Science & Technology Co Ltd Beijing filed Critical Hangtian Wanxi Science & Technology Co Ltd Beijing
Priority to CN 200620133975 priority Critical patent/CN200953027Y/en
Application granted granted Critical
Publication of CN200953027Y publication Critical patent/CN200953027Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Abstract

This utility model relates to one improved quartz flexibility accelerometer. It includes meter head and composite integrated circuit. The meter head includes casing and core. The core consists of upper cover plate, quartz flexibility swing components and lower torquer. The quartz flexibility swing component consists of counterweight, swing plate and coll. Laser welding or heat-resistant adhesives or both methods are adopted for at least partial connection between the meter head and various components of the core, between various components of the quartz flexibility swing component and between various components of the lower torqurer.

Description

A kind of improved quartz flexible accelerometer
Technical field:
The utility model relates to a kind of accelerometer, more particularly, relates to a kind of improved quartz flexible accelerometer.
Background technology:
Quartz flexible accelerometer of the present utility model is a kind of mechanical pendulous accelerometer, have precision height, characteristics highly sensitive, low in energy consumption, simultaneously it is simple in structure, volume is little, in light weight, easy to use and change, be widely used in the navigation control systems such as space flight, aviation, navigation at present.
The continuous expansion of application has proposed new requirement to the performance of quartz flexible accelerometer.In the abominable application scenario of a few thing environment, petroleum drilling with the deviational survey system of boring deviational survey system, industrial detection system, reservoir dam or construction work etc. for example, on the one hand because the restriction of physical dimension and weight, some inertial measuring units can't be installed vibration absorber, therefore require after being subjected to bigger impact, quartz flexible accelerometer should avoid occurring the damage phenomenon; Require the quartz flexible acceleration to have stronger high-temperature resistance on the other hand, so as in the higher occasion of environment temperature operate as normal.At present, in the domestic existing quartz flexible accelerometer, maximum operating temperature is 80 ℃, and shock resistance can reach 100g, and these all can't satisfy the abominable application requirements of above-mentioned environment.In addition abroad in the like product, the QA series quartz flexible accelerometer that U.S. Honeywell company produces is a series products of best, the tool representative of combination property, wherein, the maximum operating temperature of QA-2000 is that 95 ℃, shock resistance are 250g, the maximum operating temperature of QA-1500 is that 80 ℃, shock resistance can reach 385g, also has a certain distance between these performance index and the application requirements.
This shows that along with the continuous expansion of application, development shock resistance, resistant to elevated temperatures quartz flexible accelerometer is imperative.
The utility model content:
Technical problem to be solved in the utility model is, overcomes the deficiency of above-mentioned prior art and provides a kind of and can use under abominable working environment such as petroleum prospecting, industrial detection, the improved quartz flexible accelerometer of high temperature resistant, anti-severe impact.
For achieving the above object, the utility model is taked following design proposal:
A kind of improved quartz flexible accelerometer of the present utility model, comprise gauge outfit and mixed integrated circuit, wherein, gauge outfit comprises housing and watch core, described watch core is made up of upper cover plate, quartz flexible pendulum assembly and following torquer, described quartz flexible pendulum assembly is made up of counterweight, pendulum and coil, between each assembly of described gauge outfit and watch core, between each assembly of described quartz flexible pendulum assembly and between upper cover plate, quartz flexible pendulum assembly and the described time torquer, interconnect by laser bonding or by high-temperature plastic or by both combination at least in part.
According to a kind of improved quartz flexible accelerometer that the utility model provides, also have following attached technical characterictic:
The upper cover plate of described watch core, quartz flexible pendulum assembly, and be connected by laser bonding to small part between the torquer down.
Bond mutually by high-temperature plastic at least in part between each assembly of described quartz flexible pendulum assembly.
Bonding by anti-120 ℃ of high-temp glue at least in part between each assembly of described quartz flexible pendulum assembly.
The specific stiffness of described pendulum is greater than 76g/rad.
Described watch core also comprises the abdominal belt around described upper cover plate and following torquer.
Be connected by laser bonding between described abdominal belt and upper cover plate and the following torquer.
Described housing is mutually bonding by anti-120 ℃ high-temp glue with described watch core.
The utility model has the advantages that: because between each assembly of gauge outfit of the present utility model and watch core, between each assembly of quartz flexible pendulum assembly and upper cover plate, quartz flexible pendulum assembly and described down between the torquer, interconnect by laser bonding or by high-temperature plastic or by both combination at least in part, and the specific stiffness of quartz flexible pendulum wherein is greater than 76g/rad, so just can improve the maximum operating temperature and the impact resistance of quartz flexible accelerometer widely, simultaneously, manufacturing dimension of the present utility model is 20mm * 20mm * 15mm to 25mm * 25mm * 30mm, quality is that 30 grams are to 60 grams, so, it is little to have size concurrently, light weight, and cost is lower, advantage such as simple.
