CN103499365A - Rotary transformer static and dynamic angle measuring accuracy calibration device and method - Google Patents
Rotary transformer static and dynamic angle measuring accuracy calibration device and method Download PDFInfo
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Abstract
The invention discloses a rotary transformer static and dynamic angle measuring accuracy calibration device and a rotary transformer static and dynamic angle measuring accuracy calibration method. The method is based on an external reference comparison method. The calibration device mainly comprises a driving turntable, a mechanical shaft system, a metal polygon, a photoelectric auto-collimator, a circular grating and the like. The metal polygon and the photoelectric auto-collimator are utilized for carrying out static angle measuring accuracy calibration on a rotary transformer, in addition, calibration and compensation are carried out on the circular grating, and installation errors are corrected. When the driving turntable drives the shaft system to rotate, the circular grating is utilized for carrying out dynamic angle measuring accuracy calibration on the rotary transformer. The device and the method have the advantages that different external reference characteristics are combined, the same device is utilized for completing the static and dynamic calibration of the rotary transformer, the comprehensive analysis and the error compensation of the angle measuring accuracy of the rotary transformer are realized, the improvement of an angle measuring system is favorably realized, and the angle measuring accuracy is improved.
Description
Technical field:
The present invention relates to high precision measurement of angle and calibration technique, be specifically related to a kind of rotary transformer Static and dynamic angle measurement accuracy caliberating device and method, the angle measuring system that can be used for high precision turntable is demarcated.
Background technology:
Rotary transformer (abbreviation revolves change) is the angle measurement element that a kind of output voltage changes with angle of rotor, it is a kind of signal motor in essence, containing the simulating signal of angle information, after resolving processing, oversampling circuit obtains the angle-data of degree of precision based on the electromagnetic induction principle output packet.Simple in structure owing to having, easy to maintenance, the life-span is long, insensitive to machinery and electrical noise, and the advantages such as adverse environment resistant are revolved and become the fields such as servo-drive system, robot system, automobile, electric power, weaving and Aero-Space that are widely used in.
Be subject to revolving the restriction of change manufacture craft, mechanical erection error, electric signal distortion and the impacts such as noise and signal resolution error, must there be angle error in the whole change angle measuring system of revolving, has limited the lifting of angle-measurement accuracy and system control accuracy.Therefore in the application scenario of ask for something high precision and high reliability (such as the space turntable), before using, need to carry out omnibearing demarcation to the angle measurement accuracy of revolving change, and then angle measuring system is carried out to multianalysis and error compensation.
The at present common change angle measurement accuracy scaling method that revolves mainly contains following several:
Method one: utilize metal polygon and photoelectric auto-collimator to be demarcated.(referring to GJB1801-93, inertial technology testing apparatus main performance test method [S] .) the metal polygon is arranged on to axle center, photoelectric auto-collimator utilizes its workplace reflection to carry out reading, the face number that utilizes the former to turn over can obtain high-precision angle-data in conjunction with the latter's reading, can carry out static demarcating to device under test.In the method, can replace the metal polyhedron with multiteeth indexing table and level crossing.
Method two: utilize rate table to be demarcated.(referring to Zhang Zhongyi, a kind of calibration compensation method [P] of the rotary transformer angle error based on rate table. Chinese patent: 101271007,2008-09-24.) first utilize the rate table constant revolution to obtain revolving the dynamic continuous wave output of change, periodic term for calibrated error, the static state angle measurement of recycling rate table carries out static demarcating, for the trend term of calibrated error.Finally complete demarcation and error compensation to revolving change.
Method three: utilize grating encoder to be demarcated.(referring to Li Shengjin, the Digital Calibration of a kind of rotary transformer-RDC angle measuring system and compensation method [J]. small and special electric machine, 2007,6:26-28.) utilize the grating encoder with higher angle measurement accuracy to demarcate and revolve the change angle measuring system as benchmark, the increment type grating encoder coaxially is connected with servomotor with revolving to become, during the motor rotation, adopt the delta pulse signal of electrographic recording instrument while sample record grating encoder and revolve the angle digital quantity of change, after data are carried out to the duplicate removal processing, obtain the Digital Calibration curve in a week.
