CN105372041A - Double-grating coaxial focus detection device and double-grating coaxial focus detection method based on LabVIEW - Google Patents
Double-grating coaxial focus detection device and double-grating coaxial focus detection method based on LabVIEW Download PDFInfo
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Abstract
Provided are a double-grating coaxial focus detection device and a double-grating coaxial focus detection method based on LabVIEW. The double-grating coaxial focus detection device is mainly composed of a LabVIEW-based light field intensity detection and focus detection control system, a displacement platform system, a double-grating system, a detected system, a detection module, a power supply, and other modules. The device structure comprises a light source, a collimating lens, a first focusing lens, frosted glass, a reflecting mirror, a second focusing lens, a first grating plate, a second grating plate, a CCD and a computer. The LabVIEW-based light field intensity detection and focus detection control system is employed to process data of a fringe pattern collected by the CCD and calculate the power spectrum. When data processing analysis shows that the second grating plate reaches the focus position, related data is displayed, marked and stored on the computer, thus achieving the function of automatic focus detection. The focus detection method of the invention is quick and precise in detection, simple in structure and easy in operation. The power spectrum of data currently detected is displayed in real time through software, and a corresponding dynamic curve is drawn to facilitate data storage and application expansion.
Description
Technical field
The present invention relates to a kind of autofocusing device of optical system, particularly relate to the coaxial focusing test device of a kind of double grating based on LabVIEW and focusing test method.
Background technology
Biomedical Photonics utilizes photon to study the science of biological phenomena, and it is that photonics and life science are mutually intersected, interpenetrated and the frontier branch of science produced.Biomedical Photonics mainly studies cell function on molecular level and structure, its application in medical science is mainly organized and blood parameters by human body, explore the change of institutional framework and function, and then realize the horizontal disease lossless detection of both macro and micro, Diagnosis and Treat.Such as in the imaging in vivo of human eye retina, adopt adaptive optical technique real-Time Compensation opthalmic optics system aberration, the microvascular high-definition picture of cellula visualis and eyeground can be obtained, thus can these graphical analyses patient pathology be passed through.Or at the automatic detection field of current tubercle bacillus, propose very high requirement to the focusing system of optical microscope, at the design initial stage, the accuracy of the data such as the focal length of optical microphotograph lens head is very crucial.As the nucleus equipment in Biomedical Photonics, the accuracy of detection of optical system is to its decisive role of testing result.In high-precision biomedical optical detection system, the focusing test device of optical system is proposed to the accuracy detection requirement of micron dimension.
Current high-precision optical system focusing test device adopts from shaft type method usually, when tested optical system numerical aperture or size less time, be difficult to carry out good focusing test.Existing focusing test device is mainly used in IC manufacturing industry in optical system focusing test, cost intensive, and complicated operation is not suitable in the focus detection of biomedical optical system.
Summary of the invention
The object of this invention is to provide the coaxial focusing test device of a kind of double grating based on LabVIEW, there is the advantage such as high precision and detection in real time.
Technical solution of the present invention is as follows: the coaxial focusing test device of a kind of double grating based on LabVIEW, detect primarily of the distribution of light intensity based on LabVIEW and form with the module such as focusing test control system, displacement platform system, double grating system, system under test (SUT), detecting module and power supply, it is characterized in that: comprise light source, collimation lens, the first condenser lens, frosted glass, catoptron, the second condenser lens, the first original screen panel, the second grating, CCD successively from light beam incident direction; The first described original screen panel is placed on the first displacement platform, and is positioned on the object plane of tested optical system; The second described grating is placed on the second displacement platform, and is positioned in the image space plane of tested optical system; Described CCD is positioned at the rear of the second original screen panel, and is connected with computing machine by data receiver bus.
Described light source is He-Ne laser instrument;
It is miter angle that described catoptron is placed to primary optic axis, and with the second optical axis also in miter angle;
The first described original screen panel to be dutycycle be 50% phase type line grating, the cycle is p1;
Described tested optical system, when detecting, is fixed on optical system fixed mount;
The second described original screen panel to be dutycycle be 50% phase type line grating, the cycle is p2;
The first described original screen panel and the described parallel placement of the second original screen panel;
The first described displacement platform is connected with computing machine by data-out bus, is subject to computer-controlled piezoelectric ceramic actuator (PZT) and drives, can realize micron order two-dimensional micromotion, be used for the first original screen panel to move into the object plane of tested optical system;
The second described displacement platform is connected with computing machine by data-out bus, is subject to computer-controlled piezoelectric ceramic actuator (PZT) and drives, can realize micron order two-dimensional micromotion, be used for the second original screen panel to move into the image planes of tested optical system;
The distribution of light intensity that described computing machine has been installed based on LabVIEW detects and focusing test Control System Software, for measuring process control, measurement data stores, and carries out treatment and analyses to the interference fringe that CCD gathers, and to controlling the motion state of piezoelectric ceramic actuator (PZT).
The coaxial focusing test method of double grating based on LabVIEW, performing step is as follows:
(1) tested optical system is fixed on optical system fixed mount;
(2) first pupil coordinate demarcation is carried out to detecting module, set up the mapping relations of pupil coordinate and CCD cartesian coordinate system;
(3) adjust the position of light source, collimation lens, the first condenser lens, frosted glass, catoptron and the second condenser lens, make the emergent light of the second condenser lens uniform and stable;
(4) the first original screen panel is arranged on the first displacement platform, makes the first displacement platform move to the true field point position of setting by computer controlled piezoelectric ceramic actuator processed;
(5) detecting module demarcated is arranged on the image planes side of tested optical system, adjusts the second displacement platform and the second original screen panel is aimed at and leveling;
(6) control second by computing machine and move platform, second original screen panel is moved near tested optical system image planes, the distribution of light intensity of LabVIEW software programming is utilized to detect and focusing test control software design, certain data processing is carried out to the interference fringe picture that CCD gathers, calculate the power spectrum of current interference fringe, and show current power Spectral structure figure;
(7) the distribution of light intensity detection based on LabVIEW controls the second displacement platform automatically with focusing test Control System Software, second displacement platform is moved along the second optical axis direction, when Data Management Analysis second original screen panel reaches focal position, show on computers, mark and store related data, thus realize the autofocusing of tested optical system.
The present invention's advantage is compared with prior art:
(1) the autofocusing method that present invention employs based on image procossing directly goes out fringe number according to the graphical analysis obtained, and detection speed is fast, precision is high;
(2) coaxial focusing test method structure of the present invention is simple, and cost is low, convenient operation;
(3) distribution of light intensity that the present invention is based on LabVIEW detects the power spectrum that can show the data of current detection with focusing test control system in real time, and draws corresponding performance graph, is convenient to data and preserves and expansive approach.
Accompanying drawing explanation
Fig. 1 is the double grating coaxial focusing test device composition schematic diagram based on LabVIEW.
Fig. 2 is the coaxial focusing test structure drawing of device of double grating.
Fig. 3 is the first original screen panel schematic diagram;
Fig. 4 is the second original screen panel schematic diagram;
Fig. 5 is the striped schematic diagram that CCD gathers;
Fig. 6 is system program control flow chart.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the invention will be further described.
Find out that the coaxial focusing test apparatus structure of double grating based on LabVIEW comprises by Fig. 2: comprise light source 1, collimation lens 2, first condenser lens 3, frosted glass 4, catoptron 5, second condenser lens 6, first original screen panel 7, second grating 11, CCD13 successively from light beam incident direction; The first described original screen panel 7 is placed on the first displacement platform 8, and is positioned on the object plane of tested optical system 10; The second described grating 11 is placed on the second displacement platform 12, and is positioned in the image space plane of tested optical system 10; Described CCD13 is positioned at the rear of the second original screen panel 11, and is connected with computing machine 16 by data receiver bus 14.
Described light source 1 is He-Ne laser instrument; Described catoptron 5 is placed to primary optic axis 18 in miter angle, and with the second optical axis 19 also in miter angle; The first described displacement platform 8 is connected with computing machine 16 by data-out bus 15, be subject to piezoelectric ceramic actuator (PZT) driving that computing machine 16 controls, micron order two-dimensional micromotion can be realized, be used for the first original screen panel 7 to move into the object plane of tested optical system 10; Described tested optical system 10, when detecting, is fixed on optical system fixed mount 9; The second described displacement platform 12 is connected with computing machine 16 by data-out bus 15, be subject to piezoelectric ceramic actuator (PZT) driving that computing machine 16 controls, micron order two-dimensional micromotion can be realized, be used for the second original screen panel 12 to move into the image planes of tested optical system 10; Described computing machine 16 is for measuring process control, and measurement data stores, and carries out treatment and analyses to the interference fringe that CCD13 gathers, and to controlling the motion state of piezoelectric ceramic actuator (PZT).
Embodiment:
At the automatic detection field of current tubercle bacillus, propose very high requirement to the focusing system of optical microscope, at the design initial stage, the accuracy of the data such as Jiao's length of optical microphotograph lens head is very crucial.Therefore, with numerical aperture be 1.25, enlargement ratio is 10X optical microphotograph lens head is tested optical system, adopts the coaxial focusing test device of the double grating based on image power spectrum of the present invention to measure.
The first described original screen panel 7 for dutycycle be the phase type line grating of 50%, as shown in Figure 3, the cycle is 100 microns; The second described original screen panel 11 for dutycycle be the phase type line grating of 50%, as shown in Figure 4, the cycle is 20 microns; The first described original screen panel 7 and the described parallel placement of the second original screen panel 11; The transmittance function of the first original screen panel 7 and the second original screen panel 11 is respectively:
Wherein, B
nand B
mbe all Fourier coefficient, p1 and p2 is the cycle of the first original screen panel 7 and the second original screen panel 11 respectively.
The coaxial focusing test method of double grating based on image power spectrum, performing step is as follows:
(1) tested optical system 10 is fixed on optical system fixed mount 9;
(2) first pupil coordinate demarcation is carried out to detecting module 17, set up the mapping relations of pupil coordinate and CCD13 cartesian coordinate system;
(3) adjust the position of light source 1, collimation lens 2, first condenser lens 3, frosted glass 4, catoptron 5 and the second condenser lens 6, make the emergent light of the second condenser lens 6 uniform and stable;
(4) the first original screen panel 7 is arranged on the first displacement platform 8, controls piezoelectric ceramic actuator by computing machine 16 and make the first displacement platform 8 move to the true field point position of setting;
(5) detecting module 17 demarcated is arranged on the image planes side of tested optical system 10, adjusts the second displacement platform 9 and second original screen panel 11 is aimed at and leveling;
(6) the second displacement platform 12 is controlled by computing machine 16, second original screen panel 11 is moved near tested optical system image planes, the distribution of light intensity based on LabVIEW is utilized to detect and focusing test Control System Software, certain data processing is carried out to the interference fringe picture that CCD13 gathers, calculate the power spectrum of current interference fringe, and show current power Spectral structure figure;
(7) distribution of light intensity of LabVIEW software programming detects and automatically controls the second displacement platform 12 with focusing test control software design, second displacement platform 12 is moved along the second optical axis 19 direction, when Data Management Analysis second original screen panel 11 reaches focal position, computing machine 16 shows, marks and store related data, thus reach autofocusing function.
The embodiment that distribution of light intensity of the present invention detects and focusing test controls is as shown in accompanying drawing 5 and accompanying drawing 6.When dual-grating interferometer detects, the feature of the upper interference figure of CCD is, when the second original screen panel 11 is positioned at focal position, the interferogram of CCD detection is the circular light spot of uniform intensity, as the situation of accompanying drawing 5 (b).And when the second original screen panel 11 be subject to the second displacement platform 12 move along the second optical axis 19 time, when off-focal position, just there will be interference fringe.The pattern that when second original screen panel 11 is before and after focus, CCD detection arrives is respectively as accompanying drawing 5 (a) and accompanying drawing 5 (c).Striated pattern signal on CCD13 passes through Serial Port Transmission data in real time to computing machine 16, LabVIEW software programming distribution of light intensity is utilized to detect and focusing test Control System Software, Fourier transform is carried out to interference fringe picture, and try to achieve power spectrum, display current power spectrum, and be depicted as X-Y scheme, as shown in accompanying drawing 5 (d) ~ (f) curve map.
