CN105277185B - Metal vibration gyroscopic inertia sensor and metal vibration gyroscope - Google Patents
Metal vibration gyroscopic inertia sensor and metal vibration gyroscope Download PDFInfo
- Publication number
- CN105277185B CN105277185B CN201510837826.8A CN201510837826A CN105277185B CN 105277185 B CN105277185 B CN 105277185B CN 201510837826 A CN201510837826 A CN 201510837826A CN 105277185 B CN105277185 B CN 105277185B
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- outer cover
- metal
- sealed base
- metal vibration
- gyro
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a kind of metal vibration gyroscopic inertia sensors, including：Section is the gyro outer cover of U-shaped；Metal harmonic oscillator is arranged in gyro outer cover, and the bottom centre position of metal harmonic oscillator is extended with a supporting rod, and supporting rod is directed toward the opening of gyro outer cover, and the lower circumference of metal harmonic oscillator is provided with several piezoelectric electrodes；The opening in gyro outer cover is arranged in sealed base；Conducting ring is arranged between supporting rod and sealed base；Several glass insulators are sintered in sealed base, and glass insulator is electrically connected with piezoelectric electrode and conducting ring；Insulation spacer, insulation spacer setting offers through-hole corresponding with glass insulator between conducting ring and sealed base, on insulation spacer, so that glass insulator is electrically connected with piezoelectric electrode or conducting ring.The invention also discloses a kind of metal vibration gyroscopes based on the gyroscopic inertia sensor.Good airproof performance of the present invention, it is compact-sized, small, be easy to connect with circuit.
Description
Technical field
The present invention relates to inertia device technical fields, and in particular to a kind of metal vibration gyroscopic inertia sensor and metal shake
Dynamic gyroscope.
Background technology
With the development of micro-nano satellite, Tactical Weapon System, to the precision, volume, cost etc. of inertia system propose into
The requirement of one step.Metal vibration gyro is a kind of solid oscillation gyro based on Coriolis effect, has simple in structure, precision
Higher, the small, excellent specific properties such as light weight and cost is low, reliability is high, in tactical weapon, micro-nano satellite and Industry Control
Each field of equal the army and the people all has wide application prospect.
Metal vibration gyroscopic inertia sensor, which carries out Vacuum Package, can be effectively reduced the vibration damping of metal harmonic oscillator,
Improve harmonic oscillator quality of vibration factor（Q values）, to further increase metal vibration gyroscope precision.It develops both at home and abroad at present
Metal vibration gyroscopic inertia sensor structure is either by the way of blow-by or using the side blocked after exhaust tube pumping
The connection type of formula, metal vibration gyroscopic inertia sensor and control circuit is mainly by the way of conducting wire welding.
Metal vibration gyroscopic inertia sensor in the prior art mainly has problems with or deficiency：Vacuum Package mode is adopted
The mode blocked after being evacuated with exhaust tube needs to make special pump-line on gauge head structure, and sealing effect is poor, in addition
It is not easy repeating vacuum encapsulation after exhaust tube cuts sealing；In such a way that conducting wire welding is connect with external control circuit, cause
Metal vibration gyroscopic inertia sensor can not carry out Vacuum Package or Vacuum Package sealing effect is very poor.
Invention content
The purpose of the present invention is to provide a kind of metal vibration gyroscopic inertia sensor and metal vibration gyroscope, leakproofness
It is good, compact-sized, small, the features such as being easy to connect with circuit, suitable for precision prescribeies such as tactical weapon, microminiature spacecrafts
High, small attitude control system.
In order to achieve the above object, the invention is realized by the following technical scheme：A kind of metal vibration gyroscopic inertia is sensitive
Device, its main feature is that, including：
The section of gyro outer cover, the gyro outer cover is U-shaped；
Metal harmonic oscillator is arranged in the gyro outer cover, and the bottom centre position of the metal harmonic oscillator is extended with one
Supporting rod, the supporting rod are directed toward the opening of gyro outer cover, and the lower circumference of the metal harmonic oscillator is provided with several piezoelectricity
Electrode；
The opening in the gyro outer cover is arranged in sealed base, to seal the inner space of the gyro outer cover；
Conducting ring is arranged between the supporting rod and sealed base, the diameter of the conducting ring and the diameter of supporting rod
Unanimously, the conducting ring is configured as the ground electrode of metal harmonic oscillator；
Several glass insulators are sintered in the sealed base, the glass insulator and piezoelectric electrode and are led
Electric ring electrical connection；
Insulation spacer, the insulation spacer are arranged between conducting ring and sealed base, and the insulation spacer
Diameter is consistent with the diameter of sealed base, and through-hole corresponding with glass insulator is offered on the insulation spacer, so that institute
Glass insulator is stated to be electrically connected with piezoelectric electrode or conducting ring.
