CN105277185A - Metal vibration gyroscope inertia sensor and metal vibration gyroscope - Google Patents
Metal vibration gyroscope inertia sensor and metal vibration gyroscope Download PDFInfo
- Publication number
- CN105277185A CN105277185A CN201510837826.8A CN201510837826A CN105277185A CN 105277185 A CN105277185 A CN 105277185A CN 201510837826 A CN201510837826 A CN 201510837826A CN 105277185 A CN105277185 A CN 105277185A
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- outer cover
- metal vibration
- metal
- inertia sensor
- sealed base
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a metal vibration gyroscope inertia sensor. The metal vibration gyroscope inertia sensor comprises a gyroscope outer cover with a U-shaped section, a metal harmonic oscillator, a sealing base, a conductive ring, a plurality of glass insulators and an insulating gasket, wherein the metal harmonic oscillator is arranged in the gyroscope outer cover; a supporting rod is arranged at the middle position of the bottom of the metal harmonic oscillator in a manner of extending; the supporting rod points to an opening of the gyroscope outer cover; a plurality of piezoelectric electrodes are arranged at the periphery of the bottom of the metal harmonic oscillator; the sealing base is arranged at the opening of the gyroscope outer cover; the conductive ring is arranged between the supporting rod and the sealing base; the plurality of glass insulators are sintered in the sealing base; the glass insulators are electrically connected with the piezoelectric electrodes and the conductive ring; and the insulating gasket is arranged between the conductive ring and the sealing base, and the insulating gasket is provided with through holes corresponding to the glass insulators so that the glass insulators are electrically connected with the piezoelectric electrodes or the conductive ring. The invention further discloses a metal vibration gyroscope based on the gyroscope inertia sensor. The metal vibration gyroscope inertia sensor is good in sealing performance, compact in structure and small in size and can be easily connected with a circuit.
Description
Technical field
The present invention relates to inertia device technical field, be specifically related to a kind of metal vibration gyroscopic inertia sensor and metal vibration gyroscope.
Background technology
Along with the development of micro-nano satellite, Tactical Weapon System, further requirement is proposed to the precision, volume, cost etc. of inertia system.Metal vibration gyro is a kind of solid oscillation gyro based on Coriolis effect, have that structure is simple, precision is compared with the excellent specific property such as high, volume is little, lightweight, cost is low, reliability is high, at tactical weapon, micro-nano satellite, and each field of the army and the people such as Industry Control all has broad application prospects.
Metal vibration gyroscopic inertia sensor carries out the vibration damping that Vacuum Package can reduce metal harmonic oscillator effectively, improves harmonic oscillator quality of vibration factor (Q value), thus improves metal vibration gyroscope precision further.The metal vibration gyroscopic inertia sensor structure of at present both at home and abroad development or adopt packing less mode, or the mode of shutoff after adopting exhaust tube to bleed, the connected mode of metal vibration gyroscopic inertia sensor and control circuit mainly adopts the mode of wire bonds.
Metal vibration gyroscopic inertia sensor of the prior art mainly contains following problem or deficiency: the mode of shutoff after Vacuum Package mode adopts exhaust tube to bleed, need on gauge head structure, make special pump-line, and sealing effectiveness is poor, this external exhaust tube cuts off not easily repeating vacuum encapsulation after sealing; The mode adopting wire bonds to be connected with external control circuit, causes metal vibration gyroscopic inertia sensor to carry out Vacuum Package, or Vacuum Package sealing effectiveness extreme difference.
Summary of the invention
The object of the present invention is to provide a kind of metal vibration gyroscopic inertia sensor and metal vibration gyroscope, good airproof performance, compact conformation, volume be little, be easy to and the feature such as circuit is connected, and is applicable to the attitude control system that precision prescribed is high, volume is little such as tactical weapon, microminiature spacecraft.
In order to achieve the above object, the present invention is achieved through the following technical solutions: a kind of metal vibration gyroscopic inertia sensor, is characterized in, comprises:
Gyro outer cover, the cross section of described gyro outer cover is U-shaped;
Metal harmonic oscillator, be arranged in described gyro outer cover, the centre position, bottom of described metal harmonic oscillator is extended with a support bar, and described support bar points to the opening of gyro outer cover, and the lower circumference of described metal harmonic oscillator is provided with several piezoelectric electrode;
Sealed base, is arranged on the opening part of described gyro outer cover, to seal the inner space of described gyro outer cover;
Conducting ring, be arranged between described support bar and sealed base, the diameter of described conducting ring is consistent with the diameter of support bar, and described conducting ring is configured to the ground electrode of metal harmonic oscillator;
Several glass insulators, sinter in described sealed base, described glass insulator is electrically connected with piezoelectric electrode and conducting ring;
Insulation spacer, described insulation spacer is arranged between conducting ring and sealed base, and the diameter of described insulation spacer is consistent with the diameter of sealed base, described insulation spacer offers the through hole corresponding with glass insulator, is electrically connected with piezoelectric electrode or conducting ring to make described glass insulator.
