CN109297434A - Complete deep formula curved surface profile measurement device and control method based on optical coherence tomography - Google Patents
Complete deep formula curved surface profile measurement device and control method based on optical coherence tomography Download PDFInfo
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Abstract
The complete deep formula curved surface profile measurement device that the present invention relates to a kind of based on optical coherence tomography, comprising: SLD light source, convex lens, the first cylindrical lens, the first spectroscope, reference mirror, curved surface profile part to be measured, the second cylindrical lens, reflecting mirror, reflective gratings, cylindrical lens and area array CCD camera；The point light source that the SLD light source issues is collimated light beam by convex lens collimation；The collimated light beam is focused to focal line light beam by the first cylindrical lens, and focal line light beam is divided into the equal two-beam line of intensity by the first spectroscope, a branch of to converge at reference mirror for reference light, a branch of to converge at curved surface profile part to be measured for detection light；Two-beam line is overlapped interferes after reflection, and interfering beam pools interference spectrum by cylindrical lens after the light splitting of space by wavelength through reflective gratings, is acquired by face CCD camera and obtains two-dimentional interference spectrum striped.The high-precision to curved surface profile, non-contact, undamaged Precision measurement may be implemented in the present invention.
Description
Technical field
The present invention relates to optical measurement and technical field of imaging, and in particular to a kind of complete deep formula based on optical coherence tomography
Curved surface profile measurement device and control method.
Background technique
Traditional curved surface profile measurement is mostly the mechanical device by contact, on the high, surface to some required precisions
Processing quality is more demanding, requires the occasion of non-contact testing, and traditional contact is not able to satisfy testing requirements.The present invention with
Two-dimensional frequency optical coherence tomography is testing principle, detects interference fringe picture image contrast for traditional optical coherence tomography
Difference, there are direct current and background interferences, remove direct current and background interference using the method for two step phase-shifting methods, effectively remove interference, mention
High intetference-fit strengthening.Traditional coherent tomographic detection method leads to detection imaging and mirror image since there are complex conjugate mirror images
Overlapping interlocks, and can not effectively distinguish actual imaging and mirror image, traditional way is to will test curved surface to be placed in negative light path or positive light path
Place, this just wastes the imaging and detectability of detection half.Therefore, to existing curved surface profile measurement method carry out understand and
On the basis of research, designs a kind of raising two-dimension spectrum picture contrast, effectively removes DC influence, removal complex conjugate mirror
Picture, high-efficient, precision is high, non-contact, nothing undermines high-resolution curved surface profile measurement device and method with great engineering
Meaning.
Summary of the invention
In view of this, the complete deep formula curved surface profile measurement that the purpose of the present invention is to provide a kind of based on optical coherence tomography
Device and control method realize that measuring speed is fast to the non-cpntact measurement of curved surface profile, and precision is high.
To achieve the above object, the present invention adopts the following technical scheme:
A kind of complete deep formula curved surface profile measurement device based on optical coherence tomography, which includes: SLD light source, convex lens
Mirror, the first cylindrical lens, the first spectroscope, reference mirror, curved surface profile part to be measured, the second cylindrical lens, reflecting mirror, reflective gratings,
Cylindrical lens and area array CCD camera；The point light source that the SLD light source issues is collimated light beam by convex lens collimation；The directional light
Beam is focused to focal line light beam by the first cylindrical lens, and focal line light beam is divided into the equal two-beam line of intensity by the first spectroscope, and one
Beam is that reference light converges at reference mirror, a branch of to converge at curved surface profile part to be measured for detection light；Two-beam line is overlapped after reflection
It interferes, interfering beam pools interference spectrum by cylindrical lens after the light splitting of space by wavelength through reflective gratings, by face CCD
Camera acquisition obtains two-dimentional interference spectrum striped.
