CN205879111U - Laser interferometer's angular surveying calibrating device and system - Google Patents
Laser interferometer's angular surveying calibrating device and system Download PDFInfo
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- CN205879111U CN205879111U CN201621011800.4U CN201621011800U CN205879111U CN 205879111 U CN205879111 U CN 205879111U CN 201621011800 U CN201621011800 U CN 201621011800U CN 205879111 U CN205879111 U CN 205879111U
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- angle
- laser interferometer
- angular surveying
- turntable
- calibrating installation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model provides a laser interferometer's angular surveying calibrating device and system, laser interferometer's angular surveying calibrating device includes: laser head, angle interferoscope, angle speculum, revolving stage hanging wall, revolving stage lower wall and revolving stage base, the angle interferoscope set up in between laser head and the angle speculum, the angle speculum set up in on the revolving stage hanging wall, the revolving stage hanging wall set up in on the revolving stage lower wall, the revolving stage base is provided with the recess, the revolving stage lower wall pass through the recess set up in on the revolving stage base. The utility model discloses the structure is accurate, and standard angle error is little, can calibrate initial zero -bit angle through initiatively generating certain declination, the declination can come the initiative to generate through angle grating and drive member, and the angle that should generate is comparatively accurate, on this basis, can also calibrate the constant of initial electrical error of null position and angle speculum simultaneously at the in -process of calibration, simplify laser interferometer's calibration steps, improve calibration efficiency.
Description
Technical field
This utility model relates to a kind of angle calibration system device, particularly relates to the angular surveying calibration cartridge of a kind of laser interferometer
Put, and relate to the angular surveying calibration system including the angular surveying calibrating installation of this laser interferometer.
Background technology
Laser interferometer measure angle time, optical path and principle as depicted in figs. 1 and 2, the laser that laser head 1 sends
It is divided into two-way, two prism of corner cubes being respectively directed in angled mirrors 3 in angle interferoscope 2；When angled mirrors 3 is overall
During rotational angle α, the optical path difference of the two-beam being reflected back due to prism of corner cube changes δ, and measuring transmission function is: α=
arcsin(δ/A)。
In measuring transmission function alpha=arcsin (δ/A), α=0, δ=0 are the initial point 0 of function, and this means that beginning
Angled mirrors 3 must be adjusted during measurement, make incident laser be perpendicular to the cone line of two prism of corner cubes of angled mirrors 3,
The i.e. optical centreline of angled mirrors 3.This is difficult to when practical operation.As it is shown on figure 3, owing to instrument is installed not
Accurately, when measuring beginning there is angle excursion α 0 in angled mirrors 3, and this angle excursion α 0 is referred to as the initial error of zero, if
Now reset by the reading of angled mirrors 3 in laser interferometer software system, then system operates in α=α0, δ=δ0(δ0=
arcsinα0) in coordinate system (0 ').Angled mirrors 3 rotation β angle (in 0 ' coordinate system) during measurement, and calculated angle
It is the β in 0 coordinate system0, it is clear that β-β0For initial error of zero α0The measurement error caused, as shown in Figure 3.
The initial error of zero eliminating angled mirrors 3 in production scene is extremely difficult, generally anti-by adjusting angle
Penetrating mirror 3 makes its surface reflection overlap with incident illumination.But owing to the surface of angled mirrors 3 is typically coated with anti-reflection film, reflection
Light is the faintest, in order to increase the intensity of reflection light, it is possible to use a piece of plane mirror to be attached to angled mirrors 3 surface so that it is anti-
Face of penetrating is parallel with the optical centreline of angled mirrors 3, and with this face as reference, adjusts the direction of angled mirrors 3.But it is real
In the operation of border, the optical centreline of angled mirrors 3 is difficult to determine.Adopt and be difficult to determine the error of zero, ideal situation in this way
Lower meeting causes the measurement error of the most several seconds.
In measuring transmission function, measure angle closely related with the constant A of angled mirrors 3.If measurement is transmitted
Functional expression differential,The design load of such as A takes 30mm, by calculating when 10 °, different
The error that dA causes: during dA=0.18mm, then d α=216 ", error is 0.6%；During dA=0.06mm, then d α=72 ", error
It is 0.2%；The scale error of angled mirrors 3 constant A directly affects the uncertainty of laser interferometer angular surveying obviously.
