CN107677261A - Micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod - Google Patents
Micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod Download PDFInfo
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- CN107677261A CN107677261A CN201710688341.6A CN201710688341A CN107677261A CN 107677261 A CN107677261 A CN 107677261A CN 201710688341 A CN201710688341 A CN 201710688341A CN 107677261 A CN107677261 A CN 107677261A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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- Radar, Positioning & Navigation (AREA)
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Abstract
The present invention disclose in outer hyperboloid stereo electrod micro- hemisphere gyroscope, including hemispherical resonator shell, outer layer curved surface object electrode is provided with above hemispherical resonator shell outer surface, internal layer curved surface object electrode is provided with below hemispherical resonator shell inner surface, is tightly connected between outer layer curved surface object electrode and the planar substrates of internal layer curved surface object electrode by sealing gasket；Outer layer curved surface object top of electrodes is additionally provided with block, and block is provided with one group and the one-to-one fairlead of outer layer curved surface object electrode；Outer layer curved surface object electrode and internal layer curved surface object electrode one-to-one corresponding or the interlaced surrounding for being arranged in hemispherical resonator shell, and external electrode capacitance gap and interior electrode capacitance gap are formed respectively, two suite face stereo electrods carry out driving and the signal detection of gyros to the present invention inside and outside use simultaneously, with the electrode gap uniformity of resonance housing, it is big to sense area, the vibration information of resonator shell structure can be fully perceived, is advantageous to gyro and is tested using electric capacity differential technique.
Description
Technical field
The present invention relates to micromechanics electronic technology field, specifically a kind of micro- half spherical top of interior outer hyperboloid stereo electrod
Instrument.
Background technology
Gyroscope is a kind of inertia device for being capable of sensitive carrier angle or angular speed, in gesture stability and navigator fix etc.
There is very important application in field.With industry such as consumer electronics, industrial robot, vehicle, marine navigation, unmanned plane manufactures
Development, the demand of gyroscope is also gradually developed towards the direction of low cost, small size, high accuracy, high reliability.It is micro electronmechanical
Gyro, using micro-nano technology technology, there is the characteristics of batch production cost is low, uniformity is good, it has also become grinding in gyro field
Study carefully focus.
Micro- hemisphere gyroscope has the potentiality for making high accuracy gyroscope instrument because of the strong shock resistance of its own, into
For the study hotspot in microthrust test field.At present, the micro- hemisphere gyroscope developed in the world is more using resonance hull outside individual layer electricity
Pole structure, or the single-layer electrodes in one layer plane of the underface of resonance shell nozzle arrangement, less number of electrodes limit
Application of the gyro in complex control system.Two-layer electrode inside and outside the quartzy half spherical top use of traditional macroscopic view, outer layer is discrete
Forcer electrode, internal layer is sensor electrode, and the two collective effect realizes the driving and detection of gyro.
《A kind of inside and outside Double-electrode type micro hemispherical resonator gyro instrument and preparation method thereof》（The patent No.
201410389616.2）Document propose a kind of micro hemispherical resonator gyro with inside and outside two-layer electrode.The gyroscope has
There is inside and outside two layers of electrode, wherein interior electrode is electrode in eight single electrodes being uniformly distributed or an annular monoblock type.Gyro
Interior electrode is vertical column or loop configuration, and it is inconsistent with the gap of resonance housing, and because the space of resonator has
Limit, to avoid electrode from being in contact with resonance housing, internal electrode is in larger distance resonator opening and resonator.Hemisphere top
The peak swing of spiral shell resonator is in the opening of resonator, and with the increase apart from aperture position, the amplitude of resonator is drastically
Diminish, this, which results in internal electrode, can not effectively complete driving, the Detection task of gyro.Gyro external electrode is boron doped
Silicon, because of the limitation of technique, the electrode depth prepared using boron-doping silicon is limited, typically also with regard to more than ten micron, therefore equally deposits
It is small in effective sensing area of electrode and resonator, it is impossible to fully to realize the deficiency of the driving Detection task of gyro.
