CN210294038U - Line domain frequency domain optical coherence tomography detection and longitudinal coordinate calibration device - Google Patents
Line domain frequency domain optical coherence tomography detection and longitudinal coordinate calibration device Download PDFInfo
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- CN210294038U CN210294038U CN201921111330.2U CN201921111330U CN210294038U CN 210294038 U CN210294038 U CN 210294038U CN 201921111330 U CN201921111330 U CN 201921111330U CN 210294038 U CN210294038 U CN 210294038U
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Abstract
The utility model relates to a line field frequency domain optical coherence tomography detects and vertical coordinate calibration device, line field frequency domain optical coherence tomography device includes tungsten halogen lamp light source module, michelson interferometer module, line spectrum appearance module and computer, tungsten halogen lamp light source module includes tungsten halogen lamp light source and convex lens, michelson interferometer module includes first post lens, spectroscope and reference mirror, line spectrum appearance module includes second post lens, speculum, reflection grating, third post lens and area array camera, computer and area array camera electric connection; the longitudinal coordinate calibration device comprises an adjustable slit structure and a slit displacement platform used for driving the adjustable slit structure to displace, wherein the adjustable slit structure is arranged on a detection light path between the spectroscope and a sample to be detected, and the width of the slit is adjustable. The device can carry out line domain detection on a sample to be detected, can accurately calibrate the longitudinal coordinate of the device, and determines the longitudinal coordinate of line domain frequency domain optical coherence tomography detection.
Description
Technical Field
The utility model relates to an optical coherence tomography technical field, concretely relates to coherent chromatography of line domain frequency domain optical coherence tomography detects and vertical coordinate calibration device.
Background
Optical Coherence Tomography (OCT for short) uses low Coherence interference as a principle, a michelson interferometer as a core device, and obtains information of a sample surface or internal microstructure by analyzing interference signals of backscattered or reflected light and reference light of a detected sample, which is a novel Optical nondestructive detection technology. The linear domain frequency domain optical coherence tomography system is developed from a traditional single-point frequency domain optical coherence tomography system, a light path structure uses a cylindrical lens to focus a light beam into a line as a detection focal line, a spectrometer used by the system is a line spectrometer, and an area array camera is used for collecting interference spectra of a plurality of points on a linear domain. Generally, a focal line comprises hundreds of detection points, the system can finish multi-point chromatography detection on the focal line by one-time acquisition, and compared with single-point detection, the imaging speed of a line-domain system is further improved. In the line domain frequency domain optical coherence tomography detection, structural information in the depth direction of a detection sample is obtained by performing Fourier transform on a two-dimensional interference spectrum collected by an area array camera, each line of pixel points of the area array camera corresponds to a detection point in actual detection, actual detection points represented by longitudinal pixel points of the area array camera of the system are different in size, and the actual detection points represented by the longitudinal pixel points of the frequency domain optical coherence tomography detection are determined by calibrating longitudinal coordinates of the system.
Disclosure of Invention
An object of the utility model is to provide a coherent chromatography of line domain frequency domain optics detects and vertical coordinate calibration device, and the device can carry out line domain detection to the sample that awaits measuring, and can the vertical coordinate of the coherent chromatography device of line domain frequency domain optics carry out the accuracy and mark, confirms the vertical coordinate that the coherent chromatography of line domain frequency domain optics detected.