In reality is measured, it is frequently utilized that and from turntable with a scale, the constant A of angled mirrors 3 is calibrated, but
Tested turntable must be with identical special angle opposite direction rotating with from turntable with a scale, or calibration steps is complicated, or calculates
Formula and data processing method there is also mistake, can cause new personal error.As in Patent No. CN101236076A to just
The constant A compensating factor of the beginning error of zero and angled mirrors 3 calculates and exists for mistake, and reflecting mirror is suitable from initial zero position error dot
Hour hands turn over θ, forward φ counterclockwise to, and the calculating of its actual optical path difference exists mistake and causes whole mistake in computation, by its computing formulaObtainIts light path
Difference computing formula is Asin θ=τ Asin ρ-τ Asin α0With-Asin φ=τ Asin γ-τ Asin α0, the geometric meaning of this two formula and
The physical process of actual change in optical path length is not inconsistent, actual turn clockwise θ time change in optical path length should be for τ Asin (α0+θ)-τAsinα0
=Asin ρ, when rotating φ angle counterclockwise, light path variable quantity should be τ Asin (α0-φ)-τAsinα0=Asin γ, thus its zero
Position compensates the compensating factor final result of angle and reflecting mirror constant and all there is certain mistake.
Therefore, there is following shortcoming in prior art: the first, calibration process is complicated, data process trouble, calibration essence
Spend limited；There is mistake in the second, calibration calculations formula, it is bigger that data process error；3rd, the standard angle of design in calibration system
Degree, size is difficult to ensure that accurately, owing to the tolerance mechanically made, latch or V groove embed to guarantee fixture, meeting
Having certain tolerance, but the angular error that this tolerance is brought is very important in accurately measuring, this references angle is the most necessary
Repetitive measurement takes average and just can determine that, poor accuracy.
Summary of the invention
Technical problem to be solved in the utility model is to need to provide a kind of simple in construction, and standard angle error is little, and
And the angular surveying calibrating installation of the laser interferometer of calibration efficiency can be improved, and provide the angle including this laser interferometer
Degree measures the angular surveying calibration system of calibrating installation.
To this, this utility model provides the angular surveying calibrating installation of a kind of laser interferometer, including: laser head, angle
Dish, turntable lower wall and turret base on interferoscope, angled mirrors, turntable, described angle interferoscope is arranged at described laser head
With between angled mirrors, described angled mirrors is arranged on described turntable on dish, on described turntable, dish is arranged at described turning
On platform lower wall；Described turret base is provided with groove, and described turntable lower wall is arranged in described turret base by groove.
Further improvement of the utility model is, described turret base is provided with connector, and described turret base is passed through
Connector is fixed on the tested turntable of outside.
Further improvement of the utility model is, described connector includes bolt hole and/or screw hole.
Further improvement of the utility model is, also includes that rotating shaft and drive member, described rotating shaft are fixedly installed on institute
Stating the lower section of dish on turntable, described drive member is connected with described rotating shaft.
Further improvement of the utility model is, described drive member is motor.
Further improvement of the utility model is, described drive member is fixedly installed on the inside of described turntable lower wall.
Further improvement of the utility model is, also includes that angle grating, described angle grating are arranged at described rotating shaft
Lower section.
Further improvement of the utility model is, also includes control system, described control system respectively with described angle
Grating is connected with drive member.
Further improvement of the utility model is, also includes wireless signal receiver, and described reception of wireless signals fills
Install the inside being placed in described turntable lower wall.
This utility model also provides for the angular surveying calibration system of a kind of laser interferometer, includes laser as above
The angular surveying calibrating installation of interferometer, and include data processing equipment, described data processing equipment realizes with described laser head
Communication.
Compared with prior art, the beneficial effects of the utility model are: precise structure, and standard angle error is little, it is possible to
Calibrating initial zero position angle by actively generating certain drift angle, described drift angle can be come actively by angle grating and drive member
Generating, the angle of this generation is the most accurate；On this basis, initial zero position error can also be calibrated during calibration simultaneously
With the constant of angled mirrors, simplify the calibration steps of laser interferometer, improve its calibration efficiency.
Accompanying drawing explanation
Fig. 1 is the angular surveying light path principle figure of laser interferometer in prior art；
Fig. 2 is the angular surveying principle schematic of laser interferometer in prior art；
Fig. 3 is the initial error of zero principle schematic of laser interferometer in prior art；
Fig. 4 is the system structure schematic diagram of a kind of embodiment of this utility model；
Fig. 5 is the turntable cross-sectional view of a kind of embodiment of this utility model；
Fig. 6 is the angle calibration system principle schematic that in a kind of embodiment of this utility model, angled mirrors rotates counterclockwise；
Fig. 7 is the angle calibration system principle schematic that in a kind of embodiment of this utility model, angled mirrors turns clockwise.
