CN104655032A - High-precision distance measurement system and method based on orthogonal chromatic dispersion spectral domain interferometer - Google Patents
High-precision distance measurement system and method based on orthogonal chromatic dispersion spectral domain interferometer Download PDFInfo
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Abstract
The invention discloses a high-precision distance measurement system and method based on an orthogonal chromatic dispersion spectral domain interferometer. Based on a layout of the spectral domain interferometer, a phase difference is introduced among a plurality of interference spectrums through a quick displacement device arranged in a reference arm, a complex interference signal is reconstructed by utilizing an actually verified phase difference, and high-fidelity sample information is obtained based on inverse Fourier transform of the complex interference signal. Detection is carried out on a detection arm by an orthogonal spectrophotometer having ultra-high spectral resolution and based on a virtual image phase control array and an optical grating, so that the measurement range is greatly expanded. With the adoption of an optical distance measurement method for an optimized multichannel spectral phase, the measurement precision is remarkably improved, and error amplification possibly caused by single-channel measurement is avoided, therefore quick high-precision wide-range distance measurement is realized.
Description
Technical field
The present invention relates to optical coherence field of measuring technique, be specifically related to a kind of high precision distance measurement system and method based on cross dispersion spectral domain interferometer.
Background technology
Contemporary optics system is generally all made up of multiple lens, in the Installation and Debugging process of optical system, whether each lens position is accurately the key index determining Performance of Optical System, and this is quick with regard to needs one, the distance measurement system of high precision, wide range is monitored and the Installation and Debugging of guided optical system.In order to realize Non-Destructive Testing, there has been proposed a kind of spacing monitoring method based on principle of optical interference, as the mirror surface position finder of French Fogale company, the technology adopted is Time Domain Optical coherence tomography techniques (Time Domain Optical Coherence Tomography, TDOCT), broadband low-coherence light source and high precision optical delay circuit is utilized to obtain comparatively accurate optical interval measurement result, but this systematic survey speed and measuring accuracy are limited to speed and the precision of mechanical motion in high precision optical delay circuit, measuring speed is slow, and measuring accuracy is vulnerable to temperature, the impact of the extraneous factors such as vibration.In order to improve measuring speed, reduce measuring system to the dependence of mechanical motion, fourier domain optical coherence tomography (FourierDomain Optical Coherence Tomography, FDOCT) is applied to the measurement of spacing between lens in optical system by people.FDOCT technology is divided into again spectral domain optical coherence tomography techniques (Spectral DomainOCT, SDOCT) and frequency sweep optical coherence tomography (Swept Source OCT, SSOCT).SDOCT selects wideband light source and rapid multi-channel spectrometer to obtain interference signal.SSOCT selects rapid frequency-sweeping laser source and single-point detector to obtain interference spectrum signal.By carrying out the pitch information between optical system interior lens that Fourier transform can obtain vertically to interference signal.Because the phase stability of SSOCT system is poor, so it is more suitable to choose SDOCT technology enforcement high precision distance measurement.
But SDOCT technology is measured for improving optical interval, while raising detection speed, also comes with some shortcomings.
The first, there is mirror image in measurement result.
Because the interference spectrum detected is real number, so the mirror image caused by the Hermitian conjugate of Fourier transform can exist, make the SDOCT system loss range of half, more seriously, the existence of image signal may cause misreading when measuring.
In order to overcome the mirror image caused by the Hermitian conjugate of Fourier transform, the people such as R.Leitgeb proposed in 1999 and introduce carrier frequency by the method for phase shift at the reference arm of coherent system, thus obtained the interference signal of plural form, and then distinguished signal and its mirror image.Because the method is by the impact of the factors such as the precision of fast offset device, external environment and aberration, so image rejection ratio is not high.
The second, range is measured limited.
The multi-channel spectrometer based used in general SDOCT system is made up of grating and line-scan digital camera, and spectral resolution is not high enough, so the range of SDOCT system is generally in a few millimeter.
In order to break through measurement range, the people such as Hui Wang propose two reference arms that a kind of photoswitch switches, and eliminate mirror image by Spatial transmission method, and then expand the method for SDOCT system range.Although the method can play the range increasing SDOCT system, range improves limited, still can not meet the needs that Large space is measured; The setting of many reference arms too increases the complexity of system, and the optical interval between many reference arms needs through complicated demarcation, otherwise measurement result has larger error.
Three, the optical interval measuring accuracy of SDOCT system is not enough.
