CN101509772B - Optical phase detecting high precision silicon microelectromechanical gyroscope - Google Patents
Optical phase detecting high precision silicon microelectromechanical gyroscope Download PDFInfo
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- CN101509772B CN101509772B CN2009101033285A CN200910103328A CN101509772B CN 101509772 B CN101509772 B CN 101509772B CN 2009101033285 A CN2009101033285 A CN 2009101033285A CN 200910103328 A CN200910103328 A CN 200910103328A CN 101509772 B CN101509772 B CN 101509772B
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Abstract
The invention relates to a high precision silicon micro electronmechanical gyroscope of optical phase detection. Tail optical fiber of a light source and entering fiber of a photoelectric detector are respectively in heat sealing with one optical fiber of a Y-shaped optical coupler. A micro mirror is made on a vibration beam to be used for reflecting transmitted light passing through the tail optical fiber of the Y-shaped optical coupler. The photoelectric detector detects interference fringe formed by the confluence of the reflected light on the micromirror and the reflected light on the end face of the tail optical fiber of the Y-shaped optical coupler by the Y-shaped optical coupler. The photoelectric detector is connected with a detection and control system. The invention adopts optical interference principle and uses an optical phase measurement method to measure the infinitesimal displacement of a vibration mass block, thus improving the detection sensitivity and reading accuracy of the gyroscope. The gyroscope is characterized by small volume, light weight, high resolution, low drift, short response time and high reading accuracy, improves dynamic response range and detection accuracy, is beneficial to the implementation of digital filter and signal transmission processing simultaneously and improves the anti-interference capacity of the system.
Description
Technical field
The present invention relates to measure the device of rotational angular velocity, be specifically related to the high precision silicon microelectromechanicgyroscope gyroscope that utilizes the optics position to detect mutually, it is to have merged optical fiber Michelson interference technique on traditional silicon microelectromechanicgyroscope gyro basis, light harvesting, MEMS (micro electro mechanical system) (MEMS), precision optical machinery and electronic technology be in the sensor of one, can with in the MEMS gyro of low precision promote and be middle high precision MEMS gyro.
Background technology
Gyrostatic principle is: the direction of the turning axle indication of a rotating object can not change when not influenced by external force, read this indicated direction with several different methods then, it is accurate angle, the angular-rate sensor that keeps relative tracking mode in dynamically.Because gyroscope does not rely on information such as extraneous radio and can independently measure, anti-electromagnetic interference capability is strong, therefore it is widely used a kind of inertial navigation instrument in military affairs such as modern national defense Aeronautics and Astronautics, navigation, subsurface boring, land navigation and the national economy, and its development has crucial meaning to the contour development of science and technology of national defence, national economy of a country.
The micro electronmechanical gyrotron that development in recent years is got up designs according to the coriolis force principle, has characteristics such as volume is little, in light weight, low in energy consumption, anti-overload ability is strong, is a modern gyrostatic important developing direction.
The capacitance detecting vibrating micromechanical gyro, it utilizes electrostatic comb to drive excited vibration, realize input with differential capacitance, its principle of work is done as simple harmonic oscillation by electrostatic force F for the beam that shakes when micromechanical gyro is worked at driving direction (y direction), when when angular velocity Ω input is arranged perpendicular to device plane direction (Z direction), the beam that shakes will be done as simple harmonic oscillation by Coriolis force Fc the detection side to (x direction), detect this vibration micrometric displacement, can detect the size of sensitive direction angular velocity Ω.
Yet the capacitance determining method that microelectromechanicgyroscope gyroscope adopts usually, this method electric capacitance change is very little, reaches 10
-18F, so precision and the very difficult raising of sensitivity far away from laser and optical fibre gyro, can only be applied to the low side angle measuring system on precision.Owing to there is stray capacitance, make the noise of microelectromechanicgyroscope gyroscope output signal bigger simultaneously, the drift stabilization degree is poor.
