CN104634280A - Method for measuring absolute angle and rotating angle of universal horizontal turntable - Google Patents
Method for measuring absolute angle and rotating angle of universal horizontal turntable Download PDFInfo
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- CN104634280A CN104634280A CN201510054221.1A CN201510054221A CN104634280A CN 104634280 A CN104634280 A CN 104634280A CN 201510054221 A CN201510054221 A CN 201510054221A CN 104634280 A CN104634280 A CN 104634280A
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- angle
- general level
- catoptron
- level turntable
- absolute angle
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Abstract
The invention relates to a method for measuring absolute angle and rotating angle of a universal horizontal turntable. A measuring system comprises a broadband light source, an aperture stop, a light splitting mirror, a reflective diffraction grating, a plane mirror pair, a focusing lens, a fiber optic spectrometer and a calculation module. The method comprises the following steps of enabling the broadband light source to output a light beam, enabling the light beam to penetrate through the light splitting mirror and the plane mirror, and diffracting and returning the light beam by the grating; reflecting and sampling the diffraction light by the light splitting mirror, focusing by the lens, and enabling the light to enter the fiber optic spectrometer; enabling the fiber optic spectrometer to collect the spectrum information; enabling the computer to determine an incident angle of an incident light beam on the grating according to the wavelength of the collected spectrum peak, namely the absolute angle between the incident light beam and the reflective diffraction grating; determining the initial angle of the universal horizontal turntable, rotating the universal horizontal turntable, and determining the rotating angle and the absolute angle according to the change of the peak wavelength. The method has the advantages that the method is especially suitable for the precision correction and measurement of the rotating angle and the absolute angle in industries and scientific research; the operation is simple, the angle measuring range is wide, the range accuracy is high, and the like.
Description
Technical field
The present invention relates to field of measuring technique, particularly the measuring method of a kind of general level turntable absolute angle and the anglec of rotation.The present invention has simple to operate, and measurement of angle scope is wide, range accuracy advantages of higher.
Background technology
Along with the development of manufacturing technology, the indexing accuracy of extra accuracy rotary table can be lower than, but this rotary table cost is higher, and difficulty of processing is also larger; And general horizontal revolving stage cost is lower, but indexing accuracy only has, therefore needing the measuring method of a kind of high-precision general level turntable absolute angle and the anglec of rotation badly, for measuring low precision general level turntable absolute angle and the anglec of rotation, making them have higher operating accuracy.
In the calibration technique of existing mechanical angle, Renishaw company of Britain by combinations such as the low-angle annex of laser interferometer and end-toothed discs, for the detection of rotary table positional precision.But in actual use, the rotation due to end-toothed disc needs a reciprocal upper and lower motion, measure laser beam and not easily aim at.The scientific research personnel of Beijing Information Science & Technology University proposes the method using photoelectric auto-collimator to measure rotary table positioning precision, make NC rotary table together with angular optical polygon around NC rotary table coaxial rotating, the pixel distance collected is substituted into and by two-frequency laser interferometer, photoelectric auto-collimator is demarcated and obtain angle calibration formula, thus calculate the error of the anglec of rotation.This method timing signal will use double-frequency interference instrument, and laser interferometer side angle scope is little, requires harsh, cannot be widely used in turntable measurement of angle environment for use.
In high precision scientific experiment especially in the compressor reducer of grating pair composition, have very high requirement to beam incident angle degree, existing method adopts protractor to determine beam incident angle, and operation is too simple, and application condition is large.
Therefore, the measuring method of a kind of simple to operate, general level turntable absolute angle that precision is high and the anglec of rotation is needed.
Summary of the invention
In order to overcome above-mentioned the deficiencies in the prior art, the invention provides the measuring method of a kind of general level turntable absolute angle and the anglec of rotation.The method is specially adapted to fine adjustment and the measurement of absolute angle and the anglec of rotation in industry and scientific research, has simple to operate, and measurement of angle scope is wide, range accuracy advantages of higher.