The axial distance precision that common signal processing method obtains affects by factors such as light source bandwidth sum sampled point numbers.In order to improve the measuring accuracy of axial spacing, Jun Zhang etc. proposes quantization phase formation method (Quantitative Phase Imaging), in interference signal, extract phase information, and then obtain the axial spacing measurement result of sub-micrometer scale.But, when utilizing single-point spectral information to calculate spacing, measuring error may be amplified because choosing the poor wavelength of some sensitivity.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, provide the high precision distance measurement system and method based on cross dispersion spectral domain interferometer.
Based on the high precision distance measurement system of cross dispersion spectral domain interferometer, comprise wideband light source, optical circulator, broadband optical fiber coupler, sample arm, reference arm and feeler arm;
Described sample arm comprises the first fiber collimating lenses, the first condenser lens, plane mirror and fast offset device; Described reference arm comprises the second fiber collimating lenses, the second condenser lens and sample; Described feeler arm comprises the 3rd fiber collimating lenses, cylindrical focusing lens, virtual image phased array, grating, the 3rd condenser lens, area array CCD or face battle array CMOS;
Wideband light source low-coherent light out, through optical circulator to broadband optical fiber coupler, wherein a road light enters reference arm, and another road enters sample arm; Enter reference arm part: the light after broadband optical fiber coupler light splitting is after the first fiber collimating lenses, be irradiated to the plane mirror be fixed on fast offset device through the first condenser lens, the light reflected from plane mirror is back to broadband optical fiber coupler via former road; Enter sample arm part: the light after broadband optical fiber coupler light splitting incides after the second condenser lens through the second fiber collimating lenses and is irradiated to sample, and the light of returning from sample reflection is back to broadband optical fiber coupler via former road;
The two-way light returned from sample arm and reference arm forms interference light after interfering broadband optical fiber coupler, enters feeler arm through optical circulator, by feeler arm interference light is decomposed into interference spectrum signal and detects; Enter feeler arm part: interference light is through the 3rd fiber collimating lenses, incide cylindrical focusing lens, emergent light converges to the entrance window of virtual image phased array front surface, from the rear surface outgoing of virtual image phased array, carry out the first order light splitting in spatial domain, reenter and be mapped to grating, second level light splitting is carried out in orthogonal intersection space direction, through the 3rd condenser lens imaging, area array CCD or face battle array CMOS is adopted to detect; These spectral signals last change electric signal into and import computing machine into, and implement Fourier transform scheduling algorithm processing reconstructed sample image in a computer.
Based on the measuring method of the high precision distance measurement system of cross dispersion spectral domain interferometer, specifically comprise the following steps:
Step one: in reference arm, is fixed on catoptron on a fast offset device, when detecting a certain sample, controlling fast offset device and repeatedly moving, thus the multiple interference signals under obtaining different optical path difference;
Step 2: in feeler arm, uses virtual image phased array and grating pair interference light to carry out cross dispersion light splitting; First with virtual image phased array, first time dispersion light splitting is carried out to interference light; Carry out second time light splitting in that orthogonal direction by grating again, the two-dimentional interference spectrum of the high spectral resolution obtained after twice light splitting is by being obtained by area array CCD or face battle array CMOS detection after a condenser lens;
Step 3: multiple interference spectrums area array CCD or face battle array CMOS being detected to certain sample obtained carry out Fourier transform, obtain multiple signals of this sample, the signal peak the strongest to intensity in these signals carries out bandpass filtering treatment and asks for spectrum phase, calculate the phase differential between these interference spectrums, utilize this phase differential to reconstruct multiple interference spectrum; The sample signal that namely inverse Fourier transform obtains high-fidelity is carried out to this multiple interference spectrum;
Step 4: after obtaining sample signal, extract the signal peak at each interface of sample, try to achieve each independently signal peak spectrum position phase, the phase information of different spectrum channel is utilized to try to achieve corresponding light path difference to each signal peak, pass through analytic operation, optimum is carried out on average to suppress system noise to it, realizes high-precision distance measurement.
The beneficial effect that the present invention has is:
1. propose the complex signal method for reconstructing based on spectrum phase difference, overcome the impact that the factors such as the precision of fast offset device, external environment and aberration are rebuild complex signal.The method has not only expanded double range, and improves the fidelity of sample reconstruction.Not by the impact of remaining mirror image, avoid misreading of measuring process.2. on feeler arm, use the orthogonal sub-ray spectrometer based on virtual image phased array and grating to detect, achieve the detection of ultraspectral resolution, significantly improve measurement range.3. use the measurement method for distance optimizing multi-channel spectral position phase, not only increase the precision of measurement, and avoid single channel and measures the error amplification that may cause.
