CN101256198A - Gleam dynamoelectric acceleration gauge based on laser feedback interference - Google Patents
Gleam dynamoelectric acceleration gauge based on laser feedback interference Download PDFInfo
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- CN101256198A CN101256198A CNA2008101027379A CN200810102737A CN101256198A CN 101256198 A CN101256198 A CN 101256198A CN A2008101027379 A CNA2008101027379 A CN A2008101027379A CN 200810102737 A CN200810102737 A CN 200810102737A CN 101256198 A CN101256198 A CN 101256198A
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Abstract
The invention discloses a glimmer motor accelerometer based on laser feedback interference, comprising upper detecting assembly (1), acceleration sensing unit (2) and down detecting assembly (3), wherein the acceleration sensing unit (2) is between the upper detecting assembly (1) and down detecting assembly (3) and the upper detecting assembly (1) has the same structure with the down detecting assembly. The structure of accelerometer is simple because of laser feedback interference. In order to reduce the size and weight of acceleration, the optimum design for spatial distribution of required parts of the accelerometer is performed. The acceleration sensing unit and glimmer optical reflector are processed by micro-processing technology, at the same time light resource, photo detector and beam collimator are integrated together. Multilayer assembling and packaging are realized using linkage technique, therefore the requirement of accelerometer in precision, reliability, miniaturization and useful life.
Description
Technical field
The present invention relates to a kind of gleam dynamoelectric acceleration gauge, belong to laser and Technology of Precision Measurement field based on laser feedback interference.
Background technology
Accelerometer is the important devices of inertial navigation system and inertial guidance system, is used for measuring the acceleration and the linear displacement of moving object.Existing accelerometer is of a great variety, has all basically that responsive quality is fast, test section and signal processing circuit three parts form.Responsive mass is used for experiencing extraneous acceleration signal, and is translated into the displacement information of self.The test section is the displacement of measuring responsive mass, can be divided into two kinds of electrical signal detection and optical signal detecting.Signal processing circuit then all is that the information that the test section obtains is handled, output acceleration information feature.
The accelerometer of optical signal detecting, promptly optical accelerometer has highly sensitive advantage, is widely used.Optical accelerometer mainly is divided into intensity modulation type, phase modulation-type and wavelength-modulated type.The intensity modulation type is simple in structure, but precision is not high; Phase modulation-type and wavelength-modulated type precision are higher, but owing to there is fiber optic component, volume can not be done very for a short time.Along with the development of aviation, navigation and aerospace cause, more and more higher for the requirement of accelerometer, not only require high precision, also require weight reduction, reduce volume etc.The volume of traditional optical accelerometer can not meet the demands.
Gleam dynamoelectric acceleration gauge abbreviates the MOEMS accelerometer as, is a kind of novel accelerometer based on optical testing technology and MEMS manufacturing technology.In anti-electromagnetic interference (EMI), reduce volume, improve precision and can realize that aspect such as mass production has special advantages.
From King in reported first in 1963 since laser feedback interference (the claiming laser self-mixing interference again) phenomenon, the laser feedback interference technology, especially semiconductor laser feedback interference technology has obtained a lot of scholars' concern in the world, is applied to pattern, distance, displacement, speed and vibrates isoparametric measurement.Laser feedback interference be meant that the light of laser instrument output is reflected by exterior object or scattering after, wherein a part of light feeds back to the resonator cavity of laser instrument again, this feedback light has been carried the relevant information of exterior object, after the laser cavity inner laser mixes mutually, and the output of meeting modulated laser.Laser feedback interference Changing Pattern and interference of light phenomenon are similar, laser output power changes one-period when exterior object moves half optical source wavelength, people utilize the influence of laser feedback interference to detect physical quantity, thereby have formed an emerging optical measuring technique.The motion conditions that this technology can utilize the feedback laser of the face reflection that is reflected that reflecting surface is tested in the modulation of laser resonant cavity, thus realize finishing high-precision measurement with simple structure.
