CN103674498B - A kind of grating sampling parameter detection device - Google Patents
A kind of grating sampling parameter detection device Download PDFInfo
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- CN103674498B CN103674498B CN201410007108.3A CN201410007108A CN103674498B CN 103674498 B CN103674498 B CN 103674498B CN 201410007108 A CN201410007108 A CN 201410007108A CN 103674498 B CN103674498 B CN 103674498B
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Abstract
The invention provides a kind of grating sampling parameter detection device, the measurement light that light source sends forms umbilical point light source after small-bore plus lens and optical filtering hole, then grating is incident to, to be converged after large collimated through soft aperture slot vertical incidence to flat mirror reflects through the measuring beam of grating, grating etched surface is back to by the measurement Guang Anyuan road of flat mirror reflects, " zero level " and " one-level " diffraction light is obtained again through grating etched surface diffraction, wherein, power meter I is incident to after the sampled mirror I of " zero level " light and sampling mirror II sampling, " one-level " light is directly transmitted in the power meter II be fixed on grating scale, beam energy and the position of " zero level " and " one-level " point diffraction is received respectively by control data real-time acquisition system, by calculating the measured value of each sampling parameters.The present invention have simple to operate, measure high, the measuring repeatability of efficiency and the high feature of stability.
Description
Technical field
The invention belongs to optical element checkout equipment field, be specifically related to a kind of fullaperture test field being applicable to beam sampling grating sampling parameter.
Background technology
In the final-optics focusing system of high-power laser driver, adopt beam sampling grating (BeamSamplingGrating, hereinafter referred to as grating) frequency tripled laser of transmission is sampled by a certain percentage, again sample beam is sent in energy meter and carry out energy diagnostic, and calculate the gross energy of Output of laser with the sampling luminous energy of diagnosis.Therefore, the high-power laser driver that the accuracy direct relation of sample beam energy calculates exports the accuracy of gross energy.On the one hand, as the key element of energy samples, the sampling efficiency of grating directly determines the energy of sample beam, and the deviation of sampling efficiency easily causes sample beam energy to depart from energy meter responding range, cause the unreliable of diagnostic data, even may cause the situation that energy meter damages.On the other hand, sampling angle and the sampling distance direct relation of grating the installation positioning precision of grating in high-power laser driver, thus ensure that sample beam is incident to prescribed energy by designing requirement.Therefore, must measure its sampling parameters before grating uses, evaluate the qualification of grating with objective correct measurement data.This, for raising grating processing technology level, ensures that the reliability that element uses has important meaning.
For the measurement of grating sampling parameter, not only need to measure grating etching central area, the more important thing is the consistance of the real use state ensureing measuring state and grating.When this just requires to measure, when measuring beam should use by grating is actual, identical incident angle and beam size are incident to the side to light of grating.At present, the optical path that grating sampling parameter detecting means Shi Ge process unit or applying unit are built temporarily, there is more problem, comprising: (1) measuring beam bore is much smaller than grating clear aperture, and its measurement result only can represent the sampling parameters situation of zonule; (2) measuring beam is not incident to grating by use angle, causes there is relatively large deviation when measurement result and actual use; (3) optical path temporarily built has instability, and measurement result comparability is poor.And the sampling parameters fullaperture test device of beam sampling grating, its principle measures based on grating mask exposure and the actual service condition of grating, be characterized in the unified measurement that can realize grating sampling parameter, measuring state can simulate grating real use state completely.Meanwhile, this measurement device possesses the features such as noncontact, nothing is destructive, safe and reliable, measuring accuracy is high, operating cost is low.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of grating sampling parameter detection device.
Grating sampling parameter detection device of the present invention, be characterized in: the measuring beam that the laser instrument in described pick-up unit sends is reflexed to small-bore plus lens by reflecting prism, then optical filtering hole is converged at, umbilical point light source is formed after filtration after unthreaded hole, then grating is incident to, through grating measuring beam by heavy caliber plus lens collimation after through soft aperture slot again vertical incidence to level crossing, grating etched surface is back to by the measurement Guang Anyuan road of flat mirror reflects, " zero level " and " one-level " diffraction light is obtained again through grating etched surface diffraction, wherein, power meter I is incident to after the sampled mirror I of " zero level " light and sampling mirror II sampling, " one-level " diffraction light is directly transmitted to the power meter II be fixed on grating scale, focal spot microscopic system can be utilized to observe " one-level " diffraction light focal spot state, beam energy and the position of " zero level " and " one-level " point diffraction is received respectively by control data real-time acquisition system, by calculating the measured value of each sampling parameters.
Described laser output beam wavelength is 351nm.
Described soft aperture slot is installed in two-dimension translational mechanism, and the moving direction of two-dimension translational mechanism is parallel with plane mirror.
Described sampling mirror I and the reflectivity of sampling mirror II are 4%; The transmissivity of small-bore plus lens and heavy caliber plus lens is all greater than 80%.