Summary of the invention
At the micro electronmechanical gyrotron above shortcomings of existing condenser type, the purpose of this invention is to provide a kind ofly can improve accuracy of detection greatly, volume is little, cost the is low optics position that utilizes is detected the high precision silicon micro-light electromechanical gyro instrument of angular velocity mutually.
The object of the present invention is achieved like this: the high precision silicon microelectromechanicgyroscope gyroscope that the optics position is detected mutually, and it comprises light source, Y type photo-coupler, photodetector, Detection ﹠ Controling system and vibration beam type silicon microelectromechanicgyroscope gyro body; A fused fiber splice of the tail optical fiber of light source and Y type photo-coupler, another root optical fiber of Y type photo-coupler and second photo-coupler go into fine welding, two fibers of second photo-coupler are gone into fine welding with phase shifter and the 3rd photo-coupler respectively, phase shifter and the 4th photo-coupler are gone into fine welding, photodetector go into fine respectively with the fiber welding of the 3rd photo-coupler and the 4th photo-coupler; The tail optical fiber of Y type photo-coupler is fixed and is formed catoptron at the tail optical fiber end face coating, makes emergent light in this end face generating unit sub reflector and transmission; The light that light source sends enters from an end of Y type photo-coupler, doing micro mirror on the beam that shakes forms reflecting surface and is used to reflect transmitted light through Y type photo-coupler tail optical fiber, photodetector is used to survey interference fringe, this interference fringe has different optical path differences because of the reflected light on the micro mirror with the reflected light of Y type photo-coupler tail optical fiber end face, converging the generation interference through Y type photo-coupler and forming, the photo detector signal output terminal is connected with Detection ﹠ Controling system signal input end.
Described Detection ﹠ Controling system comprises high-frequency signal collection and position phase detecting circuit and light source driving circuit, and the constant current signal of light source driving circuit output high stable is given light source; The high-frequency signal collection comprises preposition amplification filtering circuit with the position phase detecting circuit by the signal trend, analog amplify circuit, filtering circuit, A/D converter, the CPU high frequency sampling circuit, position phase comparator and logic control circuit, the analog electrical signal of photodetector output is through preposition amplification filtering circuit, it is digital signal in the A/D converter internal conversion that analog amplify circuit and filtering circuit are handled the back, through the high frequency sampling of CPU with calculate a back input phase comparator and carry out the position and compare, thereby obtain angular velocity size and direction, logic control circuit provides corresponding sequential control for data sampling, address decoding and data latching.
The micro-displacement of the proportional oscillating mass piece of measurement of the present invention and angular velocity (beam shakes).Employing has the principle of interference of the two-beam signal of optical path difference, detect the micrometric displacement of the beam that shakes mutually by the measuring light degree, thereby the proportional accurate measurement that realizes angular velocity of this micro-displacement and gyro rotational angular velocity, because employing optical interference position phase detection method can be measured the accurate nano-grade displacement between 0～λ/2, thereby on performance, improved the measuring accuracy of silicon microelectromechanicgyroscope gyro greatly.
Innovative point of the present invention is:
1. the employing principle of optical interference comes the micro-displacement of measuring vibrations mass with light degree phase measuring method, thereby has improved the detection sensitivity and the reading accuracy of gyro; Solved that former silicon micromechanical gyroscope is low through the resolution that capacitance detecting exists, noise is big, precision is low, by time integral, the characteristics of the reading accuracy that the shortcoming that the response time is slow, the high precision silicon microelectromechanicgyroscope gyroscope that this optics position is detected mutually have that volume is little, in light weight, high resolving power, low drift, response time are fast and high.
2. adopt high frequency position phase signals to read the essence-rough detection mode that combines with interference fringe counting, the responding range and the accuracy of detection (can be accurate to tens nanometer) of gyro have been improved to small amplitude detecting, help simultaneously carrying out digital filtering and process of signal transmission, improved system's antijamming capability.
