CN104034697A - Test device and method for influence of roughness of manufacturing surface on laser measurement performance - Google Patents
Test device and method for influence of roughness of manufacturing surface on laser measurement performance Download PDFInfo
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- CN104034697A CN104034697A CN201410294148.0A CN201410294148A CN104034697A CN 104034697 A CN104034697 A CN 104034697A CN 201410294148 A CN201410294148 A CN 201410294148A CN 104034697 A CN104034697 A CN 104034697A
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Abstract
The invention discloses a test device and method for the influence of roughness of a manufacturing surface on the laser measurement performance. The device realizes large-distance measurement through a standard guide rail which is 80m long; a laser interferometer positioning system is used for realizing distance positioning between laser and the surface of a substance; a light source can be adjusted within multiple wavebands, can be either a single-color light source or a multi-color light source, and can meet a demand for researching the influence, which is caused by different wavebands and continuous frequency adjustment wave laser, on the surface scattering characteristic; a laser focusing system is arranged behind the light source, so that the diameter of a laser focused light spot can be adjusted, and a demand for researching the influence, which is caused by the sizes of laser light spots, on scattering light is met; a biaxial rotating system for arranging a target and a clamp adopt an error prevention design, so that the measurement efficiency and the measurement precision can be improved; due to the design of a quarter arc guide rail for arranging a receiving detector, the change of a receiving angle can be reflected. The system has a large measurement function, is high in measurement precision and high in efficiency, can realize far-distance measurement, and has an important significance for the research on laser and substance surface mutual action influence.
Description
Technical field
The present invention relates to optical radiation measurement device, relate in particular to a kind of test unit and method of manufacturing surface roughness affect laser measurement performance.
Background technology
In practical engineering application, measured target surface is all imperfect Lambert surface conventionally, there is diffuse reflection in surface, need to consider complicated multiple reflections phenomenon, therefore the scattering properties on goal in research surface seems particularly important, for example: if known spectra bidirectional reflectance distribution function, can derive direction spectral absorption and direction spectral reflectivity, therefore, spectrum bidirectional reflectance distribution function is the important parameter that embodies material surface radiation delivery, be applied in a lot of fields, as in spacer remote sensing field, commercial measurement field, the emulation of geologic survey and target and simulation field, all need to carry out the detection of surfacing scattering properties, realizing is the important research basis of numerous research fields to the accurate measurement of target surface scattering properties.
In remote sensing field, can utilize target scattering of light to be analyzed to form and the feature of identification target; In laser radar echo, comprised a lot of targets and background information, people can extract useful information from the complex information obtaining; In commercial measurement field, along with the growing great demand in large space precision coordinate measurement aspect, realize without cooperative target non-contact measurement, become an important subject, although traditional interferometric method and the laser tracking measurement mode precision being derived by it are high, but need the cooperative target such as reflecting prism or opal auxiliary, often cannot realize at the scene; The continuous laser frequency modulation ranging technology that development in recent years is got up is a kind of new pattern laser ranging technology, can carry out without cooperative target measure, measurement range is large, precision is high, there is significant advantage, but the method is at present also immature, some critical bottlenecks not yet solve, one of them key issue is that laser is directly incident on behind tested manufacture surface, the impact of surface on laser measurement performance.In the situation that having cooperative target, because target surface characteristic is certain and known, the echoed signal therefore receiving is also stablized and can be predicted, and this is also the high major reason of range measurement system precision that has cooperative target; For the range measurement system without cooperative target, Ear Mucosa Treated by He Ne Laser Irradiation to target surface unknown and vary, the surperficial roughness of tested manufacture, color, texture etc. all can affect the information such as the sharp light intensity that receives, phase place, polarization state, the angle of laser incident, the scattered signal that Laser Focusing spot size also can affect reception.
