CN113091658A - Laser diffraction surface roughness profiler based on area array charge coupled device - Google Patents
Laser diffraction surface roughness profiler based on area array charge coupled device Download PDFInfo
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- CN113091658A CN113091658A CN202110390006.4A CN202110390006A CN113091658A CN 113091658 A CN113091658 A CN 113091658A CN 202110390006 A CN202110390006 A CN 202110390006A CN 113091658 A CN113091658 A CN 113091658A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
A laser diffraction surface roughness profiler based on an area array charge coupled device is a contact type surface roughness profiler, and comprises a contact pin contacted with the surface of a measured body, a driving control system for controlling the contact pin to move on the surface of the measured body, a displacement sensing assembly and an information processing system, and is characterized in that: the displacement sensing assembly comprises a laser diffraction optical system with an optical path which can be extended and retracted and driven by a contact pin, and an area array charge coupled device arranged at the tail end of the extensible optical path. The invention combines the contact pin and the laser diffraction optical system into an integrated detector, obviously reduces the mechanical error between the contact pin and the displacement sensing component, is not easily influenced by environmental factors including temperature, humidity, atmospheric pressure and vibration, and has high measurement precision. Compared with the existing capacitive displacement sensor and inductive displacement sensor, the method has the advantages of no influence of edge effect and parasitic capacitance on measurement parameters, large dynamic range, capability of being used for measuring the shape of the curved surface, and low price.
Description
Technical Field
The invention relates to a laser measuring instrument, in particular to a laser diffraction surface roughness profiler based on an area array charge coupled device.
Background
Most of surface roughness contourmeters widely applied to mechanical engineering measurement adopt a contact pin type displacement sensor to acquire information on the surface of a measured object through a contact pin and the displacement sensor, finally, a displacement signal of the contact pin is converted into an electric signal through a capacitive displacement sensor or an inductive displacement sensor, then the electric signal is converted into a digital signal through an analog circuit in an analog-digital mode, the digital signal is led into a computer to be processed through corresponding software to obtain surface roughness parameters, and the acquired high-frequency signal and low-frequency signal are respectively analyzed through computer software to correspondingly detect the surface roughness and the surface contour shape of the measured object. The common defects of the existing capacitive displacement sensor and the inductive displacement sensor are that the dynamic range is small, the sensor can only be used for measuring the appearance of the surface which is a straight line along a prime line, and the analysis of the appearance of a curved surface cannot be carried out. In addition, the capacitive displacement sensor has the defects of edge effect, influence of parasitic capacitance and high requirement on the measurement environment. A high-precision displacement sensor based on the Michelson interference principle, which is proposed by Taylor-Hobson of England, has the standard quantity of 632mm of laser wavelength of helium-neon (He-Ne), the dynamic measurement range of +/-3 mm and the resolution of 0.010 mu m, and can be used for measuring the surface topography of a spherical surface, an elliptical surface and a hyperboloid surface. However, such a high-precision displacement sensor has a long optical path and a complicated system, and the standard quantity is a laser wavelength, is easily affected by environmental factors including temperature, humidity, atmospheric pressure and vibration, and is expensive.
Disclosure of Invention
The invention aims to solve the technical problem of making up the defects in the prior art and provides a laser diffraction surface roughness profiler based on an area array charge coupled device.
The technical problem of the invention is solved by the following technical scheme.
The laser diffraction surface roughness profiler based on the area array charge coupled device is a contact type surface roughness profiler and comprises a contact pin contacted with the surface of a measured body, a driving control system for controlling the contact pin to move on the surface of the measured body, a displacement sensing assembly and an information processing system.