Further, it is additionally provided with an electricity driving displacement platform scan module, including electric linear displacement platform and adjustable
Formula sample mounting frame；The electric linear displacement platform can carry out motion control to an axis direction by controller, drive line
Property scanning shift platform perpendicular to detection beam direction movement, thus realize scan-type detect；The adjustable sample installation
Frame can be adjusted curved surface profile part posture to be measured for curved surface profile part to be measured to be fixedly mounted.
Further, it is additionally provided with a phase shifter；The phase shifter is the piezoelectricity controlled by programmable DC voltage source
Ceramics；Reflecting mirror is installed on the piezoelectric ceramics, different electricity is inputted to piezoelectric ceramics by programmable DC voltage source
Pressure, driving piezoelectric ceramics realize nanometer scale displacement.
It further, further include a single-frequency laser light source, one second spectroscope；It is saturating that second spectroscope is set to the second column
Between mirror and reflecting mirror, the Laser emission of single-frequency laser light source transmitting to one light inlet of the second spectroscope.
Further, the single-frequency laser light source, the second spectroscope are used to be whole device two-dimensional spectrometer system wavelength
Calibration introduces characteristic spectral line known to wavelength.
Further, described to be computed by the two-dimentional interference spectrum striped two dimension interference spectrum striped of CCD camera acquisition acquisition
Machine processing, obtains curved surface profile surface information to be measured.
Further, the control method of the complete deep formula curved surface profile measurement device based on optical coherence tomography, feature exist
In, comprising the following steps:
Step S1: by adjusting adjustable sample mounting frame, adjusting curved surface profile part to be measured position and posture, generates dry
Relate to signal；
Step S2: different voltage is inputted to piezoelectric ceramics by programmable DC voltage source, driving piezoelectric ceramics is real
Now determine step pitch displacement, interference fringe image is imaged and is recorded using area array CCD camera image capture module, obtains several
The interference spectrum of group out of phase difference；
Step S3: being transferred to computer for collected interference spectrum, completes two-phase and removes direct current, modified five steps phase-shifting method
Reconstruct the two-dimentional interference spectrum signal of plural form；
Step S4: according to obtained two-dimentional interference spectrum signal, the processing of stripe signal is carried out using image processing software,
The detection curve of curved surface profile part is obtained, the curved surface profile information of entire detection curved surface can be obtained through scanning.
Further, the step S4 specifically:
Step S41: image processing software module first adds Hanning window to the every row pixel light intensity of two-dimentional interference spectrum signal
Function is carried out Fast Fourier Transform (FFT) afterwards, and is corrected using power enhanced to crest frequency, and each row picture is accurately extracted
Vegetarian refreshments Strength Changes frequency；
Step S42: each row pixel Strength Changes frequency is multiplied by after Wavelength calibration and is built determined by spectrometer certainly
System distance resolution obtains the detection curve of curved surface profile part, and the curved surface profile letter of entire detection curved surface can be obtained through scanning
Breath.
Further, specific as follows using the DC influence in two step phase-shifting methods removal imaging signal:
DC terms signal in interference signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2It is not influenced, is being surveyed by optical path difference
Two-dimension spectrum signal I is successively acquired in amount1(k, y) and another two-dimension spectrum signal I obtained after being shifted by phase shifter2(k,y),
Spectral signal can indicate are as follows:
I1(k, y)=| Ir(k,y)|2+|Is(k,y)|2+2|Ir(k,y)||Is(k,y)|cos(Δφ1(k,y))
⑴
I2(k, y)=| Ir(k,y)|2+|Is(k,y)|2+2|Ir(k,y)||Is(k,y)|cos(Δφ2(k,y))
⑵
Wherein k is wave number, and y is the vertical position coordinate for detecting test point on focal line, Δ φ1(k, y) is to acquire for the first time
When reference light and sample light phase angle, Δ φ2When (k, y) is second of acquisition (1) reference light and sample light phase angle, are subtracted by formula
Formula is gone (2) to obtain removal direct current and certainly relevant interference signal:
I3(k, y)=2 | Ir(k,y)||Is(k,y)|cos(Δφ(k,y))
By changing optical path difference to change the phase in interference signal, two groups of spectral signals are subtracted each other, are only included
The two-dimentional interference spectrum of curved surface profile surface position information.