3. structure is formed simply, cost is low, technology is simple, is fit to produce in batches.
Description of drawings
Fig. 1 is a theory of constitution block scheme of the present invention;
Fig. 2 is a laser propagation light path synoptic diagram of the present invention;
Fig. 3 is that position of the present invention is detected and the constant-current control circuit theory diagram mutually;
Interference light intensity and position output mutually that Fig. 4 is converted to by photodetector.
Embodiment
Introduce the present invention in detail below in conjunction with embodiment.
The high precision silicon microelectromechanicgyroscope gyroscope structure that optics of the present invention position is detected mutually as shown in Figure 1, it comprise light source that the semiconductor laser (LD) of magnetic tape trailer fibre forms, Y type photo-coupler, second, third, the 4th photo-coupler, phase shifter, photodetector, Detection ﹠ Controling system and vibration beam type silicon microelectromechanicgyroscope gyro body, the beam part of shaking of only having expressed vibration beam type silicon microelectromechanicgyroscope gyro body among Fig. 1 is to represent the gyro body.A fused fiber splice of the tail optical fiber of light source and Y type photo-coupler, another root optical fiber of Y type photo-coupler and second photo-coupler go into fine welding, two fibers of second photo-coupler are gone into fine welding with phase shifter and the 3rd photo-coupler respectively, phase shifter and the 4th photo-coupler are gone into fine welding, photodetector go into fine respectively with the fiber welding of the 4th, the 3rd photo-coupler, the tail optical fiber of Y type photo-coupler is fixed on the silicon substrate structure.The light that LD sends enters from an end of Y type photo-coupler, and the tail optical fiber end face coating formation catoptron at Y type photo-coupler makes emergent light in this end face generating unit sub reflector and transmission.On the beam that shakes, form micro mirror by little processing and film plating, transmitted light shines micro mirror and enters in the optical fiber after reflection, the two bundle reflected light that reflect on the tail optical fiber end face reflection of Y type photo-coupler and micro mirror are because of having different light paths, converging the generation interference through Y type photo-coupler, form interference fringe, surveyed by photodetector, be converted to electric signal output by photodetector, the photo detector signal output terminal is connected with Detection ﹠ Controling system signal input end.If the tail optical fiber end face of Y type photo-coupler not plated film also can form reflection naturally, just volume reflection seldom, less than 4%; The purpose of plated film is to increase and the control volume reflection, and the intensity of reflected light that makes reflected light and Y type photo-coupler tail optical fiber end face on the micro mirror is (this can control by plated film accommodation reflex rate) quite, so will present good interference fringe.
Fig. 3 square frame part is seen by described Detection ﹠ Controling system, and it comprises high-frequency signal collection and position phase detecting circuit and light source driving circuit, and the constant current signal of light source driving circuit output high stable is given light source; The high-frequency signal collection comprises preposition amplification filtering circuit with the position phase detecting circuit by the signal trend, analog amplify circuit, filtering circuit, A/D converter, the CPU high frequency sampling circuit, position phase comparator and logic control circuit, the analog electrical signal of photodetector output is through preposition amplification filtering circuit, it is digital signal in the A/D converter internal conversion that analog amplify circuit and filtering circuit are handled the back, calculating a back input phase comparator through the high frequency sampling of CPU and demodulation carries out the position and compares, thereby obtain angular velocity size and direction, logic control circuit provides corresponding sequential control for data sampling, address decoding and data latching.
Going between the fibre of another root optical fiber of Y type photo-coupler and photodetector by second photo-coupler, the 3rd photo-coupler, phase shifter and the 4th photo-coupler are set, can obtain phasic difference and be 90 ° signal, be used for signal noise is suppressed, and increase the computing information amount, improve the input precision thus.