The laser diffraction surface roughness profiler based on the area array charge coupled device is characterized in that:
the displacement sensing assembly comprises a laser diffraction optical system with an optical path which is telescopic and driven by a contact pin and an area array Charge Coupled Device (CCD) arranged at the tail end of the telescopic optical path, the laser diffraction optical system with the optical path which is telescopic and driven by the contact pin collects the surface roughness and the displacement information of the outline of a measured object, the displacement information is closely and positively correlated with the change of the length of the telescopic optical path, the change of the length of the telescopic optical path is closely and positively correlated with the change of the intensity of Fraunhofer diffracted light sent by the laser diffraction optical system, the area array CCD receives the Fraunhofer diffracted light sent by the laser diffraction optical system, Fraunhofer diffraction stripes are formed on the area array CCD, the intensity of light corresponding to the displacement information is converted into electric signals to be provided to the information processing system for processing, and the existing capacitance displacement sensor and the area array CCD are completely replaced, The inductive displacement sensor realizes the measurement of the surface roughness and the profile of the measured object. The contact pin and the laser diffraction optical system are combined into an integrated detector, mechanical errors between the contact pin and the displacement sensing assembly are obviously reduced, the integrated detector is not easily influenced by environmental factors including temperature, humidity, atmospheric pressure and vibration, and the measurement precision is high. Compared with the existing capacitive displacement sensor and inductive displacement sensor, the method has the advantages of no influence of edge effect and parasitic capacitance on measurement parameters, large dynamic range, capability of being used for measuring the shape of the curved surface, and low price.
The technical problem of the present invention is solved by the following further technical solutions.
The laser diffraction optical system with the telescopic optical path comprises a laser fixed at the tail end of the contact pin, at least one front lens, a barrier plate with a slit, a rear lens and at least two compression springs which are arranged in sequence from low to high along the same vertical axis and are fixed at the tail end of the contact pin, the compression springs are arranged between the rear lens and the area array CCD to form the telescopic optical path, the laser, the front lens, the barrier plate with the slit and the rear lens form the laser diffraction optical system, the front lens enables light generated by the laser to be transmitted and converged on a focal point of a middle lens, the middle lens enables the light which is converged on the focal point through the front lens to be emitted into the slit of the barrier plate with the slit in parallel to generate a Fraunhoff diffraction phenomenon, and the rear lens enables diffracted light which is transmitted through the slit of the barrier plate with the slit to be focused on the area array CCD through the telescopic optical path, the Fraunhofer diffraction fringes are displayed on the area array CCD, the compression spring is a spiral spring bearing pressure, when signals are collected, the position of the area array CCD is fixed, the compression spring maintains the distance between the contact pin and the area array CCD in a static state, namely the length of the telescopic optical path, and the driving control system controls the distance between the tip of the contact pin and the area array CCD to be correspondingly changed when the tip of the contact pin moves on the surface of a measured body and is contacted with the measured body to generate vertical displacement, so that the length of the telescopic optical path can be changed by driving the compression spring to be changed in a telescopic mode. The Fraunhofer diffraction fringe interval is in linear positive correlation with the length of the telescopic optical path, when the length of the telescopic optical path is increased, the Fraunhofer diffraction fringe interval is also increased, when the length of the telescopic optical path is decreased, the Fraunhofer diffraction fringe interval is also decreased, the interval of the Fraunhofer diffraction fringes is detected through the area array CCD, the change of the length of the telescopic optical path can be calculated, and the change of the length of the telescopic optical path is the displacement of the detected body measured by the needle point of the contact needle because the position of the area array CCD is fixed.
The laser probe is characterized in that an acquisition platform is arranged, the contact pin is arranged on the bottom surface of the acquisition platform, a laser fixed at the tail end of the contact pin, at least one front lens, a barrier plate with a slit, a rear lens and a driving control system for controlling the contact pin to move on the surface of a measured body are arranged in the acquisition platform, and the acquisition platform and the contact pin move together in the surface roughness and contour measurement process and move along with the contact pin in the vertical direction.