Summary of the invention
The purpose of this invention is to provide a kind of gleam dynamoelectric acceleration gauge based on laser feedback interference, this accelerometer is owing to adopt the laser feedback interference technology, so arrangements of accelerometers is simple, for further reducing the size and the weight of accelerometer, the space distribution of the required parts of accelerometer has been done optimal design.Utilize micro-processing technology processing acceleration sensitive spare 2, micro-optic catoptron structures such as (A micro-optic catoptron 11, B micro-optic catoptrons 31) in the present invention, devices such as the light source (semiconductor laser) about inciting somebody to action simultaneously in the detection components, photodetector, beam collimation device integrate, utilize bonding technology to realize multilayer assembling and encapsulation, thereby satisfy the requirement of accelerometer at aspects such as precision, reliability, miniaturization, serviceable lifes.
The present invention adopts the differential structure design, two cover measuring systems are up and down arranged, when acceleration sensitive spare is subjected to displacement, opposite variation takes place in the space optical path of two cover measuring systems up and down, opposite variation also takes place in the light intensity of two laser instruments, can utilize signal processing circuit to carry out variate and reduce measuring error, improve the Measurement Resolution of system.
The present invention is a kind of gleam dynamoelectric acceleration gauge based on laser feedback interference, form by last detection components 1, acceleration sensitive spare 2, following detection components 3, acceleration sensitive spare 2 is positioned between detection components 1 and the following detection components 3, and last detection components 1 is identical with following detection components 3 structures, and last detection components 1, acceleration sensitive spare 2 and following detection components 3 adopt the bonding mode to encapsulate.Acceleration sensitive spare 2 adopts cantilever beam structures, its semi-girder can be a pair of, two pairs or four pairs, semi-girder can straight beam, the beam that has bending (arch) up and down or the beam of other forms (as waveform).
The advantage of gleam dynamoelectric acceleration gauge of the present invention is: (1) is owing to adopt the laser feedback interference technology, optical interference circuit has only one, so avoided the ubiquitous structure of conventional interference structure huge, problems such as light path complexity make accelerometer of the present invention become simple more, compact, stable.(2) because the upper and lower surface of responsive mass block structure can light reflex or scattering, so collimation is insensitive, is easy to debug, and can reduce difficulty of processing.(3) integrated owing to utilizing micro-processing technology and optoelectronic integrated technology that each device is realized, so accelerometer volume of the present invention is little, but mass production, cost is low, and its commercial promise is wide.
Description of drawings
Fig. 1 is the external structure of gleam dynamoelectric acceleration gauge of the present invention.
Fig. 2 is the structural drawing of acceleration sensitive spare of the present invention.
Fig. 3 is the structural drawing of detection components in the present invention.
Fig. 4 is the structural drawing of detection components under the present invention.
Fig. 5 A is the structural drawing of collimating apparatus of the present invention.
Fig. 5 B is the structural drawing of another collimating apparatus of the present invention.
Fig. 6 A is the structural drawing of triangle micro-optic catoptron.
Fig. 6 B is the structural drawing with hinge arrangement micro-optic catoptron.
Light path when Fig. 7 is accelerometer of the present invention work is moved towards synoptic diagram.