The course of work of the present invention and principle are as follows:
The light S1 that light source sends is behind Y type photo-coupler, and part is at the tail optical fiber end face reflection, and part is transmitted to the micro mirror on the beam that shakes.Reflected light at the tail optical fiber end face is S1 ', and the reflected light on the micro mirror is S2 ', and S2 ' is injected into the tail optical fiber end face, forms another bundle reflected light S2 ".(S1 ' produce interference through different light paths after Y type photo-coupler converges with S2 ") forms interference fringe to two bundle reflected light, and light path is propagated as shown in Figure 2.
Above-mentioned interference optical signals photodetector through the coupling mechanism coupling receives, be converted to analog voltage signal (as shown in Figure 4), signal is transfused to the Detection ﹠ Controling system, in the high-frequency signal collection and position phase detecting circuit of Detection ﹠ Controling system, above-said current signal is at first by the preposition amplification filtering circuit of one-level, and then through the simulation amplification, receive A/D converter after the filtering, in the A/D converter internal conversion is digital signal, carry out high frequency sampling by CPU, sample frequency is not less than 10KHz, the signal of gathering through high frequency calculates through the CPU demodulation, comparing in the position, thereby obtains angular velocity size and the direction of gyro sensitive axes with respect to the inertial coordinates system input; Logic control circuit is mainly data acquisition corresponding sequential control, address decoding and data latching etc. is provided.The stable electric current of light source driving circuit output of Detection ﹠ Controling system simultaneously, is controlled light source.Position of the present invention is detected mutually with the constant-current control circuit principle and is seen Fig. 3.
Below explanation high frequency sample bits is differentiated the course of work mutually.
Optics of the present invention position interference with the detection principle is: two bundles are with the different light path of frequency monochromatic light process, converge and form interference through reflecting back into coupling mechanism, interference signal can change with the variation of optical path difference, promptly when vibration generation micro-displacement takes place in the beam that shakes, the optical path difference of two-beam can change thereupon, received by detector, the expression formula of its output intensity is:
Wherein
Be the phasic difference of two-beam, the optical path difference of two-beam is Δ L=r
2-r
1
By synthetic light intensity formula as can be known, the cosine function of light intensity and phase differential is contacted directly, so interference of light phase detection principle can be measured the displacement of tens nanometer level, higher than the precision that direct measuring period, striped obtained, simultaneously than higher with the mode precision of capacitance detecting charge variation.
Two bundle reflected light (S1 ', S2 ") produces interference through different light paths after photo-coupler converges, and forms interference fringe, is surveyed by photodetector; be converted to electric signal output by photodetector, the photo detector signal output terminal is connected with the control system signal input part.The reflecting surface that the beam plated film of supposing to shake forms and fixedly the optical fiber tail end end face distance of Y type photo-coupler be l
0When the sensitive axes direction did not have the angular velocity input, optical path difference was
ΔL＝2l
0 (2)
The two-beam initial phase is identical, so phase differential
When sensitive axes has the angular velocity input, the reflection of walking beam micro mirror will change the output of light intensity, and optical path difference will change this moment, and then the phase change that is caused by angular velocity is:
Wherein, Q
yFor detecting the quality factor of mode, x direction peak swing Xmax, ω
yBe the natural frequency of y direction, ω
dBe driving frequency.Can calculate the big or small Ω (Ω is the input angular velocity of system's sensitive direction) of corresponding angular velocity thus by the measured value of phase change.
The high precision silicon microelectromechanicgyroscope gyroscope technology that the optics position is detected mutually is a new technique in conjunction with optics and MEMS technical advantage development formation. From the technical development angle, this type gyro is take optical theory as the basis, effectively combining the advantage of the micro-miniature structures of all solid state of optical gyroscope and silicon microelectromechanicgyroscope gyro, is a kind of novel angular-rate sensor, is that the micro-nano technology is in the important application in inertial technology field simultaneously.