Detailed description of the invention
Below in conjunction with the accompanying drawings, preferably embodiment of the present utility model is described in further detail.
As shown in Figure 4 and Figure 5, this example provides the angular surveying calibrating installation of a kind of laser interferometer, including: laser head 1,
Dish 4, turntable lower wall 5 and turret base 6 on angle interferoscope 2, angled mirrors 3, turntable, described angle interferoscope 2 is arranged at
Between described laser head 1 and angled mirrors 3, described angled mirrors 3 is arranged on described turntable on dish 4, on described turntable
Dish 4 is arranged on described turntable lower wall 5；Described turret base 6 is provided with groove, and described turntable lower wall 5 is arranged at by groove
In described turret base 6.
Turret base 6 described in this example is provided with connector 7, and described turret base 6 can be fixed to outside by connector 7
Other tested turntables on, improve its use motility.Described connector 7 preferably includes bolt hole and/or screw hole.
As it is shown in figure 5, this example also includes rotating shaft 9, drive member 10, angle grating 11 and control system 12, described rotating shaft 9
Being fixedly installed on the lower section of dish 4 on described turntable, described drive member 10 is connected with described rotating shaft 9, described drive member 10
Being preferably motor, described drive member 10 is fixedly installed on the inside of described turntable lower wall 5；Described angle grating 11 is arranged at institute
State the lower section of rotating shaft 9；Described control system 12 connects with described angle grating 11 and motors respectively, and described control system 12 is
For realizing energy supply and sending the component of control instruction.
Laser head 1 described in this example is launched beam of laser and is divided into two bundles, directive angled mirrors 3, angle through angle interferoscope 2
Angle interferoscope 2 is returned in laser-bounce by reflecting mirror 3, eventually passes back to laser head 1；Dish 4 and the middle setting of turntable lower wall 5 on turntable
Having a rotating shaft 9, described rotating shaft 9 to be preferably concentric rotating shafts, on described turntable, dish 4 is fixed in rotating shaft 9 with rotating shaft 9 turns
Dynamic, angled mirrors 3 is fixed on turntable on dish 4, and the inside of turntable lower wall 5 is fixed with two motors, and control system 12 controls
Motor is stirred rotating shaft 9 and is rotated, and the angle of rotation is measured by angle grating 11 and then for control, the rotation of motor control rotating shaft 9
Angle precision was up to 1 second；Preferably, the described built-in wireless signal receiver of turntable lower wall 5, described angled mirrors 3, turntable
The rotating disk that upper dish 4, turntable lower wall 5, turret base 6, rotating shaft 9, drive member 10, angle grating 11 and control system 12 are constituted
Drive circuit can by battery realize power supply.
As it is shown in figure 5, turret base 6 described in this example is centrally disposed fluted, turntable lower wall 5 is just stuck in this groove
In, keeping the fixing of turntable lower wall 5, whole turntable can also be fixed on other tested turntables by connectors 7 such as bolts hole.
After turntable fixes, after angled mirrors 3 being fixed on dish 4 on turntable, from control system 12, input an angle, make to turn
On platform, dish 4 rotates counterclockwise this angle from initial position, and as shown in Figure 6, laser interferometer measurement is also recorded and turned over angle and read
Number；Angle in turntable software first being made zero, on turntable, dish 4 returns to initial zero position position again, and from control system 12, input is another again
An outer angle, makes dish 4 on turntable rotate clockwise this angle from initial position, as it is shown in fig. 7, laser interferometer measurement remembering
Record turns over angle, can complete calibration.Utilize the data of record, it is possible to calculate initial zero position error and angled mirrors 3
Constant.
As shown in Figure 4, this example also provides for the angular surveying calibration system of a kind of laser interferometer, includes as above
The angular surveying calibrating installation of laser interferometer, and include data processing equipment 8, described data processing equipment 8 and described laser
1 realizes communication.Described data processing equipment 8 is preferably the data handling equipment such as computer.
