CN106066405A - Quartz flexible accelerometer air-tight packaging structure - Google Patents
Quartz flexible accelerometer air-tight packaging structure Download PDFInfo
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- CN106066405A CN106066405A CN201610491764.4A CN201610491764A CN106066405A CN 106066405 A CN106066405 A CN 106066405A CN 201610491764 A CN201610491764 A CN 201610491764A CN 106066405 A CN106066405 A CN 106066405A
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- seal closure
- sensitive apparatus
- sensitive
- sub case
- accelerometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
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Abstract
The invention discloses a kind of quartz flexible accelerometer air-tight packaging structure, including Sensitive Apparatus, shell, servo circuit, seal closure and glass insulation sub case, described Sensitive Apparatus is installed in seal closure by epoxy glue, seal closure oral area passes through glass insulator package closure, and seal closure, glass insulation sub case and Sensitive Apparatus collectively form sensitive gauge outfit；Sensitive Apparatus fixedly mounts in the enclosure with the form of sensitive gauge outfit by adhesive technology, and Sensitive Apparatus output lead is connected with servo circuit by the pin on glass insulation sub case.This encapsulating structure can enable the work that accelerometer is the most reliable and stable in low pressure (or vacuum) and electromagnetic radiation environment.The present invention makes simply, technical maturity, can be effectively improved accelerometer precision in the environment such as star use or other space application and reliability.
Description
Technical field
The present invention relates to arrangements of accelerometers improve, refer specifically to quartz flexible accelerometer air-tight packaging structure, this envelope
Assembling structure has widened the application of quartz flexible accelerometer, is particularly well-suited to satellite or other space flight, space craft is led
Navigate, guide and control quartz flexible accelerometer, belong to quartz flexible accelerometer field.
Background technology
Quartz flexible accelerometer is a kind of dynamic balance pendulous accelerometer, has good stability, precision height, structure letter
The features such as list, easy miniaturization, are the various strategies/tactical weapon navigation of current Aeronautics and Astronautics, navigation and terrestrial world, guidance
With control system is applied to obtain a widest class accelerometer.
Quartz flexible accelerometer uses air film damping to adjust the damping of accelerometer.Sensitive device structure is once
Determining, its air film damping size is just determined by the density of air.After quartz flexible accelerometer completes, Sensitive Apparatus
Internal atmospheric density is determined by the atmospheric density of production environment.If accelerometer occurs air to leak in application process,
Atmospheric density in Sensitive Apparatus reduces, then air film damping effect reduces, and the dynamic property of accelerometer can deteriorate, and accelerates
The bad stability of degree meter.It addition, the electro-magnetic feedback power of quartz flexible accelerometer derives from the magnetic field that magnetic force provides away from device, and
Magnetic force can be affected by external magnetic field or changes of magnetic field away from device magnetic field, say, that external magnetic field can affect the essence of accelerometer
Degree, increases measurement error.
The encapsulating structure that existing quartz flexible accelerometer uses is as shown in Figure 1.Sensitive Apparatus 1 is directly used epoxy glue
7 are adhesively fixed in the stainless steel casing 2 with mounting flange 9, are adhesively fixed servo circuit 3 at shell 2 oral area, Sensitive Apparatus
1 is connected with servo circuit 3 by connecting wire 4.
Existing mode has the disadvantage in that
1. it not air-tight packaging structure due to Sensitive Apparatus, work in low pressure or vacuum environment for a long time, in Sensitive Apparatus
Portion's air is revealed will cause accelerometer Parameters variation, unstable properties；
The most not taking magnetic shield measure, accelerometer output to be vulnerable to external magnetic field interference, measurement error increases.
Summary of the invention
For deficiencies of the prior art, it is an object of the invention to provide a kind of quartz flexible accelerometer gas
Close property encapsulating structure.This encapsulating structure can enable that accelerometer is long-term can in low pressure (or vacuum) and electromagnetic radiation environment
By stable work.The present invention makes simply, technical maturity, can be effectively improved accelerometer and use or other space application rings at star
Precision in border and reliability.