Although developed some physical models and described the scattering properties of Rough Target at physics circle, but be all by problem reduction and will carry out modeling under Utopian target prerequisite, and in the middle of practical application, calculating based on ideal model will certainly produce error, can not meet high-precision requirement, and the real scattering properties of rough surface can reflect the unique trait outside surface geometry feature, the scattered information that every kind of surface produces is well-determined, therefore measure and Study of Laser and actual interaction of manufacturing rough surface affect optimization to measuring equipment and the raising of measuring accuracy all has great importance, also be the Research foundation of numerous research fields.
Traditional scatterometry apparatus function is more single, all can not meet the needs of the many-side measurement of Study of Laser and surface interaction, for example existing bidirectional reflectance distribution function measurement mechanism only can be measured the closely scattering properties on surface, for large distance, the aerial energy attenuation of laser, and the impact of focal beam spot diameter on scattering etc. all can not measure, existing some other surface scattering measurement mechanism is ubiquity function singleness, the defect such as measuring distance is near, positioning precision is low, measuring error is large also.
Summary of the invention
The invention provides a kind of test unit and method of manufacturing surface roughness affect laser measurement performance, the present invention has realized the scattering properties of remote surface and has measured, and has improved measuring accuracy and measuring period, described below:
A kind of test unit of manufacturing surface roughness affect laser measurement performance, described test unit comprises: standard long guideway, light source, laser focusing system, article carrying platform, horizontal rotating table, vertical rotary platform, sample clamp, connecting link, quadrant arc rail plate, pick-up probe, laser interferometer transmitting terminal, laser interferometer receiving end and PC
Described light source, described laser focusing system and described laser interferometer transmitting terminal are fixed on one end of described standard long guideway, form twin shaft rotary system by described horizontal rotating table and described vertical rotary platform, described pick-up probe and described laser interferometer receiving end are fixed on the described article carrying platform by laser interferometer control, on described standard long guideway, move freely, described sample clamp is arranged on the axle center of described vertical rotary platform, the described quadrant arc rail plate that described pick-up probe is installed is arranged on described vertical rotary platform by described connecting link, rotation with described vertical rotary platform is rotated, described horizontal rotating table, described vertical rotary platform, the displacement of described article carrying platform, the movement of described pick-up probe on described quadrant arc rail plate controlled by described PC is unified.
Described light source is multiband tunable light source, comprising: visible light source 400nm～800nm, near infrared light light source 800nm～2500nm and infrared light light source 2500nm～5000nm.
The turbine of described horizontal rotating table and described vertical rotary platform is pitch turbine, and the vernier scale resolution on described horizontal rotating table and described vertical rotary platform is that 5 arcs divide.
A test method of manufacturing surface roughness affect laser measurement performance, said method comprising the steps of:
1) sample is placed in sample clamp, makes the end face laminating of sample surfaces and sample clamp;
2) distance and the moving interval on setting light source incident angle, launching spot size, described light source and sample surface to be measured;
3) keep the incident angle of above-mentioned setting, in position measurement space surface scattered energy to be measured, rotation by vertical rotary platform within the scope of 360 ° changes take over party's parallactic angle, and the movement by pick-up probe on quadrant arc rail plate receives the luminous energy of different reflection angle;
4) measure after the luminous energy of above-mentioned position to be measured, still keep the incident angle of described light source constant, according to step 2) set moving interval move to next position, according to step 3) measure the luminous energy of this position, move to again next desired location, repeating step 3), 4), until measure the luminous energy of all setpoint distances;
Complete after above-mentioned measurement, then change the incident angle of described light source, repeating step 3), 4), the measurement while spending to complete different incidence angles.