Described metal vibration gyroscopic inertia sensor also comprises a seal assembly, is connected, is arranged on the side relative with sealed base with described gyro outer cover.
Described seal assembly comprises packing washer and sealing screw, described sealing screw in vacuum environment by packing washer and gyro outer cover fastening.
The inside surface of described gyro outer cover, the outside surface of gyro outer cover and packing washer surface are coated with silver.
The excircle of described gyro outer cover is provided with mounting flange, and described mounting flange is provided with installation component, is installed on Gyro support to make described metal vibration gyroscopic inertia sensor.
Described insulation spacer is made up of oak bar material.
Described sealed base and gyro outer cover adopt laser bonding, to seal the inner space of described gyro outer cover.
Described glass insulator comprises conductive cores, vitreum and sleeve, described vitreum is set in the outside of conductive cores, described jacket casing is located at Vitrea outside, described Vitrea height is identical with the height of sleeve, described Vitrea height and the consistency of thickness of described sealed base, described conductive cores is used for the electrical connection of glass insulator and piezoelectric electrode and conducting ring; Described vitreum is used for the insulation of glass insulator and sealed base; Described sleeve is used for the sintering of glass insulator and sealed base.
A kind of metal vibration gyroscope, comprise control circuit board, be characterized in, also comprise above-mentioned metal vibration gyroscopic inertia sensor, described control circuit board is electrically connected with glass insulator.
The mode that described glass insulator adopts grafting or wire to connect realizes being connected with control circuit board.
A kind of metal vibration gyroscopic inertia sensor of the present invention and metal vibration gyroscope compared with prior art have the following advantages: adopt packing washer and sealing screw to encapsulate in specialized vacuum sealed in unit, compared with prior art improve Vacuum Package impermeability and encapsulation repeatability, reliability; Adopt glass insulator to realize the mode of metal vibration gyroscopic inertia sensor and gauge outfit external circuit electric interconnects, that can avoid adopting wire interconnection to cause in prior art cannot seal or problem that sealing is poor, effectively raising Vacuum Package impermeability; The gyrostatic overall gauge head structure of metal vibration is compacter, small and exquisite, and reliability is higher.
Accompanying drawing explanation
Fig. 1 is the one-piece construction schematic diagram of a kind of metal vibration gyroscopic inertia of the present invention sensor;
Fig. 2 is the one-piece construction schematic diagram of glass insulator.
Embodiment
Below in conjunction with accompanying drawing, by describing a preferably specific embodiment in detail, the present invention is further elaborated.
As shown in Figure 1, a kind of metal vibration gyroscopic inertia sensor, comprises: gyro outer cover 100, and the cross section of described gyro outer cover 100 is U-shaped; Metal harmonic oscillator 200, be arranged in described gyro outer cover 100, the centre position, bottom of described metal harmonic oscillator 200 is extended with a support bar 201, described support bar 201 points to the opening of gyro outer cover 100, and the lower circumference of described metal harmonic oscillator is provided with several piezoelectric electrode (not shown)s; Sealed base 300, is arranged on the opening part of described gyro outer cover 100, to seal the inner space of described gyro outer cover 100; Conducting ring 400, be arranged between described support bar 201 and sealed base 300, the diameter of described conducting ring 400 is consistent with the diameter of support bar 201, and described conducting ring 400 is configured to the ground electrode of metal harmonic oscillator 200; Several glass insulators 500, sintering is in described sealed base 300, described glass insulator 300 is electrically connected with piezoelectric electrode and conducting ring 400, in the preferred embodiment, comprise 8 piezoelectric electrode, divide equally the lower circumference of metal harmonic oscillator 200,9 glass insulators 300, glass insulator 300 is connected by bonding wire with between piezoelectric electrode; Insulation spacer 600, described insulation spacer 600 is arranged between conducting ring 400 and sealed base 300, and the diameter of described insulation spacer 600 is consistent with the diameter of sealed base 300, described insulation spacer 600 offers the through hole corresponding with glass insulator 500, is electrically connected with piezoelectric electrode or conducting ring 400 to make described glass insulator 500.