Technical solution of the present invention is as follows:
A measuring method for general level turntable absolute angle and the anglec of rotation, is characterized in that the method comprises the steps:
1) optical path is set up: this optical path comprises wideband light source, Laser output direction along this wideband light source is aperture diaphragm successively, attenuator, spectroscope, first catoptron, second catoptron, pyramid, the second catoptron successively through the reflected light direction of described pyramid, first catoptron, spectroscope, condenser lens, probe, optical fiber, fiber spectrometer, the output terminal of described fiber spectrometer is connected with the input end of computing machine, fiber spectrometer survey record wideband light source described in utilization exports the spectrum of light, finely tune the spectral intensity that the first catoptron and the second catoptron make described fiber spectrometer record maximum,
2) remove pyramid, rotary horizontal revolving stage is to zero graduation position, and number of revolutions n is designated as zero, i.e. n=0, now general level turntable initial angle θ
0=0, reflective diffraction gratings is placed on described general level turntable, and the grating fringe of described reflective diffraction gratings is perpendicular to the table top of general level turntable, the reflective diffraction gratings described in adjustment relative to the angular pose of the second catoptron output light path until described fiber spectrometer records the sharp-pointed spectral signal meeting Littrow angle condition;
3) initial angle of described reflective diffraction gratings grating is determined: computing machine utilizes following grating equation
Calculate now the second catoptron output light path relative to the incident angle of described reflective diffraction gratings:
Wherein, d is grating constant, λ
1for peak wavelength,
for Littrow angle, i.e. the incident angle of the now relative second catoptron output light path of reflective diffraction gratings;
4) calculate measurement of absolute angle value: the number of revolutions of the general level turntable described in order is n=n+1, the non-zero graduation place of general level turntable to the n-th described in rotating for n-th time, corresponding scale value is α
n, described fiber spectrometer will record another peak wavelength λ
2, computing machine goes out the anglec of rotation Δ θ of n-th time of general level turntable by following formulae discovery
n:
Δθ
n＝arcsin(λ
2/2d)-arcsin(λ
1/2d)
The anglec of rotation of accumulation
The measurement of absolute angle value θ that n-th non-zero graduation of described general level turntable is corresponding
nfor initial angle θ
0with the anglec of rotation Δ θ sum of accumulation;
5) by step 4) measurement of absolute angle value θ that the n-th non-zero graduation of obtaining is corresponding
nwith the n-th scale value α of general level turntable
nrelatively, described general level turntable n-th scale value θ is obtained
nwith measurement of absolute angle value α
nerror;
6) peak wavelength of the fiber spectrometer described in order is λ
1when the spectral signal that described fiber spectrometer records is when a lateral edges of described wideband light source spectral range, then adjust the first catoptron or the second catoptron, until the spectral signal that fiber spectrometer records is near the opposite side edge of wideband light source spectral range, the peak wavelength again recording described fiber spectrometer is λ
1;
7) step 4 is returned), until complete the measurement of 360 degree of absolute angle of described general level turntable;
8) with described general level turntable scale value for horizontal ordinate, corresponding measurement of absolute angle value is ordinate, and make experiment curv, the anglec of rotation Δ θ between any two scales of described general level turntable equals the difference of corresponding ordinate.
Compared with prior art, the invention has the beneficial effects as follows and solve laser interferometer complicated operation, harsh deficiency is required to environment for use, overcomes the shortcoming that in high precision scientific experiment, protractor precision is not high simultaneously.The principle of the invention is simple, is easy to realize, and effectively can realize the measurement of general level turntable absolute angle and the anglec of rotation, measuring error is lower than 1.3 ", and error constantly can not add up with the rotation of general level turntable.If the resolution improving spectrometer further or the wideband light source using wavelength shorter, then measuring accuracy can further improve, in commercial production and high precision scientific experiment, have certain using value.
Accompanying drawing explanation
Fig. 1 is the schematic diagram utilizing pyramid determination measurement mechanism relative position and angle.
Fig. 2 is the structural drawing of general level turntable absolute angle and rotating angle measurement apparatus.
