TW200600750A - A diffraction type angle positioning five-degree-of-freedom measuring apparatus - Google Patents
A diffraction type angle positioning five-degree-of-freedom measuring apparatusInfo
- Publication number
- TW200600750A TW200600750A TW093119558A TW93119558A TW200600750A TW 200600750 A TW200600750 A TW 200600750A TW 093119558 A TW093119558 A TW 093119558A TW 93119558 A TW93119558 A TW 93119558A TW 200600750 A TW200600750 A TW 200600750A
- Authority
- TW
- Taiwan
- Prior art keywords
- degree
- measuring apparatus
- angle positioning
- type angle
- diffraction type
- Prior art date
Links
Abstract
The invented diffraction type angle positioning five-degree-of-freedom measuring apparatus, which applies optical interference and diffraction principle, includes a light source, a reflective cylinder diffraction grating, three beam splitters, two location sensors, a lens set, a photodiode array, and a revolving disc to be measured, wherein the photodiode array detects variations of interference strips to measure the angular displacement variation, and the two location sensors detect four position variations so as to measure two tilt angular errors and two radial errors of the revolving disc to be measured.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93119558A TWI249609B (en) | 2004-06-30 | 2004-06-30 | Diffractive positioning 5-degree of freedom measuring device that uses optical interference and diffractive theories |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93119558A TWI249609B (en) | 2004-06-30 | 2004-06-30 | Diffractive positioning 5-degree of freedom measuring device that uses optical interference and diffractive theories |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200600750A true TW200600750A (en) | 2006-01-01 |
TWI249609B TWI249609B (en) | 2006-02-21 |
Family
ID=37430163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93119558A TWI249609B (en) | 2004-06-30 | 2004-06-30 | Diffractive positioning 5-degree of freedom measuring device that uses optical interference and diffractive theories |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI249609B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104634280A (en) * | 2015-02-03 | 2015-05-20 | 中国科学院上海光学精密机械研究所 | Method for measuring absolute angle and rotating angle of universal horizontal turntable |
CN111504184A (en) * | 2020-04-22 | 2020-08-07 | 荆亮 | Calibration method and calibration system for double-line laser measurement |
CN112083633A (en) * | 2020-09-30 | 2020-12-15 | 上海集成电路研发中心有限公司 | Photoetching device |
-
2004
- 2004-06-30 TW TW93119558A patent/TWI249609B/en not_active IP Right Cessation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104634280A (en) * | 2015-02-03 | 2015-05-20 | 中国科学院上海光学精密机械研究所 | Method for measuring absolute angle and rotating angle of universal horizontal turntable |
CN104634280B (en) * | 2015-02-03 | 2017-09-12 | 中国科学院上海光学精密机械研究所 | The measuring method of general level turntable absolute angle and the anglec of rotation |
CN111504184A (en) * | 2020-04-22 | 2020-08-07 | 荆亮 | Calibration method and calibration system for double-line laser measurement |
CN111504184B (en) * | 2020-04-22 | 2022-04-22 | 荆亮 | Calibration method and calibration system for double-line laser measurement |
CN112083633A (en) * | 2020-09-30 | 2020-12-15 | 上海集成电路研发中心有限公司 | Photoetching device |
Also Published As
Publication number | Publication date |
---|---|
TWI249609B (en) | 2006-02-21 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |