CN104634280B - The measuring method of general level turntable absolute angle and the anglec of rotation - Google Patents
The measuring method of general level turntable absolute angle and the anglec of rotation Download PDFInfo
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- CN104634280B CN104634280B CN201510054221.1A CN201510054221A CN104634280B CN 104634280 B CN104634280 B CN 104634280B CN 201510054221 A CN201510054221 A CN 201510054221A CN 104634280 B CN104634280 B CN 104634280B
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Abstract
A kind of measuring method of general level turntable absolute angle and the anglec of rotation, measuring system include wideband light source, aperture diaphragm, spectroscope, reflective diffraction gratings, level crossing to, condenser lens, fiber spectrometer and computing module.Methods described includes：Wideband light source output beam is through spectroscope and level crossing to being returned by optical grating diffraction；Diffraction light be split mirror reflection sampling, after lens focus enter fiber spectrometer；Fiber spectrometer gathers spectral information；Computer determines incidence angle of the incident beam on grating, i.e. absolute angle between incident beam and reflective diffraction gratings according to the spectrum peak wavelength of collection；General level turntable initial angle is determined, general level turntable is rotated, the anglec of rotation and absolute angle is determined according to the change of peak wavelength.The present invention is especially suitable for the fine adjustment and measurement of absolute angle and the anglec of rotation in industry and scientific research, with simple to operate, angular surveying scope is wide, the advantages of range accuracy is high.
Description
Technical field
The present invention relates to field of measuring technique, the survey of more particularly to a kind of general level turntable absolute angle and the anglec of rotation
Amount method.The present invention has simple to operate, and angular surveying scope is wide, the advantages of range accuracy is high.
Background technology
With continuing to develop for manufacturing technology, the indexing accuracy of extra accuracy rotary table can be less than, but this revolution
Workbench cost is higher, and difficulty of processing is also than larger；And general horizontal revolving stage cost is relatively low, but indexing accuracy only has, therefore
The measuring method of a kind of high-precision general level turntable absolute angle and the anglec of rotation is needed badly, for low precision general level
Turntable absolute angle and the anglec of rotation are measured, and them is had higher operating accuracy.
In the calibration technique of existing mechanical angle, Renishaw companies of Britain are by the low-angle annex of laser interferometer
Combined with end-toothed disc etc., the detection for rotary table positional precision.But in actual use, because the rotation of end-toothed disc is needed
Want one it is reciprocal above and below motion, measurement laser beam is difficult alignment.The scientific research personnel of Beijing Information Science ＆ Technology University, which proposes, to be used
Photoelectric auto-collimator measure rotary table positioning precision method, make NC rotary table together with angular optical polygon around
NC rotary table coaxial rotating, the pixel distance collected is substituted into enter photoelectric auto-collimator by two-frequency laser interferometer
Rower is fixed and obtains angle calibration formula, so as to calculate the error of the anglec of rotation.Double-frequency interference is used during this method demarcation
Instrument, laser interferometer side angle scope is small, requires harsh to use environment, it is impossible to be widely used in turntable angular surveying.
In high-precision scientific experiment especially in compressor reducer of the grating to composition, have to beam incident angle degree it is very high will
Ask, existing method is that beam incident angle is determined using protractor, operation is excessively simple, and application condition is big.
Accordingly, it would be desirable to the measurement side of a kind of high general level turntable absolute angle of simple to operate, precision and the anglec of rotation
Method.
The content of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the invention provides a kind of general level turntable absolute angle and rotation
The measuring method of angle.This method is particularly suitable for use in the fine adjustment and survey of absolute angle and the anglec of rotation in industry and scientific research
Amount, with simple to operate, angular surveying scope is wide, the advantages of range accuracy is high.