Description of drawings:
Fig. 1 is a principle of work synoptic diagram of the present utility model;
Fig. 2 is a structural representation of the present utility model;
Specific embodiments:
Referring to Fig. 1, the principle of work of quartz flexible accelerometer shown in it, quartz flexible accelerometer is made up of gauge outfit and mixed integrated circuit two parts, and wherein the gauge outfit part mainly comprises flexible level bridge and detects several parts such as quality pendulum assembly 111, electromagnetic torque device 112, differential capacitance sensor 113.Under the duty, extraneous acceleration is along the input shaft effect of accelerometer, and consequent inertial force acts on and detects quality pendulum assembly 111, causes its position to change, thereby causes the capacitance variation of differential capacitance sensor 113.Utilize the differential capacitor detecting device in the servo circuit 114 to detect this variation, it is transformed into corresponding current feedback to electromagnetic torque device 112, thereby produce electromagnetic torque, make that detecting quality pendulum assembly 112 comes back to equilibrium state.Under the dynamic balance state, act on the inertial force that detects on the quality pendulum assembly 112 and the electromagnetic force equilibrium of electromagnetic torque device 114, the electric current that flows through sampling resistor by measurement can obtain the size of extraneous acceleration.
Referring to Fig. 2, wherein express a kind of improved quartz flexible accelerometer of the present utility model, comprise gauge outfit 212 and mixed integrated circuit 28, wherein, gauge outfit 212 comprises housing 27 and watch core 211, described watch core 211 is by upper cover plate 26, quartz flexible pendulum assembly 210 and following torquer 24 are formed, described quartz flexible pendulum assembly 210 is by counterweight 21, pendulum 22 and coil 23 are formed, between each assembly of described gauge outfit 212 and watch core 211, between each assembly of described quartz flexible pendulum assembly 210 and upper cover plate 26, between quartz flexible pendulum assembly 210 and the described time torquer 24, interconnect by laser bonding or by high-temperature plastic or by both combination at least in part.Preferably, the upper cover plate 26 of described watch core, quartz flexible pendulum assembly 210, and be connected by laser bonding to small part between the torquer 24 down; Bond mutually by high-temperature plastic at least in part between each assembly of described quartz flexible pendulum assembly 210.
Referring to Fig. 2, in the preferred embodiment of the above-mentioned a kind of improved quartz flexible accelerometer that provides, the concrete structure of described improved quartz flexible accelerometer, comprise gauge outfit 212 and mixed integrated circuit 28, gauge outfit 212 is electrically connected by line 29 with mixed integrated circuit 28, wherein, gauge outfit 212 comprises housing 27 and watch core 211, described watch core 211 is by upper cover plate 26, quartz flexible pendulum assembly 210, following torquer 24 and form around the abdominal belt 25 of described upper cover plate 26 and following torquer 24, described quartz flexible is put assembly 210 by counterweight 21, pendulum 22 and coil 23 are formed.
Wherein, the specific stiffness of described pendulum 22 is greater than 76g/rad.The housing 27 of described gauge outfit 212 and watch core 211, bonding by anti-120 ℃ of high-temp glue; Between described upper cover plate 26, quartz flexible pendulum assembly 210, following torquer 24 and the abdominal belt 25, be connected by laser bonding; Counterweight 21, pendulum 22 and the coil 23 of described quartz flexible pendulum assembly 210, bonding by anti-120 ℃ of high-temp glue.
The overall dimensions of quartz flexible accelerometer of the present utility model preferably is fabricated to 20mm * 20mm * 15mm to 25mm * 25mm * 30mm, and quality is 30~60 grams.
Be the functional test data of embodiment described in the utility model being carried out hot environment test front and back shown in the table 1, test shows that quartz flexible accelerometer described in the utility model can bear 120 ℃ working temperature.
Be the functional test data of embodiment described in the utility model being carried out the impulse test front and back shown in the table 2, test shows that the semisinusoidal drop type that quartz flexible accelerometer described in the utility model can bear 1000g impacts.
Table 1
Test-meter Normal temperature test+1g exports (V/g) 120 ℃ of insulation 8h ,+1g exports (V/g) Remarks
1# 2.8778 2.9025 Output is normal
2# 2.7627 2.7902 Output is normal
Table 2
Test-meter Impact preceding+1g and export (V/g) Impact back+1g output (V/g) Remarks
1# 1.4969 1.4370 Output is normal
2# 1.3100 1.2873 Output is normal
Obviously, those of ordinary skill in the art can constitute various types of acceleration analysis instruments and measuring system with a kind of improved quartz flexible accelerometer of the present utility model.
The foregoing description is only for the usefulness that the utility model is described; and be not to be to restriction of the present utility model; the those of ordinary skill in relevant technologies field; under the situation that does not break away from spirit and scope of the present utility model; can also make various variations and modification; therefore all technical schemes that are equal to also should belong to category of the present utility model, and scope of patent protection of the present utility model should be limited by each claim.