The content of the invention
It is an object of the invention to provide a kind of micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod, the gyroscope is simultaneously
Driving and the signal detection of gyro, electrode and resonator shell gap uniformity are carried out using inside and outside two suites face stereo electrod, can
Fully to perceive the vibration information of resonator shell structure, be advantageous to gyro and tested using electric capacity differential technique.
The technical solution adopted for the present invention to solve the technical problems is：
Micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod, including hemispherical resonator shell, the outer dead centre of hemispherical resonator shell are provided with anchor
Point, hemispherical resonator shell outer surface top are provided with outer layer curved surface object electrode, and outer layer curved surface object electrode includes support electrode tip holder, four
Individual support electrode and one group of functional electrode, four support electrodes are connected to support electrode tip holder surrounding and form cross, function
Electrode gap is between support electrode and mutually isolated by isolation channel with support electrode and support electrode tip holder, outer layer curved surface
Stereo electrod is distributed in a ring and bottom shape is adapted with hemispherical resonator shell outer surface, and support electrode tip holder center, which is provided with, to be used for
The fixing hole connected with anchor point；
Internal layer curved surface object electrode is provided with below hemispherical resonator shell inner surface, internal layer curved surface object electrode includes planar substrates, puts down
Face base center is provided with the hemisphere substrate being adapted with hemispherical resonator shell inner surface configuration, and the surface of hemisphere substrate is fitted with one group
Distribution and spaced electrode slice in a ring, one group is additionally provided with planar substrates and is distributed, corresponding with electrode slice connects in a ring
Wire, the other end of each wire further respectively has electrode pad；The planar substrates and hemisphere substrate and electrode slice, lead
Line, electrode pad mutually insulated；
It is tightly connected between the planar substrates of outer layer curved surface object electrode and internal layer curved surface object electrode by sealing gasket；Outer layer is bent
Block is additionally provided with the top of the stereo electrod of face, block is provided with one group and the one-to-one fairlead of outer layer curved surface object electrode.
Further, the periphery of the outer layer curved surface object electrode is additionally provided with sealing ring.
Further, outer layer curved surface object electrode and internal layer the curved surface object electrode electrode slice correspond or
Every staggeredly corresponding.
The beneficial effects of the invention are as follows：
Two suite face stereo electrods carry out driving and the signal detection of gyros, internal layer curved surface object to this gyroscope inside and outside use simultaneously
Electrode and outer layer curved surface object electrode all have an identical curved surface profile with the shell structure of gyro resonator, and with resonance housing
Electrode gap uniformity, sensing area it is big.Internal layer curved surface object electrode and the gap at resonator shell structural openings are small
And it is uniform, it can fully perceive the vibration information of resonator shell structure.Internal layer curved surface object electrode and outer layer curved surface object electricity
Pole corresponds, the surrounding for being distributed in resonator of symmetry, is advantageous to gyro and is tested using electric capacity differential technique.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples：
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the three-dimensional cutaway view of the present invention；
Fig. 3 is the exploded perspective view of the present invention；
Fig. 4 is the schematic diagram of hemispherical resonator shell in the present invention；
Fig. 5 is outer layer curved surface object electrode face upwarding stereogram in the present invention；
Fig. 6 is the schematic diagram of internal layer curved surface object electrode in the present invention；
Fig. 7 is the schematic diagram of block in the present invention；
Fig. 8 is the schematic diagram of sealing ring in the present invention.
Embodiment
With reference to shown in Fig. 1~4, the present invention provides a kind of micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod, including half
Ball resonance shell 1, the outer dead centre of hemispherical resonator shell 1 are provided with anchor point 1a, outer layer curved surface object are provided with above the outer surface of hemispherical resonator shell 1
Electrode 2, with reference to shown in Fig. 5, outer layer curved surface object electrode 2 includes support electrode tip holder 2a, four support electrode 2b and one group of function
Electrode 2c, four support electrodes are connected to support electrode tip holder 2a surroundings and form cross, and functional electrode 2c intervals are located at branch
It is between support electrode 2b and mutually isolated by isolation channel 2d with support electrode 2b and support electrode tip holder 2a, outer layer curved surface object electricity
The entirety of pole 2 is distributed in a ring and bottom shape is adapted with the outer surface of hemispherical resonator shell 1, and support electrode tip holder 2a centers, which are provided with, to be used
In the fixing hole 2e connected with anchor point 1a；The anchor point 1a of hemispherical resonator shell 1 is fixed by fixing hole 2e and support electrode tip holder 2a phases.