Method one can obtain very high static testing angle precision, be used widely, but shortcoming be can't obtain continuous position and dynamically under nominal data, and whole staking-out work manual operation is many, process is lengthy and tedious.Method two relies on rate table to complete dynamically and static demarcating, process is simple, highly versatile, but it is using the fitting a straight line under uniform motion as the dynamic angle true value, but not real exterior angle benchmark, too rely on the Steady speed of rate table, and can't carry out the dynamic calibration under multimode more.Method three has been utilized the high advantage of increment type grating encoder precision, directly compare, but it does not consider the alignment error of grating encoder self on the one hand, has ignored the accuracy of reference-calibrating, does not carry out on the other hand the dynamic calibration under particular state.
Summary of the invention:
The objective of the invention is to propose a kind of caliberating device and method of new rotary transformer angle measurement accuracy, complete the Static and dynamic angle measurement accuracy of revolving change and demarcate, solved and become to revolving the problem that angle measuring system is carried out comprehensively reliable demarcation and error analysis and compensation.
Apparatus structure of the present invention as shown in Figure 1, comprising: workbench 1, drive turntable 2, and mechanical axis is 3, photoelectric auto-collimator 4, metal polygon 5, rotary transformer 6, circle grating and read head 7, system circuit 8 when signal processing and sampling, working computer 9.
Wherein: workbench 1 is wanted horizontal stable, and has certain anti-vibration performance, can suppress environmental perturbation, for whole system provides stable platform; Drive turntable 2 driving mechanical axles be 3 and coaxial mounted metal polygon 5, to be measured revolving become 6 and rotate together with basic circle grating 7; Mechanical axis is 3 will guarantee that when mounted center line of shafting overlaps with the rotation that drives turntable 2; Photoelectric auto-collimator 4 is horizontal positioned under the adjustment of workbench 1, and with metal polygon 5, with high, its central axis is vertical with mechanical center line of shafting; Signal process and during sampling 8 pairs, circuit of system revolve and become and the angle signal of circle grating is nursed one's health, and complete AD sampling system in time, finally send into working computer 9 and processed.
Utilize this device, can, in conjunction with the characteristics of different outside references, adopt relative method to demarcate revolving to become comprehensively.Photoelectric auto-collimator 4 complexed metal polyhedrons 5 can reach very high measuring accuracy among a small circle, as static demarcating; The enough height of angle measurement accuracy and the dynamic perfromance of circle grating 7 are good, as dynamic calibration; During dynamic calibration, utilize signal processing circuit 8 to guarantee that circle grating and the sampling time of revolving change are unified; Circle grating 7 is as reference-calibrating, and precision is subject to the setting-up eccentricity impact, can utilize before use photoelectric auto-collimator 4 and metal polyhedron 5 to be proofreaied and correct.Become 6 than to be measured revolving, should exceed more than 2～3 times as the precision of the round grating 7 of dynamic benchmark, the precision be used in conjunction with as photoelectric auto-collimator 4 and the metal polyhedron 5 of static benchmark should exceed more than 5 times.
In conjunction with said apparatus, scaling method of the present invention comprises following steps:
1. demarcation preliminary work.Preliminary work comprises the adjustment of workbench 1, and mechanical axis is 3 installation, metal polyhedron 5, the installation of revolving change 6, circle grating 7, the configuration of circuit board 8, and other relevant equipment installations and configuration etc.
2. basic circle raster correction.Rotating drive turntable 2, utilize the workplace of metal polyhedron 5 and the reading of photoelectric auto-collimator 4 to obtain the angle true value, read the measured value of round grating 7 simultaneously, complete complete cycle and measure, utilize least square fitting or additive method to carry out software compensation, proofread and correct the alignment error of circle grating 7.
3. static demarcating.Rotating drive turntable 2, utilize the workplace of metal polyhedron 5 and the reading of photoelectric auto-collimator 4 to obtain the angle true value, read simultaneously and revolve the measured value that becomes 6, can obtain revolving in complete cycle and become the static error curve, also can be measured the static repeatable accuracy of diverse location.