The beneficial effect of technical scheme provided by the invention is: native system utilizes standard 80m long guideway to realize large range observation, utilize laser interferometer positioning system to realize the distance location of laser and material surface, light source is that multiband is adjustable, can be monochromatic source, also can be polychromatic source, can meet the needs of different-waveband and Continuous Wave with frequency modulation laser effects on surface scattering properties impact research, the light source emitting is through laser focusing system, can be by regulating laser focusing system to adjust Laser Focusing spot diameter size, meet the needs of laser spot diameter size to stray light effects research, twin shaft rotary system and the sample clamp of placing surface to be measured adopt anti-tolerance design, can improve and measure efficiency and measuring accuracy, the quadrant arc guide rail design of placing pick-up probe can realize the measurement of space surface scattered light.Measuring accuracy of the present invention is high, efficiency is high, can realize large range observation, measurement function is many, can complete the measurement of surperficial hemisphere spatial light to be measured scattering and the impact of Laser Focusing spot size effects on surface scattering measures, energy attenuation after incident light long-distance transmissions also can be recorded by this device, and the present invention can be widely used in needing the material behavior of Study of Laser and surface interaction impact and target simulator field, remote sensing field, geologic survey field, industrial large scale without fields such as cooperative target measurements.
Brief description of the drawings
Fig. 1 is the structural representation of manufacturing the test unit of surface roughness affect laser measurement performance;
Fig. 2 is the block diagram of manufacturing the test unit of surface roughness affect laser measurement performance;
Fig. 3 is sample clamp design drawing;
Fig. 4 is measuring process schematic diagram;
Fig. 5 is that roughness sample block space scattered energy distributes
Fig. 6 is that roughness sample block space scattered energy distributes
In accompanying drawing, the list of parts of each label representative is as follows:
1-80m standard long guideway, 2-light source, 3-laser focusing system, 4-article carrying platform, 5-horizontal rotating table, 6-vertical rotary platform, 7-sample clamp, 8-connecting link, 9-quadrant arc rail plate, 10-pick-up probe, 11-laser interferometer transmitting terminal, 12-laser interferometer receiving end, 13-PC machine; A-transmitter module, B-article carrying platform module, C-receiver module and D-electronic control module.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below embodiment of the present invention is described further in detail.
Referring to Fig. 1 and Fig. 2, the test unit of this manufacture surface roughness affect laser measurement performance comprises: standard long guideway 1, light source 2, laser focusing system 3, article carrying platform 4, horizontal rotating table 5, vertical rotary platform 6, sample clamp 7, connecting link 8, quadrant arc rail plate 9, pick-up probe 10, laser interferometer transmitting terminal 11, laser interferometer receiving end 12
Light source 2, laser focusing system 3 and laser interferometer transmitting terminal 11 are fixed on one end of standard long guideway 1, form twin shaft rotary system by horizontal rotating table 5 and vertical rotary platform 6, pick-up probe 10 and laser interferometer receiving end 12 are fixed on the article carrying platform 4 by laser interferometer control, can on standard long guideway 1, move freely, sample clamp 7 is arranged on the axle center of vertical rotary platform 6, the quadrant arc rail plate 9 that pick-up probe 10 is installed is arranged on vertical rotary platform 6 by connecting link 8, rotation with vertical rotary platform 6 is rotated, horizontal rotating table 5, vertical rotary platform 6, the displacement of article carrying platform 4, the movement of pick-up probe 10 on quadrant arc rail plate 9 controlled by PC 13 is unified.
Wherein, standard long guideway 1 is long for 80m, and article carrying platform 4 can move freely on standard long guideway 1, is accurately located by laser interferometer.
The embodiment of the present invention is by being fixed on laser interferometer transmitting terminal 11 one end of standard long guideway 1, laser interferometer receiving end 12 is fixed on article carrying platform 4, can realizes the accurate running fix on standard long guideway 1 to article carrying platform 4 by laser interferometer.
Referring to Fig. 2, entirety is made up of four modules: transmitter module A, article carrying platform module B, receiver module C and electronic control module D.Transmitter module 1 is made up of light source 2 and laser focusing system 3; Article carrying platform module B is made up of article carrying platform 4, standard long guideway 1 and twin shaft rotary system (horizontal rotating table 5 and vertical rotary platform 6 form), article carrying platform 4 is as mobile platform, the twin shaft rotary system of realizing space surface pose to be measured is fixed on article carrying platform 4, positions by laser interferometer; Receiver module C is made up of pick-up probe 10 and quadrant arc rail plate 9, completes the measurement of spatial light scattared energy in conjunction with twin shaft rotary system, and the electronic control module D that realizes whole measuring system automation mechanized operation controls by PC 13 is unified.
