CN102520209B - Quartz flexible accelerometer based on laser self-mixing interference - Google Patents
Quartz flexible accelerometer based on laser self-mixing interference Download PDFInfo
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Abstract
The invention relates to the field of inertia detecting instruments. In order to provide an accelerometer having the advantages of high measuring precision, high resolution ratio, wide dynamic range, simple and compact structure, electromagnetic interference resistance and the like, the technical scheme includes that a quartz flexible accelerometer based on laser self-mixing interference comprises a meter and a digital rebalance loop, wherein the meter comprises a shell, a pendulum component, a torquer and a laser self-mixing interference signal sensor, and the digital rebalance loop comprises a laser device driving power supply, a photoelectric detection circuit, a data acquisition circuit, a digital signal processing circuit and a torque current generator. When acceleration is inputted, the laser self-mixing interference signal sensor detects displacement of the pendulum component and converts the displacement into electric signals, the electric signals are converted into current signals in proportion with the acceleration by the aid of the digital rebalance loop, the current signals are fed back to the torquer and lead the torquer to generate rebalance torque, and the acceleration can be obtained by detecting the current of the torquer. The quartz flexible accelerometer is mainly applied to acceleration measurement.
Description
Technical field
The present invention relates to inertia measuring instrument field, especially based on the quartz flexible accelerometer of laser self-mixing interference.
Background technology
Quartz flexible accelerometer is a kind of mechanical pendulous accelerometer, it has precision and highly sensitive, the advantage such as temperature coefficient is little, simple in structure, volume is little, be one of inertia type instrument ideal in accurate inertial navigation, guidance system, be widely used in Aeronautics and Astronautics, navigation and land navigation control field.
As the fundamental measurement element of inertial navigation, guidance system, the quartz flexible accelerometer precision directly affects the performance of inertial navigation, guidance system.Along with the development of science and technology, the precision of inertial navigation, guidance system improves constantly, and is also more and more higher for the requirement of the resolution of quartz flexible accelerometer and precision.The large aircraft of the long distance of the needs of especially giving priority to for current national, flying for long time, Altitude Long Endurance Unmanned Air Vehicle, under water for AUV and deep space probe etc., high-precision accelerometer is essential especially.Yet in domestic existing quartz flexible accelerometer, precision is generally at tens μ g
0/ ppm level, resolution be 5-10 μ g only
0, its performance index are far below same kind of products at abroad, and also exist a certain distance between the requirement of high precision inertial navigation guidance system, need further to improve the measuring accuracy of existing quartz flexible accelerometer.
The raising of accelerometer precision has two kinds of approach: the one, and the eigenfrequency of reduction accelerometer harmonic oscillator reduces but its cost is frequency span, and another kind of method is to improve the detection level of accelerometer signal sensor.In quartz flexible accelerometer the output capacitance variable quantity of condenser type signal transducer be proportional to displacement square, resolution is limited, obtain high resolving power, the size of system needs suitable broadening; Be subjected to simultaneously the factors such as electronic noise, mechanical thermal noise and environment stray capacitance to affect condenser type signal transducer output signal-to-noise ratio low, reached the detection limit of small capacitance testing circuit, condenser type quartz flexible accelerometer precision is difficult to break through μ g
0/ ppm.
The laser self-mixing interference technology is emerging in recent years a kind of precision optics noncontact measurement, have the advantages such as resolution is high, precision is high, wide dynamic range, anti-electromagnetic interference (EMI), and its measuring system only there is one to interfere passage, easy collimation, simple and compact for structure.Current, the laser self-mixing interference technology has been widely used in flaw detection research, measuring three-dimensional morphology, measuring blood flow rate, the measurement of cochlea vibration of thin membrane etc., especially laser is from mixing the microdisplacement measurement technology through years development, realized at present the displacement measurement precision higher than nanometer, under the structure of conventional quartz flexure accelerometers, can be higher than 1 μ g on corresponding acceleration analysis Precision Theory
0Up to now, not yet see the relevant report that this technology is used for the quartz flexible accelerometer design.
Summary of the invention
The present invention is intended to solution and overcomes the deficiencies in the prior art, solve quartz flexible accelerometer be subjected to the factors such as size restrictions and electronic noise, mechanical thermal noise, environment stray capacitance affect that resolution is low, precision is difficult for the problem that improves, provide a kind of and have that measuring accuracy is high, resolution is high, the quartz flexible accelerometer based on laser self-mixing interference of the advantages such as wide dynamic range, simple and compact for structure, anti-electromagnetic interference (EMI).For achieving the above object, the technical scheme that the present invention takes is that the quartz flexible accelerometer based on laser self-mixing interference includes: gauge outfit and digital rebalance loop; Gauge outfit is comprised of shell, pendulum assembly, torquer, laser self-mixing interference signal transducer; Digital rebalance loop comprises laser drive power, photoelectric detective circuit, data acquisition circuit, digital signal processing circuit and torque current generator; When the acceleration input is arranged, the laser self-mixing interference signal transducer detects the displacement of pendulum assembly and is converted to electric signal, this electric signal is converted into current signal proportional to acceleration through digital rebalance loop, and feed back to torquer and make it produce trimming moment again, can obtain acceleration by detecting the torquer electric current.