The technical solution of the present invention is as follows：
A kind of measuring method of general level turntable absolute angle and the anglec of rotation, it is characterised in that this method includes as follows
Step：
1) optical path is set up：The optical path include wideband light source, along the wideband light source laser outbound course successively
It is aperture diaphragm, attenuator, spectroscope, the first speculum, the second speculum, pyramid, the reflection light direction through described pyramid
It is the second speculum, the first speculum, spectroscope, condenser lens, probe, optical fiber, fiber spectrometer, described optical fiber light successively
The output end of spectrometer is connected with the input of computer, and wideband light source output light is recorded using described fiber spectrometer measurement
The spectral intensity that spectrum, the first speculum of fine setting and the second speculum measure described fiber spectrometer is maximum；
2) pyramid is removed, rotation general level turntable is to zero graduation position, and number of revolutions n is designated as zero, i.e. n=0, now led to
With horizontal revolving stage initial angle θ0=0, reflective diffraction gratings are placed on described general level turntable, and it is described anti-
Penetrate table top of the grating fringe perpendicular to general level turntable of formula diffraction grating, the described reflective diffraction gratings of adjustment are with respect to the
The angular pose of two-mirror output light path is until described fiber spectrometer the is measured sharp light for meeting Littrow angle condition
Spectrum signal；
3) initial angle of described reflective diffraction gratings grating is determined：Computer utilizes following grating equation
Calculate now incidence angle of the second speculum output light path relative to described reflective diffraction gratings：
Wherein, d is grating constant, λ1For peak wavelength,For Littrow angle, i.e., now reflective diffraction gratings are relative
The incidence angle of second speculum output light path；
4) measurement of absolute angle value is calculated：The number of revolutions of the described general level turntable of order is n=n+1, n-th rotation
At described general level turntable to n-th of non-zero graduation, corresponding scale value is αn, described fiber spectrometer will measure separately
One peak wavelength λ2, computer calculates the anglec of rotation Δ θ of the n-th of general level turntable by equation belown：
Δθn=arcsin (λ2/2d)-arcsin(λ1/2d)
The anglec of rotation of accumulation
The corresponding measurement of absolute angle value θ of n-th of described general level turntable non-zero graduationnFor initial angle θ0With
The anglec of rotation Δ θ sums of accumulation；
5) by step 4) the corresponding measurement of absolute angle value θ of obtain n-th non-zero graduationnWith the of general level turntable
N scale value αnCompare, obtain described n-th of scale value α of general level turntablenWith measurement of absolute angle value θnError；
6) peak wavelength for making described fiber spectrometer is λ1, when the spectral signal that described fiber spectrometer is measured is leaned on
During one lateral edges of nearly described wideband light source spectral region, then the first speculum or the second speculum are adjusted, until optical fiber light
The spectral signal that spectrometer is measured records described fiber spectrometer again close to another lateral edges of wideband light source spectral region
Peak wavelength is λ1；
7) return to step 4), up to the measurement of 360 degree of absolute angles of the general level turntable described in completion；
8) using described general level turntable scale value as abscissa, corresponding measurement of absolute angle value is ordinate, is made
The anglec of rotation Δ θ gone out between experiment curv, described general level turntable any two scalearbEqual to corresponding vertical seat
The difference of mark.
Compared with prior art, the beneficial effects of the invention are as follows laser interferometer complex operation is solved, to use environment
It is required that harsh deficiency, while overcoming the not high shortcoming of protractor precision in high-precision scientific experiment.The principle of the invention is simple,
It is easily achieved, the measurement of general level turntable absolute angle and the anglec of rotation can be effectively realized, measurement error is less than 1.3 ",
And error will not constantly add up with the rotation of general level turntable.If further improving the resolution ratio of spectrometer or using wavelength
Shorter wideband light source, then measurement accuracy can further improve, have in industrial production and high-precision scientific experiment it is certain should
With value.
Brief description of the drawings
Fig. 1 is the schematic diagram that measurement apparatus relative position and angle are determined using pyramid.
Fig. 2 is the structure chart of general level turntable absolute angle and rotating angle measurement apparatus.
Fig. 3 shows principle of the level crossing to increase light beam incidence angle on grating.
Fig. 4 shows principle of the level crossing to reduction light beam incidence angle on grating.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings, and wherein identical label represents identical part all the time, below
These embodiments are described by referring to accompanying drawing to explain the present invention.