Among the figure: 1. go up detection components 11.A micro-optic catoptron 12.A beam collimation device
13.A semiconductor laser 14.A circuit board 15.A photodetector
101.A matrix 103. cavitys 104. cavity bottom surfaces 2. acceleration sensitive spare 21.A semi-girders
22.B semi-girder 23.C semi-girder 24.D semi-girder 25.E semi-girder 26.F semi-girder
27.G 3. times detection components of semi-girder 28.H semi-girder 201. substrates, 202. responsive masses
31.B micro-optic catoptron 310.B minute surface 311.C connector 312.D connector
313.A hinge 314.B hinge 315.A buckle 316.B buckle 317.C buckle
318.D buckle 319.E buckle 31a.A minute surface 31b.E connector 32.B beam collimation device
321. globe lens 322.A connector 323. square grooves 324. gradual index lenses
325.B connector 326.V shape groove 33.B semiconductor laser 34.B circuit board
35.B photodetector 301.B matrix 302. through hole 303.B cavity 304.B cavity bottom surfaces
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
The present invention is a kind of gleam dynamoelectric acceleration gauge based on laser feedback interference, this accelerometer is installed on the tested device, when tested device has acceleration to exist, responsive mass 202 on (referring to shown in Figure 2) acceleration sensitive spare 2 will produce inertial force, thereby make responsive mass 202 produce micrometric displacement, (referring to shown in Figure 8) causes the space optical path light path to change; Because the laser feedback interference effect, the feedback light that feeds back to laser instrument is used for the output light of modulated laser, makes the emergent light light intensity of laser instrument change; (referring to Fig. 3, shown in Figure 4) utilizes two photodetectors (to be meant the A photodetector 15 in the detection components 1, B photodetector 35 in the following detection components 3) the emergent light light intensity signal is converted into electric signal, handle by the signal deteching circuit on the signal deteching circuit plate 34 (being installed in down in the cavity 303 of detection components 3), obtain the result of acceleration.The space optical path of accelerometer is made of the laser cavity of two semiconductor lasers (being meant the A semiconductor laser 13 in the detection components 1, the B semiconductor laser 33 in the following detection components 3) and the upper and lower surface of responsive mass 202.
Referring to shown in Figure 1, gleam dynamoelectric acceleration gauge based on laser feedback interference of the present invention, form by last detection components 1, acceleration sensitive spare 2, following detection components 3, acceleration sensitive spare 2 is positioned between detection components 1 and the following detection components 3, and goes up detection components 1, acceleration sensitive spare 2 and following detection components 3 and adopt the bonding mode to encapsulate.One side of following detection components 3 is provided with through hole 302, and this through hole 302 is used for electrical lead to be passed through.Since in the detection principle of the gleam dynamoelectric acceleration gauge of the present invention design to the insensitive advantage of beam collimation, and responsive mass upper and lower surface much larger than and beam diameter, therefore reduced requirement, thereby reduced difficulty of processing for encapsulation precision.In the present invention, last detection components 1 is identical with following detection components 3 structures.
Referring to shown in Figure 3, the described detection components 1 that goes up includes an A matrix 101, A micro-optic catoptron 11, A beam collimation device 12, A semiconductor laser 13, a-signal testing circuit plate 14, A detector 15, offer A cavity 103 in the center of A matrix 101, A micro-optic catoptron 11 is installed on the cavity bottom panel 104 of A cavity 103 from left to right, a-signal testing circuit plate 14, the signal deteching circuit of forming except electronic devices and components on the a-signal testing circuit plate 14, A beam collimation device 12 also is installed from left to right, A semiconductor laser 13, A photodetector 15, and A collimating apparatus 12, A semiconductor laser 13 and A photodetector 15 are installed in the central axes on the a-signal testing circuit plate 14.The signal output part of A photoelectric detector 15 is connected with the signal input part of signal deteching circuit, is used for detected signal is carried out analytical calculation and provides analysis result, and analysis result is as the output of this accelerometer.A micro-optic catoptron 11 is used for changing the direction of A semiconductor laser 13 emitting lasers, the front end of A micro-optic catoptron 11 and A beam collimation device 12 has certain for d, d=0.5～10mm, the central axial direction of the surface normal of A micro-optic catoptron 11 and A beam collimation device 12 is 45, the light of the horizontal direction that A semiconductor laser 13 is sent is turned back into vertical direction, so promptly can regulate the length of the laser external cavity that constitutes by space optical path, can reduce the size of whole gleam dynamoelectric acceleration gauge again.