The surface array CCD detector is characterized by further comprising a detection platform, the area array CCD is installed on the bottom surface of the detection platform, the information processing system is installed in the detection platform, and the detection platform serves as a reference height in the surface roughness and contour measurement process and cannot move along with the contact pins in the vertical direction.
The information processing system includes a signal processing circuit and a signal analysis algorithm.
The signal processing circuit comprises an amplifying circuit, an analog-to-digital conversion circuit, a differential circuit, a filter circuit, a noise reduction circuit, an extraction circuit and a calculation circuit. The amplifying circuit is used for amplifying an analog signal; the analog-to-digital conversion circuit is used for converting an analog signal into a digital signal; the differential circuit is used for eliminating the system error output by the area array CCD; the filter circuit is used for analyzing a light intensity signal output by the area array CCD; the noise reduction circuit is used for eliminating peripheral circuit noise, wire noise and power supply noise; the extraction circuit is used for extracting a high-frequency signal corresponding to the surface roughness of the measured body and a low-frequency signal corresponding to the surface contour shape of the measured body; the calculation circuit is used for calculating the change of the light intensity distribution position; the signal analysis algorithm is used for performing Fast Fourier Transform (FFT) on the extracted signals, converting the signals from a time domain to a frequency domain, eliminating the frequency domain where noise is located, improving the linearity of high-frequency signals and low-frequency signals, giving measurement results of the surface roughness and the contour of the measured body, and displaying images of the surface roughness and the low contour shape of the measured body in the upper computer.
The technical problem of the present invention is solved by the following further technical solutions.
The area array CCD is an area array CCD with the model number of A504k produced by Basler (Basler) company in Germany, the highest frame rate at the maximum resolution is 500 fps, the resolution is 1280 multiplied by 1024, and the area array CCD is suitable for high-resolution image acquisition and outputs the format: camera Link interface, 10 taps, 8 bits.
The driving control system comprises a servo motor and a servo controller, wherein the servo motor controls the feeding motion of the roughness contourgraph, and controls the number of driving pulses input into the servo motor by changing digital signals input into the servo controller so as to control the rotating speed of the servo motor.
The at least one front lens comprises a front lens and at least one middle lens, and the middle lens and the front lens form a collimating lens group to change laser generated by the laser into a parallel collimated light beam.
The front lens, the middle lens and the rear lens are all convex lens plates.
Preferably, the laser is a helium-neon laser generating light with a wavelength of about 632.8nm, the length of the corresponding telescopic optical path is shorter, the overall size of the instrument can be reduced, and the helium-neon laser has good monochromaticity, reliable performance, convenient manufacture and lower cost.
Preferably, the at least one intermediate lens is a sheet of intermediate lens.
Preferably, the barrier plate with the slit is a barrier plate with a single slit, and the barrier plate with the single slit generates a single slit fraunhofer diffraction phenomenon.
Preferably, the at least two compression springs are two compression springs.
The tip of the stylus is one of a conical diamond tip and a pyramidal diamond tip.
Compared with the prior art, the invention has the beneficial effects that:
the invention combines the contact pin and the laser diffraction optical system into an integrated detector, obviously reduces the mechanical error between the contact pin and the displacement sensing component, is not easily influenced by environmental factors including temperature, humidity, atmospheric pressure and vibration, and has high measurement precision. Compared with the existing capacitive displacement sensor and inductive displacement sensor, the method has the advantages of no influence of edge effect and parasitic capacitance on measurement parameters, large dynamic range, capability of being used for measuring the shape of the curved surface, and low price.
Drawings
FIG. 1 is a schematic compositional diagram of an embodiment of the present invention;
fig. 2 is a schematic composition diagram of the laser diffraction optical system in fig. 1.
The reference numbers in fig. 1 and 2 are as follows:
1-a stylus; 2-collection platform; 3-a laser diffraction optical system; 4-compression spring; 5-area array CCD;
6-detection platform; 7-helium-neon lasers; 8-a front lens; 9-a middle lens; 10-barrier plate with slit; 11-rear lens.