The measuring method of general level turntable absolute angle and the anglec of rotation of the present invention, comprises the following steps：
1) Fig. 1 is the schematic diagram that measurement apparatus relative position and angle are determined using pyramid：The optical path includes broadband
Light source 1, along the laser outbound course of the wideband light source 1 be successively aperture diaphragm 2, attenuator 3, spectroscope 4, the first speculum 5,
Second speculum 6, pyramid 7, the reflection light direction through described pyramid 7 are the second speculum 6, the first speculum 5, light splitting successively
Mirror 4, condenser lens 10, probe 11, optical fiber 12, fiber spectrometer 13, the output end and computer of described fiber spectrometer 13
14 input is connected, and the spectrum of the output light of wideband light source 1 is recorded using the described measurement of fiber spectrometer 13, and fine setting first is anti-
Penetrate the spectral intensity maximum that the speculum 6 of mirror 5 and second measures described fiber spectrometer 13；
2) as shown in Fig. 2 removing pyramid 7, rotation general level turntable is to zero graduation position, and number of revolutions n is designated as zero, i.e.,
N=0, now general level turntable initial angle θ0=0, reflective diffraction gratings 8 are placed on to described general level turntable 9
On, and described reflective diffraction gratings 8 grating fringe perpendicular to the table top of general level turntable 9, the described reflection of adjustment
Formula diffraction grating 8 with respect to the second speculum 6 output light path angular pose until that described fiber spectrometer 13 is measured is sharp
Meet the spectral signal of Littrow angle condition；
3) initial angle of the described grating of reflective diffraction gratings 8 is determined：Computer 14 utilizes following grating equation
Calculate now incidence angle of the output light path of the second speculum 6 relative to described reflective diffraction gratings 8：
Wherein, d is grating constant, λ1For peak wavelength,For Littrow angle, i.e., now reflective diffraction gratings 8 are relative
The incidence angle of the output light path of second speculum 6；
4) measurement of absolute angle value is calculated：The number of revolutions of the described general level turntable 9 of order is n=n+1, n-th rotation
At the non-zero graduation of general level turntable 9 to n-th described in turning, corresponding scale value is αn, described fiber spectrometer 13 will
Measure another peak wavelength λ2, computer 14 calculates the anglec of rotation Δ of the n-th of general level turntable 9 by equation below
θn：
Δθn=arcsin (λ2/2d)-arcsin(λ1/2d)
The anglec of rotation of accumulation
The corresponding measurement of absolute angle value θ of n-th of described general level turntable 9 non-zero graduationnFor initial angle θ0With
The anglec of rotation Δ θ sums of accumulation；
5) by step 4) the corresponding measurement of absolute angle value θ of obtain n-th non-zero graduationnWith general level turntable 9
N-th of scale value αnCompare, obtain described n-th of scale value α of general level turntable 9nWith measurement of absolute angle value θnMistake
Difference；
6) peak wavelength for making described fiber spectrometer 13 is λ1, the spectrum letter measured when described fiber spectrometer 13
Number close to the described spectral region of wideband light source 1 a lateral edges when, then adjust the first speculum 5 or the second speculum 6, until
The spectral signal that fiber spectrometer 13 is measured records described light again close to another lateral edges of the spectral region of wideband light source 1
The peak wavelength of optical fiber spectrograph 13 is λ1；
7) return to step 4), up to the measurement of 360 degree of absolute angles of the general level turntable 9 described in completion；
8) using the described scale value of general level turntable 9 as abscissa, corresponding measurement of absolute angle value is ordinate, is made
The anglec of rotation Δ θ gone out between experiment curv, the described any two scale of general level turntable 9arbEqual to corresponding vertical seat
The difference of mark.
9) in order to improve measurement accuracy, the high resolution spectrometer that U.S. Ocean Optics can be used to provide
(HR4000), the minimum 0.02nm of wavelength measurement precision.
The present invention can be mainly used in the following aspects：
1. the measurement of the general level turntable anglec of rotation and absolute angle；
2. the correction and measurement of the anglec of rotation and absolute angle in high-precision scientific experiment.
This method is particularly suitable for use in the fine adjustment and measurement of absolute angle and the anglec of rotation in industry and scientific research, with behaviour
Make simple, angular surveying scope is wide, the advantages of range accuracy is high.
