CN103822768A - Unsmooth static compensation method for ultralow-frequency horizontal vibration table guide rail - Google Patents
Unsmooth static compensation method for ultralow-frequency horizontal vibration table guide rail Download PDFInfo
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- CN103822768A CN103822768A CN201410104284.9A CN201410104284A CN103822768A CN 103822768 A CN103822768 A CN 103822768A CN 201410104284 A CN201410104284 A CN 201410104284A CN 103822768 A CN103822768 A CN 103822768A
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Abstract
The invention discloses an unsmooth static compensation method for an ultralow-frequency horizontal vibration table guide rail. The method comprises the following steps: measuring the unsmooth static performance of the ultralow-frequency horizontal vibration table guide rail, wherein unsmooth static performance is represented in a formula I as shown in the specification, and in the formula I, a formula II is represented as an output signal of a displacement sensor, x refers to different positions in which a sliding table is positioned along the vibration direction, Sgra is the sensitivity of the displacement sensor, and theta is an inclination angle of the sliding table at the position x; performing static compensation on the unsmooth ultralow-frequency horizontal vibration table guide rail as a sampling time point, wherein ti serves as a sampling time point, uati serves as the output voltage of the calibrated sensor at the moment ti after compensation, uatti serves as the output voltage of the calibrated sensor before compensation, ugti is output voltage which is superposed on the calibrated sensor due to the unsmooth guide rail and is caused by a gravitational acceleration component, a formula II as shown in the specification is a sampling value of a formula III as shown in the specification at the moment ti, and SaH is a theoretical value of the sensitivity of the calibrated sensor. The method has the advantages that the calibration result deviation caused by the unsmooth guide rail can be corrected, and the precision of ultralow-frequency vibration and calibration is improved.
Description
Technical field
The present invention relates to the static compensation method of a kind of ultra-low-frequency horizontal to shaking table guide rail irregularity.
Technical background
Along with scientific and technical development, superlow frequency vibrating magnitude tracing problem is urgently to be resolved hurrily, if the measurement lower limit majority of all kinds of vibration transducers that is extensively present in the fields such as Aero-Space, building monitoring, earthquake prediction, resource exploration is lower than 0.1Hz, even be low to moderate zero-frequency, it is the prerequisite of it being carried out to correct application that the correlation properties of these ultralow frequency vibration-measuring sensors are carried out to accurate calibration, therefore, people are further urgent to the demand of superlow frequency vibrating calibration system.
Superlow frequency vibrating platform is the important component part of superlow frequency vibrating calibration system, its effect is to encourage being applied single shaft Stable State of Sine by school sensor, and guide rail needs all degree of freedom of constrained vibration platform moving component beyond direction of vibration, this just requires to keep within the scope of shaking table movement travel that guide rail is straight, the gap of guide rail and moving component is even, otherwise, the irregularity of guide rail can cause the pitching of shaking table moving component, thus make to be installed on it by the gravitational acceleration component that superposeed in the output of school sensor.Under ultralow frequency condition, the sinusoidal vibration component of acceleration being applied by Horizontal Vibration platform and the gravitational acceleration component being produced by moving component pitching (only refer in this patent that edge is by school sensitive axis of sensor direction, down together) amplitude is suitable, the calibration principle of single shaft Stable State of Sine excitation is not met, and also the extraction to signal and processing bring difficulty and deviation simultaneously.And to guarantee the straight of guide rail within the scope of movement travel, for short stroke shaking table, be easy to accomplish; But under ultralow frequency condition, for improving the signal to noise ratio (S/N ratio) of output vibration signal, often increase shaking table stroke (even reaching 1m), now be subject to the restriction of the technological levels such as processing, installation, this requirement will be difficult to meet, or it is very high to realize cost, this,, by having a strong impact on the precision of superlow frequency vibrating calibration, even also impacts the feasibility of carrying out superlow frequency vibrating calibration based on shaking table.