Fig. 3 shows level crossing to the principle increasing light beam incident angle on grating.
Fig. 4 shows level crossing to the principle reducing light beam incident angle on grating.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described, and wherein identical label represents identical parts all the time, describes these embodiments below with reference to the accompanying drawings to explain the present invention.
The measuring method of general level turntable absolute angle of the present invention and the anglec of rotation, comprises the following steps:
1) Fig. 1 is the schematic diagram utilizing pyramid determination measurement mechanism relative position and angle: this optical path comprises wideband light source 1, Laser output direction along this wideband light source 1 is aperture diaphragm 2 successively, attenuator 3, spectroscope 4, first catoptron 5, second catoptron 6, pyramid 7, the second catoptron 6 successively through the reflected light direction of described pyramid 7, first catoptron 5, spectroscope 4, condenser lens 10, probe 11, optical fiber 12, fiber spectrometer 13, the output terminal of described fiber spectrometer 13 is connected with the input end of computing machine 14, fiber spectrometer 13 survey record wideband light source 1 described in utilization exports the spectrum of light, finely tune the spectral intensity that the first catoptron 5 and the second catoptron 6 make described fiber spectrometer 13 record maximum,
2) as shown in Figure 2, remove pyramid 7, rotary horizontal revolving stage is to zero graduation position, and number of revolutions n is designated as zero, i.e. n=0, now general level turntable initial angle θ
0=0, reflective diffraction gratings 8 is placed on described general level turntable 9, and the grating fringe of described reflective diffraction gratings 8 is perpendicular to the table top of general level turntable 9, the angular pose of relative second catoptron 6 output light path of the reflective diffraction gratings 8 described in adjustment is until described fiber spectrometer 13 records the sharp-pointed spectral signal meeting Littrow angle condition;
3) initial angle of described reflective diffraction gratings 8 grating is determined: computing machine 14 utilizes following grating equation
Calculate now the second catoptron 6 output light path relative to the incident angle of described reflective diffraction gratings 8:
Wherein, d is grating constant, λ
1for peak wavelength,
for Littrow angle, i.e. the incident angle of now relative second catoptron 6 output light path of reflective diffraction gratings 8;
4) calculate measurement of absolute angle value: the number of revolutions of the general level turntable 9 described in order is n=n+1, the non-zero graduation place of general level turntable 9 to the n-th described in rotating for n-th time, corresponding scale value is α
n, described fiber spectrometer 13 will record another peak wavelength λ
2, computing machine 14 goes out the anglec of rotation Δ θ of n-th time of general level turntable 9 by following formulae discovery
n:
Δθ
n＝arcsin(λ
2/2d)-arcsin(λ
1/2d)
The anglec of rotation of accumulation
The measurement of absolute angle value θ that n-th non-zero graduation of described general level turntable 9 is corresponding
nfor initial angle θ
0with the anglec of rotation Δ θ sum of accumulation;
5) by step 4) measurement of absolute angle value θ that the n-th non-zero graduation of obtaining is corresponding
nwith the n-th scale value α of general level turntable 9
nrelatively, described general level turntable 9 n-th scale value θ is obtained
nwith measurement of absolute angle value α
nerror;
6) peak wavelength of the fiber spectrometer 13 described in order is λ
1when the spectral signal that described fiber spectrometer 13 records is when a lateral edges of described wideband light source 1 spectral range, then adjust the first catoptron 5 or the second catoptron 6, until the spectral signal that fiber spectrometer 13 records is near the opposite side edge of wideband light source 1 spectral range, the peak wavelength again recording described fiber spectrometer 13 is λ
1;
7) step 4 is returned), until complete the measurement of 360 degree of absolute angle of described general level turntable 9;
8) with described general level turntable 9 scale value for horizontal ordinate, corresponding measurement of absolute angle value is ordinate, and make experiment curv, the anglec of rotation Δ θ between any two scales of described general level turntable 9 equals the difference of corresponding ordinate.
9) in order to improve measuring accuracy, can use the high resolution spectrometer (HR4000) that U.S. Ocean Optics provides, wavelength measurement precision is minimum is 0.02nm.