the laser self-mixing interference signal transducer is comprised of vertical cavity surface emitting laser VCSEL, photodiode, optical fiber, the pendulum assembly is quartz pendulous reed, vertical cavity surface emitting laser VCSEL adopts sawtooth current to drive, shoot laser focuses on through collimation lens and produces reflection or scattering on quartz pendulous reed, reflection or scattered light that part is carried displacement information feed back in vertical cavity surface emitting laser VCSEL laser chamber with light generation self-mixed interference in the chamber, cause laser cavity outgoing optical power change, the photodetector that arranges in laser cavity detects self-mixing interference and is converted into electric signal, this electric signal is through the I/V conversion through digital rebalance loop, amplify, filtering and ADC are converted to digital signal, then adopt the All-phase FFT spectrum analysis method to extract the phase place of self-mixing interference, obtain the displacement of pendulum assembly, add square by digital rebalance loop, and then obtain high-precision acceleration analysis data by adding the square electric current.
Photoelectric detective circuit is converted to voltage signal with gauge outfit output photoelectric stream signal, and photoelectric detective circuit comprises I/V change-over circuit, pre-amplification circuit, and the I/V change-over circuit adopts precision resistance to complete the faint light current signal to the conversion of voltage signal; Pre-amplification circuit adopts the instrument operational amplifier with high cmrr; Data acquisition circuit adopts 24 ADC to complete simulating signal to the transformation of digital signal, comprises anti-aliasing filter 503 and A/D change-over circuit; Digital signal processing circuit is mainly completed self-mixing interference phase extraction, acceleration demodulation, comprises that power circuit, clock circuit, reset circuit, LCD show; The torque current generator comprises D/A change-over circuit, smoothed filter circuit and trsanscondutance amplifier for generation of the torquer electric current.
The present invention adopts the displacement of laser self-mixing interference measuring method sense acceleration meter sensitive-mass, has the following advantages:
1, avoid capacitance acceleration detection method problem based on the acceleration detection method of laser self-mixing interference effect, the problem includes: be subjected to noise and problem that effect of parasitic capacitance accelerometer precision is limited, had the advantages such as resolution is high, measuring accuracy is high, wide dynamic range, anti-electromagnetic interference (EMI).
2, the laser self-mixing interference signal transducer only has one to interfere passage, and easily collimation, simple and compact for structure, can make the accelerometer size further reduce.
3, the laser self-mixing interference signal transducer adopts vertical cavity surface emitting laser HVS6003-001 as light source, its front end is calibrated lens with autocollimation, and this laser instrument inside is packaged with photodiode, can be used as photodetector, has further reduced the signal transducer volume.
4, the laser self-mixing interference measurement is based on micro-displacement measurement a little, adopt the exact position of three points on three road laser measurement pendulums with regard to the physical location of capable of regulating pendulum, overcome that pendulum rocks and acceleration sensitive axle and carrier movement input shaft do not overlap the error effect that brings to measurement.
5, utilize the whole phase FFT Zymography to carry out the phase demodulating of self-mixing interference, the method can under the prerequisite that does not increase system complexity, improve self-mixing interference phase extraction precision, and spectral leakage be little, algorithm is simple.
Description of drawings
Fig. 1 is structure principle chart of the present invention.
Fig. 2 is optical system configuration composition of the present invention.
Fig. 3 is drive circuit for laser schematic diagram of the present invention.
Fig. 4 is digital rebalance loop block diagram of the present invention.
Embodiment
Patent of the present invention adopts following technical scheme: a kind of Novel quartz flexure accelerometers based on laser self-mixing interference comprises gauge outfit and digital rebalance loop.Gauge outfit is by shell, pendulum assembly, torquer, laser constitution.Digital rebalance loop comprises laser drive power, photoelectric detective circuit, data acquisition circuit, digital signal processing circuit and torque current generator.When the acceleration input is arranged, the laser self-mixing interference signal transducer detects the displacement of pendulum assembly and is converted to electric signal, this electric signal is converted into current signal proportional to acceleration through digital rebalance loop, and feed back to torquer and make it produce trimming moment again, can obtain acceleration by detecting the torquer electric current.