The metal vibration gyroscopic inertia sensor includes also a seal assembly, is connect with the gyro outer cover, is arranged
In the side opposite with sealed base.
The seal assembly includes seal washer and sealing screw, and the sealing screw will sealing in vacuum environment
Washer is fastened with gyro outer cover.
The inner surface of the gyro outer cover, the outer surface of gyro outer cover and seal washer surface are coated with silver.
The excircle of the gyro outer cover is equipped with mounting flange, and the mounting flange is equipped with mounting assembly, with
The metal vibration gyroscopic inertia sensor is set to be installed on Gyro holder.
The insulation spacer is made of oak bar material.
The sealed base uses laser welding with gyro outer cover, to seal the inner space of the gyro outer cover.
The glass insulator includes conductive core, vitreum and sleeve, and the vitreum is set in the outer of conductive core
Side, the sleeve are set in the outside of vitreum, and the height of the vitreum is identical as the height of sleeve, the glass
The consistency of thickness of the height of body and the sealed base, the conductive core is for glass insulator and piezoelectric electrode and conducting ring
Electrical connection；The vitreum is used for the insulation of glass insulator and sealed base；The sleeve is used for glass insulator
With the sintering of sealed base.
A kind of metal vibration gyroscope, including control circuit board, its main feature is that, also include that above-mentioned metal vibration gyro is used
Property sensor, the control circuit board are electrically connected with glass insulator.
The glass insulator is realized with control circuit board by the way of grafting or conducting wire connection and is connected.
A kind of metal vibration gyroscopic inertia sensor of the present invention and metal vibration gyroscope have compared with prior art with
Lower advantage：It is packaged in specialized vacuum sealed in unit using seal washer and sealing screw, is improved compared with prior art
Vacuum Package air-tightness and encapsulation repeatability, reliability；Metal vibration gyroscopic inertia sensor is realized using glass insulator
With the mode of gauge outfit external circuit electrical interconnection, can avoid using in the prior art can not seal or seal caused by wire interconnection
The poor problem of property, effectively improves Vacuum Package air-tightness；The whole gauge head structure of metal vibration gyroscope is compacter, small
Ingeniously, reliability higher.
Description of the drawings
Fig. 1 is a kind of overall structure diagram of metal vibration gyroscopic inertia sensor of the present invention；
Fig. 2 is the overall structure diagram of glass insulator.
Specific implementation mode
The present invention is further elaborated by the way that a preferable specific embodiment is described in detail below in conjunction with attached drawing.
As shown in Figure 1, a kind of metal vibration gyroscopic inertia sensor, including：Gyro outer cover 100, the gyro outer cover 100
Section be U-shaped；Metal harmonic oscillator 200 is arranged in the gyro outer cover 100, among the bottom of the metal harmonic oscillator 200
Position is extended with a supporting rod 201, and the supporting rod 201 is directed toward the opening of gyro outer cover 100, the bottom of the metal harmonic oscillator
Circumference is provided with several piezoelectric electrodes（It is not shown in figure）；The opening in the gyro outer cover 100 is arranged in sealed base 300
Place, to seal the inner space of the gyro outer cover 100；Conducting ring 400 is arranged in the supporting rod 201 and sealed base 300
Between, the diameter of the conducting ring 400 is consistent with the diameter of supporting rod 201, and the conducting ring 400 is configured as metal resonance
The ground electrode of son 200；Several glass insulators 500 are sintered in the sealed base 300, the glass insulator 300
It is electrically connected with piezoelectric electrode and conducting ring 400, in the preferred embodiment, including 8 piezoelectric electrodes, respectively metal is humorous
The lower circumference of oscillator 200,9 glass insulators 300, is connected between glass insulator 300 and piezoelectric electrode by bonding wire；Absolutely
Edge gasket 600, the insulation spacer 600 is arranged between conducting ring 400 and sealed base 300, and the insulation spacer
600 diameter is consistent with the diameter of sealed base 300, is offered on the insulation spacer 600 corresponding with glass insulator 500
Through-hole so that the glass insulator 500 is electrically connected with piezoelectric electrode or conducting ring 400.