Capacitance gap is formed between outer layer curved surface object electrode 2 and hemispherical resonator shell 1.
With reference to shown in Fig. 6, internal layer curved surface object electrode 3, internal layer curved surface object electricity are provided with below the inner surface of hemispherical resonator shell 1
Pole 3 includes planar substrates 3a, and planar substrates 3a centers are provided with the hemisphere substrate being adapted with the inner surface configuration of hemispherical resonator shell 1
It is in ring that 3b, hemisphere substrate 3b surface, which are fitted with and are additionally provided with one group on one group of electrode slice being distributed in a ring 3c, planar substrates 3a,
Shape distribution, the wire 3d of connection corresponding with electrode slice, the other end of each wire further respectively have electrode pad 3e；The plane
Substrate 3a and hemisphere substrate 3b and electrode slice 3c, wire 3d, electrode pad 3e mutually insulateds；The outer layer curved surface object electrode 2
Corresponded with the electrode slice 3c of internal layer curved surface object electrode or interlaced interval is corresponding.Namely electrode slice 3c quantity with
Support electrode 2b and functional electrode 2c quantity sum can be corresponded respectively with identical, or electrode slice 3c quantity is branch
The half of electrode 2b and functional electrode 2c quantity sums is supportted, is staggeredly spaced respectively corresponding.
Sealed and connected by sealing gasket 4 between the planar substrates 3a of outer layer curved surface object electrode 2 and internal layer curved surface object electrode
Connect, and expose electrode pad 3e, the lead point as internal layer curved surface object electrode.
With reference to shown in Fig. 7, the top of outer layer curved surface object electrode 2 is additionally provided with block 5, and block 5 is provided with one group and outer layer song
The one-to-one fairlead 5a of face stereo electrod, the lead point as outer layer curved surface object electrode 2.
With reference to shown in Fig. 8, the periphery of outer layer curved surface object electrode 2 is additionally provided with sealing ring 6, sealing ring 6, block 5 and sealing
Pad 4 realizes the air-tight packaging of gyroscope jointly.
Inside and outside double-deck micro- half spherical top of curved surface object electrode of the present invention, outer layer is realized using the sealing gasket 4 of insulation
Insulation, air-tightness assembling between curved surface object electrode 2 and internal layer curved surface object electrode 3,4 preferred glass paste of sealing gasket, outside
When layer curved surface object electrode 2 and internal layer curved surface object electrode 3 assemble, sealing gasket 4 wraps what wire 3d was fully sealed, it is ensured that
Insulation herein, air-tightness are high.Outer layer curved surface object electrode 2 and internal layer curved surface object electrode 3 correspond or interlaced
The surrounding of hemispherical resonator shell 1 is arranged in, and forms external electrode capacitance gap 7 and interior electrode capacitance gap 8 respectively.
The above described is only a preferred embodiment of the present invention, any formal limitation not is made to the present invention；Appoint
What those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the side of the disclosure above
Method and technology contents make many possible changes and modifications to technical solution of the present invention, or are revised as the equivalent reality of equivalent variations
Apply example.Therefore, every content without departing from technical solution of the present invention, the technical spirit according to the present invention are done to above example
Any simple modification, equivalent substitution, equivalence changes and modification, still fall within the range of technical solution of the present invention protects.
