CN109506560A - Round induction synchrometer dynamic testing angle precision caliberating device and its scaling method - Google Patents
Round induction synchrometer dynamic testing angle precision caliberating device and its scaling method Download PDFInfo
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- CN109506560A CN109506560A CN201811520161.8A CN201811520161A CN109506560A CN 109506560 A CN109506560 A CN 109506560A CN 201811520161 A CN201811520161 A CN 201811520161A CN 109506560 A CN109506560 A CN 109506560A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The present invention provides a kind of round induction synchrometer dynamic testing angle precision caliberating device and its scaling methods, wherein caliberating device is mounted on operating platform (1), including pedestal (2), shafting (3), permanent magnet synchronous torque motor (4), round induction synchrometer, Circular gratings and positive 20 trihedral prism (7) of reading head (6), metal, photoelectric auto value instrument (8) and two orthogonal horizontal instrument (9)；Scaling method mainly includes the reference zero position-finding step for demarcating preparation process, angle of shafting declivity turn error detecting step, round induction synchrometer and Circular gratings static calibration step, round induction synchrometer and Circular gratings, dynamic testing angle precision calibration and compensation process and repetition calibration verification step；The present invention has stated accuracy height, the convenient advantage of device adjustment；Meanwhile the advantages of having merged static testing angle precision and dynamic testing angle precision calibration, the Dynamic High-accuracy for being truly realized round induction synchrometer angle measurement accuracy is continuously demarcated.
Description
Technical field
The present invention relates to the measurements of angle dynamic accuracy and calibration technique field, and in particular, to a kind of round induction synchrometer
Dynamic testing angle precision caliberating device and its scaling method more particularly to a kind of high accuracy circular inductosyn dynamic testing angle precision mark
Determine method.
Background technique
Round induction synchrometer is a kind of novel High-precision angle detecting element and angle feed-back element, it is to utilize electromagnetism
To planographic coil assembly, it is made of the multipole that coupling principle works a stator and a rotor.When stator around
When group is by high-frequency current excitation, induced potential is just generated in rotor windings.The changing value of rotor electric signal directly reflects machine
The variable quantity of tool angular displacement can obtain High-precision angle data by processing of circuit.Since it has, positioning accuracy is high, uses
Service life length, strong antijamming capability, to use environment require it is not harsh the advantages that, therefore by more and more widely be applied to space flight,
The industries such as the departments such as navigation and instrument and meter, Machine Manufacture.
It is limited by inductosyn manufacture craft, installation error, shafting fiducial error, excitation power supply error, electric wire
Road interference and signal resolution error etc. influence, and based on the angle measuring system of round induction synchrometer, there are angle errors, limit survey
The promotion of angular accuracy and system control precision.Therefore, in application (such as space high-precision of some high-precisions and high stable
Holder), it needs to demarcate angle measuring system comprehensively, data be analyzed comprehensively and error compensation, it is ensured that meet high-precision
The application requirement of angle measurement and control.
Inductosyn angle measuring system angle error detection method mainly has the positive 23 face rib body detection method of metal and 391 at present
Fluted disc detection method.The positive 23 face rib body detection method of metal is demarcated using the positive 23 face rib body of metal and photoelectric auto-collimator.It will
The positive 23 face rib body of metal is co-axially mounted with inductosyn, and cooperation photoelectric auto-collimator is detected.Shafting is first gone into digital display
0 ° of position, adjusts autocollimator, and record autocollimator reads α0, then shafting is gone near 360 ° of (i-1)/n, makes positive n
Another working face of face body is directed at autocollimator, and records the reading α of autocollimatori, by can be calculated shafting reality
Rotational angle, point of theory subtract actual angle you can get it the error of angle measuring system.The method can obtain very high static state
Angle measurement accuracy is used widely, but can not obtain continuous position and dynamic testing angle precision.391 fluted disc detection methods are first by fluted disc
Axis and tested axis adjusted as far as possible to horizontal and is overlapped, a plane mirror is fixed on above fluted disc, it is anti-to adjust plane
It is parallel with axis of rotation to penetrate mirror mirror surface.Shafting is gone into 0 ° of position, autocollimator alignment surface reflecting mirror reads autocollimator and reads
Number α0, then shafting goes to 15.6522 ° of positions, and fluted disc inverts 17 teeth, and plane mirror is directed at autocollimator, reads auto-collimation
Instrument reads αi, and so on, 23 data are measured altogether.Then the angle error of shafting is βi=± (αi-α0).The method calculates
It is more convenient, it can get very high static testing angle precision, but need that fluted disc is artificially inverted 17 teeth, can not equally obtain continuous position
And dynamic testing angle precision.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of round induction synchrometer dynamic testing angle precision marks
Determine device and its scaling method.
A kind of round induction synchrometer dynamic testing angle precision caliberating device provided according to the present invention, is mounted on operating platform
On, including pedestal, shafting, permanent magnet synchronous torque motor, round induction synchrometer, Circular gratings and positive 23 face of reading head, metal
Rib body, photoelectric auto value instrument and two orthogonal horizontal instrument；
The round induction synchrometer includes round induction synchrometer rotor；
The pedestal is mounted on the first platform of operating platform；The shafting setting is in the base；Along flat far from operation
Platform direction, permanent magnet synchronous torque motor, round induction synchrometer, Circular gratings and reading head, positive 20 trihedral prism of metal and two
Orthogonal horizontal instrument is successively set in shafting；
The photoelectric auto value instrument is arranged on the second platform of operating platform.
Preferably, round induction synchrometer dynamic testing angle precision caliberating device provided by the invention further includes drive control circuit
And/or computer；
The drive control circuit can control permanent magnet synchronous torque motor, round induction synchrometer and Circular gratings and reading
Several heads；And/or
The drive control circuit can be to permanent magnet synchronous torque motor, round induction synchrometer and Circular gratings and reading
The signal processing of head is the first data；
The computer can carry out analytical calculation to the first data.
Preferably, the pedestal is vibration isolation mounts.
Preferably, the round induction synchrometer, Circular gratings and reading head and positive 20 trihedral prism of metal are co-axially mounted.
Preferably, the two orthogonal horizontals instrument is able to detect the wobble error of shafting and compensates.
Preferably, the central axis of the photoelectric auto value instrument is horizontal, and with positive 20 trihedral prism of metal with high；Photoelectricity
The central axis of autocollimatic value instrument and the central axis upright of shafting.
A kind of round induction synchrometer dynamic testing angle precision scaling method provided according to the present invention is incuded using above-mentioned circle
Synchronizer dynamic testing angle precision caliberating device, comprising:
Demarcate preparation process: each in adjustment operating platform and adjustment round induction synchrometer dynamic testing angle precision caliberating device
Component；
Angle of shafting declivity turn error detecting step: driving shafting is turned round using the inclination angle of two orthogonal horizontal instrument shafts and is missed
Difference is detected and is compensated；
Round induction synchrometer and Circular gratings static calibration step: driving shafting is with ω0The angular speed of=0.1 °/s rotates, and drives
Dynamic angle measuring system is separately operable to 23 nominal Angle Positions, and positive 20 trihedral prism of metal is successively by first, second, third ...
23rd working face is directed at photoelectric auto value instrument, and drive control circuit successively acquires 23 readings of photoelectric auto value instrument,
And it is denoted as αi, wherein i=0,1,2 ..., 22；Zero angle angular error β of this 23 positions is then calculated by the first formulai, angle
Pass through the angle error that compensation reduces round induction synchrometer and Circular gratings after spending error calibration；
Described 23 nominal Angle Positions are respectively position represented by 0 to 22 times of first angle this 23 angles, and first
Angle is 15.6522 °；First formula are as follows:
βi=± (αi-α0)-Δi+1, i=0,1,2 ..., 22
Wherein, Δi+1Deviation for i+1 working face relative to first job face, when angle measuring system reading and photoelectricity
When autocollimatic value instrument increases, (αi-α0) take positive sign, otherwise, (αi-α0) take negative sign.
Preferably, round induction synchrometer dynamic testing angle precision scaling method provided by the invention further include:
The reference zero position-finding step of round induction synchrometer and Circular gratings: driving shafting is with ω0The angular speed of=0.1 °/s
It is rotated from 0 °, and makes the first job of positive 20 trihedral prism of metal in face of quasi- photoelectric auto value instrument, control shafting is transported respectively
It moves to 2n second angle, drive control circuit successively acquires the reading of photoelectric auto value instrument and is denoted as θj, then public by second
The benchmark zero-bit error theta of formula calculating round induction synchrometer and Circular gratings0, then to the reference zero of round induction synchrometer and Circular gratings
Position error is modified；
Wherein, second angle is 360 ° × j, and-n≤j≤n, j are positive integer, and n is the natural number for being not more than 5 of setting.
Second formula are as follows:
Preferably, round induction synchrometer dynamic testing angle precision scaling method provided by the invention further include:
Dynamic testing angle precision calibration and compensation process: driving shafting is moved with the angular speed or angular acceleration that set, is passed through
Time unification signal, while the angle value of round induction synchrometer and Circular gratings is acquired, and using the angle value of Circular gratings as true value
Obtain the dynamic error curve of the round induction synchrometer under different angular speed or angular acceleration；And/or
The rate stabilization degree of round induction synchrometer is obtained indirectly；
Dynamic error compensation is carried out using the method for data fitting according to dynamic error curve and/or rate stabilization degree.
Preferably, round induction synchrometer dynamic testing angle precision scaling method provided by the invention further include:
It repeats calibration verification step: repeating calibration preparation process, angle of shafting declivity turn error detecting step, circle induction
The reference zero position-finding step and dynamic measuring angle of synchronizer and Circular gratings static calibration step, round induction synchrometer and Circular gratings
Precision calibration and compensation process, until precision index reaches setting value.
Compared with prior art, the present invention have it is following the utility model has the advantages that
1, round induction synchrometer dynamic testing angle precision caliberating device provided by the invention has stated accuracy height, device tune
School side just the advantages of；
2, round induction synchrometer dynamic testing angle precision scaling method provided by the invention has merged static testing angle precision and has moved
The error of zero and dynamic measuring angle are demarcated first with static testing angle precision caliberating device and compensated to the advantages of state angle measurement accuracy is demarcated
Precision calibration long-period error, it is rear to realize the continuous dynamic of round induction synchrometer angle measurement accuracy using dynamic testing angle precision caliberating device
State calibration, the Dynamic High-accuracy for being truly realized round induction synchrometer angle measurement accuracy are continuously demarcated.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is the structural schematic diagram of round induction synchrometer dynamic testing angle precision caliberating device provided by the invention；
Fig. 2 is the flow diagram of round induction synchrometer dynamic testing angle precision scaling method provided by the invention.
It is shown in figure:
Operating platform 1
Pedestal 2
Shafting 3
Permanent magnet synchronous torque motor 4
Round induction synchrometer rotor 5
Circular gratings and reading head 6
Positive 20 trihedral prism 7 of metal
Photoelectric auto value instrument 8
Two orthogonal horizontal instrument 9
Drive control circuit 10
Computer 11
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.These belong to the present invention
Protection scope.
A kind of round induction synchrometer dynamic testing angle precision caliberating device provided according to the present invention, is mounted on operating platform 1
On, including pedestal 2, shafting 3, permanent magnet synchronous torque motor 4, round induction synchrometer, Circular gratings and reading head 6, metal positive 20
Trihedral prism 7, photoelectric auto value instrument 8 and two orthogonal horizontal instrument 9；The round induction synchrometer includes that round induction synchrometer turns surely
Son 5；The pedestal 2 is mounted on the first platform of operating platform 1；The shafting 3 is arranged in pedestal 2；Along flat far from operation
1 direction of platform, permanent magnet synchronous torque motor 4, round induction synchrometer, Circular gratings and positive 20 trihedral prism 7 of reading head 6, metal with
And two orthogonal horizontal instrument 9 be successively set in shafting 3；The second platform of operating platform 1 is arranged in the photoelectric auto value instrument 8
On.
Preferably, round induction synchrometer dynamic testing angle precision caliberating device provided by the invention further includes drive control circuit
10 and/or computer 11；
The drive control circuit 10 can control permanent magnet synchronous torque motor 4, round induction synchrometer and Circular gratings and
Reading head 6；And/or
The drive control circuit 10 can be to permanent magnet synchronous torque motor 4, round induction synchrometer and Circular gratings and reading
Several 6 signal processings are the first data；
The computer 11 can carry out analytical calculation to the first data.
Specifically, the pedestal 2 is vibration isolation mounts.The round induction synchrometer, Circular gratings and reading head 6 and metal are just
20 trihedral prisms 7 are co-axially mounted.The two orthogonal horizontals instrument 9 is able to detect the wobble error of shafting 3 and compensates.
The central axis of the photoelectric auto value instrument 8 is horizontal, and with positive 20 trihedral prism 7 of metal with high；In photoelectric auto value instrument 8
The central axis upright of mandrel line and shafting 3.
A kind of round induction synchrometer dynamic testing angle precision scaling method provided according to the present invention is incuded using above-mentioned circle
Synchronizer dynamic testing angle precision caliberating device, comprising:
Demarcate preparation process: in adjustment operating platform 1 and adjustment round induction synchrometer dynamic testing angle precision caliberating device
Each component；
Angle of shafting declivity turn error detecting step: driving shafting 3 is turned round using the inclination angle of two orthogonal horizontal instrument, 9 shaft
Error is detected and is compensated；
Round induction synchrometer and Circular gratings static calibration step: driving shafting 3 is with ω0The angular speed of=0.1 °/s rotates,
Driving angle measuring system is separately operable to 23 nominal Angle Positions, positive 20 trihedral prism 7 of metal successively by first, second, the
Three ... the 23rd working faces are directed at photoelectric auto value instrument 8, and drive control circuit 10 successively acquires photoelectric auto value instrument 8
23 readings, and it is denoted as αi, wherein i=0,1,2 ..., 22；Zero angle angle of this 23 positions is then calculated by the first formula
Spend error βi, reduce the angle error of round induction synchrometer and Circular gratings after angular error calibration by compensation；
Described 23 nominal Angle Positions are respectively position represented by 0 to 22 times of first angle this 23 angles, and first
Angle is 15.6522 °；First formula are as follows:
βi=± (αi-α0)-Δi+1, i=0,1,2 ..., 22
Wherein, Δi+1Deviation for i+1 working face relative to first job face, when angle measuring system reading and photoelectricity
When autocollimatic value instrument 8 increases, (αi-α0) take positive sign, otherwise, (αi-α0) take negative sign.
More specifically, round induction synchrometer dynamic testing angle precision scaling method provided by the invention further include:
The reference zero position-finding step of round induction synchrometer and Circular gratings: driving shafting 3 is with ω0The angular speed of=0.1 °/s
It is rotated from 0 °, and makes the first job of positive 20 trihedral prism 7 of metal in face of quasi- photoelectric auto value instrument 8, control shafting 3 is distinguished
2n second angle is moved to, drive control circuit 10 successively acquires the reading of photoelectric auto value instrument 8 and is denoted as θj, then by the
The benchmark zero-bit error theta of two formula calculating round induction synchrometer and Circular gratings0, then to the base of round induction synchrometer and Circular gratings
The quasi- error of zero is modified；
Wherein, second angle is 360 ° × j, and-n≤j≤n, j are positive integer, and n is the natural number for being not more than 5 of setting.
Second formula are as follows:
Dynamic testing angle precision calibration and compensation process: driving shafting 3 is moved with the angular speed of setting or angular acceleration, is passed through
Time unification signal, while the angle value of round induction synchrometer and Circular gratings is acquired, and using the angle value of Circular gratings as true value
Obtain the dynamic error curve of the round induction synchrometer under different angular speed or angular acceleration；And/or
The rate stabilization degree of round induction synchrometer is obtained indirectly；
Dynamic error compensation is carried out using the method for data fitting according to dynamic error curve and/or rate stabilization degree.
It repeats calibration verification step: repeating calibration preparation process, angle of shafting declivity turn error detecting step, circle induction
The reference zero position-finding step and dynamic measuring angle of synchronizer and Circular gratings static calibration step, round induction synchrometer and Circular gratings
Precision calibration and compensation process, until precision index reaches setting value.
Further, preference of the invention can complete high accuracy circular inductosyn zero-bit, static state and dynamic measuring angle
The calibration of precision can be used for the dynamic angular measuring system precision calibration of high-precision holder and be promoted, solves and incude to high accuracy circular
Synchronizer angle measuring system is demarcated comprehensively and the problem of error analysis and compensation, effectively raises system accuracy.
By caliberating device, preferred scaling method of the invention is comprised the following steps:
Step 1: calibration prepares:
Main includes the adjustment of operating platform, and the installation of precision bearing system, motor, round induction synchrometer, Circular gratings, metal are just
The adjustment of 23 face rib bodies, level meter, the connection of drive control circuit and the configuration of other relevant devices；
Step 2: the detection of angle of shafting declivity turn error:
Shafting is driven, is detected and is compensated referring to the wobble error of GJB1801-93 shaft using level meter；
Step 3: round induction synchrometer and Circular gratings static calibration:
Drive shafting with ω0The angular speed of=0.1 °/s rotates, drive system be separately operable to 0 °, 15.6522 ° ...,
344.3478 ° of equal 23 nominal Angle Positions, the positive 23 face rib body of metal press the 1st, 2,3 ..., 23 working face sequence alignment auto-collimations
Instrument.Reading using driving control system acquisition autocollimator 23 positions is αi, then zero angle angle of above-mentioned 23 positions
Spend error βiAre as follows:
βi=± (αi-α0)-Δi+1, i=0,1,2 ..., 22 (1)
In formula, Δi+1It is i+1 working face for the deviation of the 1st working face.Increase when angle measuring system shows reading, autocollimatic
Straight instrument reading also increases, (αi-α0) positive sign is taken, on the contrary take negative sign.
Angular error is compensated after calibrating using least square method or other methods, and round induction synchrometer and circle are reduced
Grating angle error.
Step 4: the reference zero position-finding of round induction synchrometer and Circular gratings:
Drive shafting with ω0The angular speed of=0.1 °/s is rotated from 0 °, and makes the positive 23 face rib body of metal the 1st to face standard certainly
Collimator.Controlling 360 ° × i of shafting movement, (i=(- n, 1, n), acquiring autocollimator respectively in the reading of ith sample point is
θi, then the benchmark error of zero of round induction synchrometer and Circular gratings are as follows:
The benchmark error of zero of round induction synchrometer and Circular gratings is modified after measurement.
Step 5: dynamic testing angle precision calibration and compensation:
It drives shafting to move with different angular speed or angular acceleration, by time unification signal, while acquiring round induction
The angle value of synchronizer and Circular gratings, and using the angle value of Circular gratings as true value, it obtains under different angular speed or angular acceleration
Round induction synchrometer dynamic error curve, can also obtain the rate stabilization degree of round induction synchrometer indirectly.Dynamic calibration
Guarantee that the sampling time synchronous, and dynamic error compensation is carried out using the method for data fitting according to result.
Step 6: repetition is demarcated and is verified:
Calibration again and supplement are carried out to by improvement and compensated round induction synchrometer angle measuring system, is finally obtained completely
The precision index of meaning.
Further, preference of the invention, which tracks space, is directed toward the high accuracy circular inductosyn survey that holder uses
Angle system is system to be calibrated, completes signal as master chip using RDC-19220 tracking mode resolver-to-angel digital converter and resolves, turns
The number that replaces is 16, and angular resolution is 0.055 ", angle measurement accuracy is ± 1.5 ", revolving speed is measured less than 3 °/s.Circle induction synchronizes
Device needs accurately to guarantee that stator and rotor center concentricity controls the stator and rotor in 0.01mm using amesdial or micrometer when installing
The depth of parallelism controls within 0.01mm, and the gap between rotor is controlled in 0.200.05mm.
It selects P2 grades of high-precision bearings to realize the high accuracy install and fastening of shafting 3, passes through quadrature arrangement two on axis
High-precision dual-axis electrolevel, the resolution ratio of electrolevel are 0.0002 ", measurement accuracy is 0.1 ", measurement range ±
400 ", detected and compensated by electrolevel shaft wobble error, guarantee the kinematic accuracy of shafting.
Guarantee the air gap between the installation accuracy and stator and rotor of permanent magnet synchronous torque motor 4 by precision-fit, motor
The 0.5% of continuous stalling torque, coefficient of moment fluctuation is control 0.5% for cogging torque control, guarantees the driving control of shafting
Precision processed.