Summary of the invention
For reducing the impact of guide rail irregularity on superlow frequency vibrating calibration, can limit guide rail irregularity degree on the one hand, improve processing, the installation accuracy of guide rail, but be limited to current technological ability, be difficult to the space that has greatly improved; Can adopt on the other hand penalty method, the impact that guide rail irregularity is caused compensates.The present invention has proposed a kind of static compensation method easily and effectively, can be the acceleration transducer with zero-frequency response being carried out in vibration calibration process to shaking table based on ultra-low-frequency horizontal, the calibration result deviation being caused by guide rail irregularity is corrected, to improve the precision of superlow frequency vibrating calibration.
Ultra-low-frequency horizontal, to shaking table guide rail irregularity static compensation method, comprises the following steps:
(1), measure the guide rail irregularity static properties of ultra-low-frequency horizontal to shaking table, be expressed as:
Wherein,
for the signal of the reflection slide unit position of displacement transducer output,
xrepresent that slide unit is along the residing diverse location of direction of vibration,
s gra for the sensitivity of displacement transducer,
θbe slide unit at correspondence position
xplace, the slide unit angle of inclination being caused by guide rail irregularity;
(2), ultra-low-frequency horizontal is carried out to static compensation to shaking table guide rail irregularity, be expressed as:
, (formula 2)
Wherein,
t i represent sampling instant point,
u a (
t i ) represent by school sensor after compensation
t i the output voltage in moment,
u at (
t i ) represent compensation before by school sensor output voltage,
u g (
t i ) represent because guide rail irregularity is superimposed upon by the output voltage being caused by gravitational acceleration component on the sensor of school,
for
?
t i the sampled value in moment,
s aH by the theoretical value of school transducer sensitivity.
In formula 2 ± selection rule be: the direction of the gravitational acceleration component producing when positive slide unit angle of inclination with by school sensitive axis of sensor direction identical (being forward installation), slide unit tilt produce output voltage component be on the occasion of, in order to compensate this impact, get "-" number; If the direction of the gravitational acceleration component that positive slide unit angle of inclination produces with by school sensitive axis of sensor opposite direction (oppositely install), the tilt output voltage component of generation of slide unit is negative value, in order to compensate this impact, gets "+" number.
Further, in step (1), the method for measuring guide rail irregularity static properties comprises:
(1.1), the slide unit of superlow frequency vibrating platform is along guide rail movement, in the range of movement of slide unit at interval of preset distance static measurement and record the luffing angle of slide unit at current point
θ, this luffing angle
θtake horizontal direction as reference; The slide unit that synchronous acquisition displacement transducer records is at the position signalling of current point
u x ;
(1.2), set up guide rail irregularity performance equation, be expressed as:
Wherein,
,
xrepresent that slide unit is along the residing diverse location of direction of vibration,
s gra for the sensitivity of displacement transducer.
Further, in step (1.2), while gathering slide unit along the luffing angle of guide rail, make slide unit in range of movement along guide rail back and forth, gather the relational expressions that many group slide unit luffing angles change with guide rail position
, get each group of relational expression
mean value as guide rail irregularity performance equation
.
Further, the method that step (2) is carried out static compensation to ultra-low-frequency horizontal to shaking table guide rail irregularity comprises:
(2.1), Vibration on Start-up platform carries out full frequency band vibration calibration, synchronous acquisition is by the output signal of school sensor
u at (
t) and detect the output signal of the displacement transducer of slide unit displacement
u x (
t);
(2.2), calculate slide unit at current sampling point
t i the luffing angle at place
θ(
t i ), and then calculate the gravitational acceleration component that slide unit pitching produces
a g (
t i ), in the present invention, only refer to that edge is by school sensitive axis of sensor direction,
; (formula 3)
(2.3), establishing the high band average sensitivity that vibration calibration obtains is
s aH , calculate because guide rail irregularity is superimposed upon by the output voltage on the sensor of school
u g (
t i ),
(2.4), based on the principle of compensation, in the output of tested sensor, remove the output component that produced by slide unit pitching and can realize the compensation to superlow frequency vibrating calibration guide rail irregularity, be expressed as:
Wherein,
u at (
t i ),
u a (
t i ) be respectively sampled point
t i time, by the forward and backward output voltage of school sensor compensation;
(2.5), judge current sampling point
t i whether last sampled point, if so, completes by the vibration calibration of school sensor; If not, make slide unit move to next sampled point, and using this sampled point as current sampling point, repeating step (2.2)-(2.4); After record compensation by school sensor output sample sequence
u a (
t)={
u at (
t 1 ),
u at (
t 2 ) ...,
u at (
t i ), by this sample sequence according to calibration rule calculate after compensation by school acceleration transducer amplitude frequency curve, complete by the vibration calibration of school sensor.