Compared with the prior art, the invention has the following beneficial effects:
Apparatus of the present invention light channel structure is simple, it is easy to accomplish, can be achieved to the high-precision of curved surface profile, non-contact, lossless
The Precision measurement of wound.
Detailed description of the invention
Fig. 1 is the apparatus structure schematic diagram of the embodiment of the present invention.
Fig. 2 is the structural schematic diagram for having removed single-frequency laser light source and the second spectroscopic apparatus of the embodiment of the present invention.
Fig. 3 is that two-dimentional interference fringe and two step phase shift DC processing processes are generated in the embodiment of the present invention, in zero phase
Poor place acquires to obtain two-dimension spectrum I1(k, y) acquires to obtain another two-dimension spectrum I after phase shifter phase shift2(k, y), two spectrum subtract each other to go
Except direct current and the two-dimension spectrum signal of ambient noise.
Fig. 4 is two step phase shift DC processings front and back Contrast on effect in the embodiment of the present invention, can by spectrum picture comparison
Know, after removing direct current and ambient noise, two-dimentional interference fringe picture fringe contrast is improved very much, after being fourier transformed, directly
Flow signal S0It is effectively removed.
Fig. 5 is that five step phase-shifting methods reconstruct plural form spectral manipulation process in the embodiment of the present invention, programmable by controlling
Formula DC voltage source drives the change in displacement of piezoelectric ceramics implementation feature, can be obtained by phase difference after introducing specific optical path difference
Five fixed width interference spectrum (I1(k)、I2(k)、I3(k)、I4(k)、I5(k)) it, thus solves and thus solves two-dimentional interference
Spectrum different wave length light intensity amplitude A (k) and phase (k) obtain the two-dimentional interference spectrum signal of plural form, to the two of reconstruct
Dimension complex signal carries out Fourier transformation and obtains removal direct current and be conjugated mirror image image.
Fig. 6 be in the embodiment of the present invention to the two-dimensional complex number signal of reconstruct carry out Fourier transformation, Spectrum Correction processing and
Scanning obtains the process of entire curved surface profile, to the two-dimensional complex number signal of reconstruct carries out Fourier transformation, Spectrum Correction is handled
The curve controlled location information detected to accurate Strength Changes frequency values multiplied by resolution of ranging, obtains whole after scanning
A curved surface profile spatial information.
In Fig. 1,1-SLD light source, 2- convex lens, 3- cylindrical lens, 4- spectroscope 1,5- reference mirror, 6- phase shifter (piezoelectricity pottery
Porcelain), 7- curved surface profile part to be measured, 8- curved surface profile part mounting rack to be measured, 9- electricity driving displacement platform, 10- cylindrical lens, 11- single-frequency
Laser light source, 12- spectroscope 2,13- reflecting mirror, 14- reflective gratings, 15- cylindrical lens, 16- area array CCD camera.Wherein, 1-
SLD light source and 2- convex lens constitute tungsten halogen lamp light source light source module, 3- cylindrical lens, 4- spectroscope 1,5- reference mirror, 6- phase shift
Device (piezoelectric ceramics), 7- curved surface profile part to be measured and light source constitute Michelson's interferometer module, and 13- reflecting mirror, 14- are reflective
Grating, 15- cylindrical lens and 16- area array CCD camera constitute two-dimensional spectrometer module.
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and embodiments.