Referring to shown in Figure 4, described detection components 3 down includes a B matrix 301, B micro-optic catoptron 31, B beam collimation device 32, B semiconductor laser 33, B signal deteching circuit plate 34, B detector 35, offer B cavity 303 in the center of B matrix 301, one side of B matrix 301 is provided with B interface 302, on the cavity B of B cavity 303 bottom panel 304, B micro-optic catoptron 31 is installed from left to right, B signal deteching circuit plate 34, the signal deteching circuit of forming except electronic devices and components on the B signal deteching circuit plate 34, B beam collimation device 32 also is installed from left to right, B semiconductor laser 33, B photodetector 35, and B collimating apparatus 32, B semiconductor laser 33 and B photodetector 35 are installed in the central axes on the B signal deteching circuit plate 34.The signal output part of B photoelectric detector 35 is connected with the signal input part of signal deteching circuit, is used for detected signal is carried out analytical calculation and provides analysis result, and analysis result is as the output of this accelerometer.B micro-optic catoptron 31 is used for changing the direction of B semiconductor laser 33 emitting lasers, the front end of B micro-optic catoptron 31 and B beam collimation device 32 has certain for d, d=0.5～10mm, the central axial direction of the surface normal of B micro-optic catoptron 31 and B beam collimation device 32 is 45, the light of the horizontal direction that B semiconductor laser 33 is sent is turned back into vertical direction, so promptly can regulate the length of the laser external cavity that constitutes by space optical path, can reduce the size of whole gleam dynamoelectric acceleration gauge again.
In the present invention, A micro-optic catoptron 11, B micro-optic catoptron 31 adopt the micro photo-electro-mechanical technology to realize processing, also can utilize lithographic technique directly to process (shown in Fig. 6 A), or utilize surface processing technique to process hinged microstructure (shown in Fig. 6 B), guarantee the minute surface of catoptron and cavity bottom panel 304 shapes at 45 ± 5 ° of angles.In Fig. 6 A, on the dip plane of E connector 31b, adopt lithographic technique directly to process A minute surface 31a.In Fig. 6 B, B micro-optic catoptron 31 includes B minute surface 310, C connector 311, D connector 312, A hinge 313, B hinge 314, B minute surface 310 adopts surface processing technique processing on D connector 312, D connector 312 is connected with C connector 311 by A hinge 313, B hinge 314, C connector 311 is installed on the cavity bottom panel 304 by A buckle 315, B buckle 316, and the bottom of D connector 312 is installed on the cavity bottom panel 304 by C buckle 317, D buckle 318, E buckle 319.Adopt A hinge 313, B hinge 314 stay bolts to play D connector 312, its objective is to guarantee that D connector 312 and cavity bottom panel 304 shapes have a certain degree, guarantee that promptly B minute surface 310 and cavity bottom panel 304 form 40 °～50 ° angles.
In the present invention, A beam collimation device 12, B beam collimation device 32 can be gradual index lens (shown in Fig. 5 B), C lens, globe lens (shown in Fig. 5 A) or Fresnel Lenses, can utilize assembling or bonding techniques to be integrated on the substrate (A connector 322 or B connector 325).Fresnel Lenses utilizes the binary optical principle to be made.
In the present invention, A semiconductor laser 13, B semiconductor laser 33 can be the semiconductor lasers of FP type, DFB type or DBR type.
Referring to shown in Figure 2, acceleration sensitive spare 2 is to be formed with responsive mass 202 in heart position therein by little processing lithographic technique on a substrate 201, is formed with A semi-girder 21, B semi-girder 22, C semi-girder 23, D semi-girder 24, E semi-girder 25, F semi-girder 26, G semi-girder 27, H semi-girder 28 around responsive mass 202 respectively.A semi-girder 21, B semi-girder 22, C semi-girder 23 are identical with D semi-girder 24 structures, and brachium has 0.5～5mm, and arm is wide 0.1～1mm.E semi-girder 25, F semi-girder 26, G semi-girder 27 are identical with H semi-girder 28 structures, and brachium has 0.5～5mm, and arm is wide 0.1～1mm.In the present invention, acceleration sensitive spare 2 structures are used the cantilever beam structure form, under the acceleration effect of vertical direction, A semi-girder 21, B semi-girder 22, C semi-girder 23, D semi-girder 24, E semi-girder 25, F semi-girder 26, G semi-girder 27 and H semi-girder 28 make responsive mass 202 to be subjected to displacement along the acceleration direction.Responsive mass 202 is on the vertical direction of micro-optic catoptron, and is parallel with the cavity bottom panel, makes incident laser vertical substantially with responsive mass surface.In the present invention, the structure of acceleration sensitive spare 2 can have various ways.Semi-girder on its substrate 201 can be a pair of, two pairs or four pairs, semi-girder can straight beam, have the beam of bending (arch) up and down or the beam of other forms (as waveform).