As shown in Figure 4, put up described angular surveying calibration system, adjust the laser from laser head 1 injection, vertical incidence
To angled mirrors 3, make actual initial position M0Zero-bit angle be α0, optical path difference is δ0, angled mirrors constant design load is
A, actual angled mirrors constant B=K A, K are reflecting mirror constant coefficient.When initial position, open computer or other numbers
According to the software that the laser angle interferometer in processing means 8 is corresponding, laser angle interferometer reading is reset, if initial zero position angle
When rotating in the counterclockwise direction, laser angle interferometer reading is '+'.It is then turned on turning table control software, first by angle zero setting, then
Input the rotation angle θ in the range of a laser angle interferometer is measured1, dish on turntable is rotated counterclockwise to position M1, the anglec of rotation
Degree is θ1, write down angular readings R of now laser angle interferometer1, now optical path difference increases Δ δ1；The angle rotated counterclockwise
Calibrating principle is illustrated as shown in Figure 6.
After above-mentioned measurement, by angle zero setting, dish on turntable 4 is first adjusted back to initial position M0, then input an angle
Degree θ2, turn clockwise θ by dish on turntable 42Angle to position M2, on turntable, dish 4 turns over angle is θ2, write down now laser angle
The reading R of interferometer2, take during calculating and reduce Δ δ on the occasion of, optical path difference2；The angle calibration system principle turned clockwise is illustrated such as Fig. 7 institute
Show.
According to above measured value, transmit function in conjunction with optical path difference measurement, haveCan obtainWherein, θ1And θ2It is on the occasion of, Δ δ1=AsinR1, Δ δ2=AsinR2,
So just calculate initial zero position angle α0Constant coefficient K with angled mirrors 3.
Particularly, when the absolute value of the standard angle of left rotation and right rotation is equal, is all θ, there is a following formula:
The precise structure of the angular surveying calibrating installation of laser interferometer described in this example, standard angle error is little, it is possible to logical
Crossing and actively generate certain drift angle to calibrate initial zero position angle, described drift angle can be led by angle grating 11 and drive member 10
Dynamic generation, the angle of this generation is the most accurate；On this basis, initial zero position can also be calibrated during calibration by mistake simultaneously
Difference and the constant of angled mirrors 3, simplify the calibration steps of laser interferometer, improve its calibration efficiency.
The detailed description of the invention of the above is better embodiment of the present utility model, not limits this practicality with this new
The scope that is embodied as of type, scope of the present utility model includes being not limited to this detailed description of the invention, all according to this utility model
Shape, structure made equivalence change all in protection domain of the present utility model.
Claims (10)
1. the angular surveying calibrating installation of a laser interferometer, it is characterised in that including: laser head, angle interferoscope, angle
Dish, turntable lower wall and turret base on reflecting mirror, turntable, described angle interferoscope is arranged at described laser head and angled mirrors
Between, described angled mirrors is arranged on described turntable on dish, and on described turntable, dish is arranged on described turntable lower wall；Described
Turret base is provided with groove, and described turntable lower wall is arranged in described turret base by groove.
The angular surveying calibrating installation of laser interferometer the most according to claim 1, it is characterised in that described turret base
Being provided with connector, described turret base is fixed on the tested turntable of outside by connector.
The angular surveying calibrating installation of laser interferometer the most according to claim 2, it is characterised in that described connector bag
Include bolt hole and/or screw hole.
4. according to the angular surveying calibrating installation of the laser interferometer described in claims 1 to 3 any one, it is characterised in that
Also including that rotating shaft and drive member, described rotating shaft are fixedly installed on the lower section of dish on described turntable, described drive member is with described
Rotating shaft is connected.
The angular surveying calibrating installation of laser interferometer the most according to claim 4, it is characterised in that described drive member
For motor.
The angular surveying calibrating installation of laser interferometer the most according to claim 4, it is characterised in that described drive member
It is fixedly installed on the inside of described turntable lower wall.
The angular surveying calibrating installation of laser interferometer the most according to claim 4, it is characterised in that also include angular light
Grid, described angle grating is arranged at the lower section of described rotating shaft.
The angular surveying calibrating installation of laser interferometer the most according to claim 7, it is characterised in that also include controlling system
System, described control system is connected with described angle grating and drive member respectively.
9. according to the angular surveying calibrating installation of the laser interferometer described in claims 1 to 3 any one, it is characterised in that
Also include that wireless signal receiver, described wireless signal receiver are arranged at the inside of described turntable lower wall.