In the present embodiment, the metal vibration gyroscopic inertia sensor includes also a seal assembly, with the gyro
Outer cover 100 connects, and is arranged in the side opposite with sealed base 300；Preferably, the seal assembly includes seal washer
701 and sealing screw 702, the sealing screw 702 seal washer 701 and gyro outer cover 100 are fastened in vacuum environment.
In the present embodiment, the inner surface of the gyro outer cover 100, the outer surface of gyro outer cover 100 and seal washer
701 surfaces are coated with silver.
In the present embodiment, the excircle of the gyro outer cover 100 is equipped with mounting flange, on the mounting flange
Equipped with mounting assembly, so that the metal vibration gyroscopic inertia sensor is installed on Gyro holder；Preferably, installation group
Part is three or four mounting holes.
In the present embodiment, the insulation spacer 600 is made of oak bar material.
In the present embodiment, the sealed base 300 uses laser welding with gyro outer cover 100, to seal the top
The inner space of spiral shell outer cover 100.
In the present embodiment, the glass insulator 500 includes conductive core 501, vitreum 502 and sleeve 503, described
Vitreum 502 be set in the outside of conductive core 501, the sleeve 503 is set in the outside of vitreum 502, the glass
The height of glass body 502 is identical as the height of sleeve 503, the thickness of the height and the sealed base 300 of the vitreum 502
Unanimously, the conductive core 502 being electrically connected for glass insulator 300 and piezoelectric electrode and conducting ring 400；The glass
Body 502 is used for the insulation of glass insulator 500 and sealed base 300；The sleeve 503 for glass insulator 500 with it is close
The sintering of back cover seat 300.
In conjunction with above-mentioned metal vibration gyroscopic inertia sensor, the invention also discloses a kind of metal vibration gyroscope, packets
It is electrically connected with glass insulator containing control circuit board and above-mentioned metal vibration gyroscopic inertia sensor, the control circuit board
It connects；It is connected preferably, the glass insulator is realized by the way of grafting or conducting wire connection with control circuit board.
Although present disclosure is discussed in detail by above preferred embodiment, but it should be appreciated that above-mentioned
Description is not considered as limitation of the present invention.After those skilled in the art have read the above, for the present invention's
A variety of modifications and substitutions all will be apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (8)
1. a kind of metal vibration gyroscopic inertia sensor, which is characterized in that include：
The section of gyro outer cover, the gyro outer cover is U-shaped；
Metal harmonic oscillator is arranged in the gyro outer cover, and the bottom centre position of the metal harmonic oscillator is extended with a support
Bar, the supporting rod are directed toward the opening of gyro outer cover, and the lower circumference of the metal harmonic oscillator is provided with several piezoelectric electrodes；
The opening in the gyro outer cover is arranged in sealed base, to seal the inner space of the gyro outer cover；
Conducting ring is arranged between the supporting rod and sealed base, and the diameter of the conducting ring is consistent with the diameter of supporting rod,
The conducting ring is configured as the ground electrode of metal harmonic oscillator；
Several glass insulators are sintered in the sealed base, the glass insulator and piezoelectric electrode and conducting ring
Electrical connection；
Insulation spacer, the insulation spacer is arranged between conducting ring and sealed base, and the diameter of the insulation spacer
It is consistent with the diameter of sealed base, through-hole corresponding with glass insulator is offered on the insulation spacer, so that the glass
Glass insulator is electrically connected with piezoelectric electrode or conducting ring；
Seal assembly connect with the gyro outer cover, is arranged in the side opposite with sealed base；The seal assembly includes
Seal washer and sealing screw, the sealing screw fasten seal washer and gyro outer cover in vacuum environment.
2. metal vibration gyroscopic inertia sensor as described in claim 1, which is characterized in that the interior table of the gyro outer cover
Face, the outer surface of gyro outer cover and seal washer surface are coated with silver.