Positive 20 trihedral prism, 7 grade of metal is 0 grade, and work angular displacement is ± 1 ", operating angle uncertainty of measurement is
0.2″.Photoelectric auto-collimator is using the automatic quasi- value instrument of Britain TAYLOR HOBSON ULTRA photoelectricity, and 5 ° × 5 ° of range, resolution ratio
0.001 ", optimum precision 0.1 ", the two is used cooperatively the calibration that can be used for round induction synchrometer and Circular gratings static testing angle precision
With the measurement of compensation and round induction synchrometer and Circular gratings benchmark zero-bit.
The RESA type absolute type Circular gratings and matched two reading heads of Circular gratings selection Renishaw company.Circular gratings are surveyed
Angular accuracy ± 0.69 ", resolution ratio is 0.019 ", because installation error can cause angle error, the positive 23 face rib of metal need to be passed through
Body 7 and photoelectric auto-collimator 8 are demarcated and are compensated.
It after the above mounting and adjusting, is demarcated according to demarcation flow shown in Fig. 2, on the corresponding content of each step is shown in
Text.After the completion of calibration, the error of zero, static error and dynamic error of inductosyn can be obtained, and carries out error compensation,
Realize the further promotion of round induction synchrometer angle measurement accuracy.
In the description of the present application, it is to be understood that term " on ", "front", "rear", "left", "right", " is erected at "lower"
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "top", "bottom", "inner", "outside" is orientation based on the figure or position
Relationship is set, description the application is merely for convenience of and simplifies description, rather than the device or element of indication or suggestion meaning are necessary
It with specific orientation, is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make a variety of changes or modify within the scope of the claims, this not shadow
Ring substantive content of the invention.In the absence of conflict, the feature in embodiments herein and embodiment can any phase
Mutually combination.
Claims (10)
1. a kind of round induction synchrometer dynamic testing angle precision caliberating device is mounted on operating platform (1), which is characterized in that packet
Include pedestal (2), shafting (3), permanent magnet synchronous torque motor (4), round induction synchrometer, Circular gratings and reading head (6), metal positive two
Ten trihedral prisms (7), photoelectric auto value instrument (8) and two orthogonal horizontal instrument (9)；
The round induction synchrometer includes round induction synchrometer rotor (5)；
The pedestal (2) is mounted on the first platform of operating platform (1)；The shafting (3) is arranged in pedestal (2)；Along remote
From operating platform (1) direction, permanent magnet synchronous torque motor (4), round induction synchrometer, Circular gratings and reading head (6), metal positive two
Ten trihedral prisms (7) and two orthogonal horizontal instrument (9) are successively set on shafting (3)；
The photoelectric auto value instrument (8) is arranged on the second platform of operating platform (1).
2. round induction synchrometer dynamic testing angle precision caliberating device according to claim 1, which is characterized in that further include driving
Dynamic control circuit (10) and/or computer (11)；
The drive control circuit (10) can control permanent magnet synchronous torque motor (4), round induction synchrometer and Circular gratings and
Reading head (6)；And/or
The drive control circuit (10) can be to permanent magnet synchronous torque motor (4), round induction synchrometer and Circular gratings and reading
The signal processing of several (6) is the first data；
The computer (11) can carry out analytical calculation to the first data.
3. round induction synchrometer dynamic testing angle precision caliberating device according to claim 1 or 2, which is characterized in that described
Pedestal (2) is vibration isolation mounts.
4. round induction synchrometer dynamic testing angle precision caliberating device according to claim 1 or 2, which is characterized in that described
Round induction synchrometer, Circular gratings and reading head (6) and positive 20 trihedral prism (7) of metal are co-axially mounted.
5. round induction synchrometer dynamic testing angle precision caliberating device according to claim 1 or 2, which is characterized in that described
Two orthogonal horizontal instrument (9) are able to detect the wobble error of shafting (3) and compensate.
6. round induction synchrometer dynamic testing angle precision caliberating device according to claim 1 or 2, which is characterized in that described
The central axis of photoelectric auto value instrument (8) is horizontal, and with positive 20 trihedral prism (7) of metal with high；Photoelectric auto value instrument (8)
The central axis upright of central axis and shafting (3).