Shown in figure SA, B collimating apparatus 32 can be made up of globe lens 321, A connector 322 in the present invention, and globe lens 321 is installed in the square groove 323 of A connector 322 upper surfaces.A connector 322 is used for fulcrum ball lens 321 on the one hand, is used on the other hand and 304 fixed installations of cavity bottom panel, thereby determines the particular location of globe lens 321 in cavity 303.
Shown in Fig. 5 B, B collimating apparatus 32 can be made up of gradual index lens 324, B connector in the present invention, and gradual index lens 324 is installed in the V-shaped groove 326 of B connector upper surface.B connector 325 is used to support gradual index lens 324 on the one hand, is used on the other hand and 304 fixed installations of cavity bottom panel, thereby determines the particular location of gradual index lens 324 in cavity 303.
Described accelerometer adopts based on the optical mode of laser feedback interference technology and realizes detecting.The path that laser was walked when shown in Figure 7 was accelerometer work, in following detection components 3, the laser radiation of being sent by B semiconductor laser 33 is to B beam collimation device 32, B beam collimation device 32 is collimated into parallel light emergence with diverging light, directional light is reflected when shining on the B micro-optic catoptron 31, the reflected light vertical irradiation is to the lower surface of responsive mass 202, after responsive mass 202 lower surfaces reflection or scattering, part light returns along original optical path, through B micro-optic catoptron 31, B beam collimation device 32 enters B semiconductor laser 33, the feedback interference effect takes place in B semiconductor laser 33, and the output intensity of B semiconductor laser 33 is modulated.B photodetector 35 detects the modulated laser intensity of B semiconductor laser 33 rear end outgoing, and light intensity signal is changed into electric signal output.The signal of B photodetector 35 outputs is as one road input signal of signal deteching circuit.
In last detection components 1, what laser was walked is similar light path, and just reflection or scattering take place the upper surface at responsive mass 202, and the signal of A photodetector 15 outputs is as another road input signal of signal deteching circuit.
In the present invention owing to adopt difference structure, the signal that two photodetectors (being installed in respectively in detection components 1 and the following detection components 3) are exported to signal deteching circuit is a differential wave, outside signal detection system can receive two paths of signals simultaneously, and signal carried out analyzing and processing, judge the motion conditions of responsive mass 202, and then the acceleration situation of the exterior object of the accelerometer that obtains being connected, as the output of accelerometer.
The measurement sensitivity of the accelerometer of the present invention's design can be divided into two parts, and a part is the sensitivity of acceleration sensitive structure, is about to the sensitivity that extraneous acceleration is converted into the displacement of responsive mass; Another part is the sensitivity of optical detection, i.e. optical detection system is converted into the sensitivity that the laser instrument light intensity changes with responsive mass displacement.The sensitivity of acceleration sensitive structure has adopted the optimized Structure Design of making responsive mass and semi-girder on same substrate that it is improved; The sensitivity that the sensitivity of optical detection and interferometric method detect is suitable, but this kind method structure simple more, compact, reduce processing, adjust and the requirement of encapsulation, utilize the micro photo-electro-mechanical processing technology, can realize mass production.