In the present embodiment, described metal vibration gyroscopic inertia sensor also comprises a seal assembly, is connected, is arranged on the side relative with sealed base 300 with described gyro outer cover 100; Preferably, described seal assembly comprises packing washer 701 and sealing screw 702, described sealing screw 702 in vacuum environment by fastening to packing washer 701 and gyro outer cover 100.
In the present embodiment, the inside surface of described gyro outer cover 100, the outside surface of gyro outer cover 100 and packing washer 701 surface are coated with silver.
In the present embodiment, the excircle of described gyro outer cover 100 is provided with mounting flange, and described mounting flange is provided with installation component, is installed on Gyro support to make described metal vibration gyroscopic inertia sensor; Preferably, installation component is three or four mounting holes.
In the present embodiment, described insulation spacer 600 is made up of oak bar material.
In the present embodiment, described sealed base 300 adopts laser bonding, to seal the inner space of described gyro outer cover 100 with gyro outer cover 100.
In the present embodiment, described glass insulator 500 comprises conductive cores 501, vitreum 502 and sleeve 503, described vitreum 502 is set in the outside of conductive cores 501, described sleeve 503 is set in the outside of vitreum 502, the height of described vitreum 502 is identical with the height of sleeve 503, the height of described vitreum 502 and the consistency of thickness of described sealed base 300, described conductive cores 502 is for the electrical connection of glass insulator 300 and piezoelectric electrode and conducting ring 400; Described vitreum 502 is for the insulation of glass insulator 500 with sealed base 300; Described sleeve 503 is for the sintering of glass insulator 500 with sealed base 300.
In conjunction with above-mentioned metal vibration gyroscopic inertia sensor, the invention also discloses a kind of metal vibration gyroscope, comprise control circuit board and above-mentioned metal vibration gyroscopic inertia sensor, described control circuit board is electrically connected with glass insulator; Preferably, the mode that described glass insulator adopts grafting or wire to connect realizes being connected with control circuit board.
Although content of the present invention has done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple amendment of the present invention and substitute will be all apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (10)
1. a metal vibration gyroscopic inertia sensor, is characterized in that, comprises:
Gyro outer cover, the cross section of described gyro outer cover is U-shaped;
Metal harmonic oscillator, be arranged in described gyro outer cover, the centre position, bottom of described metal harmonic oscillator is extended with a support bar, and described support bar points to the opening of gyro outer cover, and the lower circumference of described metal harmonic oscillator is provided with several piezoelectric electrode;
Sealed base, is arranged on the opening part of described gyro outer cover, to seal the inner space of described gyro outer cover;
Conducting ring, be arranged between described support bar and sealed base, the diameter of described conducting ring is consistent with the diameter of support bar, and described conducting ring is configured to the ground electrode of metal harmonic oscillator;
Several glass insulators, sinter in described sealed base, described glass insulator is electrically connected with piezoelectric electrode and conducting ring;
Insulation spacer, described insulation spacer is arranged between conducting ring and sealed base, and the diameter of described insulation spacer is consistent with the diameter of sealed base, described insulation spacer offers the through hole corresponding with glass insulator, is electrically connected with piezoelectric electrode or conducting ring to make described glass insulator.
2. metal vibration gyroscopic inertia sensor as claimed in claim 1, is characterized in that, comprise a seal assembly further, be connected, be arranged on the side relative with sealed base with described gyro outer cover.
3. metal vibration gyroscopic inertia sensor as claimed in claim 2, it is characterized in that, described seal assembly comprises packing washer and sealing screw, described sealing screw in vacuum environment by packing washer and gyro outer cover fastening.
4. metal vibration gyroscopic inertia sensor as claimed in claim 3, it is characterized in that, the inside surface of described gyro outer cover, the outside surface of gyro outer cover and packing washer surface are coated with silver.
5. metal vibration gyroscopic inertia sensor as claimed in claim 1, it is characterized in that, the excircle of described gyro outer cover is provided with mounting flange, and described mounting flange is provided with installation component, is installed on Gyro support to make described metal vibration gyroscopic inertia sensor.
6. metal vibration gyroscopic inertia sensor as claimed in claim 1, it is characterized in that, described insulation spacer is made up of oak bar material.
7. metal vibration gyroscopic inertia sensor as claimed in claim 1, it is characterized in that, described sealed base and gyro outer cover adopt laser bonding, to seal the inner space of described gyro outer cover.