Further, complete after static compensation, exchange by the installation direction of school sensor, repeating step (2.1)-(2.5), compensation effect before and after relatively exchanging, the installation direction of selecting sensitivity curve to approach theoretical value is most installed by school sensor, further improves the compensation effect of ultra-low-frequency horizontal to shaking table guide rail irregularity.
The invention has the advantages that:
(1), in the case of processing, the installation accuracy of shaking table guide rail be difficult to improve, realize ultra-low-frequency horizontal to shaking table the high-precision calibration to ultralow frequency acceleration transducer.
(2), utilize the mode of irregularity compensation to reduce the impact of guide rail irregularity on shaking table precision, have and realize conveniently, with low cost, the obvious advantage of guide rail irregularity compensation effect, can significantly reduce the requirement to guide precision to vibration calibration of high precision ultra-low-frequency horizontal.
Accompanying drawing explanation
Fig. 1 is installation composition figure of the present invention.
Fig. 2 is by school sensor motion brief acceleration analysis chart on irregularity guide rail.
Wherein,
gfor acceleration of gravity,
athe vibration acceleration applying for horizontal vibration platform,
a g for gravitational acceleration component (along by school sensitive axis of sensor direction),
θfor the luffing angle (take horizontal direction as reference) of horizontal vibration platform moving component.
Embodiment
The present embodiment is to adopt the luffing angle of two level measurement shaking table moving components (slide unit), and the real-time displacement that adopts linear grating chi to measure slide unit is example explanation, as illustrated in fig. 1 and 2.
Ultra-low-frequency horizontal, to shaking table guide rail irregularity static compensation method, comprises the following steps:
(1), measure the guide rail irregularity static properties of ultra-low-frequency horizontal to shaking table:
(1.1), two level meter 1 and 2 symmetries are placed on superlow frequency vibrating platform 3 slide units 4, promoting slide unit 4 moves along guide rail 5, in the whole range of movement of slide unit 4, at a certain distance, static measurement is also recorded the average luffing angle of the slide unit 4 of two level meters 1 and 2 outputs
θ(take horizontal direction as reference, lower same);
(1.2), in carrying out step (1.1), the slide unit 4 exact position signals that synchronous acquisition is exported by linear grating chi 6
u x ;
(1.3), slide unit 4 in range of movement back and forth, and repeating step (1.1) and (1.2), can obtain many group slide unit 4 positions and corresponding slide unit 4 luffing angle information, it is averaged, slide unit 4 luffing angles that can be caused by guide rail irregularity at guide rail 5 each point places, the irregularity performance that has reflected guide rail 5, is expressed as
, (formula 1)
Wherein,
the signal of reflection slide unit 4 positions of exporting for linear grating chi 6,
xrepresent that slide unit 4 is along the residing diverse location of direction of vibration,
s gra for the sensitivity of linear grating chi 6,
θ for slide unit 4 is at guide rail 5 correspondence positions
xplace, slide unit 4 angles of inclination that the guide rail irregularity being recorded by level meter 1 and 2 causes.