4. dynamic calibration.Control to drive turntable 2 with specific angle speed or angular acceleration motion, record is the lower angle measurement value that becomes 6 and the angle measurement value of circle grating 7 of revolving in the same time, usings the latter as the angle true value, obtains revolving the dynamic error curve of change 6; Change motion state, obtain the dynamic error under different situations, also can obtain revolving the range of dynamic measurement that becomes 6.
5. data are processed and are analyzed.The Static and dynamic nominal data recorded is processed, and the dynamic calibration data will guarantee the timing code alignment, reject wild value, draw graph of errors, and result is analyzed.
6. system is improved and error compensation.According to calibration result, estimate and revolve the serviceability that becomes angle measuring system, consider system is carried out to necessary hardware modifications; In conjunction with graph of errors, utilize the method for data fitting to carry out the software compensation of error.
7. checking is demarcated again.To the demarcation again that becomes the angle measuring system property verified of revolving after improvement or error compensation.
The present invention has following beneficial effect:
Adopt the alignment error of the method compensation circle grating of software correction, reduce hardware cost; Utilize the characteristics of different outside references, not only can realize revolving the static demarcating of change, and can carry out flexile dynamic calibration; By demarcate revolving the change angle measuring system comprehensively, obtain the data such as static testing angle precision, static repeatable accuracy, dynamic testing angle precision, range of dynamic measurement, can carry out system improvement and error compensation according to calibration result, promote the research that becomes angle measuring system to revolving, the elevator system angle measurement accuracy.
The accompanying drawing explanation:
Fig. 1 is that of the present invention revolving becomes Static and dynamic caliberating device structural drawing.
In figure: 1. workbench; 2. driving turntable; 3. mechanical axis is;
4. photoelectric auto-collimator; 5. metal polygon; 6. rotary transformer;
7. justify grating and read head; 8. signal is processed and system circuit during sampling;
9. working computer.
Fig. 2 is the error curve diagram after the basic circle grating is considered setting-up eccentricity.
Fig. 3 is the top view that revolves the sub-support scheme schematic diagram of set and supporting construction.
In figure: 10. mechanical axis; 11. revolve the change rotor; 12. revolve set;
13. supporting construction; 14. stator screw; 15. supporting construction screw;
16. turntable fixed part; 17. circle grating reading head; 18. grating disc.
Fig. 4 is that of the present invention revolving becomes Static and dynamic scaling method process flow diagram.
Embodiment:
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail:
The brushless binary channels that certain space photoelectric turntable is used revolve become and support circuit as system to be calibrated, adopt the shaft angle conversion chip AD2S80 of AD company to complete to revolve varying signal and resolve, change figure place into 21, angular resolution is 0.618 "; nominal angle measurement accuracy ± 15 ", measure rotating speed and be less than 5r/min.
The metal polygon adopts 23 bodies, and grade is 1 grade, and the operating angle deviation is ± 2 ", operating angle uncertainty of measurement ± 0.5 ".Photoelectric auto-collimator adopts German TriAngle electronics autocollimator, at the field range intrinsic resolution of about 0.5 °, reaches 0.01 ", precision 0.75 ".After the two coordinates, among a small circle in, can reach ± 2.2 " precision, specific rotation uprises out more than 5 times, and Measurement sensibility is reliable, can be used for revolving the alignment error correction of static demarcating and the circle grating of change.
The basic circle grating adopts RESM type increment type circle grating and the supporting reading sub-circuit thereof of Renishaw company, circle grating ruling pitch 20um, diameter 100mm, angular resolution after 400 segmentations is 0.2 "; nominal system precision ± 2.23 ", but setting-up eccentricity may make precise decreasing to ± 9, and " left and right (as shown in Figure 2) therefore is necessary to be proofreaied and correct after first the installation.Be limited to the precision of calibration facility and the system accuracy of circle grating self, the round grating precision after correction reaches at most 3 " left and right, but enough for demarcation, revolve change.Circle grating measuring turn up 200r/min, dynamic property is good, therefore for revolving the dynamic calibration of change.