Claims (4)
1. the high precision silicon microelectromechanicgyroscope gyroscope that detects mutually of optics position, it is characterized in that: it comprises light source, Y type photo-coupler, second photo-coupler, the 3rd photo-coupler, phase shifter, the 4th photo-coupler, photodetector, Detection ﹠ Controling system and vibration beam type silicon microelectromechanicgyroscope gyro body; A fused fiber splice of the tail optical fiber of light source and Y type photo-coupler, another root optical fiber of Y type photo-coupler and second photo-coupler go into fine welding, two fibers of second photo-coupler are gone into fine welding with phase shifter and the 3rd photo-coupler respectively, phase shifter and the 4th photo-coupler are gone into fine welding, photodetector go into fine respectively with the fiber welding of the 3rd photo-coupler and the 4th photo-coupler; The tail optical fiber of Y type photo-coupler is fixed, and the light that light source sends enters from an end of Y type photo-coupler, and the tail optical fiber end face coating formation catoptron at Y type photo-coupler makes emergent light in this end face generating unit sub reflector and transmission; Doing micro mirror on the beam that shakes forms reflecting surface and is used to reflect transmitted light through Y type photo-coupler tail optical fiber, photodetector is used to survey interference fringe, this interference fringe has different optical path differences because of the reflected light on the micro mirror with the reflected light of Y type photo-coupler tail optical fiber end face, converging the generation interference through Y type photo-coupler and forming, the photo detector signal output terminal is connected with Detection ﹠ Controling system signal input end.
2. the high precision silicon microelectromechanicgyroscope gyroscope that optics according to claim 1 position is detected mutually, it is characterized in that: described Detection ﹠ Controling system comprises high-frequency signal collection and position phase detecting circuit and light source driving circuit, and the constant current signal of light source driving circuit output high stable is given light source.
3. the high precision silicon microelectromechanicgyroscope gyroscope that optics according to claim 2 position is detected mutually, it is characterized in that: described high-frequency signal collection comprises preposition amplification filtering circuit with the position phase detecting circuit by the signal trend, analog amplify circuit, filtering circuit, A/D converter, the CPU high frequency sampling circuit, position phase comparator and logic control circuit, the analog electrical signal of photodetector output is through preposition amplification filtering circuit, it is digital signal in the A/D converter internal conversion that analog amplify circuit and filtering circuit are handled the back, through the high frequency sampling of CPU with calculate a back input phase comparator and carry out the position and compare, thereby obtain angular velocity size and direction, logic control circuit provides corresponding sequential control for data sampling, address decoding and data latching.
4. the high precision silicon microelectromechanicgyroscope gyroscope that detects mutually according to claim 1 or 2 or 3 described optics positions, it is characterized in that: the tail optical fiber end face coating of described Y type photo-coupler makes the intensity of reflected light of reflected light on the micro mirror and Y type photo-coupler tail optical fiber end face suitable with the control volume reflection.
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| JP5657444B2 (en) * | 2011-03-23 | 2015-01-21 | 東京エレクトロン株式会社 | Temperature measuring apparatus and temperature measuring method |
| CN102809663A (en) * | 2012-08-20 | 2012-12-05 | 重庆邮电大学 | Angular-rate sensing system by detecting Coriolis vibration by aid of non-contact optical fiber combinations |
| CN105044703B (en) * | 2015-06-01 | 2018-06-01 | 中国工程物理研究院激光聚变研究中心 | A kind of laser ranging optical system and its main ripple signal sampling method |
| US10365104B2 (en) * | 2016-05-11 | 2019-07-30 | Murata Manufacturing Co., Ltd. | Digital controller for a MEMS gyroscope |
| CN106871797B (en) * | 2017-01-07 | 2023-03-10 | 四川大学 | Non-contact sample thickness measuring method and measuring device based on Michelson interference principle |
| US11656081B2 (en) * | 2019-10-18 | 2023-05-23 | Anello Photonics, Inc. | Integrated photonics optical gyroscopes optimized for autonomous terrestrial and aerial vehicles |
| CN115854889B (en) * | 2023-03-08 | 2023-06-06 | 上海拜安传感技术有限公司 | Contact type displacement measuring device |
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