Fig. 1 is please referred to, the present invention provides a kind of complete deep formula curved surface profile measurement device based on optical coherence tomography, specifically
It include: SLD light source module, the SLD point light source planoconvex lens collimation of diverging is collimated light beam, is detected for curved surface profile；
Michelson's interferometer module, system include cylindrical lens, spectroscope and reference mirror, and cylindrical lens focus collimated light beam
For focal line, focal line generally includes several hundred to thousands of a test points, and beam splitter is the equal two-beam line of intensity by spectroscope, and one
Shu Zuowei reference light converges at reference mirror, and another Shu Zuowei detection light converges at the curved surface profile table to be measured being mounted on specimen holder
Face, two-beam are overlapped interfere after reflection；
Two-dimensional spectrometer module, system include reflective gratings, cylindrical lens, area array CCD camera, and interfering beam is pressed through grating
Wavelength pools interference spectrum by cylindrical lens after space is divided, and is acquired by face CCD camera and obtains two-dimentional interference spectrum striped；
Electricity driving displacement platform scan module, including electric linear displacement platform and adjustable sample mounting frame, electronic line
Property displacement platform be elaborate servo motor and feed screw nut's vice mechanism, one axis direction can be carried out by computer by controller
Motion control, driving linear scan displacement platform can adjust perpendicular to detection beam direction movement to realize that surface sweeping formula detects
Formula sample mounting frame is the installation of detection curved surface sample piece, stationary fixture, can be adjusted to produce to detection curved surface sample posture
The high interference fringe of raw contrast；
Phase shifter module is the piezoelectric ceramics controlled by programmable DC voltage source, is equipped with reflection on piezoelectric ceramics
Mirror inputs different voltage to piezoelectric ceramics by programmable DC voltage source, and driving piezoelectric ceramics realizes nanometer scale position
It moves；
Computer, for two-dimentional interference fringe image acquisition, the control of transmission module, surface sweeping electricity driving displacement platform, and
The stripe pattern signal for being transferred to computer is stored and processed；
Image processing software module, for handling the stripe pattern signal, including filtering, phase shift, plural number
Signal reconstruction, Fast Fourier Transform (FFT), Spectrum Correction etc. obtain curved surface profile surface information to be measured.
It further include a single-frequency laser light source, one second spectroscope；Second spectroscope is set to the second cylindrical lens and reflection
Between mirror, the Laser emission of single-frequency laser light source transmitting to one light inlet of the second spectroscope；System uses single-frequency laser light
Source is used as from spectrometer wavelength calibration feature light source is built, and the single-frequency laser light source and the second spectroscope are used to be whole device
The calibration of two-dimensional spectrometer system wavelength introduces characteristic spectral line known to wavelength, and detection before need to complete from building two-dimensional spectrometer
System wavelength calibration can remove the single-frequency laser light source and the second spectroscope later, and subsequent detection optical path no longer uses this
Single-frequency laser light source and the second spectroscope.
Start in detection, vertical coordinate calibration need to be carried out to system, to determine that the single pixel point of the camera used is being examined
Physical length vertically representative in survey, method are to be placed in curved surface sample to be measured using measurement object known to length d to pacify
Position is shelved, pixel number s of the measurement object in camera imaging is obtained after camera imaging, then the vertical upper each pixel of system camera
The physical length that point represents is d/s.
In an embodiment of the present invention, the controlling party of the complete deep formula curved surface profile measurement device based on optical coherence tomography
Method, comprising the following steps:
A, for curved surface profile part to be measured position adjustment sample mounting frame and posture, interference signal is generated；
B, different voltage is inputted to piezoelectric ceramics by programmable DC voltage source, driving piezoelectric ceramics realizes fixed step
Away from displacement, interference fringe image is imaged and is recorded using area array CCD camera image capture module, obtains five groups of difference phases
The interference spectrum of potential difference；
C, collected interference fringe image is transferred to computer, completes two-phase and removes direct current, modified five steps phase-shifting method
The two-dimentional interference spectrum signal for reconstructing plural form carries out the processing of stripe signal using image processing software module；
D, image processing software module first adds Hanning window letter to the every row pixel light intensity of collected a series of images
Number carries out Fast Fourier Transform (FFT) (FFT) afterwards, and is corrected using power enhanced to crest frequency, accurately extracts each
Row pixel Strength Changes frequency；
E, image processing software module builds spectrum after each row pixel Strength Changes frequency is multiplied by Wavelength calibration certainly
System distance resolution determined by instrument obtains the detection curve of curved surface profile part, can obtain entire detection curved surface through scanning
Curved surface profile information.