Pick-up unit of the present invention has the adjustable function in " one-level " diffractive spots location determination, real time data acquisition and process, measuring beam bore and position, and this device is simple to operate simultaneously, has higher measuring repeatability and repdocutbility.
The principle of the device of grating sampling parameter fullaperture test of the present invention is, the measuring beam that laser instrument sends is reflexed to small-bore plus lens by reflecting prism, then optical filtering hole is converged at, umbilical point light source is formed after filtration after unthreaded hole, then grating is incident to, measuring beam through grating is collimated by heavy caliber plus lens, again after soft aperture slot vertical incidence to level crossing, grating etched surface is back to by the measurement Guang Anyuan road of flat mirror reflects, " zero level " and " one-level " diffraction light is obtained again through grating etched surface diffraction, wherein, power meter I is incident to after the sampled mirror I of " zero level " diffraction light and sampling mirror II sampling, " one-level " diffraction light is directly transmitted to the power meter II be fixed on grating scale, focal spot microscopic system can be utilized to observe " one-level " diffraction light focal spot state, beam energy and the position of " zero level " and " one-level " diffraction focus is received respectively by control data real-time acquisition system, by calculating the measured value of each sampling parameters.
Measuring process is: the power 1) by accurately measuring " zero level " and " one-level " diffraction light realizes the measurement of the sampling efficiency of grating; 2) accurately locate " zero level " and " one-level " point diffraction position by grating scale and realize the sampling efficiency of grating and the accurate measurement of sampling distance; 3) adopt soft aperture slot control survey beam size, the clear aperture of measuring beam all standing grating to be measured can be made, measuring beam bore can be made again to diminish and reach the object measuring grating zones of different sampling efficiency.Measurement mechanism comprises laser instrument, reflecting prism, small-bore plus lens, optical filtering hole, grating, heavy caliber plus lens, soft aperture slot, level crossing, graticule, focal spot microscopic system, sampling mirror I, sampling mirror II, power meter I, grating scale, power meter II, two-dimension translational mechanism.
Adopt the good laser instrument of monochromaticity as measurement light source, laser output beam wavelength is 351nm, also can select other laser instruments with the actual use consistent wavelength of beam sampling grating.
Power meter I and power meter II is positioned over the focal position of " zero level " and " one-level " diffraction light respectively, and meanwhile, power meter II to be installed on grating scale and can to realize precise 2-D and moves.According to the power ratio of power meter I and power meter II, calculate the energy ratio (i.e. the sampling efficiency of grating) of " zero level " and " one-level " diffraction light.The position of " one-level " diffraction light focus is obtained, by can be calculated the angle (i.e. the sampling angle of grating) between " zero level " and " one-level " diffraction light according to the reading of grating scale; The sampling distance of grating can be obtained according to grating scale reading.
Focal spot microscopic system is installed on grating etching center with on the extended line of " one-level " diffraction light focus line, for observing " one-level " diffraction focus condition, also can be monitored " one-level " diffraction light focus by CCD.
Small-bore plus lens and heavy caliber plus lens realize confocal installation, ensure that measuring beam becomes directional light after plus lens and heavy caliber plus lens.
Optical filtering hole is installed on small-bore plus lens focal position, for filtering parasitic light.
Soft aperture slot is installed in two-dimension translational mechanism, realizes two-dimension translational by Electric Machine Control.When the sampling efficiency uniformity measurement of grating, two-dimension translational mechanism drives soft aperture slot to realize two-dimensional movement, measures the sampling efficiency of grating zones of different.
The invention has the beneficial effects as follows: can fullaperture test grating sampling parameter, the measuring state of grating and its real use state completely the same, measurement result has higher repeatability and repdocutbility.Adopt focal spot microscopic system location " one-level " diffractive spots, focal spot positioning error can be reduced, ensure the accuracy of testing result.Measuring beam bore is adjustable, is convenient to the sampling parameters in also measure local region.These function i ntegration, on the device of grating sampling parameter fullaperture test, easily use.
Accompanying drawing explanation
Fig. 1 is grating sampling parameter detection device structural representation of the present invention;
In figure, 1. the small-bore plus lens 4. of laser instrument 2. reflecting prism 3. filters hole 5. grating 6. to be measured heavy caliber plus lens 7. soft aperture slot 8. level crossing 9. graticule 10. focal spot microscopic system 11. sampling mirror I12. sampling mirror II13. power meter I14. grating scale 15. power meter II16. two-dimension translational mechanism.