The present invention can be mainly used in the following aspects:
1. the measurement of the general level turntable anglec of rotation and absolute angle;
2. the correction of the anglec of rotation and absolute angle and measurement in high precision scientific experiment.
The method is specially adapted to fine adjustment and the measurement of absolute angle and the anglec of rotation in industry and scientific research, has simple to operate, and measurement of angle scope is wide, range accuracy advantages of higher.
Although specifically describe with reference to exemplary embodiment of the present invention and show the present invention, but will be understood by those skilled in the art that, when not departing from the spirit and scope of the present invention be defined by the claims, the various changes of form and details can be carried out to it.
Claims (1)
1. a measuring method for general level turntable absolute angle and the anglec of rotation, is characterized in that the method comprises the steps:
1) optical path is set up: this optical path comprises wideband light source (1), Laser output direction along this wideband light source (1) is aperture diaphragm (2) successively, attenuator (3), spectroscope (4), first catoptron (5), second catoptron (6), pyramid (7), the second catoptron (6) successively through the reflected light direction of described pyramid (7), first catoptron (5), spectroscope (4), condenser lens (10), probe (11), optical fiber (12), fiber spectrometer (13), the output terminal of described fiber spectrometer (13) is connected with the input end of computing machine (14), fiber spectrometer (13) survey record wideband light source (1) described in utilization exports the spectrum of light, finely tune the spectral intensity that the first catoptron (5) and the second catoptron (6) make described fiber spectrometer (13) record maximum,
2) remove pyramid (7), rotary horizontal revolving stage is to zero graduation position, and number of revolutions n is designated as zero, i.e. n=0, now general level turntable initial angle θ
0=0, reflective diffraction gratings (8) is placed on described general level turntable (9), and the grating fringe of described reflective diffraction gratings (8) is perpendicular to the table top of general level turntable (9), the angular pose of reflective diffraction gratings (8) relative second catoptron (6) output light path described in adjustment is until described fiber spectrometer (13) records the sharp-pointed spectral signal meeting Littrow angle condition;
3) initial angle of described reflective diffraction gratings (8) grating is determined: computing machine (14) utilizes following grating equation
Calculate now the second catoptron (6) output light path relative to the incident angle of described reflective diffraction gratings (8):
Wherein, d is grating constant, λ
1for peak wavelength,
for Littrow angle, i.e. the incident angle of now reflective diffraction gratings (8) relative second catoptron (6) output light path;
4) calculate measurement of absolute angle value: the number of revolutions of the general level turntable (9) described in order is n=n+1, the general level turntable (9) described in rotating for n-th time is to the n-th non-zero graduation place, and corresponding scale value is α
n, described fiber spectrometer (13) will record another peak wavelength λ
2, computing machine (14) goes out the anglec of rotation Δ θ of n-th time of general level turntable (9) by following formulae discovery
n:
Δθ
n＝arcsin(λ
2/2d)-arcsin(λ
1/2d)
The anglec of rotation of accumulation
The measurement of absolute angle value θ that n-th non-zero graduation of described general level turntable (9) is corresponding
nfor initial angle θ
0with the anglec of rotation Δ θ sum of accumulation;
5) by step 4) measurement of absolute angle value θ that the n-th non-zero graduation of obtaining is corresponding
nwith the n-th scale value α of general level turntable (9)
nrelatively, described general level turntable (9) n-th scale value θ is obtained
nwith measurement of absolute angle value α
nerror;
6) peak wavelength of the fiber spectrometer (13) described in order is λ
1when the spectral signal that described fiber spectrometer (13) records is when a lateral edges of described wideband light source (1) spectral range, then adjust the first catoptron (5) or the second catoptron (6), until the spectral signal that fiber spectrometer (13) records is near the opposite side edge of wideband light source (1) spectral range, the peak wavelength again recording described fiber spectrometer (13) is λ
1;
7) step 4 is returned), until complete the measurement of 360 degree of absolute angle of described general level turntable (9);
8) with described general level turntable (9) scale value for horizontal ordinate, corresponding measurement of absolute angle value is ordinate, make experiment curv, the anglec of rotation Δ θ between any two scales of described general level turntable (9) equals the difference of corresponding ordinate.