Accompanying drawing explanation
Fig. 1 is system architecture principle schematic of the present invention;
Fig. 2 is the signal processing flow figure that the present invention asks for phase differential;
Fig. 3 high precision distance measurement principle schematic based on position phase of the present invention;
Embodiment
Below in conjunction with drawings and Examples, the present invention is described further.
As shown in Figure 1, the present invention includes wideband light source 1, optical circulator 2, broadband optical fiber coupler 3, sample arm 17, reference arm 18 and feeler arm 19;
Described sample arm 17 comprises the first fiber collimating lenses 4, first condenser lens 5, plane mirror 6 and fast offset device 7; Described reference arm 18 comprises the second fiber collimating lenses 8, second condenser lens 9 and sample 10; Described feeler arm 19 comprises the 3rd fiber collimating lenses 11, cylindrical focusing lens 12, virtual image phased array 13, grating 14, the 3rd condenser lens 15, area array CCD or face battle array CMOS 16;
Wideband light source 1 low-coherent light out, through optical circulator 2 to broadband optical fiber coupler 3, wherein a road light enters reference arm 17, and another road enters sample arm 18; Enter reference arm 17 part: the light after broadband optical fiber coupler light splitting is after the first fiber collimating lenses 4, be irradiated to the plane mirror 6 be fixed on fast offset device 7 through the first condenser lens 5, the light reflected from plane mirror is back to broadband optical fiber coupler 3 via former road; Enter sample arm 18 part: the light after broadband optical fiber coupler light splitting incides after the second condenser lens 9 through the second fiber collimating lenses 8 and is irradiated to sample 10, and the light of returning from sample reflection is back to broadband optical fiber coupler via former road;
The two-way light returned from sample arm and reference arm is interfered and is entered feeler arm 19 through optical circulator broadband optical fiber coupler, by feeler arm interference light is decomposed into interference spectrum signal and detects; Enter feeler arm 19 part: interference light is through the 3rd fiber collimating lenses 11, incide cylindrical focusing lens 12, emergent light converges to the entrance window of virtual image phased array 13 front surface, from the rear surface outgoing of virtual image phased array, carry out the first order light splitting in spatial domain, reenter and be mapped to grating 14, second level light splitting is carried out in orthogonal intersection space direction, through the 3rd condenser lens 15 imaging, area array CCD or face battle array CMOS 16 is adopted to detect; These spectral signals last change electric signal into and import computing machine into, and implement Fourier transform scheduling algorithm processing reconstructed sample image in a computer.
High precision measurement method for distance based on cross dispersion spectral domain interferometer comprises the following steps:
Step one: in reference arm, is fixed on catoptron on a fast offset device (as piezoelectric transducer), when detecting a certain sample, controlling fast offset device and repeatedly moving, thus the multiple interference signals under obtaining different optical path difference.
Step 2: in feeler arm, uses virtual image phased array and grating pair interference light to carry out cross dispersion light splitting.First little with Free Spectral Range, that spectral resolution is high virtual image phased array carries out first time dispersion light splitting to interference light; Lower by relative spectral resolution, that Free Spectral Range is wider grating carries out second time light splitting in that orthogonal direction again, and the two-dimentional interference spectrum of the high spectral resolution obtained after twice light splitting is by being obtained by area array CCD or face battle array CMOS detection after a condenser lens.
Step 3: Fourier transform is carried out to the multiple interference spectrums detecting certain sample obtained, obtain multiple signals of this sample, the signal peak the strongest to intensity in these signals carries out bandpass filtering treatment and asks for spectrum phase, calculates the phase differential between these interference spectrums.Fig. 2 is the process flow diagram of the phase difference method between two interference spectrums that in the present invention, computation and measurement obtains.Two interference spectrums can be expressed as:
Wherein k is wave number, I
0k () represents direct current signal and autocorrelation signal sum, S (k) is light source power spectral function, R
rand Z
rthe reflectivity of reference arm upper reflector and the distance of its distance broadband optical fiber coupler respectively, R
snand Z
snfor the reflectivity at sample n-th interface and the distance (assumes samples one has N number of interface) of its distance broadband optical fiber coupler,
for initial phase,
for the phase differential that fast offset device and external environment etc. are introduced.Sample message I (the z with mirror image is obtained after Fourier transform is carried out to two interference spectrums, 1) and I (z, 2), bandpass filter is used to choose the peak signal (being assumed to be a jth face) at a representative sample interface, ask for phase place after inverse Fourier transform is carried out to it and separate parcel, obtaining:
Two phase places of trying to achieve subtract each other the phase differential can obtaining these two interference spectrums:
The phase difference method calculated between multiple interference spectrum is identical with the method for the phase differential calculated between two interference spectrums, utilizes this phase differential can reconstruct multiple interference spectrum.The sample signal that namely inverse Fourier transform obtains high-fidelity is carried out to this multiple interference spectrum.
