CN202101652U

CN202101652U - Autocollimation measuring instrument

Info

Publication number: CN202101652U
Application number: CN2011201195884U
Authority: CN
Inventors: 王亮亮; 逯兴莲; 张振一
Original assignee: University of Shanghai for Science and Technology
Current assignee: University of Shanghai for Science and Technology
Priority date: 2011-04-21
Filing date: 2011-04-21
Publication date: 2012-01-04
Anticipated expiration: 2021-04-21

Abstract

The utility model discloses an autocollimation measuring instrument, comprising a light source, a focusing lens, a collimation objective, a light splitting prism, a CCD (charge coupled device) objective and a planar array CCD. The autocollimation measuring instrument is characterized in that the light source comprises four laser light sources symmetrically distributed on four quadrants in the same plane. In the autocollimation measuring instrument, light rays emitted from the four laser light sources symmetrically distributed enter the four quadrants of a coordinate system where the measured plane is located; and the planarity of the measured plane is detected by respectively judging the differences of image points and calibrated image points of the four light sources on the planar array CCD in a position coordinate. The autocollimation measuring instrument is applicable to the condition that the measured plane is concave or convex.

Description

A kind of self-collimation measurement appearance

Technical field

The utility model relates to a kind of optical gauge, relates in particular to a kind of novel self-collimation measurement appearance.

Background technology

The self-collimation measurement appearance is to utilize the optical autocollimating principle to carry out the important kind of measurement instrument of small angle measurement; Because it has very high precision and resolution; So be widely applied in measurement of angle, plane planeness measure, axle is that aspects such as measurement are rocked at the angle, the for example detection of the vertical parallel degree of the surface smoothing of the levelness of platform, rail and levelness, house sidings etc.

Difference according to reading device; The self-collimation measurement appearance is divided into the optical-autocollimator that uses the micrometer eyepiece reading device, replaces artificial aiming to the photoelectric auto-collimator of line and based on the digital autocollimator of DSP, CCD or CMOS technology with photoelectronic collimating to line, and their measuring accuracy and measurement range etc. are also different.When measurement plane was spent, general autocollimator only was applicable to the situation when integral plane relative standard plane inclination, does not show slightly recessed or protruding situation and be suitable for tested plane.

The utility model content

The utility model technical matters to be solved is to overcome existing autocollimator not to be suitable for the deficiency of measuring the plane that shows slightly recessed or protruding; A kind of novel self-collimation measurement appearance is provided; It is through the mode of multimetering; Not only can utilize the mode of averaging to measure the side-play amount of integral plane relative standard plane inclination, can also measure the side-play amount on relative standard plane when showing slightly recessed or protruding, plane.

The technical scheme that its technical matters of the utility model solution is taked is following:

A kind of self-collimation measurement appearance is made up of light source, condenser lens, collimator objective, Amici prism, CCD object lens and area array CCD, it is characterized in that, said light source comprises four LASER Light Sources that are symmetrically distributed on four quadrants in same plane.

The area array CCD of the described self-collimation measurement appearance of the utility model adopts the CCD electrooptical device.

Because the light source of the said self-collimation measurement appearance of the utility model is made up of four LASER Light Sources that are symmetrically distributed; Therefore as long as try to achieve four image point positions that LASER Light Source forms under the align mode on the area array CCD; And then the offset direction and the size that record the formed picture point in tested plane and calibrate image point position; Can confirm angle and the concavo-convex side-play amount of tested plane with respect to standard flat, thus the measurement of the concavo-convex side-play amount in plane that the existing self-collimation measurement appearance of completion can't be accomplished.

Description of drawings

Fig. 1 is the structural representation of the utility model.

Fig. 2 is distribution of light sources figure.

Fig. 3 is the area array CCD synoptic diagram.

Fig. 4 is for measuring process flow diagram.

Fig. 5 receives synoptic diagram for area array CCD.

Among the figure,

1 light source, 2 condenser lenses, 3 planes to be measured, 4 collimator objectives, 5 Amici prisms, 6CCD object lens, 7 area array CCDs.

Embodiment

Combine specific embodiment and accompanying drawing that the utility model is done an explanation at present.