10. the angular surveying calibration system of a laser interferometer, it is characterised in that include such as right 1 to 9 any one institute
The angular surveying calibrating installation of the laser interferometer stated, and include data processing equipment, described data processing equipment swashs with described
Shaven head realizes communication.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621011800.4U CN205879111U (en) | 2016-08-30 | 2016-08-30 | Laser interferometer's angular surveying calibrating device and system |
| PCT/CN2017/075819 WO2018040531A1 (en) | 2016-08-30 | 2017-03-07 | Angle measurement and calibration device and system for laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621011800.4U CN205879111U (en) | 2016-08-30 | 2016-08-30 | Laser interferometer's angular surveying calibrating device and system |
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| CN205879111U true CN205879111U (en) | 2017-01-11 |
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| WO (1) | WO2018040531A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018040531A1 (en) * | 2016-08-30 | 2018-03-08 | 深圳市中图仪器股份有限公司 | Angle measurement and calibration device and system for laser interferometer |
| CN108693123A (en) * | 2018-04-22 | 2018-10-23 | 北京工业大学 | A kind of quick calibration method of laser interferometer measurement guide rail precision of rectilinear motion |
| CN110987013A (en) * | 2019-12-15 | 2020-04-10 | 贵州航天计量测试技术研究所 | Method and device for calibrating gyroscope angular motion measurement system |
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| CN112504193B (en) * | 2020-12-11 | 2022-06-07 | 中国航空工业集团公司北京长城计量测试技术研究所 | Variable-angle measuring device and method for stay cord displacement sensor |
| CN113513986B (en) * | 2021-07-05 | 2022-02-22 | 广东省计量科学研究院（华南国家计量测试中心） | Geometric tolerance measuring device and measuring method thereof |
| CN116300055A (en) * | 2023-05-17 | 2023-06-23 | 北京极光星通科技有限公司 | Limiting system and limiting method thereof |
| CN118519132B (en) * | 2024-07-19 | 2024-09-24 | 云南师范大学 | High-precision satellite-borne single-photon laser calibration method based on corner reflector |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000111325A (en) * | 1998-10-01 | 2000-04-18 | Tokyo Seimitsu Co Ltd | Measuring method of initially set incident angle in rotation angle measurement using laser interferometer |
| CN101236076B (en) * | 2008-02-29 | 2010-10-27 | 成都工具研究所 | Laser angle interferometry system possessing standard angle rotating platform and its measurement method |
| CN103499365A (en) * | 2013-10-10 | 2014-01-08 | 中国科学院上海技术物理研究所 | Rotary transformer static and dynamic angle measuring accuracy calibration device and method |
| CN203572451U (en) * | 2013-10-14 | 2014-04-30 | 北京航天计量测试技术研究所 | Vertical shaft type laser small-angle measuring apparatus |
| CN104634280B (en) * | 2015-02-03 | 2017-09-12 | 中国科学院上海光学精密机械研究所 | The measuring method of general level turntable absolute angle and the anglec of rotation |
| CN105241539A (en) * | 2015-07-25 | 2016-01-13 | 中国计量科学研究院 | Diffraction grating heterodyne laser vibrometer for angular vibration measurement |
| CN205879111U (en) * | 2016-08-30 | 2017-01-11 | 深圳市中图仪器科技有限公司 | Laser interferometer's angular surveying calibrating device and system |
-
2016
- 2016-08-30 CN CN201621011800.4U patent/CN205879111U/en active Active
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2017
- 2017-03-07 WO PCT/CN2017/075819 patent/WO2018040531A1/en active Application Filing
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018040531A1 (en) * | 2016-08-30 | 2018-03-08 | 深圳市中图仪器股份有限公司 | Angle measurement and calibration device and system for laser interferometer |
| CN108693123A (en) * | 2018-04-22 | 2018-10-23 | 北京工业大学 | A kind of quick calibration method of laser interferometer measurement guide rail precision of rectilinear motion |
| CN110987013A (en) * | 2019-12-15 | 2020-04-10 | 贵州航天计量测试技术研究所 | Method and device for calibrating gyroscope angular motion measurement system |
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| Publication number | Publication date |
|---|---|
| WO2018040531A1 (en) | 2018-03-08 |
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Address after: 518000 Guangdong city of Shenzhen province Nanshan District Xili Academy Road No. 1001 Chi Yuen Building 2 layer B1 Patentee after: Shenzhen city in the map instrument Limited by Share Ltd Address before: 518000 Guangdong city of Shenzhen province Nanshan District Xili Academy Road No. 1001 Chi Yuen Building 2 layer B1 Patentee before: Shenzhen Chotest Science & Technology Co., Ltd. |