3. metal vibration gyroscopic inertia sensor as described in claim 1, which is characterized in that the outer circle of the gyro outer cover
It is equipped with mounting flange week, the mounting flange is equipped with mounting assembly, so that the metal vibration gyroscopic inertia sensor
It is installed on Gyro holder.
4. metal vibration gyroscopic inertia sensor as described in claim 1, which is characterized in that the insulation spacer is by oak
Bar material is made.
5. metal vibration gyroscopic inertia sensor as described in claim 1, which is characterized in that the sealed base and gyro
Outer cover uses laser welding, to seal the inner space of the gyro outer cover.
6. metal vibration gyroscopic inertia sensor as described in claim 1, which is characterized in that the glass insulator includes
Conductive core, vitreum and sleeve, the vitreum are set in the outside of conductive core, and the sleeve is set in the outer of vitreum
Side, the height of the vitreum is identical as the height of sleeve, the thickness of the height of the vitreum and the sealed base
Unanimously, the conductive core being electrically connected for glass insulator and piezoelectric electrode and conducting ring；The vitreum is used for glass
The insulation of glass insulator and sealed base；The sleeve is used for the sintering of glass insulator and sealed base.
7. a kind of metal vibration gyroscope, including control circuit board, which is characterized in that also include as claim 1 ~ 6 is any one
Metal vibration gyroscopic inertia sensor described in, the control circuit board are electrically connected with glass insulator.
8. metal vibration gyroscope as claimed in claim 7, which is characterized in that the glass insulator is using grafting or leads
The mode of line connection is realized with control circuit board to be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510837826.8A CN105277185B (en) | 2015-11-26 | 2015-11-26 | Metal vibration gyroscopic inertia sensor and metal vibration gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510837826.8A CN105277185B (en) | 2015-11-26 | 2015-11-26 | Metal vibration gyroscopic inertia sensor and metal vibration gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105277185A CN105277185A (en) | 2016-01-27 |
| CN105277185B true CN105277185B (en) | 2018-10-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510837826.8A Active CN105277185B (en) | 2015-11-26 | 2015-11-26 | Metal vibration gyroscopic inertia sensor and metal vibration gyroscope |
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| Country | Link |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111044023B (en) * | 2020-01-03 | 2022-07-26 | 中国船舶重工集团公司第七0七研究所 | Large-range high-overload metal cylindrical resonance gyroscope for bombs |
| CN111829513B (en) * | 2020-06-17 | 2022-10-28 | 中国船舶重工集团公司第七0七研究所 | Inertial element electric signal transmission structure suitable for high vacuum environment and implementation method |
| FR3140160A1 (en) * | 2022-09-23 | 2024-03-29 | Jxsens | VIBRANT GYROSCOPIC SENSOR |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0141621A2 (en) * | 1983-10-31 | 1985-05-15 | General Motors Corporation | Vibratory rotational sensor |
| CN1648032A (en) * | 2005-01-28 | 2005-08-03 | 华中科技大学 | Vacuum package device for micro system |
| CN101738280A (en) * | 2008-11-24 | 2010-06-16 | 河南理工大学 | Mems pressure sensor and manufacturing method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3902374A (en) * | 1973-10-19 | 1975-09-02 | Singer Co | Electrostatic rate gyroscope |
| US4061043A (en) * | 1976-03-29 | 1977-12-06 | John Callender Stiles | Electrostatic rate gyroscope |
| GB9817347D0 (en) * | 1998-08-11 | 1998-10-07 | British Aerospace | An angular rate sensor |
| CN103033645A (en) * | 2012-12-11 | 2013-04-10 | 北京兴华机械厂 | Omniseal gauge outfit and quartz flexure accelerometer |
-
2015
- 2015-11-26 CN CN201510837826.8A patent/CN105277185B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0141621A2 (en) * | 1983-10-31 | 1985-05-15 | General Motors Corporation | Vibratory rotational sensor |
| CN1648032A (en) * | 2005-01-28 | 2005-08-03 | 华中科技大学 | Vacuum package device for micro system |
| CN101738280A (en) * | 2008-11-24 | 2010-06-16 | 河南理工大学 | Mems pressure sensor and manufacturing method thereof |
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| Publication number | Publication date |
|---|---|
| CN105277185A (en) | 2016-01-27 |
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