Claims (3)
- Micro- hemisphere gyroscope of outer hyperboloid stereo electrod in 1., it is characterised in that including hemispherical resonator shell, hemispherical resonator shell Outer dead centre is provided with anchor point, is provided with outer layer curved surface object electrode above hemispherical resonator shell outer surface, outer layer curved surface object electrode includes Electrode tip holder, four support electrodes and one group of functional electrode are supported, four support electrodes are connected to support electrode tip holder surrounding structure Across, functional electrode interval are between support electrode and mutual by isolation channel with support electrode and support electrode tip holder Isolation, outer layer curved surface object electrode is distributed in a ring and bottom shape is adapted with hemispherical resonator shell outer surface, supports electrode tip holder Center is provided with the fixing hole for being used for connecting with anchor point；Internal layer curved surface object electrode is provided with below hemispherical resonator shell inner surface, internal layer curved surface object electrode includes planar substrates, puts down Face base center is provided with the hemisphere substrate being adapted with hemispherical resonator shell inner surface configuration, and the surface of hemisphere substrate is fitted with one group Distribution and spaced electrode slice in a ring, one group is additionally provided with planar substrates and is distributed, corresponding with electrode slice connects in a ring Wire, the other end of each wire further respectively has electrode pad；The planar substrates and hemisphere substrate and electrode slice, lead Line, electrode pad mutually insulated；It is tightly connected between the planar substrates of outer layer curved surface object electrode and internal layer curved surface object electrode by sealing gasket；Outer layer is bent Block is additionally provided with the top of the stereo electrod of face, block is provided with one group and the one-to-one fairlead of outer layer curved surface object electrode.
- 2. micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod according to claim 1, it is characterised in that the outer layer The periphery of curved surface object electrode is additionally provided with sealing ring.
- 3. micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod according to claim 1, it is characterised in that the outer layer Curved surface object electrode is corresponded with internal layer curved surface object electrode or interleaved is corresponding.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710688341.6A CN107677261B (en) | 2017-08-12 | 2017-08-12 | Micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod |
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| CN201710688341.6A CN107677261B (en) | 2017-08-12 | 2017-08-12 | Micro- hemisphere gyroscope of interior outer hyperboloid stereo electrod |
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| CN107677261A true CN107677261A (en) | 2018-02-09 |
| CN107677261B CN107677261B (en) | 2019-11-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112556892A (en) * | 2020-11-13 | 2021-03-26 | 北京遥测技术研究所 | High-precision resonant ball type pressure sensor |
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| US20120144917A1 (en) * | 2010-12-13 | 2012-06-14 | Custom Sensors & Technologies, Inc. | Distributed Mass Hemispherical Resonator Gyroscope |
| CN103528576A (en) * | 2012-07-05 | 2014-01-22 | 苏州文智芯微系统技术有限公司 | Hemispherical resonance micro mechanical gyroscope and processing technology thereof |
| CN104165623A (en) * | 2014-08-08 | 2014-11-26 | 上海交通大学 | Internal-external double-electrode type miniature hemispherical resonance gyroscope and preparation method thereof |
| CN104215235A (en) * | 2013-06-05 | 2014-12-17 | 北京信息科技大学 | Novel bell-shaped vibrator type angular rate gyro |
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2017
- 2017-08-12 CN CN201710688341.6A patent/CN107677261B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120144917A1 (en) * | 2010-12-13 | 2012-06-14 | Custom Sensors & Technologies, Inc. | Distributed Mass Hemispherical Resonator Gyroscope |
| CN103528576A (en) * | 2012-07-05 | 2014-01-22 | 苏州文智芯微系统技术有限公司 | Hemispherical resonance micro mechanical gyroscope and processing technology thereof |
| CN104215235A (en) * | 2013-06-05 | 2014-12-17 | 北京信息科技大学 | Novel bell-shaped vibrator type angular rate gyro |
| CN104165623A (en) * | 2014-08-08 | 2014-11-26 | 上海交通大学 | Internal-external double-electrode type miniature hemispherical resonance gyroscope and preparation method thereof |
Non-Patent Citations (1)
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| 庄须叶等: "MEMS硅半球陀螺球面电极成形工艺", 《光学精密工程》 * |
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| CN112556892A (en) * | 2020-11-13 | 2021-03-26 | 北京遥测技术研究所 | High-precision resonant ball type pressure sensor |
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Address after: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233030 Patentee after: Anhui North Microelectronics Research Institute Group Co.,Ltd. Address before: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233030 Patentee before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. |