In order to achieve the above purpose, the technical scheme of the utility model is that: a line domain frequency domain optical coherence tomography detection and longitudinal coordinate calibration device comprises a line domain frequency domain optical coherence tomography device and a longitudinal coordinate calibration device, wherein the line domain frequency domain optical coherence tomography device comprises a tungsten halogen lamp light source module, a Michelson interferometer module, a line spectrometer module and a computer, the tungsten halogen lamp light source module comprises a tungsten halogen lamp light source (1) and a convex lens (2), light emitted by the tungsten halogen lamp light source (1) is collimated into parallel light beams through the convex lens (2), the Michelson interferometer module comprises a first cylindrical lens (3), a spectroscope (4) and a reference mirror (5), the first cylindrical lens (3) focuses the parallel light beams into a focal line, the spectroscope (4) splits the light beams into two light beams with equal intensity, the light beams are converged on the reference mirror (5) as reference light, and the other light beams are converged on the surface of a sample to be detected (8) as detection light, two beams of light are reflected and then coincide to generate interference, the line spectrometer module comprises a second cylindrical lens (10), a reflector (11), a reflective grating (12), a third cylindrical lens (13) and an area array camera (14), the interference light beams are converged by the second cylindrical lens (10) and reflected by the reflector (11) and then enter the reflective grating (12), the incident light is spatially split by the reflective grating (12) according to wavelength and then converged into interference spectral lines by the cylindrical lens, a two-dimensional interference fringe image signal is collected by the area array camera, and the computer is connected with the area array camera to receive, store and process the fringe image signal transmitted by the area array camera; the longitudinal coordinate calibration device comprises an adjustable slit structure (9) and a slit displacement platform for driving the adjustable slit structure to displace, wherein the adjustable slit structure (9) is arranged on a detection light path between the spectroscope (4) and a sample (8) to be detected, and the width of the slit is adjustable.
Further, the slit displacement platform comprises a transverse linear displacement mechanism (7) and a longitudinal linear displacement mechanism (6), the adjustable slit structure is mounted on the longitudinal linear displacement mechanism (6) to perform longitudinal displacement under the driving of the adjustable slit structure, and the longitudinal linear displacement mechanism (6) is arranged on the transverse linear displacement mechanism (7) to perform transverse displacement under the driving of the longitudinal linear displacement mechanism.
Furthermore, the transverse linear displacement mechanism (7) and the longitudinal linear displacement mechanism (6) are screw-nut pair mechanisms which are respectively driven by a stepping motor to work.
Furthermore, the longitudinal coordinate calibration device is a detachable structure, and after the calibration of the longitudinal coordinate of the device is completed, the adjustable slit structure and the slit displacement platform of the longitudinal coordinate calibration device can be detached.
The device can carry out tomography on the internal structure of a sample to be detected or carry out line domain detection on vibration, the detection efficiency is greatly improved, and the device can also realize calibration on the longitudinal coordinate of the line domain frequency domain optical coherence tomography device, so that the size of an actual detection point represented by a longitudinal pixel point of the frequency domain optical coherence tomography device is determined, the longitudinal coordinate detected by the line domain frequency domain optical coherence tomography device is determined, and the device has strong practicability and wide application prospect.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of the vertical coordinate calibration apparatus in the embodiment of the present invention.
In the figure, 1-tungsten halogen lamp light source, 2-convex lens, 3-first cylindrical lens, 4-spectroscope, 5-reference mirror, 6-longitudinal linear displacement mechanism, 7-transverse linear displacement mechanism, 8-sample to be measured, 9-adjustable slit structure, 10-second cylindrical lens, 11-reflector, 12-reflective grating, 13-third cylindrical lens and 14-area array camera.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The utility model provides a coherent chromatography of line domain frequency domain optics detects and vertical coordinate calibration device, as shown in fig. 1, including coherent chromatography of line domain frequency domain optics device and vertical coordinate calibration device.
The linear domain frequency domain optical coherence tomography device comprises a tungsten halogen lamp light source module, a Michelson interferometer module, a linear spectrometer module and a computer.
The tungsten halogen lamp light source module comprises a tungsten halogen lamp light source (1) and a convex lens (2), wherein light emitted by the tungsten halogen lamp light source (1) is collimated into parallel beams through the convex lens (2) and is used for frequency domain light coherence tomography detection.
The Michelson interferometer module comprises a first cylindrical lens (3), a spectroscope (4) and a reference mirror (5), wherein the first cylindrical lens (3) focuses parallel light beams into a focal line, the spectroscope (4) splits the light beams into two light beams with equal intensity, one light beam is used as reference light to be converged on the reference mirror (5), the other light beam is used as detection light to be converged on the surface of a sample (8) to be detected, and the two light beams are superposed after being reflected to generate interference.