To achieve these goals, the technical solution used in the present invention is as follows:
Quartz flexible accelerometer air-tight packaging structure, including Sensitive Apparatus, shell and servo circuit, outside Sensitive Apparatus is positioned at
In shell, servo circuit is fixed on housing mouth, and Sensitive Apparatus is connected with servo circuit by connecting wire；It is characterized in that: also
Including seal closure and glass insulation sub case, described Sensitive Apparatus is installed in seal closure by epoxy glue, and seal closure oral area leads to
Crossing glass insulator package closure, seal closure, glass insulation sub case and Sensitive Apparatus collectively form sensitive gauge outfit；Sensitive Apparatus
Fixedly mounting in the enclosure with the form of sensitive gauge outfit by adhesive technology, Sensitive Apparatus output lead passes through glass insulator pipe
Pin on shell is connected with servo circuit.
Described seal closure and glass insulator envelope material all use and can cut down material 4J29, and both pass through laser welding process
Seam crossing is sealed welding.
Described seal closure opening has a circular step being in outside, and glass insulation sub case covers on step, glass
Glass insulator shell external diameter is identical with seal closure external diameter.
Compared to existing technology, there is advantages that
1, the present invention uses Laser seal welding technique, and acceleration sensitive device sealing is common at seal closure and glass insulation sub case
In the cavity constituted, Sensitive Apparatus output lead uses the pin of glass insulator sintering to draw, it is achieved that hermetically sealed encapsulation.Quick
Air dielectric within inductor component will not produce leak case because of the change of external pressure, can long-term work at low pressure or true
In Altitude, the dynamic performance parameter of accelerometer keeps stable for a long time, does not changes with ambient pressure change.
2, seal closure and the glass insulation sub case of this structure all uses and can cut down material 4J29, the welding between same material,
It is not required to increase solder, i.e. can guarantee that excellent welding effect.
3, the magnetic property of material 4J29 can be cut down, magnetic screening action can be played, can effectively eliminate external magnetic field to acceleration
The impact of degree meter performance, improves the certainty of measurement of accelerometer under the conditions of extraneous magnetic interference.
Accompanying drawing explanation
Fig. 1-existing quartz flexible accelerometer encapsulating structure schematic diagram.
Fig. 2-glass insulator shell structure schematic diagram of the present invention.
Fig. 3-seal closure structural representation of the present invention.
The gauge head structure schematic diagram of Fig. 4-package sealing with laser soldering and sealing of the present invention.
Fig. 5-quartz flexible accelerometer encapsulating structure schematic diagram of the present invention.
Detailed description of the invention
Describe the present invention below in conjunction with the drawings and specific embodiments.
Seeing Fig. 5, quartz flexible accelerometer air-tight packaging structure of the present invention, including Sensitive Apparatus 1, with Method for Installation
The stainless steel casing 2 of blue 9 and servo circuit 3, Sensitive Apparatus 1 is positioned at shell 2, and servo circuit 3 is fixed on shell 2 oral area, quick
Inductor component 1 is connected with servo circuit 3 by connecting wire 4.In order to realize more preferable air-tightness and effectiveness, the present invention
Also include that seal closure 5(is shown in Fig. 3) and glass insulation sub case 6(see Fig. 2), on glass insulation sub case 6 by sintered glass exhausted
Edge 10 fixing pin 8, so that pin insulate with shell, prevents Sensitive Apparatus inner air from being revealed by pin simultaneously.Described
Sensitive Apparatus 1 is installed in seal closure 5 by epoxy glue 7, and seal closure 5 oral area is sealed by glass insulation sub case 6, seal closure
5, glass insulation sub case 6 and Sensitive Apparatus 1 collectively form sensitive gauge outfit, see Fig. 4.Then by sensitivity gauge outfit as Sensitive Apparatus
Being fixedly mounted in shell 2 by epoxy glue 7 by traditional Sensitive Apparatus fixed form, Sensitive Apparatus 1 output lead passes through again
Pin 8 on glass insulation sub case is connected with servo circuit 3, i.e. pin 8 one end connects Sensitive Apparatus 1 by connecting wire 4
Output lead, the other end connects servo circuit 3, thus constitutes a complete accelerometer.