As shown in Figure 1, each several part title and mutual relationship are as mentioned before for concrete caliberating device structure.During concrete enforcement, workbench 1 can adopt the optics air floating platform, and the photoelectric auto-collimator height control, to correct position, utilizes screw to carry out fastening, guarantees platform stable.Drive turntable 2 to adopt the AGR series of Aerotech company, operating rate reaches 180 °/s, can utilize easily instruction to carry out start stop operation, and can utilize programming to generate various curve movements, realizes the dynamic calibration of robotization.Mechanical axis 3 need to be designed according to the mechanical dimension of each parts.It should be noted that, the rotor that revolves change rotates with mechanical axis, and stator should be arranged on fixed part, and keeps stablize gap with rotor, therefore needs to design the special sub-supporting construction of set of revolving.
A kind of feasible stator support scheme as shown in Figure 3.Mechanical axis 10 rotates with turntable, revolving change rotor 11 is arranged on mechanical axis, revolving set 12 is supported by bridge type supporting construction 13, by screw 14, the two is fixed together, the bottom of supporting construction 13 and turntable fixed part 16 close contacts, and utilize screw 15 to be fixed, thereby complete the support of revolving set and fix.Simultaneously, the read head 17 of circle grating also is fixed on above supporting construction 13, and is arranged on the grating disc 18 that axle fastens and forms relative motions.Accompanying drawing 3 belows have provided the top view of stator support structure 13.When the circle grating being installed and revolving change, need to use dial gauge, utilize screw, pad etc. to be finely tuned, guarantee assembling well, reduce to install the measuring error caused as far as possible.
After to be prepared, according to the demarcation flow process shown in accompanying drawing 4, demarcated, the corresponding content of each step as indicated above.After demarcation completes, can obtain the static and dynamic errors that revolves change, and carry out error compensation or angle measuring system is improved.
Claims (2)
1. a rotary transformer Static and dynamic angle measurement accuracy caliberating device, it comprises: workbench (1), drive turntable (2), mechanical axis system (3), photoelectric auto-collimator (4), metal polygon (5), rotary transformer (6), circle grating and read head (7), system circuit (8) when signal processing and sampling, working computer (9) is characterized in that:
Described workbench (1) is the vibration isolation Horizontal Stable Platform; Described driving turntable (2) and mechanical axis system (3) links, described metal polygon (5), to be measured revolve changes (6) and justify grating and read head (7) coaxially to be arranged on mechanical axis be on (3); It is upper and same high with metal polygon (5) that described photoelectric auto-collimator (4) lies in a horizontal plane in workbench (1), and its central axis is that (3) center line is vertical with mechanical axis; Described signal process and during sampling system circuit (8) to revolving, become and the angle signal of circle grating is nursed one's health, complete the AD sampling and send into working computer (9) after system in time and processed.
2. the rotary transformer Static and dynamic scaling method based on the described device of claim 1 is characterized in that comprising the following steps:
1) demarcate preliminary work: preliminary work comprises the adjustment of workbench (1), the installation of mechanical axis system (3), metal polyhedron (5), the installation of revolving change (6), circle grating (7), the configuration of circuit board (8), and other relevant equipment are installed and configuration;
2) basic circle raster correction: rotating drive turntable (2), utilize the workplace of metal polyhedron (5) and the reading of photoelectric auto-collimator (4) to obtain the angle true value, read the measured value of round grating (7) simultaneously, completing complete cycle measures, utilize least square fitting or additive method to carry out software compensation, proofread and correct the alignment error of circle grating (7);
3) static demarcating: rotating drive turntable (2), utilize the workplace of metal polyhedron (5) and the reading of photoelectric auto-collimator (4) to obtain the angle true value, read the measured value that revolves change (6) simultaneously, can obtain revolving in complete cycle and become the static error curve, also can be measured the static repeatable accuracy of diverse location;