When specific implementation, light source 2 is multiband tunable light source, comprise: visible light source 400nm～800nm, near infrared light light source 800nm～2500nm and infrared light light source 2500nm～5000nm, in addition, light source 2 also can be Continuous Wave with frequency modulation light source, and needs are measured in the research that can meet polychromatic light and surface interaction impact.The size of outgoing laser spot diameter can effectively be controlled and select to laser focusing system 3, regulated by pinhole diaphragm.
Wherein, referring to Fig. 3, sample clamp 7 is arranged on the axle center of vertical rotary platform 6, and the end face of sample clamp 7 overlaps with the vertical axis of horizontal rotating table 5, to realize any conversion of sample space pose.The turbine of horizontal rotating table 5 and vertical rotary platform 6 is pitch turbine, drive turbine to rotate within the scope of 360 ° by DC servo motor control worm screw, worm screw is connected with the reducer shaft being fixed on motor, and the vernier scale resolution on horizontal rotating table 5 and vertical rotary platform 6 is that 5 arcs divide.
Referring to Fig. 3, further, sample clamp 7 adopts anti-tolerance design, be that sample cell has certain width, can adapt to the sample of different-thickness, only need be by sample surfaces joint jig end face when measurement, adjust without other positions, can ensure no matter how biaxial system rotates, light source 2 is incident in sample in the heart all the time, has saved overall Measuring Time.
Wherein, pick-up probe 10 is arranged on quadrant arc rail plate 9, and pick-up probe 10 can be changed according to measurement demand, such as being photodetector, optical power detector or luminance brightness detector etc.
Quadrant arc rail plate 9, employing standard designed arc-shaped appearance, the center of circle overlaps with the intersection point of twin shaft rotary system two axial lines, its guide pass is turbine wheel flute profile, rotate by the electronic worm drive turbine gear teeth, thereby realize the movement of pick-up probe 10 on quadrant arc rail plate 9, to receive the luminous energy of different reflection angle, pick-up probe 10 has the moving range of 0 ° to 90 ° on quadrant arc guide rail 9.
Connecting link 8 is connected with vertical rotary platform 6 with quadrant arc guide rail 9, be fixed on vertical rotary platform 6, rotation with vertical rotary platform 6 is rotated, thereby change take over party's parallactic angle, the length of connecting link 8 and quadrant arc guide rail 9 can carry out different size design according to measurement demand, only need be fixed on vertical rotary platform 6.
The test method of manufacture surface roughness affect laser measurement performance provided by the invention comprises the following steps:
1) sample is placed in sample clamp 7, makes the end face laminating of sample surfaces and sample clamp 7;
2) distance and the moving interval on setting light source 2 incident angles, launching spot size, light source 2 and sample surface to be measured;
3) keep the incident angle of above-mentioned setting, in position measurement space surface scattered energy to be measured, rotation by vertical rotary platform 6 within the scope of 360 ° changes take over party's parallactic angle, and the movement by pick-up probe 10 on quadrant arc rail plate 9 receives the luminous energy of different reflection angle;
4) measure after the luminous energy of above-mentioned position to be measured, still keep the incident angle of light source 2 constant, the moving interval of setting according to step 2 moves to next position, measure the luminous energy of this position according to step 3, move to again next desired location, repeating step 3), 4), until measure the luminous energy of all setpoint distances;
Complete after above-mentioned measurement, change again light source 2 incident angles, can reduce to greatest extent like this run-out error of being introduced by the rotation of horizontal rotating table 5, thereby reduce measuring error, repeating step 3), 4), the measurement while spending to complete different incidence angles.
If desired change spot size, adjust laser focusing system 3, make the hot spot of different-diameter size be incident on measured surface, the rotation by twin shaft rotary system and the movement of pick-up probe 10 on quadrant arc rail plate 9 complete the measurement of space scattering luminous energy.