7. a kind of round induction synchrometer dynamic testing angle precision scaling method is felt using circle described in any one of any one of claims 1 to 66
Answer synchronizer dynamic testing angle precision caliberating device characterized by comprising
Demarcate preparation process: each in adjustment operating platform (1) and adjustment round induction synchrometer dynamic testing angle precision caliberating device
Component；
Angle of shafting declivity turn error detecting step: driving shafting (3) is turned round using the inclination angle of two orthogonal horizontal instrument (9) shafts
Error is detected and is compensated；
Round induction synchrometer and Circular gratings static calibration step: driving shafting (3) is with ω0The angular speed of=0.1 °/s rotates, driving
Angle measuring system is separately operable to 23 nominal Angle Positions, and positive 20 trihedral prism (7) of metal is successively by first, second,
Three ... the 23rd working faces are directed at photoelectric auto value instrument (8), and drive control circuit (10) successively acquires photoelectric auto value
23 readings of instrument (8), and it is denoted as αi, wherein i=0,1,2 ..., 22；Then the zero of this 23 positions is calculated by the first formula
Play angle angular error βi, reduce the angle error of round induction synchrometer and Circular gratings after angular error calibration by compensation；
Described 23 nominal Angle Positions are respectively position represented by 0 to 22 times of first angle this 23 angles, first angle
It is 15.6522 °；First formula are as follows:
βi=± (αi-α0)-Δi+1, i=0,1,2 ..., 22
Wherein, Δi+1Deviation for i+1 working face relative to first job face, when angle measuring system reading and photoelectric auto
When value instrument (8) increases, (αi-α0) take positive sign, otherwise, (αi-α0) take negative sign.
8. round induction synchrometer dynamic testing angle precision scaling method according to claim 7, which is characterized in that further include:
The reference zero position-finding step of round induction synchrometer and Circular gratings: driving shafting (3) is with ω0The angular speed of=0.1 °/s from
0 ° of rotation, and make the first job of positive 20 trihedral prism (7) of metal in face of quasi- photoelectric auto value instrument (8), it controls shafting (3)
2n second angle is moved to respectively, and drive control circuit (10) successively acquires the reading of photoelectric auto value instrument (8) and is denoted as θi,
The benchmark zero-bit error theta of round induction synchrometer and Circular gratings is then calculated by the second formula0, then to round induction synchrometer and circle
The benchmark error of zero of grating is modified；
Wherein, second angle is 360 ° × j, and-n≤j≤n, j are positive integer, and n is the natural number for being not more than 5 of setting.
Second formula are as follows:
9. round induction synchrometer dynamic testing angle precision scaling method according to claim 8, which is characterized in that further include:
Dynamic testing angle precision calibration and compensation process: driving shafting (3) is moved with the angular speed of setting or angular acceleration, when passing through
Between unified signal, while acquiring the angle value of round induction synchrometer and Circular gratings, and using the angle value of Circular gratings as true value
Obtain the dynamic error curve of the round induction synchrometer under different angular speed or angular acceleration；And/or
The rate stabilization degree of round induction synchrometer is obtained indirectly；
Dynamic error compensation is carried out using the method for data fitting according to dynamic error curve and/or rate stabilization degree.
10. round induction synchrometer dynamic testing angle precision scaling method according to claim 9, which is characterized in that further include:
Repetition calibration verification step: calibration preparation process, angle of shafting declivity turn error detecting step, circle induction synchronization are repeated
The reference zero position-finding step and dynamic testing angle precision of device and Circular gratings static calibration step, round induction synchrometer and Circular gratings
Calibration and compensation process, until precision index reaches setting value.
Priority Applications (1)
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| CN109870122A (en) * | 2019-04-01 | 2019-06-11 | 长春理工大学 | Angular displacement sensor angle detection device based on program-controlled multiteeth indexing table |
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| CN110595417A (en) * | 2019-09-30 | 2019-12-20 | 天津大学 | Calibration device and calibration method for angle measurement system of precision speed reducer detector |
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| CN111336952A (en) * | 2020-02-26 | 2020-06-26 | 北京空间机电研究所 | System, method and device for correcting angle of induction synchronizer |
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| CN112461268A (en) * | 2020-11-23 | 2021-03-09 | 重庆华渝电气集团有限公司 | Position-replacing calibration method of top-of-the-sky and calibration method of double-top navigation equipment |
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