Described seal closure 5 and glass insulation sub case 6 material all use and can cut down material 4J29, and both pass through laser welding work
Seam crossing (Fig. 4 labelling location A) is sealed welding by skill.Welding between same material, is not required to increase solder, i.e. can guarantee that excellent
Welded seal effect, such position Sensitive Apparatus in the inner can realize good sealing anti-leak result.
In order to realize the globality of sensitive gauge outfit, described seal closure opening has a circular step being in outside, glass
Glass insulator shell covers on step, and glass insulation sub case external diameter is identical with seal closure external diameter.At seal closure and glass insulation
Sub case is by after laser welding, and sensitive gauge outfit i.e. forms a totally enclosed column structure, and column structure upper end is that glass is exhausted
Edge sub case pin, for being connected with servo circuit.
The present invention uses laser welding process technology, and Sensitive Apparatus is sealed in seal closure and glass insulation sub case composition
Cavity in, be then bonded in shell, it is achieved that hermetically sealed encapsulation.Owing to seal closure and glass insulation sub case are constituted
The cavity high leakproofness positive sealing of cavity (laser welding can be easily achieved), the air dielectric within Sensitive Apparatus is not
Leak case can be produced because of the change of external pressure, can long-term work in low pressure or vacuum environment, accelerometer dynamic
State performance parameter keeps stable for a long time, does not changes with ambient pressure change.Seal closure and glass insulation sub case all use
Can cut down material 4J29, the magnetic property of 4J29 can effectively shield Sensitive Apparatus and outside magnetic environment, improves accelerometer outside
Certainty of measurement under the conditions of boundary's magnetic interference.
The above embodiment of the present invention is only for example of the present invention is described, and is not the enforcement to the present invention
The restriction of mode.For those of ordinary skill in the field, can also be made other not on the basis of the above description
Change and variation with form.Here cannot all of embodiment be given exhaustive.Every belong to technical scheme
That is amplified out obviously changes or changes the row still in protection scope of the present invention.
Claims (4)
1. quartz flexible accelerometer air-tight packaging structure, including Sensitive Apparatus, shell and servo circuit, Sensitive Apparatus is positioned at
In shell, servo circuit is fixed on housing mouth, and Sensitive Apparatus is connected with servo circuit by connecting wire；It is characterized in that:
Also including seal closure and glass insulation sub case, described Sensitive Apparatus is installed in seal closure by epoxy glue, seal closure oral area
By glass insulator package closure, seal closure, glass insulation sub case and Sensitive Apparatus collectively form sensitive gauge outfit；Sensor
Part fixedly mounts in the enclosure with the form of sensitive gauge outfit by adhesive technology, and Sensitive Apparatus output lead passes through glass insulator
Pin on shell is connected with servo circuit.
Quartz flexible accelerometer air-tight packaging structure the most according to claim 1, it is characterised in that: described seal closure
All using with glass insulator envelope material and can cut down material 4J29, seam crossing is sealed welding by laser welding process by both.
Quartz flexible accelerometer air-tight packaging structure the most according to claim 1 and 2, it is characterised in that: described close
Sealing cover opening has a circular step being in outside, and glass insulation sub case covers on step, outside glass insulation sub case
Footpath is identical with seal closure external diameter.