Detailed Description
The present invention will be described with reference to the following embodiments and drawings.
A laser diffraction surface roughness profiler based on an area array charge coupled device as shown in figure 1 and figure 2 is a contact type surface roughness profiler, and comprises a contact pin 1, a driving control system, a displacement sensing assembly and an information processing system, wherein the contact pin 1 is a conical diamond tip and is in contact with the surface of a measured body, and the driving control system controls the contact pin 1 to move on the surface of the measured body.
The displacement sensing assembly comprises a laser diffraction optical system with an optical path which can be extended and retracted and driven by a contact pin 1, and an area array CCD5 which is arranged at the tail end of the extensible optical path, wherein displacement information is closely and positively correlated with the change of the length of the extensible optical path, the change of the length of the extensible optical path is closely and positively correlated with the change of the intensity of Fraunhofer diffraction light sent by the laser diffraction optical system, the area array CCD5 receives the Fraunhofer diffraction light sent by the laser diffraction optical system, Fraunhofer diffraction stripes are formed on the area array CCD5, the intensity of light corresponding to the displacement information is converted into electric signals to be provided for an information processing system to be processed, and the measurement of the surface roughness and the outline of the measured body.
The area array CCD5 is an area array CCD of type a504k manufactured by Basler (baseler) of germany, the highest frame rate at the time of maximum resolution is 500 fps, the resolution is 1280 × 1024, and the CCD is suitable for image acquisition with high resolution, and the output format is: camera Link interface, 10 taps, 8 bits.
The optical path telescopic laser diffraction optical system comprises a helium-neon laser 7, a front lens 8, a middle lens 9, a barrier plate 10 with a single slit, a rear lens 11 and two compression springs 4 which are arranged in sequence from low to high along the same vertical axis and fixed at the tail end of a contact pin 1 and form telescopic optical paths between the rear lens 11 and an area array CCD5, wherein the helium-neon laser 7, the front lens 8, the middle lens 9, the barrier plate 10 with the single slit and the rear lens 11 form a laser diffraction optical system 3. The helium-neon laser 7 generates laser with the wavelength of 632.8nm, the length of a corresponding telescopic optical path is short, the whole volume of the instrument can be reduced, and the helium-neon laser has good monochromaticity, reliable performance, convenient manufacture and low cost. The front lens 8, the middle lens 9 and the rear lens 11 are all convex lenses, the middle lens 9 and the front lens 8 form a collimating lens group, the front lens 8 enables light generated by the He-Ne laser 7 to be transmitted and converged on a focal point of the middle lens 9, the middle lens 9 enables the light which is converged on the focal point through the front lens 8 to be changed into a parallel collimated light column, the parallel collimated light column enters a slit of a barrier plate 10 with a single slit to generate a single slit Fraunhofer diffraction phenomenon, the rear lens 11 enables diffracted light which is transmitted through the single slit of the barrier plate 10 with the single slit to be focused on an area array CCD5 through a telescopic optical path, a single slit Fraunhofer diffraction stripe is displayed on the area array CCD5, the compression spring 4 is a spiral spring bearing pressure towards a contact pin, the position of the area array CCD5 is fixed when signals are collected, the compression spring 4 maintains the distance between 1 and the area array CCD5 in a static state, the length of the telescopic optical path can be calculated by detecting the Fraunhofer diffraction fringe interval through the area array CCD5, and the change of the length of the telescopic optical path is obtained because the position of the area array CCD5 is fixed and the change of the length of the telescopic optical path is the displacement of the measured body measured by the needle point of the contact needle 1.
The device is provided with an acquisition platform 2, a contact pin 1 is arranged on the bottom surface of the acquisition platform 2, a helium-neon laser 7, a front lens 8, a middle lens 9, a barrier plate 10 with a single slit, a rear lens 11 and a driving control system for controlling the contact pin 1 to move on the surface of a measured object are arranged in the acquisition platform 2, the acquisition platform 2 and the contact pin 1 move together in the surface roughness and contour measurement process, and the contact pin 1 displaces in the vertical direction.