(2), ultra-low-frequency horizontal is to shaking table guide rail irregularity static compensation:
(2.1), remove level meter 1 and 2, Vibration on Start-up platform 3 carries out full frequency band vibration calibration, synchronous acquisition is by the output signal of school sensor 7
u at (
t) and detect linear grating chi 6 output signals of slide unit 4 displacements
u x (
t);
(2.2), to each sampled point
t i , will
u x (
t i ) bring the formula 1 that step (1.3) obtains into, calculate the luffing angle of this sample point slide unit 4
θ(
t i ), and then calculate the gravitational acceleration component (only referring in the present embodiment along by school sensitive axis of sensor direction, lower same) that slide unit 4 pitching produce
a g (
t i ),
(2.3), at high band (being greater than 0.1Hz), slide unit movement travel is shorter, can think the guide rail section of process be desirable smooth-going, in addition, the gravitational acceleration component that high band shaking table output vibration signal amplitude produces much larger than slide unit pitching, therefore, can think that guide rail irregularity does not exert an influence to high band vibration calibration.If the high band average sensitivity that vibration calibration obtains is
s aH (by the theoretical value of school transducer sensitivity), can calculate thus because guide rail irregularity is superimposed upon by the output voltage on school sensor 7
u g (
t i ),
(2.4), under the effect of guide rail irregularity, the level of being experienced by school sensor 7 comprises the component of acceleration being applied by drive coil and the gravitational acceleration component being produced by slide unit pitching to acceleration, wherein, the latter's existence has caused deviation to vibration calibration, particularly in the impact of ultralow frequency frequency range significantly.Therefore, based on the principle of compensation, in the output of tested sensor 7, remove the output component being produced by slide unit 4 pitching and can realize the compensation to superlow frequency vibrating calibration guide rail irregularity, can be expressed as:
Wherein,
u at (
t i ),
u a (
t i ) be respectively by school sensor 7 and compensate forward and backward output voltage.In formula ± selection rule: if the direction of the gravitational acceleration component that positive slide unit angle of inclination produces with by school sensor 7 sensitive axis directions identical (be forward installation), the output voltage component that slide unit 4 tilts to produce be on the occasion of, in order to compensate this impact, need to be by school sensor 7 output voltages
u at (
t i ) in deduct the output voltage component that step (2.3) obtains, get "-" number; If the direction of the gravitational acceleration component that positive slide unit angle of inclination produces with by school sensor 7 sensitive axis opposite directions (oppositely installation), the output voltage component that slide unit 4 tilts to produce is negative value, in order to compensate this impact, need to be by school sensor 7 output voltages
u at (
t i ) in add the output voltage component that step (2.3) obtains, get "+" number.
(2.5), to by each sampled point of the output signal of school sensor 7
u at (
t i ) compensate according to step (2.2)-(2.4), after can being compensated, exported sample sequence by school sensor 7
u a (
t), with this signal according to calibration rule calculate after compensation by the amplitude frequency curve of school acceleration transducer 7, complete by the vibration calibration of school sensor 7.
(3), exchange sensor 7 installation directions, repeating step (2) compensates guide rail irregularity, contrast installation direction is exchanged the compensation effect of front and back, the installation direction of selecting sensitivity curve to approach theoretical value is most installed by school sensor, further improves the compensation effect of ultra-low-frequency horizontal to shaking table 3 guide rail irregularities.
Ultra-low-frequency horizontal, to shaking table guide rail irregularity static compensation method, comprises the following steps:
(1), will by school sensor according to calibration rules be arranged on ultralow frequency standard level on shaking table slide unit, promote slide unit along guide rail movement, in the whole range of movement of slide unit at a certain distance, static measurement and record by the output signal of school sensor
u g , and the slide unit displacement signal of synchronized sampling linear grating chi output
u x , and repeatedly measure and average, what can obtain that guide rail each point place causes by guide rail irregularity is exported by school sensor device, is expressed as
u g =
ε(
u x ), (formula 1)
(2), ultra-low-frequency horizontal is to shaking table guide rail irregularity static compensation:
(2.1), Vibration on Start-up platform carries out full frequency band vibration calibration, synchronous acquisition is by the output signal of school sensor
u at (
t) and detect the linear grating chi output signal of slide unit displacement
u x (
t);
(2.2), to each sampled point
t i , will
u x (
t i ) bring the formula 1 that step (1) obtains into, calculate being exported by school sensor that this sample point slide unit pitching causes
u g (
t i );
(2.3), with step (2.4) in embodiment 1, based on the principle of compensation, in the output of tested sensor, remove the output component that produced by slide unit pitching and can realize the compensation to superlow frequency vibrating calibration guide rail irregularity, can be expressed as:
(formula 2)
Wherein,
u at (
t i ),
u a (
t i ) to be respectively compensation forward and backward by school sensor output voltage.
All the other steps, if slide unit is at the determining of the luffing angle of each sampled point, exchange identical with embodiment 1 to find the steps such as best installation direction by the installation direction of school sensor after static compensation.
Content described in this instructions embodiment is only enumerating of way of realization to inventive concept; protection scope of the present invention should not be regarded as only limiting to the concrete form that embodiment states, protection scope of the present invention also and conceive the equivalent technologies means that can expect according to the present invention in those skilled in the art.
Claims (5)
1. ultra-low-frequency horizontal, to shaking table guide rail irregularity static compensation method, comprises the following steps:
(1), measure the guide rail irregularity static properties of ultra-low-frequency horizontal to shaking table, be expressed as:
Wherein,
for the signal of the reflection slide unit position of displacement transducer output,
xrepresent that slide unit is along the residing diverse location of direction of vibration,
s gra for the sensitivity of displacement transducer,
θbe slide unit at correspondence position
xplace, the slide unit angle of inclination being caused by guide rail irregularity;
(2), ultra-low-frequency horizontal is carried out to static compensation to shaking table guide rail irregularity, be expressed as:
,
Wherein,
t i represent sampling instant point,
u a (
t i ) represent by school sensor after compensation
t i the output voltage in moment,
u at (
t i ) represent compensation before by school sensor output voltage,
u g (
t i ) represent because guide rail irregularity is superimposed upon by the output voltage being caused by gravitational acceleration component on the sensor of school,
for
?
t i the sampled value in moment,
s aH by the theoretical value of school transducer sensitivity.
2. ultra-low-frequency horizontal as claimed in claim 1, to shaking table guide rail irregularity static compensation method, is characterized in that: in step (1), the method for measuring guide rail irregularity static properties comprises:
(1.1), the slide unit of superlow frequency vibrating platform is along guide rail movement, in the range of movement of slide unit at interval of preset distance static measurement and record the luffing angle of slide unit at current point
θ, this luffing angle
θtake horizontal direction as reference; The slide unit that synchronous acquisition displacement transducer records is at the position signalling of current point
u x ;
(1.2), set up guide rail irregularity performance equation, be expressed as:
Wherein,
,
xrepresent that slide unit is along the residing diverse location of direction of vibration,
s gra for the sensitivity of displacement transducer.
3. ultra-low-frequency horizontal as claimed in claim 2 is to shaking table guide rail irregularity static compensation method, it is characterized in that: in step (1.2), while gathering slide unit along the luffing angle of guide rail, make slide unit in range of movement along guide rail back and forth, gather the relational expressions that many group slide unit luffing angles change with guide rail position
, get each group of relational expression
mean value as guide rail irregularity performance equation
.