Claims (8)

1, a kind of improved quartz flexible accelerometer, comprise gauge outfit (212) and mixed integrated circuit (28), wherein, gauge outfit (212) comprises housing (27) and watch core (211), described watch core (211) is by upper cover plate (26), quartz flexible pendulum assembly (210) and following torquer (24) are formed, described quartz flexible pendulum assembly (210) is by counterweight (21), pendulum (22) and coil (23) are formed, it is characterized in that: between each assembly of described gauge outfit (212) and watch core (211), between each assembly of described quartz flexible pendulum assembly (210) and upper cover plate (26), between quartz flexible pendulum assembly (210) and the described time torquer (24), interconnect by laser bonding or by high-temperature plastic or by both combination at least in part.
2, a kind of improved quartz flexible accelerometer according to claim 1 is characterized in that: the upper cover plate of described watch core (26), quartz flexible pendulum assembly (210), and be connected by laser bonding to small part between the torquer (24) down.
3, a kind of improved quartz flexible accelerometer according to claim 1 and 2 is characterized in that: bond mutually by high-temperature plastic at least in part between each assembly of described quartz flexible pendulum assembly (210).
4, a kind of improved quartz flexible accelerometer according to claim 3 is characterized in that: bonding by anti-120 ℃ of high-temp glue at least in part between each assembly of described quartz flexible pendulum assembly (210).
5, according to claim 1 or 3 described a kind of improved quartz flexible accelerometers, it is characterized in that: the specific stiffness of described pendulum (22) is greater than 76g/rad.
6, a kind of improved quartz flexible accelerometer according to claim 1 is characterized in that: described watch core (211) also comprises the abdominal belt (25) around described upper cover plate (26) and following torquer (24).
7, a kind of improved quartz flexible accelerometer according to claim 6 is characterized in that: be connected by laser bonding between described abdominal belt (25) and upper cover plate (26) and the following torquer (24).
8, a kind of improved quartz flexible accelerometer according to claim 1, it is characterized in that: described housing (27) is mutually bonding by anti-120 ℃ high-temp glue with described watch core (211).
CN 200620133975 2006-09-30 2006-09-30 Improved quartz flexible accelerometer Expired - Lifetime CN200953027Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200620133975 CN200953027Y (en) 2006-09-30 2006-09-30 Improved quartz flexible accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200620133975 CN200953027Y (en) 2006-09-30 2006-09-30 Improved quartz flexible accelerometer