The described detection of the distribution of light intensity based on LabVIEW and the system chart of focusing test control system are as shown in Figure 6, system after initialization, the second displacement platform 12 is controlled by computing machine 16, second original screen panel 11 is moved 1 micron along the second optical axis 19 near tested optical system 10 side, CCD13 gathers interference fringe picture, and passing through data input bus (DIB) 14 by data upload to computing machine, computing machine carries out process to interferogram data and tries to achieve power spectrum, and the power spectrum of image is
|F(u，v)|
2＝F(u，v)·F
*(u，v)，
Wherein, F (u, the v) Fourier transform that is image.Power spectrum is the key character of image, and its size reflects the intensity of each spatial frequency of image.For convenience of the comparison of the power spectrum of different images, the power spectrum two-dimensional power spectrum of image being converted to one dimension is
Wherein, n
ρfor radius size coordinate points number, η
2gradation of image mean value square, be N
2represent image total pixel number.Then draw power spectrum chart and display in real time, analysis is carried out to obtained power spectrum and judges, if meet focus place feature, judge that the position of current second original screen panel 11 is exactly focal position.If do not meet focus place power spectrum density feature, then control the second displacement platform 12 by computing machine 16, by the second original screen panel 11 along mobile 1 micron again, the second optical axis, repeat said process until terminate.Utilize the distribution of light intensity analysis software with alternating interface between man and computer of LabVIEW software programming, all result of determination are carried out Treatment Analysis, mark focal position, and the power spectrum of interferogram in whole control procedure is depicted as X-Y scheme shows.
Those of ordinary skill in the art should be realized that, above embodiment is only used to the present invention is described, and not as limitation of the invention, as long as in spirit of the present invention, to change and the distortion of the above embodiment, within the scope all belonging to claims of the present invention.
Claims (1)
1. the coaxial focusing test device of the double grating based on LabVIEW and focusing test method, detect primarily of the distribution of light intensity based on LabVIEW and form with the module such as focusing test control system, displacement platform system, double grating system, system under test (SUT), detecting module and power supply, it is characterized in that: comprise light source (1), collimation lens (2), the first condenser lens (3), frosted glass (4), catoptron (5), the second condenser lens (6), the first original screen panel (7), the second grating (11), CCD (13) successively from light beam incident direction; Described the first original screen panel (7) is placed on the first displacement platform (8), and is positioned on the object plane of tested optical system (10); Described the second grating (11) is placed on the second displacement platform (12), and is positioned in the image space plane of tested optical system (10); Described CCD (13) is positioned at the rear of the second original screen panel (11), and is connected with computing machine (16) by data receiver bus (14); Utilize this device to carry out the method for focusing test to tested optical system (10), it is characterized in that the step of the method is as follows:
1. tested optical system (10) is fixed on optical system fixed mount (9);
2. first pupil coordinate demarcation is carried out to detecting module (17), set up the mapping relations of pupil coordinate and CCD (13) cartesian coordinate system;
3. adjust the position of light source (1), collimation lens (2), the first condenser lens (3), frosted glass (4), catoptron (5) and the second condenser lens (6), make the emergent light of the second condenser lens (6) uniform and stable;
4. the first original screen panel (7) is arranged on the first displacement platform (8), controls piezoelectric ceramic actuator by computing machine (16) and make the first displacement platform (8) move to the true field point position of setting;
5. the detecting module demarcated (17) is arranged on the image planes side of tested optical system (10), adjusts the second displacement platform (9) and the second original screen panel (11) is aimed at and leveling;
6. the second displacement platform (12) is controlled by computing machine (16), second original screen panel (11) is moved near tested optical system image planes, the distribution of light intensity based on LabVIEW is utilized to detect and focusing test Control System Software, interference fringe picture is gathered to CCD (13) and carries out certain data processing, calculate the power spectrum of current interference fringe, and show current power Spectral structure figure;
7. the distribution of light intensity of LabVIEW software programming detects and automatically controls the second displacement platform (12) with focusing test control software design, second displacement platform (12) is moved along the second optical axis (19) direction, when Data Management Analysis second original screen panel (11) reaches focal position, in the upper display of computing machine (16), mark and store related data, thus reaching autofocusing function.
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Cited By (4)
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| CN106131436A (en) * | 2016-08-25 | 2016-11-16 | 中国科学院长春光学精密机械与物理研究所 | The focusing test device of a kind of aerial camera and focusing test method |
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| CN115185100A (en) * | 2022-06-22 | 2022-10-14 | 成都飞机工业（集团）有限责任公司 | Method for generating encrypted dot-matrix light field |
| CN115185100B (en) * | 2022-06-22 | 2023-08-04 | 成都飞机工业（集团）有限责任公司 | Encryption lattice type light field generation method |
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