At first see also the structural representation of Fig. 1 the utility model, diagram self-collimation measurement appearance is made up of light source 1, condenser lens 2, collimator objective 4, Amici prism 5, CCD object lens 6 and area array CCD 7.See also Fig. 2 again; Said light source 1 comprises four LASER Light Source A, B, C, the D that is symmetrically distributed on four quadrants in same plane; This four LASER Light Source A, B, C, D are distributed on the same circle, and its position is symmetrical, and penetrate parallel beam respectively; This four LASER Light Source A, B, C, D are the suitable semiconductor laser of power, are furnished with the light source calibration device that can carry out three-dimensional regulation simultaneously.Said condenser lens 2 and Amici prism 5 longitudinally are sequentially arranged in the place ahead of light source 1; Said Amici prism 5 is a semi-transparent semi-reflecting right-angle prism; Said collimator objective 4 laterally is arranged at the left of Amici prism 5; Said CCD object lens 6 laterally are set in turn in the right-hand of Amici prism 5 with area array CCD 7, are the T font system light path of intersection point thereby form with Amici prism 5.All light path members are packaged in the physical construction fully, are convenient outdoor measurement, adopt IP66 specification waterproof measure, and electroplate rush-resisting material at the apparatus structure outside surface, and for keeping whole parallel nature, all screw threads adopt heavy caliber center symmetry six screws.Said area array CCD 7 adopts the CCD electrooptical device, and has wherein embedded the testing software that is used for the high speed image data processing.During work, four bundle collimated laser beams focus on through condenser lens 2 earlier, and 5 reflections are penetrated by collimator objective 4 through the right angle Amici prism again; Light beam arrives plane 3 to be tested after the former road of total reflection is returned, and passes through collimator objective 4 then, and transmission, finally arrives area array CCD 7 surfaces and forms picture point everywhere again through CCD object lens 6 through Amici prism 5.Fig. 3 represented when tested plane 3 during for the ideal plane, on the area array CCD 7 under align mode the calibration picture point O of the correspondence of formation respectively of four LASER Light Source A, B, C, D institute ₁, O ₂, O ₃And O ₄

Because each start, light source center and mechanical wear all have atomic little uncertainty, and is minimum for making its ambiguity drop to, and the said self-collimation measurement appearance of the utility model also disposes a high precision standard flat calibration device.After long-time the use; Should regularly carry out the maintainability calibration of instrument, the alignment mechanism of instrument adopts mechanically calibrated and two steps of software calibration, with the long-term external influence factor that causes such as use of patching machine wearing and tearing, laser instrument; Thereby improve measurement mechanism, obtain measured value more accurately.When the utility model is used for surface finish measurement, can match the surfaceness test member; During test; Can area array CCD 7 be installed on the slip steel ball platform; When battle array CCD7 slides on the object measured surface face to face; The coarse steel ball that causes of measured surface moves up and down, and is passed to area array CCD 7, at this moment just can judge the surfaceness of this object measured surface according to the center RMS changing value of light source eye point.

The principle of work of the said self-collimation measurement appearance of the utility model is summarized as follows.Under the situation of selecting calibration, instrument at first carries out basic instrument parameter to be set, and like measurement environment, probe temperature etc., calibration plane adopts desirable standard flat, thereby obtains calibration picture point O on the area array CCD 7 ₁, O ₂, O ₃And O ₄Position coordinates.Start process of measurement then, see that Fig. 4 measures process flow diagram.After program began, whether the user can select to calibrate or quit a program through interruption, if select termination routine, then system stops.The parameter that the calibration back is obtained covers initial parameter, gets back to afterwards in the proper testing program.Order according to first, second, third and fourth quadrant calculates picture point A ', B ', C ' and the D ' and calibration picture point O that LASER Light Source A, B, C, D form one by one on area array CCD 7 ₁, O ₂, O ₃And O ₄The position difference.If tested plane is standard flat, then four picture point A ', B ', C ' and D ' should be respectively with area array CCD 7 on calibration picture point O ₁, O ₂, O ₃And O ₄Overlap; If 4 can not overlap fully, as shown in Figure 5, the picture point A ' of LASER Light Source A is O relatively ₁Skew occurs, show that tested plane first quartile part has skew with respect to standard flat, and become the shape of convex surface, other quadrant also can be done similar analysis.The data that have four picture point offset directions and size information are sent to computing machine through serial ports or wireless module; Convert angle value afterwards respectively to; Through software data are carried out post-processed again, to measure the side-play amount of tested plane more accurately with respect to standard flat.

Claims

1. a self-collimation measurement appearance is made up of light source, condenser lens, collimator objective, Amici prism, CCD object lens and area array CCD, it is characterized in that, said light source comprises four LASER Light Sources that are symmetrically distributed on four quadrants in same plane.

2. self-collimation measurement appearance according to claim 1 is characterized in that, said area array CCD adopts the CCD electrooptical device.