Publications (1)

Publication Number Publication Date
CN200953027Y true CN200953027Y (en) 2007-09-26

Family

ID=38811328

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200620133975 Expired - Lifetime CN200953027Y (en) 2006-09-30 2006-09-30 Improved quartz flexible accelerometer

Country Status (1)

Country Link
CN (1) CN200953027Y (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101592678B (en) * 2009-07-03 2011-07-20 北京航天控制仪器研究所 Flexible pendulous accelerometer
CN102520209A (en) * 2011-12-28 2012-06-27 天津大学 Quartz flexible accelerometer based on laser self-mixing interference
CN102554448A (en) * 2011-12-31 2012-07-11 航天科工惯性技术有限公司 Device and method for carrying out thermocompression welding on enameled wires of pendulum components
CN103033645A (en) * 2012-12-11 2013-04-10 北京兴华机械厂 Omniseal gauge outfit and quartz flexure accelerometer
CN103134952A (en) * 2011-11-30 2013-06-05 航天科工惯性技术有限公司 Sealed accelerometer
CN103305137A (en) * 2013-05-30 2013-09-18 航天科工惯性技术有限公司 Solidifying method of adhesive in process of hoisting accelerometer
CN104400236A (en) * 2014-09-25 2015-03-11 航天科工惯性技术有限公司 Welding method and welding structure of accelerometer movement
CN106066405A (en) * 2016-06-29 2016-11-02 中国电子科技集团公司第二十六研究所 Quartz flexible accelerometer air-tight packaging structure
CN109142787A (en) * 2018-07-24 2019-01-04 中国航空工业集团公司西安飞行自动控制研究所 A kind of nonmetallic flexible whole pendulum
CN109239402A (en) * 2018-09-28 2019-01-18 陕西华燕航空仪表有限公司 A kind of accelerometer
CN113092816A (en) * 2019-12-20 2021-07-09 航天科工惯性技术有限公司 Electrical connection method of accelerometer pendulum assembly and circuit, accelerometer and insulator
CN114371312A (en) * 2020-10-15 2022-04-19 航天科工惯性技术有限公司 Torque device suitable for high-temperature environment and stabilization processing method