Below in conjunction with measuring process schematic diagram 4, concrete measuring method is elaborated.Here taking the displacement of data acquisition amount maximum from space scattering luminous energy measurement scheme as example, the part steps that other measurement function can be won this measurement scheme realizes.
1) first need to open light source 2 preheating 20 minutes, testing sample is arranged in sample clamp 7 on request, the end face of sample surfaces and sample clamp 7 is fitted tightly.
2) setting laser incident angle, focal beam spot size, rotation by PC 13 level of control universal stages 5 changes laser incident angle, in the present embodiment, initial incidence angle is made as 0 °, light source 2 is made as 5m with the distance on testing sample surface, drives article carrying platform 4 to move to assigned address by laser interferometer positioning system.
3) start to measure, movement by pick-up probe 10 on quadrant arc rail plate 9 receives the luminous energy of different reflection angle, after having surveyed, the rotation of being controlled vertical rotary platform 6 by PC 13 changes take over party's parallactic angle, the present embodiment is made as 5 °, then the movement on quadrant arc rail plate 9 receives the luminous energy of different reflection angle under this position angle by pick-up probe 10.
4) repeating step 3), until vertical rotary platform 6 turns over 360 °, measure the scattered energy in half spherical space.
5) completing steps 4) after, by the next measuring position of laser interferometer PC control software set, the present embodiment is 10m.
6) repeating step 3), 4), 5), until measure the distance that will measure.Changing light source incident angle, is 5 ° by the PC control software set angle stepping in horizontal rotating table 5.
7) repeating step 2), 3), 4), 5), 6), until measure under different incidence angles degree, the hemisphere space scattering luminous energy on surface when different distance.
In above-mentioned measurement, change incident apart from time, keep the incident angle of light source 2 constant, as shown in Figure 4, can reduce to greatest extent like this run-out error of being introduced by the rotation of horizontal rotating table 5, thereby reduce measuring error.If desired change spot size, adjust laser focusing system 3, make the hot spot of different-diameter size be incident on measured surface, selecting step 2), 3), 4) complete measurement.Fig. 5, Fig. 6 are roughness sample block space scattered energy distribution measuring results figure.In figure, sample piece roughness is 0.8 μ m, processing mode is planer, measurement result is the image data in half spherical space, because the coordinate of each collection point is about zenith angle and azimuthal Spatial Sphere coordinate, realizes surface fitting so need convert Cartesian coordinates to.Fig. 5 is incident angle θ
i=30 °, incident orientation angle
time measurement result, Fig. 6 is incident angle θ
i=30 °, incident orientation angle
time measurement result, as can be seen from the figure, when incident angle is identical, and incident orientation angle can obtain different scattered energy when different and distributes, all there is variation in scattered light peak and energy distribution shape.
The embodiment of the present invention to the model of each device except do specified otherwise, the model of other devices does not limit, and all can as long as can complete the device of above-mentioned functions.
It will be appreciated by those skilled in the art that accompanying drawing is the schematic diagram of a preferred embodiment, the invention described above embodiment sequence number, just to describing, does not represent the quality of embodiment.
The foregoing is only preferred embodiment of the present invention, in order to limit the present invention, within the spirit and principles in the present invention not all, any amendment of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (4)
1. manufacture the test unit of surface roughness affect laser measurement performance for one kind, it is characterized in that, described test unit comprises: standard long guideway, light source, laser focusing system, article carrying platform, horizontal rotating table, vertical rotary platform, sample clamp, connecting link, quadrant arc rail plate, pick-up probe, laser interferometer transmitting terminal, laser interferometer receiving end and PC
Described light source, described laser focusing system and described laser interferometer transmitting terminal are fixed on one end of described standard long guideway, form twin shaft rotary system by described horizontal rotating table and described vertical rotary platform, described pick-up probe and described laser interferometer receiving end are fixed on the described article carrying platform by laser interferometer control, on described standard long guideway, move freely, described sample clamp is arranged on the axle center of described vertical rotary platform, the described quadrant arc rail plate that described pick-up probe is installed is arranged on described vertical rotary platform by described connecting link, rotation with described vertical rotary platform is rotated, described horizontal rotating table, described vertical rotary platform, the displacement of described article carrying platform, the movement of described pick-up probe on described quadrant arc rail plate controlled by described PC is unified.