The laser self-mixing interference signal transducer is comprised of vertical cavity surface emitting laser (VCSEL), photodiode, optical fiber, quartz pendulous reed.it is as follows that it detects principle: VCSEL adopts sawtooth current to drive, shoot laser focuses on through collimation lens and produces reflection or scattering on quartz pendulous reed, the optical feedback that part is carried displacement information returns in laser chamber with light generation self-mixed interference in the chamber, cause laser cavity outgoing optical power change, photodetector detects self-mixing interference and is converted into electric signal, this electric signal is through the I/V conversion, amplify, filtering and ADC are converted to digital signal, then adopt the All-phase FFT spectrum analysis method to extract the phase place of self-mixing interference, obtain the displacement of pendulum assembly, add square by digital rebalance loop, and then obtain high-precision acceleration analysis data by adding the square electric current.
Further describe the present invention below in conjunction with the drawings and specific embodiments.
Fig. 1 is structure principle chart of the present invention.This Novel quartz flexure accelerometers is comprised of shell 100, pendulum assembly, push-pull type torquer, laser self-mixing interference signal transducer and digital rebalance loop 500.Shell 100 is the hardware of a sealing, and pendulum assembly, torquer, laser self-mixing interference signal transducer are packaged in shell 100.The pendulum assembly comprises torquer moving-coil 302 and pendulum 202, and torquer moving-coil 302 is installed on the center of pendulum 202 by the mode of glueing joint, and pendulum 202 bottoms connection flexible beams 201 make the pendulum assembly be connected with accelerometer housing 100 elasticity.The push-pull type torquer comprises permanent magnet 303, yoke 301, torquer moving winding 302, and yoke 301 is fixed on the middle part of housing 100, and permanent magnet 303 is installed on the center of yoke 301 by cementation method, and passes torquer moving-coil 302.The laser self-mixing interference signal transducer comprises target 401, optical fiber 402, collimation lens 403, laser instrument 404, photodiode 406, target 401 is arranged on the top of pendulum 202, laser instrument 404, photodiode 406 are packaged in metal sleeve 405 for scattering, collimation lens 403 is fixed in sleeve 405 1 ends, and sleeve 405 is arranged on accelerometer housing 100.The output terminal of photodiode 406 connects the input of digital rebalancing circuit 500, and the output current I of digital rebalancing circuit 500 feeds back to torquer moving-coil 302, makes torquer produce trimming moment again.
Fig. 2 represents optical system configuration composition of the present invention.Optical system is comprised of photodiode 406, laser instrument 404, collimation lens 403, optical fiber 402, quartz pendulous reed 401, driving power 600.Laser instrument 404 drives luminous by driving power 600, Output of laser is after collimation lens 403 collimations, be radiated at by optical fiber 402 transmission reflection and scattering occur on quartz pendulous reed 401, part light feeds back to mix with light in the chamber in laser instrument 404 resonator cavitys and forms self-mixed interference, modulated laser output power.Laser instrument 404 is vertical cavity surface emitting laser HVS6003-001, and this laser instrument inside is packaged with photodiode, can be used as photodetector, and its front end calibrates lens with autocollimation, has further reduced the signal transducer volume.
Fig. 3 represents laser drive power circuit theory diagrams of the present invention.Drive circuit for laser 600 is comprised of modulation current source and sawtooth signal circuit for generating, Drive Protecting Circuit.Saw-tooth Signal Waveform Generator is for generation of the sawtooth wave undulating current of modulated laser output signal, adopt Direct Digital synthesis method of the frequency (DDS) to generate the sawtooth wave drive current, comprise DDS chip 604, frequency adjustment 601, amplitude adjustment 602 and power supply 603.Modulation current source 605 makes laser works in the range of linearity for generation of constant DC component.Saw-tooth Signal Waveform Generator is sent into V/I conversion 608 modulating currents that can produce for drive laser after adding circuit 605 stacks with the modulation current source.Holding circuit comprises soft start 607, current-limiting protection 609, and when soft start 607 protection laser instruments are not subjected to electric power starting and the surge that produces affects, current-limiting protection 609 protection laser works electric currents are lower than the maximum allowed current of VCSEL.
Fig. 4 represents digital rebalance loop of the present invention.This Novel quartz flexure accelerometers digital rebalance loop 500 is comprised of photoelectric detective circuit, data acquisition circuit, digital signal processing circuit, torque current generator.Photoelectric detective circuit is converted to voltage signal with gauge outfit output photoelectric stream signal, comprises I/V change-over circuit 501, pre-amplification circuit 502, and I/V change-over circuit 501 adopts precision resistance to complete the faint light current signal to the conversion of voltage signal; Pre-amplification circuit 502 adopts the instrument operational amplifier with high cmrr.Data acquisition circuit adopts 24 ADC to complete simulating signal to the transformation of digital signal, comprises anti-aliasing filter 503 and A/D change-over circuit 504.Digital signal processing circuit is mainly completed self-mixing interference phase extraction, acceleration demodulation, comprises that power circuit 510, clock circuit 511, reset circuit 512, LCD show 509.The torque current generator comprises D/A change-over circuit 506, smoothed filter circuit 507 and trsanscondutance amplifier 508 for generation of the torquer electric current.