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101592678B (en) * 2009-07-03 2011-07-20 北京航天控制仪器研究所 Flexible pendulous accelerometer
CN103134952A (en) * 2011-11-30 2013-06-05 航天科工惯性技术有限公司 Sealed accelerometer
CN103134952B (en) * 2011-11-30 2015-07-22 航天科工惯性技术有限公司 Sealed accelerometer
CN102520209A (en) * 2011-12-28 2012-06-27 天津大学 Quartz flexible accelerometer based on laser self-mixing interference
CN102520209B (en) * 2011-12-28 2013-06-19 天津大学 Quartz flexible accelerometer based on laser self-mixing interference
CN102554448A (en) * 2011-12-31 2012-07-11 航天科工惯性技术有限公司 Device and method for carrying out thermocompression welding on enameled wires of pendulum components
CN102554448B (en) * 2011-12-31 2014-06-18 航天科工惯性技术有限公司 Device and method for carrying out thermocompression welding on enameled wires of pendulum components
CN103033645A (en) * 2012-12-11 2013-04-10 北京兴华机械厂 Omniseal gauge outfit and quartz flexure accelerometer
CN103305137B (en) * 2013-05-30 2014-08-20 航天科工惯性技术有限公司 Solidifying method of adhesive in process of hoisting accelerometer
CN103305137A (en) * 2013-05-30 2013-09-18 航天科工惯性技术有限公司 Solidifying method of adhesive in process of hoisting accelerometer
CN104400236A (en) * 2014-09-25 2015-03-11 航天科工惯性技术有限公司 Welding method and welding structure of accelerometer movement
CN106066405A (en) * 2016-06-29 2016-11-02 中国电子科技集团公司第二十六研究所 Quartz flexible accelerometer air-tight packaging structure
CN109142787A (en) * 2018-07-24 2019-01-04 中国航空工业集团公司西安飞行自动控制研究所 A kind of nonmetallic flexible whole pendulum
CN109239402A (en) * 2018-09-28 2019-01-18 陕西华燕航空仪表有限公司 A kind of accelerometer
CN113092816A (en) * 2019-12-20 2021-07-09 航天科工惯性技术有限公司 Electrical connection method of accelerometer pendulum assembly and circuit, accelerometer and insulator
CN114371312A (en) * 2020-10-15 2022-04-19 航天科工惯性技术有限公司 Torque device suitable for high-temperature environment and stabilization processing method

Similar Documents

Publication Publication Date Title
CN200953027Y (en) Improved quartz flexible accelerometer
CN103575932B (en) A kind of MEMS piezoresistive accelerometer
CN102768291B (en) Piezoresistive monolithic integrated four-beam tri-axial accelerometer
CN103644912B (en) A kind of laser gyro strap down inertial measuring unit of multilist redundancy
CN203163786U (en) Strain type resistance flowmeter
CN203037669U (en) Center-symmetrical packaging quartz flexible acceleration sensor
TW201310005A (en) Inertia sensing apparatus
CN103954793A (en) MEMS accelerometer
CN101216498A (en) Dual spindle differential capacitance type micromechanical accelerameter
Wang et al. A piezoresistive micro-accelerometer with high frequency response and low transverse effect
CN108089027A (en) Sensor and navigation attitude instrument based on MEMS capacitive micro-acceleration gauge
CN102680738B (en) Transverse-interference-resistant silicon nanobelt giant-piezoresistive-effect micro-accelerometer
CN1172170C (en) High-temp resisting petroleum downhole dynamic pressure sensor
CN203037666U (en) Vibration-resistant quartz flexible acceleration sensor
CN206096177U (en) Quartz flexible accelerometer
CN203606386U (en) MEMS piezoresistive accelerometer
CN1288448C (en) High value speedometer
CN201876332U (en) Surface friction shearing stress sensor
CN111766401A (en) Triaxial piezoresistive accelerometer
CN202947728U (en) Device for detecting inclination angle and correcting balance based on triaxial accelerometer
CN104697679B (en) A kind of inductance type strain gauge
CN203672371U (en) Quartz flexure accelerometer based dipmeter
Ágoston Studying and Modeling Vibration Transducers and Accelerometers
CN106872728B (en) Band outranges the three axis integrated form acceleration transducer of high-g level of protection
CN111735989A (en) Triaxial piezoresistive accelerometer

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: INERTIAL AEROSPACE SCIENCE AND INDUSTRY TECHNOLOG

Free format text: FORMER OWNER: BEIJING HANGTIANWANXIN SCIENCE CO., LTD.

Effective date: 20080606

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20080606

Address after: Beijing city Fengtai District Haiying Road No. 1 1-10, zip code: 100070

Patentee after: Aerospace Science and Industry Inertia Technology Co., Ltd.

Address before: Beijing City, Fengtai Science City Haiying Road No. 3 wonew, zip code: 100070

Patentee before: Hangtian Wanxi Science & Technology Co., Ltd., Beijing

CX01 Expiry of patent term

Granted publication date: 20070926

EXPY Termination of patent right or utility model