The drive control system comprises a servo motor and a servo control driver, wherein the servo motor controls the feed motion of the roughness contourgraph, and controls the number of drive pulses input into the servo motor by changing digital signals input into the servo controller so as to control the rotating speed of the servo motor.
The surface roughness and contour measuring device is characterized by further comprising a detection platform 6, the area array CCD5 is installed on the bottom surface of the detection platform 6, the information processing system is installed in the detection platform 6, the detection platform serves as a reference height in the surface roughness and contour measuring process and cannot move along with the contact pins in the vertical direction, the information processing system comprises a signal processing circuit and a signal analysis algorithm, and the signal processing circuit comprises an amplifying circuit, an analog-to-digital conversion circuit, a differential circuit, a filter circuit, a noise reduction circuit, an extraction circuit and a calculation circuit. The amplifying circuit is used for amplifying the analog signal; the analog-to-digital conversion circuit is used for converting the analog signal into a digital signal; the differential circuit is used for eliminating the system error output by the area array CCD; the filter circuit is used for analyzing a light intensity signal output by the area array CCD; the noise reduction circuit is used for eliminating peripheral circuit noise, wire noise and power supply noise; the extraction circuit is used for extracting a high-frequency signal corresponding to the surface roughness of the measured body and a low-frequency signal corresponding to the surface contour shape of the measured body; the calculating circuit is used for calculating the change of the light intensity distribution position; the signal analysis algorithm is used for carrying out FFT on the extracted signals, converting the signals from a time domain to a frequency domain, eliminating the frequency domain where noise is located, improving the linearity of high-frequency signals and low-frequency signals, giving measurement results of the surface roughness and the contour of the measured object, and displaying images of the surface roughness and the low contour shape of the measured object in the upper computer.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several equivalent substitutions or obvious modifications, which are equivalent in performance or use, without departing from the inventive concept, should be considered as falling within the scope of the present invention as defined by the appended claims.
Claims (10)
1. A laser diffraction surface roughness profiler based on an area array charge coupled device is a contact type surface roughness profiler, and comprises a contact pin contacted with the surface of a measured body, a driving control system for controlling the contact pin to move on the surface of the measured body, a displacement sensing assembly and an information processing system, and is characterized in that:
the displacement sensing assembly comprises a laser diffraction optical system with a telescopic optical path driven by a contact pin and an area array Charge Coupled Device (CCD) arranged at the tail end of the telescopic optical path, the laser diffraction optical system with the telescopic optical path driven by the contact pin collects the surface roughness and the displacement information of the profile of the measured body, the area array CCD receives Fraunhofer diffraction light sent by the laser diffraction optical system, Fraunhofer diffraction stripes are formed on the area array CCD, and the intensity of light corresponding to the displacement information is converted into an electric signal to be provided for the information processing system to process.
2. The area array charge coupled device based laser diffraction surface roughness profiler as set forth in claim 1, wherein:
the laser diffraction optical system with the telescopic optical path comprises a laser, at least one front lens, a barrier plate with a slit, a rear lens and at least two compression springs, wherein the laser, the barrier plate with the slit and the rear lens are sequentially arranged from low to high along the same vertical axis and are fixed at the tail end of the contact pin, the compression springs are arranged between the rear lens and the area array CCD to form the telescopic optical path, the laser, the at least one front lens, the barrier plate with the slit and the rear lens form the laser diffraction optical system, Fraunhofer diffraction fringes are formed on the area array CCD, the compression springs are spiral springs bearing the pressure, the compression springs maintain the distance between the contact pin and the area array CCD in a static state and can stretch the length of the optical path, and the driving control system controls the needle tip of the contact pin to move in the vertical direction when the surface of a tested body is in contact with the tested body, the distance between the needle tip of the contact needle and the area array CCD changes correspondingly, the compression spring is driven to stretch and contract, namely the length of the telescopic optical path changes, and the change of the length of the telescopic optical path is the displacement of the measured body measured by the needle tip of the contact needle.