Quartz flexible accelerometer air-tight packaging structure the most according to claim 1, it is characterised in that: described sensitive table
Head is fixedly mounted in the enclosure by epoxy glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610491764.4A CN106066405A (en) | 2016-06-29 | 2016-06-29 | Quartz flexible accelerometer air-tight packaging structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610491764.4A CN106066405A (en) | 2016-06-29 | 2016-06-29 | Quartz flexible accelerometer air-tight packaging structure |
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| Publication Number | Publication Date |
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| CN106066405A true CN106066405A (en) | 2016-11-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610491764.4A Pending CN106066405A (en) | 2016-06-29 | 2016-06-29 | Quartz flexible accelerometer air-tight packaging structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109158753A (en) * | 2018-07-24 | 2019-01-08 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of encapsulating method of monocrystalline silicon flexure accelerometers |
| CN109490577A (en) * | 2018-12-21 | 2019-03-19 | 中国船舶重工集团公司第七0七研究所 | A kind of flexible static support accelerometer |
| CN109877450A (en) * | 2017-12-06 | 2019-06-14 | 航天科工惯性技术有限公司 | Accelerometer encapsulating method and accelerometer |
| CN112394195A (en) * | 2020-11-13 | 2021-02-23 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
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| US20060179942A1 (en) * | 2005-02-16 | 2006-08-17 | Mitsubishi Denki Kabushiki Kaisha | Acceleration sensor |
| CN200953027Y (en) * | 2006-09-30 | 2007-09-26 | 北京航天万新科技有限公司 | Improved quartz flexible accelerometer |
| CN201837639U (en) * | 2010-09-30 | 2011-05-18 | 航天科工惯性技术有限公司 | Sealed type quartz flexible accelerometer |
| CN103033645A (en) * | 2012-12-11 | 2013-04-10 | 北京兴华机械厂 | Omniseal gauge outfit and quartz flexure accelerometer |
| CN103134952A (en) * | 2011-11-30 | 2013-06-05 | 航天科工惯性技术有限公司 | Sealed accelerometer |
| CN203037669U (en) * | 2013-01-16 | 2013-07-03 | 廊坊市北斗神舟测控仪器有限公司 | Center-symmetrical packaging quartz flexible acceleration sensor |
| CN105403732A (en) * | 2015-12-21 | 2016-03-16 | 中国电子科技集团公司第二十六研究所 | Quartz flexible accelerometer capacitance sensor insulator lead wire and mounting structure |
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2016
- 2016-06-29 CN CN201610491764.4A patent/CN106066405A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060179942A1 (en) * | 2005-02-16 | 2006-08-17 | Mitsubishi Denki Kabushiki Kaisha | Acceleration sensor |
| CN200953027Y (en) * | 2006-09-30 | 2007-09-26 | 北京航天万新科技有限公司 | Improved quartz flexible accelerometer |
| CN201837639U (en) * | 2010-09-30 | 2011-05-18 | 航天科工惯性技术有限公司 | Sealed type quartz flexible accelerometer |
| CN103134952A (en) * | 2011-11-30 | 2013-06-05 | 航天科工惯性技术有限公司 | Sealed accelerometer |
| CN103033645A (en) * | 2012-12-11 | 2013-04-10 | 北京兴华机械厂 | Omniseal gauge outfit and quartz flexure accelerometer |
| CN203037669U (en) * | 2013-01-16 | 2013-07-03 | 廊坊市北斗神舟测控仪器有限公司 | Center-symmetrical packaging quartz flexible acceleration sensor |
| CN105403732A (en) * | 2015-12-21 | 2016-03-16 | 中国电子科技集团公司第二十六研究所 | Quartz flexible accelerometer capacitance sensor insulator lead wire and mounting structure |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109877450A (en) * | 2017-12-06 | 2019-06-14 | 航天科工惯性技术有限公司 | Accelerometer encapsulating method and accelerometer |
| CN109158753A (en) * | 2018-07-24 | 2019-01-08 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of encapsulating method of monocrystalline silicon flexure accelerometers |
| CN109490577A (en) * | 2018-12-21 | 2019-03-19 | 中国船舶重工集团公司第七0七研究所 | A kind of flexible static support accelerometer |
| CN112394195A (en) * | 2020-11-13 | 2021-02-23 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
| CN112394195B (en) * | 2020-11-13 | 2023-04-07 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
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Application publication date: 20161102 |