8. metal vibration gyroscopic inertia sensor as claimed in claim 1, it is characterized in that, described glass insulator comprises conductive cores, vitreum and sleeve, described vitreum is set in the outside of conductive cores, described jacket casing is located at Vitrea outside, described Vitrea height is identical with the height of sleeve, described Vitrea height and the consistency of thickness of described sealed base, and described conductive cores is used for the electrical connection of glass insulator and piezoelectric electrode and conducting ring; Described vitreum is used for the insulation of glass insulator and sealed base; Described sleeve is used for the sintering of glass insulator and sealed base.
9. a metal vibration gyroscope, comprises control circuit board, it is characterized in that, also comprise the metal vibration gyroscopic inertia sensor as described in claim 1 ~ 8 any one, described control circuit board is electrically connected with glass insulator.
10. metal vibration gyroscope as claimed in claim 9, is characterized in that, the mode that described glass insulator adopts grafting or wire to connect realizes being connected with control circuit board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510837826.8A CN105277185B (en) | 2015-11-26 | 2015-11-26 | Metal vibration gyroscopic inertia sensor and metal vibration gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510837826.8A CN105277185B (en) | 2015-11-26 | 2015-11-26 | Metal vibration gyroscopic inertia sensor and metal vibration gyroscope |
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| CN105277185A true CN105277185A (en) | 2016-01-27 |
| CN105277185B CN105277185B (en) | 2018-10-23 |
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| CN201510837826.8A Active CN105277185B (en) | 2015-11-26 | 2015-11-26 | Metal vibration gyroscopic inertia sensor and metal vibration gyroscope |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111044023A (en) * | 2020-01-03 | 2020-04-21 | 中国船舶重工集团公司第七0七研究所 | Large-range high-overload metal cylindrical resonance gyroscope for bombs |
| CN111829513A (en) * | 2020-06-17 | 2020-10-27 | 中国船舶重工集团公司第七0七研究所 | Inertial element electric signal transmission structure suitable for high vacuum environment and implementation method |
| CN118392145A (en) * | 2022-09-23 | 2024-07-26 | 北京中科航芯科技有限责任公司 | Vibrating gyroscope |
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| US3902374A (en) * | 1973-10-19 | 1975-09-02 | Singer Co | Electrostatic rate gyroscope |
| US4061043A (en) * | 1976-03-29 | 1977-12-06 | John Callender Stiles | Electrostatic rate gyroscope |
| EP0141621A2 (en) * | 1983-10-31 | 1985-05-15 | General Motors Corporation | Vibratory rotational sensor |
| CN1312906A (en) * | 1998-08-11 | 2001-09-12 | Bae系统公共有限公司 | Angular rate sensor |
| CN1648032A (en) * | 2005-01-28 | 2005-08-03 | 华中科技大学 | Vacuum package device for micro system |
| CN101738280A (en) * | 2008-11-24 | 2010-06-16 | 河南理工大学 | Mems pressure sensor and manufacturing method thereof |
| CN103033645A (en) * | 2012-12-11 | 2013-04-10 | 北京兴华机械厂 | Omniseal gauge outfit and quartz flexure accelerometer |
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2015
- 2015-11-26 CN CN201510837826.8A patent/CN105277185B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3902374A (en) * | 1973-10-19 | 1975-09-02 | Singer Co | Electrostatic rate gyroscope |
| US4061043A (en) * | 1976-03-29 | 1977-12-06 | John Callender Stiles | Electrostatic rate gyroscope |
| EP0141621A2 (en) * | 1983-10-31 | 1985-05-15 | General Motors Corporation | Vibratory rotational sensor |
| CN1312906A (en) * | 1998-08-11 | 2001-09-12 | Bae系统公共有限公司 | Angular rate sensor |
| CN1648032A (en) * | 2005-01-28 | 2005-08-03 | 华中科技大学 | Vacuum package device for micro system |
| CN101738280A (en) * | 2008-11-24 | 2010-06-16 | 河南理工大学 | Mems pressure sensor and manufacturing method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111044023A (en) * | 2020-01-03 | 2020-04-21 | 中国船舶重工集团公司第七0七研究所 | Large-range high-overload metal cylindrical resonance gyroscope for bombs |
| CN111829513A (en) * | 2020-06-17 | 2020-10-27 | 中国船舶重工集团公司第七0七研究所 | Inertial element electric signal transmission structure suitable for high vacuum environment and implementation method |
| CN118392145A (en) * | 2022-09-23 | 2024-07-26 | 北京中科航芯科技有限责任公司 | Vibrating gyroscope |
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| Publication number | Publication date |
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| CN105277185B (en) | 2018-10-23 |
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