4) dynamic calibration: control to drive turntable (2) with specific angle speed or angular acceleration motion, record is the lower angle measurement value of revolving changes (6) and the angle measurement value of round grating (7) in the same time, usings the latter as the angle true value, obtains revolving the dynamic error curve of change (6); Change motion state, obtain the dynamic error under different situations, also can obtain revolving the range of dynamic measurement of change (6);
5) data are processed and analyzed: the Static and dynamic nominal data recorded is processed, and the dynamic calibration data will guarantee the timing code alignment, reject wild value, draw graph of errors, and result is analyzed;
6) system is improved and error compensation: according to calibration result, estimate and revolve the serviceability that becomes angle measuring system, consider system is carried out to necessary hardware modifications; In conjunction with graph of errors, utilize the method for data fitting to carry out the software compensation of error;
7) checking is demarcated again: to the demarcation again that becomes the angle measuring system property verified of revolving after improvement or error compensation.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104006782A (en) * | 2014-06-12 | 2014-08-27 | 北京华电天仁电力控制技术有限公司 | Dynamic detection device for position sensor sensing section |
| CN104236903A (en) * | 2014-09-29 | 2014-12-24 | 贵州航天计量测试技术研究所 | Calibration device of gear transmission error detection equipment |
| CN104516348A (en) * | 2014-12-29 | 2015-04-15 | 贵州航天计量测试技术研究所 | Calibration device and calibration method for radio frequency homing-based semi-physical simulation system |
| CN104634280A (en) * | 2015-02-03 | 2015-05-20 | 中国科学院上海光学精密机械研究所 | Method for measuring absolute angle and rotating angle of universal horizontal turntable |
| CN105044795A (en) * | 2015-05-29 | 2015-11-11 | 中国船舶重工集团公司第七0七研究所 | Method for reducing measurement error of rotating accelerometer gravity gradiometer by using fiber optic gyroscope |
| CN105910532A (en) * | 2016-06-13 | 2016-08-31 | 清华大学 | Zero error test method and comprehensive error compensation method of angle measurement system |
| CN106871821A (en) * | 2016-12-28 | 2017-06-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of Circular gratings process alignment error calibration and modification method based on single reading head |
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| CN109308006A (en) * | 2018-10-10 | 2019-02-05 | 北京遥感设备研究所 | A kind of position marker Split rotary transformer precision compensation system and method |
| CN109506560A (en) * | 2018-12-12 | 2019-03-22 | 上海卫星装备研究所 | Round induction synchrometer dynamic testing angle precision caliberating device and its scaling method |
| CN109540195A (en) * | 2018-11-22 | 2019-03-29 | 北京遥感设备研究所 | A kind of position marker is with being co-axially mounted Split rotary transformer precision calibration fixture system |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102128645A (en) * | 2010-12-13 | 2011-07-20 | 中国科学院光电技术研究所 | Dynamic angle measurement error detector used in photo-electric axial angle encoder |
| CN102494710A (en) * | 2011-12-01 | 2012-06-13 | 中国科学院长春光学精密机械与物理研究所 | Angle measurement precision detection apparatus of encoder and detection method thereof |
| CN202382724U (en) * | 2011-12-30 | 2012-08-15 | 北京中科恒业中自技术有限公司 | Angle measuring instrument |
| CN202974319U (en) * | 2012-09-25 | 2013-06-05 | 中国科学院西安光学精密机械研究所 | Angle measurement precision dynamic measuring device |
-
2013
- 2013-10-10 CN CN201310469882.1A patent/CN103499365A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102128645A (en) * | 2010-12-13 | 2011-07-20 | 中国科学院光电技术研究所 | Dynamic angle measurement error detector used in photo-electric axial angle encoder |
| CN102494710A (en) * | 2011-12-01 | 2012-06-13 | 中国科学院长春光学精密机械与物理研究所 | Angle measurement precision detection apparatus of encoder and detection method thereof |
| CN202382724U (en) * | 2011-12-30 | 2012-08-15 | 北京中科恒业中自技术有限公司 | Angle measuring instrument |
| CN202974319U (en) * | 2012-09-25 | 2013-06-05 | 中国科学院西安光学精密机械研究所 | Angle measurement precision dynamic measuring device |
Non-Patent Citations (4)
| Title |
|---|
| 任顺清: "小范围回转轴系感应同步器测角系统的误差分离技术", 《电机与控制学报》 * |
| 杜颖财: "小型大孔径高精度编码器的精度分析", 《电子测量与仪器学报》 * |
| 赵柱 等: "基于运动控制技术的编码器自动检测系统", 《中国光学与应用光学》 * |
| 高贯斌 等: "圆光栅角度传感器的误差补偿及参数辨识", 《光学精密工程》 * |
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