The line spectrum instrument module comprises a second cylindrical lens (10), a reflector (11), a reflective grating (12), a third cylindrical lens (13) and an area array high-speed COMS camera (14), interference light beams are converged by the second cylindrical lens (10) and reflected by the reflector (11) to be incident on the reflective grating (12), the incident light beams are spatially split by the reflective grating (12) according to wavelength and then converged into interference spectral lines by the cylindrical lenses, and two-dimensional interference fringe image signals are acquired by the area array high-speed COMS camera.
The computer is electrically connected with the area array high-speed COMS camera and is used for receiving, storing and processing a two-dimensional interference fringe image signal transmitted by the area array high-speed COMS camera, carrying out Fourier transform on the pixel point intensity value of each line of the two-dimensional interference fringe image signal to extract the pixel point intensity change frequency of each line, and multiplying the system distance resolution determined after wavelength calibration to obtain line domain vibration information and structural information of a sample to be detected.
As shown in FIG. 2, the longitudinal coordinate calibration device comprises an adjustable slit structure (9) and a slit displacement platform. The adjustable slit structure (9) is arranged on the detection light path between the spectroscope (4) and the sample (8) to be detected and used for adjusting the detection light irradiated on the sample to be detected through the slit, and the width of the slit is adjustable. The slit displacement platform is used for driving the adjustable slit structure to perform transverse and longitudinal displacement and comprises a transverse linear displacement mechanism (7) and a longitudinal linear displacement mechanism (6), the adjustable slit structure is installed on the longitudinal linear displacement mechanism (6) to perform longitudinal displacement under the driving of the adjustable slit structure, and the longitudinal linear displacement mechanism (6) is arranged on the transverse linear displacement mechanism (7) to perform transverse displacement under the driving of the longitudinal linear displacement mechanism, so that the transverse and longitudinal displacement of the adjustable slit structure is realized. The transverse linear displacement mechanism (7) and the longitudinal linear displacement mechanism (6) are screw-nut pair mechanisms which are respectively driven by a stepping motor. The smaller the step distance is, the higher the calibration precision of the longitudinal coordinate of the line domain frequency domain optical coherence tomography device is. The longitudinal coordinate calibration device is a detachable structure, and after the calibration of the longitudinal coordinate of the device is completed, the adjustable slit structure and the slit displacement platform of the longitudinal coordinate calibration device can be detached without influencing the sample structure detection and the vibration detection of the device.
In the online domain frequency domain optical coherence tomography detection, an image processing module performs Fourier transform on a two-dimensional interference spectrum acquired by an area array camera to obtain structural information of a sample to be detected in the depth direction, and each line of pixel points of the area array camera corresponds to a detection point in actual detection.
The constructed line domain frequency domain optical coherence tomography device has different light path structures and different space positions of device components, and actual detection points represented by longitudinal pixel points of the device area array camera have different sizes, and the actual detection points represented by the longitudinal pixel points are determined through longitudinal coordinate calibration.
The device is calibrated by a longitudinal coordinate calibration device, namely the corresponding relation between a two-dimensional spectrum longitudinal pixel point acquired by an area-array camera and an actual detection point is determined, the size of the actual detection point represented by the longitudinal pixel point is determined, and the longitudinal coordinate detected by the device is determined.
In the process of calibrating the longitudinal coordinate, the detection light in the detection light path is filtered through the adjustable slit structure, and the width of the slit is fixedThen, an interference spectrum with a fixed length is formed on the area-array camera. Driving longitudinal displacement of adjustable slit structure by slit displacement platformlMaking the interference spectrum on the area-array camera move along the longitudinal direction of the pixel points of the area-array cameranIndividual pixel point, the actual length of the single pixel point in the longitudinal direction of the deviced=l/nRepeating the above processNAnd averaging the secondary measurement to reduce the influence of measurement error and operation error:
wherein
Is the average length represented by a single pixel point in the longitudinal direction of the device,Nin order to measure the number of times,d i is as followsiThe actual length represented by a single pixel point in the longitudinal direction of the device for secondary measurement.