Claims (2)
1. the quartz flexible accelerometer based on laser self-mixing interference, is characterized in that, includes: gauge outfit and digital rebalance loop; Gauge outfit is comprised of shell, pendulum assembly, torquer, laser self-mixing interference signal transducer; Digital rebalance loop comprises laser drive power, photoelectric detective circuit, data acquisition circuit, digital signal processing circuit and torque current generator; When the acceleration input is arranged, the laser self-mixing interference signal transducer detects the displacement of pendulum assembly and is converted to electric signal, this electric signal is converted into current signal proportional to acceleration through digital rebalance loop, and feed back to torquer and make it produce trimming moment again, can obtain acceleration by detecting the torquer electric current;
the laser self-mixing interference signal transducer is comprised of vertical cavity surface emitting laser VCSEL, photodiode, optical fiber, the pendulum assembly is quartz pendulous reed, vertical cavity surface emitting laser VCSEL adopts sawtooth current to drive, shoot laser focuses on through collimation lens and produces reflection or scattering on quartz pendulous reed, reflection or scattered light that part is carried displacement information feed back in vertical cavity surface emitting laser VCSEL laser chamber with light generation self-mixed interference in the chamber, cause laser chamber outgoing optical power change, the photodetector that arranges in laser chamber detects self-mixing interference and is converted into electric signal, this electric signal is through the I/V conversion through digital rebalance loop, amplify, filtering and ADC are converted to digital signal, then adopt the All-phase FFT spectrum analysis method to extract the phase place of self-mixing interference, obtain the displacement of pendulum assembly, add square by digital rebalance loop, and then obtain high-precision acceleration analysis data by adding the square electric current.
2. the quartz flexible accelerometer based on laser self-mixing interference as claimed in claim 1, it is characterized in that, photoelectric detective circuit is converted to voltage signal with gauge outfit output photoelectric stream signal, photoelectric detective circuit comprises I/V change-over circuit, pre-amplification circuit, and the I/V change-over circuit adopts precision resistance to complete the faint light current signal to the conversion of voltage signal; Pre-amplification circuit adopts the instrument operational amplifier with high cmrr; Data acquisition circuit adopts 24 ADC to complete simulating signal to the transformation of digital signal, comprises anti-aliasing filter 503 and A/D change-over circuit; Digital signal processing circuit is completed self-mixing interference phase extraction, acceleration demodulation, comprises that power circuit, clock circuit, reset circuit, LCD show; The torque current generator comprises D/A change-over circuit, smoothed filter circuit and trsanscondutance amplifier for generation of the torquer electric current.
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| CN105759075B (en) | 2016-02-25 | 2017-09-19 | 中国科学院地质与地球物理研究所 | A kind of high-precision flexure accelerometers |
| CN108240902A (en) * | 2016-12-27 | 2018-07-03 | 天津大学 | A kind of test device and test method of electromagnetic torque device |
| CN107102168B (en) * | 2017-04-27 | 2019-09-10 | 青岛智腾微电子有限公司 | A kind of quartz flexible accelerometer |
| CN109682992A (en) * | 2019-01-08 | 2019-04-26 | 中山大学 | A kind of high-precision laser interference accelerometer |
| CN113405474B (en) * | 2021-08-03 | 2022-08-12 | 重庆大学 | Flexible swing sheet displacement testing device and testing method |
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| CN200953027Y (en) * | 2006-09-30 | 2007-09-26 | 北京航天万新科技有限公司 | Improved quartz flexible accelerometer |
| CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
| CN101639541A (en) * | 2009-09-07 | 2010-02-03 | 北京航天控制仪器研究所 | Accelerometer relative gravity meter |
| CN201749128U (en) * | 2010-08-18 | 2011-02-16 | 中国电子科技集团公司第四十三研究所 | Servo circuit of quartz flexible accelerometer |
| CN102024085A (en) * | 2010-12-22 | 2011-04-20 | 北京航空航天大学 | Magnetic-structural coupling simulation method for quartz flexible accelerometer based on finite elements |
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| CN200953027Y (en) * | 2006-09-30 | 2007-09-26 | 北京航天万新科技有限公司 | Improved quartz flexible accelerometer |
| CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
| CN101639541A (en) * | 2009-09-07 | 2010-02-03 | 北京航天控制仪器研究所 | Accelerometer relative gravity meter |
| CN201749128U (en) * | 2010-08-18 | 2011-02-16 | 中国电子科技集团公司第四十三研究所 | Servo circuit of quartz flexible accelerometer |
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