Claims (9)
1, a kind of gleam dynamoelectric acceleration gauge based on laser feedback interference, it is characterized in that: described accelerometer is made up of last detection components (1), acceleration sensitive spare (2), following detection components (3), and it is middle with following detection components (3) that acceleration sensitive spare (2) is positioned over detection components (1); And last detection components (1) is identical with following detection components (3) structure;
Described acceleration sensitive spare (2) is to go up at a substrate (201) to be formed with responsive mass (202) in heart position therein by little processing lithographic technique, is formed with A semi-girder (21), B semi-girder (22), C semi-girder (23), D semi-girder (24), E semi-girder (25), F semi-girder (26), G semi-girder (27), H semi-girder (28) around responsive mass (202) respectively; A semi-girder (21), B semi-girder (22), C semi-girder (23) are identical with D semi-girder (24) structure, and brachium has 0.5～5mm, and arm is wide 0.1～1mm; E semi-girder (25), F semi-girder (26), G semi-girder (27) are identical with H semi-girder (28) structure, and brachium has 0.5～5mm, and arm is wide 0.1～1mm;
The described detection components (1) that goes up includes an A matrix (101), A micro-optic catoptron (11), A beam collimation device (12), A semiconductor laser (13), a-signal testing circuit plate (14), A detector (15), offer A cavity (103) in the center of A matrix (101), on the cavity bottom panel (104) of A cavity (103), A micro-optic catoptron (11) is installed from left to right, a-signal testing circuit plate (14), a-signal testing circuit plate (14) is gone up the signal deteching circuit of forming except electronic devices and components, A beam collimation device (12) also is installed from left to right, A semiconductor laser (13), A photodetector (15), and A collimating apparatus (12), A semiconductor laser (13) and A photodetector (15) are installed in the central axes on the a-signal testing circuit plate (14);
Described detection components (3) down includes a B matrix (301), B micro-optic catoptron (31), B beam collimation device (32), B semiconductor laser (33), B signal deteching circuit plate (34), B detector (35), offer B cavity (303) in the center of B matrix (301), on the cavity bottom panel (304) of B cavity (303), B micro-optic catoptron (31) is installed from left to right, B signal deteching circuit plate (34), B signal deteching circuit plate (34) is gone up the signal deteching circuit of forming except electronic devices and components, B beam collimation device (32) also is installed from left to right, B semiconductor laser (33), B photodetector (35), and B collimating apparatus (32), B semiconductor laser (33) and B photodetector (35) are installed in the central axes on the B signal deteching circuit plate (34); Be provided with B interface (302) in a side of B matrix (301).
2, gleam dynamoelectric acceleration gauge according to claim 1, it is characterized in that: the front end of A micro-optic catoptron (11) and A beam collimation device (12) is at a distance of d=0.5～10mm, and the central axial direction of the surface normal of A micro-optic catoptron (11) and A beam collimation device (12) is 45.
3, gleam dynamoelectric acceleration gauge according to claim 1, it is characterized in that: the front end of B micro-optic catoptron (31) and B beam collimation device (32) is at a distance of d=0.5～10mm, and the central axial direction of the surface normal of B micro-optic catoptron (31) and B beam collimation device (32) is 45.
4, gleam dynamoelectric acceleration gauge according to claim 1, it is characterized in that: B micro-optic catoptron (31) includes B minute surface (310), C connector (311), D connector (312), A hinge (313), B hinge (314), B minute surface (310) adopts surface processing technique processing on D connector (312), D connector (312) is by A hinge (313), B hinge (314) is connected with C connector (311), C connector (311) is by A buckle (315), B buckle (316) is installed on the cavity bottom panel (304), and the bottom of D connector (312) is by C buckle (317), D buckle (318), E buckle (319) is installed on the cavity bottom panel (304).Adopt A hinge (313), B hinge (314) stay bolt to play D connector (312), make B minute surface (310) and cavity bottom panel (304) form 30 °～45.
5, gleam dynamoelectric acceleration gauge according to claim 1 is characterized in that: A beam collimation device (12), B beam collimation device (32) are gradual index lens, C lens, globe lens or Fresnel Lenses.
6, gleam dynamoelectric acceleration gauge according to claim 1 is characterized in that: A beam collimation device (12), B beam collimation device (32) are to adopt assembling or bonding techniques to be integrated on A connector 322, the B connector 325.
7, gleam dynamoelectric acceleration gauge according to claim 1 is characterized in that: A semiconductor laser (13), B semiconductor laser (33) are the semiconductor lasers of FP type, DFB type or DBR type.
8, gleam dynamoelectric acceleration gauge according to claim 1, it is characterized in that: the position-sensing unit of accelerometer (2) structure is used the cantilever beam structure form, under the acceleration effect of vertical direction, A semi-girder (21), B semi-girder (22), C semi-girder (23), D semi-girder (24), E semi-girder (25), F semi-girder (26), G semi-girder (27) and H semi-girder (28) make responsive mass (202) be subjected to displacement along the acceleration direction.
9, gleam dynamoelectric acceleration gauge according to claim 1 is characterized in that: the semi-girder on the substrate (201) of the position-sensing unit of accelerometer (2) be a pair of, two pairs or four pairs, semi-girder is straight beam, have the beam or the corrugated beam of bending up and down.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2008101027379A CN100529761C (en) | 2008-03-26 | 2008-03-26 | Gleam dynamoelectric acceleration gauge based on laser feedback interference |
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| CNB2008101027379A CN100529761C (en) | 2008-03-26 | 2008-03-26 | Gleam dynamoelectric acceleration gauge based on laser feedback interference |
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| CN100529761C CN100529761C (en) | 2009-08-19 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411065A (en) * | 2011-12-09 | 2012-04-11 | 安徽大学 | Laser self-mixing acceleration sensor |
| CN105403384A (en) * | 2015-11-03 | 2016-03-16 | 中国科学院长春光学精密机械与物理研究所 | Mirror face seeing measurement device |
| CN108279320A (en) * | 2018-02-09 | 2018-07-13 | 中北大学 | One kind is based on Fano resonance nano optical wave guide accelerometer preparation methods |
| CN109682992A (en) * | 2019-01-08 | 2019-04-26 | 中山大学 | A kind of high-precision laser interference accelerometer |
| CN111141930A (en) * | 2018-02-20 | 2020-05-12 | 通用电气公司 | MEMS accelerometer anti-reflection and reflector coatings |
| CN111650401A (en) * | 2020-06-03 | 2020-09-11 | 西安交通大学 | Coplanar-mounted metal-based integrated resonant accelerometer |
-
2008
- 2008-03-26 CN CNB2008101027379A patent/CN100529761C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411065A (en) * | 2011-12-09 | 2012-04-11 | 安徽大学 | Laser self-mixing acceleration sensor |
| CN105403384A (en) * | 2015-11-03 | 2016-03-16 | 中国科学院长春光学精密机械与物理研究所 | Mirror face seeing measurement device |
| CN108279320A (en) * | 2018-02-09 | 2018-07-13 | 中北大学 | One kind is based on Fano resonance nano optical wave guide accelerometer preparation methods |
| CN108279320B (en) * | 2018-02-09 | 2020-12-04 | 中北大学 | Preparation method of nano optical waveguide accelerometer based on Fano resonance |
| CN111141930A (en) * | 2018-02-20 | 2020-05-12 | 通用电气公司 | MEMS accelerometer anti-reflection and reflector coatings |
| CN111141930B (en) * | 2018-02-20 | 2022-07-05 | 通用电气公司 | MEMS accelerometer anti-reflection and reflector coatings |
| CN109682992A (en) * | 2019-01-08 | 2019-04-26 | 中山大学 | A kind of high-precision laser interference accelerometer |
| CN111650401A (en) * | 2020-06-03 | 2020-09-11 | 西安交通大学 | Coplanar-mounted metal-based integrated resonant accelerometer |
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| Publication number | Publication date |
|---|---|
| CN100529761C (en) | 2009-08-19 |
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