Although the exemplary embodiment with reference to the present invention specifically describes and shows the present invention, this area it is general
It is logical it is to be understood by the skilled artisans that in the case where not departing from the spirit and scope of the present invention being defined by the claims, can be right
It carries out the various changes of form and details.
Claims (1)
1. the measuring method of a kind of general level turntable absolute angle and the anglec of rotation, it is characterised in that this method includes following step
Suddenly：
1) optical path is set up：The optical path include wideband light source (1), along the wideband light source (1) laser outbound course according to
Secondary is aperture diaphragm (2), attenuator (3), spectroscope (4), the first speculum (5), the second speculum (6), pyramid (7), through institute
The reflection light direction for the pyramid (7) stated is the second speculum (6), the first speculum (5), spectroscope (4), condenser lens successively
(10), probe (11), optical fiber (12), fiber spectrometer (13), the output end and computer of described fiber spectrometer (13)
(14) input is connected, and the spectrum of wideband light source (1) output light, fine setting are recorded using described fiber spectrometer (13) measurement
The spectral intensity that first speculum (5) and the second speculum (6) measure described fiber spectrometer (13) is maximum；
2) pyramid (7) is removed, rotation general level turntable is to zero graduation position, and number of revolutions n is designated as zero, i.e. n=0, now led to
With horizontal revolving stage initial angle θ0=0, reflective diffraction gratings (8) are placed on described general level turntable (9), and institute
The grating fringe for the reflective diffraction gratings (8) stated is perpendicular to the table top of general level turntable (9), and described reflective of adjustment spread out
Angular pose of the grating (8) with respect to the second speculum (6) output light path is penetrated until described fiber spectrometer (13) is measured sharply
The spectral signal for meeting Littrow angle condition；
3) initial angle of described reflective diffraction gratings (8) is determined：Computer (14) utilizes following grating equation
Calculate now incidence angle of the second speculum (6) output light path relative to described reflective diffraction gratings (8)：
Wherein, d is grating constant, λ1For peak wavelength,For Littrow angle, i.e. now reflective diffraction gratings (8) relative the
The incidence angle of two-mirror (6) output light path；
4) measurement of absolute angle value is calculated：The number of revolutions of the described general level turntable (9) of order is n, and n-th rotates described
At general level turntable (9) to n-th of non-zero graduation, corresponding scale value is αn, described fiber spectrometer (13) will measure
Another peak wavelength λ2, computer (14) calculates the anglec of rotation Δ of the n-th of general level turntable (9) by equation below
θn：
Δθn=arcsin (λ2/2d)-arcsin(λ1/2d)
The anglec of rotation of accumulation
<mrow>
<mi>&Delta;</mi>
<mi>&theta;</mi>
<mo>=</mo>
<munderover>
<mo>&Sigma;</mo>
<mrow>
<mi>i</mi>
<mo>=</mo>
<mn>1</mn>
</mrow>
<mi>n</mi>
</munderover>
<msub>
<mi>&Delta;&theta;</mi>
<mi>n</mi>
</msub>
</mrow>
The corresponding measurement of absolute angle value θ of n-th of described general level turntable (9) non-zero graduationnFor initial angle θ0With it is tired
Long-pending anglec of rotation Δ θ sums；
5) by step 4) the corresponding measurement of absolute angle value θ of obtain n-th non-zero graduationnWith the n-th of general level turntable (9)
Individual scale value αnCompare, obtain described n-th of scale value α of general level turntable (9)nWith measurement of absolute angle value θnError；
6) peak wavelength for making described fiber spectrometer (13) is λ1, the spectrum letter measured when described fiber spectrometer (13)
Number close to described wideband light source (1) spectral region a lateral edges when, then adjust the first speculum (5) or the second speculum
(6) spectral signal, measured until fiber spectrometer (13) close to wideband light source (1) spectral region another lateral edges, again
The peak wavelength of the described fiber spectrometer (13) of record is λ1；
7) return to step 4), up to the measurement of 360 degree of absolute angles of the general level turntable (9) described in completion；
8) using described general level turntable (9) scale value as abscissa, corresponding measurement of absolute angle value is ordinate, is made
Anglec of rotation Δ θ between experiment curv, described general level turntable (9) any two scalearbEqual to corresponding vertical seat
The difference of mark.
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