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| CN104985483A (en) * | 2015-06-05 | 2015-10-21 | 南京工程学院 | Method for improving on-machine measuring precision of pitch deviation of large-sized gears |
| CN105259667A (en) * | 2015-11-09 | 2016-01-20 | 中国科学院上海光学精密机械研究所 | An adjusting method for a cylindrical surface stretcher grating pair |
| CN105675133A (en) * | 2016-01-12 | 2016-06-15 | 天津纳正科技有限公司 | Mini portable spectrometer |
| CN106525412A (en) * | 2016-12-27 | 2017-03-22 | 青海华鼎装备制造有限公司 | Overall performance detection platform for rotary table part and detection method thereof |
| CN107179059A (en) * | 2016-03-11 | 2017-09-19 | 罗伯特·博世有限公司 | Method and light-emitting device for determining angle error |
| WO2018040531A1 (en) * | 2016-08-30 | 2018-03-08 | 深圳市中图仪器股份有限公司 | Angle measurement and calibration device and system for laser interferometer |
| CN107991506A (en) * | 2017-10-26 | 2018-05-04 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of device and test method for testing pendulum scarnning mirror speed and uniformity |
| CN108444433A (en) * | 2018-03-07 | 2018-08-24 | 太原理工大学 | Turntable angular errors detection device based on face type benchmark and method |
| CN108759723A (en) * | 2018-07-23 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | optical angle measurement method |
| CN113280742A (en) * | 2021-06-03 | 2021-08-20 | 华北水利水电大学 | Height test sensing system based on plane diffraction grating |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104985483A (en) * | 2015-06-05 | 2015-10-21 | 南京工程学院 | Method for improving on-machine measuring precision of pitch deviation of large-sized gears |
| CN105259667A (en) * | 2015-11-09 | 2016-01-20 | 中国科学院上海光学精密机械研究所 | An adjusting method for a cylindrical surface stretcher grating pair |
| CN105675133A (en) * | 2016-01-12 | 2016-06-15 | 天津纳正科技有限公司 | Mini portable spectrometer |
| CN107179059B (en) * | 2016-03-11 | 2020-11-17 | 罗伯特·博世有限公司 | Method for determining an angular error and light emitting device |
| CN107179059A (en) * | 2016-03-11 | 2017-09-19 | 罗伯特·博世有限公司 | Method and light-emitting device for determining angle error |
| WO2018040531A1 (en) * | 2016-08-30 | 2018-03-08 | 深圳市中图仪器股份有限公司 | Angle measurement and calibration device and system for laser interferometer |
| CN106525412B (en) * | 2016-12-27 | 2019-03-15 | 青海华鼎装备制造有限公司 | A kind of rotary table component comprehensive performance detection platform and detection method |
| CN106525412A (en) * | 2016-12-27 | 2017-03-22 | 青海华鼎装备制造有限公司 | Overall performance detection platform for rotary table part and detection method thereof |
| CN107991506A (en) * | 2017-10-26 | 2018-05-04 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of device and test method for testing pendulum scarnning mirror speed and uniformity |
| CN108444433A (en) * | 2018-03-07 | 2018-08-24 | 太原理工大学 | Turntable angular errors detection device based on face type benchmark and method |
| CN108759723A (en) * | 2018-07-23 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | optical angle measurement method |
| CN108759723B (en) * | 2018-07-23 | 2020-01-31 | 中国工程物理研究院激光聚变研究中心 | Optical angle measuring method |
| CN113280742A (en) * | 2021-06-03 | 2021-08-20 | 华北水利水电大学 | Height test sensing system based on plane diffraction grating |
| CN113280742B (en) * | 2021-06-03 | 2022-06-10 | 华北水利水电大学 | Height test sensing system based on plane diffraction grating |
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