3. The area array charge coupled device based laser diffraction surface roughness profiler as set forth in claim 1, wherein:
the laser probe is characterized in that an acquisition platform is arranged, the contact pin is arranged on the bottom surface of the acquisition platform, a laser fixed at the tail end of the contact pin, at least one front lens, a barrier plate with a slit, a rear lens and a driving control system for controlling the contact pin to move on the surface of a measured body are arranged in the acquisition platform, and the acquisition platform and the contact pin move together in the surface roughness and contour measurement process and move along with the contact pin in the vertical direction.
4. The area array charge coupled device based laser diffraction surface roughness profiler as set forth in claim 1, wherein:
the surface array CCD detector is characterized by further comprising a detection platform, the area array CCD is installed on the bottom surface of the detection platform, the information processing system is installed in the detection platform, and the detection platform serves as a reference height in the surface roughness and contour measurement process and cannot move along with the contact pins in the vertical direction.
5. The area array charge coupled device based laser diffraction surface roughness profiler as claimed in claim 1 or 4, wherein:
the information processing system comprises a signal processing circuit and a signal analysis algorithm;
the signal processing circuit comprises an amplifying circuit, an analog-to-digital conversion circuit, a differential circuit, a filter circuit, a noise reduction circuit, an extraction circuit and a calculation circuit;
the amplifying circuit is used for amplifying an analog signal;
the analog-to-digital conversion circuit is used for converting an analog signal into a digital signal;
the differential circuit is used for eliminating the system error output by the area array CCD;
the filter circuit is used for analyzing a light intensity signal output by the area array CCD;
the noise reduction circuit is used for eliminating peripheral circuit noise, wire noise and power supply noise;
the extraction circuit is used for extracting a high-frequency signal corresponding to the surface roughness of the measured body and a low-frequency signal corresponding to the surface contour shape of the measured body;
the calculation circuit is used for calculating the change of the light intensity distribution position;
the signal analysis algorithm is used for carrying out Fast Fourier Transform (FFT) on the extracted signals, converting the signals from a time domain to a frequency domain, eliminating the frequency domain where noise is located, improving the linearity of high-frequency signals and low-frequency signals, giving measurement results of the surface roughness and the contour of the measured object, and displaying images of the surface roughness and the low contour shape of the measured object in the upper computer.
6. The area array charge coupled device based laser diffraction surface roughness profiler as claimed in claim 1, 2 or 4, wherein:
the area array CCD is an area array CCD with the model number of A504 k.
7. The area array charge coupled device based laser diffraction surface roughness profiler as set forth in claim 1, wherein:
the drive control system comprises a servo motor and a servo controller.
8. The area array charge coupled device based laser diffraction surface roughness profiler as set forth in claim 2, wherein:
the at least one front lens comprises a front lens and at least one middle lens, and the middle lens and the front lens form a collimating lens group;
the front lens, the middle lens and the rear lens are all convex lens plates.
9. The area array charge coupled device based laser diffraction surface roughness profiler as set forth in claim 2, wherein:
the laser is a helium-neon laser generating a wavelength of about 632.8 nm;
the at least one intermediate lens is a sheet of intermediate lens;
the barrier plate with the slit is a barrier plate with a single slit, and the barrier plate with the single slit generates a single slit Fraunhofer diffraction phenomenon;
the at least two compression springs are two compression springs.
10. The area array charge coupled device based laser diffraction surface roughness profiler as claimed in claim 1, 2 or 3, wherein:
the tip of the stylus is one of a conical diamond tip and a pyramidal diamond tip.
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