Further, a kind of complete deep formula curved surface profile measurement device based on optical coherence tomography, feature exist
In: in the complete deep formula curved surface profile measurement system of two-dimension optical coherent tomographic, the collected two-dimentional interference pattern of camera is reference light
IrWith sample light IsIt is photosensitive by camera photosensitive element and obtain to interfere vector addition.Reference light IrIt may be expressed as: Ir(k,y)
=Sr(k)ei2kr, wherein k is spectrum wave number, and r is reference light light path, SrIt (k) is the spectral power distributions function of reference light.Sample light
IsIt is represented by Is(k, y)=Ss(k)ei2k(r+n*Δz(y))
Wherein SsIt (k) is the spectral power distributions function of sample light, n is the aerial refractive index of light, and n* Δ z (y) is ginseng
Examine light and sample light optical path difference.Two-dimentional interference fringe I (k, y) may be expressed as:
I (k, y)=| Ir(k,y)|2+|Is(k,y)|2+2|Ir(k,y)||Is(k,y)|cos(Δφ(k,y))
The wherein π n Δ z (y) of Δ φ (k, y)=4 k, Δ z (y) are curved surface wheel of each point on optical path direction on detection focal line
Wide change in depth.
Different voltage is inputted to piezoelectric ceramics by programmable DC voltage source, step pitch is determined in driving piezoelectric ceramics realization
Displacement, obtain five groups of out of phase differences interference spectrum, with modified five steps phase-shifting method reconstruct plural form spectral signal from
And the complex conjugate image signal in imaging signal is removed, complete deep formula detection is realized, to the two-dimentional interference fringe I (k, y) after reconstruct
Every row pixel light intensity carry out Fast Fourier Transform (FFT) (FFT), extract each row pixel Strength Changes frequency, be multiplied by wave
The curved surface profile depth change on optical path direction is obtained from building system distance resolution determined by spectrometer after long calibration
Change Δ z (y), this is complete deep formula curved surface profile measurement testing principle.
In an embodiment of the present invention, straight in interference signal with the DC influence in two step phase-shifting methods removal imaging signal
Flow item signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2It is not influenced by optical path difference, successively acquires two-dimension spectrum in the measurements
Signal I1(k, y) and another two-dimension spectrum signal I obtained after being shifted by phase shifter2(k, y), spectral signal can indicate are as follows:
I1(k, y)=| Ir(k,y)|2+|Is(k,y)|2+2|Ir(k,y)||Is(k,y)|cos(Δφ1(k,y)) ⑴
I2(k, y)=| Ir(k,y)|2+|Is(k,y)|2+2|Ir(k,y)||Is(k,y)|cos(Δφ2(k,y)) ⑵
Wherein k is wave number, and y is the vertical position coordinate for detecting test point on focal line, Δ φ1(k, y) is to acquire for the first time
When reference light and sample light phase angle, Δ φ2When (k, y) is second of acquisition (1) reference light and sample light phase angle, are subtracted by formula
Formula is gone (2) to obtain removal direct current and certainly relevant interference signal:
I3(k, y)=2 | Ir(k,y)||Is(k,y)|cos(Δφ(k,y))
From in expression formula it is found that DC influence and Correlated noises can be completely removed after subtracting each other.This method is by changing
Darkening path difference subtracts each other two groups of spectral signals to change the phase in interference signal, obtains only comprising curved surface profile surface position
The two-dimentional interference spectrum of confidence breath.
In an embodiment of the present invention, for complex conjugate Image interference existing for real discrete Fourier transformation, image signal is logical
Chang Huiyu imaging signal is overlapped to be difficult to effective resolution imaging signal, and traditional way is that the curved surface sample that will test is placed in
The positive light path of optical path or negative light path part, this just wastes the detectability and imaging depth of optical system half, by that can compile
Formula DC voltage source inputs different voltage to piezoelectric ceramics, and driving piezoelectric ceramics realization determines step pitch displacement, obtains five groups not
The interference spectrum of same-phase difference, with the spectral signal of modified five steps phase-shifting method reconstruct plural form to remove in imaging signal
Complex conjugate image signal, realize complete deep formula detection.