Step 4: after obtaining sample signal, extracts the signal peak at each interface of sample, tries to achieve the spectrum phase of each signal peak
after separating parcel, fitting a straight line is carried out to spectrum and obtain fit phase
as shown in Figure 3, the phase information of different spectrum channel is utilized to try to achieve corresponding light path difference respectively
the OPD corresponding to M the higher wave number of sensitivity is selected to be averaged by threshold method
to suppress system noise, try to achieve high-precision optical path difference, finally realize high-precision distance measurement.
Claims (2)
1., based on the high precision distance measurement system of cross dispersion spectral domain interferometer, comprise wideband light source, optical circulator, broadband optical fiber coupler, sample arm, reference arm and feeler arm;
It is characterized in that: described sample arm comprises the first fiber collimating lenses, the first condenser lens, plane mirror and fast offset device; Described reference arm comprises the second fiber collimating lenses, the second condenser lens and sample; Described feeler arm comprises the 3rd fiber collimating lenses, cylindrical focusing lens, virtual image phased array, grating, the 3rd condenser lens, area array CCD or face battle array CMOS;
Wideband light source low-coherent light out, through optical circulator to broadband optical fiber coupler, wherein a road light enters reference arm, and another road enters sample arm; Enter reference arm part: the light after broadband optical fiber coupler light splitting is after the first fiber collimating lenses, be irradiated to the plane mirror be fixed on fast offset device through the first condenser lens, the light reflected from plane mirror is back to broadband optical fiber coupler via former road; Enter sample arm part: the light after broadband optical fiber coupler light splitting incides after the second condenser lens through the second fiber collimating lenses and is irradiated to sample, and the light of returning from sample reflection is back to broadband optical fiber coupler via former road;
The two-way light returned from sample arm and reference arm forms interference light after interfering broadband optical fiber coupler, enters feeler arm through optical circulator, by feeler arm interference light is decomposed into interference spectrum signal and detects; Enter feeler arm part: interference light is through the 3rd fiber collimating lenses, incide cylindrical focusing lens, emergent light converges to the entrance window of virtual image phased array front surface, from the rear surface outgoing of virtual image phased array, carry out the first order light splitting in spatial domain, reenter and be mapped to grating, second level light splitting is carried out in orthogonal intersection space direction, through the 3rd condenser lens imaging, area array CCD or face battle array CMOS is adopted to detect; These spectral signals last change electric signal into and import computing machine into, and implement Fourier transform scheduling algorithm processing reconstructed sample image in a computer.
2. the measuring method of the high precision distance measurement system based on cross dispersion spectral domain interferometer according to claim 1, is characterized in that, specifically comprise the following steps:
Step one: in reference arm, is fixed on catoptron on a fast offset device, when detecting a certain sample, controlling fast offset device and repeatedly moving, thus the multiple interference signals under obtaining different optical path difference;
Step 2: in feeler arm, uses virtual image phased array and grating pair interference light to carry out cross dispersion light splitting; First with virtual image phased array, first time dispersion light splitting is carried out to interference light; Carry out second time light splitting in that orthogonal direction by grating again, the two-dimentional interference spectrum of the high spectral resolution obtained after twice light splitting is by being obtained by area array CCD or face battle array CMOS detection after a condenser lens;
Step 3: multiple interference spectrums area array CCD or face battle array CMOS being detected to certain sample obtained carry out Fourier transform, obtain multiple signals of this sample, the signal peak the strongest to intensity in these signals carries out bandpass filtering treatment and asks for spectrum phase, calculate the phase differential between these interference spectrums, utilize this phase differential to reconstruct multiple interference spectrum; The sample signal that namely inverse Fourier transform obtains high-fidelity is carried out to this multiple interference spectrum;
Step 4: after obtaining sample signal, extract the signal peak at each interface of sample, try to achieve each independently signal peak spectrum position phase, the phase information of different spectrum channel is utilized to try to achieve corresponding light path difference to each signal peak, pass through analytic operation, optimum is carried out on average to suppress system noise to it, realizes high-precision distance measurement.
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