4. ultra-low-frequency horizontal as claimed in claim 3, to shaking table guide rail irregularity static compensation method, is characterized in that: the method that step (2) is carried out static compensation to ultra-low-frequency horizontal to shaking table guide rail irregularity comprises:
(2.1), Vibration on Start-up platform carries out full frequency band vibration calibration, synchronous acquisition is by the output signal of school sensor
u at (
t) and detect the output signal of the displacement transducer of slide unit displacement
u x (
t);
(2.2), calculate slide unit at current sampling point
t i the luffing angle at place
θ(
t i ), and then calculate the gravitational acceleration component that slide unit pitching produces
a g (
t i ), in the present invention, only refer to that edge is by school sensitive axis of sensor direction,
;
(2.3), establishing the high band average sensitivity that vibration calibration obtains is
s aH , calculate because guide rail irregularity is superimposed upon by the output voltage on the sensor of school
u g (
t i ),
；
(2.4), based on the principle of compensation, in the output of tested sensor, remove the output component that produced by slide unit pitching and can realize the compensation to superlow frequency vibrating calibration guide rail irregularity, be expressed as:
Wherein,
u at (
t i ),
u a (
t i ) be respectively sampled point
t i time, by the forward and backward output voltage of school sensor compensation;
(2.5), judge current sampling point
t i whether last sampled point, if so, completes by the vibration calibration of school sensor; If not, make slide unit move to next sampled point, and using this sampled point as current sampling point, repeating step (2.2)-(2.4); After record compensation by school sensor output sample sequence
u a (
t)={
u at (
t 1 ),
u at (
t 2 ) ...,
u at (
t i ), by this sample sequence according to calibration rule calculate after compensation by school acceleration transducer amplitude frequency curve, complete by the vibration calibration of school sensor.
5. ultra-low-frequency horizontal as claimed in claim 4 is to shaking table guide rail irregularity static compensation method, it is characterized in that: complete after static compensation, exchange by the installation direction of school sensor, repeating step (2.1)-(2.5), compensation effect before and after relatively exchanging, the installation direction of selecting sensitivity curve to approach theoretical value is most installed by school sensor.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974155A (en) * | 2016-06-08 | 2016-09-28 | 中国工程物理研究院总体工程研究所 | Acceleration sensor low frequency calibration platform and usage method for the same |
| CN108196313A (en) * | 2018-01-22 | 2018-06-22 | 浙江大学 | The compensation method of shake table guide rail irregularity in a kind of very broadband seismometer dynamic calibration |
| CN109612569A (en) * | 2018-12-29 | 2019-04-12 | 中国计量科学研究院 | A kind of long stroke shake table rail bends modification method of laser interferance method low-frequency vibration calibration |
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| US3913389A (en) * | 1974-07-29 | 1975-10-21 | Mts System Corp | Overturning moment compensation in a multiple actuator control of a rigid table |
| CN100437054C (en) * | 2006-03-09 | 2008-11-26 | 中国计量科学研究院 | Calibration measurement method and system for single-frequency steady-state sine machinery vibrating amplitude phase characteristic |
| CN101806617B (en) * | 2010-03-30 | 2012-12-12 | 浙江大学 | Traction preventing device for sliding table of long-stroke horizontal vibrating table |
| JP2011220841A (en) * | 2010-04-09 | 2011-11-04 | Mitsutoyo Corp | Calibration method for detector and detecting device |
| CN101968380B (en) * | 2010-09-26 | 2012-09-26 | 中国计量科学研究院 | Ultralow frequency vibration measurer calibration system and laser interferometer thereof |
| CN102288282B (en) * | 2011-05-04 | 2012-10-31 | 浙江大学 | Vibration table system with feedback control device based on linear optical grating ruler |
| CN102322944B (en) * | 2011-08-14 | 2013-01-16 | 浙江大学 | Tricomponent vibration calibrating device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974155A (en) * | 2016-06-08 | 2016-09-28 | 中国工程物理研究院总体工程研究所 | Acceleration sensor low frequency calibration platform and usage method for the same |
| CN108196313A (en) * | 2018-01-22 | 2018-06-22 | 浙江大学 | The compensation method of shake table guide rail irregularity in a kind of very broadband seismometer dynamic calibration |
| CN108196313B (en) * | 2018-01-22 | 2019-11-05 | 浙江大学 | The compensation method of shake table guide rail irregularity in a kind of very broadband seismometer dynamic calibration |
| CN109612569A (en) * | 2018-12-29 | 2019-04-12 | 中国计量科学研究院 | A kind of long stroke shake table rail bends modification method of laser interferance method low-frequency vibration calibration |
| CN109612569B (en) * | 2018-12-29 | 2021-04-09 | 中国计量科学研究院 | Long-stroke vibration table guide rail bending correction method for low-frequency vibration calibration by laser interferometry |
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