Embodiment
As shown in Figure 1, grating sampling parameter detection device of the present invention, containing laser instrument 1, reflecting prism 2, small-bore plus lens 3, optical filtering hole 4, grating 5, heavy caliber plus lens 6, soft aperture slot 7, level crossing 8, graticule 9, focal spot microscopic system 10, sampling mirror I11, sampling mirror II12, power meter I13, grating scale 14, power meter II15, two-dimension translational mechanism 16.Grating sampling parameter detection device is characterised in that: the measuring beam that laser instrument 1 sends is reflexed to small-bore plus lens 3 by reflecting prism 2, then optical filtering hole 4 is converged at, umbilical point light source is formed after filtration after unthreaded hole 4, then grating 5 is incident to, through soft aperture slot 7 after being collimated by heavy caliber plus lens 6 through the measuring beam of grating, then vertical incidence is to level crossing 8, grating 5 etched surface is back to by the measurement Guang Anyuan road that level crossing 8 reflects, " zero level " and " one-level " diffraction light is obtained again through grating 5 etched surface diffraction, wherein, power meter I13 is incident to after the sampled mirror I11 of " zero level " light and sampling mirror II12 sampling, " one-level " diffraction light is directly transmitted to the power meter II15 be fixed on grating scale 14, focal spot microscopic system 10 can be utilized to observe " one-level " diffraction light focal spot state, by beam energy and the position of Real-time Collection " zero level " and " one-level " point diffraction, by calculating the measured value of each sampling parameters.
The position of " one-level " diffraction light focus can utilize focal spot microscopic system 10 to observe, and CCD also can be adopted to replace realizing digital image monitor.
The power ratio that the sampling efficiency of grating is detected by power meter I13 and power meter II14 is determined; The sampling angle of grating and the value of sampling distance, " one-level " diffraction light focal position that can show according to grating scale 15 calculates.
Soft aperture slot 7 is for control survey beam size and position, and be installed in two-dimension translational mechanism 16, when measuring sampling efficiency, soft aperture slot 7 is shifted out optical path by two-dimension translational mechanism 16, make all standing of measuring beam energy on the clear aperture of grating, realize the unified measurement of sampling efficiency, sampling angle, sampling distance; When measuring sampling efficiency homogeneity, two-dimension translational mechanism 16 is by soft aperture slot 7 shift-in optical path, make soft aperture slot 7 can control measuring beam bore, calculate the sampling efficiency of this region grating according to the reading of power meter I and power meter II, then realize the measurement of zones of different sampling efficiency in grating clear aperture through the two-dimensional movement of soft aperture slot 7.
Claims (4)
1. a grating sampling parameter detection device, it is characterized in that: the measuring beam that the laser instrument (1) in described pick-up unit sends is reflexed to small-bore plus lens (3) by reflecting prism (2), then optical filtering hole (4) is converged at, umbilical point light source is formed after filtration after unthreaded hole, then grating (5) is incident to, through grating measuring beam by heavy caliber plus lens (6) collimation after through soft aperture slot (7) again vertical incidence to level crossing (8), grating (5) etched surface is back to by the measurement Guang Anyuan road that level crossing (8) reflects, " zero level " and " one-level " diffraction light is obtained again through grating (5) etched surface diffraction, wherein, the sampled mirror I(11 of " zero level " light) and sampling mirror II(12) sampling after be incident to power meter I (13), " one-level " diffraction light is directly transmitted to the power meter II (15) be fixed on grating scale (14), focal spot microscopic system (10) is utilized to observe " one-level " diffraction light focal spot state, beam energy and the position of " zero level " and " one-level " point diffraction is received respectively by control data real-time acquisition system, by calculating the measured value of sampling parameters, described sampling parameters is sampling efficiency, sampling angle, sampling distance.
2. grating sampling parameter detection device according to claim 1, is characterized in that: described laser instrument (1) output beam wavelength is 351nm.
3. grating sampling parameter detection device according to claim 1, it is characterized in that: described soft aperture slot (7) is installed in two-dimension translational mechanism (16), the moving direction of two-dimension translational mechanism (16) is parallel with level crossing (8).
4. grating sampling parameter detection device according to claim 1, is characterized in that: described sampling mirror I(11) and sampling mirror II(12) reflectivity be 4%; The transmissivity of small-bore plus lens (3) and heavy caliber plus lens (6) is all greater than 80%.
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| CN105716833B (en) * | 2014-12-02 | 2017-12-15 | 中国科学院大连化学物理研究所 | The measurement apparatus of infrared balzed grating, diffraction efficiency in a kind of |
| CN108548660B (en) * | 2018-03-26 | 2019-11-15 | 中国科学院西安光学精密机械研究所 | Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method |
| CN109141891A (en) * | 2018-09-10 | 2019-01-04 | 南京航空航天大学 | A kind of sighting device damaging light-gas gun for simulating hard object |
| CN112859359B (en) * | 2021-02-05 | 2022-02-08 | 中国工程物理研究院激光聚变研究中心 | Focal spot control method |
| CN116222984B (en) * | 2023-05-09 | 2023-07-25 | 上海隐冠半导体技术有限公司 | Grating ruler reflectivity measuring device |
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