It can be obtained by a phase difference when the optical path difference between reference mirror and curved surface profile part to be measured changes, lead to
The change in displacement for controlling programmable DC voltage source driving piezoelectric ceramics implementation feature is crossed, introducing after specific optical path difference can
To obtain five fixed width interference spectrums of phase difference, two-dimentional interference spectrum different wave length light intensity and phase are thus solved.Light intensity
Expression formula are as follows:
Wherein I0(k) it is DC terms signal | Ir(k,y)|2And mutual interference term | Is(k,y)|2The sum of, A (k) is two dimension interference
Spectrum different wave length light intensity, φ (k) are two-dimentional interference spectrum different wave length phase, δ0For the phase difference of phase shift, A (k) cos (φ
(k)-2δ0) it is removal direct current and certainly relevant interference signal.
Solution formula (3) two-dimentional interference spectrum different wave length light intensity and phase:
By adding modifying factor k/k0After obtain revised two-dimentional interference spectrum different wave length light intensity and phase:
It is possible thereby to reconstruct the two-dimentional interference spectrum signal of plural form.
In an embodiment of the present invention, image processing software module is to adopting the two-dimentional interference spectrum for reconstructing plural form
Signal first adds Hanning window function, afterwards carry out Fast Fourier Transform (FFT) (FFT), and using power enhanced to crest frequency into
Row correction, it is accurate to extract Strength Changes frequency.
Power enhanced is to each row pixel Strength Changes frequency calculation formula are as follows:
Wherein, fi 1For the normalized frequency of the i-th frame (i.e. i moment) stripe pattern, GkFor the maximum value of discrete spectrum, k table
Show kth discrete power spectral line, Gk+jFor the value of (k+j) article spectral line, z is spectral line item used by calculating for energy barycenter
Number.I-th frame (i.e. i moment) fringe density diWith normalization fringe frequency fi 1Between calculation formula are as follows:
di=fi 1N
Wherein, N is the pixel number of stripe pattern in the direction of the width.
The foregoing is merely presently preferred embodiments of the present invention, all equivalent changes done according to scope of the present invention patent with
Modification, is all covered by the present invention.
Claims (9)
1. a kind of complete deep formula curved surface profile measurement device based on optical coherence tomography, which is characterized in that the device includes:
It is SLD light source, convex lens, the first cylindrical lens, the first spectroscope, reference mirror, curved surface profile part to be measured, the second cylindrical lens, anti-
Penetrate mirror, reflective gratings, cylindrical lens and area array CCD camera；The point light source that the SLD light source issues is flat by convex lens collimation
Row light beam；The collimated light beam is focused to focal line light beam by the first cylindrical lens, and focal line light beam is divided into intensity phase by the first spectroscope
Deng two-beam line, it is a branch of to converge at reference mirror for reference light, it is a branch of to converge at curved surface profile part to be measured for detection light；Two-beam
Line is overlapped interferes after reflection, and interfering beam is pooled after the light splitting of space by cylindrical lens through reflective gratings by wavelength dry
Spectral line is related to, is acquired by face CCD camera and obtains two-dimentional interference spectrum striped.
2. the complete deep formula curved surface profile measurement device according to claim 1 based on optical coherence tomography, it is characterised in that:
It is additionally provided with an electricity driving displacement platform scan module, including electric linear displacement platform and adjustable sample mounting frame；It is described
Electric linear displacement platform can carry out motion control to an axis direction by controller, and driving linear scan displacement platform is vertical
In detection beam direction movement, to realize that scan-type detects；The adjustable sample mounting frame is to be measured for being fixedly mounted
Curved surface profile part can be adjusted curved surface profile part posture to be measured.