2. a kind of test unit of manufacturing surface roughness affect laser measurement performance according to claim 1, it is characterized in that, described light source is multiband tunable light source, comprising: visible light source 400nm～800nm, near infrared light light source 800nm～2500nm and infrared light light source 2500nm～5000nm.
3. a kind of test unit of manufacturing surface roughness affect laser measurement performance according to claim 1, it is characterized in that, the turbine of described horizontal rotating table and described vertical rotary platform is pitch turbine, and the vernier scale resolution on described horizontal rotating table and described vertical rotary platform is that 5 arcs divide.
4. a test method of manufacturing surface roughness affect laser measurement performance, is characterized in that, said method comprising the steps of:
1) sample is placed in sample clamp, makes the end face laminating of sample surfaces and sample clamp;
2) distance and the moving interval on setting light source incident angle, launching spot size, described light source and sample surface to be measured;
3) keep the incident angle of above-mentioned setting, in position measurement space surface scattered energy to be measured, rotation by vertical rotary platform within the scope of 360 ° changes take over party's parallactic angle, and the movement by pick-up probe on quadrant arc rail plate receives the luminous energy of different reflection angle;
4) measure after the luminous energy of above-mentioned position to be measured, still keep the incident angle of described light source constant, according to step 2) set moving interval move to next position, according to step 3) measure the luminous energy of this position, move to again next desired location, repeating step 3), 4), until measure the luminous energy of all setpoint distances;
Complete after above-mentioned measurement, then change the incident angle of described light source, repeating step 3), 4), the measurement while spending to complete different incidence angles.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104792736A (en) * | 2015-03-20 | 2015-07-22 | 北京环境特性研究所 | Measurement method and measurement system for indoor laser scattering characteristics of large-size target |
| CN106840048A (en) * | 2016-12-17 | 2017-06-13 | 江汉大学 | Roughness measuring device and method |
| CN109141298A (en) * | 2018-09-05 | 2019-01-04 | 广州达欧技术检测有限公司 | A kind of ball-type piece surface curve detection system |
| CN110208218A (en) * | 2019-07-08 | 2019-09-06 | 莱森光学（深圳）有限公司 | A kind of two-way dispersion distribution function spectral measurement system |
| CN115077386A (en) * | 2022-08-19 | 2022-09-20 | 南京木木西里科技有限公司 | Full-automatic measuring device, system and measuring method for hydrosol surface |
| CN115070646A (en) * | 2022-07-11 | 2022-09-20 | 辽宁优迅科技有限公司 | Clamp and method for testing front light backlight of coaxial laser bare package |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5434668A (en) * | 1992-04-01 | 1995-07-18 | Electronics & Space Corp. | Laser vibrometer identification friend-or-foe (IFF) system |
| DE29705626U1 (en) * | 1997-03-28 | 1997-05-22 | ALV-Laser Vertriebsgesellschaft mbH, 63225 Langen | Measuring device for determining light scattering |
| WO2003083453A1 (en) * | 2002-03-27 | 2003-10-09 | Kla-Tencor Technologies Corporation | Method and system using exposure control to inspect a surface |
| CN1657909A (en) * | 2005-03-30 | 2005-08-24 | 中国农业大学 | Method and device for measuring scattered light space distribution |
| CN101158640A (en) * | 2007-11-06 | 2008-04-09 | 山东大学 | Device and method for rapid measuring coherent backscattering by linear array CCD |