Above is the utility model discloses a preferred embodiment, all rely on the utility model discloses the change that technical scheme made, produced functional action does not surpass the utility model discloses during technical scheme's scope, all belong to the utility model discloses a protection scope.
Claims (4)
1. The device is characterized by comprising a linear domain frequency domain optical coherence tomography device and a longitudinal coordinate calibration device, wherein the linear domain frequency domain optical coherence tomography device comprises a tungsten halogen lamp light source module, a Michelson interferometer module, a linear spectrometer module and a computer, the tungsten halogen lamp light source module comprises a tungsten halogen lamp light source (1) and a convex lens (2), light emitted by the tungsten halogen lamp light source (1) is collimated into parallel light beams through the convex lens (2), the Michelson interferometer module comprises a first cylindrical lens (3), a spectroscope (4) and a reference mirror (5), the first cylindrical lens (3) focuses the parallel light beams into focal lines, the spectroscope (4) splits the light beams into two light beams with equal intensity, one light beam is converged on the reference mirror (5) as reference light, the other light beam is converged on the surface of a sample to be detected (8) as detection light, two beams of light are reflected and then coincide to generate interference, the line spectrometer module comprises a second cylindrical lens (10), a reflector (11), a reflective grating (12), a third cylindrical lens (13) and an area array camera (14), the interference light beams are converged by the second cylindrical lens (10) and reflected by the reflector (11) and then enter the reflective grating (12), the incident light is spatially split by the reflective grating (12) according to wavelength and then converged into interference spectral lines by the cylindrical lens, a two-dimensional interference fringe image signal is collected by the area array camera, and the computer is connected with the area array camera to receive, store and process the fringe image signal transmitted by the area array camera; the longitudinal coordinate calibration device comprises an adjustable slit structure (9) and a slit displacement platform for driving the adjustable slit structure to displace, wherein the adjustable slit structure (9) is arranged on a detection light path between the spectroscope (4) and a sample (8) to be detected, and the width of the slit is adjustable.
2. The device for detecting line-domain frequency-domain optical coherence tomography and calibrating longitudinal coordinates of claim 1, wherein the slit displacement platform comprises a transverse linear displacement mechanism (7) and a longitudinal linear displacement mechanism (6), the adjustable slit structure is mounted on the longitudinal linear displacement mechanism (6) to perform longitudinal displacement under the driving of the longitudinal linear displacement mechanism, and the longitudinal linear displacement mechanism (6) is mounted on the transverse linear displacement mechanism (7) to perform transverse displacement under the driving of the longitudinal linear displacement mechanism.
3. The device for the detection of the line-domain frequency-domain optical coherence tomography and the calibration of the longitudinal coordinate as claimed in claim 2, wherein the transverse linear displacement mechanism (7) and the longitudinal linear displacement mechanism (6) are both lead screw nut pair mechanisms, and are respectively driven by a stepping motor to work.
4. The apparatus according to claim 1, wherein the longitudinal coordinate calibration apparatus is a detachable structure, and after the apparatus longitudinal coordinate calibration is completed, the slit structure and the slit displacement platform of the longitudinal coordinate calibration apparatus are detachable.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110243760A (en) * | 2019-07-16 | 2019-09-17 | 福州大学 | Line domain domain optical coherence tomographic system and its longitudinal coordinate scaling method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110243760A (en) * | 2019-07-16 | 2019-09-17 | 福州大学 | Line domain domain optical coherence tomographic system and its longitudinal coordinate scaling method |
| CN110243760B (en) * | 2019-07-16 | 2024-04-16 | 福州大学 | Line domain frequency domain optical coherence tomography system and longitudinal coordinate calibration method thereof |
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