3. the complete deep formula curved surface profile measurement device according to claim 2 based on optical coherence tomography, it is characterised in that:
It is additionally provided with a phase shifter；The phase shifter is the piezoelectric ceramics controlled by programmable DC voltage source；The piezoelectric ceramics
On reflecting mirror is installed, different voltage is inputted to piezoelectric ceramics by programmable DC voltage source, driving piezoelectric ceramics is real
Existing nanometer scale displacement.
4. the complete deep formula curved surface profile measurement device according to claim 1 based on optical coherence tomography, it is characterised in that:
It further include a single-frequency laser light source, one second spectroscope；Second spectroscope is set between the second cylindrical lens and reflecting mirror, institute
The Laser emission of single-frequency laser light source transmitting is stated to one light inlet of the second spectroscope.
5. the complete deep formula curved surface profile measurement device according to claim 4 based on optical coherence tomography, it is characterised in that:
The single-frequency laser light source, the second spectroscope are used to introduce known to wavelength for the calibration of whole device two-dimensional spectrometer system wavelength
Characteristic spectral line.
6. the complete deep formula curved surface profile measurement device according to claim 3 based on optical coherence tomography, it is characterised in that:
It is described to be handled by the two-dimentional interference spectrum striped two dimension interference spectrum striped of CCD camera acquisition acquisition through computer, obtain song to be measured
Facial contour surface information.
7. the control method of the complete deep formula curved surface profile measurement device according to claim 6 based on optical coherence tomography,
Characterized by comprising the following steps:
Step S1: by adjusting adjustable sample mounting frame, adjusting curved surface profile part to be measured position and posture, generates interference letter
Number；
Step S2: different voltage is inputted to piezoelectric ceramics by programmable DC voltage source, it is fixed that driving piezoelectric ceramics is realized
Step pitch displacement, is imaged and is recorded to interference fringe image using area array CCD camera image capture module, and several groups are obtained
The interference spectrum of out of phase difference；
Step S3: being transferred to computer for collected interference spectrum, completes two-phase and goes direct current, modified five steps phase-shifting method reconstruct
The two-dimentional interference spectrum signal of plural form;
Step S4: according to obtained two-dimentional interference spectrum signal, the processing of stripe signal is carried out using image processing software, is obtained
The detection curve of curved surface profile part can obtain the curved surface profile information of entire detection curved surface through scanning.
8. the control method of the complete deep formula curved surface profile measurement device according to claim 7 based on optical coherence tomography,
It is characterized by: the step S4 specifically:
Step S41: image processing software module first adds Hanning window letter to the every row pixel light intensity of two-dimentional interference spectrum signal
Number is carried out Fast Fourier Transform (FFT) afterwards, and is corrected using power enhanced to crest frequency, and each row pixel is accurately extracted
Point Strength Changes frequency;
Step S42: system determined by spectrometer is built certainly after each row pixel Strength Changes frequency is multiplied by Wavelength calibration
Distance resolution obtains the detection curve of curved surface profile part, and the curved surface profile information of entire detection curved surface can be obtained through scanning.
9. the control method of the complete deep formula curved surface profile measurement device according to claim 8 based on optical coherence tomography,
It is characterized by: using the DC influence in two step phase-shifting methods removal imaging signal, it is specific as follows:
DC terms signal in interference signalAnd mutual interference termIt is not influenced by optical path difference, in the measurements successively
Acquire two-dimension spectrum signalAnd another two-dimension spectrum signal obtained after being shifted by phase shifter, spectral signal
It can indicate are as follows:
(1)
(2)
WhereinFor wave number, y is the vertical position coordinate for detecting test point on focal line,Ginseng when to acquire for the first time
Light and sample light phase angle are examined,Reference light and sample light phase angle when being acquired for second, by formulaSubtract formula
Obtain removal direct current and certainly relevant interference signal:
By changing optical path difference to change the phase in interference signal, two groups of spectral signals are subtracted each other, are obtained only comprising curved surface
The two-dimentional interference spectrum of contour surface location information.
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