| CN101196464A (en) * | 2007-12-14 | 2008-06-11 | 武汉大学 | Laser double-mode micro-volume sample analyzing method and its device |
| CN102419315A (en) * | 2011-09-08 | 2012-04-18 | 苏州汉朗光电有限公司 | Smectic liquid crystal space scattering measurement method and device |
| CN103018205A (en) * | 2012-12-06 | 2013-04-03 | 中国科学院长春光学精密机械与物理研究所 | Angle scattering measuring apparatus for ArF laser optical thin film |
| US20140362377A1 (en) * | 2013-06-11 | 2014-12-11 | ScatterMaster LLC | Hemispherical Scanning Optical Scatterometer |
-
2014
- 2014-06-25 CN CN201410294148.0A patent/CN104034697B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5434668A (en) * | 1992-04-01 | 1995-07-18 | Electronics & Space Corp. | Laser vibrometer identification friend-or-foe (IFF) system |
| DE29705626U1 (en) * | 1997-03-28 | 1997-05-22 | ALV-Laser Vertriebsgesellschaft mbH, 63225 Langen | Measuring device for determining light scattering |
| WO2003083453A1 (en) * | 2002-03-27 | 2003-10-09 | Kla-Tencor Technologies Corporation | Method and system using exposure control to inspect a surface |
| CN1657909A (en) * | 2005-03-30 | 2005-08-24 | 中国农业大学 | Method and device for measuring scattered light space distribution |
| CN101158640A (en) * | 2007-11-06 | 2008-04-09 | 山东大学 | Device and method for rapid measuring coherent backscattering by linear array CCD |
| CN101196464A (en) * | 2007-12-14 | 2008-06-11 | 武汉大学 | Laser double-mode micro-volume sample analyzing method and its device |
| CN102419315A (en) * | 2011-09-08 | 2012-04-18 | 苏州汉朗光电有限公司 | Smectic liquid crystal space scattering measurement method and device |
| CN103018205A (en) * | 2012-12-06 | 2013-04-03 | 中国科学院长春光学精密机械与物理研究所 | Angle scattering measuring apparatus for ArF laser optical thin film |
| US20140362377A1 (en) * | 2013-06-11 | 2014-12-11 | ScatterMaster LLC | Hemispherical Scanning Optical Scatterometer |
Non-Patent Citations (3)
| Title |
|---|
| 何毅 等: "粗糙表面激光散射特性的理论研究", 《光学学报》, vol. 17, no. 9, 30 September 1997 (1997-09-30), pages 1202 - 1208 * |
| 朱元庆等: "实际加工表面红外激光散射特性的实验研究", 《物理学报》, vol. 62, no. 24, 31 December 2013 (2013-12-31) * |
| 杨杰，吴凡: "粗糙表面可见光散射特性的实验研究", 《中国测试》, vol. 35, no. 2, 31 March 2009 (2009-03-31), pages 125 - 128 * |
Cited By (9)
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|---|---|---|---|---|
| CN104792736A (en) * | 2015-03-20 | 2015-07-22 | 北京环境特性研究所 | Measurement method and measurement system for indoor laser scattering characteristics of large-size target |
| CN104792736B (en) * | 2015-03-20 | 2017-07-21 | 北京环境特性研究所 | The measuring method and measuring system of Laser scattering signature in a kind of large scale target chamber |
| CN106840048A (en) * | 2016-12-17 | 2017-06-13 | 江汉大学 | Roughness measuring device and method |
| CN106840048B (en) * | 2016-12-17 | 2019-09-10 | 江汉大学 | Roughness measuring device and method |
| CN109141298A (en) * | 2018-09-05 | 2019-01-04 | 广州达欧技术检测有限公司 | A kind of ball-type piece surface curve detection system |
| CN110208218A (en) * | 2019-07-08 | 2019-09-06 | 莱森光学（深圳）有限公司 | A kind of two-way dispersion distribution function spectral measurement system |
| CN115070646A (en) * | 2022-07-11 | 2022-09-20 | 辽宁优迅科技有限公司 | Clamp and method for testing front light backlight of coaxial laser bare package |
| CN115077386A (en) * | 2022-08-19 | 2022-09-20 | 南京木木西里科技有限公司 | Full-automatic measuring device, system and measuring method for hydrosol surface |
| CN115077386B (en) * | 2022-08-19 | 2022-12-16 | 南京木木西里科技有限公司 | Full-automatic measuring device, system and measuring method for hydrosol surface |
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